CN102658405B - Multifunctional micro-electric-spark milling device - Google Patents

Multifunctional micro-electric-spark milling device Download PDF

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CN102658405B
CN102658405B CN201210144976.7A CN201210144976A CN102658405B CN 102658405 B CN102658405 B CN 102658405B CN 201210144976 A CN201210144976 A CN 201210144976A CN 102658405 B CN102658405 B CN 102658405B
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linear platform
control
electrode
power source
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CN102658405A (en
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吉方
张连新
张勇斌
何建国
吴祉群
张日升
唐小会
刘广民
周林
戴晓静
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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Abstract

The invention discloses a multifunctional micro-electric-spark milling device. The device comprises a machine tool, a mixed type micro-energy pulse power supply for generating machining energy, a work liquid circulating system for providing a discharging medium, a line electrode milling system for milling a superfine tool electrode, a video monitoring system and a control system which is connected with all the parts. According to the multifunctional micro-electric-spark milling device, a four-shaft and three-linkage structure can realize complicated three-dimensional track interpolation; the mixed type micro-energy pulse power supply can adjust discharging parameters in a large range and realize stable discharging through parameter setting of the control system, so as to realize more selections for different machining efficiencies and machining precisions; the line electrode milling system can realize tension setting and constant-speed operation of an electrode wire; and the video monitoring system can realize in-place measurement and auxiliary observation of a work piece and an electrode. According to the invention, a numerical control system can realize a special adaptive control function for servo feeding in electric spark machining, and the numerical control system also has complete universal numerical control functions and operation manners.

Description

A kind of multifunction fine electric spark milling processing unit (plant)
Technical field
The invention belongs to extraordinary micro processing field, be specifically related to a kind of multifunction fine electric spark milling processing unit (plant).The present invention can realize, and discharging milling small, complex three-dimensional conductive pieces is processed.
Background technology
Along with scientific and technical development,, there is a large amount of micro parts with micro hole and complicated micro three-dimensional structure die cavity in continuing to bring out of various micromachines, MEMS.The appearance of these baroque micro parts, has higher requirement to Micrometer-Nanometer Processing Technology.Because Micro-EDM Machining Technology is because having noncontact processing, having unrivaled superiority without features such as macroscopical cutting force, material are applied widely at miniature scale workpiece manufacture field, also correspondingly more and more urgent to its demand.Therefore in a lot of fields such as national defense safety, Aero-Space, biotechnology, information communication, mould manufacture, demonstrated wide application prospect, as the manufacture of MEMS technology microsensor, microactrator, microdrive.
Micro-EDM Machining Technology is exactly to discharge electric energy based on high frequency between pulse power positive and negative electrode, thereby produces high temperature, the high pressure of moment, and the small local material of the fusible part that even gasifies, reaches part is carried out to the object that precise fine is removed processing.Therefore its processing characteristics depends primarily on structure, the precision of lathe, the factors such as impulse discharge energy of the pulse power.The apparatus function of some at present domestic research institution's designs is very limited, as not little in Single Pulse Discharge energy, machine tool feed precision do not reach micron order, multi-shaft interlocked function incomplete, do not possess line electrode grinding function, do not possess accurate measurement function in place, be difficult to realize processing small, complex parts, this has just limited the range of application of fine electric spark processing greatly.The present invention has submitted a kind of multifunction fine electric spark milling processing unit (plant) to, and rational in infrastructure, complete function, can address this problem.
Summary of the invention
The object of the present invention is to provide a kind of multifunction fine electric spark milling processing unit (plant).
For addressing the above problem, the scheme that the present invention proposes is:
Multifunction fine electric spark milling processing unit (plant) of the present invention, be characterized in, described processing unit (plant) comprises machine body, produces hybrid micro-energy impulsing power source, the working solution circulating system that discharge medium is provided, the line electrode grinding system of the ultra-fine tool-electrode of grinding, the video frequency monitoring system of machining energy, the switch board of control system, hybrid micro-energy impulsing power source is placed in switch board.Hybrid micro-energy impulsing power source is connected with machine body through cable, and working solution circulating system is connected with machine body by the road, and line electrode grinding system, video frequency monitoring system are connected with machine body respectively; Hybrid micro-energy impulsing power source, working solution circulating system, line electrode grinding system, video frequency monitoring system are connected with control system through control cables respectively.
The bottom of described machine body is " L " type pedestal, Y-axis linear platform is fixed in the horizontal plane of pedestal and is connected with pedestal, X-axis linear platform is placed on the slide plate of Y-axis linear platform, in pedestal level, perpendicular to Y-axis linear platform and with the slide plate of Y-axis linear platform, is connected.Work tank overlays on the slide plate of X-axis linear platform and is connected with the linear platform slide plate of X-axis; X-axis linear platform and Y-axis linear platform, for realizing the interlock in plane, drive work tank to move in the plane.On the column of pedestal, be fixedly connected with Z axis linear platform, main shaft is fixedly connected on the slide plate of Z axis linear platform, the moving up and down and High Rotation Speed of implementation tool electrode.Described X-axis linear platform, Y-axis linear platform, Z axis linear platform and main shaft are connected with control system through control cables respectively.
The precision electrical discharge pulse power source that described hybrid micro-energy impulsing power source is two-stage limited pulse width; Adjustable stabilized voltage supply E1 in hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is sequentially electrically connected to; Rear class FET Q2 and prime FET Q1 are electrically connected in series, and are electrically connected to positive and negative electric discharge two electrode P+, P-are in parallel, and two-stage FET is driven by high frequency inverse, controls respectively rising edge and the trailing edge of output discharge pulse, for realizing two-stage limited pulse width.
Described working solution circulating system, comprises fuel tank, oil pump, motor, fine filter, well strainer, coarse filter, overflow valve, check valve, two-position two-way solenoid valve, adjustable throttling, feed pipe, discharge opeing control valve, work tank; Oil Pump and Electromotor is connected; Fuel tank, well strainer, oil pump, overflow valve, fine filter, check valve, two-position two-way solenoid valve, adjustable throttling, feed pipe connect successively by pipeline; Working solution enters work tank by feed pipe; Fuel tank, coarse filter, discharge opeing control valve, work tank connect successively by pipeline; Work tank is connected by pipeline with machine body; Working solution is through filter, by oil pump, from fuel tank, pumped, pass through successively overflow valve, check valve, two-position two-way solenoid valve, adjustable throttling, then working solution is joined in work tank, working solution in work tank returns in fuel tank through discharge opeing control valve, through filtering, reuses; Two-position two-way solenoid valve, motor are connected with control system respectively.
Described line electrode grinding system is fixed in a gripper shoe, and line electrode grinding system comprises wire feed rolls, wire drawing wheel, stabilizer and some guide wheels; The running of wire electrode is: wire electrode is drawn by coil, through directive wheel and ruby rod guiding, under the traction at wire feed rolls, move, then pass through stabilizer, after several guide wheel guiding, wire electrode passes after the rectangular opening on experimental provision " L " type pedestal column, through grinding machine head and guide wheel, by wire drawing wheel, pull wire electrode to move with constant speed, wire electrode is not reused; Wire feed rolls is all connected with drive motors with wire drawing wheel, and drive motors is connected with control system.The speed of wire drawing wheel has determined the wire travelling speed of wire electrode, can by control system, be set arbitrarily as required, the speed of wire feed rolls is controlled based on fuzzy control theory by control system, the weight of stabilizer and determining positions the tension force of wire electrode, its position is detected by Hall element, the foundation that testing result is controlled as wire feed rolls speed.
Described video frequency monitoring system comprises for video measuring system in place and auxiliary observing system two parts; Described video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Described auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I is connected with control system respectively with image pick-up card II.The image that video measuring system obtains enters computer through image pick-up card, through the image processing software of independent development, processes, and can measure the size of measurand; The image that auxiliary observing system obtains enters computer through image pick-up card, is directly presented on computer screen, for operator, the minute sites of machining area is observed.
Described control system, comprises upper control computer, the multi-axis motion controller based on DSP, I/O interface board and Open NC system; Motion controller is connected with industrial control computer by PCI, ISA or USB; X-axis linear platform drive system, Y-axis linear platform drive system, Z axis linear platform drive system and the wire feeding motor drive system, the receipts silk motor driven systems that are placed in switch board are all connected with motion controller, and carry out accurate positioning control by motion controller; Video measuring system, auxiliary observing system are connected with industrial control computer; Micro-energy impulsing power source is connected with industrial control computer and obtains pulse parameter from it, and feeds back relevant state to industrial control computer; The discharge condition of hybrid micro-energy impulsing power source feeds back to motion controller by I/O interface board, and the feeding state self-adaption that motion controller carries out lathe according to the discharge condition of feedback is controlled, to guarantee the carrying out of normal process process; Working solution circulating system is connected with I/O interface board, by digital switch signal, realizes working solution feed liquid way and on off control; Open NC system comprises the upper control software operating in upper control computer and operates in the next control software on motion controller; Upper control software is realized man-machine interaction, and the next software is realized real-time control and the logic control to lathe.
A kind of multifunction fine electric spark milling processing unit (plant) of the present invention, can realize the processing of complex three-dimensional forms workpiece; This device has " L " type fixed pedestal, X-axis linear platform, Y-axis linear platform be two dimension interlock in horizontal plane, Z axis linear platform is realized the motion of short transverse, high-speed, high precision main shaft moves up and down with Z axis linear platform, and the mode that X-axis linear platform, Y-axis linear platform, Z axis linear platform and main shaft form four axle linkages realizes three-dimensional track interpolation; Line electrode grinding system has been realized the constant speed of wire electrode, permanent tension force is controlled, thereby can make 20 microns with interior tool-electrode; Hybrid micro-energy impulsing power source can be realized adjusting on a large scale and the stable discharging of discharge parameter by the parameter setting of control system, can realize the more more options of different working (machining) efficiencies and machining accuracy; Detection by hybrid micro-energy impulsing power source to discharge condition, the control strategy that coordinates " the quick rollback of short circuit, open circuit feeding, regular picture feeding keep ", realized the servo feed Self Adaptive Control specific function of spark machined, possessed again complete universal numerical control function and mode of operation, guaranteed the safety of higher working (machining) efficiency, processing stability, workpiece and tool-electrode.
Accompanying drawing explanation
Fig. 1 is the structural representation of multifunction fine electric spark milling processing unit (plant) of the present invention;
Fig. 2 is the machine body structural representation in the present invention;
Fig. 3 is the precision electrical discharge pulse power source main circuit connection layout of the two-stage limited pulse width in the present invention;
Fig. 4 is the working solution circulating system schematic diagram in the present invention;
Fig. 5 is the line electrode grinding system schematic diagram in the present invention;
Fig. 6 is the control system schematic diagram in the present invention;
Fig. 7 is the servo feed Self Adaptive Control flow chart in the present invention.
The specific embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
Fig. 1 is that structural representation, Fig. 2 of multifunction fine electric spark milling processing unit (plant) of the present invention is that machine body structural representation, Fig. 3 in the present invention is that precision electrical discharge pulse power source main circuit connection layout, the Fig. 4 of the two-stage limited pulse width in the present invention is that working solution circulating system schematic diagram, Fig. 5 in the present invention is that line electrode grinding system schematic diagram, Fig. 6 in the present invention is the control system schematic diagram in the present invention.
In Fig. 1-Fig. 6, multifunction fine electric spark milling processing unit (plant) of the present invention comprises machine body, " L " type marble pedestal 8, X-axis linear platform 6, Y-axis linear platform 7, Z axis linear platform 11 and main shaft 3, the working solution circulating system 9 of discharge medium is provided, the switch board 1 of the line electrode grinding system 2 of the ultra-fine tool-electrode of grinding, video frequency monitoring system, control system, be placed in the hybrid micro-energy impulsing power source 112 of the interior generation machining energy of switch board 1.Hybrid micro-energy impulsing power source 112 is connected with machine body through cable, and working solution circulating system 9 is connected with machine body by the road, and line electrode grinding system 2, video frequency monitoring system are connected with machine body respectively; Hybrid micro-energy impulsing power source, working solution circulating system 9, line electrode grinding system 2, video frequency monitoring system are connected with control system through control cables respectively.
As shown in Figure 2, described machine body bottom is " L " type pedestal 8, Y-axis linear platform 7 is fixed in the horizontal plane of pedestal and is connected with pedestal 8, X-axis linear platform 6 is placed on the slide plate of Y-axis linear platform 7, in pedestal 8 horizontal planes, perpendicular to Y-axis linear platform 7 and with the slide plate of Y-axis linear platform, is connected.Work tank 10 overlays on the slide plate of X-axis linear platform 6 and is connected with the slide plate of X-axis linear platform 6; X-axis linear platform 6 for realizing the interlock in plane, drives work tank 10 to move in the plane with Y-axis linear platform 7, has correspondingly just realized any movement in travel range in the plane of the workpiece that is fixed in work tank 10, anti-copy block.On the column of pedestal 8, be fixedly connected with Z axis linear platform 11, main shaft 3 is fixedly connected on the slide plate of Z axis linear platform 11, the moving up and down and High Rotation Speed of implementation tool electrode.Described X-axis linear platform 6, Y-axis linear platform 7, Z axis linear platform 11 and main shaft 3 are connected with control system through control cables respectively.
As shown in Figure 3, the precision electrical discharge pulse power source that described hybrid micro-energy impulsing power source is two-stage limited pulse width; Adjustable stabilized voltage supply E1 in hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is sequentially electrically connected to; Rear class FET Q2 and prime FET Q1 are electrically connected in series, be electrically connected to positive and negative electric discharge two electrode P+, P-are in parallel, two-stage FET is driven by high frequency inverse, control respectively rising edge and the trailing edge of output discharge pulse, be used for realizing two-stage limited pulse width, restriction output pulse width minimum reached for 60 nanoseconds, thereby export minimum discharge energy, reached 10 -7the micro-of joule magnitude can discharge pulse.
As shown in Figure 4, described working solution circulating system, comprises fuel tank 907, oil pump 905, motor 909, fine filter 903, well strainer 906, coarse filter 910, overflow valve 904, check valve 902, two-position two-way solenoid valve 901, adjustable throttling 911, feed pipe 912, discharge opeing control valve 914, work tank 913; Oil pump 905 is connected with motor 909; Fuel tank 907, well strainer 906, oil pump 905, overflow valve 904, fine filter 903, check valve 902, two-position two-way solenoid valve 901, adjustable throttling 911, feed pipe 912 connect successively by pipeline; Working solution enters work tank 913 by feed pipe 912; Fuel tank 907, coarse filter 910, discharge opeing control valve 914, work tank 913 are connected successively by pipeline; Work tank 913 is connected by pipeline with machine body; Working solution is through filter, by oil pump 905, from fuel tank 907, pump, pass through successively overflow valve 904, check valve 902, two-position two-way solenoid valve 901, adjustable throttling 911, then working solution is joined in work tank, working solution in work tank returns in fuel tank through discharge opeing control valve 914, through filtering, reuses; Two-position two-way solenoid valve 901, motor 909 are connected with control system respectively.
As shown in Figure 5, described line electrode grinding system is fixed in a gripper shoe, and line electrode grinding system comprises wire feed rolls 201, wire drawing wheel 206, stabilizer 207 and some guide wheels; The running of wire electrode is: wire electrode is drawn by coil 204, through directive wheel 203 and ruby rod 202 guiding, under the traction of wire feed rolls 201, advance, then pass through stabilizer 207, in the present embodiment, be provided with altogether six guide wheels, introduction 208 is one of them, after guiding by six identical guide wheels of structure, wire electrode passes after the rectangular opening on experimental provision " L " type pedestal column, through grinding machine head and guide wheel 205, by wire drawing wheel 206, pull wire electrode to advance with constant speed, wire electrode is not reused; Wire feed rolls 201 all drives and is connected with motor with wire drawing wheel 206, and drive motors is connected with control system.The speed of wire drawing wheel 206 has determined the wire travelling speed of wire electrode, can by control system, be set arbitrarily as required, the speed of wire feed rolls 201 is controlled based on fuzzy control theory by control system, the weight of stabilizer 207 and determining positions the tension force of wire electrode, its position is detected by Hall element, the foundation that testing result is controlled as wire feed rolls speed.
Described video frequency monitoring system is included in digital video measuring system 4 and auxiliary observing system 5 two parts; Described video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Described auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I is connected with control system respectively with image pick-up card II.The image that video measuring system obtains enters computer through image pick-up card I, through the image processing software of independent development, processes, and can measure the size of measurand; The image that auxiliary observing system obtains enters computer through image pick-up card II, is directly presented on computer screen, for operator, the minute sites of machining area is observed.
As shown in Figure 6, described control system, comprises upper control computer 101, the multi-axis motion controller based on DSP 102, I/O interface board 103 and Open NC system; Motion controller 102 is connected with industrial control computer 101 by PCI, ISA or USB; X-axis drive system 107, Y-axis drive system 108, Z axis drive system 109 and the wire feeding motor drive system 105, the receipts silk motor driven systems 106 that are placed in switch board are all connected with motion controller 102, and carry out accurate positioning control by motion controller 102; Video measuring system 4, auxiliary observing system 5 are connected with industrial control computer 101; Hybrid micro-energy impulsing power source 112 is connected with industrial control computer 101 and obtains pulse parameter from it, and feeds back relevant state to industrial control computer 101; The discharge condition of hybrid micro-energy impulsing power source 112 feeds back to motion controller 102 by I/O interface board 103, and the feeding state self-adaption that motion controller 102 carries out lathe according to the discharge condition of feedback is controlled, to guarantee the carrying out of normal process process; Working solution circulating system 9 is connected with I/O interface board 103, by digital switch signal, realizes working solution feed liquid way and on off control; Open NC system comprises the upper control software operating in upper control computer 101 and operates in the next control software on motion controller 102; Upper control software is realized man-machine interaction, and the next software is realized real-time control and the logic control to lathe.
Fig. 7 is the servo feed Self Adaptive Control flow chart in the present invention, the discharge condition of the hybrid micro-energy impulsing power source in the present invention feeds back to motion controller 102 by I/O interface board 103, the feeding state self-adaption that motion controller carries out processing unit (plant) according to the discharge condition of feedback is controlled, its control flow as shown in Figure 7, start after processing, through step 701, step 702 is to determining step 703, if discharge condition is short circuit, by step 706, step 707 is to determining step 709, if discharge condition is regular picture, by step 708 to determining step 709, if discharge condition is open circuit, by step 704, step 705 is to determining step 709, after determining step 709, if undressed, complete, return to determining step 703, otherwise complete processing through step 710.

Claims (4)

1. a multifunction fine electric spark milling processing unit (plant), is characterized in that: described processing unit (plant) comprises machine body, produces the hybrid micro-energy impulsing power source of machining energy, provides the working solution circulating system (9) of discharge medium, the switch board (1) of the line electrode grinding system (2) of the ultra-fine tool-electrode of grinding, video frequency monitoring system, control system; Hybrid micro-energy impulsing power source (112) is placed in switch board (1); Hybrid micro-energy impulsing power source is connected with machine body through cable, and working solution circulating system (9) is connected with machine body by the road, and line electrode grinding system (2), video frequency monitoring system are all connected with machine body; Hybrid micro-energy impulsing power source, working solution circulating system (9), line electrode grinding system (2), video frequency monitoring system are all connected with control system through control cables;
The bottom of described machine body is " L " type pedestal (8), Y-axis linear platform (7) is fixed in the horizontal plane of pedestal (8) and is connected with pedestal (8), X-axis linear platform (6) is placed on the slide plate of Y-axis linear platform (7), in pedestal (8) horizontal plane, perpendicular to Y-axis linear platform (7) and with the slide plate of Y-axis linear platform (7), is connected; Work tank (10) overlays on the slide plate of X-axis linear platform (6) and is connected with the slide plate of X-axis linear platform (6); X-axis linear platform (6) for realizing the interlock in plane, drives work tank 10 to move in the plane with Y-axis linear platform (7); On the column of pedestal (8), be fixedly connected with Z axis linear platform (11), main shaft (3) is fixedly connected on the slide plate of Z axis linear platform (11); Described X-axis linear platform (6), Y-axis linear platform (7), Z axis linear platform and main shaft (3) are connected with control system through control cables respectively;
The precision electrical discharge pulse power source that described hybrid micro-energy impulsing power source is two-stage limited pulse width; Adjustable stabilized voltage supply E1 in hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is sequentially electrically connected to; Rear class FET Q2 and prime FET Q1 are electrically connected in series, and are electrically connected to positive and negative electric discharge two electrode P+, P-are in parallel, and two-stage FET is driven by high frequency inverse, controls respectively rising edge and the trailing edge of output discharge pulse, for realizing two-stage limited pulse width;
Described working solution circulating system (9) comprises fuel tank (907), oil pump (905), motor (909), fine filter (903), well strainer (906), coarse filter (910), overflow valve (904), check valve (902), two-position two-way solenoid valve (901), adjustable throttling (911), feed pipe (912), discharge opeing control valve (914), work tank (913); Oil pump (905) is connected with motor (909); Fuel tank (907), well strainer (906), oil pump (905), overflow valve (904), fine filter (903), check valve (902), two-position two-way solenoid valve (901), adjustable throttling (911), feed pipe (912) connect successively by pipeline; Working solution enters work tank (913) by feed pipe (912); Fuel tank (907), coarse filter (910), discharge opeing control valve (914), work tank (913) connect successively by pipeline; Work tank (913) is connected by pipeline with machine body; Two-position two-way solenoid valve (901), motor (909) are connected with control system respectively.
2. a kind of multifunction fine electric spark milling processing unit (plant) according to claim 1, it is characterized in that: described line electrode grinding system (2) is fixed in a gripper shoe, line electrode grinding system (2) comprises wire feed rolls (201), wire drawing wheel (206), stabilizer (207) and several guide wheel; Wire electrode is drawn by coil (204), the process stabilizer (207) under the traction of wire feed rolls (201) through directive wheel (203) and ruby rod (202) guiding, after several guide wheel guiding, wire electrode passes after the rectangular opening on " L " type pedestal column, through grinding machine head and guide wheel (205), by wire drawing wheel (206), pull wire electrode with constant speed operation; Wire feed rolls (201) is all connected with drive motors with wire drawing wheel (206), and drive motors is connected with control system.
3. a kind of multifunction fine electric spark milling processing unit (plant) according to claim 1, is characterized in that: described video frequency monitoring system is included in digital video measuring system (4) and auxiliary observing system (5); Described video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Described auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I is connected with control system respectively with image pick-up card II.
4. a kind of multifunction fine electric spark milling processing unit (plant) according to claim 1, is characterized in that: described control system comprises upper control computer (101), the multi-axis motion controller based on DSP (102), I/O interface board (103) and Open NC system; Motion controller (102) is connected with industrial control computer (101) by PCI, ISA or USB; The X-axis linear platform drive system (107), Y-axis linear platform drive system (108), Z axis linear platform drive system (109), wire feeding motor drive system (105), the receipts silk motor driven systems (106) that are placed in switch board interior 1 are connected with motion controller respectively, and carry out accurate positioning control by motion controller; Video measuring system (4), auxiliary observing system (5) are connected with industrial control computer (101); Hybrid micro-energy impulsing power source (112) is connected with industrial control computer (101) and obtains pulse parameter from it, and feeds back relevant state to industrial control computer (101); Working solution circulating system (9) is connected with I/O interface board (103), and digital switch signal is used for realizing working solution feed liquid way and on off control; Open NC system comprises the upper control software operating in upper control computer (101) and operates in the next control software on motion controller (102); Upper control software is used for realizing man-machine interaction, and the next software is for realizing real-time control and the logic control to lathe.
CN201210144976.7A 2012-05-11 2012-05-11 Multifunctional micro-electric-spark milling device Expired - Fee Related CN102658405B (en)

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