CN111822162A

CN111822162A - Plasma device

Info

Publication number: CN111822162A
Application number: CN202010175012.3A
Authority: CN
Inventors: 徐逸明; 王朝俊; 李安仁
Original assignee: CREATING NANO TECHNOLOGIES Inc
Current assignee: CREATING NANO TECHNOLOGIES Inc
Priority date: 2019-04-16
Filing date: 2020-03-13
Publication date: 2020-10-27
Also published as: TWI685279B; TW202041104A

Abstract

A plasma apparatus. The plasma apparatus includes a housing, an inner electrode, a rotating member, an extended socket, a nozzle, and a magnetic levitation motor. The housing has an accommodating space, wherein the accommodating space has a first opening and a second opening opposite to each other. The inner electrode is arranged in the accommodating space of the shell and is adjacent to the first opening. The rotating member is rotatably disposed outside the outer side surface of the housing, wherein the rotating member has at least one groove extending along the outer side surface of the housing, and the rotating member includes a plurality of magnetic elements. The extension socket is engaged with the rotation member and adjacent to the second opening. The nozzle is arranged on the extension pipe seat and is opposite to the second opening of the shell. The magnetic floating motor is arranged on the shell and is positioned in the groove of the rotating component, wherein the magnetic floating motor is adjacent to the magnetic element. The plasma device utilizes the magnetic repulsion force between the magnetic suspension motor and the rotating member to drive the rotating member and the nozzle to rotate, thereby achieving the effect of large-area plasma treatment.

Description

Plasma device

Technical Field

The present invention relates to a plasma apparatus, and more particularly, to a plasma apparatus having a rotating nozzle.

Background

In response to the industrial production requirement, a large area plasma treatment is sometimes required on the surface of the product or component. In view of the above, some plasma technologies have been developed, in which a plasma nozzle in an atmospheric plasma apparatus can be tilted at an angle relative to an axis of the plasma apparatus, and the plasma nozzle can rotate circumferentially around the axis, so as to increase a plasma spraying area and achieve a large-area plasma processing effect.

The rotation of the atmosphere plasma device needs to be realized by connecting a motor with a rotating belt pulley to drive the tubular electrode and the plasma nozzle of the atmosphere plasma device to rotate, so that the nozzle of the plasma nozzle rotates circumferentially relative to the shell of the atmosphere plasma device. However, such an atmospheric plasma apparatus causes the belt to be loosened in a long-term use, and the belt needs to be replaced irregularly to maintain the operation of the apparatus. In addition, the large volume of the atmospheric plasma device will make the device not light and the device cost will increase.

Disclosure of Invention

Therefore, an object of the present invention is to provide a plasma apparatus, which utilizes the magnetic repulsion force generated between the magnetic levitation motor and the rotating member to drive the rotating member, and utilizes the rotating member to drive the nozzle to rotate, so as to achieve the effect of large-area plasma processing.

Another object of the present invention is to provide a plasma apparatus, in which the rotating member rotates by using the magnetic repulsion force of the magnetic levitation motor, not only the abrasion of the rotating member can be greatly reduced, but also the vibration of the plasma apparatus caused by the rotation of the rotating member can be suppressed, so that the noise generated by the operation of the plasma apparatus can be reduced, and the stability of the operation of the magnetic levitation motor can be improved.

It is another object of the present invention to provide a plasma apparatus, which can improve the problem of the conventional nozzle rotation technique driven by the motor driving the pulley, such as the belt being easy to wear and requiring frequent replacement due to long-term use, thereby improving the production efficiency of the production line.

It is still another object of the present invention to provide a plasma apparatus, in which the magnetic levitation motor and the rotating member can be installed in the plasma apparatus, so that the volume of the plasma apparatus can be effectively saved, the complexity of the plasma apparatus can be reduced, the lifetime of the plasma apparatus can be extended, the cost can be reduced, and the assembly of the plasma apparatus can be simplified.

In accordance with the above object of the present invention, a plasma apparatus is provided. The plasma apparatus includes a housing, an inner electrode, a rotating member, an extended socket, a nozzle, and a magnetic levitation motor. The housing has an accommodating space, wherein the accommodating space has a first opening and a second opening opposite to each other. The inner electrode is arranged in the accommodating space of the shell and is adjacent to the first opening. The rotating member is rotatably disposed outside the outer side surface of the housing, wherein the rotating member has at least one groove extending along the outer side surface of the housing, and the rotating member includes a plurality of magnetic elements. The extension socket is engaged with the rotation member and adjacent to the second opening. The nozzle is arranged on the extension pipe seat and is opposite to the second opening of the shell. The magnetic floating motor is arranged on the shell and is positioned in the groove of the rotating component, wherein the magnetic floating motor is adjacent to the magnetic element.

According to an embodiment of the present invention, the rotating member is an annular structure, and the at least one groove is an annular groove, and both the rotating member and the groove are disposed outside the outer lateral surface of the housing.

According to an embodiment of the present invention, the at least one groove is an annular groove, and the magnetic elements surround the outer lateral surface of the housing at equal intervals.

According to an embodiment of the present invention, the plasma apparatus further includes a gas distribution block disposed in the accommodating space of the housing and adjacent to the first opening, wherein the inner electrode penetrates through the gas distribution block, and the gas distribution block has a plurality of air holes.

According to an embodiment of the present invention, the extending direction of each of the air holes is inclined with respect to the axis of the housing.

According to an embodiment of the present invention, an extending direction of the nozzle opening of the nozzle is inclined with respect to an axis of the housing.

According to an embodiment of the present invention, the plasma apparatus further comprises at least one bearing, wherein the rotating member is connected to the outer side surface of the housing through the at least one bearing.

Drawings

In order to make the aforementioned and other objects, features, and advantages of the invention, as well as others which will become apparent, reference is made to the following description taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic cross-sectional view of a plasma apparatus according to an embodiment of the invention.

[ notation ] to show

100 plasma apparatus

110 outer casing

Medial surface of 110a

110b outer side

112 accommodating space

112a first opening

112b second opening

114 axle center

120 inner electrode

130 rotating member

130a bottom surface

132 groove

134 magnetic element

140 extended socket

142 channels

142a first channel portion

142b second channel portion

150 nozzle

152 spout

160 magnetic floating motor

162 connecting part

164 coil part

170 gas separating block

172 air hole

174 top of

174a bottom surface

176 side wall

180 bearing

Detailed Description

In view of the fact that the conventional atmospheric plasma device needs to use a pulley to drive the nozzle to rotate, the belt will be loosened and needs to be replaced periodically after long-term use, and the conventional atmospheric plasma device with a rotatable nozzle has a large volume and high cost. Therefore, the present invention provides a plasma apparatus, which utilizes the magnetic repulsion force generated between the magnetic levitation motor and the rotating member to drive the rotating member and further drive the nozzle to rotate, so as to provide a large-area plasma processing effect while reducing the abrasion of the rotating member and suppressing the vibration and noise generated by the rotation of the rotating member. In addition, the magnetic suspension motor and the rotating member can be installed in the plasma device, so that the overall volume of the plasma device can be effectively reduced, the complexity of the plasma device can be reduced, the service life of the plasma device can be prolonged, the cost can be reduced, and the assembly of the plasma device can be simplified.

Referring to fig. 1, a cross-sectional view of a plasma apparatus according to an embodiment of the invention is shown. The plasma apparatus 100 of this embodiment may be an atmospheric plasma apparatus. In some embodiments, the plasma apparatus 100 may comprise a housing 110, an inner electrode 120, a rotating member 130, an extension tube base 140, a nozzle 150, and a magnetic levitation motor 160. The housing 110 is a hollow shell and has a receiving space 112. The housing 110 has an inner side 110a and an outer side 110b facing each other. The accommodating space 112 has

first openings

112a and 112b respectively located at two opposite sides of the accommodating space 112, so that the first opening 112a and the second opening 112b are opposite to each other. For example, the housing 110 may be a composite structure, and may include a conductive body and an insulating liner covering an inner side of the conductive body. The housing 110 may have a hub 114, wherein the housing 110 may be symmetrical about its hub 114.

The inner electrode 120 is disposed in the accommodating space 112 of the housing 110 and adjacent to the first opening 112a of the accommodating space 112. For example, the inner electrode 120 may be a tubular electrode. The inner electrode 120 is coupled to the outer case 110. In some illustrative examples, the plasma apparatus 100 may further optionally include a gas distribution block 170. The air distribution block 170 is disposed in the accommodating space 112 of the housing 110 and is adjacent to the first opening 112a of the accommodating space 112. For example, the gas distribution block 170 may be fixed on the inner side surface 110a of the housing 110, and the inner electrode 120 may be inserted into the gas distribution block 170, so that the inner electrode 120 may be coupled to the housing 110 through the gas distribution block 170.

The air distributor block 170 has a plurality of air holes 172. In some exemplary embodiments, as shown in fig. 1, the gas separation block 170 may include a top 174 and a sidewall 176, wherein the sidewall 176 may be annular and coupled to an outer edge of a bottom surface 174a of the top 174. The gas distribution block 170 may have a reversed-U-shaped cross section. By such a design, it is facilitated that the inner electrode 120 is disposed in the gas distribution block 170. Each of the air holes 172 penetrates the top 174 of the air distribution block 170, and the air holes 172 may be arranged in the same interval and surround the outer periphery of the inner electrode 120, for example. In some exemplary examples, each of the air holes 172 extends in a direction that is not parallel to the axis 114 of the housing 110, but is inclined at an angle, such as about 45 degrees, with respect to the axis 114 of the housing 110. By inclining the gas holes 172 at an angle relative to the axis 114 of the housing 110, the reaction gas can generate a swirling effect after flowing through the gas holes 172, thereby enhancing the plasma intensity.

The rotating member 130 is rotatably provided outside the outer side surface 110b of the housing 110. The rotating member 130 is rotatable outside the outer surface 110b of the housing 110, for example, about the axial center 114 of the housing 110 as a rotation axis. In some embodiments, the rotating member 130 may be a ring-shaped structure and is disposed outside the outer side surface 110b of the housing 110. In other embodiments, the rotating member 130 may also be composed of a plurality of strip-shaped structures, wherein the strip-shaped structures are annularly arranged and are enclosed outside at least a portion of the outer side surface 110b of the housing 110. The elongated structures may be spaced apart from each other or may be closely joined to form a ring-shaped structure. In some illustrative examples, the plasma apparatus 100 further comprises at least one bearing 180. The bearing 180 is coupled between the outer side 110b of the housing 110 and the rotating member 130, whereby the rotating member 130 can be coupled to the outer side 110b of the housing 110 through the bearing 180 and rotate outside the outer side 110b of the housing 110.

The rotating member 130 has at least one groove 132. The groove 132 extends along the outer side 110b of the housing 110, i.e. the extending direction of the groove 132 may be parallel to the outer side 110b of the housing 110, for example. For example, in the embodiment where the rotating member 130 is an annular structure surrounding the outer side surface 110b of the housing 110, the rotating member 130 has a single groove 132, i.e. a single annular groove 132, and the annular groove 132 surrounds the outer side surface 110b of the housing 110. On the other hand, in the embodiment where the rotating member 130 is formed by a plurality of elongated structures annularly disposed outside at least a portion of the outer side surface 110b of the housing 110, the rotating member 130 has a plurality of grooves 132 respectively disposed in the elongated structures. In such an example, the grooves 132 are disposed around at least a portion of the outer side 110b of the housing 110.

With continued reference to fig. 1, the rotating member 130 further includes a plurality of magnetic elements 134. These magnetic elements 134 may be disposed in the rotating member 130 on one or both sides of the groove 132. For example, when the rotating member 130 is an annular structure surrounding the outer side surface 110b of the housing 110, and the rotating member 130 has a single annular groove 132 surrounding the outer side surface 110b of the housing 110, the rotating member 130 includes a plurality of magnetic elements 134 arranged in the rotating member 130 at one side or both sides of the groove 132, for example, in the same interval manner. When the rotating member 130 is formed by a plurality of elongated structures surrounding a portion of the outer side surface 110b of the housing 110, and the rotating member 130 includes a plurality of grooves 132 respectively and correspondingly disposed in the elongated structures, a plurality of magnetic elements 134 of the rotating member 130 are respectively and correspondingly disposed in the elongated structures on one side or two sides of the grooves 132, and a gap is formed between the magnetic elements 134.

The extension socket 140 is engaged with the rotation member 130 and adjacent to the second opening 112b of the receiving space 112 of the housing 110. As shown in fig. 1, the extension pipe socket 140 may be, for example, engaged at the bottom surface 130a of the rotation member 130. The extension pipe base 140 has a passage 142, wherein the passage 142 is communicated with the receiving space 112 of the housing 110. For example, the channel 142 of the extension pipe seat 140 may have a first channel portion 142a and a second channel portion 142b that are communicated with each other, wherein the first channel portion 142a is between the accommodating space 112 of the housing 110 and the second channel portion 142 b. The first channel portion 142a tapers from the second opening 112b of the accommodating space 112 toward the second channel portion 142b, and the second channel portion 142b may have substantially the same size. Since the extension tube seat 140 is engaged with the rotation member 130, the rotation member 130 rotates around the axis 114 of the housing 110, and the extension tube seat 140 is driven to rotate around the axis 114 of the housing 110.

The nozzle 150 is disposed on the extension pipe base 140 and opposite to the second opening 112b of the accommodating space 112, that is, the extension pipe base 140 is engaged between the nozzle 150 and the outer shell 110. The nozzle 150 has a spout 152, wherein the spout 152 penetrates the nozzle 150 and communicates with the second channel portion 142b of the channel 142 of the extension socket 140. The extension of the nozzle 152 may, for example, be substantially parallel to the axis 114 of the housing 110. In some exemplary instances, as shown in FIG. 1, the direction of extension of the nozzle 152 is inclined at an angle relative to the axis 114 of the housing 110. Since the nozzle 150 is engaged with the extension pipe seat 140, when the extension pipe seat 140 is driven by the rotating member 130 to rotate around the axis 114 of the housing 110, the nozzle 150 is further driven to rotate around the axis 114 of the housing 110. Therefore, in the case where the extending direction of the nozzle 152 is inclined with respect to the axial center 114 of the casing 110, the inclination of the nozzle 152 is matched with the rotation of the nozzle 150, so that the plasma processing area of the plasma apparatus 100 can be enlarged.

The magnetic levitation motor 160 is disposed on the housing 110, i.e. the magnetic levitation motor 160 is connected to the outer side 110b of the housing 110. Also, the magnetic levitation motor 160 is positioned in the groove 132 of the rotating member 130. For example, as shown in fig. 1, the magnetic levitation motor 160 mainly comprises a connection portion 162 and a coil portion 164, wherein the coil portion 164 is connected to the bottom of the connection portion 162, the connection portion 162 is connected to the outer side surface 110b of the housing 110, and the coil portion 164 extends in the groove 132 of the rotating member 130. In addition, the coil portion 164 of the magnetic levitation motor 160 is adjacent to the magnetic element 134 of the rotating member 130.

When the magnetic levitation motor 160 is energized, a magnetic field is generated between the coil portion 164 of the magnetic levitation motor 160 and the magnetic element 134 of the rotating member 130, and a magnetic repulsive force is generated between the coil portion 164 and the magnetic element 134. Therefore, the magnetic levitation motor 160 and the rotating member 130 are not in contact with each other, and the rotating member 130 can rotate along the magnetic force lines generated by the magnetic element 134 with the axis 114 of the housing 110 as a rotation axis. The rotation of the rotating member 130 can drive the extension tube seat 140 to rotate around the axis 114 of the housing 110, and the extension tube seat 140 can further drive the nozzle 150, so that the nozzle 150 can also rotate around the axis 114 of the housing 110. By rotating the nozzle 150, the plasma apparatus 100 can provide a large area plasma processing effect. In addition, since the magnetic repulsive force is generated between the rotating member 130 and the magnetic levitation motor 160 and the rotating member 130 is driven to rotate by the magnetic force, the design can reduce the abrasion of the rotating member 130, and can also suppress the vibration caused by the rotation of the rotating member 130 and reduce the operation noise.

When the plasma apparatus 100 is in operation, the working gas enters from the first opening 112a of the accommodating space 112 of the housing 110, passes through the air holes 172 of the gas distribution block 170, enters the part of the accommodating space 112 below the top 174 of the gas distribution block 170 in a swirling manner, and flows downward along the outer side surface of the inner electrode 120 to form a gas flow. At this time, the inner electrode 120 and the outer case 110 are arcing due to the application of the voltage. The arc ionizes the flow of the working gas to generate an activation reaction of the working gas, thereby forming a plasma. The plasma is ejected from the nozzle 152 of the nozzle 150 rotated by the rotating member 130 through the passage 142 of the extension pipe 140. Therefore, the plasma apparatus 100 can increase the plasma spraying area, and further achieve the plasma surface treatment effect of large area.

In view of the above, it is an advantage of the present invention that the plasma processing apparatus utilizes the magnetic repulsion force generated between the magnetic levitation motor and the rotating member to drive the rotating member, and then utilizes the rotating member to drive the nozzle to rotate, thereby achieving the effect of large-area plasma processing.

It is noted that, in the above embodiments, another advantage of the present invention is that the rotating member of the plasma apparatus of the present invention rotates by the magnetic repulsion force of the magnetic levitation motor, which not only greatly reduces the abrasion of the rotating member, but also suppresses the vibration of the plasma apparatus caused by the rotation of the rotating member, thereby reducing the noise generated by the operation of the plasma apparatus and improving the stability of the operation of the magnetic levitation motor.

In view of the above, another advantage of the present invention is that the plasma apparatus of the present invention can improve the problem that the belt is easy to be worn and needs to be replaced due to long-term use in the conventional technology of rotating the nozzle by rotating the belt pulley driven by the motor, thereby improving the production rate of the production line.

It is noted that, in the above embodiments, the magnetic levitation motor and the rotating member of the plasma apparatus of the present invention can be installed in an existing plasma apparatus, so that the volume of the plasma apparatus can be effectively reduced, the complexity of the plasma apparatus can be reduced, the service life of the plasma apparatus can be prolonged, the cost can be reduced, and the assembly of the plasma apparatus can be simplified.

Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.

Claims

1. A plasma apparatus, comprising:

a housing having an accommodating space, wherein the accommodating space has a first opening and a second opening opposite to each other;

an inner electrode disposed in the accommodating space and adjacent to the first opening;

a rotating member rotatably disposed outside an outer side of the housing, wherein the rotating member has at least one groove extending along the outer side of the housing, and the rotating member includes a plurality of magnetic elements;

an extension tube seat engaged with the rotation member and adjacent to the second opening;

a nozzle arranged on the extension pipe seat and opposite to the second opening; and

a magnetic levitation motor disposed on the housing and in the at least one groove of the rotating member, wherein the magnetic levitation motor is adjacent to the plurality of magnetic elements.

2. The plasma apparatus of claim 1, wherein the rotating member is an annular structure and the at least one groove is an annular groove, the rotating member and the at least one groove being disposed around the outside of the outer surface of the housing.

3. The plasma apparatus of claim 1, wherein the plurality of magnetic elements are equally spaced around the outside of the outer surface of the housing.

4. The plasma apparatus of claim 1, further comprising a gas distribution block disposed in the receiving space and adjacent to the first opening, wherein the inner electrode is disposed through the gas distribution block, and the gas distribution block has a plurality of air holes.

5. A plasma apparatus as claimed in claim 4, wherein the gas holes each extend in a direction inclined with respect to an axis of the housing.

6. The plasma apparatus of claim 1, wherein an extension direction of a nozzle opening of the nozzle is inclined with respect to an axis center of the housing.

7. The plasma apparatus of claim 1, further comprising at least one bearing, wherein the rotating member is coupled to the outer side of the housing through the at least one bearing.