CN102573259A - Method for suppressing filamentary discharge and electrode structure - Google Patents
Method for suppressing filamentary discharge and electrode structure Download PDFInfo
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- CN102573259A CN102573259A CN2012100110036A CN201210011003A CN102573259A CN 102573259 A CN102573259 A CN 102573259A CN 2012100110036 A CN2012100110036 A CN 2012100110036A CN 201210011003 A CN201210011003 A CN 201210011003A CN 102573259 A CN102573259 A CN 102573259A
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Abstract
The invention discloses a method for suppressing filamentary discharge in the process of generating plasma for suppressing atmospheric pressure glow discharge and an electrode structure. The method comprises the following steps of: suspending an electrode potential and connecting a suspended potential conductor. The electrode structure is characterized in that: an electrode of a discharge electrode is connected to a port of an output circuit, and the other electrode of the discharge electrode is suspended, wherein a suspended potential electrode is connected with the suspended potential conductor; and the suspended potential conductor is arranged beyond an area between the two discharge electrodes. Stable glow discharge plasma is obtained under atmospheric pressure air conditions. Circuit parameters, such as current magnitude and the like, can be adjusted according to processing requirements of articles so as to control amount of the generated glow discharge plasma; and therefore, the processing efficiency of the plasma is improved.
Description
Technical field
The invention belongs to the gas discharge technical field, relate in a kind of Atomospheric pressure glow discharge plasma generative process the method that suppresses thread discharge, and based on the electrode structure of this method.
Background technology
The Atomospheric pressure glow discharge technology is the research focus of present field of gas discharge.The plasma that glow discharge generates belongs to the low temperature plasma category.Glow discharge generates in the plasma process a large amount of high energy particles can occur; These high energy particles have very strong sterilization performance; Its temperature is low; The high characteristics of sterilizing efficiency especially are fit to the sterilization that carries out disinfection of accurate nonrefractory devices such as accurate medicine equipment, and traditional relatively sterilizing methods such as high temperature have a lot of advantages.Glow discharge generates in the plasma process a large amount of chemical free radicals also can occur, has broad application prospects in fields such as macromolecule processing, material surface modifyings.Moreover, glow discharge plasma has the advantages that energy is moderate, be evenly distributed, so even action in the course of processing is difficult for damage articles, has shown outstanding superiority in application scenarios such as plated films.
But, also a large amount of stable generations under low pressure or inert gas environment mostly of glow discharge plasma at present.In atmospheric air, can't generate glow discharge plasma fully, this has seriously restricted its large-scale application in industry.The difficult point of glow discharge plasma generation technique just is very easily to occur thread electric discharge phenomena in the generative process in the atmospheric air, makes the electric current of plasma of generation excessive, and concentration of energy is in several passages, easily the article handled of damage.So Atomospheric pressure glow discharge plasma generates a very important technology is exactly how to suppress the generation of thread electric discharge phenomena.
Through patent search website CNIPR China and foreign countries' patent data service platforms (http://search.cnipr.com/) inquiry related patent U.S. Patent No.; In the searched page of this website; The way of search that adopts classification to navigate finds " electricity class " to look for " other classifications power technology not to be covered " to look for " plasma technique " to look for " plasma generation " more then then in " in the IPC classification navigation " in main search page left side, finds more than 190 piece of related patent U.S. Patent No. altogether.After consulting one by one, find to apply for a patent repetition to some extent with me.Existing patent has only few patents to relate to the method that thread discharge suppresses in the glow discharge plasma generative process; Be employed in the discharge circuit more and add dielectric impedance material, current-limiting resistance, and improve circuit and make modes such as cutting off circuit when electric current is excessive.
Compare with low pressure discharge, because the gas pressure of atmosphere pressure discharging is high, be easy to the conversion of thermotropism equilibrium plasma from nonequilibrium plasma, its transformation time is very short.In order to produce the non-equilibrium atmospheric pressure plasma of large scale, adopt two kinds of methods usually, a kind of method is to adopt microdischarge array to increase surface-volume ratio, thereby makes discharge away from thermodynamic equilibrium; Another kind method is to adopt pulse excitation, makes the needed time of time ratio transient process of discharge also short, thereby avoids unsettled development.Adopt pulse excitation can be realized that again a kind of is directly to adopt high voltage pulse to come the discharge generation plasma by multitude of different ways, this requires the width of pulse voltage to arrive nanosecond order in submicrosecond usually.Another kind method is, is continuous though be applied to the voltage at electrode two ends, as exchanging; Or even direct current; But cover one deck dielectric at electrode surface, the big resistance of perhaps in discharge loop, connecting, thus make the electric current of discharge demonstrate the characteristics of pulsed discharge.In addition, can also adopt the mixing of above-mentioned two kinds of methods, one of them typical example is high voltage pulse and drives dielectric barrier discharge.Even but adopting the combination of these methods, unsteadiness still appears in Atomospheric pressure glow discharge.
Defective to prior art exists proposes the present invention.
Summary of the invention
Realize that in atmospheric air glow discharge is a global difficult problem, commonly used is three kinds of methods so far: (1) dielectric impedance; (2) the big resistance of connecting; (3) short pulse.The method of dielectric impedance is present the most frequently used method, and research is also the most ripe; Because the plasma impedance before and after discharge as load is different, the big resistance of connecting can be so that discharging current demonstrates the characteristic of pulsed discharge; Short pulse is optimal mode, but because the restriction of switching technique, pulse duration is difficult to reach the nanosecond rank.
Above method all is based on the bipolar electrode structure, promptly will constitute closed circuit in the electrode outside.The present invention breaks this conventional idea, has invented new glow discharge generating mode, and promptly stagged electrode structure is used in the loop of " cut-out " circuit.
The object of the invention just is to propose a kind of method that can suppress thread discharge in the Atomospheric pressure glow discharge plasma generative process.Method proposed by the invention is novel; Discharge electrode structure is short and sweet; Be about to the unsettled current potential of one of them electrode of sparking electrode and connect a unsettled current potential conductor that free electron is provided, unsettled current potential conductor is arranged on the outside of two sparking electrode region facing.
Based on said method provided by the invention; The present invention also provides one type of electrode structure form that can suppress thread discharge in the Atomospheric pressure glow discharge plasma generative process according to this method; Comprise pair of discharge electrodes; One of them electrode of sparking electrode is connected to one of them port of output circuit, the unsettled setting of another electrode potential of sparking electrode.
Described unsettled potential electrode is connected with the unsettled conductor of current potential, and the unsettled conductor of current potential is arranged on outside two zones between the sparking electrode.
Described two sparking electrodes are for adopting identical shaped plate electrode.
The plate electrode that is connected with output circuit in the described sparking electrode is surrounded by dielectric outward.
Described dielectric is the polytetrafluoroethylene of high-temperature insulation medium.
Described two sparking electrodes are post-ring electrode structure, and its center pillar electrode connects output circuit port, the unsettled setting of ring electrode.
Described two sparking electrodes are dull and stereotyped net-flat board net electrode structure, and one of them dull and stereotyped mesh electrode connects output circuit port, the unsettled setting of another dull and stereotyped mesh electrode current potential.
The invention has the beneficial effects as follows: the basic principle that the present invention suppresses thread discharge is: at strong action of alternative electric field, the free electron in the metallic conductor can form vibration, and externally show positive-negative polarity with the variation campaign of electric field in metallic conductor.So just can not have under the situation of external circuit, making to keep discharge channel in the sparking electrode gap, and suppressing the electric current between pole plate in the glow discharging process.Under the certain situation of air pressure and polar plate spacing, electric current can increase along with the increase of discharge voltage; Fixed polar plate voltage changes external conditions such as polar plate spacing and air pressure, the variation that electric current also can occurrence law property.Simultaneously, the volume of change suspension electrode will exert an influence to discharging current.The research emphasis that Atomospheric pressure glow discharge plasma generates the field just is how to realize the glow discharge than under hyperbar and the big spacing.The present invention has huge meaning for the research in this field.
In addition, the present invention can cut off the passage of discharge circuit electric current through adopting this method that suppresses thread discharge in the Atomospheric pressure glow discharge plasma generative process, and the electric current of circuit is reduced greatly, suppresses the appearance of thread electric discharge phenomena.Change the size of current between two electrodes through the material of floating potential conductor that unsettled potential electrode is connected, the adjusting of outward appearance, satisfy the processing request of different article.
Description of drawings
When combining accompanying drawing to consider; Through with reference to following detailed, can more completely understand the present invention better and learn wherein many attendant advantages easily, but accompanying drawing described herein is used to provide further understanding of the present invention; Constitute a part of the present invention; Illustrative examples of the present invention and explanation thereof are used to explain the present invention, do not constitute to improper qualification of the present invention, wherein:
Fig. 1 is for realizing the circuit power system block diagram of the inventive method;
Fig. 2 is for realizing the main circuit diagram of the inventive method;
Fig. 3 is for realizing the power supply circuits for triggering figure of the inventive method;
Fig. 4 is under the plate electrode condition, adopt thread discharge in the inhibition glow discharge plasma generative process that the present invention proposes electrode structure be electrically connected sketch map;
Fig. 5 is in the jet plasma process, adopt thread discharge in the inhibition glow discharge plasma generative process that the present invention proposes electrode structure be electrically connected sketch map;
Among the figure, 1 is the high-pressure side of high-voltage output circuit, and 2 is the earth terminal of high-voltage output circuit; 3 is the high-field electrode that links to each other with 1; 4 is the unsettled electrode that does not link to each other with any circuit, 5 dielectrics used for dielectric impedance, and 6 is the conductor of the electric potential floating that links to each other with 4; 7 jet plasmas for generation, 8 is the working gas in the jet plasma generative process.
Embodiment
Below in conjunction with accompanying drawing the present invention is further set forth.
The invention provides two embodiment, before embodiment is introduced, at first combine accompanying drawing to introduce the experiment condition of embodiment like Fig. 4, Fig. 5.
Owing to carrying out in the cut-and-try process of atmospheric pressure glow discharge through the mode of dielectric impedance, when parameters such as electrode structure, working gas kind, power supply characteristic can not satisfy the condition of glow discharge, can cause the formation of thread discharge.Therefore, in the process of designing power supply, should fully take into account, avoid in debug process, taking place power failure because the variation of the discharging current that thread discharge causes, power output generation in the process of conceptual design and device selection, keeps certain allowance.
For above-mentioned reasons, two kinds of discharge modes of dielectric barrier discharge under the atmospheric pressure need be fully satisfied in the setting of power parameter, i.e. glow discharge and thread flash-over characteristic are to the requirement of power supply.And consider the restriction of power electronic device self, the requirement below power supply has been proposed.
(1) single phase alternating current (A.C.) input, output
(2) Maximum Power Output 1000W
(3) output frequency: 20-50kHz, adjustable
(4) output voltage 0-8kV is adjustable
(5) maximum output current 250mA
Like Fig. 1, Fig. 2 and shown in Figure 3, the design adopts 220V to exchange input, after being rectified into direct current, through the bipolarity alternating-current pulse of MOSFET inversion for the band dead band, boosting through high frequency transformer at last and realizes being output as the sine wave of high-frequency and high-voltage again.The size of output voltage and frequency realize through cut-offfing of metal-oxide-semiconductor of SG3525 control.
For the regulative mode of electric power output voltage amplitude, can regulate by voltage regulator, also can reach the pressure regulation purpose through DC chopped-wave.Simple and be that main practical use considers that this programme has adopted the former for power supply architecture with the experiment.
With respect to the full-bridge, advantage is simple in structure at half bridge inverter circuit aspect the selection of inverter circuit topological structure, stable performance, and switching tube quantity is that full-bridge is half the.Provide the big electric capacity of series connection and the filter capacitor of neutral point to carry out to go out an electric capacity in the outlet side equivalence after star-triangle conversion, connect in output under the situation of transformer, can effectively eliminate the DC component of output voltage, prevent the magnetic bias of transformer.Just full-bridge is made up of two half-bridges, and output voltage doubles, and is applicable to the output of bigger merit capacity.All in 1kw, capacity requirement is little for this experiment power demand.Take all factors into consideration, power source design is selected half-bridge topology for use.
Fig. 4 is under the plate electrode condition, under aforesaid experiment condition, and the electrical connection diagram of the electrode structure of thread discharge in the inhibition glow discharge plasma generative process that employing the present invention proposes.As shown in Figure 4; Sparking electrode adopts slab construction, and in 0.2 atmospheric low pressure air ambient, the area that distance between plates is arranged on 5mm, plate electrode is 30mm2; Intermediate medium thickness 1mm; The output 1 of high-voltage output circuit is connected sparking electrode 3, make it become the high-field electrode that has high-voltage signal, the sparking electrode 3 outer teflon insulation media 5 that are surrounded by.Output 2 ground connection of high-voltage output circuit, but it was not as linking to each other with another sparking electrode 4 in the technology in the past, but electrode 4 current potentials are unsettled.So just cut off the current path in the discharge circuit, reduced the size of current between electrode 3 and the electrode 4 greatly, avoided the appearance of thread electric discharge phenomena.Unsettled potential electrode 4 is connected with unsettled current potential conductor 6, and unsettled current potential conductor 6 is arranged on outside two sparking electrodes 3, the zone between 4, and extends with respect to the opposite direction of the electrode 3 that connects the output circuit port.Through to the material of the conductor 6 of the electric potential floating that links to each other with electrode 4 and the adjusting of profile, can control electrode 3 and electrode 4 between electric current, satisfy the application of different capacity demand.
Fig. 5 is in the jet plasma process, under aforesaid experiment condition, and the electrical connection diagram of the electrode structure of thread discharge in the inhibition glow discharge plasma generative process that employing the present invention proposes.As shown in Figure 2; The output 1 of high-voltage output circuit is connected discharge column electrode 3, make it become the high-field electrode that has high-voltage signal, output 2 ground connection of high-voltage output circuit; But itself and picture linked to each other with another discharge ring electrode 4 in the technology in the past, but ring electrode 4 current potentials are unsettled.So just cut off the current path in the discharge circuit, reduced the size of current between post electrode 3 and the ring electrode 4 greatly, in generating jet plasma 7, avoided the appearance of thread electric discharge phenomena, energy is more evenly moderate when handling article.
As stated, embodiments of the invention have been carried out explanation at length, but as long as not breaking away from inventive point of the present invention and effect in fact can have a lot of distortion, this will be readily apparent to persons skilled in the art.Therefore, such variation also all is included within protection scope of the present invention.
Claims (9)
1. a method that suppresses thread discharge is characterized in that, one of them electrode potential of sparking electrode is unsettled.
2. a kind of method that suppresses thread discharge according to claim 1 is characterized in that, the external unsettled current potential conductor in the end of unsettled potential electrode, and unsettled current potential conductor is arranged on the outside of two sparking electrode region facing.
3. an electrode structure that suppresses thread discharge comprises pair of discharge electrodes, it is characterized in that one of them electrode of described sparking electrode is connected to one of them port of output circuit, the unsettled setting of another electrode potential of sparking electrode.
4. a kind of electrode structure that suppresses thread discharge according to claim 3 is characterized in that the end of the unsettled electrode of described current potential is circumscribed with unsettled current potential conductor, and unsettled current potential conductor is arranged on outside two zones between the sparking electrode.
5. according to claim 3 or 4 described a kind of electrode structures that suppress thread discharge, it is characterized in that described two sparking electrodes are for adopting identical shaped plate electrode.
6. a kind of electrode structure that suppresses thread discharge according to claim 5 is characterized in that the plate electrode that is connected with output circuit in the described sparking electrode is surrounded by dielectric outward.
7. a kind of electrode structure that suppresses thread discharge according to claim 6 is characterized in that described dielectric is a polytetrafluoroethylene.
8. according to claim 3 or 4 described a kind of electrode structures that suppress thread discharge, it is characterized in that described two sparking electrodes are post-ring electrode structure, its center pillar electrode connects output circuit port, the unsettled setting of ring electrode.
9. according to claim 3 or 4 described a kind of electrode structures that suppress thread discharge; It is characterized in that; Described two sparking electrodes are dull and stereotyped net-flat board net electrode structure, and one of them dull and stereotyped mesh electrode connects output circuit port, the unsettled setting of another dull and stereotyped mesh electrode.
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| CN2012100110036A CN102573259A (en) | 2012-01-13 | 2012-01-13 | Method for suppressing filamentary discharge and electrode structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109475037A (en) * | 2018-12-14 | 2019-03-15 | 华中科技大学 | A kind of plasma active enhancing method and generating device |
| CN111472954A (en) * | 2020-03-25 | 2020-07-31 | 北京交通大学 | Insulating anode cathode arc propeller with auxiliary suspension potential electrode |
| CN111478614B (en) * | 2020-04-20 | 2023-08-01 | 四川泛华航空仪表电器有限公司 | Low electromagnetic interference high reliable jet ignition power supply |
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| JPH05251198A (en) * | 1992-03-03 | 1993-09-28 | Kimoto & Co Ltd | Electrode for generating glow discharge plasma and reactor using the same |
| EP1065502A1 (en) * | 1998-02-10 | 2001-01-03 | Starikov, Valery Venginovich | Method for carrying out the electrical breakdown of a gaseous dielectric in a highly non-uniform field |
| CN1981876A (en) * | 2005-12-14 | 2007-06-20 | 中国科学院光电研究院 | Plasma surface processor of multi-capacity coupled radio-frequency |
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| US20100015358A1 (en) * | 2006-12-05 | 2010-01-21 | Faculty Of Mathematics, Physics And Informatics Of Commenius University | Apparatus and method for surface finishing of metals and metalloids, metal oxides and metalloid oxides, and metal nitrides and metalloid nitrides |
| CN101652016A (en) * | 2009-08-27 | 2010-02-17 | 中国科学技术大学 | Constant-pressure linear cold-plasma jet generating device |
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2012
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Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH05251198A (en) * | 1992-03-03 | 1993-09-28 | Kimoto & Co Ltd | Electrode for generating glow discharge plasma and reactor using the same |
| EP1065502A1 (en) * | 1998-02-10 | 2001-01-03 | Starikov, Valery Venginovich | Method for carrying out the electrical breakdown of a gaseous dielectric in a highly non-uniform field |
| CN1981876A (en) * | 2005-12-14 | 2007-06-20 | 中国科学院光电研究院 | Plasma surface processor of multi-capacity coupled radio-frequency |
| WO2007104512A1 (en) * | 2006-03-11 | 2007-09-20 | Fachhochschule Hildesheim/Holzminden/Göttingen | Device for plasma treatment at atmospheric pressure |
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| CN101252805A (en) * | 2008-03-31 | 2008-08-27 | 大连理工大学 | Simple atmosphere pressure suspending electrode cold plasma fluid generator |
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| CN101652016A (en) * | 2009-08-27 | 2010-02-17 | 中国科学技术大学 | Constant-pressure linear cold-plasma jet generating device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109475037A (en) * | 2018-12-14 | 2019-03-15 | 华中科技大学 | A kind of plasma active enhancing method and generating device |
| CN109475037B (en) * | 2018-12-14 | 2021-07-23 | 华中科技大学 | Plasma activity enhancement method and generating device |
| CN111472954A (en) * | 2020-03-25 | 2020-07-31 | 北京交通大学 | Insulating anode cathode arc propeller with auxiliary suspension potential electrode |
| CN111478614B (en) * | 2020-04-20 | 2023-08-01 | 四川泛华航空仪表电器有限公司 | Low electromagnetic interference high reliable jet ignition power supply |
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Application publication date: 20120711 |