M426456 4 . 五、新型說明： 【新型所屬之技術領域】 本新型是有關於一種電漿裝置，且特別是有關於一種 大氣電漿裝置。 【先前技術】 隨著電漿技術的發展，電漿中的大氣電弧電漿已廣泛 地應用在各領域的表面處理上。舉例而言，可利用大氣電 • 弧電漿對待處理物件進行表面處理，藉此提升在此物件表 面上進行之黏著、印刷、封裝或貼晶等製程的可靠度。 然而，受限於電弧負電阻的特性，這類電弧式的大氣 電漿的處理範圍有限，而無法同時產生大面積的電弧放 電。雖然，電弧式大氣電漿的放電密度較高，使得此電漿 技術所產生的活性物質較多，而可大大地提升電漿處理之 速度，僅需短時間的掃描即可完成掃描區域的表面處理。 但是，無法產生大面積電弧放電的特性，仍將導致此類電 • 弧式大氣電漿在應用上受到限制。 為了提高電弧式大氣電漿的應用性，美國專利公告編 號第6262386號提出了 一種電漿裝置，其裝置中的電弧式 電漿喷嘴可旋轉。在此電漿裝置設計中，噴嘴相對於内電 極之軸心歪斜一角度，且喷嘴與外電極繞此軸心進行圓周 式旋轉。藉由這樣的設計，電漿在噴出時，喷嘴的旋轉可 使電漿喷射面積增大。此時，可藉由移動被處理物的方式， 來達到大面積處理的效果。 然而，藉由旋轉喷嘴來擴大電漿處理之有效面積的同 4 M426456 _ 時，必須要提供此電漿裝置更大的功率，才能產生所需之 電漿。但高功率的施加，會使得棒狀之内電極因電漿集中 在單一點上而受損。 【新型内容】 因此，本新型之一態樣就是在提供一種電漿裝置，其 内電極與外電極均呈管狀結構，因此可避免電弧集中於單 一點，而可避免損壞電極，進而可有效延長電極壽命。 φ 本新型之另一態樣是在提供一種電漿裝置，其具有可 繞外殼旋轉之外電極，因而可將電漿喷射由點狀擴展成線 狀。如此一來，可擴大電漿裝置之電漿喷射面積，因此電 漿裝置可提供大面積處理效果，有助於縮短電將處理的時 間。 本新型之又一態樣是在提供一種電漿裝置，其管狀内 電極與外殼之絕緣内襯之間具有氣體通道，因此可利用工 作氣體在此氣體通道的流動來冷卻管狀内電極，而可有效 φ 降低管狀内電極的工作溫度，進而可有效延長管狀内電極 的使用壽命。 根據本新型之上述目的，提出一種電漿裝置。此電漿 裝置包含一外殼、一管狀内電極、一第一旋流產生器、一 管狀外電極以及一噴嘴。外殼具有第一腔室，且此第一腔 室之側面覆蓋有一絕緣内襯。管狀内電極設於第一腔室 中，且具有一第二腔室。第一漩流產生器與前述之管狀内 電極接合。其中，此第一漩流產生器包含至少一第一進氣 口，且此至少一第一進氣口適用以將第一腔室内之工作氣 5 M426456 . 依據本新型之再一實施例，上述之電聚裝置更包含一 傳動裝置設於管狀外電極之外側面上，以帶動管狀外電極 旋轉。 依據本新型之再一實施例，上述之管狀内電極係高壓 端，且管狀外電極為接地端。 依據本新型之再一實施例，上述之電漿裝置更包含一 非直流電源與管狀内電極和外殼電性連接。 • 【實施方式】 請參照第1圖，其係繪示依照本新型之一實施方式的 一種電漿裝置之剖面示意圖。在本實施方式中，電漿裝置 100係一種電弧式大氣電漿裝置。電漿裝置100主要包含 外殼102、管狀内電極110、管狀外電極128、喷嘴132以 及至少一旋流產生器，例如旋流產生器114與120。 在第1圖所示之實施例中，電漿裝置100包含二個漩 流產生器114與120。然而，在其他實施例中，本新型之 • 電漿裝置100可僅包含單一個旋流產生器，例如僅包含漩 流產生器114，或者僅包含漩流產生器120。 外殼102可由導電材料所組成。在一實施例中，外殼 102之材料可為金屬或不鏽鋼。外殼102為一管狀結構， 而具有腔室104。外殼102之底部124接合在腔室104之 底面118的下方。如第1圖所示，底部124係外殼102之 縮減部位，因此底部124之腔室142的内徑較上方之腔室 104的内徑小。外殼102之腔室104的側面106上覆蓋有 一絕緣内襯108。在一實施例中，此絕緣内襯108之材料 7 DO n:=二r的部分146可由絕緣材料所組 一牛+电隔離杈流產生器120與管狀内電極11〇，進 120%性隔離管狀内電極U〇與外殼1〇2。在旋流產生器 圖所由絕緣材料所構成的部分設置的位置並不限於第1 ^不，絕緣材料部分在漩流產生器12〇的設置位置口要 :電性絕緣管狀内電極11G與外殼1G2即可。在一實ς例 丄構成隔離旋流產生器no之絕緣材料可為聚醚醚酮。 方面，旋流產生器114同樣可由金屬與絕緣材料所構 成，但璇流產生器114之材料較佳係採用金屬。 竣流產生器114包含一或多個進氣口 116,例如二個、 一個、四個或更多進氣口。這些進氣口 116可均勻地排列 在漩流產生器114中，且每個進氣口 116可連通外殼1〇2 之腔室104與管狀内電極110之腔室112,以利將通入腔室 104内之工作氣體158導入管狀内電極110之腔室112内。 在一實施例中’每個進氣口 116之進氣路線可設計成外切 旋流產生器114之内側面，以使工作氣體158在進入腔室 112前先受到進氣口 116的導引，而以旋流形式進入腔室 112。 同樣地，漩流產生器120亦可包含一或多個進氣口 122 ’例如二個、三個、四個或更多進氣口。這些進氣口 122可均勻地排列在旋流產生器12〇中，且每個進氣口 122 同樣玎連通外殼102之腔室1〇4與管狀内電極110之腔室 112, β利將通入腔室内之工作氣體158導入管狀内電 β π〇之腔室112、以及下方之管狀外電極128的腔室130 _«。在/實施例中，每個進氣口 122之進氣路線可設計成 内 ^ M426456 外切旋流產生if 120之内侧面，以使工作氣體158在進入 腔室112與130前先受到進氣口 122的導引，巾以旋流形 式進入腔室112與130。 管狀外電極128透過軸承126而接合在外殼1〇2之底 部124的外側面。藉由此軸承126的連接，管狀外電極128M426456 4 . V. New description: [New technical field] The present invention relates to a plasma device, and in particular to an atmospheric plasma device. [Prior Art] With the development of plasma technology, atmospheric arc plasma in plasma has been widely used in surface treatment in various fields. For example, atmospheric electricity can be surface treated with an arc plasma to improve the reliability of processes such as adhesion, printing, packaging, or sizing on the surface of the object. However, limited by the negative resistance of the arc, such arc-type atmospheric plasma has a limited processing range and cannot simultaneously generate a large area of arc discharge. Although the discharge density of the arc-type atmospheric plasma is high, the plasma technology produces more active substances, which can greatly increase the speed of the plasma processing, and the surface of the scanning area can be completed by only a short scan. deal with. However, the inability to produce large-area arc discharges will still result in limited application of such electro-arc atmospheric plasma. In order to improve the applicability of arc-type atmospheric plasma, U.S. Patent No. 6,262,386 proposes a plasma device in which an arc-type plasma nozzle is rotatable. In this plasma device design, the nozzle is inclined at an angle with respect to the axis of the inner electrode, and the nozzle and the outer electrode are circumferentially rotated about the axis. With such a design, when the plasma is ejected, the rotation of the nozzle can increase the plasma ejection area. At this time, the effect of large-area processing can be achieved by moving the object to be processed. However, by rotating the nozzle to expand the effective area of the plasma treatment, it is necessary to provide more power to the plasma device to produce the desired plasma. However, the application of high power causes the rod-shaped inner electrode to be damaged by the concentration of the plasma at a single point. [New content] Therefore, one aspect of the present invention is to provide a plasma device in which the inner electrode and the outer electrode have a tubular structure, thereby avoiding the concentration of the arc at a single point, and avoiding damage to the electrode, thereby effectively extending the electrode. Electrode life. φ Another aspect of the present invention is to provide a plasma device having an electrode that can be rotated around the outer casing so that the plasma jet can be expanded from a dot shape into a line shape. In this way, the plasma injection area of the plasma device can be enlarged, so that the plasma device can provide a large-area treatment effect, which helps to shorten the time for the electricity to be processed. Another aspect of the present invention is to provide a plasma device having a gas passage between the tubular inner electrode and the insulating lining of the outer casing, so that the flow of the working gas in the gas passage can be utilized to cool the tubular inner electrode. Effective φ reduces the operating temperature of the tubular inner electrode, which in turn can effectively extend the service life of the tubular inner electrode. According to the above object of the present invention, a plasma device is proposed. The plasma apparatus includes a housing, a tubular inner electrode, a first swirl generator, a tubular outer electrode, and a nozzle. The outer casing has a first chamber and the side of the first chamber is covered with an insulating lining. The tubular inner electrode is disposed in the first chamber and has a second chamber. The first swirl generator is coupled to the aforementioned tubular inner electrode. Wherein the first swirling flow generator comprises at least one first air inlet, and the at least one first air inlet is adapted to use the working air in the first chamber 5 M426456. According to still another embodiment of the present invention, The electro-convergence device further comprises a transmission device disposed on the outer side of the tubular outer electrode to drive the tubular outer electrode to rotate. According to still another embodiment of the present invention, the tubular inner electrode is a high voltage end, and the tubular outer electrode is a ground end. According to still another embodiment of the present invention, the plasma device further includes a non-DC power source electrically connected to the tubular inner electrode and the outer casing. [Embodiment] Please refer to Fig. 1, which is a cross-sectional view showing a plasma device according to an embodiment of the present invention. In the present embodiment, the plasma device 100 is an arc type atmospheric plasma device. The plasma device 100 primarily includes a housing 102, a tubular inner electrode 110, a tubular outer electrode 128, a nozzle 132, and at least one swirl generator, such as swirl generators 114 and 120. In the embodiment illustrated in Figure 1, the plasma device 100 includes two swirl generators 114 and 120. However, in other embodiments, the plasma device 100 of the present invention may include only a single swirl generator, such as only the swirl generator 114, or only the swirl generator 120. The outer casing 102 can be composed of a conductive material. In an embodiment, the material of the outer casing 102 may be metal or stainless steel. The outer casing 102 is a tubular structure having a chamber 104. The bottom 124 of the outer casing 102 engages below the bottom surface 118 of the chamber 104. As shown in Fig. 1, the bottom portion 124 is a reduced portion of the outer casing 102, so that the inner diameter of the chamber 142 of the bottom portion 124 is smaller than the inner diameter of the upper chamber 104. The side 106 of the chamber 104 of the outer casing 102 is covered with an insulating lining 108. In one embodiment, the portion 146 of the material 7 DO n:= two r of the insulating lining 108 may be separated from the tubular inner electrode 11 by a bovine + electrically isolated turbulence generator 120 of insulating material. The tubular inner electrode U is connected to the outer casing 1〇2. The position where the portion of the swirling generator diagram composed of the insulating material is disposed is not limited to the first one. The insulating material portion is disposed at the position of the swirling generator 12A: the electrically insulating tubular inner electrode 11G and the outer casing 1G2 can be. In an embodiment, the insulating material constituting the isolated cyclone generator no may be polyetheretherketone. In one aspect, the swirl generator 114 can also be constructed of a metal and an insulating material, but the material of the turbulence generator 114 is preferably metal. The turbulence generator 114 includes one or more air inlets 116, such as two, one, four or more air intakes. The air inlets 116 can be evenly arranged in the swirling flow generator 114, and each of the air inlets 116 can communicate with the chamber 104 of the outer casing 1〇2 and the chamber 112 of the tubular inner electrode 110 to facilitate access to the cavity. The working gas 158 in the chamber 104 is introduced into the chamber 112 of the tubular inner electrode 110. In an embodiment, the intake path of each of the intake ports 116 may be designed as an inner side of the outer swirl generator 114 to allow the working gas 158 to be guided by the air inlet 116 before entering the chamber 112. And enter the chamber 112 in a swirling form. Similarly, the swirling generator 120 can also include one or more inlet ports 122' such as two, three, four or more inlet ports. The air inlets 122 are evenly arranged in the swirl generator 12A, and each of the air inlets 122 is also connected to the chamber 112 of the outer casing 102 and the chamber 112 of the tubular inner electrode 110. The working gas 158 entering the chamber is introduced into the chamber 112 of the tubular internal electric β π 、 and the chamber 130 _« of the tubular outer electrode 128 below. In an embodiment, the intake path of each of the intake ports 122 may be designed such that the inner vortex produces an inner side of the if 120 so that the working gas 158 is subjected to the intake air before entering the chambers 112 and 130. Guided by the mouth 122, the towel enters the chambers 112 and 130 in a swirling form. The tubular outer electrode 128 is joined to the outer side of the bottom portion 124 of the outer casing 1〇2 through the bearing 126. By the connection of the bearing 126, the tubular outer electrode 128
可繞著外殼102之底部124旋轉。在一實施例中，電漿裝 置100可根據實際應用需求，而選擇性地包含傳動裝置 150。傳動裝置150可例如為皮帶輪或齒輪等。如第i圖所 示’傳動裝置15G設置在鄰近於軸承126之管狀外電極128 的外側面上’以帶動管狀外電極m相對於外殼⑽做圓 周式旋轉。在-些例子中，可利用驅動裝£ 154，例如馬 達，來驅動傳動件152，再透過傳動件152來帶動與其接 合之傳動裝置150，進而帶動管狀外電極丨28旋轉。 管狀外電極128因其結構為管狀而同樣具有腔室 130。此腔室Π0可經由外殼1〇2之底部124的腔室142、 和旋流產生器120’而與上方之管狀内電極11〇的腔室It can rotate about the bottom 124 of the outer casing 102. In one embodiment, the plasma device 100 can selectively include the transmission 150 depending on the actual application requirements. The transmission 150 can be, for example, a pulley or a gear or the like. As shown in Fig. i, the transmission 15G is disposed on the outer side surface of the tubular outer electrode 128 adjacent to the bearing 126 to drive the tubular outer electrode m to rotate circumferentially relative to the outer casing (10). In some examples, a drive member 154, such as a motor, can be utilized to drive the transmission member 152, and then the transmission member 152 is used to drive the transmission 150 coupled thereto, thereby driving the tubular outer electrode 丨 28 to rotate. The tubular outer electrode 128 also has a chamber 130 because of its tubular configuration. The chamber Π0 can pass through the chamber 142 of the bottom 124 of the outer casing 1〇, and the swirl generator 120' to the chamber of the upper tubular inner electrode 11〇
連通。喷嘴132以非軸承方式而固定在管狀外電極之 底部’亦即喷们32並不能相對於管狀外電極128而 然，噴嘴132可透過其所接合之管狀外電極128、以及 承126，而相對於外殼102旋轉。嘴嘴132係以歪斜 設置在管狀外電極⑶下方，因此噴嘴出與管狀: 128之軸心136之間具有—夾角^。在—些例子中 0大於0度，且小於90度。轴承126之材料可為金 此管狀外電極128與喷嘴的之電位可透過 : 遞至外殼102。 6而傳 M426456 在一實施例中，管狀内電極110、管狀外電極128與 喷嘴132為同軸心。亦即，喷嘴132與管狀外電極128之 腔室130接合之開口 156的軸心與管狀内電極110和管狀 外電極128之軸心相同。在另一實施例中，管狀内電極 110、管狀外電極128與喷嘴132為偏軸心。舉例而言，管 狀内電極110與管狀外電極128的軸心不同，但可與喷嘴 132之開口 156的轴心相同；或者喷嘴132之開口 156的 軸心與管狀外電極128和管狀内電極110的軸心不同；或 者管狀内電極110、管狀外電極128、與噴嘴132之開口 156的軸心均不相同。 在一實施例中，如第1圖所示，電漿裝置100可進一 步包含非直流電源，例如交流電源13 8。其中，此交流電 源138與管狀内電極110和外殼102電性連接。如此，可 利用交流電源138於管狀内電極110與外殼102上施加交 流電。其中，管狀内電極110為高壓端，而外殼102相對 低壓端或接地端。操作電漿裝置100時，先提供所需之工 作氣體158，並將工作氣體158通入外殼102之腔室104 内。工作氣體158會順著管狀内電極110與絕緣内襯108 之間的氣體通道148而向下流動至漩流產生器114與120。 工作氣體158接著從漩流產生器114之進氣口 116、與漩流 產生器120之進氣口 122,以漩流方式進入管狀内電極110 之腔室112中。 工作氣體158從漩流產生器120而以漩流方式進入腔 室112中後，會分別沿著上方管狀内電極110之内側面、 以及下方之外殼102之底部124的内側面與管狀外電極128 的内側面，朝上方與下方流動。 進入腔室112、叱與130的工作氣"體 1生器114與120 此時，管狀内電極110斑 58形成氣流140。 產生電弧⑽，“60、可將旋卜：二8 =:二 使工作氣體158產生活化反應 乳机14〇離子化’而 方式中’電弧160與電聚均^管=成電漿。在本實施 極128内產生。工作氣體158所甩極11〇與管狀外電 狀内電極110與管狀外電極128 "成之旋轉氣流會推動管 電弧弧根繞著管狀内電極11() 形成之電弧弧根，使 之腔室130做圓周運動。與管狀外電極128 132’而將由工作氣體轉換成“二:卜電極128與喷嘴 中導引出，以對待處理物件進行電y處理4。自電漿裝置100 由上述之實施方式可知，本新; 之内電極與外電極均呈管狀結槿，m 優點為電漿裝置 單-點，而牙避免損壞電極，進，可避免電弧集中於 由上述之實施方式可知，電極壽命。 置具有可繞外殼旋轉之外電極，因：優點為電漿裝 擴展成線狀，進而可擴大電料射由點狀· 擴展成绿狀 ，裴置之電漿喷 電聚裝置作供大面積處理效果，有助於_電 時間。 由上述之實施方式可知，太報 置之管狀内電極與外殼之絕緣内襯二== 此可利管m料道的㈣來冷卻管狀内電 ;二可二使用壽f作溫度，可有效延 M426456 雖然本新型已以實施方式揭露如上，然其並非用以限 定本新型，任何在此技術領域中具有通常知識者，在不脫 離本新型之精神和範圍内，當可作各種之更動與潤飾，因 此本新型之保護範圍當視後附之申請專利範圍所界定者為 準。 【圖式簡單說明】 為讓本新型之上述和其他目的、特徵、優點與實施例 φ 能更明顯易懂，所附圖式之說明如下： 第1圖係繪示依照本新型之一實施方式的一種電漿裝 置之剖面示意圖。 【主要元件符號說明】 100 :電漿裝置 102 ： 外殼 104 :腔室 106 ： 侧面 108 :絕緣内襯 110 ： 管狀内電極 112 :腔室 114 ： 旋流產生器 116 :進氣口 118 ： 底面 120 :漩流產生器 122 ： 進氣口 124 :底部 126 ： 軸承 128 :管狀外電極 130 ： 腔室 132 :喷嘴 134 ： 電漿焰 13 6 :軸心 138 ： 交流電源 140 :氣流 142 ： 腔室 144 :開口 146 ： 部分 13 M426456 148 :氣體通道 152 :傳動件 156 :開口 160 :電弧 150 :傳動裝置 154 :驅動裝置 158 :工作氣體 0 :夾角Connected. The nozzle 132 is fixed to the bottom of the tubular outer electrode in a non-bearing manner, i.e., the spray 32 does not correspond to the tubular outer electrode 128. The nozzle 132 can pass through the tubular outer electrode 128 and the support 126 to which it is coupled, and Rotating in the outer casing 102. The mouth 132 is disposed obliquely below the tubular outer electrode (3) so that the nozzle has an angle - between the axis 136 of the tubular: 128. In some examples, 0 is greater than 0 degrees and less than 90 degrees. The material of the bearing 126 may be gold. The potential of the tubular outer electrode 128 and the nozzle is permeable: to the outer casing 102. 6 and M426456 In one embodiment, the tubular inner electrode 110, the tubular outer electrode 128 and the nozzle 132 are concentric. That is, the axis of the opening 156 where the nozzle 132 is engaged with the chamber 130 of the tubular outer electrode 128 is the same as the axis of the tubular inner electrode 110 and the tubular outer electrode 128. In another embodiment, the tubular inner electrode 110, the tubular outer electrode 128, and the nozzle 132 are off-axis. For example, the tubular inner electrode 110 is different from the axis of the tubular outer electrode 128, but may be the same as the axis of the opening 156 of the nozzle 132; or the axis of the opening 156 of the nozzle 132 and the tubular outer electrode 128 and the tubular inner electrode 110 The axis of the tube is different; or the tubular inner electrode 110, the tubular outer electrode 128, and the axis of the opening 156 of the nozzle 132 are different. In one embodiment, as shown in Figure 1, the plasma device 100 can further include a non-DC power source, such as an AC power source 138. The AC power source 138 is electrically connected to the tubular inner electrode 110 and the outer casing 102. Thus, an alternating current source 138 can be used to apply electrical current to the tubular inner electrode 110 and the outer casing 102. Wherein the tubular inner electrode 110 is a high voltage end and the outer casing 102 is opposite to the low voltage end or the ground end. When the plasma device 100 is operated, the desired working gas 158 is first supplied and the working gas 158 is passed into the chamber 104 of the outer casing 102. The working gas 158 will flow down the gas passages 148 between the tubular inner electrode 110 and the insulating lining 108 to the swirling flow generators 114 and 120. The working gas 158 then swirls into the chamber 112 of the tubular inner electrode 110 from the inlet 116 of the swirl generator 114 and the inlet 122 of the swirl generator 120. After the working gas 158 enters the chamber 112 in a swirling manner from the swirling generator 120, it will follow the inner side of the upper tubular inner electrode 110 and the inner side of the bottom portion 124 of the outer casing 102 and the tubular outer electrode 128, respectively. The inner side of the side flows upwards and downwards. The working gas entering the chambers 112, 叱 and 130 <RTI ID=0.0>> An electric arc (10) is generated, "60, which can be rotated: two 8 =: two to make the working gas 158 generate an activation reaction, the emulsion is 14 〇 ionized" and in the mode, the arc 160 and the electric polymerization are equal to the tube = the plasma. The arc of the working gas 158 is 11 〇 and the tubular outer electrode 110 and the tubular outer electrode 128 " a rotating air flow will push the arc of the tube arc around the tubular inner electrode 11 () The root causes the chamber 130 to make a circular motion. The tubular outer electrode 128 132' is converted from the working gas into "two: the electrode 128 is guided out of the nozzle, and the object to be processed is electrically y processed 4". The self-plasma device 100 is known from the above embodiments, the new electrode; the inner electrode and the outer electrode are both tubular knots, m has the advantage that the plasma device is single-point, and the teeth avoid damage to the electrodes, and the arc can be avoided. From the above embodiments, the electrode life is known. The electrode has an outer electrode that can be rotated around the outer casing, because the advantage is that the plasma package is expanded into a line shape, thereby expanding the electric material to be sprayed from a dot shape to a green shape, and the plasma spray electropolymer device for the large area is provided for a large area. The processing effect helps _ electricity time. It can be seen from the above embodiments that the insulating inner lining of the tubular inner electrode and the outer casing which is too reported is== this can be used to cool the tubular internal electricity of the m-channel; and the second can be used for the temperature, which can be effectively extended. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this new type is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS In order to make the above and other objects, features, advantages and embodiments of the present invention more obvious, the description of the drawings is as follows: FIG. 1 is an embodiment of the present invention. A schematic cross-sectional view of a plasma device. [Main component symbol description] 100: plasma device 102: outer casing 104: chamber 106: side 108: insulating lining 110: tubular inner electrode 112: chamber 114: swirl generator 116: air inlet 118: bottom surface 120 : vortex generator 122 : air inlet 124 : bottom 126 : bearing 128 : tubular outer electrode 130 : chamber 132 : nozzle 134 : plasma flame 13 6 : axis 138 : AC power source 140 : air flow 142 : chamber 144 : Opening 146 : Part 13 M426456 148 : Gas passage 152 : Transmission 156 : Opening 160 : Arc 150 : Transmission 154 : Drive 158 : Working gas 0 : Angle
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