CN100366372C - Three-dimension micro-expansion electrolysis processing method and apparatus - Google Patents
Three-dimension micro-expansion electrolysis processing method and apparatus Download PDFInfo
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- CN100366372C CN100366372C CNB2004100266815A CN200410026681A CN100366372C CN 100366372 C CN100366372 C CN 100366372C CN B2004100266815 A CNB2004100266815 A CN B2004100266815A CN 200410026681 A CN200410026681 A CN 200410026681A CN 100366372 C CN100366372 C CN 100366372C
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Abstract
The present invention discloses a three-dimensional superfine generating electrolytic machining method. The method utilizes generating electrolytic machining of one electrode to the other electrode or alternate generating electrolytic machining between the two electrodes to realize the on-line precise manufacture of electrodes. A tool electrode which is obtained by the method moves in a certain trajectory relatively to a workpiece so as to realize the precise generating machining of the workpiece; positions and trajectories of the electrode and the workpiece are controlled by a control system, and self-adaptive control of machining gaps and quick feedback are realized. The present invention also discloses a machining device which comprises a mechanical movement mechanism, a control system, a pulse power source, an observation device and an electrolyte supply system. The present invention can realize low cost and high precision machining of tiny components.
Description
Technical field
The present invention relates to precision electrolytic machining method and processing unit (plant), be specifically related to Three-Dimensional Micro-shown Electrochemical Machining Method And Processing Device.
Background technology
Along with the continuous development of science and technology, many fields such as medical science, bioengineering, mechanical engineering, electrotechnical, electronic and Aero-Space etc., increasing to the demand of fine apparatus; In order to improve the service life of these fine apparatuses, requiring does not have material in process, does not manage, the variation of change aspect; Electrochemical Machining Technology is because of it does not have macroscopical cutting force, tool-electrode is lossless, workpiece material does not have metamorphic layer, the material removing method is advantages such as ion dissolving, be particularly suitable for the processing of fine parts, be expected to one of pillar that becomes following micro electro mechanical system (MEMS) technology and microelectric technique.
Existing micro-electrochemical machining processing unit (plant) is similar to small-sized milling machine, and tool-electrode is installed on the electric machine main shaft, and workpiece is installed on the workbench; During work, tool-electrode is done simple translation or is rotated relative to workpiece, and workpiece is processed.
Existing micro-electrochemical machining processing method mainly contains:
(1) shaped electrode carries out copy type processing to workpiece on several directions, obtains the micro-workpiece of complicated shape.
(2) shaped electrode or simple electrode carry out Milling Process to hole, the groove of part.
The problem that above processing method exists is:
(1) need to adopt other fine machining method machine-shaping electrodes, the shape too electrode of complex parts is difficult to processing, and the process-cycle of electrode is long.
(2) making of electrode is independently carried out with use, in the process that adopts the tool-electrode processing work, needs carry out precision positioning to micro-electrode again.
In the large-scale impeller process of Electrolyzed Processing, existing a lot of scientific research institutions adopt simple electrode to do generating motion the three-dimension curved surface of workpiece complexity are processed, and have obtained good effect.
Summary of the invention
The object of the present invention is to provide a kind of method of three-dimensional fine part Electrolyzed Processing; This method is a three-dimensional fine generate Electrolyzed Processing, promptly adopt high frequency, ultrashort pulse power supply, motion by control system control tool electrode and part to be processed, make tool-electrode make generating motion, the online making of implementation tool electrode and the accurate Electrolyzed Processing of fine 3 d part of certain track with respect to part to be processed.
The present invention also aims to provide the three-dimensional fine generate that carries out above-mentioned processing electrolytic machining device.
This device can the on-line machining micron order following tool-electrode, and utilize this electrode, parts are processed.Size on 2 directions of parts of processing is below 1 millimeter, and machining accuracy can reach nanoscale, and will cut down finished cost significantly, and can pollution not arranged to environment.
Action principle of the present invention
In Electrolyzed Processing, adopt high frequency, burst pulse power supply, can improve reason, the change characteristic in Electrolyzed Processing flow field, the discharging gap that reduces to process, cause anodic solution to concentrate the reinforcement of ablation ability and weakening of diffusing erosion ability, thereby improve the precision of Electrolyzed Processing greatly.The generate processing of simple electrode can improve the processing flow field of minim gap, thereby make the leveling ability of Electrolyzed Processing stronger, and formed precision is higher.
As cutting edge,, workpiece material is carried out generate processing with certain point of tool-electrode or certain bar straight line or curve according to the enveloping surface of tool-electrode movement locus.By the position and the movement locus of control tool electrode, and keep machining gap in stable minim gap, can realize the Precision Machining of complex three-dimensional part.
Three-dimensional fine generate electrochemical machining method of the present invention is that (1) by the generate Electrolyzed Processing of another electrode of electrode pair, perhaps the mutual alternately generate Electrolyzed Processing of two electrodes realizes online accurate making of electrode; (2) tool-electrode that adopts said method to obtain, workpiece is done the motion of certain track relatively, and workpiece is carried out accurate generate processing; Wherein, the position of workpiece and tool-electrode can clamping in different positions; (3) position of control system control electrode and workpiece and movement locus, and realize the machining gap Self Adaptive Control, feed back fast.
Processing unit (plant) of the present invention, comprise mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply system five parts constitute, fine motion numerical control cross table in the above-mentioned mechanical motion mechanism is installed on the gantry base, U axle rotating mechanism and miniature rotary table are installed on the fine motion numerical control cross table, the upright supports mechanism that is supported by gantry base is equipped with Z-direction fine motion servo control mechanism, V axle rotating mechanism is installed on the Z-direction fine motion servo control mechanism, and fine tool-electrode or workpiece difference clamping are on U axle rotating mechanism and miniature rotary table and V axle rotating mechanism.
Above-mentioned control system comprises computer equipment, control program, machining gap adaptive control system, driver and power supply; Above-mentioned power supply is connected with computer equipment, and the computer equipment that control program is installed is connected with the machining gap adaptive control system, and the machining gap adaptive control system is connected with driver.
The above-mentioned pulse power is high frequency, ultrashort pulse power supply, and is connected with electrode or workpiece respectively.
Above-mentioned electrolyte supply system comprises two electrolyte containers, electrolyte is housed in the electrolyte container, above-mentioned electrolyte can be neutral solution NaNO3, NaCl, CuSO4, also can add acid solution HClO4, HCl, perhaps above solution mixed solution by a certain percentage.
Apparatus of the present invention as shown in Figure 1, it is made up of 5 parts such as mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply systems.
Mechanical motion mechanism is the core of this invention, and it can realize feeding of straight-line nanoscale micro-stepping and response fast, and can realize the accurate rotary speed and the anglec of rotation.It mainly comprises gantry base represented among Fig. 11, fine motion numerical control cross table 2, U axle rotating mechanism 3, fine tool-electrode or workpiece 4,7,11, V axle rotating mechanism 8, Z-direction fine motion servo control mechanism 9, miniature rotary table 13, the auxiliary body of upright supports mechanism 14 and various piece is as clamping mechanism etc.
Control system is meant can control the rotary speed and the anglec of rotation that equipment carries out micro-stepping feeding, machining gap Self Adaptive Control, electrode or workpiece, and it comprises voltage or current monitoring device, motor driver and the power supply etc. of computer equipment, control program, machining gap Self Adaptive Control part.
The pulse power is high frequency, ultrashort pulse power supply, comprises power supply wave shape, frequency, pulsewidth, the isoparametric selection of dutycycle and collection, output, demonstration etc.
Observation device can be realized measurement, record of online observation, the workpiece size of process etc.
The electrolyte supply system comprises storage, instillation, recovery and their control section of electrolyte.
The processing technology and the process of this device are as follows:
1. the online making of electrode: 2 electrodes respectively clamping in Fig. 1 on 4,7 positions, and the logical respectively positive and negative pulse power, 4 pairs of electrodes 7 of electrode or 7 pairs of electrodes 4 of electrode are processed, and perhaps both alternately processing mutually are that one of them or 2 meet the demands (as shown in Figure 2) always.Tool-electrode can be the electrode of simple shape, also can be shaped electrode.
2. electrode processing work: with the electrode of making as tool-electrode, logical negative electricity, workpiece lead to positive electricity, workpiece is carried out generate process, and obtains qualified workpiece.This tool-electrode can be according to actual conditions, and clamping is in 4,7 positions, or the two all has.Workpiece can clamping in 7,4,11 positions.
3. control system: the position of control system control electrode and workpiece and movement locus, and realize the machining gap Self Adaptive Control, feedback fast.
4. electrolyte supply: electrolyte is carried out the instillation formula and is supplied with, and perhaps according to circumstances, carries out immersion processing.When the instillation formula is supplied with, can guarantee that machining area is full of electrolyte.Different according to rapidoprint and machining accuracy, speed, electrolyte can be neutral solutions such as NaNO3, NaCl, CuSO4, also can be to add HClO4, acid solutions such as HCl, a certain proportion of mixing of perhaps above solution.
5. observation device: observation device is observed process, and to the size of tool-electrode and workpiece measure, record etc.
The present technique beneficial effect, the present invention can realize low cost, the high accuracy processing of small parts.
Description of drawings
Fig. 1 is a three-dimensional fine generate electrolytic machining device schematic diagram of the present invention.
Fig. 2 is a three-dimensional fine generate Electrolyzed Processing schematic diagram of the present invention.
Wherein Fig. 2 (a) is the online Electrolyzed Processing schematic diagram of electrode, and Fig. 2 (b) is generating processing work or shaped electrode schematic diagram,
Fig. 2 (c) is a shaped electrode processing work schematic diagram.
Fig. 3 is simple electrode processing schematic diagram of the present invention.
Wherein Fig. 3 (a) is for making the simple electrode schematic diagram, and Fig. 3 (b) makes generating motion processing work schematic diagram for simple electrode.
Fig. 4 is shaped electrode processing schematic diagram of the present invention.
Wherein Fig. 4 (a) is for making the shaped electrode schematic diagram, and Fig. 4 (b) is for using shaped electrode processing work schematic diagram.
Fig. 5 is an electrical apparatus control system structured flowchart of the present invention.
Fig. 6 forms schematic diagram for control system of the present invention.
Respectively number implication among the figure:
1 gantry base, 2 fine motion numerical control cross table 3U axle rotating mechanisms
The 4 fine tool-electrodes or workpiece 5 control systems 6 pulse powers
7 workpiece or fine tool-electrode 8V axle rotating mechanism 9Z direction of principal axis fine motion servo control mechanism
10 electrolyte supply systems, 11 workpiece or tool-electrode 12 observation devices
13 miniature rotary tables, 14 upright supports mechanisms
Explanation to structure among the figure
Fine motion numerical control cross table 2 is to realize the straight-line mechanism of micro-stepping at X, Y both direction; And drive U axle rotating mechanism 3 is done corresponding translation with miniature rotary table 13.
Electrode or workpiece 4,7 respectively clampings on rotating mechanism 3,8, and and the motor rotary main shaft between insulate; By brush the pulse power is connected on 4,7.
Observation device can be according to the processing situation, the position and the angle of adjusting, fixed placement.
The electrolyte supply device comprises 2 electrolyte containers, and one is feed flow usefulness, and one is the recovery that links to each other with workbench, precipitation, filtration used for electrolyte.Simultaneously, can control liquid stream, pressure, the direction of electrolyte.
Z-direction fine motion servo control mechanism 9 is fixed in the upright supports mechanism 14, and can be on 14 the manual adjustments level altitude.Drive V axle rotating mechanism 8 and do the fine motion of vertical direction.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing, but embodiments of the present invention are not limited thereto.
1. as adopting processing mode shown in Figure 3, can process small screws, drill bit etc., also can process the probe of tiny, sharp length definite shape etc. with the simple tool electrode of top definite shape.At first carry out the design and fabrication of tool-electrode, its process is shown in two left figure among Fig. 3.An electrode connects the negative electricity of the pulse power, makes the instrument electrode; Another connects positive electricity, as electrode to be processed.The two also can according to processing situation, in the process interchangeable positive and negative electricity connect to, process alternately.Design the shape of electrode to be processed according to processing parts, as the processing small screws, the shape of the tip of tool-electrode (processing district) should be identical with the thread groove shape, considers the influence of machining gap, and the geomery of discharge portion is less than thread groove.Same reason can be designed the tool-electrode of micro-bit.According to the shape of electrode to be processed,, rotating speed, corner that can be by controlling its main shaft, turn to the processing of carrying out electrode discharge processing part given shape if adopt the simple tool electrode to process.Also can directly make negative electrode with workpiece, copy type processes corresponding tool-electrode.Carry out the processing of part then with this electrode.As process screw or drill bit, and according to the shape of processing parts, adjust the position of tool-electrode, make tool-electrode vertical with the main shaft of workpiece; Adjust the angle of electrode discharge processing part, the direction of outstanding sharp sword direction and workpiece groove is matched.In the processing, tool-electrode is near workpiece (in micro-nano scope) in the scope of discharge processing, and the driven by motor workpiece rotates, and the while moving linearly, obtains the workpiece of certain helical pitch, certain-length.Adaptive control system control tool electrode is to the motion of workpiece working depth direction, and keeps constant machining gap.
2. as shown in Figure 4, adopt the tool-electrode of definite shape, can process miniature gears or internal thread hole etc. by generating motion.At first adopt the method machine-shaping tool-electrode of the general part of processing, as gear, spirality workpiece.Use this electrode processing work then.The generate processing of miniature gears, the tool-electrode main shaft is parallel with the gear main shaft, and electrode and workpiece rotate according to certain speed ratio, and by controlling the spacing of two main shafts, control adds the size of work gear.The machining internal thread hole requires the helical pitch of tool-electrode identical with the helical pitch of screwed hole, and the outside dimension of tool-electrode is determined according to the internal diameter of screwed hole and the spatial resolution of Electrolyzed Processing ({ machining hole internal diameter size-electrode outside dimension }/2).The similar screw tap thread mill drilling of its process, tool-electrode feeding processing or backhaul will be rotated simultaneously, be according to the processing situation, rotating speed and point-to-point speed proportion relation.
3. also can pass through electrode Milling Process hole, groove, curved surface, platform even parts etc.The generate Electrolyzed Processing is the profile that forms workpiece according to the enveloping surface of movement of tool track.By the track of control electrode motion, be similar to the Milling Process of milling machine, realize the accurate Electrolyzed Processing of above-mentioned requirements.
Claims (5)
1. three-dimensional fine generate electrochemical machining method, it is characterized in that this method may further comprise the steps: (1) is by the generate Electrolyzed Processing of another electrode of electrode pair, perhaps the mutual alternately generate Electrolyzed Processing of two electrodes realizes online accurate making of electrode; (2) electrode that adopts above-mentioned steps to obtain, workpiece is done the motion of certain track relatively, and workpiece is carried out accurate generate processing; Wherein, workpiece and electrode can clamping in different positions; (3) position of control system control electrode and workpiece and movement locus, and realize machining gap Self Adaptive Control and feedback.
2. processing unit (plant) that the described three-dimensional fine generate of claim 1 electrochemical machining method is provided, comprise mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply system five parts constitute, it is characterized in that the fine motion numerical control cross table in the above-mentioned mechanical motion mechanism is installed on the gantry base, U axle rotating mechanism and miniature rotary table are installed on the fine motion numerical control cross table, the upright supports mechanism that is supported by gantry base is equipped with Z-direction fine motion servo control mechanism, V axle rotating mechanism is installed on the Z-direction fine motion servo control mechanism, and fine tool-electrode or workpiece difference clamping are on U axle rotating mechanism and miniature rotary table and V axle rotating mechanism.
3. processing unit (plant) according to claim 2 is characterized in that above-mentioned control system comprises computer equipment, control program, machining gap adaptive control system, driver and power supply; Above-mentioned power supply is connected with computer equipment, and the computer equipment that control program is installed is connected with the machining gap adaptive control system, and the machining gap adaptive control system is connected with driver.
4. processing unit (plant) according to claim 2 is characterized in that the above-mentioned pulse power is high frequency, ultrashort pulse power supply, and is connected with electrode or workpiece respectively.
5. processing unit (plant) according to claim 2, it is characterized in that above-mentioned electrolyte supply system comprises two electrolyte containers, electrolyte is housed in the electrolyte container, above-mentioned electrolyte can be neutral solution NaNO3, NaCl, CuSO4, also can add acid solution HClO4, HCl, perhaps above solution mixed solution by a certain percentage.
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| CNB2004100266815A CN100366372C (en) | 2004-03-31 | 2004-03-31 | Three-dimension micro-expansion electrolysis processing method and apparatus |
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| CNB2004100266815A CN100366372C (en) | 2004-03-31 | 2004-03-31 | Three-dimension micro-expansion electrolysis processing method and apparatus |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100395078C (en) * | 2006-05-24 | 2008-06-18 | 南京航空航天大学 | Fixture for electrolytic forming of three-head flexible feeding vane |
| DE102011101100A1 (en) * | 2011-05-10 | 2012-11-15 | Emag Holding Gmbh | Machine for electrochemical metal working |
| CN102658405B (en) * | 2012-05-11 | 2014-04-02 | 中国工程物理研究院机械制造工艺研究所 | Multifunctional micro-electric-spark milling device |
| TWI491460B (en) * | 2012-12-26 | 2015-07-11 | Metal Ind Res & Dev Ct | Electrochemical machining system, apparatus and method for detecting actual machining gap thereof |
| CN103817388B (en) * | 2014-03-04 | 2017-07-28 | 山东理工大学 | A kind of device for preparing the fine milling cutter of screw type hard alloy |
| CN106862683B (en) * | 2017-04-26 | 2019-06-11 | 广东工业大学 | A kind of device and electrochemical machining method for the profound and subtle groove of Electrolyzed Processing planar array |
| CN108746896A (en) * | 2018-06-08 | 2018-11-06 | 哈尔滨工业大学 | A kind of micro array structure micro-electrochemical machining Peripherally milling process method prepared online based on fine circular electrode |
| CN110640244B (en) * | 2019-11-07 | 2020-07-07 | 中国航空制造技术研究院 | Precise electrolytic machining real-time feeding control system and method |
| CN111843075B (en) * | 2020-07-30 | 2023-01-31 | 扬州大学 | Three-dimensional ultrasonic composite electrochemical generating and processing system |
| CN113210796A (en) * | 2021-05-19 | 2021-08-06 | 新疆大学 | Variable-polarity double-electrode arc turning method |
| CN113210773A (en) * | 2021-05-28 | 2021-08-06 | 厦门大学 | Method and processing device for removing large allowance by generating electrolysis of high-hardness material internal spline |
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Patent Citations (2)
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| JPH1158144A (en) * | 1997-08-12 | 1999-03-02 | Makino Milling Mach Co Ltd | Electric discharge machine having working liquid exhaust nozzle |
| CN1195961A (en) * | 1998-01-22 | 1998-10-14 | 浙江大学 | Electrochemical fine machining method based on ionic conductance and its device |
Non-Patent Citations (3)
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Assignee: Guangzhou Panyu United Technology Development Co., Ltd. Assignor: Guangdong University of Technology Contract fulfillment period: 2008.10.20 to 2023.3.31 contract change Contract record no.: 2009440000122 Denomination of invention: Three-dimension micro-expansion electrolysis processing method and apparatus Granted publication date: 20080206 License type: Exclusive license Record date: 20081229 |
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