CN114286486A - Atmospheric pressure dielectric barrier discharge plasma active product measurement device and method - Google Patents

Abstract

The invention provides a novel device capable of measuring the active products of dielectric barrier discharge plasma under the atmospheric pressure condition. The dielectric barrier discharge plasma under the atmospheric pressure condition has wide application and is concerned, and the measuring method of the active products in the plasma generated by discharge is one of the key problems which are concerned generally. The invention utilizes an atmospheric pressure air pump to inject air into a dielectric barrier discharge cavity, the air is ionized in the discharge cavity to generate plasma, then active products in the plasma flow out of the cavity along with the air and are injected into a vacuum pipeline, finally, a needle valve and a vacuum pump are utilized to adjust the air pressure of the vacuum pipeline, and a mass spectrometer connected on the vacuum pipeline is utilized to finish measurement. The device solves the problem of real-time online measurement of active products of the dielectric barrier discharge plasma under the atmospheric pressure condition, and can measure the concentration of the active products such as ozone, nitrogen oxide and the like in the plasma with high precision.

Description

Atmospheric pressure dielectric barrier discharge plasma active product measurement device and method

technical field

The invention belongs to the technical field of plasma diagnosis, and provides a real-time online synchronous measurement device and method for various active products of dielectric barrier discharge plasma under atmospheric pressure.

Background technique

The dielectric barrier discharge can generate plasma under atmospheric pressure, and the discharge system does not need to be evacuated, and at the same time obtains extremely high electron average energy, electron concentration and ionization degree, which has important application prospects. Therefore, the dielectric barrier discharge plasma under atmospheric pressure is widely used. Attention, the measurement of plasma active products is a key link in the development of plasma technology and the core content of plasma diagnosis, which can provide basic experimental data for plasma diagnosis and discharge parameter optimization.

There are many and complex factors affecting the type and concentration of plasma active products, mainly including discharge form, electrode configuration, power supply parameters, gas flow in the discharge area, etc. Multiple parameters can be independently adjusted and the technology of high-precision measurement of active product types and concentrations It is the basic work for the optimization and matching of many of the above parameters. In terms of measurement, the most commonly used plasma diagnosis technology is spectroscopy, including emission spectroscopy, absorption spectroscopy and laser-induced fluorescence spectroscopy. Principles and Technology of Low-Temperature Plasma Diagnosis. Science Press, 2021, P216), it is also difficult to find the results of using mass spectrometry to measure plasma active products under atmospheric pressure conditions in the published literature. Mass spectrometry is an analytical method for measuring the mass-to-charge ratio of ions. It can provide rich structural information in one analysis. It has both high specificity and extremely high sensitivity. It is a universal method that is widely used. . The main reason for limiting the application of mass spectrometry to atmospheric pressure plasma is that the working pressure of common mass spectrometers is extremely low, which is more than 6 orders of magnitude lower than atmospheric pressure, making it difficult to directly apply.

SUMMARY OF THE INVENTION

In view of this, the purpose of the present invention is to provide a device for measuring the active product of dielectric barrier discharge plasma under atmospheric pressure, which can not only control the air flow in the discharge area, but also control the power parameters, and can also be applied to a variety of different It solves the problem that mass spectrometry methods are difficult to be directly applied to measurement under atmospheric pressure conditions.

In order to achieve the above object, the present invention provides an atmospheric pressure dielectric barrier discharge plasma active product measuring device, which is characterized in that it includes a dielectric barrier discharge device, a high-voltage discharge power supply, a needle valve, a vacuum gauge, a vacuum pump and a mass spectrometer:

The high-voltage discharge power supply is used to provide discharge energy to the dielectric barrier discharge device;

The dielectric barrier discharge device includes a high voltage electrode, a barrier medium, a low voltage electrode, an air inlet and an air outlet, the high voltage discharge power source is connected to the high voltage electrode and the low voltage electrode, and the barrier medium is placed between the high voltage electrode and the low voltage electrode. Between the low-voltage electrodes, there is a gap between the blocking medium and the high-voltage electrode and/or the low-voltage electrode, and the gap serves as a discharge cavity. After the high-voltage discharge power supply is turned on and discharged in the discharge cavity, the air Entering the discharge chamber from the air inlet, ionizing air in the discharge chamber to generate plasma, and the plasma is discharged from the dielectric barrier discharge device through the air outlet;

The inlets of the vacuum pump, the vacuum gauge and the mass spectrometer are respectively connected to a vacuum pipeline; the vacuum pipeline is connected to the air outlet of the dielectric barrier discharge device through the needle valve and the first three-way; the first three-way of the first three-way The port is connected to the gas outlet of the dielectric barrier discharge device, the second port is connected to the exhaust pipe, the third port is connected to one end of the needle valve, and the other end of the needle valve is connected to the vacuum pipeline.

Further, the structure of the dielectric barrier discharge device is a coaxial cylindrical structure, or a plate-shaped structure, or a pin-plate-shaped structure, or a bobbin-shaped structure.

Further, the dielectric barrier discharge device is a coaxial cylindrical structure, including an upper plug, a lower plug, a high-voltage electrode, a blocking medium, and a low-voltage electrode, the high-voltage electrode is arranged in the center of the dielectric barrier discharge device, and the outer The blocking medium made of insulating material is wrapped, and its upper end is connected to the high-voltage discharge power supply through the upper plug; the low-voltage electrode is made of metal, surrounds the blocking medium and is grounded, and the blocking A gap is left between the medium and the low-voltage electrode as a discharge cavity; the upper plug is provided with an air inlet of the dielectric barrier discharge device, and the lower plug is provided with an air outlet of the dielectric barrier discharge device , the air inlet and the air outlet of the dielectric barrier discharge device are communicated with the discharge cavity; the upper plug and the lower plug close the discharge cavity.

Further, the vacuum pipeline includes a second tee, a third tee and a vacuum tube for connection; the first port of the second tee is connected to the vacuum gauge through a vacuum tube, and the second port is connected to the vacuum tube through a vacuum tube. Needle valve, the third port is connected to the first port of the third tee through a vacuum tube; the second port of the third tee is connected to a vacuum pump through a vacuum tube, and the third port of the third tee is connected to the mass spectrometer through a vacuum tube .

Further, the atmospheric pressure dielectric barrier discharge plasma active product measuring device also includes an atmospheric air pump and a flowmeter, the atmospheric pressure air pump is connected to the inlet of the flowmeter through a pipeline, and the outlet of the flowmeter is connected through a pipeline. The air inlet of the dielectric barrier discharge device.

The present invention also provides an atmospheric pressure dielectric barrier discharge plasma active product measurement method, comprising:

Step S1: the atmospheric pressure air flow flows into the discharge chamber of the dielectric barrier discharge device, the high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and the high-voltage discharge is performed in the discharge chamber to ionize the air to generate plasma;

Step S2: the active product in the plasma flows out of the discharge chamber with the air and is injected into the vacuum pipeline;

Step S3: using a needle valve and a vacuum pump to adjust the air pressure in the vacuum pipeline, and using a vacuum gauge to monitor the air pressure, so that the air pressure in the vacuum pipeline is within the working pressure range of the mass spectrometer;

Step S4: The active substance in the vacuum tube diffuses into the mass spectrometer, and the mass spectrometer is used to measure the type and component concentration of the active product.

The present invention also provides an atmospheric pressure dielectric barrier discharge plasma active product measurement method, comprising:

Step S1: use the atmospheric pressure air pump to generate the atmospheric pressure air flow, and use the flowmeter to monitor and control the air flow;

Step S2: injecting the atmospheric pressure air flow into the discharge chamber of the dielectric barrier discharge device, a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and performing high-voltage discharge in the discharge chamber to ionize the air to generate plasma;

Step S3: the active product in the plasma flows out of the discharge chamber with the air, and is injected into the vacuum pipeline;

Step S4: using a needle valve and a vacuum pump to adjust the air pressure in the vacuum pipeline, and using a vacuum gauge to monitor the air pressure, so that the air pressure in the vacuum pipeline is within the working pressure range of the mass spectrometer;

Step S5: The active substance in the vacuum tube diffuses into the mass spectrometer, and the mass spectrometer is used to measure the type and component concentration of the active product.

Further, the active products in the plasma include ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, nitrous oxide or nitrous oxide.

beneficial effect

The invention realizes the controllable flow rate of the atmospheric pressure dielectric barrier discharge air flow, and is suitable for studying the influence of the air flow rate on the plasma active product. The invention also realizes that the dielectric barrier discharge structure and the parameters of the high-voltage discharge power supply are controllable, and is suitable for studying the influence of the discharge structure and the parameters of the high-voltage discharge power supply on the plasma active products. The invention can simultaneously measure the concentration of various active products in the dielectric barrier discharge plasma under atmospheric pressure condition in real time and online. The invention solves the problem that the mass spectrometer is difficult to be applied to the measurement of plasma active products under atmospheric pressure, and greatly expands the application range of the mass spectrometry.

Description of drawings

FIG. 1 is a schematic diagram of the connection between the atmospheric pressure air pump and the flow meter in the present invention.

FIG. 2 is a schematic diagram of the composition of the dielectric barrier discharge device in the present invention.

FIG. 3 is a schematic diagram of the composition of the vacuum compressor in the present invention.

FIG. 4 is a schematic diagram of the connection of the mass spectrometer measuring device in the present invention.

FIG. 5 is a schematic diagram of the composition of the device for measuring the active products of the atmospheric pressure dielectric barrier discharge plasma in Example 1. FIG.

FIG. 6 is a schematic diagram of the composition of the device for measuring the plasma active products of atmospheric pressure dielectric barrier discharge in Example 2. FIG.

Reference signs: atmospheric pressure air pump 1; air pipeline 2; flow meter 3; air inlet 4; discharge chamber 5; air outlet 6; high-voltage discharge power supply 7; high-voltage cable 8; high-voltage electrode 9; upper plug 10; Barrier medium 11; low pressure electrode 12; grounding 13; lower plug 14; vacuum exhaust pipe 15; needle valve 16; exhaust pipe 17; vacuum gauge 18;

Detailed ways

The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

The present invention provides a novel device capable of measuring dielectric barrier discharge plasma active products under atmospheric pressure. The dielectric barrier discharge plasma under atmospheric pressure is widely used and has attracted much attention. The measurement method of the active products in the plasma generated by the discharge is one of the key issues of general concern.

In the invention, the atmospheric pressure air pump is used to inject air into the dielectric barrier discharge cavity, the air is ionized in the discharge cavity to generate plasma, and then the active products in the plasma flow out of the cavity with the air and are injected into the vacuum pipeline, and finally the needle valve and the The vacuum pump adjusts the air pressure of the vacuum line, and the mass spectrometer connected to the vacuum line is used to complete the measurement. The device solves the problem of real-time online measurement of active products of dielectric barrier discharge plasma under atmospheric pressure, and can measure the concentration of active products such as ozone and nitrogen oxides in plasma with high precision.

Example 1

Referring to FIGS. 1 to 5 , the device for measuring the active product of dielectric barrier discharge plasma under atmospheric pressure in this embodiment comprehensively uses an atmospheric pressure air pump 1, a flow meter 3, a dielectric barrier discharge device, a high-voltage discharge power supply 7, a needle valve 16, Vacuum gauge 18 , vacuum pump 21 and mass spectrometer 22 .

The atmospheric pressure air pump 1 is connected to the inlet of the flowmeter 3 through an air pipeline 2 , and the outlet of the flowmeter 3 is connected to the air inlet of the dielectric barrier discharge device through the air pipeline 2 .

The structure between the high-voltage electrode, the blocking medium and the low-voltage electrode of the dielectric barrier discharge device can be a coaxial cylindrical structure, a flat-plate-shaped structure, a needle-plate-shaped structure, or a wire-barrel structure. By changing the high-voltage electrode, blocking medium, The structure and size of low-voltage electrodes, air gaps, etc., can obtain dielectric barrier discharge devices for different measurement purposes, and different dielectric barrier discharge devices can be replaced in the dielectric barrier discharge plasma active product measurement device under atmospheric pressure conditions of the present invention. In the coaxial cylindrical structure, the high-voltage electrode is placed in the center in the shape of a rod, the blocking medium surrounds the high-voltage electrode, and a cylindrical plate is arranged around the blocking medium as the low-voltage electrode, and the blocking medium and either the high-voltage electrode or the low-voltage electrode leave a gap or All have gaps, and the gaps between the blocking medium and the high-voltage electrode and/or the low-voltage electrode form a discharge cavity. In the flat-plate structure, the high-voltage electrode and the low-voltage electrode are flat plates and are placed opposite to each other, the blocking medium is placed between the high-voltage electrode and the low-voltage electrode, and the gap between the blocking medium and the high-voltage electrode and/or the low-voltage electrode forms a discharge cavity. In the needle-plate-shaped structure, it includes one or more needle-shaped high-voltage electrodes and plate-shaped low-voltage electrodes, or one or more needle-shaped low-voltage electrodes and plate-shaped high-voltage electrodes, the blocking medium and the high-voltage electrode and/or the low-voltage electrode The space between them forms the discharge cavity. In the bobbin-shaped structure, the high-voltage electrode is placed in the center in the shape of a rod, the blocking medium surrounds the high-voltage electrode, and a support for the low-voltage electrode, such as a glass support, is arranged around the blocking medium. The gap between the medium and the high voltage electrode and/or the low voltage electrode forms the discharge cavity.

In this embodiment, the dielectric barrier discharge device adopts a coaxial cylindrical structure, including an upper plug 10, a lower plug 14, a high-voltage electrode 9, a blocking medium 11, and a low-voltage electrode 12. The high-voltage electrode 9 is arranged on the medium The center of the blocking discharge device is surrounded by the blocking medium 11 made of insulating material, and its upper end is connected to the high-voltage discharge power supply 7 through the upper plug 10; the low-voltage electrode 12 is made of metal, surrounded by The barrier medium 11 is around and grounded, and a gap is left between the barrier medium and the low-voltage electrode as the discharge cavity 5; the upper plug is provided with an air inlet of the dielectric barrier discharge device, and the lower The plug 14 is provided with an air outlet of the dielectric barrier discharge device, and the air inlet and air outlet of the dielectric barrier discharge device communicate with the discharge chamber 5 ; the upper plug 10 and the lower plug 14 The discharge chamber 5 is closed.

The inlets of the vacuum pump 21 , the vacuum gauge 18 and the mass spectrometer 22 are respectively connected to vacuum pipelines; the vacuum pipelines are connected to the gas outlet of the dielectric barrier discharge device through the needle valve 16 and the tee 19 . The port is connected to the outlet of the dielectric barrier discharge device through the vacuum exhaust pipe 15, the second port is connected to the exhaust pipe 17, the third port is connected to one end of the needle valve 16, and the other end of the needle valve 16 is connected to the vacuum pipeline. The vacuum pipeline includes two three-way 19 and a vacuum tube 20 for connection; the first port of one of the three-way 19 is connected to the vacuum gauge through the vacuum tube 20, and the second port is connected to the needle valve 16 through the vacuum tube 20. The three ports are connected to the first port of the second tee 09 through the vacuum tube 20; the second port of the second tee 19 is connected to the vacuum pump 21 through the vacuum tube 20, and the third port of the second tee is connected to the mass spectrometer 22 through the vacuum tube 20. .

The implementation process of using the device of the invention to realize the measurement of the active product of the dielectric barrier discharge plasma under atmospheric pressure mainly includes air injection, plasma generation by the dielectric barrier discharge, vacuum pressure, and mass spectrometry measurement.

Air injection process: use the atmospheric pressure air pump 1 to generate the atmospheric pressure air flow, flow the atmospheric pressure air flow through the air pipeline 2 through the flow meter 3, and inject it into the dielectric barrier discharge device through the air inlet 4, and use the flow meter to monitor and control the air flow .

The process of generating plasma by dielectric barrier discharge: the atmospheric pressure air flow is injected into the discharge chamber 5 of the dielectric barrier discharge device, the high voltage discharge power supply 7 provides energy for the dielectric barrier discharge device, and the high voltage The discharge ionizes the air to generate plasma, and the active products in the plasma flow out of the discharge chamber 5 along with the air, and are injected into the vacuum pipeline.

Vacuum compression process: the function of the vacuum pumping tube 15 is to introduce the active substances in the plasma into the vacuum tube 20, one end of which is connected to the air outlet 6 of the dielectric barrier discharge device, and the other end is connected to the first three-way 19. The first three-way 19 is connected to an exhaust pipe 17 for discharging excess gas, the other end of the first three-way 19 is connected to a needle valve 16 for controlling the total amount of plasma active substances entering the vacuum tube 20, and the needle valve 16 is connected to the second three-way 19 , one end of the second three-way 19 is connected to the vacuum gauge 18, and the other end is connected to the vacuum tube 20. The function of the vacuum gauge 18 is to display the air pressure in the vacuum tube 20 in real time, and provide data for adjusting the needle valve 16. The vacuum pump 21 communicates with the vacuum tube through the third three-way 19. 20 is connected, the function of the vacuum pump 21 is to evacuate, and cooperate with the needle valve 16 and the vacuum gauge 18 to adjust the air pressure in the vacuum tube 20, so that the air pressure in the vacuum tube 20 is more than 6 orders of magnitude lower than the atmospheric pressure, which is in the working pressure range of the mass spectrometer 22. Inside.

Mass spectrometry measurement process: the active substance in the vacuum tube diffuses into the mass spectrometer 22, and the mass spectrometer 22 is used to complete the measurement of the type and component concentration of the active product. The plasma active products that can be measured in the present invention include, but are not limited to, ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, nitrous oxide, and nitrous oxide. The invention realizes real-time online synchronous measurement of various active products of dielectric barrier discharge plasma under atmospheric pressure.

Example 2

Referring to FIG. 2, FIG. 3, FIG. 4 and FIG. 6, the device for measuring the active product of dielectric barrier discharge plasma under atmospheric pressure conditions in this embodiment is the same as that in Example 1 unless otherwise specified.

In the device for measuring active products of dielectric barrier discharge plasma under atmospheric pressure, the atmospheric pressure air pump and the flowmeter of this embodiment allow air to freely diffuse into the discharge cavity through the air inlet of the dielectric barrier discharge device.

The implementation process of using the device of the invention to realize the measurement of the active product of the dielectric barrier discharge plasma under atmospheric pressure mainly includes air injection, plasma generation by the dielectric barrier discharge, vacuum pressure, and mass spectrometry measurement.

Air inflow process: atmospheric pressure air is injected into the dielectric barrier discharge device through the air inlet 4;

The process of generating plasma by dielectric barrier discharge: the atmospheric pressure air is freely diffused into the discharge chamber 5 of the dielectric barrier discharge device, and the high-voltage discharge power supply 7 provides energy for the dielectric barrier discharge device, and the process is carried out in the discharge chamber 5 The high-voltage discharge ionizes the air to generate plasma, and the active products in the plasma flow out of the discharge chamber 5 along with the air and are injected into the vacuum pipeline.

Vacuum compression process: the function of the vacuum pumping tube 15 is to introduce the active substances in the plasma into the vacuum tube 20, one end of which is connected to the air outlet 6 of the dielectric barrier discharge device, and the other end is connected to the first three-way 19. The first three-way 19 is connected to an exhaust pipe 17 for discharging excess gas, the other end of the first three-way 19 is connected to a needle valve 16 for controlling the total amount of plasma active substances entering the vacuum tube 20, and the needle valve 16 is connected to the second three-way 19 , one end of the second three-way 19 is connected to the vacuum gauge 18, and the other end is connected to the vacuum tube 20. The function of the vacuum gauge 18 is to display the air pressure in the vacuum tube 20 in real time, and provide data for adjusting the needle valve 16. The vacuum pump 21 communicates with the vacuum tube through the third three-way 19. 20 is connected, the function of the vacuum pump 21 is to evacuate, and cooperate with the needle valve 16 and the vacuum gauge 18 to adjust the air pressure in the vacuum tube 20, so that the air pressure in the vacuum tube 20 is more than 6 orders of magnitude lower than the atmospheric pressure, which is in the working pressure range of the mass spectrometer 22. Inside.

Mass spectrometry measurement process: the active substance in the vacuum tube diffuses into the mass spectrometer 22, and the mass spectrometer 22 is used to complete the measurement of the type and component concentration of the active product. The plasma active products that can be measured in the present invention include, but are not limited to, ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, nitrous oxide, and nitrous oxide. The invention realizes real-time online synchronous measurement of various active products of dielectric barrier discharge plasma under atmospheric pressure.

The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the principles of the present invention should be included within the protection scope of the present invention.

Claims (9)

1. The utility model provides an active resultant measuring device of atmospheric pressure dielectric barrier discharge plasma which characterized in that, includes dielectric barrier discharge device, high-pressure discharge power, needle valve, vacuometer, vacuum pump and mass spectrograph:

the high-voltage discharge power supply is used for providing discharge energy for the dielectric barrier discharge device;

the dielectric barrier discharge device comprises a high-voltage electrode, a barrier medium, a low-voltage electrode, an air inlet and an air outlet, wherein the high-voltage discharge power supply is connected with the high-voltage electrode and the low-voltage electrode, the barrier medium is arranged between the high-voltage electrode and the low-voltage electrode, a gap is reserved between the barrier medium and the high-voltage electrode and/or the low-voltage electrode, the gap is used as a discharge cavity, air enters the discharge cavity from the air inlet after the high-voltage discharge power supply is switched on and then discharges in the discharge cavity, the air is ionized in the discharge cavity to generate plasma, and the plasma is discharged out of the dielectric barrier discharge device through the air outlet;

the inlets of the vacuum pump, the vacuum gauge and the mass spectrometer are respectively connected with a vacuum pipeline; the vacuum pipeline is connected with an air outlet of the medium barrier discharge device through the needle valve and a first tee joint; the first port of the first tee joint is connected with the gas outlet of the dielectric barrier discharge device, the second port of the first tee joint is connected with the exhaust pipe, the third port of the first tee joint is connected with one end of the needle valve, and the other end of the needle valve is connected with the vacuum pipeline.

2. The atmospheric-pressure dielectric-barrier discharge plasma active product measuring device according to claim 1, wherein the structure of the dielectric-barrier discharge device is a coaxial cylindrical structure, or a flat plate-shaped structure, or a pin plate-shaped structure, or a wire barrel-shaped structure.

3. The atmospheric-pressure dielectric barrier discharge plasma active product measuring device according to claim 2, wherein the dielectric barrier discharge device is a coaxial cylindrical structure and comprises an upper plug, a lower plug, a high-voltage electrode, a barrier dielectric and a low-voltage electrode, the high-voltage electrode is arranged in the center of the dielectric barrier discharge device, the barrier dielectric made of insulating materials is wrapped outside the high-voltage electrode, and the upper end of the high-voltage electrode penetrates through the upper plug and is connected with the high-voltage discharge power supply; the low-voltage electrode is made of metal, surrounds the blocking medium and is grounded, and a gap is reserved between the blocking medium and the low-voltage electrode to be used as a discharge cavity; the upper plug is provided with an air inlet of the dielectric barrier discharge device, the lower plug is provided with an air outlet of the dielectric barrier discharge device, and the air inlet and the air outlet of the dielectric barrier discharge device are communicated with the discharge cavity; the upper plug and the lower plug close the discharge cavity.

4. The atmospheric-pressure dielectric-barrier discharge plasma active product measurement device of claim 1, wherein the vacuum line comprises a second tee, a third tee, and a vacuum line for connection; the first port of the second tee joint is connected with the vacuum gauge through a vacuum tube, the second port of the second tee joint is connected with the needle valve through a vacuum tube, and the third port of the second tee joint is connected with the first port of the third tee joint through a vacuum tube; and a second port of the third tee is connected with a vacuum pump through a vacuum tube, and a third port of the third tee is connected with a mass spectrometer through a vacuum tube.

5. The atmospheric-pressure dielectric barrier discharge plasma activity product measuring device according to any one of claims 1 to 4, further comprising an atmospheric air pump and a flow meter, wherein the atmospheric air pump is connected with an inlet of the flow meter through a pipeline, and an outlet of the flow meter is connected with an air inlet of the dielectric barrier discharge device through a pipeline.

6. An atmospheric pressure dielectric barrier discharge plasma activity product measuring method based on the device of one of claims 1 to 4, characterized by comprising:

step S1: atmospheric pressure air flow flows into a discharge cavity of the dielectric barrier discharge device, a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;

step S2: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;

step S3: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;

step S4: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.

7. The method of claim 6, wherein the active products in the plasma comprise ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, dinitrogen trioxide, or dinitrogen monoxide.

8. A method for measuring the plasma activity products of atmospheric dielectric barrier discharge is based on the device of claim 5,

step S1: generating an atmospheric air flow by using the atmospheric air pump, and monitoring and controlling the air flow by using the flow meter;

step S2: injecting the atmospheric pressure air flow into a discharge cavity of the dielectric barrier discharge device, wherein a high-voltage discharge power supply provides energy for the dielectric barrier discharge device, and high-voltage discharge is carried out in the discharge cavity to ionize air to generate plasma;

step S3: active products in the plasma flow out of the discharge cavity along with air and are injected into a vacuum pipeline;

step S4: the air pressure in the vacuum pipeline is adjusted by using a needle valve and a vacuum pump, and the air pressure is monitored by using a vacuum gauge, so that the air pressure in the vacuum pipeline is in the working air pressure range of the mass spectrometer;

step S5: the active substance in the vacuum tube diffuses into the mass spectrometer, and the species and component concentration of the active product are measured by the mass spectrometer.

9. The method of claim 8, wherein the active products in the plasma include ozone, oxygen atoms, nitrogen atoms, nitric oxide, nitrogen dioxide, dinitrogen trioxide, or dinitrogen monoxide.

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