CN102658405A - Multifunctional micro-electric-spark milling device - Google Patents
Multifunctional micro-electric-spark milling device Download PDFInfo
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- CN102658405A CN102658405A CN2012101449767A CN201210144976A CN102658405A CN 102658405 A CN102658405 A CN 102658405A CN 2012101449767 A CN2012101449767 A CN 2012101449767A CN 201210144976 A CN201210144976 A CN 201210144976A CN 102658405 A CN102658405 A CN 102658405A
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Abstract
The invention discloses a multifunctional micro-electric-spark milling device. The device comprises a machine tool, a mixed type micro-energy pulse power supply for generating machining energy, a work liquid circulating system for providing a discharging medium, a line electrode milling system for milling a superfine tool electrode, a video monitoring system and a control system which is connected with all the parts. According to the multifunctional micro-electric-spark milling device, a four-shaft and three-linkage structure can realize complicated three-dimensional track interpolation; the mixed type micro-energy pulse power supply can adjust discharging parameters in a large range and realize stable discharging through parameter setting of the control system, so as to realize more selections for different machining efficiencies and machining precisions; the line electrode milling system can realize tension setting and constant-speed operation of an electrode wire; and the video monitoring system can realize in-place measurement and auxiliary observation of a work piece and an electrode. According to the invention, a numerical control system can realize a special adaptive control function for servo feeding in electric spark machining, and the numerical control system also has complete universal numerical control functions and operation manners.
Description
Technical field
The invention belongs to extraordinary micro processing field, be specifically related to a kind of multifunction fine electric spark milling processing unit (plant).The present invention can realize, and discharging milling small, the complex three-dimensional conductive pieces is processed.
Background technology
Along with science and technology development, a large amount of micro parts that has micro hole and complicated micro three-dimensional structure die cavity has appearred in continuing to bring out of various micromachines, MEMS.The appearance of these baroque micro parts is had higher requirement to Micrometer-Nanometer Processing Technology.Because the fine electric spark process technology has unrivaled superiority because of having noncontact and process, do not have characteristics such as macroscopical cutting force, material is applied widely at miniature scale workpiece manufacture field, and is also correspondingly more and more urgent to its demand.Therefore demonstrated wide application prospect in a lot of fields such as national defense safety, Aero-Space, biotechnology, information communication, mould manufacturing, like the manufacturing of MEMS technology microsensor, microactrator, microdrive.
The fine electric spark process technology just is based between the pulse power positive and negative electrode high frequency and discharges electric energy, thereby produces high temperature, the high pressure of moment, and the small local material of fusible even gasification part reaches part is carried out the purpose that precise fine is removed processing.Therefore its processing characteristics depends primarily on structure, the precision of lathe, the factors such as impulse discharge energy of the pulse power.The apparatus function of some at present domestic research institution's designs is very limited;, machine tool feed precision inadequately little like the pulse discharge energy do not reach micron order, multi-shaft interlocked function incomplete, do not possess the line electrode grinding function, do not possess accurate measurement function on the throne; Be difficult to realize processing small, complex parts, this just big limitations the range of application of fine electric spark processing.The present invention has submitted a kind of multifunction fine electric spark milling processing unit (plant) to, and rational in infrastructure, complete function can address this problem.
Summary of the invention
The technical problem that the present invention will solve provides a kind of multifunction fine electric spark milling processing unit (plant).
Multifunction fine electric spark milling processing unit (plant) of the present invention; Be characterized in; Described processing unit (plant) comprises machine body, produces hybrid micro-energy impulsing power source, the working solution circulating system that discharge medium is provided, the line electrode grinding system of the ultra-fine tool-electrode of grinding, the video frequency monitoring system of machining energy; The switch board of control system, hybrid micro-energy impulsing power source places in the switch board.Hybrid micro-energy impulsing power source links to each other with machine body through cable, and working solution circulating system links to each other with machine body by the road, and line electrode grinding system, video frequency monitoring system are connected with machine body respectively; Hybrid micro-energy impulsing power source, working solution circulating system, line electrode grinding system, video frequency monitoring system are connected with the control system through the control cable respectively.
The bottom of described machine body is for being " L " type pedestal; Y axle linear platform is fixed in the horizontal plane of pedestal and with pedestal and links to each other; X axle linear platform places on the slide plate of Y axle linear platform, in pedestal level, is connected perpendicular to Y axle linear platform and with the slide plate of Y axle linear platform.Work tank overlays on the slide plate of X axle linear platform and links to each other with the linear platform slide plate of X axle; X axle linear platform and Y axle linear platform are used to realize the interlock in the plane, drive work tank and move in the plane.On the column of pedestal, be fixedly connected with Z axle linear platform, main shaft is fixedly connected on the slide plate of Z axle linear platform, and move up and down and the high speed of implementation tool electrode are rotated.Said X axle linear platform, Y axle linear platform, Z axle linear platform and main shaft link to each other with the control system through the control cable respectively.
Described hybrid micro-energy impulsing power source is the precision electrical discharge pulse power source of two-stage limited pulse width; Adjustable stabilized voltage supply E1 in the hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is electrically connected in proper order; Back level FET Q2 and prime FET Q1 are electrically connected in series, and are electrically connected with positive and negative discharge two electrode P+, P-parallel connection, and the two-stage FET is driven by high frequency inverse, and the rising edge and the trailing edge of control output discharge pulse are used to realize two-stage limited pulse width respectively.
Said working solution circulating system comprises fuel tank, oil pump, motor, fine filter, well strainer, coarse filter, overflow valve, check valve, two-position two-way solenoid valve, adjustable throttling, feed pipe, discharge opeing control valve, work tank; Oil pump links to each other with motor; Fuel tank, well strainer, oil pump, overflow valve, fine filter, check valve, two position two-way valve, adjustable throttling, feed pipe connect through pipeline successively; Working solution gets into work tank by feed pipe; Fuel tank, coarse filter, discharge opeing control valve, work tank connect through pipeline successively; Work tank is connected through pipeline with machine body; Working solution is through filter; Pump from fuel tank by oil pump, pass through overflow valve, check valve, two position two-way valve, adjustable throttling successively, join working solution in the work tank then; Working solution in the work tank returns in the fuel tank through the discharge opeing control valve, reuses through filtering; Two position two-way valve, motor link to each other with the control system respectively.
Said line electrode grinding system is fixed on the gripper shoe, and the line electrode grinding system comprises wire feed rolls, wire drawing wheel, stabilizer and some guide wheels; The running of wire electrode is: wire electrode is drawn by coil; Stabilizer is passed through in operation under directive wheel and the traction of ruby rod guiding at wire feed rolls then, after several guide wheel guiding; After wire electrode passes the rectangular opening on experimental provision " L " the type pedestal column; Through grinding machine head and guide wheel, with constant speed operation, wire electrode is not reused by wire drawing wheel pulling wire electrode; Wire feed rolls all links to each other with drive motors with wire drawing wheel, and drive motors links to each other with the control system.The speed of wire drawing wheel has determined the wire travelling speed of wire electrode; Can set arbitrarily by the control system as required; The speed of wire feed rolls is controlled based on fuzzy control theory by the control system; The weight of stabilizer and determining positions the tension force of wire electrode, its position is detected by Hall element, testing result is as the foundation of wire feed rolls speed controlling.
Said video frequency monitoring system comprises and is used for video measuring system on the throne and auxiliary observing system two parts; Said video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Said auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I links to each other with the control system respectively with image pick-up card II.The image that video measuring system obtains gets into computer through image pick-up card, handles through the image processing software of independent development, can measure the size of measurand; The image that auxiliary observing system obtains gets into computer through image pick-up card, directly is presented on the computer screen, supplies the operator that the minute sites of machining area is observed.
Said control system comprises upper control computer, the multi-axis motion controller based on DSP, I/O interface board and open cnc software; Motion controller is connected with industrial control computer through PCI, ISA or USB; Place X axle linear platform drive system, Y axle linear platform drive system, Z axle linear platform drive system and wire feeding motor drive system, a receipts silk motor driven systems in the switch board all to be connected, and to carry out accurate localization control by motion controller with motion controller; Video measuring system, auxiliary observing system are connected with industrial control computer; Micro-energy impulsing power source is connected with industrial control computer and obtains pulse parameter from it, and the relevant state of feedback is given industrial control computer; The discharge condition of hybrid micro-energy impulsing power source feeds back to motion controller through the I/O interface board, and motion controller carries out the feeding state self-adaption control of lathe according to the discharge condition of feedback, to guarantee the carrying out of normal process process; Working solution circulating system is connected with the I/O interface board, realizes working solution feed liquid way and start and stop control by the digital switch signal; Open cnc software comprises the upper control software that operates on the upper control computer and operates in the next control software on the motion controller; Upper control software is realized man-machine interaction, and the next software is realized real-time control and the logic control to lathe.
Multifunction fine electric spark milling processing unit (plant) of the present invention can be realized the processing of complex three-dimensional forms workpiece; This device has " L " type fixed pedestal; X axle linear platform, Y axle linear platform be the two dimension interlock in horizontal plane; Z axle linear platform is realized the motion of short transverse; The high-speed, high precision main shaft moves up and down with Z axle linear platform, and the mode that X axle linear platform, Y axle linear platform, Z axle linear platform and main shaft constitute four axle linkages realizes the three-dimensional track interpolation; The line electrode grinding system has been realized the constant speed of wire electrode, permanent Tension Control, thereby can make 20 microns with interior tool-electrode; Hybrid micro-energy impulsing power source can be provided with adjusting on a large scale and the stable discharging of realizing discharge parameter through the parameter of control system, can realize the more more options of different working (machining) efficiencies and machining accuracy; Through of the detection of hybrid micro-energy impulsing power source to discharge condition; The control strategy that cooperates " the quick rollback of short circuit, open circuit feeding, regular picture feeding keep "; Realized the servo feed Self Adaptive Control specific function of spark machined; Possessed complete universal numerical control function and mode of operation again, guaranteed the safety of higher working (machining) efficiency, processing stability, workpiece and tool-electrode.
Description of drawings
Fig. 1 is the structural representation of multifunction fine electric spark milling processing unit (plant) of the present invention;
Fig. 2 is the machine body structural representation among the present invention;
Fig. 3 is the precision electrical discharge pulse power source main circuit connection layout of the two-stage limited pulse width among the present invention;
Fig. 4 is the working solution circulating system sketch map among the present invention;
Fig. 5 is the line electrode grinding system sketch map among the present invention;
Fig. 6 is the control system schematic among the present invention;
Fig. 7 is the servo feed Self Adaptive Control flow chart among the present invention.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is explained further details.
Fig. 1 is that structural representation, Fig. 2 of multifunction fine electric spark milling processing unit (plant) of the present invention is control system schematic in the present invention for the working solution circulating system sketch map among the present invention, Fig. 5 for the line electrode grinding system sketch map among the present invention, Fig. 6 for precision electrical discharge pulse power source main circuit connection layout, Fig. 4 of the two-stage limited pulse width among the present invention for the machine body structural representation among the present invention, Fig. 3.
In Fig. 1～Fig. 6, multifunction fine electric spark milling processing unit (plant) of the present invention comprise machine comprise line electrode grinding system 2, video frequency monitoring system, the control system of machine body, " L " type marble pedestal 8, X axle linear platform 6, Y axle linear platform 7, Z axle linear platform 11 and main shaft 3, the working solution circulating system 9 that discharge medium is provided, the ultra-fine tool-electrode of grinding switch board 1, place the hybrid micro-energy impulsing power source 112 that produces machining energy in the switch board 1.Hybrid micro-energy impulsing power source 112 links to each other with machine body through cable, and working solution circulating system 9 links to each other with machine body by the road, and line electrode grinding system 2, video frequency monitoring system are connected with machine body respectively; Hybrid micro-energy impulsing power source, working solution circulating system 9, line electrode grinding system 2, video frequency monitoring system are connected with the control system through the control cable respectively.
As shown in Figure 2; Described machine body bottom is " L " type pedestal 8; Y axle linear platform 7 is fixed in the horizontal plane of pedestal and with pedestal 8 and links to each other; X axle linear platform 6 places on the slide plate of 7 of Y linear platforms, in pedestal 8 horizontal planes, is connected perpendicular to Y axle linear platform 7 and with the slide plate of Y axle linear platform.Work tank 10 overlays on the slide plate of X axle linear platform 6 and links to each other with the slide plate of X axle linear platform 6; X axle linear platform 6 is used to realize the interlock in the plane with Y axle linear platform 7, drives work tank 10 and moves in the plane, has correspondingly just realized being fixed on workpiece, anti-copy block interior the moving arbitrarily of travel range in the plane in the work tank 10.On the column of pedestal 8, be fixedly connected with Z axle linear platform 11, main shaft 3 is fixedly connected on the slide plate of Z axle linear platform 11, and move up and down and the high speed of implementation tool electrode are rotated.Said X axle linear platform 6, Y axle linear platform 7, Z axle linear platform 11 and main shaft 3 link to each other with the control system through the control cable respectively.
As shown in Figure 3, described hybrid micro-energy impulsing power source is the precision electrical discharge pulse power source of two-stage limited pulse width; Adjustable stabilized voltage supply E1 in the hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is electrically connected in proper order; Back level FET Q2 and prime FET Q1 are electrically connected in series; Be electrically connected with positive and negative discharge two electrode P+, P-parallel connection; The two-stage FET is driven by high frequency inverse, and the rising edge and the trailing edge of control output discharge pulse are used to realize two-stage limited pulse width respectively; Restriction output pulse width minimum reached for 60 nanoseconds, reached 10 thereby export minimum discharge energy
-7The little of joule magnitude can discharge pulse.
As shown in Figure 4; Said working solution circulating system comprises fuel tank 907, oil pump 905, motor 909, fine filter 903, well strainer 906, coarse filter 910, overflow valve 904, check valve 902, two-position two-way solenoid valve 901, adjustable throttling 911, feed pipe 912, discharge opeing control valve 914, work tank 913; Oil pump 905 links to each other with motor 909; Fuel tank 907, well strainer 906, oil pump 905, overflow valve 904, fine filter 903, check valve 902, two position two-way valve 901, adjustable throttling 911, feed pipe 912 connect through pipeline successively; Working solution gets into work tank 913 by feed pipe 912; Fuel tank 907, coarse filter 910, discharge opeing control valve 914, work tank 913 are connected by pipeline successively; Work tank 913 is connected through pipeline with machine body; Working solution is through filter; Pump from fuel tank 907 through oil pump 905; Pass through overflow valve 904, check valve 902, two position two-way valve 901, adjustable throttling 911 successively; Join working solution in the work tank then, the working solution in the work tank returns in the fuel tank through discharge opeing control valve 914, reuses through filtering; Two position two-way valve 901, motor 909 link to each other with the control system respectively.
As shown in Figure 5, said line electrode grinding system is fixed on the gripper shoe, and the line electrode grinding system comprises wire feed rolls 201, wire drawing wheel 206, stabilizer 207 and some leading; The running of wire electrode is: wire electrode is drawn by coil 204, guides with ruby rod 202 through directive wheel 203 and under the traction of wire feed rolls 201, advances, and passes through stabilizer 207 then; In the present embodiment; Be provided with six guide wheels altogether, introduction 208 is one of them, after guiding through six identical guide wheels of structure; After wire electrode passes the rectangular opening on experimental provision " L " the type pedestal column; Through grinding machine head and guide wheel 205, advance with constant speed by wire drawing wheel 206 pulling wire electrodes, wire electrode is not reused; Wire feed rolls 201 all links to each other with motor-driven with wire drawing wheel 206, and drive motors links to each other with the control system.The speed of wire drawing wheel 206 has determined the wire travelling speed of wire electrode; Can set arbitrarily by the control system as required; The speed of wire feed rolls 201 is controlled based on fuzzy control theory by the control system; The weight of stabilizer 207 and determining positions the tension force of wire electrode, its position is detected by Hall element, testing result is as the foundation of wire feed rolls speed controlling.
Said video frequency monitoring system is included in digital video measuring system 4 and auxiliary observing system 5 two parts; Said video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Said auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I links to each other with the control system respectively with image pick-up card II.The image that video measuring system obtains gets into computer through image pick-up card I, handles through the image processing software of independent development, can measure the size of measurand; The image that auxiliary observing system obtains gets into computer through image pick-up card II, directly is presented on the computer screen, supplies the operator that the minute sites of machining area is observed.
As shown in Figure 6, said control system comprises upper control computer 101, the multi-axis motion controller 102 based on DSP, I/O interface board 103 and open cnc software; Motion controller 102 is connected with industrial control computer 101 through PCI, ISA or USB; Place X axle drive system 107, Y axle drive system 108, Z axle drive system 109 and wire feeding motor drive system 105, a receipts silk motor driven systems 106 in the switch board all to be connected, and to carry out accurate localization control by motion controller 102 with motion controller 102; Video measuring system 4, auxiliary observing system 5 are connected with industrial control computer 101; Hybrid micro-energy impulsing power source 112 is connected with industrial control computer 101 and obtains pulse parameter from it, and the relevant state of feedback is given industrial control computer 101; The discharge condition of hybrid micro-energy impulsing power source 112 feeds back to motion controller 102 through I/O interface board 103, and motion controller 102 carries out the feeding state self-adaption control of lathe according to the discharge condition of feedback, to guarantee the carrying out of normal process process; Working solution circulating system 9 is connected with I/O interface board 103, realizes working solution feed liquid way and start and stop control by the digital switch signal; Open cnc software comprises the upper control software that operates on the upper control computer 101 and operates in the next control software on the motion controller 102; Upper control software is realized man-machine interaction, and the next software is realized real-time control and the logic control to lathe.
Fig. 7 is the servo feed Self Adaptive Control flow chart among the present invention, and the discharge condition of the hybrid micro-energy impulsing power source among the present invention as shown in Figure 7 feeds back to motion controller 102 through I/O interface board 103, and motion controller carries out the feeding state self-adaption control of processing unit (plant) according to the discharge condition of feedback; Control flow is for after beginning processing; Arrive determining step 703 through step 701, step 702, if discharge condition is short circuit, then by step 706, step 707 to determining step 709; If discharge condition is regular picture; Then by step 708 to determining step 709, if discharge condition is for open circuit, then by step 704, step 705 to determining step 709; After determining step 709,, otherwise accomplish processing through step 710 if determining step 703 is then returned in undressed completion.
Claims (6)
1. multifunction fine electric spark milling processing unit (plant) is characterized in that: described processing unit (plant) comprises line electrode grinding system (2), the video frequency monitoring system of machine body, the hybrid micro-energy impulsing power source that produces machining energy, the working solution circulating system (9) that discharge medium is provided, the ultra-fine tool-electrode of grinding, the switch board (1) of control system; Hybrid micro-energy impulsing power source (112) places in the switch board (1); Hybrid micro-energy impulsing power source links to each other with machine body through cable, and working solution circulating system (9) links to each other with machine body by the road, and line electrode grinding system (2), video frequency monitoring system all are connected with machine body; Hybrid micro-energy impulsing power source, working solution circulating system (9), line electrode grinding system (2), video frequency monitoring system all are connected with the control system through the control cable;
The bottom of described machine body is for being " L " type pedestal (8); Y axle linear platform (7) is fixed in the horizontal plane of pedestal (8) and with pedestal (8) and links to each other; X axle linear platform (6) places on the slide plate of Y axle linear platform (7), in pedestal (8) horizontal plane, is connected perpendicular to Y axle linear platform (7) and with the slide plate of Y axle linear platform (7); Work tank (10) overlays on the slide plate of X axle linear platform (6) and links to each other with the slide plate of X axle linear platform (6); X axle linear platform (6) is used to realize the interlock in the plane with Y axle linear platform (7), drives work tank 10 and moves in the plane; On the column of pedestal (8), be fixedly connected with Z axle linear platform (11), main shaft (3) is fixedly connected on the slide plate of Z axle linear platform (11); Said X axle linear platform (6), Y axle linear platform (7), Z axle linear platform and main shaft (3) link to each other with the control system through the control cable respectively.
2. multifunction fine electric spark milling processing unit (plant) according to claim 1 is characterized in that: described hybrid micro-energy impulsing power source is the precision electrical discharge pulse power source of two-stage limited pulse width; Adjustable stabilized voltage supply E1 in the hybrid micro-energy impulsing power source, current-limiting resistance array R1 ~ Rn, the anodal P+ of prime FET Q1 and sparking electrode is electrically connected in proper order; Back level FET Q2 and prime FET Q1 are electrically connected in series, and are electrically connected with positive and negative discharge two electrode P+, P-parallel connection, and the two-stage FET is driven by high frequency inverse, and the rising edge and the trailing edge of control output discharge pulse are used to realize two-stage limited pulse width respectively.
3. multifunction fine electric spark milling processing unit (plant) according to claim 1 is characterized in that: described working solution circulating system (9) comprises fuel tank (907), oil pump (905), motor (909), fine filter (903), well strainer (906), coarse filter (910), overflow valve (904), check valve (902), two-position two-way solenoid valve (901), adjustable throttling (911), feed pipe (912), discharge opeing control valve (914), work tank (913); Oil pump (905) links to each other with motor (909); Fuel tank (907), well strainer (906), oil pump (905), overflow valve (904), fine filter (903), check valve (902), two position two-way valve (901), adjustable throttling (911), feed pipe (912) connect through pipeline successively; Working solution gets into work tank (913) by feed pipe (912); Fuel tank (907), coarse filter (910), discharge opeing control valve (914), work tank (913) connect through pipeline successively; Work tank (913) is connected through pipeline with machine body; Two position two-way valve (901), motor (909) link to each other with the control system respectively.
4. multifunction fine electric spark milling processing unit (plant) according to claim 1; It is characterized in that: described line electrode grinding system (2) is fixed on the gripper shoe, and line electrode grinding system (2) comprises wire feed rolls (201), wire drawing wheel (206), stabilizer (207) and several guide wheels; Wire electrode is drawn by coil (204); Through directive wheel (203) and ruby rod (202) guiding process stabilizer (207) under the traction of wire feed rolls (201); After several guide wheel guiding; After wire electrode passes the rectangular opening on experimental provision " L " the type pedestal column,, move with constant speed by wire drawing wheel (206) pulling wire electrode through grinding machine head and guide wheel (205); Wire feed rolls (201) all links to each other with drive motors with wire drawing wheel (206), and drive motors links to each other with the control system.
5. multifunction fine electric spark milling processing unit (plant) according to claim 1 is characterized in that: described video frequency monitoring system is included in digital video measuring system (4) and auxiliary observing system (5); Said video measuring system comprises high zoom ratios, high resolution factor videomicroscopy, coaxial-illuminating system, object lens I, image pick-up card I; Said auxiliary observing system comprises continuous vari-focus video system, object lens II, adapter, image pick-up card II; Image pick-up card I links to each other with the control system respectively with image pick-up card II.
6. multifunction fine electric spark milling processing unit (plant) according to claim 1 is characterized in that: said control system comprises upper control computer (101), the multi-axis motion controller (102) based on DSP, I/O interface board (103) and open cnc software; Motion controller (102) is connected with industrial control computer (101) through PCI, ISA or USB; Place X axle linear platform drive system (107), Y axle linear platform drive system (108), Z axle linear platform drive system (109), wire feeding motor drive system (105), the receipts silk motor driven systems (106) of switch board interior 1 to be connected with motion controller respectively, and carry out accurate localization control by motion controller; Video measuring system (4), auxiliary observing system (5) are connected with industrial control computer (101); Hybrid micro-energy impulsing power source (112) is connected with industrial control computer (101) and obtains pulse parameter from it, and the relevant state of feedback is given industrial control computer (101); Working solution circulating system (9) is connected with I/O interface board (103), and the digital switch signal is used to realize working solution feed liquid way and start and stop control; Open cnc software comprises the upper control software that operates on the upper control computer (101) and operates in the next control software on the motion controller (102); Upper control software is used to realize man-machine interaction, and the next software is used to realize real-time control and the logic control to lathe.
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| CN103264338A (en) * | 2013-05-31 | 2013-08-28 | 上海交通大学 | Grinding device for line electrode |
| CN103611992A (en) * | 2013-12-16 | 2014-03-05 | 贵州航中力电精机科技有限公司 | Electric spark cutting machine |
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| CN104098066A (en) * | 2014-07-21 | 2014-10-15 | 哈尔滨工业大学 | Electrochemistry micro-nanomachining device |
| CN104108051A (en) * | 2014-06-25 | 2014-10-22 | 山东鲁南机床有限公司 | Magnifying and adjusting instrument for electric spark precise machining and application method thereof |
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