1302422 九、發明說明 •【發明所屬之技術領域】 、 本發明是有關於一種電漿放電裝置，且特別是有關於一 種旋轉式電漿放電裝置。 【先前技術】 電聚的組成包括有電子、離子以及電中性粒子。其中電 Φ 聚產生的方式，是將所需之氣體通入一容器内，於某一氣壓 下加入直机電源、射頻（Radi〇 FrequenCy)或微波（Micrpwave) 月匕里來源，利用電容式（Capacitive)、電感式或粒 -、波父互作用的方式’使氣體崩潰（Breakd〇wn)游離，可 X運用於切割、熔接以及各種材料之表面處理等工業。 電漿炬（Plasma Torch)是一種適用於常壓電漿表面處 ’係將電漿能量聚集在一小的體積範圍1302422 IX. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a plasma discharge device, and more particularly to a rotary plasma discharge device. [Prior Art] The composition of electropolymerization includes electrons, ions, and electrically neutral particles. The way in which electricity Φ is generated is to pass the required gas into a container and add it to a straight source power source, a radio frequency (Radi〇FrequenCy) or a microwave (Micrpwave) moonlight source under a certain pressure, using a capacitive type ( Capacitive), inductive or granular-, and wave-family interactions 'disintegrate gas (Breakd〇wn), can be used in industries such as cutting, welding, and surface treatment of various materials. Plasma Torch (Plasma Torch) is a type used on the surface of a normal piezoelectric slurry. The plasma energy is concentrated in a small volume range.
ϊ里的電製放電裝置，在聪1 φ蔣 的操作。The electric discharge device in Bengli is operated by Cong 1 φ Jiang.
水疋勿別安裝於一旋轉 兩條線狀的噴射電聚， 6 1302422 以增加表面處理的效率。然而，此一裝置並不適於處理 •具有突起的表面，尤其在突起表面的曲面半徑小於電漿 •炬旋轉半徑的情況下，表面處理的效果並不理想。加上 電漿炬旋轉時對轉軸所形成的慣性力會影像表面處理的 操控精度。 , 爲解決此一問題，美國專利編號第62623 86號揭示 了 一種具有斜角式旋轉喷頭的電漿炬。請參照第1，第i Φ 圖係根據習知技術的一較佳實施例所繪示之一種具有斜 角式旋轉喷頭的電漿炬結構剖面示意圖。具有斜角式旋 轉噴頭的電衆炬100包括：内電極101、外電極103、軸 承105以及斜角式喷頭107。 其中，内電極101裝設於支撐管109之中，外電極 103係套接於支撐管109之一端，藉由軸承1〇5以内電 極為軸進行轉動，並且在支撐管109下方形成一個腔室 111 〇Do not install the water raft on a rotating two-line jet electropolymer, 6 1302422 to increase the efficiency of surface treatment. However, this device is not suitable for handling • a surface having protrusions, especially in the case where the radius of the curved surface of the protrusion surface is smaller than the radius of rotation of the plasma torch, the surface treatment effect is not satisfactory. In addition, the inertial force formed on the rotating shaft when the plasma torch rotates will control the surface of the image. In order to solve this problem, U.S. Patent No. 6,623, 036 discloses a plasma torch having a beveled rotary nozzle. Referring to FIG. 1, the i-th Φ is a schematic cross-sectional view of a plasma torch structure having a slanted rotary nozzle according to a preferred embodiment of the prior art. The electric torch 100 having the bevel type rotary nozzle includes an inner electrode 101, an outer electrode 103, a bearing 105, and a beveled head 107. The inner electrode 101 is mounted in the support tube 109, and the outer electrode 103 is sleeved on one end of the support tube 109, and the inner electrode is rotated by the bearing 1〇5, and a chamber is formed under the support tube 109. 111 〇
斜角式喷頭107固定於外電極103之上，其中斜角 式喷頭107具有斜角度之開口 107a，可作為腔室in的 開口。内電極101的放電端101a可射出一條電聚柱1〇2 通過支撐管1 0 9的開口 1 0 9 a和腔室111，到達腔室開口 107a的内緣，使工作氣體104游離產生電漿。當外電極 103由驅動裝置120帶動旋轉時，所生成的電裝則藉由 斜角式喷頭107轉動以提供一旋轉的喷射電漿1〇6。 然而，此一電漿炬1 〇〇係藉由電弧放電所產生，由 内電極101之放電端l〇la所產生的電流必須經過轉動 7 1302422 中的外電極103與轴承i〇5始能接地導通，但外電極103 在高速旋轉的狀態下，會使導通的電流不穩而影響電漿 炬1 0 0表面處理的效率。 另外，美國專利編號第6262386號還揭示了另一種 具有斜角式旋轉喷頭的電漿炬。請參照第2圖，第2圖 係根據習知技術的另一較佳實施例所繪示之一種具有斜 角式旋轉噴頭之電漿炬的部分結構剖面示意圖。The beveled spray head 107 is fixed to the outer electrode 103, wherein the beveled spray head 107 has an oblique opening 107a which serves as an opening for the chamber in. The discharge end 101a of the inner electrode 101 can eject an electropolymerization column 1〇2 through the opening 1 0 9 a of the support tube 1 0 9 and the chamber 111 to reach the inner edge of the chamber opening 107a, so that the working gas 104 is free to generate plasma. . When the outer electrode 103 is rotated by the driving device 120, the generated electrical device is rotated by the beveled nozzle 107 to provide a rotating jetting plasma 1〇6. However, the plasma torch 1 is generated by arc discharge, and the current generated by the discharge end 10b of the internal electrode 101 must be grounded through the outer electrode 103 and the bearing i〇5 in the rotation 7 1302422. Turning on, but the external electrode 103 is in a state of high-speed rotation, which causes the conduction current to be unstable and affects the efficiency of the surface treatment of the plasma torch 100. In addition, U.S. Patent No. 6,262,386 discloses another plasma torch having a beveled rotary nozzle. Referring to FIG. 2, FIG. 2 is a cross-sectional view showing a portion of a structure of a plasma torch having an oblique rotary nozzle according to another preferred embodiment of the prior art.
其中第2圖的電漿炬20〇結構與第i圖之電‘裝炬1〇〇 的結構相似，其中最大差異在於外電極203與斜角式噴 頭207的聯結方式，且外電極203並未轉動，而是藉由 斜角式喷頭207的旋轉來提供旋轉的喷射電漿2〇6 ^ 第2圖中，斜角式喷頭2〇7之一端設置於外電極2〇3之 内另鈿犬出於開口 207a之外。其中，外電極2〇3係 藉由磁性軸承207b來與斜角式喷頭2〇7聯結，並受到驅 動瓜置2 2 0帶動，jiL η你 猎使斜角式喷頭207磁性軸承207b 為支點進行轉動。+ 丁轉動由内電極（未繪示）之放電端所產生的 電流經過腔室2 Π接，V , 至 U後必須再經磁性軸承2〇7b後始能斑 外電極203導通。 ㈣月匕- 然而，磁性軸承207b盥外雷粍 U卜冤極203之間相呈；^一殺 距離，磁性軸承207b盥外 -有奴 電加埶，# 〇外電極203之間會因為電流的放 命。 1王釉承2〇7b的使用壽 種可提高操作&率和精度以及 因此’有需要提供一 使用壽命的電漿炬。 $ 1302422 【發明内容】 操 因此本發明的目的就是在提供一種可 作精度以及使用壽命的旋轉式電襞放電裝置:乍政率和 電極以及3式:Γ放電裝置包括:接地電極、絕緣層、内 電極以及设體。其中接地電極具 ^ -開口。絕緣衫㈣腔室之心 腔室末端開設有 :、且r有放電端可射出電裝柱通過腔室到達開口之内緣， 猎以產生電漿由開口喷出。具有 、、 體係藉由-軸承設置於腔室外側，並使==嘴的殼 轴心為轴轉動。 使钭向噴嘴以此開口之 弓I罗Ξ此用本發明的另一目的就是在提供一種旋轉式電漿導 喷射電將It引由電聚放電裝置所產生的電漿形成旋轉的 =::，此電漿導引裝置包括：殼體以及軸承。殼體具有 斜向喷嘴與電裝放電裝置之一開口導通，其中電漿放電裝置 f產生的電㈣由此開口噴出。軸承設置於腔室外侧侧璧與 豉體之間’係用來使斜向噴嘴以開口之轴心為軸進行旋轉。 裙據以上所述之較佳貫施例’本發明的特徵係採用設置 於腔室外侧之可旋轉的殼體’將接地電極與内電極所產生的 電漿導引成旋轉的線狀電漿炬’以提高電漿炬的操作效率， '文。$知技術直接旋轉接地電極造成電流不穩與操作 溫度過高的問題。 【實施方式] 9 1302422 為讓本發明之上述和其他目的、特徵、和優點能更明顯 •，下文特舉-旋轉式電漿㈣為較佳實施例，並配合所 寸圖式，作詳細說明如下。但值得注意的是此較佳實施例其 亚非用以限制本發明。 一請參照第3圖，第3圖係根據本發明的較佳實施例所繪 • T的—種旋轉式電聚放電裝置（電漿炬）的剖面示意圖。在本 .發明的第一較佳實施例之中，旋轉式電漿放電裝置300包 _括·接地電極302、絕緣層304、内電極306以及殼體3〇8。 —其中接地電極302具有一腔室31〇，腔室31〇末端開設 有第一開口 31〇a。絕緣層裝3〇4設於腔室31〇之内侧側壁 〇2a上。内電極3〇6設於腔室31〇内，且具有一放電端3〇以 可射出電漿柱312通過腔室310到達第一開口 31〇a之内 緣。藉由電弧放電，使腔室310内的工作氣體314崩潰 (Breakdown)游離，產生離子化電漿3〇1。 在本發明的較佳實施例之中，接地電極3〇2係一管狀結 φ 構，相對於第一開口 3l〇a之另一端具有一第二開口 31〇b, 、 可藉以將工作氣體314導入腔室310之中。 . 另外’内電極306更包括設置於第一開口 31〇a與該第 一開口 310b之間的平板306b，用來將内電極3〇6固定於腔 室310之内。其中，平板3〇6b具有複數個間隙3〇6c，藉以 容許工作氣體3 14通過。在本發明的較佳實施例之中，工作 •氣體314係以旋渦流動（Swirling Flow)的方式導入内電極 • 306與接地電極302之間，以使電漿柱312能穩定地維持在 腔室3 10中央’進而減少能量散失到側壁3〇2a，並能造成 1302422 電聚柱的收縮，以提高工作氣體314的游離程度。 • 殼體308設置於腔室310外側，具有與第一開口 •導通的斜向喷嘴318，並藉由軸承316使斜向噴嘴3i8以第 開口 3 1 〇 a的轴心為轴進行旋轉。 在本發明的較佳實施例之中，殼體3〇8係藉由軸承31 6 套接於該接地電極302之上，且殼體3〇8具有由電漿噴嘴 31 8a以及一條與第一開口 導通的電漿通道31 8b所組成 «的斜向噴嘴318。其中，電漿通道3l8b的軸心與第一開口 3 10a之軸心夾有一角度。 其中，殼體308係由絕緣材質所構成。但在本發明的一 些實施例之中，殼體308係由導電材料所構成，其中殼體 3〇8與接地電極302之間具有一絕緣層（未繪示）。另外1本 發明的其他實施例之中，殼體308係由導電材料所構成，其 中接地電極3 02與设體308相距有—段距離，因此斜向喷嘴 3 1 8與弟一開口 3 1 〇 a之間也會存在有一間隙。The structure of the plasma torch 20〇 of FIG. 2 is similar to that of the electric torch of FIG. i, wherein the biggest difference is the way in which the outer electrode 203 is coupled to the beveled nozzle 207, and the outer electrode 203 is not Rotating, but providing rotation of the jetted plasma by rotation of the beveled nozzle 207 2〇6 ^ In Fig. 2, one end of the beveled nozzle 2〇7 is disposed within the outer electrode 2〇3 The dog is outside the opening 207a. Wherein, the outer electrode 2〇3 is coupled with the beveled nozzle 2〇7 by the magnetic bearing 207b, and is driven by the driving melon 2 2 0, and the magnetic bearing 207b of the beveled nozzle 207 is hunted by the jiL η The fulcrum rotates. + Ding rotates the current generated by the discharge end of the internal electrode (not shown) through the chamber 2, and after V, U must pass through the magnetic bearing 2〇7b to start the spot electrode 203. (4) The new moon - However, the magnetic bearing 207b is outside the thunder and the U 冤 pole 203; ^ a kill distance, the magnetic bearing 207b 盥 outside - there is a slave electric 埶, # 〇 external electrode 203 between the current Let go of life. 1 The use of the king glaze bearing 2〇7b can improve the operation & rate and precision and therefore the need to provide a service life of the plasma torch. $1302422 SUMMARY OF THE INVENTION The object of the present invention is to provide a rotary electric discharge device that can be used for accuracy and service life: 乍 rate and electrodes, and type 3: Γ discharge device includes: grounding electrode, insulating layer, Inner electrode and body. The grounding electrode has a ^-opening. Insulation shirt (4) The heart of the chamber The end of the chamber is opened: and r has a discharge end that can be ejected from the electric column through the chamber to the inner edge of the opening, and the shovel is used to generate plasma to be ejected from the opening. The system has a bearing disposed on the outside of the chamber, and the shaft center of the == nozzle is rotated. Another object of the present invention is to provide a rotary plasma-directed injection electric current to induce the plasma generated by the electro-convergence device to form a rotation =:: The plasma guiding device comprises: a housing and a bearing. The housing has an oblique nozzle that is open to one of the openings of the electrical discharge device, wherein the electricity generated by the plasma discharge device f is discharged through the opening. The bearing is disposed between the side of the chamber and the side of the chamber to rotate the oblique nozzle about the axis of the opening. According to the preferred embodiment described above, the feature of the present invention is to guide the plasma generated by the ground electrode and the inner electrode into a rotating linear plasma by using a rotatable casing disposed outside the chamber. Torch' to improve the operating efficiency of the electric torch, 'text. Knowing that the technology directly rotates the ground electrode causes the current to be unstable and the operating temperature to be too high. [Embodiment] 9 1302422 In order to make the above and other objects, features, and advantages of the present invention more obvious, the following specific description of the rotary plasma (4) is a preferred embodiment and is described in detail in conjunction with the drawings. as follows. However, it is worth noting that this preferred embodiment is intended to limit the invention. Please refer to FIG. 3, which is a cross-sectional view of a rotary electric discharge device (electrical torch) according to a preferred embodiment of the present invention. In the first preferred embodiment of the present invention, the rotary plasma discharge device 300 includes a ground electrode 302, an insulating layer 304, an inner electrode 306, and a case 3〇8. - wherein the ground electrode 302 has a chamber 31 〇, and the first opening 31 〇 a is opened at the end of the chamber 31 。. The insulating layer 3 〇 4 is provided on the inner side wall 〇 2a of the chamber 31 〇. The inner electrode 3〇6 is disposed in the chamber 31〇 and has a discharge end 3〇 so as to exit the plasma column 312 through the chamber 310 to reach the inner edge of the first opening 31〇a. By the arc discharge, the working gas 314 in the chamber 310 is collapsed to generate ionized plasma 3〇1. In the preferred embodiment of the present invention, the ground electrode 3〇2 is a tubular structure φ, and has a second opening 31〇b opposite to the other end of the first opening 31a, so that the working gas 314 can be used. Introduced into the chamber 310. Further, the inner electrode 306 further includes a flat plate 306b disposed between the first opening 31〇a and the first opening 310b for fixing the inner electrode 3〇6 within the chamber 310. Among them, the flat plate 3〇6b has a plurality of gaps 3〇6c, thereby allowing the working gas 3 14 to pass. In a preferred embodiment of the present invention, the working gas 314 is introduced between the internal electrode 306 and the ground electrode 302 in a swirling flow manner so that the plasma column 312 can be stably maintained in the chamber. 3 10 central 'and thus reduce energy loss to the side wall 3 〇 2a, and can cause the shrinkage of the 1302422 electropolymer column to increase the degree of freeness of the working gas 314. • The housing 308 is disposed outside the chamber 310, has an oblique nozzle 318 that is electrically connected to the first opening, and rotates the oblique nozzle 3i8 about the axis of the first opening 3 1 〇 a by the bearing 316. In a preferred embodiment of the present invention, the housing 3〇8 is sleeved on the ground electrode 302 by a bearing 316, and the housing 3〇8 has a plasma nozzle 31 8a and a first and a first The plasma channel 31 8b, which is open to the opening, constitutes an oblique nozzle 318 of «. The axis of the plasma passage 3l8b is at an angle to the axis of the first opening 3 10a. The casing 308 is made of an insulating material. However, in some embodiments of the present invention, the housing 308 is made of a conductive material, and an insulating layer (not shown) is disposed between the housing 3〇8 and the ground electrode 302. In another embodiment of the present invention, the housing 308 is made of a conductive material, wherein the ground electrode 312 is spaced apart from the set body 308 by a distance, so that the oblique nozzle 3 1 8 and the first opening 3 1 〇 There will also be a gap between a.
…1〜，，7V又腥川糸藉由一驅 動裝置309帶動來進行轉動。在本發明的一些較佳實施例之 中’驅動裝4 309係-齒輪馬達（未繪示），藉由一齒輪（未 繪示）的轉動，藉以帶動設置於殼體3〇8外側側壁上之複數 個凸齒（未繪示）使殼體308轉動。在本發明的另外一些實施 例之中，驅動裝置309係係一皮帶馬達（未繪示），可藉由套 設於殼體308的皮帶（未繪示）來帶動殼體3〇8轉動。^本發 明的又-些實施例t中，驅動裝置3〇9係一鏈條馬達，可藉 由鍵條帶動設置於殼體308外侧侧壁上之複數個凸嵩（未^ 11 1302422 示）使殼體308轉動。 • 在本發明的較佳實施例之中，驅動裝置309係一氣動馬 •達’可提供高壓氣流來帶動設置於殼體3 〇8上之至少一葉片 3〇8a，藉以使殼體3〇8轉動。 另外’殼體308更包括複數個逃氣孔3〇8b，可容許一 部分之高壓氣流進出殼體3〇8與接地電極3〇2之間的間隙， 藉以冷卻接地電極3〇2。 馨 值得注意的是，除了上述氣冷裝置之外，接地電極3〇2 更包括一水冷裝置32〇安裝於該腔室3 ! 〇外側。在本發明的 一些實施例之中，水冷裝置係套設於接地電極3〇2之外，並 且與接地電極3 02接觸的冷卻水管，冷卻水在循環的冷卻水 官中進行熱交換’以控制接地電極3〇2的操作溫度。 在本發明的另外一些實施例之中，水冷裝置32〇係安裝 於接地電極302的側璧之中。其中，接地電極3〇2為一雙層 官殼結構，接地電極302的最内層係腔室3丨〇，腔室之側壁 _ 302a與接地電極3〇2最外層之側壁3〇2b之間為一槽體 320,用來充滿冷卻水。冷卻水可由冷水入口 322a導入槽體 320,經過熱交換後再由熱水出口 32几排出，以降低旋轉室 電漿放電裝置300的操作溫度。 藉由以上所述的實施例，可知本發明的技術特徵係採用 可紋轉的殼體，將接地電極與内電極所產生的電漿導引成旋 • 轉的線狀電漿炬，以提高電漿炬的操作效率。其中電漿導引 •裝置係裝設於接地電極之外側進行旋轉，並使接地電極固定 不動，以改善習知技術直接旋轉接地電極造成電流不穩與操 12 1302422 作温度過高的問題。 雖然本發明已以上述較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作各種之更動與潤飾，因此本發明之保護範 圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 根據以上所述之較佳實施例，並配合所附圖式說明，讀 者當旎對本發明之目的、特徵、和優點有更深入的理解。但 值得注思的是’為了清楚描述起見，本說明書所附之圖式並 未按照比例尺加以繪示。 圖式簡單說明如下： 第1圖係根據習知技術的一較佳實施例所繪示之一 種具有斜角式旋轉噴頭的電漿炬結構剖面示意圖。 第2圖係根據習知技術的另一較佳實施例所繪示之 一種具有斜角式旋轉噴頭之電漿炬的部分結構剖面示意 圖。 第3圖係根據本發明的較佳實施例所繪示的一種旋轉 式電漿放電裝置的剖面示意圖。 【主要元件符號說明】 100 :電聚炬 101:内電極 101a :放電端 102 :電漿柱 103 :外電極 104 :工作氣體 13 1302422...1~,,7V and 腥川糸 are rotated by a driving device 309. In some preferred embodiments of the present invention, a 'driver 4 309 series-gear motor (not shown) is rotated by a gear (not shown) to be disposed on the outer side wall of the housing 3〇8. A plurality of protruding teeth (not shown) rotate the housing 308. In other embodiments of the present invention, the driving device 309 is a belt motor (not shown) that can be rotated by a belt (not shown) that is sleeved on the housing 308. In still another embodiment t of the present invention, the driving device 3〇9 is a chain motor, and the plurality of tenons (not shown as shown in FIG. 1313022) disposed on the outer side wall of the casing 308 can be driven by the key bar. The housing 308 is rotated. In the preferred embodiment of the present invention, the driving device 309 is a pneumatic horse that can provide a high-pressure airflow to drive at least one blade 3〇8a disposed on the housing 3〇8, thereby causing the housing 3〇 8 turns. Further, the casing 308 further includes a plurality of escape holes 3〇8b for allowing a portion of the high-pressure airflow to enter and exit the gap between the casing 3〇8 and the ground electrode 3〇2, thereby cooling the ground electrode 3〇2. It is worth noting that, in addition to the above air-cooling device, the grounding electrode 3〇2 further includes a water-cooling device 32〇 mounted on the outside of the chamber 3! In some embodiments of the present invention, the water cooling device is sleeved outside the ground electrode 3〇2, and the cooling water pipe in contact with the ground electrode 302, the cooling water is heat-exchanged in the circulating cooling water officer to control The operating temperature of the ground electrode 3〇2. In still other embodiments of the invention, the water cooling device 32 is mounted in the side sill of the ground electrode 302. The grounding electrode 3〇2 is a double-layered official shell structure, and the innermost layer of the grounding electrode 302 is a chamber 3丨〇, and between the sidewall _302a of the chamber and the sidewall 3〇2b of the outermost layer of the grounding electrode 3〇2 is A tank 320 is used to fill the cooling water. The cooling water may be introduced into the tank body 320 by the cold water inlet 322a, and then discharged by the hot water outlet 32 after heat exchange to lower the operating temperature of the rotary chamber plasma discharge device 300. According to the embodiment described above, it is known that the technical feature of the present invention is to use a wraparound housing to guide the plasma generated by the ground electrode and the internal electrode into a rotary electric arc torch to improve The operating efficiency of the plasma torch. Among them, the plasma guiding device is installed on the outer side of the grounding electrode for rotation, and the grounding electrode is fixed, so as to improve the problem that the conventional technique directly rotates the grounding electrode to cause current instability and the temperature is too high. The present invention has been described above with reference to the preferred embodiments thereof. However, it is not intended to limit the invention, and various modifications and changes may be made without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS The reader will have a better understanding of the objects, features, and advantages of the present invention in light of the above description of the preferred embodiments. However, it is worth noting that, for the sake of clarity, the drawings attached to this manual are not drawn to scale. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a structure of a plasma torch having a bevel type rotary nozzle according to a preferred embodiment of the prior art. Fig. 2 is a schematic cross-sectional view showing a portion of a plasma torch having a bevel type rotary nozzle according to another preferred embodiment of the prior art. Figure 3 is a schematic cross-sectional view of a rotary plasma discharge device in accordance with a preferred embodiment of the present invention. [Main component symbol description] 100: Electric torch 101: Internal electrode 101a: Discharge terminal 102: Plasma column 103: External electrode 104: Working gas 13 1302422
105 :軸承 106 :喷射電漿 107 :斜角式喷頭 107a :開口 109 :支撐管 109a :開口 111 :腔室 1 2 0 :驅動裝置 200 :電漿炬 220 :驅動裝置 203 :外電極 206 :喷射電漿 207 :斜角式喷頭 207a ··開口 207b :磁性軸承 21 1 :腔室 300 ··電漿放電裝置 3 01 :電漿 3 02 :接地電極 302a :腔室之側壁 302b :接地電極最外層之側壁 304 :絕緣層 306 :内電極 306a :放電端 306b :平板 306c :間隙 308 :殼體 308a :葉片 308b :逃氣孔 309 :驅動裝置 3 1 0 :腔室 3 10a :第一開口 310b ：第二開口 3 12 :電漿柱 3 1 4 :工作氣體 3 1 6 :軸承 3 1 8 :斜向喷嘴 318a :電漿喷嘴 318b :電漿通道 320 :槽體 322a :冷水入口 322b :熱水出口 14105: bearing 106: jet plasma 107: beveled nozzle 107a: opening 109: support tube 109a: opening 111: chamber 1 2 0: drive device 200: plasma torch 220: drive device 203: outer electrode 206: Jet plasma 207: Angled spray head 207a · Opening 207b: Magnetic bearing 21 1 : Chamber 300 · Plasma discharge device 3 01 : Plasma 3 02 : Ground electrode 302a: Side wall 302b of the chamber: Ground electrode The outermost side wall 304: insulating layer 306: inner electrode 306a: discharge end 306b: flat plate 306c: gap 308: housing 308a: blade 308b: escape hole 309: driving device 3 1 0 : chamber 3 10a: first opening 310b : second opening 3 12 : plasma column 3 1 4 : working gas 3 1 6 : bearing 3 1 8 : oblique nozzle 318a : plasma nozzle 318b : plasma channel 320 : tank body 322a : cold water inlet 322b : hot water Exit 14