CN101277577A - Electrode device for spouting electric slurry as well as system thereof - Google Patents
Electrode device for spouting electric slurry as well as system thereof Download PDFInfo
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- CN101277577A CN101277577A CNA2007100906270A CN200710090627A CN101277577A CN 101277577 A CN101277577 A CN 101277577A CN A2007100906270 A CNA2007100906270 A CN A2007100906270A CN 200710090627 A CN200710090627 A CN 200710090627A CN 101277577 A CN101277577 A CN 101277577A
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Abstract
The present invention provides an electric slurry jet electrode device and its system. The electric slurry jet electrode device comprises a locating base, a porcelain tube, a disk and a high voltage metal electrode, the disk is provided with a plurality of inclined holes which are slantways run through, a dielectric substance discharge slurry area is provided between the high voltage metal electrode and the porcelain tube, the device further comprises a rotary base, a chassis and a grounding electrode, a low temperature non-balanced slurry area is formed between the grounding electrode and the high voltage metal electrode, a nozzle head having a magnetic around it is mounted on the bottom of the chassis; thus, the design ensures the stronger slurry generate and flowingly forms a turbulent mode, rotatablely ejecting by the nozzle head, thereby improving the processing area and evenness of the electric slurry. The electric slurry jet electrode system fixes at least one electric slurry jet electrode by a supporter, greatly enhancing the processing area of the electric slurry, and improving the functions of cooling, introduction, film coating and etching and the like of the parts.
Description
Technical field
The present invention relates to a kind of electricity slurry jet flow electrode assembly, do not relate to a kind of unbalanced electricity that can under low-temperature atmosphere-pressure, produce and starch jet flow, and can improve electricity slurry processing area and uniformity, the electricity slurry jet flow electrode assembly and the system thereof of the surface of the work treatment effect that enables to reach better.
Background technology
Utilize gas ionization (electricity slurry) principle in recent years, remove pollutant successively in research and development with the gaseous oxidation method, electronic beam method (Electron Beam) for example, corona discharge method (CoronaDischarge), microwave method (Microwave), high frequency electricity slurry (Radio Frequency, RF), dielectric medium electric discharge (Dielectric Barrier Discharge, DBD) etc., be proved all and had certain treatment effect really, wherein, the dielectric medium electric discharge is because can effectively discharge under normal pressure, and cost is lower, for present non-thermoelectric slurry is removed one of research main flow of pollutant, and this dielectric medium electricity slurry electric discharge has been widely used in plastic film and has printed processing, ore static screen separators, ozone generation device, surfaction, surface clean, the treatment project of radioactive waste and discharging waste gas etc. etc., only, this non-thermoelectric slurry still belongs to higher temperature state, and processing for surface of the work, still have the shortcoming of a Pian Chu a corner and treatment effect inequality, still remain further to be improved.
Summary of the invention
The objective of the invention is to, a kind of electricity slurry jet flow electrode assembly of new structure is provided, technical problem to be solved is to make it can produce unbalanced electricity slurry jet flow under low-temperature atmosphere-pressure, and can improve electricity slurry processing area and uniformity, can reach better surface of the work treatment effect, thereby be very suitable for practicality.
Another object of the present invention is to, a kind of electricity slurry jet flow electrode system of new structure is provided, technical problem to be solved is that it is fixed at least one electricity slurry jet flow electrode assembly by a support, and can significantly increase the processing area that electricity is starched, and can provide, thereby be suitable for practicality more to functions such as work-piece cools, guiding, plated film and etchings.
The object of the invention to solve the technical problems realizes by the following technical solutions.Starch the jet flow electrode assembly according to a kind of electricity that the present invention proposes, it has a positioning seat, one earthenware is set in this positioning seat, one disk is set in this earthenware, lay the inclined hole that at least one inclination runs through on this disk, one high-pressure metal electrode is set in this disk, form dielectric medium discharge electricity slurry zone between this high-pressure metal electrode and this earthenware, the bottom of this positioning seat is provided with a chassis, the inwall on this chassis is provided with a grounding electrode, form the electric slurry of low temperature unbalanced zone between this grounding electrode and this high-pressure metal electrode, the bottom on this chassis is provided with a nozzle head, in order to low temperature unbalanced electricity slurry is sprayed.
The object of the invention to solve the technical problems also realizes by the following technical solutions.Starch the jet flow electrode assembly according to a kind of electricity that the present invention proposes, it has a positioning seat, one earthenware is set in this positioning seat, one disk is set in this earthenware, lay at least one open-work on this disk, one high-pressure metal electrode is set in this disk, form dielectric medium discharge electricity slurry zone between this high-pressure metal electrode and this earthenware, this positioning seat side face is provided with a rotating seat, make this positioning seat be rotated motion with respect to this rotating seat, the bottom of this rotating seat is provided with a chassis, the inwall on this chassis is provided with a grounding electrode, form the electric slurry of low temperature unbalanced zone between this grounding electrode and this high-pressure metal electrode, the bottom on this chassis is provided with a nozzle head, in order to low temperature unbalanced electricity slurry is sprayed.
Aforesaid electricity slurry jet flow electrode assembly, formed dielectric medium discharge electricity slurry zone has a spacing between wherein said high-pressure metal electrode and this earthenware, and wherein, feeding the voltage of this high-pressure metal electrode and the ratio range of this spacing is between 1 to 5.
Aforesaid electricity slurry jet flow electrode assembly, formed low temperature unbalanced electricity slurry zone has a spacing between wherein said high-pressure metal electrode and this grounding electrode, and feeding the voltage of this high-pressure metal electrode and the ratio range of this spacing is between 1 to 5.
Aforesaid electricity slurry jet flow electrode assembly, one top cover is set on the wherein said positioning seat, one screw is set in this top cover, one tracheae is set in this screw, the top of this high-pressure metal electrode is provided with a joint, continues an electric wire is set in this joint, and this electric wire is passed by this tracheae and continues to a high-tension electricity end, form the space between this tracheae and this electric wire, outside air and plasma manufacture gas can be entered in this earthenware by this tracheae react.
Aforesaid electricity slurry jet flow electrode assembly, be provided with an internal thread in the wherein said disk, and the top side face of this high-pressure metal electrode is provided with an external screw thread, the external screw thread of this high-pressure metal electrode is arranged in the internal thread of this disk, wherein lay the inclined hole that a plurality of inclinations run through on this disk, it is the angle of inclination that is equidirectional 45 degree.
Aforesaid electricity slurry jet flow electrode assembly, the side face of wherein said positioning seat is provided with an outer groove, at this outer groove place one bearing is set, the inwall of this rotating seat is provided with an inner groove, the inner groove of this rotating seat is set on this bearing, makes this positioning seat be rotated motion with respect to this rotating seat.
Aforesaid electricity slurry jet flow electrode assembly is provided with at least one inclined hole on the wherein said nozzle head, this inclined hole distributes with diffusion type or radiation wire.
Aforesaid electricity slurry jet flow electrode assembly, the outlet of wherein said flat nozzle head is an in-line.
Aforesaid electricity slurry jet flow electrode assembly, it also further comprises a magnetic, be positioned at this nozzle head around, provide a magnetic field to this nozzle head.
Aforesaid electricity slurry jet flow electrode assembly, wherein said high-pressure metal electrode is to be a hollow circular cylinder.
Aforesaid electricity slurry jet flow electrode assembly, this device further comprises a predecessor flow controller, is in order to provide and to control a predecessor to this low temperature unbalanced electricity slurry zone, to make this device can be applied to plated film or etch process.
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions.
A kind of electricity slurry jet flow electrode system, it comprises at least just like claim 1 or 2 described electricity slurry jet flow electrode assemblies, and a support, and this support is in order to fix this electricity slurry jet flow electrode assembly.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid electric slurry jet flow electrode system wherein more comprises a plurality of electricity slurry jet flow electrode assemblies, and these a plurality of electricity are starched jet flow electrode assemblies with linear or planar arrangement, and are arranged on this support.
Aforesaid electricity slurry jet flow electrode system, it more comprises a cooling device, is arranged at a side of this support, in order to cool off the handled workpiece of this electricity slurry jet flow electrode system, wherein this cooling device is to be a ventilation type cooling device.
Aforesaid electricity slurry jet flow electrode system, it more comprises a guiding device, is connected in this support below, moves along a predetermined direction in order to guide this support, wherein this guiding device is to be a roller.
Aforesaid electricity slurry jet flow electrode system wherein more comprises a guiding device, is connected in this support below, moves along a predetermined direction in order to guide this support.
The present invention compared with prior art has tangible advantage and beneficial effect.As known from the above, for achieving the above object, the invention provides a kind of electricity slurry jet flow electrode assembly, it has a positioning seat, one earthenware is set in positioning seat, one disk is set in the earthenware, lay the inclined hole that several inclinations run through on the disk, a high-pressure metal electrode is set in the disk, form dielectric medium discharge electricity slurry zone between high-pressure metal electrode and earthenware, the positioning seat side face is provided with a rotating seat, the rotating seat bottom is provided with a chassis, and the chassis inwall is provided with a grounding electrode, forms low temperature unbalanced electricity slurry zone between grounding electrode and high-pressure metal electrode, the bottom, chassis is provided with a nozzle head, and several inclined holes are set on the nozzle head.
By technique scheme, the present invention's electricity slurry jet flow electrode assembly and system thereof have following advantage and beneficial effect at least:
The design of mat said structure, can couple a wire to power supply unit, electric wiring can be transmitted produce the interchange high-frequency and high-voltage electric power that the electricity slurry uses, and with chassis earth, the atmosphere of low-temperature atmosphere-pressure and plasma manufacture gas are then entered by tracheae, and flowing through the regional electricity slurry that is produced of dielectric medium discharge electricity slurry via the inclined hole of being laid on the disk is atomized the electricity slurry in turbulent mode, and at follow-up low temperature unbalanced electricity slurry zone generation low temperature unbalanced electricity slurry, and add inclined hole jet flow design by the nozzle head pivoting mechanism, with low-temperature atmosphere-pressure unbalanced electricity slurry rotation ejection, can change electricity slurry processing area and uniformity, be very suitable for practicality.
The present invention's electricity slurry jet flow electrode assembly and system thereof, the processing area and the uniformity of low-temperature atmosphere-pressure unbalanced electricity slurry have been improved effectively, make the utilization category of electricity slurry jet flow electrode assembly wider, not only can be in order to cleaning, can also be used for etching, improve the industry application surface of electric slurry jet flow electrode assembly and system thereof, had industrial value.
In sum, the invention relates to a kind of electricity slurry jet flow electrode assembly and system thereof.This electricity slurry jet flow electrode assembly, have a positioning seat, an earthenware, a disk and a high-pressure metal electrode, be laid with the inclined hole that several inclinations run through on the disk, form dielectric medium discharge electricity slurry zone between high-pressure metal electrode and earthenware, this device more comprises a rotating seat, a chassis and a grounding electrode, form low temperature unbalanced electricity slurry zone between grounding electrode and high-pressure metal electrode, have the magnetic nozzle head around the bottom, chassis is provided with one; Design by this can make more forceful electric power slurry generation and flow to form turbulent mode, and spray by the nozzle head rotation, can improve electricity slurry processing area and uniformity.This electricity slurry jet flow electrode system is fixed at least one electricity slurry jet flow electrode assembly by a support, can significantly increase electricity slurry processing area, and can provide functions such as work-piece cools, guiding, plated film and etchings.The present invention has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on the structure of product or function, obvious improvement is arranged technically, and produced handy and practical effect, thereby be suitable for practicality more, and have the extensive value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the generalized section of electricity slurry jet flow electrode assembly of the present invention.
Fig. 2 is the schematic perspective view of disk in the electricity slurry jet flow electrode assembly of the present invention.
Fig. 3 is the generalized section of electricity slurry running in the electricity slurry jet flow electrode assembly of the present invention.
Fig. 4 is the generalized section of another electricity slurry jet flow electrode assembly of the present invention.
Fig. 5 is the generalized section of an electricity slurry jet flow electrode assembly more of the present invention.
Fig. 6 is the schematic perspective view of electricity slurry jet flow electrode system of the present invention.
Fig. 7 is the schematic top plan view of electricity slurry jet flow electrode system among Fig. 6.
Fig. 8 is the schematic perspective view of another electricity slurry jet flow electrode system of the present invention.
Fig. 9 is the schematic top plan view of electricity slurry jet flow electrode system among Fig. 8.
Figure 10 sets up the schematic perspective view of cooling device for electricity slurry jet flow electrode system of the present invention.
Figure 11 is the side-looking generalized section of electricity slurry jet flow electrode system among Figure 10.
Figure 12 sets up the schematic perspective view of guiding device for electricity slurry jet flow electrode system of the present invention.
10: positioning seat 11: inner groove
12: outer groove 13: bearing
20: earthenware 21: inner groove
30: disk 31: inclined hole
40: high-pressure metal electrode 401: stratum's groove
41: connector 411: stratum's groove
42: electric wire 421: joint
50: rotating seat 51: inner groove
60: top cover 61: screw
62: tracheae 70: chassis
701: protuberance 71: grounding electrode
72: nozzle head 73: inclined hole
80: magnetic 90: support
91: cooling device 92: guiding device
A: dielectric medium discharge electricity slurry area B: low temperature unbalanced electricity slurry zone
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to electricity slurry jet flow electrode assembly and its embodiment of system, structure, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.
See also Figure 1 and Figure 2, Fig. 1 is the generalized section of electricity slurry jet flow electrode assembly of the present invention, and Fig. 2 is the schematic perspective view of disk in the electricity slurry jet flow electrode assembly of the present invention.The electricity slurry jet flow electrode assembly of preferred embodiment of the present invention, it has a positioning seat 10, in this positioning seat 10, be provided with an earthenware 20, one disk 30 is set in the earthenware 20, lays the inclined hole 31 that several inclinations run through on the disk 30, its schematic perspective view as shown in Figure 2, be provided with a high-pressure metal electrode 40 in the disk 30, high-pressure metal electrode 40 is a hollow circular cylinder, is easy to heat radiation, and 20 of high-pressure metal electrode 40 and earthenwares form the regional A of dielectric medium discharge electricity slurry; In addition, and a top cover 60 is set on the positioning seat 10, one screw 61 is set in the top cover 60, one tracheae 62 is set in the screw 61, the top of high-pressure metal electrode 40 is provided with a joint 421, and joint 421 places continue an electric wire 42 is set, and electric wire 42 is passed by tracheae 62 and continues to a high-tension electricity end, form the space between tracheae 62 and the electric wire 42, outside air and plasma manufacture gas can be entered in the earthenware 20 by tracheae 62 react.
Above-mentionedly enter plasma manufacture gas in the earthenware 20 via tracheae 62 places, it can be air (Air), argon gas (Ar), carbon dioxide (CO
2), nitrogen (N2), helium (He), oxygen (O
2) or its gas that mixes mutually.
Again, positioning seat 10 side faces are provided with a rotating seat 50, the bottom of this rotating seat 50 is provided with a chassis 70, and chassis 70 inwalls are provided with a grounding electrode 71, and 40 at grounding electrode 71 and high-pressure metal electrode form low temperature unbalanced electricity slurry area B, the bottom on chassis 70 is provided with a nozzle head 72, in order to low temperature unbalanced electricity slurry is sprayed, wherein, with present embodiment, more than one inclined hole 73 can be set, for example a plurality of inclined holes 73 that distribute in the radioactive ray mode (consulting shown in Figure 1) on the nozzle head 72.
Above-mentioned disk 30 can be stainless steel, and an internal thread is set in disk 30, and at high-pressure metal electrode 40 top side faces one external screw thread is set, and external screw thread can be arranged in the internal thread, makes high-pressure metal electrode 40 fixed being positioned among the disk 30.
One earthenware 20 is set in the above-mentioned positioning seat 10, and it is to form inner groove 11 in positioning seat 10, makes earthenware 20 can insert positioning seat 10 and be positioned on the inner groove 11.
Be provided with a disk 30 in the above-mentioned earthenware 20, it is to form inner groove 21 in earthenware 20, makes disk 30 can insert in the earthenware 20 and be positioned on the inner groove 21.
Be laid with the inclined hole 31 that a plurality of inclinations run through on the above-mentioned disk 30, as shown in Figure 2, preferably, these a plurality of inclined holes 31 are the angles of inclination that are equidirectional 45 degree, make the air-flow of flowing through therebetween in the regional A of dielectric medium discharge electricity slurry, produce the turbulent flow that the whirlpool swift current flows, the electricity slurry of generation can fully be mixed atomized, but should be, all can not have the effect that produces the turbulent flow that the whirlpool swift current flows in various degree so long as be equidirectional angle of inclination as limit.
Above-mentioned high-pressure metal electrode 40 tops are provided with a metal connecting piece 41 and joint 421, it is that a perforation is set in high-pressure metal electrode 40, and stratum's groove 401 is set in perforation, and also be provided with another perforation in the connector 41, another stratum's groove 411 is set in the perforation, connector 41 is plugged in stratum's groove 401 of high-pressure metal electrode 40,421 of joints are to be plugged in stratum's groove 411 of connector 41, connector 41 and joint 421 are all conducting metal spare, and electric wire 42 can be connected to joint 421, tracheae 62 communicates with the external world for insulator, and electric wire 42 passes tracheae 62 and end is connected to a power supply unit (not shown), electric wiring can be transmitted produce the interchange high-frequency and high-voltage electric power of electricity slurry use on high-pressure metal electrode 40, wherein, earthenware 20 ground connection are handled, and the regional A of formed dielectric medium discharge electricity slurry has the spacing of a proportional sizes between high-pressure metal electrode 40 and the earthenware 20, chassis 70 ground connection are handled, formed low temperature unbalanced electricity slurry area B also has the spacing of a proportional sizes between high-pressure metal electrode 40 and the grounding electrode 71, wherein, the spacing of described dielectric medium discharge electricity regional A of slurry and the low temperature unbalanced electricity slurry proportional sizes that area B had, be according to the plasma manufacture gas and the voltages having different magnitude of bestowing that feed wherein, and form different proportional sizes, its ratio that feeds voltage and spacing is 1～5, for example:
Feed the voltage of 5kv (KV), its spacing size can be 1～5mm;
Feed the voltage of 4kv (KV), its spacing size can be 0.8～4mm (millimetre);
Feed the voltage of 3kv (KV), its spacing size can be 0.6～3mm (millimetre);
Feed the voltage of 2kv (KV), its spacing size can be 0.4～2mm (millimetre);
Feed the voltage of 1kv (KV), its spacing size can be 0.2～1mm (millimetre), high voltage more than all the other KVs that can set and spacing dimension relation can the rest may be inferred.
Described positioning seat 10 tops are provided with a top cover 60, it is at positioning seat 10 top side faces external screw thread to be set, and on top cover 60 lower end internal faces, internal thread is set, the internal thread of top cover 60 can be arranged on the external screw thread on positioning seat 10 tops, wherein, the material of top cover 60 can be polytetrafluoroethylene (being Teflon).
The preferably, in order to improve the electricity slurry processing area and the uniformity of electricity slurry jet flow electrode assembly 1, above-mentioned positioning seat 10 side faces of the present invention can be provided with a rotating seat 50, as shown in Figure 1, it is at positioning seat 10 side faces one outer groove 12 to be set, at outer groove 12 places one bearing 13 is set, and inner groove 51 is set at rotating seat 50 inwalls, the inner groove 51 of rotating seat 50 is set on the bearing 13, rotation by bearing 13, can make rotating seat 50 be rotated action on positioning seat 10 surfaces, these rotating seat 50 bottoms are provided with a chassis 70, it is at rotating seat 50 root edge side faces external screw thread to be set, and 70 internal faces are provided with internal thread on the chassis, the external screw thread of rotating seat 50 can be screwed in the internal thread on chassis 70 be screwed togather the location.
If the setting of irrotationality swivel base 50, this positioning seat 10 can also directly be provided with a chassis 70, and positioning seat 10 can be made in integrally formed mode with chassis 70, or also can with the screw-in version connection each other.
Above-mentioned 70 bottoms, chassis are provided with a nozzle head 72, it is that 70 bottoms form a protuberance 701 that extends downwards on the chassis, at protuberance 701 side faces external screw thread is set, and on the internal face of nozzle head 72, internal thread is set, the internal thread of nozzle head 72 can be screwed in the external screw thread of protuberance 701 side faces, wherein, set a plurality of inclined holes 73 on the nozzle head 72 are that diffusion type or the radiation wire that is outward-dipping distributes.
See also shown in Figure 3ly, be the generalized section of electricity slurry running in the electricity slurry jet flow electrode assembly of the present invention.The interchange high-frequency and high-voltage electric power that electricity slurry jet flow electrode assembly 1 of the present invention can be provided the power supply unit (not shown) is via electric wire 42, joint 421 and connector 41 reach high-pressure metal electrode 40, and the atmosphere of low-temperature atmosphere-pressure and plasma manufacture gas, then can enter in the earthenware 20 via tracheae 62, and flow through the dielectric medium discharge electricity slurry electricity that regional A produced slurry via the inclined hole of being laid on the disk 30 31, then form turbulent flow and the electricity slurry is atomized, the electricity slurry of atomizing can produce low temperature unbalanced electricity slurry via low temperature unbalanced electricity slurry area B, and add the design of inclined hole 73 jet flows by the pivoting mechanism of nozzle head 72, with low-temperature atmosphere-pressure unbalanced electricity slurry rotation ejection, therefore, design of the present invention can increase area and the uniformity that the electricity slurry is handled, and makes it have more good electricity slurry and handles effect.
Moreover nozzle head 72 of the present invention can also be designed to in-line, sees also shown in Figure 4ly, is generalized section of another electricity slurry jet flow electrode assembly of the present invention.Low-temperature atmosphere-pressure unbalanced electricity slurry can form the electricity slurry processing region of a wire by the nozzle head 72 of in-line design, make electricity slurry jet flow electrode assembly 1 application category of the present invention more extensive, if cooperate the setting of rotating seat 50, more can form a uniform planar electricity slurry processing region, and can improve treatment effect.
In addition, see also shown in Figure 5ly, be the generalized section of an electricity slurry jet flow electrode assembly more of the present invention.Electricity slurry jet flow electrode assembly 1 of the present invention more comprises a magnetic 80, as magnet etc., be positioned at nozzle head 72 around, because the setting of this magnetic 80, can provide a magnetic field to nozzle head 72, improve mutual collision probability, make it increase free state by electron and molecule in the electricity slurry of nozzle head 72, make low-temperature atmosphere-pressure unbalanced electricity slurry improve concentration, and then electricity slurry treatment effect is improved.
Electricity slurry jet flow electrode assembly 1 of the present invention can further comprise a predecessor flow controller (not shown), in order to provide and to control predecessor to low temperature unbalanced electricity slurry area B, wherein predecessor is for film-plating process gas (for example: tetraethoxysilane, oxygen, polyethylene, methane, acetylene etc.) or etch process gases (for example: hydrogen, carbon tetrachloride etc.) such as organic and inorganic or metal are organic, electricity slurry jet flow electrode assembly 1 of the present invention is used be applied on plated film or the etch process.
According to above-mentioned conception, the present invention also provides a kind of electricity slurry jet flow electrode system 2, sees also Figure 6 and Figure 7, and Fig. 6 is the schematic perspective view of electricity slurry jet flow electrode system of the present invention, and Fig. 7 is the schematic top plan view of electricity slurry jet flow electrode system among Fig. 6.Electricity slurry jet flow electrode system 2 of the present invention, comprise at least one electricity slurry jet flow electrode assembly 1, and with a support 90 those electricity are starched jet flow electrode assemblies 1 and locate, according to the practical design demand, can design electricity is starched jet flow electrode assembly 1 with linear array, as shown in Figure 7, can also utilize a plurality of electricity slurry jet flow electrode assemblies 1 with planar arrangement, as Fig. 8 and shown in Figure 9, Fig. 8 is the schematic perspective view of another electricity slurry jet flow electrode system of the present invention, Fig. 9 is the schematic top plan view of electricity slurry jet flow electrode system among Fig. 8, thereby can use the processing area that significantly increases low-temperature atmosphere-pressure unbalanced electricity slurry.
Above-mentioned electricity slurry jet flow electrode system 2 is when handling the workpiece (not shown) with the electricity slurry, often having the situation that workpiece temperature is raise produces, so electricity slurry jet flow electrode system 2 of the present invention also also provides a cooling device 91, see also Figure 10 and shown in Figure 11, Figure 10 starches the schematic perspective view that the jet flow electrode system is set up cooling device for electricity of the present invention, and Figure 11 is the side-looking generalized section of electricity slurry jet flow electrode system among Figure 10.Cooling device 91 is arranged at a side of support 90, as shown in figure 11, when support 90 moves and make electricity slurry jet flow electrode assembly 1 move the processing workpiece, this cooling device 91 is to be a ventilation type cooling device, can provide an air-flow to blow to workpiece downwards, making provides the thermal convection on every side of this workpiece, and then can reduce the temperature of workpiece itself.
In addition, electricity slurry jet flow electrode system 2 of the present invention further comprises a guiding device 92, it is to be roller, be connected in the below of support 90, move along a predetermined direction in order to guide support 90, make the fixed range that keeps electricity slurry jet flow electrode assembly 1 and workpiece (not shown), the electricity uniformity that slurry is handled not only is provided, can also keep the stable running of support 90; In addition, guiding device 92 can be connected in support 90 belows by an adjustable connector 920, has the function that to adjust height by connector 920, make guiding device 92 can meet different disposal workpiece and electric requirement of starching the distance of jet flow electrode assembly 1, make electricity slurry jet flow electrode system 2 have more flexible application, meet the purpose of the required application-specific of user.
In sum, electricity slurry jet flow electrode assembly 1 of the present invention and electricity slurry jet flow electrode system 2, the processing area and the uniformity of low-temperature atmosphere-pressure unbalanced electricity slurry have been improved effectively, make the utilization category of electricity slurry jet flow electrode assembly wider, not only can be in order to cleaning, can also be used for etching, improve the industry application surface of electric slurry jet flow electrode assembly and system thereof, have industrial value.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be not break away from the technical solution of the present invention content, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (17)
1. an electricity is starched the jet flow electrode assembly, it is characterized in that it has a positioning seat, one earthenware is set in this positioning seat, one disk is set in this earthenware, lay the inclined hole that at least one inclination runs through on this disk, one high-pressure metal electrode is set in this disk, form dielectric medium discharge electricity slurry zone between this high-pressure metal electrode and this earthenware, the bottom of this positioning seat is provided with a chassis, the inwall on this chassis is provided with a grounding electrode, form the electric slurry of low temperature unbalanced zone between this grounding electrode and this high-pressure metal electrode, the bottom on this chassis is provided with a nozzle head, in order to low temperature unbalanced electricity slurry is sprayed.
2. an electricity is starched the jet flow electrode assembly, it is characterized in that it has a positioning seat, one earthenware is set in this positioning seat, one disk is set in this earthenware, lay at least one open-work on this disk, one high-pressure metal electrode is set in this disk, form dielectric medium discharge electricity slurry zone between this high-pressure metal electrode and this earthenware, this positioning seat side face is provided with a rotating seat, make this positioning seat be rotated motion with respect to this rotating seat, the bottom of this rotating seat is provided with a chassis, the inwall on this chassis is provided with a grounding electrode, form the electric slurry of low temperature unbalanced zone between this grounding electrode and this high-pressure metal electrode, the bottom on this chassis is provided with a nozzle head, in order to low temperature unbalanced electricity slurry is sprayed.
3. electricity slurry jet flow electrode assembly according to claim 1 and 2, it is characterized in that formed dielectric medium discharge electricity slurry zone has a spacing between wherein said high-pressure metal electrode and this earthenware, wherein, feeding the voltage of this high-pressure metal electrode and the ratio range of this spacing is between 1 to 5.
4. electricity slurry jet flow electrode assembly according to claim 1 and 2, it is characterized in that formed low temperature unbalanced electricity slurry zone has a spacing between wherein said high-pressure metal electrode and this grounding electrode, feeding the voltage of this high-pressure metal electrode and the ratio range of this spacing is between 1 to 5.
5. electricity slurry jet flow electrode assembly according to claim 1 and 2, it is characterized in that being provided with on the wherein said positioning seat top cover, one screw is set in this top cover, one tracheae is set in this screw, the top of this high-pressure metal electrode is provided with a joint, continues an electric wire is set in this joint, and this electric wire is passed by this tracheae and continues to a high-tension electricity end, form the space between this tracheae and this electric wire, outside air and plasma manufacture gas can be entered in this earthenware by this tracheae react.
6. electricity slurry jet flow electrode assembly according to claim 1 and 2, it is characterized in that being provided with in the wherein said disk internal thread, and the top side face of this high-pressure metal electrode is provided with an external screw thread, the external screw thread of this high-pressure metal electrode is arranged in the internal thread of this disk, wherein lay the inclined hole that a plurality of inclinations run through on this disk, it is the angle of inclination that is equidirectional 45 degree.
7. electricity slurry jet flow electrode assembly according to claim 1 and 2, the side face that it is characterized in that wherein said positioning seat is provided with an outer groove, at this outer groove place one bearing is set, the inwall of this rotating seat is provided with an inner groove, the inner groove of this rotating seat is set on this bearing, makes this positioning seat be rotated motion with respect to this rotating seat.
8. electricity slurry jet flow electrode assembly according to claim 1 and 2 is characterized in that being provided with on the wherein said nozzle head at least one inclined hole, and this inclined hole distributes with diffusion type or radiation wire.
9. electricity slurry jet flow electrode assembly according to claim 1 and 2, the outlet that it is characterized in that wherein said flat nozzle head is an in-line.
10. electricity slurry jet flow electrode assembly according to claim 1 and 2 is characterized in that also further comprising a magnetic, be positioned at this nozzle head around, provide a magnetic field to this nozzle head.
11. electricity slurry jet flow electrode assembly according to claim 1 and 2 is characterized in that wherein said high-pressure metal electrode is to be a hollow circular cylinder.
12. electricity slurry jet flow electrode assembly according to claim 1 and 2, it is characterized in that this device further comprises a predecessor flow controller, be in order to provide and to control a predecessor to this low temperature unbalanced electricity slurry zone, to make this device can be applied to plated film or etch process.
13. an electricity slurry jet flow electrode system is characterized in that it comprises at least just like claim 1 or 2 described electricity slurry jet flow electrode assemblies, and a support, this support is in order to fix this electricity slurry jet flow electrode assembly.
14. electric slurry jet flow electrode system according to claim 13 is characterized in that wherein more comprising a plurality of electricity slurry jet flow electrode assemblies, these a plurality of electricity are starched jet flow electrode assemblies with linear or planar arrangement, and are arranged on this support.
15. electricity slurry jet flow electrode system according to claim 13, it is characterized in that more comprising a cooling device, be arranged at a side of this support, in order to cool off the handled workpiece of this electricity slurry jet flow electrode system, wherein this cooling device is to be a ventilation type cooling device.
16. electricity slurry jet flow electrode system according to claim 13, its feature is more comprising a guiding device, is connected in this support below, moves along a predetermined direction in order to guide this support, and wherein this guiding device is to be a roller.
17. electricity slurry jet flow electrode system according to claim 16 is characterized in that wherein more comprising a guiding device, is connected in this support below, moves along a predetermined direction in order to guide this support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100906270A CN101277577A (en) | 2007-03-30 | 2007-03-30 | Electrode device for spouting electric slurry as well as system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100906270A CN101277577A (en) | 2007-03-30 | 2007-03-30 | Electrode device for spouting electric slurry as well as system thereof |
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| Publication Number | Publication Date |
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| CN101277577A true CN101277577A (en) | 2008-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100906270A Pending CN101277577A (en) | 2007-03-30 | 2007-03-30 | Electrode device for spouting electric slurry as well as system thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102065625B (en) * | 2009-11-16 | 2012-08-22 | 财团法人工业技术研究院 | Plasma system with introducing device |
| CN101754563B (en) * | 2008-12-22 | 2012-10-10 | 财团法人工业技术研究院 | Shell and injection-type plasma system thereof |
| TWI622450B (en) * | 2016-06-30 | 2018-05-01 | Nozzle of air plasma cutting device | |
| CN108012400A (en) * | 2017-11-24 | 2018-05-08 | 电子科技大学 | A kind of normal pressure high frequency cold plasma processing unit |
| CN110846640A (en) * | 2018-08-21 | 2020-02-28 | 馗鼎奈米科技股份有限公司 | Plasma coating device |
| CN111822162A (en) * | 2019-04-16 | 2020-10-27 | 馗鼎奈米科技股份有限公司 | Plasma device |
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2007
- 2007-03-30 CN CNA2007100906270A patent/CN101277577A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101754563B (en) * | 2008-12-22 | 2012-10-10 | 财团法人工业技术研究院 | Shell and injection-type plasma system thereof |
| CN102065625B (en) * | 2009-11-16 | 2012-08-22 | 财团法人工业技术研究院 | Plasma system with introducing device |
| TWI622450B (en) * | 2016-06-30 | 2018-05-01 | Nozzle of air plasma cutting device | |
| CN108012400A (en) * | 2017-11-24 | 2018-05-08 | 电子科技大学 | A kind of normal pressure high frequency cold plasma processing unit |
| CN110846640A (en) * | 2018-08-21 | 2020-02-28 | 馗鼎奈米科技股份有限公司 | Plasma coating device |
| CN111822162A (en) * | 2019-04-16 | 2020-10-27 | 馗鼎奈米科技股份有限公司 | Plasma device |
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