CN108408843B - Plasma activated water generating device - Google Patents
Plasma activated water generating device Download PDFInfo
- Publication number
- CN108408843B CN108408843B CN201810207820.6A CN201810207820A CN108408843B CN 108408843 B CN108408843 B CN 108408843B CN 201810207820 A CN201810207820 A CN 201810207820A CN 108408843 B CN108408843 B CN 108408843B
- Authority
- CN
- China
- Prior art keywords
- electrode
- pressing plate
- chamber
- lower pressing
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 229920006324 polyoxymethylene Polymers 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 230000004913 activation Effects 0.000 abstract description 9
- 238000007599 discharging Methods 0.000 abstract description 8
- 230000004888 barrier function Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 22
- 208000028659 discharge Diseases 0.000 description 20
- 230000001580 bacterial effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- LSQZJLSUYDQPKJ-NJBDSQKTSA-N amoxicillin Chemical compound C1([C@@H](N)C(=O)N[C@H]2[C@H]3SC([C@@H](N3C2=O)C(O)=O)(C)C)=CC=C(O)C=C1 LSQZJLSUYDQPKJ-NJBDSQKTSA-N 0.000 description 1
- 229960003022 amoxicillin Drugs 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- LSQZJLSUYDQPKJ-UHFFFAOYSA-N p-Hydroxyampicillin Natural products O=C1N2C(C(O)=O)C(C)(C)SC2C1NC(=O)C(N)C1=CC=C(O)C=C1 LSQZJLSUYDQPKJ-UHFFFAOYSA-N 0.000 description 1
- 239000000575 pesticide Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/46104—Devices therefor; Their operating or servicing
- C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a plasma activated water generating device, which comprises a water chamber, a gas chamber and a discharging module, wherein the water chamber is arranged in the water chamber; the water chamber is arranged on the discharging module in a threaded connection mode, and the gas chamber is arranged below the discharging module in a threaded connection mode and is sealed by an O-shaped ring; the discharge module comprises a high-voltage electrode, a ground electrode, an electrode, a medium tube, an electrode fixing plate, an electrode upper pressing plate and an electrode lower pressing plate; the dielectric tube is arranged between the electrode upper pressing plate and the electrode lower pressing plate in parallel front and back, and the electrode is arranged in the dielectric tube. Because the invention adopts the form of dielectric barrier discharge, the stability of the device and the activation efficiency of water are increased, and the activation amount of activated water is further increased. The invention utilizes the crossing of the high-voltage electrode and the ground electrode to generate a gas channel and discharge, and fully utilizes the energy generated in the discharge process to ionize the working gas.
Description
Technical Field
The invention relates to a bacterial microbe sterilizing device, in particular to a generating device of plasma activated water.
Background
The plasma is a substance in a fourth state different from solid, liquid and gas, and the low-temperature plasma can effectively kill bacterial microorganisms and the like existing in air and on the surface of an object. The plasma activated water is a hotspot of research at present, and is widely applied in the directions of pesticide degradation, residual amoxicillin removal, fruit preservation, medical sterilization and the like. However, the existing plasma water activation device has the problems of small water treatment capacity, low activation efficiency, unstable long-term use of the activation device and the like.
Disclosure of Invention
In order to solve the above problems of the prior art, the present invention is to design a plasma activated water generator capable of increasing the amount of activated water, increasing the activation efficiency, uniformly and stably generating plasma, and continuously discharging for a long time.
In order to achieve the purpose, the technical scheme of the invention is as follows: a plasma activated water generation device comprises a water chamber, a gas chamber and a discharge module; the water chamber is arranged on the discharging module in a threaded connection mode, and the gas chamber is arranged below the discharging module in a threaded connection mode and is sealed by an O-shaped ring;
the discharge module comprises a high-voltage electrode, a ground electrode, an electrode, a medium tube, an electrode fixing plate, an electrode upper pressing plate and an electrode lower pressing plate; the dielectric tube is arranged between the electrode upper pressing plate and the electrode lower pressing plate in parallel front and back, the electrodes are arranged in the dielectric tube, and the adjacent electrodes are arranged in a left-right staggered manner, namely the left end of the second electrode is retracted to the right compared with the left end of the first electrode, the left end of the third electrode is the same as the left end of the first electrode, the left end of the fourth electrode is the same as the left end of the third electrode, and so on; the two electrode fixing plates are used for fixing the left electrode external terminal and the right electrode external terminal respectively; the high-voltage electrode is connected with the electrode extending out of the left side through the electrode external terminal on the left side, and the electrode external terminal on the left side is fixed between the two electrode pressing plates through the electrode fixing plate on the left side; the ground electrode is connected with the electrode extending out of the right side through the electrode external terminal on the right side, and the electrode external terminal on the right side is fixed between the two electrode pressing plates through the electrode fixing plate on the right side; the air chamber is connected with the air inlet pipe in a threaded connection mode and sealed by an O-shaped ring, and vent holes are formed in the electrode upper pressing plate and the electrode lower pressing plate; gas channels are formed between the electrodes.
Furthermore, the vent holes of the electrode lower pressing plate are arranged among the electrodes on the left center line and the right center line; and the vent holes of the electrode upper pressure plate are arranged among the electrodes on the left and right side lines.
Further, the electrodes are equal in length; the distance between the two medium pipes is equal; the medium pipe is arranged in an electrode fixing groove between the electrode upper pressing plate and the electrode lower pressing plate.
Furthermore, the electrode fixing plates are positioned in the electrode fixing plate grooves on the left side and the right side of the discharge module; the electrode upper pressure plate and the electrode lower pressure plate are screwed and fixed through screws at the screw fixing holes.
Furthermore, the electrode is tightly attached to the inner wall of the medium tube, and the outer wall of the medium tube is tightly attached to the electrode upper pressing plate and the electrode lower pressing plate.
Furthermore, the medium tube is made of quartz material with good insulating property; the electrode is made of metal material with good conductivity, including tungsten rod or copper rod; the electrode fixing plate is made of polytetrafluoroethylene with good insulating property; the air chamber and the water chamber are both made of high-hardness polyformaldehyde materials.
The working process of the invention is as follows: working gas is introduced into the gas chamber through the gas inlet pipe, then the working gas is introduced into the water chamber through the vent hole in the discharge module and the gas channel formed by the high-voltage electrode and the ground electrode in a crossed mode, a proper amount of water is added into the water chamber after the gas flow is stable, and the ground electrode and the high-voltage power supply are switched on for discharging after the working gas uniformly emerges from the gas hole.
Compared with the prior art, the invention has the following beneficial effects:
1. because the invention adopts the form of dielectric barrier discharge, the stability of the device and the activation efficiency of water are increased, and the activation quantity of the activated water is further increased.
2. The invention adopts a dielectric barrier discharge form, and is more stable compared with the existing jet-type discharge form which is widely used.
3. The invention utilizes the high-voltage electrode and the ground electrode to generate a gas channel in a crossed manner and discharge, fully utilizes the energy generated in the discharge process to ionize the working gas, and improves the activation efficiency of the activated water.
4. The high-voltage electrode and the ground electrode are both made of metal rods and wrapped by the quartz tube, so that the high-voltage electrode and the ground electrode are more oxidation-resistant compared with metal wires, the service life of the electrode is prolonged, and the stability of the device is prolonged.
5. The components of the invention adopt mechanical connection modes such as threaded connection and fixation, O-shaped ring sealing and the like, and complicated fixation modes such as gluing and the like are avoided, so that the invention is convenient to install, disassemble and maintain, and improves the working efficiency.
Drawings
Fig. 1 is a front view of a plasma-activated water generator.
Fig. 2 is a top view of the lower electrode platen.
FIG. 3 is a top view of an upper electrode pressure plate.
Fig. 4 is a top view of fig. 1.
In the figure: 1. the electrode fixing device comprises a water chamber, 2, a high-voltage electrode, 3, an air chamber, 4, an air inlet pipe, 5, an air vent, 6, an electrode lower pressing plate, 7, a ground electrode, 8, an electrode upper pressing plate, 9, a screw fixing hole, 10, an electrode fixing plate groove, 11, an electrode fixing groove, 12, a gas channel, 13, a medium pipe, 14 and an electrode fixing plate.
Detailed Description
The invention is further described below with reference to the accompanying drawings. As shown in fig. 1 to 4, a plasma activated water generating device includes a water chamber 1, a gas chamber 3, and a discharge module; the water chamber 1 is arranged on the discharge module in a threaded connection mode, and the gas chamber 3 is arranged below the discharge module in a threaded connection mode and is sealed by an O-shaped ring;
the discharge module comprises a high-voltage electrode 2, a ground electrode 7, an electrode, a medium tube 13, an electrode fixing plate 14, an electrode upper pressing plate 8 and an electrode lower pressing plate 6; the dielectric tube 13 is arranged between the electrode upper pressing plate 8 and the electrode lower pressing plate 6 in parallel front and back, the electrodes are arranged in the dielectric tube 13, and the adjacent electrodes are arranged in a left-right staggered manner, namely, the left end of the second electrode is retracted to the right compared with the left end of the first electrode, the left end of the third electrode is the same as the left end of the first electrode, the left end of the fourth electrode is the same as the left end of the third electrode, and the like; the two electrode fixing plates 14 are used for fixing a left electrode external terminal and a right electrode external terminal respectively; the high-voltage electrode 2 is connected with the electrode extending out of the left side through the electrode external terminal on the left side, and the electrode external terminal on the left side is fixed between the two electrode pressing plates through the electrode fixing plate 14 on the left side; the ground electrode 7 is connected with the electrode extending out of the right side through the electrode external terminal on the right side, and the electrode external terminal on the right side is fixed between the two electrode pressing plates through the electrode fixing plate 14 on the right side; the air chamber 3 is connected with the air inlet pipe 4 in a threaded connection mode and sealed by an O-shaped ring, and the electrode upper pressing plate 8 and the electrode lower pressing plate 6 are both provided with vent holes 5; gas channels 12 are formed between the electrodes.
Further, the vent holes 5 of the electrode lower pressure plate 6 are arranged between the electrodes on the left and right central lines; the vent holes 5 of the electrode upper pressure plate 8 are arranged between the electrodes on the left and right edges.
Further, the electrodes are equal in length; the distances between the two medium pipes 13 are equal; the medium pipe 13 is arranged in the electrode fixing groove 11 between the electrode upper pressing plate 8 and the electrode lower pressing plate 6.
Further, the electrode fixing plates 14 are positioned in the electrode fixing plate slots 10 at the left and right sides of the discharge module; the electrode upper pressure plate 8 and the electrode lower pressure plate 6 are screwed and fixed by screws through screw fixing holes 9.
Further, the electrode is tightly attached to the inner wall of the medium tube 13, and meanwhile, the outer wall of the medium tube 13 is tightly attached to the electrode upper pressing plate 8 and the electrode lower pressing plate 6.
Further, the medium tube 13 is made of quartz material with good insulating property; the electrode is made of metal material with good conductivity, including tungsten rod or copper rod; the electrode fixing plate 14 is made of polytetrafluoroethylene with good insulating property; the air chamber 3 and the water chamber 1 are both made of high-hardness polyformaldehyde materials.
The assembling and working method of the embodiment of the invention is as follows:
as shown in fig. 1 to 4, the plasma activated water generator mainly includes a high voltage electrode 2, a ground electrode 7, an air inlet pipe 4, an air chamber 3, a water chamber 1, an electrode lower pressing plate 6, and an electrode upper pressing plate 8.
During assembly, the high-voltage electrode 2 is firstly inserted into the medium tube 13, then the medium tube 13 inserted with the electrode is sequentially inserted into the electrode fixing groove 11 in the discharge module consisting of the electrode lower pressing plate 6 and the electrode upper pressing plate 8, and the high-voltage electrode 2 and the ground electrode 7 are oppositely and alternately arranged in sequence to form the discharge module; the high-voltage electrode 2 and the ground electrode 7 are respectively fixed on the electrode fixing plates 14 at the left end and the right end and are respectively led out through the left high-voltage electrode 2 and the right ground electrode 7; the electrode fixing plates 14 are inserted into the two electrode fixing plate slots 10 of the discharge module. And finally, screwing and fixing the electrode lower pressing plate 6 and the electrode upper pressing plate 8 through screw fixing holes 9 respectively. The inlet pipe 4 is screwed to the air chamber 3 and sealed with an O-ring. The water chamber 1 and the air chamber 3 are respectively fixed with the upper surface and the lower surface of the discharging module through screws and sealed through O-shaped rings.
When the discharge module works, the high-voltage electrodes 2 and the ground electrodes 7 on the two sides of the discharge module are respectively connected with a high-voltage power supply and the ground, and working gas is introduced into the gas chamber 3 through the vent holes 5, then is introduced into the water chamber 1 through the gas channel 12 formed by the vent holes 5 and the electrodes on the two sides. When the introduced working gas is stable, a proper amount of water is added into the water chamber 1, and after the system is stable, a high-voltage power supply is switched on for discharge treatment.
The present invention is not limited to the embodiment, and any equivalent idea or change within the technical scope of the present invention is to be regarded as the protection scope of the present invention.
Claims (5)
1. A plasma activated water generation device comprises a water chamber (1), a gas chamber (3) and a discharge module; the discharge module comprises a high-voltage electrode (2), a ground electrode (7), an electrode, a medium tube (13), an electrode fixing plate (14), an electrode upper pressing plate (8) and an electrode lower pressing plate (6); the dielectric tube (13) is arranged between the electrode upper pressing plate (8) and the electrode lower pressing plate (6) in parallel front and back, the electrodes are arranged in the dielectric tube (13), and the adjacent electrodes are arranged in a left-right staggered manner, namely, the left end of the second electrode is retracted to the right compared with the left end of the first electrode, the left end of the third electrode is the same as the left end of the first electrode, the left end of the fourth electrode is the same as the left end of the second electrode, and so on; the two electrode fixing plates (14) are respectively used for fixing a left electrode external terminal and a right electrode external terminal; the high-voltage electrode (2) is connected with the electrode extending out of the left side through an electrode external terminal on the left side, and the electrode external terminal on the left side is fixed between the two electrode pressing plates through an electrode fixing plate (14) on the left side; the ground electrode (7) is connected with the electrode extending out of the right side through the electrode external terminal on the right side, and the electrode external terminal on the right side is fixed between the two electrode pressing plates through the electrode fixing plate (14) on the right side;
the method is characterized in that: the water chamber (1) is arranged on the discharge module in a threaded connection mode, and the gas chamber (3) is arranged below the discharge module in a threaded connection mode and is sealed by an O-shaped ring; the air chamber (3) is connected with the air inlet pipe (4) in a threaded connection mode and sealed by an O-shaped ring, and vent holes (5) are formed in the electrode upper pressing plate (8) and the electrode lower pressing plate (6); a gas channel (12) is formed between the electrodes;
the vent holes (5) of the electrode lower pressing plate (6) are arranged among the electrodes on the left central line and the right central line; and the vent holes (5) of the electrode upper pressure plate (8) are arranged among the electrodes on the left and right side lines.
2. A plasma activated water generator as defined in claim 1 wherein: the electrodes are equal in length; the distances between the two medium pipes (13) are equal; the medium pipe (13) is arranged in an electrode fixing groove (11) between the electrode upper pressing plate (8) and the electrode lower pressing plate (6).
3. A plasma activated water generator as defined in claim 1 wherein: the electrode fixing plates (14) are positioned in the electrode fixing plate grooves (10) on the left side and the right side of the discharge module; the electrode upper pressing plate (8) and the electrode lower pressing plate (6) are screwed and fixed through screws at screw fixing holes (9).
4. A plasma activated water generator as defined in claim 1 wherein: the electrode is tightly attached to the inner wall of the medium tube (13), and meanwhile, the outer wall of the medium tube (13) is tightly attached to the electrode upper pressing plate (8) and the electrode lower pressing plate (6).
5. A plasma activated water generator as defined in claim 1 wherein: the medium tube (13) is made of quartz material with good insulating property; the electrode is made of metal material with good conductivity, including tungsten rod or copper rod; the electrode fixing plate (14) is made of polytetrafluoroethylene with good insulating property; the air chamber (3) and the water chamber (1) are both made of high-hardness polyformaldehyde materials.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810207820.6A CN108408843B (en) | 2018-03-14 | 2018-03-14 | Plasma activated water generating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810207820.6A CN108408843B (en) | 2018-03-14 | 2018-03-14 | Plasma activated water generating device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108408843A CN108408843A (en) | 2018-08-17 |
CN108408843B true CN108408843B (en) | 2021-06-01 |
Family
ID=63131502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810207820.6A Active CN108408843B (en) | 2018-03-14 | 2018-03-14 | Plasma activated water generating device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108408843B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108990247A (en) * | 2018-08-03 | 2018-12-11 | 成都理工大学 | A kind of dielectric barrier discharge device that safety is radiationless |
CN109796066A (en) * | 2019-02-27 | 2019-05-24 | 大连理工大学 | A kind of plasma-activated water generating device of high power D BD |
CN110394038B (en) * | 2019-08-08 | 2020-09-25 | 北京工商大学 | Device and method for purifying air by using low-temperature plasma activation water |
CN110933833A (en) * | 2019-12-26 | 2020-03-27 | 华中科技大学 | Plasma activation oil treatment device |
CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
CN112358015B (en) * | 2020-12-22 | 2023-08-01 | 赣南师范大学 | Dielectric barrier discharge low-temperature plasma sewage treatment unit |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101835336A (en) * | 2010-05-21 | 2010-09-15 | 江苏大学 | Double-dielectric barrier discharge low-temperature plasma generator |
CN103841741A (en) * | 2014-03-12 | 2014-06-04 | 中国科学院电工研究所 | Barometric pressure plasma generator based on dielectric barrier discharge |
CN104378900A (en) * | 2014-10-31 | 2015-02-25 | 大连民族学院 | Atmospheric pressure large-area uniform space plasma generating device |
CN105858814A (en) * | 2016-03-28 | 2016-08-17 | 大连民族大学 | Array-type medium-preventing-discharge wastewater treatment device for high-density water |
CN106115879A (en) * | 2016-08-11 | 2016-11-16 | 大连民族大学 | A kind of plasma producing apparatus to liquid activation |
CN106629980A (en) * | 2016-12-02 | 2017-05-10 | 大连民族大学 | Algae treatment method by atmospheric pressure plasma activated water |
CN107750085A (en) * | 2017-08-30 | 2018-03-02 | 大连民族大学 | Atmos low-temperature microplasma activates water generating device |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006049544A (en) * | 2004-08-04 | 2006-02-16 | Canon Anelva Corp | Substrate processing apparatus and substrate processing method using same |
JP2006210178A (en) * | 2005-01-28 | 2006-08-10 | Ngk Insulators Ltd | Electrode device for plasma generation |
US20100136261A1 (en) * | 2008-12-03 | 2010-06-03 | Applied Materials, Inc. | Modulation of rf returning straps for uniformity control |
JP2011012559A (en) * | 2009-06-30 | 2011-01-20 | Acr Co Ltd | Exhaust emission control device using plasma discharge |
JP5429542B2 (en) * | 2009-09-04 | 2014-02-26 | 学校法人中部大学 | Plasma generating apparatus, plasma processing apparatus, plasma generating method, and plasma processing method |
DE102009044932A1 (en) * | 2009-09-24 | 2011-04-07 | Fachhochschule Hildesheim/Holzminden/Göttingen - Körperschaft des öffentlichen Rechts - | Apparatus for treating objects with a physical plasma at atmospheric pressure |
CN102307425A (en) * | 2011-06-24 | 2012-01-04 | 北京大学 | Combinable array plasma generating device |
JP6076780B2 (en) * | 2012-03-12 | 2017-02-08 | エア・ウォーター株式会社 | Powder processing apparatus and powder processing method |
CN106488638A (en) * | 2015-08-27 | 2017-03-08 | 上海至纯洁净系统科技股份有限公司 | A kind of plasma apparatus |
CN106535454B (en) * | 2016-09-30 | 2018-09-21 | 大连民族大学 | A kind of method of atmos low-temperature plasma activation water process seed |
CN107124811B (en) * | 2017-06-22 | 2018-05-04 | 亚洲硅业(青海)有限公司 | A kind of plasma generator and its method of generating plasma |
-
2018
- 2018-03-14 CN CN201810207820.6A patent/CN108408843B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101835336A (en) * | 2010-05-21 | 2010-09-15 | 江苏大学 | Double-dielectric barrier discharge low-temperature plasma generator |
CN103841741A (en) * | 2014-03-12 | 2014-06-04 | 中国科学院电工研究所 | Barometric pressure plasma generator based on dielectric barrier discharge |
CN104378900A (en) * | 2014-10-31 | 2015-02-25 | 大连民族学院 | Atmospheric pressure large-area uniform space plasma generating device |
CN105858814A (en) * | 2016-03-28 | 2016-08-17 | 大连民族大学 | Array-type medium-preventing-discharge wastewater treatment device for high-density water |
CN106115879A (en) * | 2016-08-11 | 2016-11-16 | 大连民族大学 | A kind of plasma producing apparatus to liquid activation |
CN106629980A (en) * | 2016-12-02 | 2017-05-10 | 大连民族大学 | Algae treatment method by atmospheric pressure plasma activated water |
CN107750085A (en) * | 2017-08-30 | 2018-03-02 | 大连民族大学 | Atmos low-temperature microplasma activates water generating device |
Also Published As
Publication number | Publication date |
---|---|
CN108408843A (en) | 2018-08-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108408843B (en) | Plasma activated water generating device | |
CN102595757B (en) | Three-electrode discharge device for generating large-volume atmosphere pressure plasma | |
WO2018205758A1 (en) | Apparatus for producing oxygen active substance by means of mesh-shaped creeping discharge plasma | |
CN103179772A (en) | Atmospheric direct-current glow discharge method and special device thereof | |
CN106028616A (en) | Gliding arc discharge plasma jet generation device and method thereof | |
CN104609509A (en) | Plasma cleaning device | |
CN103159185A (en) | Multiple ozone generating device | |
CN103025040B (en) | Device for producing large-area surface discharge by utilizing water electrodes | |
US10694770B2 (en) | Chamber for pulsed electric field generation | |
CN109796066A (en) | A kind of plasma-activated water generating device of high power D BD | |
CN104692604B (en) | A kind of device utilizing high pressure pulse discharge to crack excess sludge and using method thereof | |
CN103561535B (en) | A kind of array type micro-hole cathode air discharge plasma jet device | |
CN209602087U (en) | A kind of multitube combined barrel formula water-cooling ozone generating device | |
CN106421837A (en) | Micro-plasma disinfection and sterilization device | |
CN206381410U (en) | A kind of microplasma sterilization and disinfection device | |
CN112358015B (en) | Dielectric barrier discharge low-temperature plasma sewage treatment unit | |
CN104310537B (en) | A kind of Absorbable organic halogens exports the device of silver ions | |
CN205812485U (en) | A kind of Gliding arc discharge plasma mjector | |
CN110831312B (en) | Efficient plasma gas-liquid discharge system | |
CN204569420U (en) | Cavity air distributing type ozonizer | |
CN110627171B (en) | Low-temperature plasma active water generating device and method | |
CN219019095U (en) | Plasma generating assembly and beauty instrument | |
US20090008252A1 (en) | Ozone generating device | |
CN217522983U (en) | Double-dielectric barrier discharge structure | |
CN204237557U (en) | ozone generating electrode |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |