CN102307426A - Plasma generating device - Google Patents
Plasma generating device Download PDFInfo
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- CN102307426A CN102307426A CN201110172098A CN201110172098A CN102307426A CN 102307426 A CN102307426 A CN 102307426A CN 201110172098 A CN201110172098 A CN 201110172098A CN 201110172098 A CN201110172098 A CN 201110172098A CN 102307426 A CN102307426 A CN 102307426A
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Abstract
The invention relates to a plasma generating device, which aims at carrying out different combinations according to different requirements to generate plasmas with different areas and different shapes and generating plasmas on one plane or multiple planes, such as cylindrical or conical plasmas. The plasma generating device comprises a power supply, high-voltage electrodes, ground electrodes and dielectric tubes; the high-voltage electrodes and the ground electrodes which are arranged in the dielectric tubes are respectively adjacent, that is to say, the high-voltage electrodes and the ground electrodes are bound to be respectively placed in two adjacent dielectric tubes; and the plasmas can be generated in clearances between the outer walls of the dielectric tubes and the dielectric tubes. The plasmas of which the temperature approaches to room temperature can be generated by using different power supply parameters, thus the application at normal temperature and normal pressure is realized. According to the device, the plasmas of which the temperature approaches to room temperature can be generated according to different shapes in a large area and the dielectric tubes generating the plasmas in the device can be made of bendable material, thus the available range of the device is greatly widened.
Description
Technical field
The present invention relates to a kind of plasma producing apparatus, particularly produce plasma and the flexible plasma generating equipment of generating means simultaneously about a kind of multi-directionally, multi-angle.
Background technology
The ionized gas shape material that the positron-electron that plasma is produced after by ionization by the atom after depriving and atom by portions of electronics is formed is known as and is removed outside the solid, liquid, gas, the 4th attitude that material exists.Plasma can be divided into high-temperature plasma and low temperature plasma by temperature.The existing device that generates low temperature plasma mainly contains four kinds, is respectively to exchange low temperature plasma generating means, radio frequency low temperature plasma generating means, microwave low temperature plasma generating means, DC pulse plasma generating means.Low temperature plasma can be accompanied by generation a large amount of, miscellaneous active particle in production process, comprising six kinds of typical particles, the i.e. atom of the atom of electronics, cation, anion, excitation state or molecule, ground state or molecule and photon.These active materials make low temperature plasma bring into play significant role in the exhaust-gas treatment and the sewage purification field of sterilization, sterilization and the field of environment engineering of biomedical sector.
But existing apparatus all exists some shortcomings, such as: can only single direction, single angle produces plasma; It is immutable to install self shape, can't be applicable to more complex situations; The plasma temperature that produces is high, and spray penetration is short; Arc discharge takes place in high-field electrode and grounding electrode close together easily when voltage is big; The high-field electrode Position Design is unreasonable, and the high-field electrode that has exposes fully in air, has serious potential safety hazard; Discharge work source of the gas is single can only to be mist maybe, and the active component kind is few or quantity is few in the plasma.These factors have all limited the extensive use of existing plasma producing apparatus.
Summary of the invention
To the problems referred to above; The present invention provides a kind of plasma producing apparatus; Purpose is that multi-directionally, multi-angle generate plasma simultaneously; Generating means can be crooked; The jet of plasma is long, temperature near room temperature, intensity is adjustable, be rich in active component; Electrode position is safe and reliable, can use multiple gases as source of the gas.
A kind of plasma producing apparatus of the present invention; Comprise working gas source, gas regulation switch, power supply, insulation protection circle, high-field electrode, medium tube; It is characterized in that: said medium tube is that a hollow pipe and an end are communicated with working gas, and the other end is a closed state; Said high-field electrode is placed in or is pasted on the medium tube outer wall and high-field electrode is positioned at insulation protection circle inside.
Described a kind of plasma producing apparatus is characterized in that: the vent that circle or other different shapes are arranged on its tube wall of the part of the medium tube between the blind end of high-field electrode and medium tube.
Described a kind of plasma producing apparatus is characterized in that: medium tube itself can be crooked.
Described a kind of plasma producing apparatus is characterized in that: said power supply is AC power, pulse dc power or radio-frequency power supply.
When working, the present invention can carry out dielectric barrier discharge to working gas; Eject plasma jet the vent from the medium tube tube wall; Different according to the quantity of air vent hole and position of opening and angle; Can be simultaneously multi-direction, the generation plasma jet of multi-angle, can the dealing with complicated surface.Medium tube is selected soft bendable material such as polytetrafluoroethylene or plastics for use, and this sampling device can get into the labyrinth cavity, and in inside cavity everybody living plasma of buying property, practicality is stronger.It is inner that high-field electrode is positioned at the insulation protection circle, safety and can avoid arc discharge.The plasma temperature that the present invention produces is during near room temperature, and human body can contact safely.
Can regulate the air flow rate that gets in the medium tube by the adjustments of gas flow control switch.Gas source can be elementary gas or mists such as helium, argon gas, also can be gaseous compound or gaseous organic substance.The plasma jet length, thickness, temperature, the quantity that produce can be done different choice as requested.
The present invention can be multi-direction, multi-angle produces plasma simultaneously, and volume of the present invention is little, with low cost, easy to maintenance, safe and reliable, portability is strong, has overcome the weak point of existing apparatus.Through using different power parameters and gas source, can produce plasma near room temperature, realized the application under the normal temperature and pressure.Because device can produce the medium tube near producing plasma in the plasma of room temperature and the device of multi-direction multi-angle can be crooked, improved the usable range that installs so greatly.
Description of drawings
Fig. 1 is a structural representation of the present invention
Embodiment
Fig. 1 is a structural representation of the present invention; Comprise working gas source 1; Power supply 3; Control switch 2; High-field electrode 10; Medium tube 11; Insulation protection circle 9; High-field electrode is looped around outside the medium tube 11; And be positioned at insulation protection circle 9 jointly; Power supply 3 connects high-field electrode 10 through control switch 2; The whole air vent hole 15 of the different adjustable number of shape different angles is arranged on the tube wall between said medium tube sealing end 19 and the high-field electrode 10; 16; 17; 18, and from these air vent holes, can produce plasma jet 5; 6; 7; 8, gas flow control switch 14 gets into medium tube 11 inside with the working gas 13 in working gas source 1 through air inlet port 12.
High-field electrode 10 is close to or tightly is placed in medium tube 11 outer walls, and insulation protection circle 9 is close to high-field electrode 10 outer walls simultaneously
High-field electrode 10 can use conductive materials such as Copper Foil, aluminium foil, tinfoil paper.Insulation protection circle 9 can be insulating properties materials such as rubber, polytetrafluoroethylene.
Medium tube 11 can crooked purpose to arrive with flexible pipes such as polytetrafluoroethylene, also can select materials such as quartz glass, aluminium oxide ceramics for use simultaneously, and shape and size can come to confirm according to the actual requirements.
The length of medium tube 11,10 length of high-field electrode, the length of insulation protection circle 9, the sealing end of medium tube 11 with all can adjust within the specific limits.
The position of opening of the air vent hole on medium tube 11 tube walls between high-field electrode 10 and medium tube 11 sealing ends 19, blowing angle, the perforate size, perforate quantity all can be adjusted within the specific limits.
With the simple substance argon gas is example, and adjustments of gas flow control switch 14 feeds working gas 13 with 0.3 cubic metre/flow hourly, and arrow is depicted as its flow direction among the figure.The earth polar 4 of power supply 3 is connected with the earth, and high-field electrode 10 is connected to power supply 3, and selecting AC power is the device driving power.Regulate electric power output voltage amplitude to 4 kilovolt, frequency 10 KHz can produce plasma jet 5,6,7,8 and temperature near room temperature, and human body can directly contact, and does not have any tingling sensation.
Input gas flow can be 0.001-10 cubic meter/per hour, and the flow velocity size of working gas 13 etc. can influences the shape of gas ions jet 5,6,7,8 with big or small.The amplitude of output AC voltage can be 220 volts-100 kilovolts, 50 hertz-30 megahertzes of frequency; Or export 220 volts-100 kilovolts of pulsed dc voltage amplitudes, and 50 hertz-30 megahertz pulsewidths of frequency, pulsewidth is more than or equal to 1 nanosecond.Can be the 0.1-65 millimeter by the plasma length that sprays in the air vent hole.
Claims (5)
1. a plasma producing apparatus comprises working gas source, gas regulation switch, power supply, insulation protection circle, high-field electrode, medium tube, it is characterized in that: said medium tube is that a hollow pipe and an end are communicated with working gas, and the other end is a closed state; Said high-field electrode is placed in or is pasted on the medium tube outer wall and high-field electrode is positioned at guard circle inside.
2. a kind of plasma producing apparatus as claimed in claim 1 is characterized in that: there is the vent of circular or other different shapes of arbitrarily angled, quantity the optional position on its tube wall of the medium tube between the blind end of high-field electrode and medium tube part.
3. a kind of plasma producing apparatus as claimed in claim 1 or 2 is characterized in that: medium tube itself can be crooked.
4. a kind of plasma producing apparatus as claimed in claim 1 or 2 is characterized in that: said power supply is AC power, pulse dc power or radio-frequency power supply.
5. a kind of plasma producing apparatus as claimed in claim 3 is characterized in that: said power supply is AC power, pulse dc power or radio-frequency power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172098A CN102307426A (en) | 2011-06-24 | 2011-06-24 | Plasma generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172098A CN102307426A (en) | 2011-06-24 | 2011-06-24 | Plasma generating device |
Publications (1)
| Publication Number | Publication Date |
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| CN102307426A true CN102307426A (en) | 2012-01-04 |
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| CN201110172098A Pending CN102307426A (en) | 2011-06-24 | 2011-06-24 | Plasma generating device |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102883516A (en) * | 2012-10-31 | 2013-01-16 | 重庆大学 | Novel needle-ring type plasma jet device |
| CN103220874A (en) * | 2012-10-29 | 2013-07-24 | 北京大学 | Plasma array based on dielectric barrier discharging |
| CN103731969A (en) * | 2013-12-24 | 2014-04-16 | 苏州市奥普斯等离子体科技有限公司 | Hollow cathode spaying gun device |
| CN104941401A (en) * | 2015-06-10 | 2015-09-30 | 清华大学 | Double dielectric barrier discharge low temperature plasma processing device |
| CN105101603A (en) * | 2015-08-04 | 2015-11-25 | 昆山禾信质谱技术有限公司 | Dielectric barrier discharge plasma gas jet apparatus |
| CN106658931A (en) * | 2016-10-19 | 2017-05-10 | 南京航空航天大学 | Portable atmospheric pressure normal temperature plasma jet generating device |
| CN110201201A (en) * | 2018-11-15 | 2019-09-06 | 西安交通大学 | Plasma sterilization device and method under a kind of room temperature |
| CN110336142A (en) * | 2019-08-02 | 2019-10-15 | 西安交通大学 | A kind of safety grounding device of plasma jet |
| CN110946178A (en) * | 2019-11-25 | 2020-04-03 | 大连理工大学 | Atmospheric pressure low temperature plasma fruit fresh-keeping device |
| CN112996209A (en) * | 2021-05-07 | 2021-06-18 | 四川大学 | Structure and array structure for microwave excitation of atmospheric pressure plasma jet |
| CN113785119A (en) * | 2019-03-11 | 2021-12-10 | 南加利福尼亚大学 | Systems and methods for plasma-based abatement |
| CN115161166A (en) * | 2022-07-27 | 2022-10-11 | 安徽大学 | Experimental device for low temperature plasma inactivation microorganism |
| CN117545163A (en) * | 2023-08-25 | 2024-02-09 | 盐城工学院 | Atmospheric pressure surface wave plasma system based on irregular surface waveguide tube |
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| CN101330794A (en) * | 2008-05-09 | 2008-12-24 | 西安交通大学 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
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2011
- 2011-06-24 CN CN201110172098A patent/CN102307426A/en active Pending
Patent Citations (8)
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| JPH06108257A (en) * | 1991-10-21 | 1994-04-19 | Masuhiro Kokoma | Atmospheric pressure blow-off plasma reaction device |
| CN1416308A (en) * | 2002-12-30 | 2003-05-07 | 北京印刷学院 | Medium in atmospheric pressure blocking off discharging plasma gun |
| CN2604846Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder external emission cold plasma generator |
| EP1689216A1 (en) * | 2005-02-04 | 2006-08-09 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Atmospheric-pressure plasma jet |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103220874A (en) * | 2012-10-29 | 2013-07-24 | 北京大学 | Plasma array based on dielectric barrier discharging |
| CN102883516A (en) * | 2012-10-31 | 2013-01-16 | 重庆大学 | Novel needle-ring type plasma jet device |
| CN103731969A (en) * | 2013-12-24 | 2014-04-16 | 苏州市奥普斯等离子体科技有限公司 | Hollow cathode spaying gun device |
| CN104941401A (en) * | 2015-06-10 | 2015-09-30 | 清华大学 | Double dielectric barrier discharge low temperature plasma processing device |
| CN105101603A (en) * | 2015-08-04 | 2015-11-25 | 昆山禾信质谱技术有限公司 | Dielectric barrier discharge plasma gas jet apparatus |
| CN106658931A (en) * | 2016-10-19 | 2017-05-10 | 南京航空航天大学 | Portable atmospheric pressure normal temperature plasma jet generating device |
| CN110201201A (en) * | 2018-11-15 | 2019-09-06 | 西安交通大学 | Plasma sterilization device and method under a kind of room temperature |
| CN113785119A (en) * | 2019-03-11 | 2021-12-10 | 南加利福尼亚大学 | Systems and methods for plasma-based abatement |
| CN113785119B (en) * | 2019-03-11 | 2023-08-15 | 南加利福尼亚大学 | System and method for plasma-based abatement |
| CN110336142A (en) * | 2019-08-02 | 2019-10-15 | 西安交通大学 | A kind of safety grounding device of plasma jet |
| CN110336142B (en) * | 2019-08-02 | 2020-04-17 | 西安交通大学 | Plasma jet safe grounding device |
| CN110946178A (en) * | 2019-11-25 | 2020-04-03 | 大连理工大学 | Atmospheric pressure low temperature plasma fruit fresh-keeping device |
| CN110946178B (en) * | 2019-11-25 | 2022-05-31 | 大连理工大学 | Atmospheric pressure low temperature plasma fruit fresh-keeping device |
| CN112996209A (en) * | 2021-05-07 | 2021-06-18 | 四川大学 | Structure and array structure for microwave excitation of atmospheric pressure plasma jet |
| CN115161166A (en) * | 2022-07-27 | 2022-10-11 | 安徽大学 | Experimental device for low temperature plasma inactivation microorganism |
| CN117545163A (en) * | 2023-08-25 | 2024-02-09 | 盐城工学院 | Atmospheric pressure surface wave plasma system based on irregular surface waveguide tube |
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Application publication date: 20120104 |