CN2736087Y - Three dimensional superfine generating electrochemical machining device - Google Patents

Three dimensional superfine generating electrochemical machining device Download PDF

Info

Publication number
CN2736087Y
CN2736087Y CN 200420044201 CN200420044201U CN2736087Y CN 2736087 Y CN2736087 Y CN 2736087Y CN 200420044201 CN200420044201 CN 200420044201 CN 200420044201 U CN200420044201 U CN 200420044201U CN 2736087 Y CN2736087 Y CN 2736087Y
Authority
CN
China
Prior art keywords
electrode
processing
electrolyte
rotating mechanism
control system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200420044201
Other languages
Chinese (zh)
Inventor
郭钟宁
何建文
于兆勤
张永俊
韩桂海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN 200420044201 priority Critical patent/CN2736087Y/en
Application granted granted Critical
Publication of CN2736087Y publication Critical patent/CN2736087Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

The utility model discloses a three dimensional superfine generating electrochemical machining device, comprising a mechanical movement mechanism, a control system, a pulse power source, an observation device and an electrolytic solution supply system. The micro-digital control cross slide table in the mechanical movement mechanism is arranged on the base of a machine frame, and a U shaft rotating mechanism and a mini-typed rotating table are arranged on the micro-digital control cross slide table; an upright post supporting mechanism supported by the base of the machine frame is provided with a micro-servo mechanism with the Z shaft direction, and a V shaft rotating mechanism is arranged on the micro-servo mechanism with the Z shaft direction; tiny tool electrodes or work pieces are clamped and arranged respectively on the U shaft rotating mechanism and the mini-typed rotating table and the V shaft rotating mechanism. The utility model can process on line the tool electrodes under the micron order, and can make use of the electrodes proceeding with processing to elements; the dimension of two directions of the processing elements is less than 1 mm, and the machining precision can attain the nanometer order, reducing the processing cost, without producing environment pollution.

Description

Three-dimensional fine generate electrolytic machining device
Technical field
The utility model relates to accurate electrolytic machining device, is specifically related to three-dimensional fine generate electrolytic machining device.
Background technology
Along with the continuous development of science and technology, many fields such as medical science, bioengineering, mechanical engineering, electrotechnical, electronic and Aero-Space etc., increasing to the demand of fine apparatus; In order to improve the service life of these fine apparatuses, requiring does not have material in process, does not manage, the variation of change aspect; Electrochemical Machining Technology is because of it does not have macroscopical cutting force, tool-electrode is lossless, workpiece material does not have metamorphic layer, the material removing method is advantages such as ion dissolving, be particularly suitable for the processing of fine parts, be expected to one of pillar that becomes following micro electro mechanical system (MEMS) technology and microelectric technique.
Existing micro-electrochemical machining processing unit (plant) is similar to small-sized milling machine, and tool-electrode is installed on the electric machine main shaft, and workpiece is installed on the workbench; During work, tool-electrode is done simple translation or is rotated relative to workpiece, and workpiece is processed.
Existing micro-electrochemical machining processing unit (plant) mainly contains:
(1) shaped electrode carries out copy type processing to workpiece on several directions, obtains the micro-workpiece of complicated shape.
(2) shaped electrode or simple electrode carry out Milling Process to hole, the groove of part.
The problem that above processing unit (plant) exists is:
(1) need to adopt other fine machining method machine-shaping electrodes, the shape too electrode of complex parts is difficult to processing, and the process-cycle of electrode is long.
(2) making of electrode is independently carried out with use, in the process that adopts the tool-electrode processing work, needs carry out precision positioning to micro-electrode again.
In the large-scale impeller process of Electrolyzed Processing, existing a lot of scientific research institutions adopt simple electrode to do generating motion the three-dimension curved surface of workpiece complexity are processed, and have obtained good effect.
Summary of the invention
The purpose of this utility model is to provide the three-dimensional fine generate that carries out above-mentioned processing electrolytic machining device.
This device can the on-line machining micron order following tool-electrode, and utilize this electrode, parts are processed.Size on 2 directions of parts of processing is below 1 millimeter, and machining accuracy can reach nanoscale, and will cut down finished cost significantly, and can pollution not arranged to environment.
Action principle of the present utility model
In Electrolyzed Processing, adopt high frequency, burst pulse power supply, can improve reason, the change characteristic in Electrolyzed Processing flow field, the discharging gap that reduces to process, cause anodic solution to concentrate the reinforcement of ablation ability and weakening of diffusing erosion ability, thereby improve the precision of Electrolyzed Processing greatly.The generate processing of simple electrode can improve the processing flow field of minim gap, thereby make the leveling ability of Electrolyzed Processing stronger, and formed precision is higher.
As cutting edge,, workpiece material is carried out generate processing with certain point of tool-electrode or certain bar straight line or curve according to the enveloping surface of tool-electrode movement locus.By the position and the movement locus of control tool electrode, and keep machining gap in stable minim gap, can realize the Precision Machining of complex three-dimensional part.
Processing unit (plant) described in the utility model, comprise mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply system five parts constitute, fine motion numerical control cross table in the above-mentioned mechanical motion mechanism is installed on the gantry base, U axle rotating mechanism and miniature rotary table are installed on the fine motion numerical control cross table, the upright supports mechanism that is supported by gantry base is equipped with Z-direction fine motion servo control mechanism, V axle rotating mechanism is installed on the Z-direction fine motion servo control mechanism, and fine tool-electrode or workpiece difference clamping are on U axle rotating mechanism and miniature rotary table and V axle rotating mechanism.
Above-mentioned control system comprises computer equipment, control program, machining gap adaptive control system, driver and power supply; Above-mentioned power supply is connected with computer equipment, and the computer equipment that control program is installed is connected with the machining gap adaptive control system, and the machining gap adaptive control system is connected with driver.
The above-mentioned pulse power is high frequency, ultrashort pulse power supply, and is connected with electrode or workpiece respectively.
Above-mentioned electrolyte supply system comprises 2 electrolyte containers, and electrolyte is housed in the electrolyte container, and above-mentioned electrolyte can be neutral solution NaNO3, NaCl, CuSO4, also can add acid solution HClO4, HCl, a certain proportion of mixing of perhaps above solution.
The utility model device as shown in Figure 1, it is made up of 5 parts such as mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply systems.
Mechanical motion mechanism is the core of this utility model, and it can realize feeding of straight-line nanoscale micro-stepping and response fast, and can realize the accurate rotary speed and the anglec of rotation.It mainly comprises gantry base represented among Fig. 11, fine motion numerical control cross table 2, U axle rotating mechanism 3, fine tool-electrode or workpiece 4,7,11, V axle rotating mechanism 8, Z-direction fine motion servo control mechanism 9, miniature rotary table 13, the auxiliary body of upright supports mechanism 14 and various piece is as clamping mechanism etc.
Control system is meant can control the rotary speed and the anglec of rotation that equipment carries out micro-stepping feeding, machining gap Self Adaptive Control, electrode or workpiece, and it comprises voltage or current monitoring device, motor driver and the power supply etc. of computer equipment, control program, machining gap Self Adaptive Control part.
The pulse power is high frequency, ultrashort pulse power supply, comprises power supply wave shape, frequency, pulsewidth, the isoparametric selection of dutycycle and collection, output, demonstration etc.
Observation device can be realized measurement, record of online observation, the workpiece size of process etc.
The electrolyte supply system comprises storage, instillation, recovery and their control section of electrolyte.
The processing technology and the process of this device are as follows:
1. the online making of electrode: 2 electrodes respectively clamping in Fig. 1 on 4,7 positions, and the logical respectively positive and negative pulse power, 4 pairs of electrodes 7 of electrode or 7 pairs of electrodes 4 of electrode are processed, and perhaps both alternately processing mutually are that one of them or 2 meet the demands (as shown in Figure 2) always.Tool-electrode can be the electrode of simple shape, also can be shaped electrode.
2. electrode processing work: with the electrode of making as tool-electrode, logical negative electricity, workpiece lead to positive electricity, workpiece is carried out generate process, and obtains qualified workpiece.This tool-electrode can be according to actual conditions, and clamping is in 4,7 positions, or the two all has.Workpiece can clamping in 7,4,11 positions.
3. control system: the position of control system control electrode and workpiece and movement locus, and realize the machining gap Self Adaptive Control, feedback fast.
4. electrolyte supply; Electrolyte is carried out the instillation formula and is supplied with, and perhaps according to circumstances, carries out immersion processing.When the instillation formula is supplied with, can guarantee that machining area is full of electrolyte.Different according to rapidoprint and machining accuracy, speed, electrolyte can be neutral solutions such as NaNO3, NaCl, CuSO4, also can be to add HClO4, acid solutions such as HCl, a certain proportion of mixing of perhaps above solution.
5. observation device: observation device is observed process, and to the size of tool-electrode and workpiece measure, record etc.
Present technique beneficial effect, the utility model can be realized low cost, the high accuracy processing of small parts.
Description of drawings
Fig. 1 is the utility model three-dimensional fine generate electrolytic machining device schematic diagram.
Fig. 2 is the utility model three-dimensional fine generate Electrolyzed Processing schematic diagram.
Wherein Fig. 2 (a) is the online Electrolyzed Processing schematic diagram of electrode, and Fig. 2 (b) is generating processing work or shaped electrode schematic diagram,
Fig. 2 (c) is a shaped electrode processing work schematic diagram.
Fig. 3 is the utility model simple electrode processing schematic diagram.
Wherein Fig. 3 (a) is for making the simple electrode schematic diagram, and Fig. 3 (b) makes generating motion processing work schematic diagram for simple electrode.
Fig. 4 is the utility model shaped electrode processing schematic diagram.
Wherein Fig. 4 (a) is for making the shaped electrode schematic diagram, and Fig. 4 (b) is for using shaped electrode processing work schematic diagram.
Fig. 5 is the utility model electrical apparatus control system structured flowchart.
Fig. 6 forms schematic diagram for the utility model control system.
Respectively number implication among the figure:
1 gantry base, 2 fine motion numerical control cross table 3U axle rotating mechanisms
The 4 fine tool-electrodes or workpiece 5 control systems 6 pulse powers
7 workpiece or fine tool-electrode 8V axle rotating mechanism 9Z direction of principal axis fine motion servo control mechanism
10 electrolyte supply systems, 11 workpiece or tool-electrode 12 observation devices
13 miniature rotary tables, 14 upright supports mechanisms
Explanation to structure among the figure
Fine motion numerical control cross table 2 is to realize the straight-line mechanism of micro-stepping at X, Y both direction; And drive U axle rotating mechanism 3 is done corresponding translation with miniature rotary table 13.
Electrode or workpiece 4,7 respectively clampings on rotating mechanism 3,8, and and the motor rotary main shaft between insulate; By brush the pulse power is connected on 4,7.
Observation device can be according to the processing situation, the position and the angle of adjusting, fixed placement.
The electrolyte supply device comprises 2 electrolyte containers, and one is feed flow usefulness, and one is the recovery that links to each other with workbench, precipitation, filtration used for electrolyte; Simultaneously, can control liquid stream, pressure, the direction of electrolyte.
Z-direction fine motion servo control mechanism 9 is fixed in the upright supports mechanism 14, and can be on 14 the manual adjustments level altitude; Drive V axle rotating mechanism 8 and do the fine motion of vertical direction.
The specific embodiment
The utility model will be further described below in conjunction with accompanying drawing, but embodiment of the present utility model is not limited thereto.
1. as adopting processing mode shown in Figure 3, can process small screws, drill bit etc., also can process the probe of tiny, sharp length definite shape etc. with the simple tool electrode of top definite shape.At first carry out the design and fabrication of tool-electrode, its process is shown in two left figure among Fig. 3.An electrode connects the negative electricity of the pulse power, makes the instrument electrode; Another connects positive electricity, as electrode to be processed.The two also can according to processing situation, in the process interchangeable positive and negative electricity connect to, process alternately.Design the shape of electrode to be processed according to processing parts, as the processing small screws, the shape of the tip of tool-electrode (processing district) should be identical with the thread groove shape, considers the influence of machining gap, and the geomery of discharge portion is less than thread groove.Same reason can be designed the tool-electrode of micro-bit.According to the shape of electrode to be processed,, rotating speed, corner that can be by controlling its main shaft, turn to the processing of carrying out electrode discharge processing part given shape if adopt the simple tool electrode to process.Also can directly make negative electrode with workpiece, copy type processes corresponding tool-electrode.Carry out the processing of part then with this electrode.As process screw or drill bit, and according to the shape of processing parts, adjust the position of tool-electrode, make tool-electrode vertical with the main shaft of workpiece; Adjust the angle of electrode discharge processing part, the direction of outstanding sharp sword direction and workpiece groove is matched.In the processing, tool-electrode is near workpiece (in micro-nano scope) in the scope of discharge processing, and the driven by motor workpiece rotates, and the while moving linearly, obtains the workpiece of certain helical pitch, certain-length.Adaptive control system control tool electrode is to the motion of workpiece working depth direction, and keeps constant machining gap.
2. as shown in Figure 4, adopt the tool-electrode of definite shape, can process miniature gears or internal thread hole etc. by generating motion.At first adopt the method machine-shaping tool-electrode of the general part of processing, as gear, spirality workpiece.Use this electrode processing work then.The generate processing of miniature gears, the tool-electrode main shaft is parallel with the gear main shaft, and electrode and workpiece rotate according to certain speed ratio, and by controlling the spacing of two main shafts, control adds the size of work gear.The machining internal thread hole requires the helical pitch of tool-electrode identical with the helical pitch of screwed hole, and the outside dimension of tool-electrode is determined according to the internal diameter of screwed hole and the spatial resolution of Electrolyzed Processing ({ machining hole internal diameter size-electrode outside dimension }/2).The similar screw tap thread mill drilling of its process, tool-electrode feeding processing or backhaul will be rotated simultaneously, be according to the processing situation, rotating speed and point-to-point speed proportion relation.
3. also can pass through electrode Milling Process hole, groove, curved surface, platform even parts etc.The generate Electrolyzed Processing is the profile that forms workpiece according to the enveloping surface of movement of tool track.By the track of control electrode motion, be similar to the Milling Process of milling machine, realize the accurate Electrolyzed Processing of above-mentioned requirements.

Claims (4)

1. three-dimensional fine generate electrolytic machining device, comprise mechanical motion mechanism, control system, the pulse power, observation device, electrolyte supply system five parts constitute, it is characterized in that the fine motion numerical control cross table in the above-mentioned mechanical motion mechanism is installed on the gantry base, U axle rotating mechanism and miniature rotary table are installed on the fine motion numerical control cross table, the upright supports mechanism that is supported by gantry base is equipped with Z-direction fine motion servo control mechanism, V axle rotating mechanism is installed on the Z-direction fine motion servo control mechanism, and fine tool-electrode or workpiece difference clamping are on U axle rotating mechanism and miniature rotary table and V axle rotating mechanism.
2. processing unit (plant) according to claim 1 is characterized in that above-mentioned control system comprises computer equipment, control program, machining gap adaptive control system, driver and power supply; Above-mentioned power supply is connected with computer equipment, and the computer equipment that control program is installed is connected with the machining gap adaptive control system, and the machining gap adaptive control system is connected with driver.
3. processing unit (plant) according to claim 1 is characterized in that the above-mentioned pulse power is high frequency, ultrashort pulse power supply, and is connected with electrode or workpiece respectively.
4. processing unit (plant) according to claim 1, it is characterized in that above-mentioned electrolyte supply system comprises 2 electrolyte containers, electrolyte is housed in the electrolyte container, above-mentioned electrolyte can be neutral solution NaNO3, NaCl, CuSO4, also can add acid solution HClO4, HCl, a certain proportion of mixing of perhaps above solution.
CN 200420044201 2004-03-31 2004-03-31 Three dimensional superfine generating electrochemical machining device Expired - Lifetime CN2736087Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200420044201 CN2736087Y (en) 2004-03-31 2004-03-31 Three dimensional superfine generating electrochemical machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200420044201 CN2736087Y (en) 2004-03-31 2004-03-31 Three dimensional superfine generating electrochemical machining device

Publications (1)

Publication Number Publication Date
CN2736087Y true CN2736087Y (en) 2005-10-26

Family

ID=35306824

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200420044201 Expired - Lifetime CN2736087Y (en) 2004-03-31 2004-03-31 Three dimensional superfine generating electrochemical machining device

Country Status (1)

Country Link
CN (1) CN2736087Y (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102649186A (en) * 2012-05-07 2012-08-29 南京航空航天大学 Micro-electrochemical machining method and device assisted by laser irradiation
CN103182572A (en) * 2011-12-30 2013-07-03 财团法人金属工业研究发展中心 Vibration device for electrochemical machining
CN103600256A (en) * 2013-11-25 2014-02-26 南京航空航天大学 Workpiece precision positioning device and workpiece precision positioning method in cutting processing of micro-electrolysis lines
CN103817388A (en) * 2014-03-04 2014-05-28 山东理工大学 Device for preparing spiral cemented carbide micro milling cutter
CN106536107A (en) * 2014-07-30 2017-03-22 三菱电机株式会社 Electric discharge machining method and electric discharge machine
CN108115233A (en) * 2017-12-20 2018-06-05 广东工业大学 A kind of device and method of template electro-stream machining metal surface micro-structure

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103182572A (en) * 2011-12-30 2013-07-03 财团法人金属工业研究发展中心 Vibration device for electrochemical machining
CN103182572B (en) * 2011-12-30 2016-03-02 财团法人金属工业研究发展中心 Electrical-chemistry method vibrating device
CN102649186A (en) * 2012-05-07 2012-08-29 南京航空航天大学 Micro-electrochemical machining method and device assisted by laser irradiation
CN103600256A (en) * 2013-11-25 2014-02-26 南京航空航天大学 Workpiece precision positioning device and workpiece precision positioning method in cutting processing of micro-electrolysis lines
CN103600256B (en) * 2013-11-25 2015-10-28 南京航空航天大学 Workpiece accurate positioning method in wire electrochemical micro-machining
CN103817388A (en) * 2014-03-04 2014-05-28 山东理工大学 Device for preparing spiral cemented carbide micro milling cutter
CN106536107A (en) * 2014-07-30 2017-03-22 三菱电机株式会社 Electric discharge machining method and electric discharge machine
CN106536107B (en) * 2014-07-30 2018-04-17 三菱电机株式会社 Discharge-treating method and discharging processing machine
CN108115233A (en) * 2017-12-20 2018-06-05 广东工业大学 A kind of device and method of template electro-stream machining metal surface micro-structure

Similar Documents

Publication Publication Date Title
CN1676257A (en) Three-dimension micro-expansion electrolysis processing method and apparatus
CN2736087Y (en) Three dimensional superfine generating electrochemical machining device
CN100411793C (en) Micro-scale line electrode electrolysis machining method and micro-vibration line electrode system
CN102019474B (en) Online preparing system and method for electrochemical grinding micro tool for line electrode
CN101972874B (en) Electrolytic electric spark cutting composite micromachining device and method
CN1943950A (en) Electrochemical corrosion processing method with micro fine cylindrical group electrode
CN101085483A (en) Combinational processing method for micro-array axle hole
CN2925718Y (en) Multifunctional fine electric machine tool
CN107470727A (en) The electrolysis of three-dimensional rotation ultrasonic wave added transforms into organisation of working and its processing method
CN1799746A (en) Combined cutting device of ultra-thick metal material
CN106041232A (en) Main shaft execution mechanism for electrical discharge machining device for machining square holes and machining method implemented through execution mechanism
CN202726229U (en) Table type electric spark experimental device
CN111390556A (en) Multifunctional micro machining tool
CN111843075A (en) Three-dimensional ultrasonic composite electrochemical generating and processing system
CN111151830A (en) Ultrasonic vibration assisted electrolytic matrix oblique square hole machining system and method
CN108941807A (en) A kind of Electrolyzed Processing tapered openings lathe and its electrochemical machining method
Pawar et al. Development and manufacturing of Arduino based electrochemical discharge machine
CN2259249Y (en) Five-axil digital control electrolytic machining tool
CN213033832U (en) Wire cut electrical discharge machining bed walks in big rocking
CN2865965Y (en) Working electrode axle for electro spark tool processing machine tool and machine tool with the same electrode axle
CN108746897B (en) A kind of spiral microelectrode electrical-chemistry method system and method
CN1820884A (en) Electric spark forming processing machine tool for processing non-conductive hard material and its processing method
CN2894911Y (en) Corrugated roll superhard surface grinding-polishing machine
CN103707136B (en) Knife face building mortion after fluted drill based on Wire EDM
Zeng et al. Experimental study of microelectrode array and micro-hole array fabricated by ultrasonic enhanced micro-EDM

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Effective date of abandoning: 20080206

C25 Abandonment of patent right or utility model to avoid double patenting