CN203233588U - Emitting device with single electrode generation of low temperature plasma flow under atmospheric pressure condition - Google Patents

Emitting device with single electrode generation of low temperature plasma flow under atmospheric pressure condition Download PDF

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Publication number
CN203233588U
CN203233588U CN 201220656514 CN201220656514U CN203233588U CN 203233588 U CN203233588 U CN 203233588U CN 201220656514 CN201220656514 CN 201220656514 CN 201220656514 U CN201220656514 U CN 201220656514U CN 203233588 U CN203233588 U CN 203233588U
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CN
China
Prior art keywords
electrode
low temperature
temperature plasma
metal ball
emitting device
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Withdrawn - After Issue
Application number
CN 201220656514
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Chinese (zh)
Inventor
万良淏
万良庆
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NANJING SUMAN PDP TECHNOLOGY Co Ltd
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NANJING SUMAN PDP TECHNOLOGY Co Ltd
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Priority to CN 201220656514 priority Critical patent/CN203233588U/en
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Publication of CN203233588U publication Critical patent/CN203233588U/en
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Abstract

The utility model provides an emitting device with single electrode generation of low temperature plasma flow under an atmospheric pressure condition; the emitting device comprises an air-flow device, a high-voltage power source, a line electrode and a metal ball electrode; the air-flow device comprises an air source, a flowmeter, a shutoff valve and an air inlet pipe connected in sequence by an air pipeline; the emitting device is characterized in that one end of the line electrode is fixed on the metal ball electrode; the metal ball electrode is arranged on one end of a medium pipe and seals an end port of the medium pipe; the line electrode is placed on an axis center position in the medium pipe; the other end of the line electrode is suspended inside a sprayer of the medium pipe; the air inlet pipe is arranged on the medium pipe and is connected with the medium pipe; the metal ball electrode is connected with a high-voltage output terminal of the high-voltage power source through a wire; and a low-voltage end of the high-voltage power source is grounded. The emitting device realizes generation and emission of low temperature plasma flow under a normal pressure, effectively improves emitting distance of the low temperature plasma flow, has wide industrial application prospect, and work environment of the emitting device is not limited to inert gas.

Description

Single electrode produces the emitter of low temperature plasma stream under the atmospheric pressure
Technical field
The utility model relates to the gas discharge technical field, relates in particular to the emitter of single electrode generation low temperature plasma stream under a kind of atmospheric pressure.
Background technology
Have a large amount of active particles in the low temperature plasma, it is stronger that the active particle kind that produces than common chemical reactor more manys activity, is easier to react with the material surface that contacts and all kinds of gas.Therefore, in fields such as material, environmental protection application prospect is extremely widely arranged, handle etc. such as material surface modifying, plasma etching, solid film deposition, sterilization, air cleaning, air pollution.
In the prior art, though be easy to generate discharge plasma relatively uniformly under the low pressure, the process need vacuum environment of its generation, this has brought inconvenience to commercial Application; Comparatively speaking, the generation of plasma under the atmospheric pressure does not need expensive vacuum equipment, and domestic and international research person pays special attention to characteristic and the application thereof of plasma under the normal pressure in recent years.
Dielectric barrier discharge DBD technology is as a kind of special gas discharge form, by between electrode, introducing block media, can when taking place, discharge limit freely increasing of discharging current, the formation of sparkover or arc discharge between tissue electrode, have the moderate characteristics of discharge energy density, and can adopt multiple discharging structure, mist and conditions of work such as different input power, voltage, frequency, air pressure air-flow, and have stronger adaptability, be fit to very much industrial applications.But there is a problem that is difficult to overcome in it, being common parallel plate-type atmospheric dielectric barrier discharge is subject to narrow and small zone between the two-plate because of region of discharge, thereby can not handle material or the thicker material of size of labyrinth, there is certain limitation in its industrial applicability.
Also there is the jet length weak point in the fluidic device of other low temperature plasmas or can only be adapted to the problem of inert gas environment.For example the technical scheme that adopts in " atmospheric dielectric barrier discharge produces the fluidic device of low temperature plasma " patent of invention is the dielectric barrier discharge mode, because electronics and the life-span of ion after leaving electric field region weak point very in the low temperature plasma, though can form the jet of low temperature plasma, but the low temperature plasma stroke weak point very of ejection, the general jet length that is difficult to surpass 20mm.And for example the working gas of jet must be inert gas in " monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure method for generation and device " patent of invention, and device structure complexity, inert gas was namely diluted after the inert gas jets of the low temperature plasma that ejects was met air, the low temperature plasma stroke of ejection is unusual weak point also, the general jet length that also is difficult to surpass 20mm.
The utility model content
, operational environment short at above jet length is subject to problems such as inert gas, the utility model provides the emitter of single electrode generation low temperature plasma stream under a kind of atmospheric pressure, realized generation and the emission of low temperature plasma stream under the normal pressure, improved the jet length of low temperature plasma stream effectively, and its operational environment is not limited to inert gas.
In order to realize the foregoing invention purpose, the utility model by the following technical solutions, single electrode produces the emitter of low temperature plasma stream under the atmospheric pressure, comprise airflow apparatus, high voltage source, line electrode and Metal Ball electrode, airflow apparatus is made up of source of the gas, flowmeter, shutoff valve, air inlet pipe and is linked in sequence by gas piping, it is characterized in that, an end of line electrode is fixed on the Metal Ball electrode, the Metal Ball electrode is installed on an end of medium tube, and the sealing medium pipe port; The length of line electrode is less than the length of medium tube, and line electrode places the axis centre position in the medium tube, and the other end of line electrode is suspended in the nozzle inboard of medium tube; Air inlet pipe is settled in the junction that is lower than itself and Metal Ball electrode in medium tube, and air inlet pipe is communicated with medium tube; The high-voltage output end of Metal Ball electrode and high voltage source is connected by lead, the low-pressure end ground connection of high voltage source.
After the power supply power supply, produce low temperature plasma in the nozzle end of line electrode, be transported to outside the medium tube through the air-flow of source of the gas air feed, form plasma flow.The plasma that is transferred out is owing to be the gas of lead, high voltage electric field on the line electrode extends to the direction of air-flow immediately, plasma also will be along with expansion is forward continued in the path of air-flow, know that abducent electric field strength is lower than the ionization voltage of working gas, the intensity that plasma is expanded forward just can reduce until stopping gradually.Because the other end of line electrode is fixed on the Metal Ball electrode, the radius of curvature of Metal Ball electrode is much larger than the line electrode nozzle end, so after ball electrode and line electrode apply high voltage electric field, only can produce low temperature plasma by online electrode nozzle end, and can not produce low temperature plasma at the ball electrode.Therefore, the jet of atmospheric pressure single electrode generation low temperature plasma can produce the distant plasma jet of jet length.
The utility model provides the emitter of single electrode generation low temperature plasma stream under the atmospheric pressure, and it is rational in infrastructure, and design science has solved the low temperature plasma of other discharging structures generations effectively to the problem of spatial spread apart from weak point.Because macroscopical temperature of the plasma flow that device of the present invention produces is lower, the low temperature plasma stroke of injection is far away, can be used for the surface treatment of macromolecular material and the various insulating material of various two and three dimensions shapes, and its prospects for commercial application is wide.
Description of drawings
Fig. 1 is the structural representation of the emitter of the utility model low temperature plasma stream.
Reference numeral:
1-line electrode, 2-medium tube, 3-air inlet pipe, 4-Metal Ball electrode, 5-high voltage source, 6-source of the gas, 7-shutoff valve, 8-flowmeter, 9-plasma flow.
Embodiment
Below in conjunction with the drawings and specific embodiments the technical solution of the utility model is done further detailed, clear, complete explanation, meet novelty, creativeness and the practicality that Patent Law requires fully with explanation the utility model.What should be noted that embodiment describes is a part of execution mode of the present utility model, can not be used for restriction protection range of the present utility model.
As shown in Figure 1, the atmospheric pressure single electrode produces the fluidic device of low temperature plasma, comprises source of the gas 6, flowmeter 8, shutoff valve 7, and is linked in sequence by pipeline.One end of line electrode 1 is fixed on the Metal Ball electrode 4, and make line electrode be installed on the axis centre position of medium tube 2, the other end of line electrode 1 is suspended in the jet hole inboard of medium tube 2, Metal Ball electrode 4 is installed on the other end of medium tube spout, and the sealing medium pipe port, air tight, air inlet pipe 3 is settled in the position of any under the junction of medium tube and Metal Ball electrode, air inlet pipe 3 is communicated with medium tube, makes the gas in the air inlet pipe can arrive in the medium tube; Metal Ball electrode 4 is connected by lead with the high-voltage output end of high voltage source 5, the low-pressure end ground connection of high voltage source.
Behind source of the gas 6 air feed, power supply power supply back produces low temperature plasma in the nozzle end of line electrode 1, and working gas is via shutoff valve 7, and flowmeter 8 advances in people's medium tube 2 by pipeline 3, to be transferred out outside the medium tube by the air-flow in the medium tube at the plasma that nozzle end produces, form plasma flow 9.
The plasma that is transferred out is owing to be the gas of conduction, high voltage electric field on the line electrode extends to the direction of air-flow immediately, plasma also will continue expansion forward along the path of air-flow, be lower than the ionization voltage of working gas up to abducent electric field strength, the intensity that plasma is expanded forward just can reduce and stop gradually.
Because the other end of line electrode is fixed on the Metal Ball electrode 4, the radius of curvature of Metal Ball electrode is much larger than the line electrode nozzle end, so after ball electrode and line electrode apply high voltage electric field, only can produce low temperature plasma by online electrode nozzle end 1, and can not produce low temperature plasma at ball electrode 4.Therefore, the jet of atmospheric pressure single electrode generation low temperature plasma can produce the distant low-temperature plasma jet of jet length.As long as suitable voltage and air-flow is provided, its jet length can reach the above distance of 100~200mm.

Claims (3)

1. single electrode produces the emitter that low temperature plasma flows under the atmospheric pressure, comprise airflow apparatus, high voltage source (5), line electrode (1) and Metal Ball electrode (4), airflow apparatus is made up of source of the gas (6), flowmeter (8), shutoff valve (7) and air inlet pipe (3) and is linked in sequence by gas piping, it is characterized in that, one end of line electrode (1) is fixed on the Metal Ball electrode (4), Metal Ball electrode (4) is installed on an end of medium tube, and the sealing medium pipe port; Line electrode (1) places the axis centre position in the medium tube (2), and the other end of line electrode (1) is suspended in the nozzle inboard of medium tube (2); Air inlet pipe (3) is installed on the medium tube, is communicated with medium tube (2); Metal Ball electrode (4) is connected by lead with the high-voltage output end of high voltage source (5), the low-pressure end ground connection of high voltage source (5).
2. single electrode produces the emitter that low temperature plasma flows under the atmospheric pressure according to claim 1, it is characterized in that the length of described line electrode (1) is less than the length of medium tube (2).
3. single electrode produces the emitter that low temperature plasma flows under the atmospheric pressure according to claim 1, it is characterized in that air inlet pipe (3) is arranged at the lower end of the junction of medium tube and Metal Ball electrode.
CN 201220656514 2012-12-04 2012-12-04 Emitting device with single electrode generation of low temperature plasma flow under atmospheric pressure condition Withdrawn - After Issue CN203233588U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220656514 CN203233588U (en) 2012-12-04 2012-12-04 Emitting device with single electrode generation of low temperature plasma flow under atmospheric pressure condition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220656514 CN203233588U (en) 2012-12-04 2012-12-04 Emitting device with single electrode generation of low temperature plasma flow under atmospheric pressure condition

Publications (1)

Publication Number Publication Date
CN203233588U true CN203233588U (en) 2013-10-09

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Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103037610A (en) * 2012-12-04 2013-04-10 南京苏曼等离子科技有限公司 Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition
CN106998618A (en) * 2017-05-27 2017-08-01 河北大学 A kind of device and method for producing waveform plasma

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103037610A (en) * 2012-12-04 2013-04-10 南京苏曼等离子科技有限公司 Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition
CN103037610B (en) * 2012-12-04 2015-07-15 南京苏曼等离子科技有限公司 Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition
CN106998618A (en) * 2017-05-27 2017-08-01 河北大学 A kind of device and method for producing waveform plasma
CN106998618B (en) * 2017-05-27 2019-01-25 河北大学 A kind of device and method generating waveform plasma

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20131009

Effective date of abandoning: 20150715

RGAV Abandon patent right to avoid regrant