CN1708204A - Capacity coupling atmosphere glow-discharge plasma generator - Google Patents
Capacity coupling atmosphere glow-discharge plasma generator Download PDFInfo
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- CN1708204A CN1708204A CN 200510046209 CN200510046209A CN1708204A CN 1708204 A CN1708204 A CN 1708204A CN 200510046209 CN200510046209 CN 200510046209 CN 200510046209 A CN200510046209 A CN 200510046209A CN 1708204 A CN1708204 A CN 1708204A
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 4
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- 229910052786 argon Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
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- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 239000013064 chemical raw material Substances 0.000 claims description 2
- 239000003792 electrolyte Substances 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
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- 239000003990 capacitor Substances 0.000 abstract 3
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Abstract
The present invention relates to one kind of capacitor coupled atmospheric pressure glow discharge plasma generator, and features that the plasma generator consists of power supply, electrodes with serially connected coupling capacitor or with serially connected coupling capacitor, resistor and inductor, matching network between the power supply and the electrodes to stabilize and control discharge, and work medium between electrodes. Under the action of power supply, the work medium between electrodes discharges and under the regulation of the matching network and the coupling elements, atmospheric pressure glow discharge plasma is generated. The present invention is used in plasma physics and chemistry, such as material processing and preparation, harmful gas purification, ozone generator and other fields.
Description
Technical field
The invention belongs to low temperature plasma physics and technical field of chemistry, specially refer to a kind of capacity coupling atmosphere glow-discharge plasma generator.
Background technology
Nonequilibrium plasma is called low temperature plasma, cold plasma again, the partial ionized gas of being made up of particles such as electronics, ion, active particle, molecule and free radicals.Electron temperature very high (energy is about 10ev) wherein, ion temperature is near normal temperature.Under the nonequilibrium plasma state, manyly can not take place usually, perhaps need the extremely chemical reaction of harsh conditions, under the condition of normal temperature and pressure and catalyst-free, can take place.Nonequilibrium plasma has been widely used in fields such as electrostatic precipitation, ozone generator, cleaning harmful gas, water treatment, material surface processing, sterilizing.Its traditional generation method mainly is corona discharge and dielectric barrier discharge.But the plasma that corona discharge generates concentrates near the electrode, and it is little that electric field is amounted in equivalence, and active particle concentration is low, and inhomogeneous.The dielectric barrier discharge feature is that electrode spacing is little, and dielectric is arranged between electrode, limits the discharge development, forms many micro discharges, i.e. streamer.Electric charge in the micro discharge is accumulated in dielectric surface and forms strong reversed electric field, extinguishes discharge.But its power is very little, and hear rate is big, and current density is very high in the micro discharge, and the temperature height burns out material easily when handling material.Under atmospheric pressure, corona discharge and dielectric barrier discharge are not desirable method of generating plasma.
Summary of the invention
The purpose of this invention is to provide a kind of capacity coupling atmosphere glow-discharge plasma generator, solve problems such as plasma small scale under the atmospheric pressure that conventional art produces, inhomogeneous, poor stability.Apparatus of the present invention can under atmospheric pressure produce on a large scale, high density, even, stable glow discharge plasma, can be widely used in physics and technical field of chemistry such as material processed, ozone generator, cleaning harmful gas.
Technical scheme of the present invention is: a kind of capacity coupling atmosphere glow-discharge plasma generator, by power supply, series coupled electric capacity or simultaneously between electrode, power supply and the electrode of series coupled electric capacity, resistance, inductance between the matching network of stable and control discharge, electrode working media (the electrolytical aqueous solution of mixture, the aqueous solution, interpolation, electrolyte, liquid chemical raw material or the gas-liquid two-phase medium of atmosphere air, oxygen, nitrogen, helium, argon gas, hydrogen, carbon dioxide, steam, gaseous state industrial chemicals or above-mentioned gas) form.Under the power supply effect, discharge in the working media between electrode, under matching network and coupling capacitance or coupling capacitance and series resistance, adjustment of inductance, produce Atomospheric pressure glow discharge plasma.
Theoretical foundation of the present invention is, plasma discharge is a positive feedback process: along with the development of discharge, because electron avalanche causes that electric current increases, produce a large amount of heats, aisle resistance is reduced, when voltage is constant, according to Ohm's law, the reduction of resistance can make electric current increase again, produce more ionization phenomena, thereby form positive feedback process, discharging current is increased sharply.In addition, in the breakdown front and back of working media, impedance loop changes very greatly, can cause the vibration in loop, finally has influence on the instability of plasma.Under the influence of above-mentioned factor, discharge is easy to carry out the transition to the arc light state.For producing extensive, uniform and stable plasma, must effectively control the development process of discharge, the growth rate of Control current.
The capacity coupling atmosphere glow-discharge plasma generator that the present invention proposes is introduced coupling capacitance or coupling capacitance and the resistance of connecting, inductance and matching network, improves the stability of discharge.Under coupling capacitance or coupling capacitance and the resistance of connecting, inductance effect, electric current in the discharge is the electric capacity charging, electric charge is accumulated in electrode surface and forms the reversed electric field that strengthens gradually with the discharge development, weakened the positive field that promotes ionization, make discharge quenching, thereby limited the growth rate of current density.Rationally adjust the numerical values recited and the matching network of the coupling capacitance of discharge loop or coupling capacitance and the resistance of connecting, inductance, can control discharge energy and discharge development process, the unsteadiness of elimination system is to the adverse effect of discharge, prevent that discharge from carrying out the transition to the arc light state, produces Atomospheric pressure glow discharge.
Effect of the present invention and benefit are, the capacity coupling atmosphere glow-discharge plasma generator that the present invention proposes can overcome traditional corona discharge, the shortcoming of dielectric barrier discharge, accurately control discharge evolution, improve discharge power, improve the uniformity and the stability of discharge.Can high efficiency produce extensive, uniform and stable Atomospheric pressure glow discharge plasma.This device can be widely used in plasma physics and technical field of chemistry, field such as for example, aircraft is stealthy, charging source, material processed and preparation, cleaning harmful gas and ozone generator, sterilization.
Description of drawings
Fig. 1 is the capacity coupling atmosphere glow-discharge plasma generator schematic diagram.
Among the figure: 1 high voltage source, 2 matching networks, 3 coupling capacitances, 4 plasma generators, 5 high-field electrodes, 6 low-field electrodes.
Fig. 2 is an Atomospheric pressure glow discharge voltage-to-current oscillogram.
Fig. 3 is corona voltage-current waveform figure.
Fig. 4 is the corona discharge image.
Fig. 5 is voltage Atomospheric pressure glow discharge image when low
Fig. 6 is voltage Atomospheric pressure glow discharge image when higher
Embodiment
Be described in detail the specific embodiment of the present invention below in conjunction with technical scheme and accompanying drawing.
As shown in Figure 1, power frequency 50Hz high voltage source 1, output voltage 0～15kV, power 500W; Matching network 2 is used to regulate the coupling between power supply and the generator, stable and control discharge; Coupling capacitance 3, numerical value 30pF; Plasma generator 4, the inside are static atmospheric airs; High-field electrode 5 is resistive single needle copper electrode, resistance value 10 megohms; Low-field electrode 6 is resistive single needle copper electrode, resistance value 10 megohms.Electrode spacing 2mm.Still air is as discharge medium under the atmospheric pressure.When being increased to 5kV, voltage discharges.Fig. 2 is an Atomospheric pressure glow discharge voltage-to-current waveform.This moment the making alive 6.3kV of institute.In the current waveform, first big spike is that coupling capacitance discharges and recharges and causes in the circuit, does not also have when plasma discharge takes place.Second less spike is that typical glow discharge produces.Fig. 3 is corona voltage-current waveform figure, is made up of a large amount of micro discharge filament shape streamers.As seen, the two is obviously different on waveform, and glow discharge presents tangible peak, and corona discharge is made up of a large amount of short pulses.
As shown in Figure 1, high frequency electric source 1, operating frequency 10kHz, output voltage 0～20kV, power 1kW; Matching network 2; Coupling capacitance 3, numerical value 30pF; Plasma generator 4, the inside are static atmospheric airs; High-field electrode 5 is resistive single needle copper electrode, and resistance value is 0.25 megohm; Low-field electrode 6 is resistive single needle copper electrode, and resistance value is 0.25 megohm.Fig. 4 is applied voltage 5.4kV, supply frequency 10kHz, corona discharge image during electrode spacing 2mm; Fig. 5 is applied voltage glow discharge image when being increased to 6.3kV; Fig. 6 is applied voltage glow discharge image when being increased to 7.8kV.
Claims (2)
1. a capacity coupling atmosphere glow-discharge plasma generator is characterized in that, electrode (5), electrode (6) are with series coupled electric capacity (3) or series coupled electric capacity (3), resistance, inductance respectively simultaneously between the power supply; Be provided with matching network (2) between power supply (1) and electrode (5), the electrode (6); High voltage source (1) adopts DC power supply, power frequency AC, high-frequency ac power, the pulse power, DC stacked interchange or dc pulse superposition power supply; Between electrode (5), electrode (6) employing metal electrode or electrode dielectric or catalyst are arranged.
2. a kind of capacity coupling atmosphere glow-discharge plasma generator according to claim 1, it is characterized in that working media adopts the electrolytical aqueous solution of mixture, the aqueous solution, interpolation, electrolyte, liquid chemical raw material or the gas-liquid two-phase medium of atmosphere air, oxygen, nitrogen, helium, argon gas, hydrogen, carbon dioxide, steam, gaseous state industrial chemicals or above-mentioned gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510046209 CN1708204A (en) | 2005-04-06 | 2005-04-06 | Capacity coupling atmosphere glow-discharge plasma generator |
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| CN 200510046209 CN1708204A (en) | 2005-04-06 | 2005-04-06 | Capacity coupling atmosphere glow-discharge plasma generator |
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| CN1708204A true CN1708204A (en) | 2005-12-14 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101452806B (en) * | 2007-12-05 | 2010-04-21 | 中国科学院大连化学物理研究所 | Ionization source and its application in mass spectra or ion transfer |
| CN101925246A (en) * | 2010-08-13 | 2010-12-22 | 华中科技大学 | Method for producing low-temperature plasma capable of being touched by human bodies directly |
| CN101227789B (en) * | 2008-01-29 | 2011-01-26 | 华中科技大学 | Capacitor block discharge circuit |
| CN103301728A (en) * | 2013-06-17 | 2013-09-18 | 南京大学 | Device for treating malodorous gas based on capacitive coupling partition discharge plasma |
| CN104833477A (en) * | 2015-05-12 | 2015-08-12 | 中国商用飞机有限责任公司北京民用飞机技术研究中心 | Jet spectroscopic probe used for measuring flow field on surface of airfoil model or cascade |
| CN105833327A (en) * | 2016-03-25 | 2016-08-10 | 威海柏林圣康空氧科技有限公司 | Method of quick sterilization through oxygen activation |
| CN106856644A (en) * | 2017-01-04 | 2017-06-16 | 京东方科技集团股份有限公司 | Plasma jet device |
| CN107770939A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Polar-capacity tandem type plasma generator |
| CN109049659A (en) * | 2018-06-28 | 2018-12-21 | 苏州大学 | The method of plasma processing of tubular medical inner surface |
| CN112351569A (en) * | 2019-08-09 | 2021-02-09 | 深圳驭龙电焰科技有限公司 | Electric flame stove and control circuit thereof |
| CN113636622A (en) * | 2021-07-01 | 2021-11-12 | 东莞市双平电源技术有限公司 | Glow discharge circuit and dot-matrix glow discharge water treatment device |
-
2005
- 2005-04-06 CN CN 200510046209 patent/CN1708204A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101452806B (en) * | 2007-12-05 | 2010-04-21 | 中国科学院大连化学物理研究所 | Ionization source and its application in mass spectra or ion transfer |
| CN101227789B (en) * | 2008-01-29 | 2011-01-26 | 华中科技大学 | Capacitor block discharge circuit |
| CN101925246A (en) * | 2010-08-13 | 2010-12-22 | 华中科技大学 | Method for producing low-temperature plasma capable of being touched by human bodies directly |
| CN103301728A (en) * | 2013-06-17 | 2013-09-18 | 南京大学 | Device for treating malodorous gas based on capacitive coupling partition discharge plasma |
| CN103301728B (en) * | 2013-06-17 | 2015-04-22 | 南京大学 | Device for treating malodorous gas based on capacitive coupling partition discharge plasma |
| CN104833477A (en) * | 2015-05-12 | 2015-08-12 | 中国商用飞机有限责任公司北京民用飞机技术研究中心 | Jet spectroscopic probe used for measuring flow field on surface of airfoil model or cascade |
| CN105833327A (en) * | 2016-03-25 | 2016-08-10 | 威海柏林圣康空氧科技有限公司 | Method of quick sterilization through oxygen activation |
| CN107770939A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Polar-capacity tandem type plasma generator |
| CN106856644A (en) * | 2017-01-04 | 2017-06-16 | 京东方科技集团股份有限公司 | Plasma jet device |
| CN109049659A (en) * | 2018-06-28 | 2018-12-21 | 苏州大学 | The method of plasma processing of tubular medical inner surface |
| CN112351569A (en) * | 2019-08-09 | 2021-02-09 | 深圳驭龙电焰科技有限公司 | Electric flame stove and control circuit thereof |
| CN113636622A (en) * | 2021-07-01 | 2021-11-12 | 东莞市双平电源技术有限公司 | Glow discharge circuit and dot-matrix glow discharge water treatment device |
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