CN101835336A - A Double Dielectric Barrier Discharge Low Temperature Plasma Generator - Google Patents
A Double Dielectric Barrier Discharge Low Temperature Plasma Generator Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于低温等离子体技术领域,更确切地说是一种双介质阻挡放电低温等离子体发生器。The invention belongs to the technical field of low-temperature plasma, and more precisely relates to a double dielectric barrier discharge low-temperature plasma generator.
背景技术Background technique
介质阻挡放电(DBD)是将介质层置入放电空间的一种非平衡态气体放电。在DBD结构中,至少有一层介质覆盖在电极上或者悬挂在放电空间里;这样,当两电极间施加一定频率(50Hz~1MHz)的交流电压时,电极间的气体会被击穿形成介质阻挡放电。介质层的绝缘性质使其表面在微观上近似为均匀分布的小“局部电容”,这使得绝缘介质具有两个作用:一是限制微放电中带电粒子的运动,即限制了电流密度的自由增长,使微放电成为一个个短促得脉冲;二是防止局部火花放电或弧光放电,而且能够形成通常大气压强下的稳定的气体放电。DBD等离子体可以在常压环境下进行,成本极低、适应性强,仅需交流电源就能满足生产要求,设备简单,在气体污染物处理领域内具有潜在的发展空间和很大的应用价值。Dielectric barrier discharge (DBD) is a non-equilibrium gas discharge in which a dielectric layer is placed in the discharge space. In the DBD structure, at least one layer of dielectric covers the electrodes or hangs in the discharge space; in this way, when an AC voltage of a certain frequency (50Hz-1MHz) is applied between the two electrodes, the gas between the electrodes will be broken down to form a dielectric barrier discharge. The insulating properties of the dielectric layer make the surface approximately uniformly distributed small "local capacitance" on the microscopic level, which makes the insulating medium have two functions: one is to limit the movement of charged particles in micro-discharge, that is, to limit the free growth of current density , so that the micro-discharge becomes a short pulse; the second is to prevent partial spark discharge or arc discharge, and to form a stable gas discharge under normal atmospheric pressure. DBD plasma can be carried out under normal pressure environment, the cost is extremely low, the adaptability is strong, only AC power supply can meet the production requirements, the equipment is simple, and it has potential development space and great application value in the field of gas pollutant treatment .
中国专利CN1404349提供了一种低温等离子发生器。该发生器由陶磁管,镍铬丝绕制的阳极,铜板绕制的阴极和散热块组成,其中陶磁管采用硅酸盐材料烧制,镍铬丝绕制的阳极装置在陶磁管内壁上,由铜板绕制的阴极贴附在陶磁管的外壁上,在铜板电极外侧灌注耐高温散热涂料,陶磁管装置在散热块内。该种结构的等离子体发生器能量密度高,主要用于废水及水源净化处理。中国专利CN1126939提供了一种低温等离子体发生器。该发生器将棒状导体插入设于棒状陶瓷电介质的长度方向的贯通孔,用玻璃、无机系或有机系粘合剂将上述导体及电介质两端接合为一整体、密封构成电极。该种发生器可以在干燥空气中、高湿度空气中或水中放电,主要用于除恶臭、灭菌消毒、水质净化等方面,对于高温废气的处理方面存在不足。中国专利CN1421564提供了一种用于纤维物料表面改性的介质阻挡放电连续处理装置。该装置由电源系统,主要包括一对可冷却的平面放电电极和置于电极间的两个介质阻挡板组成的等离子体产生和处理器,一个气体供给系统,一个冷却剂循环冷却系统,以及一个物料传输卷绕系统组成。利用平面电极介质阻挡放电在大气压下产生均匀的低温等离子体,可避免极间弧光及火花放电,并有效地对纤维材料进行连续表面改性处理。该装置主要用于材料的表面改性,不适于对有害气体污染物进行处理。Chinese patent CN1404349 provides a low-temperature plasma generator. The generator is composed of a ceramic tube, an anode wound by nickel-chromium wire, a cathode wound by copper plate and a cooling block. The ceramic tube is fired with silicate material, and the anode wound by nickel-chromium wire is installed on the inner wall of the ceramic tube. The cathode made of copper plate is attached to the outer wall of the ceramic tube, and the high temperature heat-resistant heat dissipation paint is poured on the outside of the copper plate electrode, and the ceramic tube is installed in the heat dissipation block. The plasma generator with this structure has high energy density and is mainly used for wastewater and water source purification treatment. Chinese patent CN1126939 provides a low-temperature plasma generator. In this generator, a rod-shaped conductor is inserted into a through hole provided in the longitudinal direction of a rod-shaped ceramic dielectric, and the two ends of the conductor and the dielectric are bonded together with a glass, inorganic or organic adhesive, and sealed to form an electrode. This kind of generator can be discharged in dry air, high humidity air or water, and is mainly used in deodorization, sterilization, water purification, etc., but it has shortcomings in the treatment of high-temperature waste gas. Chinese patent CN1421564 provides a dielectric barrier discharge continuous treatment device for surface modification of fiber materials. The device consists of a power supply system, mainly including a pair of coolable planar discharge electrodes and a plasma generator and processor composed of two dielectric barrier plates placed between the electrodes, a gas supply system, a coolant circulation cooling system, and a Composition of material transfer winding system. The flat electrode dielectric barrier discharge is used to generate uniform low-temperature plasma under atmospheric pressure, which can avoid arcing and spark discharge between electrodes, and effectively carry out continuous surface modification treatment on fiber materials. This device is mainly used for surface modification of materials, and is not suitable for processing harmful gas pollutants.
低温等离子体系中含有大量的高能电子、离子、激发态粒子和具有强氧化性的自由基体等活性物种。在气相化学反应过程中,这些活性基体可以和CO、HC、NOx和PM等污染物发生化学反应,将之转化为无害或者低害的气体。目前设计的低温等离子体发生器多适用于工业灭菌消毒,空气净化和废水处理。对于汽车气体污染物排放来说,由于气体组分复杂、温度较高且具有腐蚀性。因此,利用等离子体发生器处理汽车的气体污染物排放,需要保证发生器的密封性和电极的耐腐蚀性,以确保发生器稳定工作。The low-temperature plasma system contains a large number of active species such as high-energy electrons, ions, excited particles, and strong oxidizing free radicals. During the gas-phase chemical reaction, these active substrates can chemically react with pollutants such as CO, HC, NO x and PM, and convert them into harmless or low-harm gases. Most of the currently designed low-temperature plasma generators are suitable for industrial sterilization, air purification and wastewater treatment. For automobile gas pollutant emissions, due to the complex gas composition, high temperature and corrosiveness. Therefore, using a plasma generator to treat gas pollutant emissions from automobiles requires ensuring the tightness of the generator and the corrosion resistance of the electrodes to ensure the stable operation of the generator.
发明内容Contents of the invention
本发明要解决的是有效增强等离子体的能量密度,并且避免有害气体对高压电极造成腐蚀等问题,提供一种双介质阻挡放电低温等离子体发生器,能够有效增强等离子体气相化学反应区内电子能量密度,并且放电稳定;有害气体在两介质间流过,有效避免了与高压电极接触从而造成腐蚀。What the present invention aims to solve is to effectively enhance the energy density of the plasma, and avoid the problems of harmful gases causing corrosion to the high-voltage electrodes. It provides a double dielectric barrier discharge low-temperature plasma generator, which can effectively enhance the electron density in the plasma gas-phase chemical reaction zone. The energy density is high, and the discharge is stable; the harmful gas flows between the two media, which effectively avoids contact with the high-voltage electrode and causes corrosion.
本发明所采用的技术方案是:低温等离子体放电区内高压电极外层套一石英玻璃管,用于防止在污染物处理过程中有害气体直接和高压电极接触,在高温下对其造成腐蚀;双介质阻挡放电结构形式可以避免弧光放电,对介质层起到保护作用,从而保证了放电的稳定性。此外,能量均匀分布在等离子体气相反应区内,有利于提高对污染物处理的转化效率。该种结构保证了低温等离子体发生器高效稳定工作,避免了有害气体对高压电极造成腐蚀。The technical solution adopted in the present invention is: the outer layer of the high-voltage electrode in the low-temperature plasma discharge area is covered with a quartz glass tube, which is used to prevent the harmful gas from directly contacting the high-voltage electrode during the pollutant treatment process, and causing corrosion to it at high temperature; The double dielectric barrier discharge structure can avoid arc discharge and protect the dielectric layer, thus ensuring the stability of discharge. In addition, the energy is evenly distributed in the plasma gas phase reaction area, which is beneficial to improve the conversion efficiency of pollutant treatment. This structure ensures the high-efficiency and stable operation of the low-temperature plasma generator, and avoids the harmful gas from corroding the high-voltage electrodes.
本发明的具体技术方案为,包括外壳,进气口、聚四氟乙烯堵头、低压电极、高压电极和排气口;外壳为圆管形石英玻璃管,两个所述聚四氟乙烯堵头塞于石英玻璃管外壳的两端,在石英玻璃管外壳两端的管壁处分别设有进气口和排气口,进气口的轴线与排气口的轴线平行且在同一平面,进气口的开口与排气口开口方向相反;高压电极设于石英玻璃管外壳内的中央,高压电极的两头分别从两个聚四氟乙烯堵头中穿出;低压电极为圆管状,包裹于石英玻璃管外壳的管壁外侧。低压电极为康铜电极,通过引线引出后接地。The specific technical scheme of the present invention is that it includes a shell, an air inlet, a polytetrafluoroethylene plug, a low-voltage electrode, a high-voltage electrode and an exhaust port; The head is plugged at both ends of the quartz glass tube shell, and the tube walls at both ends of the quartz glass tube shell are respectively provided with an air inlet and an exhaust port. The axis of the air inlet is parallel to the axis of the exhaust port and on the same plane. The opening of the gas port is opposite to the opening direction of the exhaust port; the high-voltage electrode is set in the center of the quartz glass tube shell, and the two ends of the high-voltage electrode pass through two PTFE plugs respectively; the low-voltage electrode is a round tube, wrapped in The outside of the tube wall of the quartz glass tube shell. The low-voltage electrode is a constantan electrode, which is grounded after being drawn out through a lead wire.
高压电极外层套有石英玻璃管,石英玻璃管的轴向长度大于圆管状低压电极的轴向长度。The outer layer of the high-voltage electrode is covered with a quartz glass tube, and the axial length of the quartz glass tube is greater than that of the circular tubular low-voltage electrode.
本发明的有益效果是,双介质阻挡放电结构使得放电更加稳定,能量密度在等离子体气相反应区内分布更加均匀,有利于提高对污染物的转化效率。此外,在处理污染物过程中,可以有效避免有害气体直接和高压电极直接接触,保证了放电的稳定性。该种结构不仅适用于工业废气净化,也适用于处理汽车气体污染物排放的试验研究。The beneficial effect of the invention is that the double dielectric barrier discharge structure makes the discharge more stable, and the energy density is more evenly distributed in the plasma gas phase reaction area, which is beneficial to improving the conversion efficiency of pollutants. In addition, in the process of treating pollutants, direct contact between harmful gases and high-voltage electrodes can be effectively avoided, ensuring the stability of discharge. This structure is not only suitable for industrial waste gas purification, but also suitable for experimental research on the treatment of automobile gas pollutant emissions.
附图说明Description of drawings
下面结合附图和实施例对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
图1是本发明的发生器轴向剖面结构示意图。Fig. 1 is a schematic diagram of an axial sectional structure of a generator of the present invention.
图2是本发明的发生器立体示意图。Fig. 2 is a schematic perspective view of the generator of the present invention.
图3是本发明的高压电极结构示意图。Fig. 3 is a schematic diagram of the structure of the high voltage electrode of the present invention.
图中,1.进气口;2.聚四氟乙烯堵头;3.低压电极;4.石英玻璃管A;5.石英玻璃管B;6.高压电极;7.排气口。In the figure, 1. Air inlet; 2. Teflon plug; 3. Low voltage electrode; 4. Quartz glass tube A; 5. Quartz glass tube B; 6. High voltage electrode; 7. Exhaust port.
具体实施方式Detailed ways
下面结合附图对本发明的具体实施方式进一步说明。The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
本发明双介质阻挡放电低温等离子体装置通过高压电极6连接变压变频等离子体电源和低压电极3接地来在双介质间产生低温等离子体放电。高压电极6外层套一石英玻璃管B5,这样可以防止在放电过程中有害气体对电极进行腐蚀,保护电极的放电性能,使得低温等离子体发生器的工作更加稳定,并且寿命得以有效延长。本发明采用双介质阻挡放电结构,气体由进气口1进入低温等离子体发生器气相反应区后从排气口7排出,这种结构放电均匀强烈可以增强等离子体能量密度,使得气体组分可以获得足够的电子能量,从而提高气体组分的转化效率。整体结构采用采用石英玻璃管A4外壳,有利于试验过程中对介质阻挡放电形貌和放电过程进行直观观察,经济性比较好。The dual-dielectric barrier discharge low-temperature plasma device of the present invention connects the high-
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