CN101835336A - Double-dielectric barrier discharge low-temperature plasma generator - Google Patents

Double-dielectric barrier discharge low-temperature plasma generator Download PDF

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Publication number
CN101835336A
CN101835336A CN 201010180017 CN201010180017A CN101835336A CN 101835336 A CN101835336 A CN 101835336A CN 201010180017 CN201010180017 CN 201010180017 CN 201010180017 A CN201010180017 A CN 201010180017A CN 101835336 A CN101835336 A CN 101835336A
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China
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low
quartz glass
glass tube
temperature plasma
field electrode
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CN 201010180017
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王攀
蔡忆昔
李小华
王军
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Jiangsu University
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Jiangsu University
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  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention discloses a double-dielectric barrier discharge low-temperature plasma device, and belongs to the field of low-temperature plasma technology. The plasma device comprises an air inlet (1), a polytetrafluoroethylene plug (2), a low voltage electrode (3), a quartz glass tube A (4), a quartz glass tube B (5), a high voltage electrode (6) and an air outlet (7), wherein the outer layer of the high voltage electrode (6) is the quartz glass tube B (5), and the low voltage electrode (3) consists of constantan sheets and is led out by a lead wire and grounded. In the process of treating pollutant gas, the low-temperature plasma generator can effectively reduce the corrosion of air on the high voltage electrode and avoid generating arc discharge and further damaging or breaking down discharge dielectric layers. The formed double-dielectric barrier discharge has high stability and high energy density utilization rate. The low-temperature plasma device can stably work under normal pressure and is applied to the discharge of automotive noxious pollutant gas.

Description

A kind of double-dielectric barrier discharge low-temperature plasma generator
Technical field
The invention belongs to the lower temperature plasma technology field, a kind of more precisely double-dielectric barrier discharge low-temperature plasma generator.
Background technology
Dielectric barrier discharge (DBD) is a kind of nonequilibrium state gas discharge of dielectric layer being inserted discharge space.In the DBD structure, have at least one deck medium to cover on the electrode or be suspended in the discharge space; Like this, (during the alternating voltage of 50Hz~1MHz), interelectrode gas can breakdown formation dielectric barrier discharge when applying certain frequency between two electrodes.The insulating property (properties) of dielectric layer makes its surface be approximately equally distributed little " localized capacitance " on microcosmic, this makes dielectric have two effects: the one, and the motion of charged particle in the restriction micro discharge, promptly limited freely increasing of current density, made micro discharge become the very brief one by one pulse that gets; The 2nd, prevent local sparkover or arc discharge, and can form the stable gas discharge under the common atmospheric pressure.The DBD plasma can carry out under atmospheric pressure environment, and cost is extremely low, adaptability is strong, only needs AC power just can satisfy production requirement, and equipment is simple, has potential development space and very big using value in the gas pollutant process field.
Chinese patent CN1404349 provides a kind of low-temperature plasma generator.This generator is by ceramic magnetic tube, the anode of nickel filament coiling, the negative electrode of copper coin coiling and radiating block are formed, wherein ceramic magnetic tube adopts silicate material to fire, the anode assembly of nickel filament coiling is on the ceramic magnetic tube inwall, negative electrode by the copper coin coiling is attached on the outer wall of ceramic magnetic tube, and at the high temperature resistant heat radiation coating of copper coin electrode outside perfusion, the ceramic magnetic tube device is in radiating block.The plasma generator energy density height of this kind structure is mainly used in waste water and water source purifying and handles.Chinese patent CN1126939 provides a kind of low-temperature plasma generator.This generator inserts the through hole of the length direction be located at bar-shaped ceramic dielectric with rod-shaped conductor, and with glass, inorganic system or organic system adhesive above-mentioned conductor and dielectric two ends being engaged is an integral body, sealing formation electrode.This speciogenesis device can be in the middle and high humidity air of dry air or discharge in water, is mainly used in except that aspects such as stench, sterilization, purification of water qualitys, exists not enough for the processing aspect of high-temp waste gas.Chinese patent CN1421564 provides a kind of dielectric barrier discharge apparatus for continous treatment that is used for the fibre material surface modification.This device is by power-supply system, the plasma generation and the processor that mainly comprise a pair of coolable plane discharge electrode and place interelectrode two dielectric impedance plates to form, a gas supply system, a circulate coolant cooling system, and a material transmission reel system is formed.Utilize the plane electrode dielectric barrier discharge under atmospheric pressure to produce uniform low temperature plasma, can avoid interpolar arc light and sparkover, and effectively fiber material is carried out the continuous surface modification and handle.This device is mainly used in the surface modification of material, is unsuitable for the pernicious gas pollutant is handled.
The free matrix isoreactivity species that contain a large amount of high energy electrons, ion, excited state particle in the low-temperature plasma system and have strong oxidizing property.In the gas-phase chemical reaction process, these active matrix can with CO, HC, NO xWith pollutant generation chemical reactions such as PM, it is converted into the gas of harmless or low evil.The low-temperature plasma generator of design is applicable to industrial sterilization, air cleaning and waste water treatment more at present.For the automotive air pollutant emission, because the gas component complexity, temperature is higher and have corrosivity.Therefore, utilize plasma generator to handle the gas pollutant discharging of automobile, need to guarantee the sealing of generator and the corrosion resistance of electrode, to guarantee the generator steady operation.
Summary of the invention
What the present invention will solve is the energy density that effectively strengthens plasma, and avoid pernicious gas high-field electrode to be caused problems such as corrosion, a kind of double-dielectric barrier discharge low-temperature plasma generator is provided, can effectively strengthen electron energy density in the plasma gas-phase chemical reaction district, and discharge stability; Pernicious gas flows through between two media, causes corrosion thereby effectively avoided contacting with high-field electrode.
The technical solution adopted in the present invention is: the outer cover of discharge of plasma in low temperature district inner high voltage electrode one quartz glass tube, be used for preventing directly contacting with high-field electrode at pollutant processing procedure pernicious gas, and at high temperature it is caused corrosion; Double-dielectric barrier discharge version can be avoided arc discharge, dielectric layer is played a protective role, thereby guaranteed the stability of discharging.In addition, energy even is distributed in the plasma gas-phase reaction district, helps improving the transformation efficiency that pollutant is handled.This kind structure has guaranteed the work of low-temperature plasma generator efficient stable, has avoided pernicious gas that high-field electrode is caused corrosion.
Concrete technical scheme of the present invention is to comprise shell, air inlet, polytetrafluoroethylene plug, low-field electrode, high-field electrode and exhaust outlet; Shell is the tubular quartz glass tube, two described polytetrafluoroethylene plug plugs are in the two ends of quartz glass pipe shell, tube wall place at quartz glass pipe shell two ends is provided with air inlet and exhaust outlet respectively, the axis of air inlet and the parallel axes of exhaust outlet and on same plane, the opening of air inlet is opposite with the exhaust outlet opening direction; High-field electrode is located at the central authorities in the quartz glass pipe shell, and two of high-field electrode passes from two polytetrafluoroethylene plugs respectively; Low-field electrode is the pipe shape, is wrapped in the tube wall outside of quartz glass pipe shell.Low-field electrode is the constantan electrode, draws back ground connection by lead-in wire.
The high-field electrode skin is with quartz glass tube, and the axial length of quartz glass tube is greater than the axial length of pipe shape low-field electrode.
The invention has the beneficial effects as follows that the double-dielectric barrier discharge structure makes that discharge is more stable, energy density distributes more even in plasma gas-phase reaction district, helps improving the transformation efficiency to pollutant.In addition, in handling the pollutant process, can effectively avoid pernicious gas directly directly to contact, guarantee the stability of discharge with high-field electrode.This kind structure is not only applicable to industrial waste gas purifying, is applicable to the experimental study of handling the automotive air pollutant emission yet.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is a generator axial section structural representation of the present invention.
Fig. 2 is a generator schematic perspective view of the present invention.
Fig. 3 is a high-field electrode structural representation of the present invention.
Among the figure, 1. air inlet; 2. polytetrafluoroethylene plug; 3. low-field electrode; 4. quartz glass tube A; 5. quartz glass tube B; 6. high-field electrode; 7. exhaust outlet.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is further specified.
Double-dielectric barrier discharge low-temperature plasma device of the present invention connects the variable voltage variable frequency plasma electrical source by high-field electrode 6 and low-field electrode 3 ground connection coming produces discharge of plasma in low temperature between two media.The outer cover of high-field electrode 6 one quartz glass tube B5 can prevent that like this pernicious gas corrodes electrode in discharge process, and the discharge performance of guard electrode makes the more stable work of low-temperature plasma generator, and the life-span is able to effective prolongation.The present invention adopts the double-dielectric barrier discharge structure, gas is discharged from exhaust outlet 7 after entering low-temperature plasma generator gas-phase reaction district by air inlet 1, this structure discharge evenly can strengthen energy density of plasma strongly, make gas component can obtain enough electron energies, thereby improve the transformation efficiency of gas component.Overall structure adopts adopting quartz glass pipe A4 shell, helps in the process of the test dielectric barrier discharge pattern and discharge process intuitively being observed, and economy is relatively good.

Claims (3)

1. a double-dielectric barrier discharge low-temperature plasma generator is characterized in that, comprises shell, air inlet (1), polytetrafluoroethylene plug (2), low-field electrode (3), high-field electrode (6) and exhaust outlet (7); Described shell is tubular quartz glass tube A (4), two described polytetrafluoroethylene plugs (2) are filled in the two ends of described quartz glass tube A (4) shell, be provided with air inlet (1) and exhaust outlet (7) respectively at the tube wall place at described quartz glass tube A (4) two, the parallel axes of the axis of air inlet (1) and exhaust outlet (7) and on same plane, the opening of air inlet (1) is opposite with exhaust outlet (7) opening direction; Described high-field electrode (6) places in the quartz glass tube A (4), and two of described high-field electrode (6) passes from two polytetrafluoroethylene plugs (2) respectively; Described low-field electrode (3) is the pipe shape, is wrapped in the tube wall outside of quartz glass tube A (4), by lead-in wire ground connection.
2. a kind of double-dielectric barrier discharge low-temperature plasma generator according to claim 1, it is characterized in that, described high-field electrode (6) skin is with quartz glass tube B (5), and the axial length of described quartz glass tube B (5) is greater than the axial length of described pipe shape low-field electrode (3).
3. a kind of double-dielectric barrier discharge low-temperature plasma generator according to claim 1 is characterized in that, described low-field electrode (3) is the constantan electrode.
CN 201010180017 2010-05-21 2010-05-21 Double-dielectric barrier discharge low-temperature plasma generator Pending CN101835336A (en)

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Cited By (25)

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CN102371888A (en) * 2011-06-24 2012-03-14 北京大学 Vehicle-mounted plasma generator for purifying nitric oxide in vehicle tail gas
CN102612250A (en) * 2012-03-08 2012-07-25 山东派力迪环保工程有限公司 Plasma generation system by tubular dielectric barrier discharge and application thereof
WO2012171235A1 (en) * 2011-06-17 2012-12-20 深圳市华星光电技术有限公司 Atmospheric pressure plasma device and process for manufacturing same
CN103111167A (en) * 2013-02-04 2013-05-22 韩汶冀 High-voltage plasma purifier
CN103263824A (en) * 2013-06-08 2013-08-28 厦门大学 Mercury oxidation device
CN103781271A (en) * 2014-01-16 2014-05-07 中国科学院等离子体物理研究所 Atmospheric pressure cold plasma generating device for wound healing
CN103878062A (en) * 2012-12-21 2014-06-25 陈晓波 New device for adsorption of particles by use of low temperature plasma
CN104632322A (en) * 2015-02-11 2015-05-20 盐城市富源油箱有限公司 Diesel engine exhausting micro-particle filtering device
CN104661423A (en) * 2015-02-09 2015-05-27 清华大学 Large-atmosphere low-temperature plasma fluidic generator
CN105289297A (en) * 2015-12-08 2016-02-03 浙江浙大环境工程有限公司 Plasma reaction device and method for treating organic waste gases
CN105699359A (en) * 2016-01-18 2016-06-22 大连理工大学 Experimental device and method for obtaining annular uniform plasmas in barometric pressure air
CN105879597A (en) * 2014-12-24 2016-08-24 苏州超等环保科技有限公司 Spiral-type plasma high-voltage discharge tube exhaust gas treatment device
CN105934064A (en) * 2016-06-12 2016-09-07 上海大学 Single-dielectric barrier low-temperature plasma reactor
TWI628980B (en) * 2014-04-16 2018-07-01 清潔要素技術有限公司 Plasma reactor for purifying exhaust gas of the process facility
CN108325351A (en) * 2018-02-24 2018-07-27 佛山市万善环保科技有限公司 A kind of double medium low temperature plasma gas purifiers of electromagnetic induction coupling
CN108339379A (en) * 2018-02-24 2018-07-31 佛山市万善环保科技有限公司 Double medium low-temperature plasma emission-control equipments are coupled based on electromagnetic induction
CN108391365A (en) * 2018-02-24 2018-08-10 佛山市万善环保科技有限公司 A kind of double medium low temperature plasma generating means of electromagnetic induction coupling
CN108408843A (en) * 2018-03-14 2018-08-17 大连民族大学 A kind of plasma-activated water generating device
CN108529898A (en) * 2018-06-25 2018-09-14 苏州大学 The device of wide cut corona treatment glass
CN109890120A (en) * 2019-03-22 2019-06-14 西安交通大学 A kind of high-low pressure plasma generator and closed bomb vessel
CN109951941A (en) * 2019-03-22 2019-06-28 西安交通大学 A kind of double plasma generator and its application
CN109982498A (en) * 2019-03-22 2019-07-05 西安交通大学 A kind of apparatus generator and closed bomb vessel
CN110227343A (en) * 2019-06-04 2019-09-13 湖州普罗科技有限公司 A kind of double medium plasma synergistic catalyst all-in-one machines and its application method
CN111298608A (en) * 2020-03-03 2020-06-19 云南大学 Self-cleaning fireproof system for plasma VOCs (volatile organic compounds) degrading device
CN113395812A (en) * 2021-06-09 2021-09-14 江苏天楹环保能源成套设备有限公司 Low-temperature plasma disinfection module, disinfection device and disinfection mask

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WO2012171235A1 (en) * 2011-06-17 2012-12-20 深圳市华星光电技术有限公司 Atmospheric pressure plasma device and process for manufacturing same
CN102371888A (en) * 2011-06-24 2012-03-14 北京大学 Vehicle-mounted plasma generator for purifying nitric oxide in vehicle tail gas
CN102612250A (en) * 2012-03-08 2012-07-25 山东派力迪环保工程有限公司 Plasma generation system by tubular dielectric barrier discharge and application thereof
CN102612250B (en) * 2012-03-08 2015-02-18 山东派力迪环保工程有限公司 Plasma generation system by tubular dielectric barrier discharge and application thereof
CN103878062A (en) * 2012-12-21 2014-06-25 陈晓波 New device for adsorption of particles by use of low temperature plasma
CN103111167A (en) * 2013-02-04 2013-05-22 韩汶冀 High-voltage plasma purifier
CN103263824A (en) * 2013-06-08 2013-08-28 厦门大学 Mercury oxidation device
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Application publication date: 20100915