CN108566716B - Gas discharge plasma jet device - Google Patents
Gas discharge plasma jet device Download PDFInfo
- Publication number
- CN108566716B CN108566716B CN201810590811.XA CN201810590811A CN108566716B CN 108566716 B CN108566716 B CN 108566716B CN 201810590811 A CN201810590811 A CN 201810590811A CN 108566716 B CN108566716 B CN 108566716B
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- China
- Prior art keywords
- insulating sleeve
- voltage electrode
- plasma jet
- medium tube
- gas discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims description 33
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000003570 air Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 1
- 238000010891 electric arc Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 239000004480 active ingredient Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
Abstract
The invention discloses a gas discharge plasma jet device which comprises a high-voltage electrode and an inner medium tube, wherein the high-voltage electrode is a long cylindrical electrode, one end of the high-voltage electrode is a flat end, the other end of the high-voltage electrode is a tip, the flat end of the high-voltage electrode is clamped with a clamping sleeve, a hollow structure of an insulating sleeve A is clamped with the high-voltage electrode, the insulating sleeve A is in threaded connection with the clamping sleeve, an outer medium tube is in threaded connection with the insulating sleeve A, the inner medium tube is clamped in the outer medium tube and clings to the outer medium tube and the inner wall of the insulating sleeve A, one side of the insulating sleeve A is provided with a through hole which is connected with a working gas source, the clamping sleeve is in threaded connection with an insulating sleeve B, the right end of the insulating sleeve B is in threaded connection with a working power supply through a socket adapter, a metal net is placed on the inner wall of the left side of the outer medium tube, a nozzle is arranged on the left side wall of the outer medium tube, discharge is generated between the metal net and the tip of the high-voltage electrode, and the air current blows out plasma through the nozzle.
Description
Technical Field
The invention relates to the field of plasma generating devices, in particular to a gas discharge plasma jet device.
Background
The existing plasma jet device mainly comprises the following four types, and the defects of the existing plasma jet device are as follows:
1. pulse DC unbalanced plasma jet device
Although a medium is arranged between the high-voltage electrode and the grounding electrode, the gap is 0.3-1 cm because of the very close distance, arc discharge is easy to occur between the ring holes under high pressure, and the high-voltage electrode and the grounding electrode are unsafe in specific application;
2. radio frequency unbalanced plasma jet device
The top end part of the high-voltage electrode of the device is exposed in the external space and is in direct contact with the plasma jet 5, so that the device is unsafe in specific application, and the generated plasma jet is short in length and high in temperature;
3. AC unbalanced plasma jet device
Because the high-voltage electrode and the grounding electrode are both in direct contact with the plasma jet, arc discharge is easy to occur, and the high-voltage electrode and the grounding electrode are unsafe in specific application;
4. microwave unbalanced plasma jet device
The plasma jet flow generated by the magnetron microwave generator has high temperature, short length and relatively narrow specific application range because of complex structural procedures.
In summary, in the existing plasma jet device, the high-voltage electrode is lack of insulation, and some of the high-voltage electrode is exposed in the external space or the top end part of the high-voltage electrode is exposed in the external space and is in direct contact with the plasma jet, the distance between the high-voltage electrode and the grounding electrode is relatively short, a direct connection path exists in the space, and arc discharge is easy to occur under high pressure; the active components in the plasma jet flow are few in types and quantity, and the plasma jet flow is short in length and high in temperature; the structure is complex and the large-scale specific application is difficult to realize. These factors have greatly limited the wide application of existing plasma jet technology and apparatus.
Disclosure of Invention
The invention aims to solve the technical problems that: the gas discharge plasma jet device solves the problems that an existing plasma jet device is poor in high-voltage electrode insulation, short in plasma jet length, high in temperature and complex in structure, and large-scale specific application is difficult to achieve.
The technical scheme of the invention is as follows: the gas discharge plasma jet device comprises a high-voltage electrode and an inner medium pipe, wherein the high-voltage electrode is a long cylindrical electrode, one end of the high-voltage electrode is a flat end, the other end of the high-voltage electrode is a tip, the flat end of the high-voltage electrode is clamped with a clamping sleeve, a hollow structure of an insulating sleeve A is clamped with the high-voltage electrode, the insulating sleeve A is in threaded connection with the clamping sleeve, an outer medium pipe is in threaded connection with the insulating sleeve A, the inner medium pipe is clamped in the outer medium pipe and clings to the inner walls of the outer medium pipe and the insulating sleeve A, one side of the insulating sleeve A is provided with a through hole, the through hole is connected with a working gas source through a gas adapter, a gap is reserved between the inner medium pipe, the insulating sleeve A and the high-voltage electrode, the gap is communicated with the through hole, the clamping sleeve is in threaded connection with an insulating sleeve B, a right end of the insulating sleeve B is in threaded connection with a socket adapter, a metal net is placed on the inner wall of the left side of the outer medium pipe, and a nozzle is arranged on the left side wall of the outer medium pipe;
screw holes are formed in the side faces of the clamping sleeve, the screw holes are in threaded connection with limit screws, and the limit screws are insulating plastic screws;
the high-voltage electrode, the inner medium pipe and the outer medium pipe are coaxial.
The high voltage electrode is one of single tungsten, copper, aluminum or stainless steel conductive material.
The inner medium tube may be one of quartz glass or pergola glass.
The insulating sleeve A is made of one of organic glass material or alumina ceramic, and the insulating sleeve B is made of one of organic glass material or alumina ceramic.
The outer medium pipe is grounded through a lead.
The working gas source is one or more of helium, nitrogen, argon, oxygen or air.
The working power supply is a direct current power supply.
The metal mesh is 300 mesh, 250 mesh or 200 mesh.
The working principle of the invention is as follows: the gas is introduced into the space between the inner medium pipe and the high-voltage electrode, the local high field intensity between the tip of the high-voltage electrode and the metal net is utilized to carry out glow discharge on the working gas with adjustable flow, the generated plasma is distributed in the space between the tip of the high-voltage electrode and the metal net and the external space at the front end of the nozzle of the outer medium pipe, the length and the temperature of the plasma jet can be controlled by adjusting the working voltage and the gas flow of a working power supply, and the length of the plasma jet can be further adjusted by adjusting the distance between the high-voltage electrode and the metal net.
The beneficial effects of the invention are as follows:
1. the high-voltage electrode is arranged in the outer medium tube, the outer medium tube can be grounded for discharging, in addition, one end of the outer medium tube is clamped in the insulating sleeve A, and the insulating sleeve A is connected with the insulating sleeve B;
2. the invention adjusts the length of the plasma jet by adjusting the distance between the high-voltage electrode and the metal net, thereby solving the problems of short and non-adjustable length of the plasma jet in the prior art;
3. the working gas source is one or more of helium, nitrogen, argon, oxygen or air, so that the variety and the quantity of active ingredients in the plasma jet can be effectively increased to adjust the length, the temperature and the quantity of the generated plasma jet; the invention can adjust the temperature of the plasma jet by adjusting the working voltage of the working power supply; the invention can adjust the temperature of the plasma jet flow by adjusting the mesh number of the metal net, and can adjust the temperature of the plasma jet flow to be lower than the room temperature, higher than the room temperature or close to the room temperature by adjusting the types and the quantity of active components in the plasma jet flow, adjusting the working voltage and adjusting the mesh number of the metal net.
Drawings
FIG. 1 is a schematic diagram of the structure of the device of the present invention;
FIG. 2 is an enlarged schematic view of the ferrule of the present invention;
FIG. 3 is a schematic view of the structure of the metal mesh of the present invention;
FIG. 4 is an enlarged schematic view of an outer dielectric tube according to the present invention;
in the figure: 1. the high-voltage electrode comprises a high-voltage electrode body, 2 parts of an inner medium pipe, 3 parts of an outer medium pipe, 4 parts of an insulating sleeve A,5 parts of a clamping sleeve, 6 parts of an insulating sleeve B,7 parts of a power adapter, 8 parts of a through hole, 9 parts of a metal net, 3-1 parts of a nozzle, 5-1 parts of a through hole.
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific examples:
referring to fig. 1-4, the gas discharge plasma jet device of the invention comprises a high-voltage electrode 1 and an inner medium tube 2, wherein the high-voltage electrode 1 is a long cylindrical electrode, one end is a flat end, and the other end is a tip, the flat end of the high-voltage electrode 1 is clamped with a clamping sleeve 5, a hollow structure of an insulating sleeve A4 is clamped with the high-voltage electrode 1, the insulating sleeve A4 is in threaded connection with the clamping sleeve 5, an outer medium tube 3 is in threaded connection with the insulating sleeve A4, the inner medium tube 2 is clamped in the outer medium tube 3 and clings to the inner walls of the outer medium tube 3 and the insulating sleeve A4, one side of the insulating sleeve A4 is provided with a through hole 8, the through hole 8 is provided with an internal thread, the through hole 8 is connected with a working gas source through a gas adapter, a gap is arranged between the inner medium tube 2, the insulating sleeve A4 and the high-voltage electrode 1, the gap is communicated with the through hole 8, the insulating sleeve a 5 is in threaded connection with an insulating sleeve B6, the right end of the insulating sleeve B6 is in threaded connection with a socket 7, the inner wall 7 is connected with a working gas source, and the left side of the power supply tube 3 is provided with a metal nozzle 3, and the left side wall 3 is provided with a side wall of the metal nozzle 3;
the socket adapter 7 is connected with the high-voltage electrode 1 through a wire.
The opening end of the nozzle 3-1 is a round hole or a polygonal hole. An electric discharge is generated between the metal mesh 9 and the tip of the high voltage electrode 1, and the air flow blows out the plasma through the nozzle 3-1.
The side face of the clamping sleeve 5 is provided with a screw hole 5-1, the screw hole 5-1 is in threaded connection with a limit screw, the limit screw is an insulating plastic screw, and a gap between the insulating sleeve A4 and the high-voltage electrode 1 is adjusted during installation and fixed by the limit screw;
the high-voltage electrode 1, the inner medium pipe 2 and the outer medium pipe 3 are coaxial.
The high voltage electrode 1 is one of single tungsten, copper, aluminum or stainless steel conductive materials. In this embodiment, a single tungsten is selected.
The inner medium tube 2 may be one of quartz glass and placian glass, and in this embodiment, quartz glass is selected.
The insulating sleeve A4 is made of one of organic glass material or alumina ceramic, and the insulating sleeve B6 is made of one of organic glass material or alumina ceramic.
The outer medium tube 3 is made of conductive material, and is one of copper, aluminum or stainless steel, and is grounded through a lead wire when in use.
The working gas source is one or more of helium, nitrogen, argon, oxygen or air.
The working power supply is a direct current power supply. When in use, the working voltage of the working power supply can be adjusted.
The metal mesh 9 is 300 mesh, 250 mesh or 200 mesh.
Taking the gas discharge of argon and nitrogen in combination as an example, the gas control switch was adjusted, argon was introduced at a flow rate of 2 liters/min, and the distance between the tip of the high-voltage electrode 1 and the metal mesh 9 was adjusted to 1 mm. The outer medium container 3 is grounded through a lead, the high-voltage electrode 1 is connected to a working power supply through the lead, the voltage amplitude applied by the power supply is regulated to about 3 kilovolts, plasma and plasma jet flow are generated through glow discharge, and at the moment, nitrogen is introduced at the flow rate of 200 milliliters/minute. The length of the plasma jet flow from the nozzle can reach 220 mm, the discharge working voltage is reduced to about 300V, the jet flow temperature is close to the room temperature, and hands of people can be in direct contact.
Claims (9)
1. A gas discharge plasma jet device comprising a high voltage electrode (1), characterized in that: the high-voltage electrode (1) is a long cylindrical electrode, one end is a flat end, the other end is a tip, the flat end of the high-voltage electrode (1) is clamped with a clamping sleeve (5), a hollow structure of an insulating sleeve A (4) is clamped with the high-voltage electrode (1), the insulating sleeve A (4) is in threaded connection with the clamping sleeve (5), an outer medium tube (3) is in threaded connection with the insulating sleeve A (4), the inner medium tube (2) is clamped in the outer medium tube (3) and clings to the outer medium tube (3) and the inner wall of the insulating sleeve A (4), one side of the insulating sleeve A (4) is provided with a through hole (8), the through hole (8) is provided with an internal thread, the through hole (8) is connected with a working gas source through a gas adapter, the space is communicated with the through hole (8), the insulating sleeve A (4) and the high-voltage electrode (1), the insulating sleeve A (4) is connected with the inner wall of the insulating sleeve A (6) through the insulating sleeve, the inner wall of the insulating sleeve A (4) through hole is connected with a wire (7), a nozzle (3-1) is arranged on the left side wall of the outer medium pipe (3); screw holes (5-1) are formed in the side faces of the clamping sleeve (5), the screw holes (5-1) are connected with limit screws in a threaded mode, and the limit screws are insulating plastic screws; the using method of the device comprises the following steps:
s1, adjusting a gas control switch to introduce gas required by discharge; simultaneously adjusting the distance between the tip of the high-voltage electrode and the metal net;
s2, grounding the outer medium container through a wire, connecting the high-voltage electrode to a working power supply through the wire, and adjusting the power supply to apply voltage;
s3, carrying out glow discharge on the working gas by local high field intensity between the tip of the high-voltage electrode and the metal mesh so as to generate plasma and plasma jet;
and S4, reducing the discharge working voltage until the plasma spray change becomes the temperature required by working.
2. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the high-voltage electrode (1), the inner medium tube (2) and the outer medium tube (3) are coaxial.
3. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the high-voltage electrode (1) is made of one of single tungsten, copper, aluminum or stainless steel conductive materials.
4. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the inner medium tube (2) is one of quartz glass or Parker glass.
5. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the insulating sleeve A (4) is one of organic glass material or alumina ceramic, and the insulating sleeve B (6) is one of organic glass material or alumina ceramic.
6. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the outer medium pipe (3) is grounded through a lead.
7. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the working gas source is one or more of helium, nitrogen, argon, oxygen or air.
8. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the working power supply is a direct current power supply.
9. A gas discharge plasma jet apparatus as claimed in claim 1, wherein: the metal mesh (9) is 300 mesh, 250 mesh or 200 mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810590811.XA CN108566716B (en) | 2018-06-09 | 2018-06-09 | Gas discharge plasma jet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810590811.XA CN108566716B (en) | 2018-06-09 | 2018-06-09 | Gas discharge plasma jet device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108566716A CN108566716A (en) | 2018-09-21 |
| CN108566716B true CN108566716B (en) | 2024-01-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810590811.XA Active CN108566716B (en) | 2018-06-09 | 2018-06-09 | Gas discharge plasma jet device |
Country Status (1)
| Country | Link |
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| CN (1) | CN108566716B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112888135B (en) * | 2021-02-01 | 2022-09-20 | 北京环境特性研究所 | Plasma generator and electrode structure thereof |
| CN113207216B (en) * | 2021-05-25 | 2022-02-11 | 四川大学 | Plasma source for surface cleaning and repairing |
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| CN108566716A (en) | 2018-09-21 |
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