CN114286486A - Device and method for measuring active products of atmospheric pressure dielectric barrier discharge plasma - Google Patents
Device and method for measuring active products of atmospheric pressure dielectric barrier discharge plasma Download PDFInfo
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- 230000004888 barrier function Effects 0.000 title claims abstract description 106
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 16
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 7
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- LZDSILRDTDCIQT-UHFFFAOYSA-N dinitrogen trioxide Chemical compound [O-][N+](=O)N=O LZDSILRDTDCIQT-UHFFFAOYSA-N 0.000 claims description 10
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Abstract
The invention provides a novel device capable of measuring the active products of dielectric barrier discharge plasma under the atmospheric pressure condition. The dielectric barrier discharge plasma under the atmospheric pressure condition has wide application and is concerned, and the measuring method of the active products in the plasma generated by discharge is one of the key problems which are concerned generally. The invention utilizes an atmospheric pressure air pump to inject air into a dielectric barrier discharge cavity, the air is ionized in the discharge cavity to generate plasma, then active products in the plasma flow out of the cavity along with the air and are injected into a vacuum pipeline, finally, a needle valve and a vacuum pump are utilized to adjust the air pressure of the vacuum pipeline, and a mass spectrometer connected on the vacuum pipeline is utilized to finish measurement. The device solves the problem of real-time online measurement of active products of the dielectric barrier discharge plasma under the atmospheric pressure condition, and can measure the concentration of the active products such as ozone, nitrogen oxide and the like in the plasma with high precision.
Description
Technical Field
The invention belongs to the technical field of plasma diagnosis, and provides a real-time online synchronous measurement device and method for multiple active products of dielectric barrier discharge plasma under atmospheric pressure.
Background
The dielectric barrier discharge can generate plasma under the atmospheric pressure condition, a discharge system does not need to be vacuumized, and extremely high electron average energy, electron concentration and ionization degree are obtained at the same time, so that the dielectric barrier discharge plasma has important application prospect, and the measurement of plasma active products is a key link of plasma technology development, is the core content of plasma diagnosis, and can provide basic experimental data for plasma diagnosis and discharge parameter optimization.
The factors influencing the species and the concentration of the plasma active products are multiple and complex, the factors mainly comprise a discharge form, an electrode configuration, power supply parameters, gas flow in a discharge area and the like, and the technology that the parameters can be independently adjusted and the species and the concentration of the active products are measured with high precision is fundamental work for optimizing and matching the parameters. In the aspect of measurement, the most commonly used plasma diagnosis technology at present is a spectroscopic technology, including three categories of emission spectrum, absorption spectrum and laser-induced fluorescence spectrum, and the mass spectrometry technology is considered to be mainly used for measurement and diagnosis of low-pressure discharge plasma (ultra-low-temperature plasma diagnosis principle and technology. science press, 2021, P216), and it is difficult to find a result of measuring plasma active products under atmospheric pressure conditions by using the mass spectrometry technology in the published documents. The mass spectrometry is an analysis method for measuring the mass-charge ratio of ions, can provide rich structural information in one-time analysis, has high specificity and extremely high sensitivity, and is a universal method widely applied. The main reason for limiting the application of mass spectrometry to atmospheric pressure plasma is that the common mass spectrometer has extremely low working pressure which is 6 orders of magnitude lower than the atmospheric pressure and is difficult to be directly applied.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a device for measuring the active products of a dielectric barrier discharge plasma under an atmospheric pressure condition, which can control the air flow rate of a discharge region, control power parameters, and be applied to various discharge modes, and solve the problem that a mass spectrometry method is difficult to be directly applied to measurement under the atmospheric pressure condition.
In order to achieve the aim, the invention provides an atmospheric dielectric barrier discharge plasma active product measuring device which is characterized by comprising a dielectric barrier discharge device, a high-voltage discharge power supply, a needle valve, a vacuum gauge, a vacuum pump and a mass spectrometer, wherein the high-voltage discharge power supply comprises the following components:
the high-voltage discharge power supply is used for providing discharge energy for the dielectric barrier discharge device;
the dielectric barrier discharge device comprises a high-voltage electrode, a barrier medium, a low-voltage electrode, an air inlet and an air outlet, wherein the high-voltage discharge power supply is connected with the high-voltage electrode and the low-voltage electrode, the barrier medium is arranged between the high-voltage electrode and the low-voltage electrode, a gap is reserved between the barrier medium and the high-voltage electrode and/or the low-voltage electrode, the gap is used as a discharge cavity, air enters the discharge cavity from the air inlet after the high-voltage discharge power supply is switched on and then discharges in the discharge cavity, the air is ionized in the discharge cavity to generate plasma, and the plasma is discharged out of the dielectric barrier discharge device through the air outlet;
the inlets of the vacuum pump, the vacuum gauge and the mass spectrometer are respectively connected with a vacuum pipeline; the vacuum pipeline is connected with an air outlet of the medium barrier discharge device through the needle valve and a first tee joint; the first port of the first tee joint is connected with the gas outlet of the dielectric barrier discharge device, the second port of the first tee joint is connected with the exhaust pipe, the third port of the first tee joint is connected with one end of the needle valve, and the other end of the needle valve is connected with the vacuum pipeline.
Further, the structure of the dielectric barrier discharge device is a coaxial cylindrical structure, or a flat plate-shaped structure, or a needle plate-shaped structure, or a wire barrel-shaped structure.
Furthermore, the dielectric barrier discharge device is of a coaxial cylindrical structure and comprises an upper plug, a lower plug, a high-voltage electrode, a barrier medium and a low-voltage electrode, wherein the high-voltage electrode is arranged in the center of the dielectric barrier discharge device, the barrier medium made of insulating materials is wrapped outside the high-voltage electrode, and the upper end of the high-voltage electrode penetrates through the upper plug and is connected with the high-voltage discharge power supply; the low-voltage electrode is made of metal, surrounds the blocking medium and is grounded, and a gap is reserved between the blocking medium and the low-voltage electrode to be used as a discharge cavity; the upper plug is provided with an air inlet of the dielectric barrier discharge device, the lower plug is provided with an air outlet of the dielectric barrier discharge device, and the air inlet and the air outlet of the dielectric barrier discharge device are communicated with the discharge cavity; the upper plug and the lower plug close the discharge cavity.
Furthermore, the vacuum pipeline comprises a second tee joint, a third tee joint and a vacuum pipe for connection; the first port of the second tee joint is connected with the vacuum gauge through a vacuum tube, the second port of the second tee joint is connected with the needle valve through a vacuum tube, and the third port of the second tee joint is connected with the first port of the third tee joint through a vacuum tube; and a second port of the third tee is connected with a vacuum pump through a vacuum tube, and a third port of the third tee is connected with a mass spectrometer through a vacuum tube.
Further, the atmospheric pressure dielectric barrier discharge plasma active product measuring device further comprises an atmospheric air pump and a flow meter, the atmospheric air pump is connected with an inlet of the flow meter through a pipeline, and an outlet of the flow meter is connected with an air inlet of the dielectric barrier discharge device through a pipeline.
The invention also provides a method for measuring the active products of the atmospheric pressure dielectric barrier discharge plasma, which comprises the following steps:
step S1: atmospheric pressure air flow flows into a discharge cavity of the dielectric barrier discharge device, a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;
step S2: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;
step S3: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;
step S4: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.
The invention also provides a method for measuring the active products of the atmospheric pressure dielectric barrier discharge plasma, which comprises the following steps:
step S1: generating an atmospheric air flow by using the atmospheric air pump, and monitoring and controlling the air flow by using the flow meter;
step S2: injecting the atmospheric pressure air flow into a discharge cavity of the dielectric barrier discharge device, wherein a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;
step S3: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;
step S4: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;
step S5: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.
Further, the active products in the plasma include ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, dinitrogen trioxide, or dinitrogen monoxide.
Advantageous effects
The invention realizes the flow control of the atmospheric pressure dielectric barrier discharge air flow and is suitable for researching the influence of the air flow on the plasma active products. The invention also realizes the controllability of the parameters of the dielectric barrier discharge structure and the high-voltage discharge power supply, and is suitable for researching the influence of the parameters of the discharge structure and the high-voltage discharge power supply on the active products of the plasma. The invention can synchronously measure the concentration of various active products in the dielectric barrier discharge plasma in real time on line under the atmospheric pressure condition. The invention solves the problem that a mass spectrometer is difficult to be applied to the measurement of plasma active products under the atmospheric pressure condition, and greatly expands the application range of mass spectrometry.
Drawings
Fig. 1 is a schematic diagram showing the connection between an atmospheric air pump and a flow meter according to the present invention.
Fig. 2 is a schematic diagram of the composition of the dielectric barrier discharge device in the present invention.
FIG. 3 is a schematic diagram of the vacuum pressure regulator of the present invention.
Fig. 4 is a schematic diagram of the connection of the mass spectrometer measuring device in the present invention.
Fig. 5 is a schematic diagram showing the composition of the atmospheric-pressure dbd-discharge plasma-active-product measuring apparatus according to example 1.
FIG. 6 is a schematic diagram showing the composition of an apparatus for measuring plasma activity products of atmospheric dielectric barrier discharge according to example 2.
Reference numerals: an atmospheric air pump 1; an air line 2; a flow meter 3; an air inlet 4; a discharge chamber 5; an air outlet 6; a high-voltage discharge power supply 7; a high voltage cable 8; a high voltage electrode 9; an upper plug 10; a barrier medium 11; a low voltage electrode 12; a ground 13; a lower plug 14; a vacuum exhaust tube 15; a needle valve 16; an exhaust pipe 17; a vacuum gauge 18; a tee 19; a vacuum tube 20; a vacuum pump 21; a mass spectrometer 22.
Detailed Description
The following describes in detail embodiments of the present invention with reference to the drawings.
The invention provides a novel device capable of measuring the active products of dielectric barrier discharge plasma under the atmospheric pressure condition. The dielectric barrier discharge plasma under the atmospheric pressure condition has wide application and is concerned, and the measuring method of the active products in the plasma generated by discharge is one of the key problems which are concerned generally.
The invention utilizes an atmospheric pressure air pump to inject air into a dielectric barrier discharge cavity, the air is ionized in the discharge cavity to generate plasma, then active products in the plasma flow out of the cavity along with the air and are injected into a vacuum pipeline, finally, a needle valve and a vacuum pump are utilized to adjust the air pressure of the vacuum pipeline, and a mass spectrometer connected on the vacuum pipeline is utilized to finish measurement. The device solves the problem of real-time online measurement of active products of the dielectric barrier discharge plasma under the atmospheric pressure condition, and can measure the concentration of the active products such as ozone, nitrogen oxide and the like in the plasma with high precision.
Example 1
Referring to fig. 1 to 5, the device for measuring the active products of the dielectric barrier discharge plasma under the atmospheric pressure condition of the present embodiment comprehensively uses an atmospheric pressure air pump 1, a flow meter 3, a dielectric barrier discharge device, a high-voltage discharge power supply 7, a needle valve 16, a vacuum gauge 18, a vacuum pump 21 and a mass spectrometer 22.
The atmospheric air pump 1 is connected with an inlet of the flow meter 3 through an air pipeline 2, and an outlet of the flow meter 3 is connected with an air inlet of the dielectric barrier discharge device through the air pipeline 2.
The structure among the high-voltage electrode, the blocking medium and the low-voltage electrode of the dielectric barrier discharge device can be a coaxial cylindrical structure, a flat plate-shaped structure, a needle plate-shaped structure or a wire barrel-shaped structure, the dielectric barrier discharge devices for different measurement purposes can be obtained by changing the structures and the sizes of the high-voltage electrode, the blocking medium, the low-voltage electrode, the air gap and the like, and different dielectric barrier discharge devices can be replaced in the device for measuring the active products of the dielectric barrier discharge plasma under the atmospheric pressure condition. In the coaxial cylindrical structure, the high-voltage electrode is in a rod shape and is arranged in the center, the blocking medium surrounds the high-voltage electrode, the cylindrical plate is arranged around the blocking medium and serves as a low-voltage electrode, a gap is reserved between the blocking medium and one or both of the high-voltage electrode and the low-voltage electrode, and a discharge cavity is formed by the gap between the blocking medium and the high-voltage electrode and/or the low-voltage electrode. In the flat plate structure, the high-voltage electrode and the low-voltage electrode are flat plates and are oppositely arranged, the blocking medium is arranged between the high-voltage electrode and the low-voltage electrode, and a discharge cavity is formed by gaps between the blocking medium and the high-voltage electrode and/or the low-voltage electrode. The needle plate-shaped structure comprises one or more needle-shaped high-voltage electrodes and a plate-shaped low-voltage electrode or one or more needle-shaped low-voltage electrodes and a plate-shaped high-voltage electrode, and gaps between the blocking medium and the high-voltage electrodes and/or the low-voltage electrodes form a discharge cavity. In the bobbin-shaped structure, the high-voltage electrode is rod-shaped and is arranged in the center, the blocking medium surrounds the high-voltage electrode, a support body of the low-voltage electrode is arranged around the blocking medium, such as a glass support body, the low-voltage electrode is formed by winding a wire on the support body of the low-voltage electrode, and a discharge cavity is formed by a gap between the blocking medium and the high-voltage electrode and/or the low-voltage electrode.
The dielectric barrier discharge device in the embodiment adopts a coaxial cylindrical structure and comprises an upper plug 10, a lower plug 14, a high-voltage electrode 9, a barrier medium 11 and a low-voltage electrode 12, wherein the high-voltage electrode 9 is arranged in the center of the dielectric barrier discharge device, the barrier medium 11 made of insulating materials is wrapped outside the high-voltage electrode 9, and the upper end of the high-voltage electrode penetrates through the upper plug 10 and is connected with the high-voltage discharge power supply 7; the low-voltage electrode 12 is made of metal, surrounds the blocking medium 11 and is grounded, and a gap is reserved between the blocking medium and the low-voltage electrode to serve as a discharge cavity 5; the upper plug is provided with an air inlet of the dielectric barrier discharge device, the lower plug 14 is provided with an air outlet of the dielectric barrier discharge device, and the air inlet and the air outlet of the dielectric barrier discharge device are communicated with the discharge cavity 5; the upper plug 10 and the lower plug 14 enclose the discharge cavity 5.
The inlets of the vacuum pump 21, the vacuum gauge 18 and the mass spectrometer 22 are respectively connected with a vacuum pipeline; the vacuum pipeline passes through needle valve 16 and tee bend 19 are connected dielectric barrier discharge device's gas outlet, and the first port of this tee bend passes through vacuum exhaust tube 15 and connects dielectric barrier discharge device's gas outlet, blast pipe 17 is connected to the second port, and the third port is connected the one end of needle valve 16, vacuum pipeline is connected to the other end of needle valve 16. The vacuum pipeline comprises two tee joints 19 and a vacuum pipe 20 for connection; a first port of one tee joint 19 is connected with the vacuum gauge through a vacuum pipe 20, a second port is connected with the needle valve 16 through the vacuum pipe 20, and a third port is connected with a first port of a second tee joint 09 through the vacuum pipe 20; the second port of the second tee 19 is connected to a vacuum pump 21 via a vacuum line 20 and the third port of the second tee is connected to a mass spectrometer 22 via a vacuum line 20.
The implementation process of measuring the active products of the dielectric barrier discharge plasma under the atmospheric pressure condition by adopting the device mainly comprises air injection, plasma generation by dielectric barrier discharge, vacuum pressure regulation and mass spectrum measurement.
And (3) air injection process: an atmospheric air pump 1 is used for generating atmospheric air flow, the atmospheric air flow is discharged through an air pipeline 2 through a flowmeter 3 and is injected into a dielectric barrier discharge device through an air inlet 4, and the air flow is monitored and controlled by the flowmeter.
The process of generating plasma by dielectric barrier discharge: and injecting the atmospheric pressure air flow into a discharge cavity 5 of the dielectric barrier discharge device, providing energy for the dielectric barrier discharge device by a high-voltage discharge power supply 7, ionizing air in the discharge cavity 5 by high-voltage discharge to generate plasma, and injecting active products in the plasma out of the discharge cavity 5 along with the air into a vacuum pipeline.
And (3) vacuum pressure regulating process: the vacuum extraction pipe 15 is used for introducing active substances in plasma into the vacuum pipe 20, one end of the vacuum extraction pipe is connected with the air outlet 6 of the dielectric barrier discharge device, the other end of the vacuum extraction pipe is connected with the first tee joint 19, the exhaust pipe 17 is connected to the first tee joint 19 and used for exhausting redundant air, the needle valve 16 is connected to the other end of the first tee joint 19 and used for controlling the total amount of the active substances in the plasma entering the vacuum pipe 20, the needle valve 16 is connected with the second tee joint 19, one end of the second tee joint 19 is connected with the vacuum gauge 18, the other end of the second tee joint 19 is connected with the vacuum pipe 20, the vacuum gauge 18 is used for displaying the air pressure in the vacuum pipe 20 in real time and providing data for adjusting the needle valve 16, the vacuum pump 21 is connected with the vacuum pipe 20 through the third tee joint 19, the vacuum pump 21 is used for vacuumizing and is matched with the needle valve 16 and the vacuum gauge 18 to adjust the air pressure in the vacuum pipe 20 so that the air pressure in the vacuum pipe 20 is lower than the atmospheric pressure by more than 6 orders of magnitude, within the gas pressure range in which mass spectrometer 22 operates.
The mass spectrum measurement process comprises the following steps: the active species in the vacuum tube diffuses into the mass spectrometer 22 and the species and constituent concentration of the active product is measured using the mass spectrometer 22. Plasma activity products that can be measured by the present invention include, but are not limited to: ozone, oxygen atoms, nitrogen monoxide, nitrogen dioxide, dinitrogen trioxide, dinitrogen monoxide. The invention realizes the real-time on-line synchronous measurement of various active products of the dielectric barrier discharge plasma under the atmospheric pressure condition.
Example 2
Referring to fig. 2, 3, 4 and 6, the measurement apparatus for measuring the plasma activity of the dbd under atmospheric pressure in the present embodiment is the same as that in embodiment 1 except for specific description.
In the device for measuring the dielectric barrier discharge plasma active product under the atmospheric pressure condition, the atmospheric pressure air pump and the flowmeter are adopted, and air freely diffuses into the discharge cavity through the air inlet of the dielectric barrier discharge device.
The implementation process of measuring the active products of the dielectric barrier discharge plasma under the atmospheric pressure condition by adopting the device mainly comprises air injection, plasma generation by dielectric barrier discharge, vacuum pressure regulation and mass spectrum measurement.
Air inflow process: atmospheric air is injected into the dielectric barrier discharge device through the air inlet hole 4;
the process of generating plasma by dielectric barrier discharge: and the atmospheric air is freely diffused into a discharge cavity 5 of the dielectric barrier discharge device, a high-voltage discharge power supply 7 provides energy for the dielectric barrier discharge device, high-voltage discharge is carried out in the discharge cavity 5 to ionize air to generate plasma, and active products in the plasma flow out of the discharge cavity 5 along with the air and are injected into a vacuum pipeline.
And (3) vacuum pressure regulating process: the vacuum extraction pipe 15 is used for introducing active substances in plasma into the vacuum pipe 20, one end of the vacuum extraction pipe is connected with the air outlet 6 of the dielectric barrier discharge device, the other end of the vacuum extraction pipe is connected with the first tee joint 19, the exhaust pipe 17 is connected to the first tee joint 19 and used for exhausting redundant air, the needle valve 16 is connected to the other end of the first tee joint 19 and used for controlling the total amount of the active substances in the plasma entering the vacuum pipe 20, the needle valve 16 is connected with the second tee joint 19, one end of the second tee joint 19 is connected with the vacuum gauge 18, the other end of the second tee joint 19 is connected with the vacuum pipe 20, the vacuum gauge 18 is used for displaying the air pressure in the vacuum pipe 20 in real time and providing data for adjusting the needle valve 16, the vacuum pump 21 is connected with the vacuum pipe 20 through the third tee joint 19, the vacuum pump 21 is used for vacuumizing and is matched with the needle valve 16 and the vacuum gauge 18 to adjust the air pressure in the vacuum pipe 20 so that the air pressure in the vacuum pipe 20 is lower than the atmospheric pressure by more than 6 orders of magnitude, within the gas pressure range in which mass spectrometer 22 operates.
The mass spectrum measurement process comprises the following steps: the active species in the vacuum tube diffuses into the mass spectrometer 22 and the species and constituent concentration of the active product is measured using the mass spectrometer 22. Plasma activity products that can be measured by the present invention include, but are not limited to: ozone, oxygen atoms, nitrogen monoxide, nitrogen dioxide, dinitrogen trioxide, dinitrogen monoxide. The invention realizes the real-time on-line synchronous measurement of various active products of the dielectric barrier discharge plasma under the atmospheric pressure condition.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalents, improvements, etc. made within the principle of the present invention are included in the scope of the present invention.
Claims (9)
1. The utility model provides an active resultant measuring device of atmospheric pressure dielectric barrier discharge plasma which characterized in that, includes dielectric barrier discharge device, high-pressure discharge power, needle valve, vacuometer, vacuum pump and mass spectrograph:
the high-voltage discharge power supply is used for providing discharge energy for the dielectric barrier discharge device;
the dielectric barrier discharge device comprises a high-voltage electrode, a barrier medium, a low-voltage electrode, an air inlet and an air outlet, wherein the high-voltage discharge power supply is connected with the high-voltage electrode and the low-voltage electrode, the barrier medium is arranged between the high-voltage electrode and the low-voltage electrode, a gap is reserved between the barrier medium and the high-voltage electrode and/or the low-voltage electrode, the gap is used as a discharge cavity, air enters the discharge cavity from the air inlet after the high-voltage discharge power supply is switched on and then discharges in the discharge cavity, the air is ionized in the discharge cavity to generate plasma, and the plasma is discharged out of the dielectric barrier discharge device through the air outlet;
the inlets of the vacuum pump, the vacuum gauge and the mass spectrometer are respectively connected with a vacuum pipeline; the vacuum pipeline is connected with an air outlet of the medium barrier discharge device through the needle valve and a first tee joint; the first port of the first tee joint is connected with the gas outlet of the dielectric barrier discharge device, the second port of the first tee joint is connected with the exhaust pipe, the third port of the first tee joint is connected with one end of the needle valve, and the other end of the needle valve is connected with the vacuum pipeline.
2. The atmospheric-pressure dielectric-barrier discharge plasma active product measuring device according to claim 1, wherein the structure of the dielectric-barrier discharge device is a coaxial cylindrical structure, or a flat plate-shaped structure, or a pin plate-shaped structure, or a wire barrel-shaped structure.
3. The atmospheric-pressure dielectric barrier discharge plasma active product measuring device according to claim 2, wherein the dielectric barrier discharge device is a coaxial cylindrical structure and comprises an upper plug, a lower plug, a high-voltage electrode, a barrier dielectric and a low-voltage electrode, the high-voltage electrode is arranged in the center of the dielectric barrier discharge device, the barrier dielectric made of insulating materials is wrapped outside the high-voltage electrode, and the upper end of the high-voltage electrode penetrates through the upper plug and is connected with the high-voltage discharge power supply; the low-voltage electrode is made of metal, surrounds the blocking medium and is grounded, and a gap is reserved between the blocking medium and the low-voltage electrode to be used as a discharge cavity; the upper plug is provided with an air inlet of the dielectric barrier discharge device, the lower plug is provided with an air outlet of the dielectric barrier discharge device, and the air inlet and the air outlet of the dielectric barrier discharge device are communicated with the discharge cavity; the upper plug and the lower plug close the discharge cavity.
4. The atmospheric-pressure dielectric-barrier discharge plasma active product measurement device of claim 1, wherein the vacuum line comprises a second tee, a third tee, and a vacuum line for connection; the first port of the second tee joint is connected with the vacuum gauge through a vacuum tube, the second port of the second tee joint is connected with the needle valve through a vacuum tube, and the third port of the second tee joint is connected with the first port of the third tee joint through a vacuum tube; and a second port of the third tee is connected with a vacuum pump through a vacuum tube, and a third port of the third tee is connected with a mass spectrometer through a vacuum tube.
5. The atmospheric-pressure dielectric barrier discharge plasma activity product measuring device according to any one of claims 1 to 4, further comprising an atmospheric air pump and a flow meter, wherein the atmospheric air pump is connected with an inlet of the flow meter through a pipeline, and an outlet of the flow meter is connected with an air inlet of the dielectric barrier discharge device through a pipeline.
6. An atmospheric pressure dielectric barrier discharge plasma activity product measuring method based on the device of one of claims 1 to 4, characterized by comprising:
step S1: atmospheric pressure air flow flows into a discharge cavity of the dielectric barrier discharge device, a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;
step S2: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;
step S3: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;
step S4: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.
7. The method of claim 6, wherein the active products in the plasma comprise ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, dinitrogen trioxide, or dinitrogen monoxide.
8. A method for measuring the plasma activity products of atmospheric dielectric barrier discharge is based on the device of claim 5,
step S1: generating an atmospheric air flow by using the atmospheric air pump, and monitoring and controlling the air flow by using the flow meter;
step S2: injecting the atmospheric pressure air flow into a discharge cavity of the dielectric barrier discharge device, wherein a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;
step S3: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;
step S4: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;
step S5: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.
9. The method of claim 8, wherein the active products in the plasma include ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, dinitrogen trioxide, or dinitrogen monoxide.
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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