CN101954518B - Horizontal micro-electric spark machine tool and method for performing online processing by applying same - Google Patents

Horizontal micro-electric spark machine tool and method for performing online processing by applying same Download PDF

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Publication number
CN101954518B
CN101954518B CN2010105029525A CN201010502952A CN101954518B CN 101954518 B CN101954518 B CN 101954518B CN 2010105029525 A CN2010105029525 A CN 2010105029525A CN 201010502952 A CN201010502952 A CN 201010502952A CN 101954518 B CN101954518 B CN 101954518B
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China
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electrode
workbench
main shaft
grinding
wheel
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Expired - Fee Related
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CN2010105029525A
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CN101954518A (en
Inventor
张鸿海
舒霞云
谢丹
张丰
肖峻峰
徐裕力
曹澍
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The invention provides a horizontal micro-electric spark machine tool for manufacturing a microelectrode. The machine tool comprises a machine tool base (1), an X-Y two-dimensional workbench (2), an electrode main shaft (3), a grinding wheel grinding mechanism (4), a Z direction workbench (6) and a wire electric spark grinding mechanism (7), wherein the grinding wheel grinding mechanism (4) and the wire electric spark grinding mechanism (7) are fixedly arranged on the machine tool base (1) and positioned on both sides of the Z direction workbench (6) respectively; the electrode main shaft (3) is arranged on the X-Y workbench (2); a tool electrode to be processed is arranged on the electrode main shaft (3); and the X-Y two-dimensional workbench (2) drives the tool electrode to move relative to the carborundum grinding wheel grinding mechanism (4) and/or the wire electric spark grinding mechanism (7) so as to finish online manufacturing of the microelectrode. Online grinding of a carborundum grinding wheel is combined with online grinding of wire electric sparks and a high-accuracy optical grating ruler is adopted, so that high-efficiency and high-accuracy manufacturing of a micro-scale electrode is realized and high reliability and good economic benefit are achieved.

Description

A kind of horizontal micro spark lathe and use the method that this lathe carries out on-line machining
Technical field
The present invention relates to a kind of micro spark manufacture field, be specifically related to a kind of horizontal micro spark lathe and use the method that this horizontal micro spark lathe carries out on-line machining.
Background technology
In the droplet ejection technology research, the quality of micro-nozzle will directly influence the success or failure of droplet ejection.The current technology that is used for micro-nozzle processing mainly contains methods such as glass-pulling method, micro spark processing and machining.The glass micropipette drawing can be used for single-nozzle makes, but the uniformity that micro-nozzle is made is worth research; The method of machining then is mainly used in the bigger nozzle in aperture and makes, and is not suitable for the making of micron order nozzle; The micro spark technology does not have the macroforce effect as a kind of contactless Discharge Processing Technology in process, processing mainly depends on galvanic action, has the machining accuracy height, and the characteristics of high conformity are one of main machining method of making micro-nozzle.
In the fine electric spark processing small holes, the preparation of microelectrode and clamping are preconditions.At present, the making of microelectrode mainly is divided into off-line making and online making two big classes.Inevitably there are two weak points in the off-line preparation method: at first, serious export license phenomenon changes the shape of shaped electrode very soon and can't carry out high-precision processing in the spark machined; Secondly; Because the secondary installing of electrode inevitably exists alignment error and distortion inaccuracy; Therefore be difficult to guarantee the perpendicularity of electrode and work top and the axiality of electrode and rotary main shaft, adopt offline mode to carry out that micro-electrode is made and the method for its secondary installing on main tapping be difficult to satisfy the requirement of fine electric spark processing.Online preparation method then can be eliminated the error of bringing because of secondary installing in the off-line preparation method, and present online preparation method mainly is to adopt line electrode electric spark grinding and cube electrode electric discharging machining electrode.
In the cube electrode edm process, the tool-electrode total length can be participated in discharge simultaneously, so its edm efficient is higher relatively; But because in discharge process, cube electrode is because there is loss in galvanic corrosion, and can't compensate, thereby it is generally not high to cause in the edm process discharging gap to be difficult to accurate control, electrode surface quality, is difficult to realize the precision-fabricated of microelectrode.The loss of line electrode in the motion compensation process of wire electrode is then passed through in line electric spark grinding method (WEDG) processing; And be a contact discharge between line electrode and the tool-electrode; Be easy to the dimensional accuracy of control tool electrode, the machining accuracy of microelectrode more approaches the geometric accuracy of lathe.But because the machining area of line electric spark grinding method is too small, the electrode process velocity is extremely slow, is difficult to satisfy the mass production requirement.
Can know that from foregoing line electric spark grinding legal system has the higher processing precision height as electrode but efficient is low relatively, the cube electrode spark erosion machining make microelectrode then exist electrode shape with the repeatedly service wear of cube electrode inconsistent shortcoming.As the emery wheel grinding of tradition processing usefulness, its process is contact processing, has macroscopical cutting force, and its working (machining) efficiency is higher.Because the influence of the rotating accuracy of process medium plain emery wheel and circular runout etc. is difficult to realize the making of micron order electrode.
Up to now, also there is not a kind of method for making its electrode that can improve the microelectrode make efficiency, can guarantee the microelectrode machining accuracy simultaneously yet.
Summary of the invention
The objective of the invention is to overcome the deficiency of existing microelectrode manufacturing technology; From improving the microelectrode make efficiency and solving microelectrode clamping problem; A kind of horizontal micro spark lathe is provided and has used the method that this horizontal micro spark lathe carries out on-line machining; This method is made microelectrode through adopting Carborundum wheel filing, line electric spark grinding method and Carborundum wheel grinding line of engagement electric spark grinding legal system; According to waiting to make the electrode size requirement, the above-mentioned processing method of choose reasonable is carried out the online making of microelectrode, improves the make efficiency and making precision of microelectrode; The special high efficiency making that can satisfy 50 μ m to 100 μ m microelectrodes also can realize that diameter is in the following microelectrode making of 50 μ m simultaneously.The mode of online manufacturing has guaranteed the relative positional accuracy of instrument and workpiece, has overcome the drawback of the necessary secondary installing of off-line manufacturing, and the emblem buttress shaft shape electrode that processes can be used for the electric spark and the Electrolyzed Processing of minute aperture and fine three-dimensional structure.
The present invention is through be equipped with Carborundum wheel grinding attachment and line electric spark grinding device simultaneously on lathe; Tool-electrode is installed on the electrode main shaft; With relative Carborundum wheel of X-Y two-dimension moving platform driven tool electrode or line electrode motion, realize the making of microelectrode; Simultaneously, according to the dimensional requirement of waiting to make microelectrode, choose reasonable Carborundum wheel filing, line electric spark grinding method and Carborundum wheel grinding line of engagement electric spark grinding are accomplished the online making of microelectrode.The Carborundum wheel grinding can realize the quick removal of microelectrode surplus to be processed, improves make efficiency; The line electric spark grinding then can further improve the machining accuracy of Carborundum wheel grinding; Therefore both cooperate, and under the prerequisite that guarantees machining accuracy, can significantly improve the make efficiency of microelectrode.Simultaneously, therefore this method can improve the initial diameter of tool-electrode owing to can remove surplus fast through Carborundum wheel, solves the difficulty of small electrode clamping.
Use the micro spark process equipment of the online making microelectrode of Carborundum wheel boost line electric spark grinding method to adopt horizontal layout; Line electric spark grinding device and wheel grinding device are fixed on the workbench; Electrode to be processed is installed on the electrode main shaft of high rotating accuracy; The electrode main shaft is installed on the X-Y two-dimentional work bench, realizes the X of electrode, the feeding of Y direction.The workpiece that the microelectrode that use processes is processed is installed on the clamping workpiece device, and the clamping workpiece device then is installed on the Z axle of installing perpendicular to work top, through the position of adjustment X, Z, realizes the relative positioning of workpiece.
Description of drawings
Fig. 1 is horizontal layout electric spark machine tool front view;
Fig. 2 is horizontal layout electric spark machine tool vertical view;
Fig. 3 is horizontal layout electric spark machine tool left view;
Fig. 4 is a Carborundum wheel main shaft partial enlarged view;
Fig. 5 is an electrode main shaft partial enlarged view.
The specific embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is described further.
As shown in Figure 1, the present invention includes following components: lathe base 1, X-Y two-dimentional work bench 2, electrode main shaft 3, wheel grinding mechanism 4, Z is to workbench 6, line electric spark grinding mechanism 7.Wherein, wheel grinding mechanism 4 lays respectively at the left and right sides of Z to workbench 6 with line electric spark grinding mechanism 7.
By Fig. 1, Fig. 2 and shown in Figure 3, in the present embodiment, lathe base 1 is the basis of whole lathe, is the installation collective of other parts of lathe.On vibration-damped table, vibration-damped table is fixed on the floor through bolted for lathe base 1, and vibration-damped table provides support for this equipment and isolates external shock.
X-Y two-dimentional work bench 2 provides the rectilinear motion of X, Y direction, makes tool-electrode with respect to line electric spark grinding mechanism 7, wheel grinding mechanism 4 and workpiece to be processed motion, accomplishes the movable basis of specifying processing tasks.X-Y two-dimentional work bench 2 is installed on the lathe base 1, comprises the X workbench 16 that moves along directions X and Y workbench 27 two parts that move along the Y direction.Rolling guide 12 is through being bolted on the lathe base 1, and grating chi X11 is through being bolted on the lathe base 1, and the grating reading head of grating chi X11 links to each other with X workbench 16 through bolt.Respectively at rolling guide slide block 13, ball-screw nut 15 links to each other X workbench 16 through bolt.X axis AC servomotor 17 links to each other with planetary reducer 18 through bolt; Planetary reducer 18 is fixed on the lathe base 1 through bearing simultaneously; Planetary reducer 18 other ends then link to each other with ball-screw 14, and ball-screw bearing block 19 links to each other with lathe base 1 through bolt.When X AC servo motor 17 rotates, drive ball-screw 14 and rotate, make workbench 16 move back and forth along rolling guide 12.
Rolling guide 25 is through being bolted on the X workbench 16, and Y grating chi 24 is through being bolted on the X workbench 16, and ball-screw bearing block 23 links to each other with X workbench 16 through bolt; Y workbench 27 through bolt respectively with rolling guide slide block 26, the nut of the read head of grating chi 24 and ball-screw 28 links to each other; AC servo electrode 21 links to each other with planetary reducer 22 through bolt, and planetary reducer 22 links to each other with X workbench 16 through bolt, and the other end of planetary reducer 22 then links to each other with ball-screw 28; When AC servo motor 21 rotates, drive planetary reducer 22 and ball-screw 28, drive Y workbench 27 along rolling guide 25 feed motion back and forth.
Electrode main shaft 3 is mainly used in to be installed and the clamping device electrode, and being electrically connected between the tool-electrode and the pulse power is provided.Electrode main shaft portion 3 is by electrode main shaft 31, electrode brush 32, and electrode clamping device 33, electrode spindle drive motor 34 and electrode main shaft installing plate 35 are formed.
Electrode main shaft 31 is installed on the electrode main shaft installing plate 35 through bolt; Electrode brush 32 is installed on the electrode main shaft installing plate 35 through bolt; Drive motors 34 is installed on the electrode main shaft installing plate 35 through bolt, and electrode main shaft installing plate 35 links to each other with Y workbench 27 through bolt.Electrode clamping device 33 is installed on the electrode main shaft 31, and electrode main shaft 31 is connected through being with synchronously with electrode spindle drive motor 34.
Shown in Figure 5 is electrode main shaft partial enlarged view, and the electrode main shaft is by electrode 311, and electrode holder 312 is marked closely screw 313, insulating mounting cover 314, gland 315 before the main shaft; Bolt 316,321, bearing 317,320, main shaft 318, bearing block 319; Main shaft rear pressing cover 322, nut 323,324, belt wheel 325, flat key 326 is marked closely screw 332; Electric conductor 327, brush 331, bolt 330,328, electrode Zhuzhou installing plate 329 is formed.
Electrode 311 is installed in the electrode holder 312, installs and fixes through marking closely screw 313, and electrode holder 312 is installed in the insulation spacer 314, and insulation spacer 314 is installed on the main shaft 318; Ball bearing 317 and 320 are installed on the main shaft 318, and ball bearing 317 and 320 is installed in the bearing block 319, and bearing gland 315 is installed on bearing 317, and bearing gland 315 is connected with bearing block 318 through bolt 316; Bearing gland 322 is installed on the bearing 320, and bearing gland 322 links to each other with bearing block 319 through bolt 321; The rear portion of main shaft 318 is equipped with the double nut mechanism that nut 323 and 324 is formed; The afterbody of main shaft 318 is equipped with belt wheel 325, belt wheel 325 through flat key 326 with mark closely screw 332 and link to each other with main shaft 318; The main shaft afterbody is provided with electric conductor 327, between electric conductor 327 and electrode holder 312, links to each other through lead 333, and brush 331 is installed on electric conductor 327, and brush 331 links to each other with electrode main shaft installing plate 329 through bolt 330; Bearing block 319 links to each other with main shaft installing plate 329 through bolt 328.
Wheel grinding mechanism 4 is mainly used in and realizes the making of Carborundum wheel filing completion electrode.Grinding wheel spindle part 4 is by Carborundum wheel 41, and grinding wheel spindle 42 and grinding wheel spindle drive motors 43 are formed.Grinding wheel spindle 42 is through being bolted on the lathe base 1, and Carborundum wheel 41 is installed on the grinding wheel spindle 42 through bolt, and grinding wheel spindle drive motors 43 is installed on the lathe base 1 through bolt, and drive motors 43 is connected through being with synchronously with grinding wheel spindle 42.
Carborundum wheel main shaft partial enlarged view is as shown in Figure 4, and this main shaft is by Carborundum wheel 611, emery wheel briquetting 612, emery wheel briquetting 613; Emery wheel clamping screw 614, emery wheel is installed seam 615, ball bearing 616,619; Grinding wheel spindle 617, main shaft construction bolt 618, principal shaft locking nut 620,621; Belt wheel 622, flat key 623 is marked closely screw 624, and bearing block 625 is formed.
Carborundum wheel 611 is installed on the emery wheel seam 615, and 615 of emery wheel seams are installed on the grinding wheel spindle 617, and briquetting 612 and briquetting 613 are housed on the emery wheel 611, connects main shaft 617 through bolt 614, and emery wheel is fixed on the main shaft 617; Ball bearing 616 and 619 are installed on the main shaft 617, and bearing 616 and 619 is installed in the bearing block 625, and bearing block 625 links to each other with base plate through bolt 618; The rear portion of main shaft 617 is equipped with double nut mechanism and the bearing block 625 that nut 620 and 621 is formed, and main shaft 617 is accomplished the axial restraint of main shaft together; The afterbody of main shaft 617 is equipped with belt wheel 622, belt wheel 622 and main shaft 617 through flat key 623 with mark closely screw 624 and be connected fixing.
Z is mainly used in to workbench 6 provides clamping workpiece, Z to motion, accomplishes micro-workpiece processing.Z axle workbench 6 is by AC servo motor 61, planetary reducer 62, and ball-screw 63, rolling guide 64, Z axle workbench 66 and Z axle column 65 are formed.
Z axle column 65 is through being bolted on the lathe base 1, and rolling guide 64 links to each other with Z axle column 65 through bolt, and ball-screw 63 is installed on the Z axle column 65, and respectively at ball-screw 63, rolling guide 64 links to each other Z axle workbench 66 through bolt; Planetary reducer 62 links to each other with Z axle column 65 through bolt, and planetary gear 62 1 ends link to each other with AC servo motor 61, and an end links to each other with ball-screw 63.When AC servo motor 61 rotates, drive planetary reducer 62 and ball-screw 63, drive Z axle workbench 66 and move up and down along rolling guide 64.
Line electric spark grinding mechanism 7 is mainly used in the line EDM Grinding of accomplishing microelectrode, makes various micro-electrodes.Silk wheel 72 is put by installing plate 71 in line electric spark grinding mechanism 7, receives silk driven pulley 73, receives silk driving wheel 74, hold-down mechanism 75, and third wheel 76, guiding mechanism 77, stator ring 78 and drive motors are formed.
Installing plate 71 is fixed on the lathe base 1 through bolt, and stator ring 78 is through being bolted on the installing plate 71, and guiding mechanism 77 is installed on the installing plate 71 through screw thread; Put silk wheel 72, a third wheel 76 and a receipts silk driven pulley 73 are installed on the installing plate 71 through duplex bearing mechanism.
Carrying out line electric spark grinding legal system when making microelectrode, equally at first tool-electrode to be processed 311 is installed on the electrode holder 312, be fixed through marking closely screw 313; Starting electrode spindle drive motor 34 rotatablely moves tool-electrode 311; Through the X-Y two-dimentional work bench under driven by servomotor; Tool-electrode to be processed 311 is moved to fixed wheel 78 places of line electric spark grinding mechanism 7; Under the effect of micro spark machining tool control system and discharging gap detection system; Tool-electrode 311 is accomplished line electric spark grinding legal system and is made microelectrode with respect to line electrode path relative motion according to the rules.
Add man-hour at micro sparks such as carrying out processing small holes and micro-nozzle making, at first the starting electrode spindle drive motor 34, and tool-electrode 311 is rotatablely moved; Through the X-Y two-dimentional work bench under driven by servomotor; The tool-electrode of making 311 moved to be installed in Z workpiece place on the workbench on the workbench 6 66; Under the effect of micro spark machining tool control system and discharging gap detection system; Tool-electrode 311 is accomplished the micro spark processing of micro-nozzle and micro hole with respect to nozzle to be processed and workpiece path relative motion according to the rules.
As stated, X, Y, Z axle are that AC servo motor passes through planetary reducer and links to each other with ball-screw, constitute motion, and quality of fit is the closed loop feedback that the grating chi of 0.1 μ m forms, and having constituted precision is the spark-erosion machine tool feed system of 0.1 μ m.

Claims (7)

1. a horizontal micro spark lathe is used to make microelectrode and can utilizes the microelectrode that completes directly to carry out micro spark processing, realizes that microelectrode is made and micro spark is processed incorporate online assignment; It is characterized in that this lathe comprises lathe base (1), X-Y two-dimentional work bench (2); Electrode main shaft (3), wheel grinding mechanism (4), Z is to workbench (6) and line electric spark grinding mechanism (7); Wherein, Said wheel grinding mechanism (4) and line electric spark grinding mechanism (7) are fixedly mounted on the lathe base (1), lay respectively at the left and right sides of Z to workbench (6), and said Z is used for the clamping workpiece to be processed to workbench (6); Said electrode main shaft (3) is installed on the X-Y workbench (2); Tool-electrode to be processed is installed on this electrode main shaft (3), and the making of microelectrode is accomplished in said relatively Carborundum wheel grinding mechanism of said X-Y two-dimentional work bench (2) driven tool electrode (4) and line electric spark grinding mechanism (7) motion; Drive the said microelectrode that completes again with respect to the workpiece to be processed relative motion of Z on workbench (6), accomplish micro spark processing.
2. a kind of horizontal micro spark lathe according to claim 1; It is characterized in that; Described X-Y two-dimentional work bench (2) is installed on the lathe base (1); Comprise first workbench (16) that moves along directions X and second workbench (27) that moves along the Y direction, said first workbench (16) realizes along the moving of directions X through being fixed on first rolling guide (12) on the lathe base (1), and said second workbench (27) is realized the two dimensional motion of Y direction through being fixed on second rolling guide (25) on first workbench (16); On said first workbench (16) and second workbench (27), be respectively arranged with grating chi (11,24).
3. a kind of horizontal micro spark lathe according to claim 1 and 2; It is characterized in that said electrode main shaft (3) is used for installing and the clamping device electrode, and being electrically connected between the tool-electrode and the pulse power is provided; This electrode main shaft portion (3) comprises electrode main shaft (31); Electrode brush (32), electrode clamping device (33), electrode spindle drive motor (34) and electrode main shaft installing plate (35); Electrode main shaft (31), electrode brush (32) and drive motors (34) are installed on the electrode main shaft installing plate (35); Electrode main shaft installing plate (35) links to each other with second workbench (27) through bolt, and electrode clamping device (33) is installed on the electrode main shaft (31), and electrode main shaft (31) is connected through being with synchronously with electrode spindle drive motor (34).
4. a kind of horizontal micro spark lathe according to claim 1 and 2; It is characterized in that; Said wheel grinding mechanism (4) is used in electrode making carrying out Carborundum wheel grinding; Comprise Carborundum wheel (41), grinding wheel spindle (42) and grinding wheel spindle drive motors (43); Grinding wheel spindle (42) and grinding wheel spindle drive motors (43) are fixedly mounted on the lathe base (1), and Carborundum wheel (41) is through being installed on the grinding wheel spindle (42), and grinding wheel spindle drive motors (43) is connected through being with synchronously with grinding wheel spindle (42).
5. a kind of horizontal micro spark lathe according to claim 1 and 2 is characterized in that said line electric spark grinding mechanism (7) is used to accomplish the line EDM Grinding of microelectrode; Comprise installing plate (71), put silk wheel (72), receive silk driven pulley (73); Receive silk driving wheel (74); Hold-down mechanism (75), third wheel (76), guiding mechanism (77), stator ring (78) and drive motors, said installing plate (71) is fixed on the lathe base (1) through bolt; Stator ring (78) is through being bolted on the installing plate (71), and guiding mechanism (77) is installed on the installing plate (71) through screw thread; Put silk wheel (72), third wheel (76) and receive silk driven pulley (73) and be installed on the installing plate (71) through duplex bearing mechanism.
6. a kind of horizontal micro spark lathe according to claim 1 and 2 is characterized in that said Z comprises AC servo motor (61) to workbench (6); Planetary reducer (62); Ball-screw (63), rolling guide (64), Z axle workbench (66) and Z axle column (65); Z axle column (65) is fixed on the lathe base (1); The 3rd rolling guide (64) links to each other with Z axle column (65), and ball-screw (63) is installed on the Z axle column (65), and Z axle workbench (66) links to each other with rolling guide (64) with ball-screw (63) respectively; Planetary reducer (62) links to each other with Z axle column (65) through bolt; Planetary gear (62) one ends link to each other with AC servo motor (61); The other end links to each other with ball-screw (63); Drive planetary reducer (62) and ball-screw (63) when AC servo motor (61) rotates, drive Z axle workbench (66) and move up and down along the 3rd rolling guide (64).
7. the horizontal micro spark lathe of using one of aforesaid right requirement 1-6 carries out the integrated online assignment method that microelectrode is made and micro spark is processed, and it is characterized in that this method detailed process is following:
At first tool-electrode to be processed (311) is fixedly mounted on the electrode holder (312); Starting electrode spindle drive motor (34); Tool-electrode (311) is rotatablely moved; Said X-Y two-dimentional work bench (2) is located the fixed wheel (78) that tool-electrode (311) moves to line electric spark grinding mechanism (7) under driven by servomotor, and makes tool-electrode (311) with respect to line electrode path relative motion according to the rules, accomplishes line electric spark grinding legal system and makes microelectrode;
Then; Starting electrode spindle drive motor (34); Tool-electrode (311) is rotatablely moved; Said X-Y two-dimentional work bench (2) moves to the tool-electrode of making (311) under driven by servomotor and is installed in the workpiece to be processed place of Z on the workbench (66) on the workbench (6), makes tool-electrode (311) with respect to workpiece to be processed path relative motion according to the rules, accomplishes micro spark processing.
CN2010105029525A 2010-10-12 2010-10-12 Horizontal micro-electric spark machine tool and method for performing online processing by applying same Expired - Fee Related CN101954518B (en)

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