CN101330794A - Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium - Google Patents
Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium Download PDFInfo
- Publication number
- CN101330794A CN101330794A CNA2008100181656A CN200810018165A CN101330794A CN 101330794 A CN101330794 A CN 101330794A CN A2008100181656 A CNA2008100181656 A CN A2008100181656A CN 200810018165 A CN200810018165 A CN 200810018165A CN 101330794 A CN101330794 A CN 101330794A
- Authority
- CN
- China
- Prior art keywords
- plasma
- hollow
- medium pipe
- temperature plasma
- barrier discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
A jetting device for a low-temperature plasma generated by the atmospheric dielectric barrier discharge relates to the technical field of the application of gas discharge plasma. Inert gas and air are used as working gas; the plasma generated in a discharge area is blown out in the form of jet; the problem of limited application range caused by the narrow parallel-plate dielectric barrier discharge area and a high plasma macroscopic temperature can be solved. The device has the structural characteristics that a hollow pipe-shaped connector is connected with a hollow dielectric pipe; an electrode coated with insulation dielectric is fixed at the center of the dielectric pipe; an annular electrode is closely attached to the outer wall of the dielectric pipe; the working gas enters the dielectric pipe from a flow meter and a retaining valve through the connector; the plasma is blown out to form the plasma jetting. The jetting device has the advantages of low plasma macroscopic temperature, large electron energy, wide expanded range, low cost, low energy consumption and high reliability; furthermore, the jetting device can used in the fields of sterilization and disinfection, the surface modification of complex-shaped material, waste gas treatment, ozone synthesis, as well as the physical and chemical fields of the discharge light source plasma.
Description
Technical field
The invention belongs to the gas discharge technical field, relate to a kind of generation device of discharge plasma.
Background technology
There is a large amount of active particles in the low temperature plasma, more than the common active particle kind that chemical reactor produced, activity is stronger, be easier to react with material surface that is contacted and biological cell, therefore in a lot of fields extremely application prospects is arranged all, for example ozone is synthetic, material surface modifying, plasma etching, solid film deposition, sterilization, air pollution are handled or the like.In the prior art, though be easy to generate discharge plasma relatively uniformly under the low pressure, its production process needs vacuum environment, and this brings inconvenience to application; Comparatively speaking, the generation of plasma does not need expensive vacuum equipment under the atmospheric pressure, and domestic and international in recent years researcher pays special attention to the characteristic and the application of plasma under the normal pressure.
Dielectric barrier discharge (DBD) is as a kind of special gas discharge form, by between electrode, introducing block media, can when taking place, discharge limit freely increasing of discharging current, stoped the formation of sparkover between electrode or arc discharge, have the moderate characteristics of discharge energy density, and can take multiple discharging structure, mist and condition of work (input power, supply frequency, air pressure, air-flow), and have stronger adaptability, be fit to very much industrial applications.But common parallel plate-type atmospheric dielectric barrier discharge occurs over just narrow and small zone between the two-plate because of region of discharge, subject plasma produces the restriction of condition simultaneously, the temperature of the plasma that produces compares higher, thereby its industrial applicability has certain limitation.
Summary of the invention
At above-mentioned technical problem, the present invention proposes following technical scheme:
A kind of atmospheric dielectric barrier discharge produces the low-temperature plasma jet device, comprise, source of the gas, flowmeter, check-valves, and be linked in sequence, be provided with electrode and power supply by pipeline, one end of hollow tubular connector is connected with check-valves by pipeline, its other end is connected with hollow medium Guan Yiduan hermetic seal, the axial location of medium tube is provided with central electrode, one end of central electrode extends the outer wall of hollow medium pipe and connects an end of power supply, and the external electrode that the outer wall of hollow medium pipe is provided with its outer wall matches is connected the other end of power supply.
The tubular structure that described hollow medium pipe is both ends open, be made of quartz glass, aluminium oxide ceramics or pmma material.Be arranged on the central electrode of hollow medium tube's axis position and all be coated with dielectric on the extending part.
The described external electrode that is arranged on the hollow medium pipe outer wall can be the structure of ring-type, and its physical dimension is selectable.Ring electrode on the described outer wall that is arranged on the hollow medium pipe is one at least, and its quantity can determine according to concrete technical scheme.The central electrode that is arranged on hollow medium tube's axis position is connected with power frequency, intermediate frequency or repetitive frequency pulsed high voltage source with ring-type external electrode on the outer wall of hollow medium pipe.
Closely be connected with hollow medium tube by the hollow tubular connector, the electrode that is covered by dielectric is introduced from hollow medium pipe side and is fixed in the medium tube axial location, the ring-type external electrode of width and adjustable number is close to the outer wall of hollow medium pipe, power supply power supply back produces plasma at medium tube inwall and interelectrode zone, working gas is taken into account check-valves via flow and is entered in the medium tube by pipeline, and plasma is blown out the formation plasma jet.
Low-temperature plasma jet device of the present invention, its structure has solved common parallel plate-type atmospheric dielectric barrier discharge device preferably and has caused the problem that is of limited application because of region of discharge is narrow and small, the low temperature plasma that makes the atmospheric dielectric barrier discharge generation is to spatial spread, because macroscopical temperature of the plasma flow that device of the present invention produced is a normal temperature, can be used for the surface treatment of the material of heat resistance difference; The plasma flow of Chan Shenging can have difformity in addition, therefore can carry out the modification processing to immovable material and complicated shape material surface easily, is more suitable in industrial applications.
Description of drawings
The fluidic device structural representation of Fig. 1, low temperature plasma of the present invention;
Fig. 2 a, external voltage 2kV, plasma jet figure when the argon gas flow velocity is 5.88m/s;
Fig. 2 b, external voltage 2kV, plasma jet figure when the argon gas flow velocity is 11.76m/s;
The fluidic device of Fig. 3, low temperature plasma of the present invention is handled the bacterial suspension design sketch;
Embodiment
The present invention is described in more detail below in conjunction with accompanying drawing;
A kind of atmospheric dielectric barrier discharge produces the fluidic device of low temperature plasma, comprise, source of the gas 6, flowmeter 7, check-valves 8, be linked in sequence by pipeline, and be provided with electrode and power supply, one end of hollow tubular connector 1 is connected with check-valves 8 by pipeline, and its other end is connected with the 2 one end hermetic seals of hollow medium pipe, and connector 1 can be insulating material or metal material and the structure that constitutes that combines of insulating material.The electrode 3 that is covered by dielectric is fixed in medium tube 2 central authorities from the introducing of medium tube 2 sides and along axial location, constitute central electrode 3, central electrode 3 can be made by tungsten, copper, stainless steel, aluminium and other metallic conduction materials, all be coated with dielectric 4 on central electrode 3 and the extending part thereof, the dielectric 4 that covers on the central electrode 3 can be polytetrafluoroethylene, epoxy resin, other insulating material of quartz glass.
One end of central electrode 3 extends the outer wall of hollow medium pipe 2, and is connected an end of power supply.The outer wall of hollow medium pipe 2 is provided with the ring-type external electrode 5 that matches with its outer wall shape, the ring-type external electrode 5 of width and adjustable number is close on the outer wall of medium tube 2, described ring-type external electrode 5 is one at least, also can be provided with according to the needs of actual conditions, external electrode 5 can be the structure of ring-type, its structure, size and material are selectable, and external electrode 5 can be made by metallic conduction materials such as copper, stainless steel and aluminium.
Be fixed in the central electrode 3 of medium tube 2 axis is connected with the both positive and negative polarity of power supply respectively with ring-type external electrode 5 on hollow medium pipe 2 outer walls along axial location.Described power supply can be power frequency, intermediate frequency or repetitive frequency pulsed high voltage source, also can be other power supplys.
The fluidic device of described low temperature plasma, the hollow medium pipe 2 that is connected with described hollow tubular connector 1 hermetic seal is hollow open structures of a kind of both ends open, can be the tubular structure of being made by quartz glass, aluminium oxide ceramics or pmma material.
A kind of atmospheric dielectric barrier discharge produces the low-temperature plasma jet device, open the switch and the flowmeter 7 of working gas 6, gas enters hollow medium pipe 2 through connector 1 by connecting line via flowmeter 7 and check-valves 8, regulate flowmeter 7 and can control the gas flow rate size that enters hollow medium pipe 2, regulate power supply 9 and can control the height that applies voltage, at different technical schemes, external electrode 5 can be arranged many at interval, zone between medium tube inner tubal wall and central electrode produces plasma, because working gas enters by pipeline in the cavity of hollow medium pipe 2 via flowmeter 7 and check-valves 8, the plasma that produces is blown out formation plasma jet body 10.The working gas that the present invention uses can be high-purity inert gas or argon gas, helium, nitrogen, oxygen or compressed air etc.
The fluidic device that atmospheric dielectric barrier discharge of the present invention produces low temperature plasma solves the narrow and small problem in common parallel plate-type atmospheric dielectric barrier discharge zone preferably, the usage space of the low temperature plasma of atmospheric dielectric barrier discharge generation is expanded, be more suitable for industrialized application; Simultaneously, experimental observation and measurement data according to us are learnt, the jet plasma macroscopic view temperature that device of the present invention produced is a normal temperature, can make jet plasma have difformity at different technical scheme adjustment technology parameters, thereby further widen the range of application of plasma technique in fields such as industry, medical science, weaving, food or scientific researches.
Fig. 2 and Fig. 3 are two specific embodiments of the present invention, wherein:
Fig. 2 a, external voltage 2kV, plasma jet figure when the argon gas flow velocity is 5.88m/s;
Fig. 2 b, external voltage 2kV, plasma jet figure when the argon gas flow velocity is 11.76m/s;
As can be seen from the figure, the plasma jet of formation is to medium tube external space expansion, can solve common parallel plate-type atmospheric dielectric barrier discharge device well and cause the problem that is of limited application because of region of discharge is narrow and small; With macroscopical temperature of the plasma jet that thermocouple measurement produced, be about 20 ℃, can be used for the surface treatment of the material of heat resistance difference.
Fig. 3 handles the bacterial suspension design sketch for medical field uses intermediate frequency high voltage source plasma jet, wherein, argon gas flow velocity 11.76m/s, apply voltage 2kV, the culture dish that fills the Escherichia coli suspension-turbid liquid is placed 2cm place, medium tube below, handled 3 minutes, bacterium is basic all dead, obtains the ideal effect little, that germicidal efficiency is high that consumes energy.
Claims (6)
1. an atmospheric dielectric barrier discharge produces the fluidic device of low temperature plasma, comprise, source of the gas (6), flowmeter (7), check-valves (8) also is linked in sequence by pipeline, and be provided with electrode and power supply, it is characterized in that: an end of hollow tubular connector (1) is connected with check-valves (8) by pipeline, its other end is connected with (2) the one end hermetic seals of hollow medium pipe, the axial location of medium tube (2) is provided with central electrode (3), one end of central electrode (3) extends the outer wall of hollow medium pipe (2) and connects an end of power supply (9), and the outer wall of hollow medium pipe (2) is provided with the other end that the external electrode (5) that matches with its outer wall shape is connected power supply (9).
2. produce the fluidic device of low temperature plasma according to the described atmospheric dielectric barrier discharge of claim 1, it is characterized in that: described hollow medium pipe (2) is a both ends open, the hollow tubular structures that is made of quartz glass, aluminium oxide ceramics or pmma material.
3. produce the fluidic device of low temperature plasma according to the described atmospheric dielectric barrier discharge of claim 1, it is characterized in that: be arranged on the central electrode (3) of hollow medium pipe (2) axial location and be coated with dielectric (4).
4. produce the fluidic device of low temperature plasma according to the described atmospheric dielectric barrier discharge of claim 1, it is characterized in that: the described external electrode (5) that is arranged on hollow medium pipe (2) outer wall can be the structure of ring-type, and its structure and size are selectable.
5. produce the fluidic device of low temperature plasma according to the described atmospheric dielectric barrier discharge of claim 1, it is characterized in that: the external electrode (5) on the described outer wall that is arranged on hollow medium pipe (2) is one at least.
6, produce the low-temperature plasma jet device according to the described atmospheric dielectric barrier discharge of claim 1-5, it is characterized in that: the ring-type external electrode (5) that is provided with on the central electrode (3) that is arranged on hollow medium pipe (2) axial location and the outer wall of hollow medium pipe is connected with power frequency, intermediate frequency or repetitive frequency pulsed high voltage source (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100181656A CN101330794B (en) | 2008-05-09 | 2008-05-09 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100181656A CN101330794B (en) | 2008-05-09 | 2008-05-09 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101330794A true CN101330794A (en) | 2008-12-24 |
| CN101330794B CN101330794B (en) | 2012-07-04 |
Family
ID=40206317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100181656A Expired - Fee Related CN101330794B (en) | 2008-05-09 | 2008-05-09 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101330794B (en) |
Cited By (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102215626A (en) * | 2011-05-23 | 2011-10-12 | 中国科学院物理研究所 | Device capable of producing discharge plasma under lower voltage condition |
| CN102307426A (en) * | 2011-06-24 | 2012-01-04 | 北京大学 | Plasma generating device |
| CN102404927A (en) * | 2010-09-07 | 2012-04-04 | 廖峻德 | Microplasma source and sterilization system including the same |
| CN102573260A (en) * | 2010-12-08 | 2012-07-11 | 上海华质生物技术有限公司 | Generating device of plasma ion source |
| CN102752951A (en) * | 2012-07-04 | 2012-10-24 | 大连民族学院 | Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease |
| CN102781156A (en) * | 2012-06-25 | 2012-11-14 | 中国科学院等离子体物理研究所 | Device provided with magnetic field restraint and capable of generating plasma jets under atmosphere condition |
| CN102883516A (en) * | 2012-10-31 | 2013-01-16 | 重庆大学 | Novel needle-ring type plasma jet device |
| CN101537199B (en) * | 2009-04-16 | 2013-03-13 | 西安交通大学 | Killing method of staphylococcus aureus |
| CN103037610A (en) * | 2012-12-04 | 2013-04-10 | 南京苏曼等离子科技有限公司 | Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition |
| CN101537197B (en) * | 2009-04-16 | 2013-04-17 | 西安交通大学 | Method for killing pseudomonas aeruginosa |
| CN103052250A (en) * | 2012-12-10 | 2013-04-17 | 中国科学院等离子体物理研究所 | Atmospheric pressure dispersion type cold plasma generation device |
| CN103269560A (en) * | 2013-05-03 | 2013-08-28 | 大连海事大学 | Microwave liquid phase plasma generator |
| CN103471808A (en) * | 2013-09-12 | 2013-12-25 | 中国科学院工程热物理研究所 | Plasma flow visualization device based on dielectric barrier discharge principle |
| CN103748972A (en) * | 2011-06-30 | 2014-04-23 | 先进能源工业公司 | Projected plasma source |
| CN103781271A (en) * | 2014-01-16 | 2014-05-07 | 中国科学院等离子体物理研究所 | Atmospheric pressure cold plasma generating device for wound healing |
| CN103871826A (en) * | 2012-12-12 | 2014-06-18 | 中国科学院大连化学物理研究所 | Dielectric barrier discharge (DBD) mass-spectrum ionization source device added with selective detection reagent |
| CN103945630A (en) * | 2014-04-21 | 2014-07-23 | 上海交通大学 | Barometric pressure air micro-plasma jet device for etching thin polymer film without mask |
| CN104411083A (en) * | 2014-12-17 | 2015-03-11 | 河北大学 | Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes |
| CN104470180A (en) * | 2014-11-24 | 2015-03-25 | 西安交通大学 | Tapered-quartz-glass-tube-based plasma jet generating device and method |
| CN105338723A (en) * | 2015-10-09 | 2016-02-17 | 苏州大学 | DBD plasma discharge device driven by high-voltage high-frequency source |
| CN105554998A (en) * | 2016-02-16 | 2016-05-04 | 衢州迪升工业设计有限公司 | Plasma device of fuse striking arc |
| CN105554999A (en) * | 2016-02-16 | 2016-05-04 | 衢州迪升工业设计有限公司 | Plasma device of corrosion type striking arc |
| CN105699359A (en) * | 2016-01-18 | 2016-06-22 | 大连理工大学 | Experimental device and method for obtaining annular uniform plasmas in barometric pressure air |
| CN106132056A (en) * | 2016-07-01 | 2016-11-16 | 中国科学院电工研究所 | Plasma jet device and the method for suppression epoxy resin surface charge buildup |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
| CN108322983A (en) * | 2018-01-26 | 2018-07-24 | 中国科学院西安光学精密机械研究所 | Floating electrode enhanced dielectric barrier discharge dispersion plasma jet generating device |
| CN108322984A (en) * | 2018-01-29 | 2018-07-24 | 中国科学院电工研究所 | Focus the device and method of cold plasma processing 3D objects |
| CN110054181A (en) * | 2019-03-21 | 2019-07-26 | 山东师范大学 | A kind of method and apparatus that surface of graphene oxide is modified |
| CN110931345A (en) * | 2019-01-29 | 2020-03-27 | 广州安诺科技股份有限公司 | Mass spectrometer ion source with central air inlet |
| JP2020198252A (en) * | 2019-06-04 | 2020-12-10 | 日本特殊陶業株式会社 | Plasma irradiation device and plasma irradiation method |
| CN112788827A (en) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | Gas discharge method for enhancing plasma intensity |
| CN112915231A (en) * | 2021-01-26 | 2021-06-08 | 桂林电子科技大学 | Plasma jet sterilization device, equipment and application thereof |
| CN114286486A (en) * | 2021-12-31 | 2022-04-05 | 中国人民解放军战略支援部队航天工程大学 | Device and method for measuring active products of atmospheric pressure dielectric barrier discharge plasma |
| CN114935670A (en) * | 2022-05-29 | 2022-08-23 | 哈尔滨理工大学 | Material surface plasma treatment mode based on atomic force microscope |
-
2008
- 2008-05-09 CN CN2008100181656A patent/CN101330794B/en not_active Expired - Fee Related
Cited By (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101537197B (en) * | 2009-04-16 | 2013-04-17 | 西安交通大学 | Method for killing pseudomonas aeruginosa |
| CN101537199B (en) * | 2009-04-16 | 2013-03-13 | 西安交通大学 | Killing method of staphylococcus aureus |
| CN102404927A (en) * | 2010-09-07 | 2012-04-04 | 廖峻德 | Microplasma source and sterilization system including the same |
| CN102573260A (en) * | 2010-12-08 | 2012-07-11 | 上海华质生物技术有限公司 | Generating device of plasma ion source |
| CN102573260B (en) * | 2010-12-08 | 2016-04-06 | 上海华质生物技术有限公司 | The generating means of plasma ion source |
| CN102215626A (en) * | 2011-05-23 | 2011-10-12 | 中国科学院物理研究所 | Device capable of producing discharge plasma under lower voltage condition |
| CN102215626B (en) * | 2011-05-23 | 2012-12-12 | 中国科学院物理研究所 | Device capable of producing discharge plasma under lower voltage condition |
| CN102307426A (en) * | 2011-06-24 | 2012-01-04 | 北京大学 | Plasma generating device |
| CN103748972A (en) * | 2011-06-30 | 2014-04-23 | 先进能源工业公司 | Projected plasma source |
| US10225919B2 (en) | 2011-06-30 | 2019-03-05 | Aes Global Holdings, Pte. Ltd | Projected plasma source |
| CN102781156A (en) * | 2012-06-25 | 2012-11-14 | 中国科学院等离子体物理研究所 | Device provided with magnetic field restraint and capable of generating plasma jets under atmosphere condition |
| CN102752951A (en) * | 2012-07-04 | 2012-10-24 | 大连民族学院 | Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease |
| CN102883516A (en) * | 2012-10-31 | 2013-01-16 | 重庆大学 | Novel needle-ring type plasma jet device |
| CN103037610A (en) * | 2012-12-04 | 2013-04-10 | 南京苏曼等离子科技有限公司 | Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition |
| CN103037610B (en) * | 2012-12-04 | 2015-07-15 | 南京苏曼等离子科技有限公司 | Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition |
| CN103052250A (en) * | 2012-12-10 | 2013-04-17 | 中国科学院等离子体物理研究所 | Atmospheric pressure dispersion type cold plasma generation device |
| CN103871826A (en) * | 2012-12-12 | 2014-06-18 | 中国科学院大连化学物理研究所 | Dielectric barrier discharge (DBD) mass-spectrum ionization source device added with selective detection reagent |
| CN103871826B (en) * | 2012-12-12 | 2015-12-09 | 中国科学院大连化学物理研究所 | A kind of dielectric barrier discharge mass spectrum ionization source device adding selective enumeration method reagent |
| CN103269560A (en) * | 2013-05-03 | 2013-08-28 | 大连海事大学 | Microwave liquid phase plasma generator |
| CN103269560B (en) * | 2013-05-03 | 2016-07-06 | 大连海事大学 | A kind of microwave liquid phase plasma generator |
| CN103471808B (en) * | 2013-09-12 | 2016-04-13 | 中国科学院工程热物理研究所 | Based on the plasma flow display device of dielectric barrier discharge principle |
| CN103471808A (en) * | 2013-09-12 | 2013-12-25 | 中国科学院工程热物理研究所 | Plasma flow visualization device based on dielectric barrier discharge principle |
| CN103781271A (en) * | 2014-01-16 | 2014-05-07 | 中国科学院等离子体物理研究所 | Atmospheric pressure cold plasma generating device for wound healing |
| CN103945630A (en) * | 2014-04-21 | 2014-07-23 | 上海交通大学 | Barometric pressure air micro-plasma jet device for etching thin polymer film without mask |
| CN104470180A (en) * | 2014-11-24 | 2015-03-25 | 西安交通大学 | Tapered-quartz-glass-tube-based plasma jet generating device and method |
| CN104411083B (en) * | 2014-12-17 | 2017-01-18 | 河北大学 | Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes |
| CN104411083A (en) * | 2014-12-17 | 2015-03-11 | 河北大学 | Device and method for producing continuous low-temperature large-section atmospheric pressure plasma plumes |
| CN105338723A (en) * | 2015-10-09 | 2016-02-17 | 苏州大学 | DBD plasma discharge device driven by high-voltage high-frequency source |
| CN105699359A (en) * | 2016-01-18 | 2016-06-22 | 大连理工大学 | Experimental device and method for obtaining annular uniform plasmas in barometric pressure air |
| CN105554999B (en) * | 2016-02-16 | 2017-12-01 | 衢州迪升工业设计有限公司 | A kind of plasma device of corrode formula striking |
| CN105554998B (en) * | 2016-02-16 | 2017-12-01 | 衢州迪升工业设计有限公司 | The plasma device of fuse striking |
| CN105554999A (en) * | 2016-02-16 | 2016-05-04 | 衢州迪升工业设计有限公司 | Plasma device of corrosion type striking arc |
| CN105554998A (en) * | 2016-02-16 | 2016-05-04 | 衢州迪升工业设计有限公司 | Plasma device of fuse striking arc |
| CN106132056A (en) * | 2016-07-01 | 2016-11-16 | 中国科学院电工研究所 | Plasma jet device and the method for suppression epoxy resin surface charge buildup |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
| CN108322983B (en) * | 2018-01-26 | 2024-05-31 | 中国科学院西安光学精密机械研究所 | Floating electrode reinforced dielectric barrier discharge dispersion plasma jet generating device |
| CN108322983A (en) * | 2018-01-26 | 2018-07-24 | 中国科学院西安光学精密机械研究所 | Floating electrode enhanced dielectric barrier discharge dispersion plasma jet generating device |
| CN108322984A (en) * | 2018-01-29 | 2018-07-24 | 中国科学院电工研究所 | Focus the device and method of cold plasma processing 3D objects |
| CN110931345A (en) * | 2019-01-29 | 2020-03-27 | 广州安诺科技股份有限公司 | Mass spectrometer ion source with central air inlet |
| CN110054181A (en) * | 2019-03-21 | 2019-07-26 | 山东师范大学 | A kind of method and apparatus that surface of graphene oxide is modified |
| JP7295707B2 (en) | 2019-06-04 | 2023-06-21 | 日本特殊陶業株式会社 | Plasma irradiation apparatus and plasma irradiation method |
| JP2020198252A (en) * | 2019-06-04 | 2020-12-10 | 日本特殊陶業株式会社 | Plasma irradiation device and plasma irradiation method |
| WO2020246436A1 (en) * | 2019-06-04 | 2020-12-10 | 日本特殊陶業株式会社 | Plasma irradiation apparatus and plasma irradiation method |
| CN113940145B (en) * | 2019-06-04 | 2024-06-18 | 日本特殊陶业株式会社 | Plasma irradiation device and plasma irradiation method |
| CN113940145A (en) * | 2019-06-04 | 2022-01-14 | 日本特殊陶业株式会社 | Plasma irradiation apparatus and plasma irradiation method |
| EP3982699A4 (en) * | 2019-06-04 | 2023-11-08 | Niterra Co., Ltd. | Plasma irradiation apparatus and plasma irradiation method |
| CN112788827A (en) * | 2019-11-07 | 2021-05-11 | 中国石油化工股份有限公司 | Gas discharge method for enhancing plasma intensity |
| CN112788827B (en) * | 2019-11-07 | 2024-02-27 | 中国石油化工股份有限公司 | Gas discharge method for enhancing plasma intensity |
| CN112915231A (en) * | 2021-01-26 | 2021-06-08 | 桂林电子科技大学 | Plasma jet sterilization device, equipment and application thereof |
| CN114286486A (en) * | 2021-12-31 | 2022-04-05 | 中国人民解放军战略支援部队航天工程大学 | Device and method for measuring active products of atmospheric pressure dielectric barrier discharge plasma |
| CN114935670A (en) * | 2022-05-29 | 2022-08-23 | 哈尔滨理工大学 | Material surface plasma treatment mode based on atomic force microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101330794B (en) | 2012-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101330794B (en) | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium | |
| KR100946434B1 (en) | Microwave plasma nozzle with enhanced plume stability and heating efficiency, plasma generating system and method thereof | |
| CN103945627B (en) | A kind of hand-held large area low temperature plasma generating means | |
| CN100348480C (en) | Fullerene-containing carbon, production method and device | |
| CN102595757B (en) | Three-electrode discharge device for generating large-volume atmosphere pressure plasma | |
| CN102307425A (en) | Combinable array plasma generating device | |
| CN110054181B (en) | Graphene oxide surface modification method and device | |
| CN202799362U (en) | Atmospheric pressure medium blocking-long and cold plasma jet generating device | |
| CN103179772A (en) | Atmospheric direct-current glow discharge method and special device thereof | |
| CN102307426A (en) | Plasma generating device | |
| CN102065626B (en) | Atmospheric pressure low temperature plasma electric brush generating device and array combination thereof | |
| CN103781271A (en) | Atmospheric pressure cold plasma generating device for wound healing | |
| CN103220874A (en) | Plasma array based on dielectric barrier discharging | |
| CN100515935C (en) | Carbon nano-tube growth apparatus and method | |
| CN100405879C (en) | Atmospheric pressure discharge cold plasma generator based on double gas source | |
| CN202841676U (en) | Linear array type atmospheric pressure cold plasma jet generating device | |
| CN100484361C (en) | Atmospheric discharging cold plasma generator and array based on contraction and enlargement channel structure | |
| CN201742637U (en) | Atmospheric pressure medium blocking-air cold plasma fluidizing device | |
| CN202907328U (en) | Plasma generation system by tubular dielectric barrier discharge | |
| CN103922457B (en) | Plasma discharging device | |
| CN103194001A (en) | Plasma treatment device and plasma treatment method for polymer material surface modification | |
| CN101351075A (en) | Apparatus for processing plasma | |
| CN101876065A (en) | Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure | |
| CN103037610B (en) | Launching device for single electrode producing low-temperature plasma flow under the atmospheric pressure condition | |
| CN104144553B (en) | A kind of photoionization plasma generator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 |