CN103245655B - A kind of experimental provision obtaining Large-Area-Uniform discharge plasma - Google Patents
A kind of experimental provision obtaining Large-Area-Uniform discharge plasma Download PDFInfo
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Abstract
Obtain an experimental provision for Large-Area-Uniform discharge plasma, belong to technical field of plasma, be made up of bipolarity nanosecond pulse power supply, reactor, spininess-plate type electrode, gas distributing system, spectral measurement system and discharge measuring system; Bipolarity nanosecond, burst pulse power drives was installed in reactor between spininess-plate type electrode air and other Dielectric Barrier Discharge in Gas Mixtures, and mixed gas is inputted in reactor by gas distributing system.The photon information of spectral measurement system real-time collecting plasma discharge, and be input to computing machine and carry out spectral analysis.The sparking voltage of discharge measuring system real-time collecting high voltage nanosecond pulse power supply and electric current, and shown by digital oscilloscope.The present invention adopts bipolarity nanosecond burst pulse power supply, without creating large-area discharge plasma under magnetic fields; The plasma produced is uniform, disperse; In the plasma produced, electron density is high, capacity usage ratio is high, it is low to consume energy, discharge process is easy to control.<!--1-->
Description
Technical field
The invention belongs to technical field of plasma, particularly relate to one and utilize bipolarity nanosecond pulse power supply to drive under spininess-plate type electrode structure, in air and mixed gas, obtain the uniform dielectric barrier discharge plasma technique of large area low temperature.
Technical background
Traditionally, dielectric barrier discharge plasma is driven by AC power, under AC power drives, dielectric barrier discharge plasma realizes evenly in atmospheric air, the condition of diffuse discharge is very harsh, is easily converted into the discharge mode such as spark, arc light, and gas temperature is higher, capacity usage ratio is low, and serious to material surface infringement, operating cost is high, shortcomings of these electric discharges make it in commercial Application, be subject to great restriction, seriously have impact on its application industrially.
And in nanosecond pulse discharge, because nanosecond pulse has precipitous pulse voltage rising edge and the comparatively feature such as shortest pulse duration, electronics is farthest accelerated in zooming electric field, and therefore in nanosecond pulse discharge there is larger difference in the dynamics of electronics and traditional alternating current discharge.Nanosecond pulse discharge can obtain higher electron temperature and energy utilization efficiency under the same conditions.Simultaneously, the shorter single pulse duration can make electric discharge in extinguishing in time of discharging in local thermodynamic equilibrium state transition process, be beneficial to stability and the non-equilibrium thermodynamics of controlled discharge, be easier in atmospheric air, realize stable Uniform Discharge, therefore, nanosecond pulse discharge plasma has that high energy electron density is large, mean electron energy is high, produces chemically-active particle and VUV generation efficiency advantages of higher.Adopt spininess-plate type electrode structure can produce large-area discharge plasma simultaneously, by the advantage in conjunction with nanosecond pulse discharge and spininess-plate type electrode structure, under atmospheric pressure can produce the low temperature discharge plasma of Large-Area-Uniform, it is in food processing, there is important application prospect the aspects such as material surface process, thin film deposition, microorganism mutagenesis, potable water sterilizing, toxic and harmful remove, enjoy domestic and international laboratory to pay attention to.Utilize under spininess-plate type electrode structure bipolarity nanosecond pulse power supply come drive medium barrier discharge can obtain in air and other mixed gass Large-Area-Uniform electric discharge low temperature discharge plasma, in fields such as material surface process, thin film deposition, microorganism mutagenesis, potable water sterilizings, all there is important commercial value and wide prospects for commercial application.
Patent CN1927408A solves on the basis of introducing parallel magnetic field, and the dielectric barrier discharge plasma utilizing one pole nanosecond pulse power supply to produce removes harmful gas, and purification efficiency significantly improves.But Problems existing is the plasma that (1) produces is filament-like discharges; (2) diagnostic method of plasma characteristics is not specifically introduced; (3) do not have to introduce the discharge plasma produced under without externally-applied magnetic field effect.Patent CN1559651A and CN2500026Y solves the plasma for purification harmful gas produced with corona discharge pulse, but Problems existing is corona discharge to be only occurred near sharp electrode, only in a very thin corona layer, produce strong electric field, the mean electron energy produced is at about 3eV, because its mean electron energy is low, discharge plasma volume is little, strength of discharge is more weak, electron density is lower, the active particle produced at discharge space and the number of free radical few, effective process space is little, therefore, what these were serious have impact on the purification efficiency of plasma to harmful gas, also the practical ranges of plasma is made to be limited by very large.
Summary of the invention
Little in order to solve plasma discharging bulk area, discharge uneven, capacity usage ratio is low and lack real-time diagnosis problem to plasma discharging bulk properties, the invention provides a kind of experimental provision obtaining Large-Area-Uniform discharge plasma, be made up of bipolarity nanosecond pulse power supply, reactor, spininess-plate type electrode, gas distributing system, spectral measurement system and discharge measuring system.
Bipolarity nanosecond pulse power supply can be submitted for producing identical burst pulse voltage waveform in positive negative direction; Pulse rise time is about 20ns, and pulsewidth is about 60ns, peak impulse voltage 0-60kV, continuously adjustabe within the scope of pulse repetition rate 0-400Hz.
Spininess-plate type electrode is made up of top electrode, multistylus electrode, plate electrode, bottom electrode and dieelctric sheet; Top electrode, multistylus electrode, plate electrode and bottom electrode are all made up of stainless steel material; Plate electrode is horizontal stationary state, and is connected with bottom electrode; Bottom electrode is by wire dead earthing; Dieelctric sheet covers the upper surface of plate electrode; Multistylus electrode is fixed on the below of top electrode, and needle point down; Multistylus electrode is relative with dieelctric sheet, forms discharging gap; The gap of the needle point distance dieelctric sheet of multistylus electrode is adjustable within the scope of 0-30mm; The other end of top electrode is connected with the output terminal of bipolarity nanosecond pulse power supply.
Reactor is a upper end face is insulating material, surrounding and bottom surface are the hydrostatic column of the sealing that stainless steel is made, spininess-plate type electrode is placed in the central authorities of reactor, and top electrode is connected with the output terminal of bipolarity nanosecond pulse power supply through the insulation end face of reactor; Bottom electrode is through the bottom surface of reactor, and dead earthing; The elevation places such as reactor side and discharging gap have can for observing the circular zero diopter quartz window discharged, and whole reactor impermeability is fine, and except quartz window, the even blacking of all inwalls is to prevent parasitic light on the impact of spectral measurement; Sidewall of reactor is provided with air inlet pipeline with air valve and outlet pipe.
Gas distributing system is by the gases used discharging gap passed through in air inlet pipeline input reactor; Unnecessary gas is discharged by the outlet pipe of gas distributing system.
Spectral measurement system, by the photon information of plasma discharge between quartz window real-time collecting spininess-plate type electrode of being arranged on reactor, and changes into numerical information and is input to computing machine and carries out spectral analysis by optical information.
Discharge measuring system, the sparking voltage of real-time collecting bipolarity nanosecond pulse power supply and electric current, and shown by digital oscilloscope.
Bipolarity nanosecond pulse power supply, spectral measurement system and discharge measuring system all need with electro-magnetic shielding cover shielding, all electro-magnetic shielding cover shell dead earthings.
Gas distributing system controls meter, air inlet pipeline, outlet pipe, air valve and multiple gas cylinder by mass rate and forms; Multiple gas cylinder with air valve being communicated to mass rate controls in meter, control to count with mass rate with air inlet pipeline one end of air valve and be communicated with, the other end penetrates the edge between multistylus electrode and dieelctric sheet arriving multi-needle-to-plate electrode in reactor and forms puff prot; Outlet pipe with air valve is placed in the top with the reactor of air inlet pipeline opposite side.
Discharge measuring system is made up of digital oscilloscope, voltage probe circuit and current probe circuit; Be connected on top electrode by voltage probe circuit one end, the other end is connected on digital oscilloscope; Be connected on the wire between bottom electrode and ground connection by current probe circuit one end, the other end is connected on digital oscilloscope.
Spectral measurement system is made up of lens, fibre-optical probe, optical fiber, High Resolution Grating Monochromator, charge-coupled image sensor and computing machine; On support outside the quartz window that lens are fixed on reactor, fibre-optical probe is fixed on the three-D displacement platform of lens opposite side, make it just to discharging gap, regulate the position of lens center point and fibre-optical probe simultaneously, make the needle point of multistylus electrode middle needle, lens center point and fibre-optical probe three on same level straight line; Fibre-optical probe collects the light signal after being assembled by lens, and carries out light splitting through Optical Fiber Transmission to High Resolution Grating Monochromator, and the monochromatic light signal after light splitting changes digital signal into through charge-coupled image sensor, finally by computer acquisition process.
In spininess-plate type electrode, the pin electrode number of multistylus electrode can increase according to the demand of reality or reduce and form the pattern of the electrode of arbitrary shape, the distance simultaneously also between adjustable markingoff pin and pin.
Dieelctric sheet can be quartz, pottery or any one of teflon.
Multistylus electrode not only can regulate all pin electrodes and bottom electrode to keep identical distance differing needles electrode and bottom electrode can also keep different distances simultaneously.
The watch window of reactor can have 1 to 4.
The invention has the beneficial effects as follows: (1) adopts bipolarity nanosecond pulse power supply, under without externally-applied magnetic field effect, create large-area discharge plasma; (2) plasma produced is uniform, disperse; (3) in the plasma produced, electron density is high, capacity usage ratio is high, it is low to consume energy, discharge process is easy to control.(4) can be diagnosed uniform plasma bulk properties by High Resolution Grating Monochromator and digital oscilloscope, to be applied in better in actual industrial.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present invention.
Fig. 2 is the distribution plan of multistylus electrode pin, is made up of the pattern of two seven-star hexagonal structures 13 pins.
In figure: 1. bipolarity nanosecond pulse power supply; 2. top electrode; 3. voltage probe circuit; 4. digital oscilloscope; 5. mass rate controls meter; 6. air inlet pipeline; 7. air valve; 8. gas cylinder; 9. reactor; 10. multistylus electrode; 11. outlet pipes; 12. plate electrodes; 13. dieelctric sheets; 14. lens; 15. fibre-optical probes; 16. bottom electrodes; 17. current probe circuits; 18. optical fiber; 19. computing machines; 20. High Resolution Grating Monochromators; 21. charge-coupled image sensors; 22. electro-magnetic shielding covers.
Specific embodiments
Below in conjunction with accompanying drawing and specific embodiments, the present invention is further described.
Obtain an experimental provision for Large-Area-Uniform discharge plasma, be made up of bipolarity nanosecond pulse power supply 1, reactor 9, spininess-plate type electrode, gas distributing system, spectral measurement system and discharge measuring system.
Bipolarity nanosecond pulse power supply 1 can be submitted for producing identical burst pulse voltage waveform in positive negative direction; Pulse rise time is about 20ns, and pulsewidth is about 60ns, peak impulse voltage 0-60kV, continuously adjustabe within the scope of pulse repetition rate 0-400Hz.
Spininess-plate type electrode is made up of top electrode 2, multistylus electrode 10, plate electrode 12, bottom electrode 16 and dieelctric sheet 13; Top electrode 2, multistylus electrode 10, plate electrode 12 and bottom electrode 16 are all made up of stainless steel material; Plate electrode 12 is horizontal stationary state, and is connected with bottom electrode 16; Bottom electrode 16 is by wire dead earthing; Dieelctric sheet 13 covers the upper surface of plate electrode 12; Multistylus electrode 10 is fixed on the below of top electrode, and needle point down; Multistylus electrode 10 is relative with dieelctric sheet 13, forms discharging gap; The gap of the needle point distance dieelctric sheet 13 of multistylus electrode 10 is adjustable within the scope of 0-30mm; The other end of top electrode 2 is connected with the output terminal of bipolarity nanosecond pulse power supply 1.The needle tip of multistylus electrode 10 is by rounding, and tip diameter is about 0.8mm, and the distance between pin and pin is 10mm; The stainless steel disk of plate electrode 12 to be diameters be 80mm, its thickness of stainless steel disc surfaces overwrite media sheet 13 is 1mm, and diameter is 100mm.
Reactor 9 is upper end faces is insulating material, surrounding and bottom surface are the hydrostatic column of the sealing that stainless steel is made, spininess-plate type electrode is placed in the central authorities of reactor 9, and top electrode 2 is connected with the output terminal of bipolarity nanosecond pulse power supply 1 through the insulation end face of reactor 9; Bottom electrode 16 is through the bottom surface of reactor 9, and dead earthing; The elevation places such as reactor 9 side and discharging gap have can for observing the circular zero diopter quartz window discharged, and whole reactor 9 impermeability is fine, and except quartz window, the even blacking of all inwalls is to prevent parasitic light on the impact of spectral measurement; Reactor 9 sidewall is provided with air inlet pipeline 6 and outlet pipe 11.
Gas distributing system is by the gases used discharging gap passed through in air inlet pipeline 6 input reactor 9; Unnecessary gas is discharged by the outlet pipe 11 of gas distributing system.
Spectral measurement system, by the photon information of plasma discharge between quartz window real-time collecting spininess-plate type electrode of being arranged on reactor, and changes into numerical information and is input to computing machine 19 and carries out spectral analysis by optical information.
Discharge measuring system, the sparking voltage of real-time collecting bipolarity nanosecond pulse power supply 1 and electric current, and shown by digital oscilloscope 4.
Bipolarity nanosecond pulse power supply 1, spectral measurement system and discharge measuring system all need to shield with electro-magnetic shielding cover 22, all electro-magnetic shielding cover 22 shell dead earthings.
Gas distributing system controls meter 5, air inlet pipeline 6, outlet pipe 11, air valve 7 and multiple gas cylinder 8 by mass rate and forms; Multiple gas cylinder 8 with air valve 7 being communicated to mass rate controls in meter 5, air inlet pipeline 6 one end with air valve 7 controls meter 5 with mass rate and is communicated with, and the other end penetrates the edge between multistylus electrode 10 and dieelctric sheet 13 arriving multi-needle-to-plate electrode in reactor 9 and forms puff prot; Outlet pipe 11 with air valve 7 is placed in the top with the reactor 9 of air inlet pipeline opposite side.Gas in gas cylinder 8 can be N
2gas, He gas, O
2gas and Ar gas; Gas distributing system utilizes mass rate to control meter 5 measurement gas flow, reactor is entered by mixing as working gas using gases used, then discharging gap is entered equably by a puff prot, in whole experiment, to remain on 200ml/min constant for gas flow, air valve 7 controls passing into of gas, the N used in experiment
2gas, He gas, O gas
2the high-purity gas of 99.999% is with the concentration of Ar gas.The air valve at outlet pipe 11 place is in open mode.If working gas is air, directly can test in atmosphere, not need distribution above to operate.
Discharge measuring system is made up of digital oscilloscope 4, voltage probe circuit 3 and current probe circuit 17; Be connected on top electrode 2 by voltage probe circuit 3 one end, the other end is connected on digital oscilloscope 4; Be connected on the wire between bottom electrode 16 and ground connection by current probe circuit 17 1 end, the other end is connected on digital oscilloscope 4.What the present invention adopted is the digital oscilloscope model that Tektronix company of the U.S. produces is TDS3052B; Voltage probe circuit P6015A, 1000 × 3.0pF, 100M Ω, 1:1000 and current probe circuit TCP312.
Spectral measurement system is made up of lens (14), fibre-optical probe (15), optical fiber 18, High Resolution Grating Monochromator 20, charge-coupled image sensor 21 and computing machine 19; On support outside the quartz window that lens 14 are fixed on reactor 9, fibre-optical probe 15 is fixed on the three-D displacement platform of lens 14 opposite side, make it just to discharging gap, regulate the position of lens 14 central point and fibre-optical probe 15 simultaneously, make the needle point of multistylus electrode 10 middle needle, lens 14 central point and fibre-optical probe 15 three on same level straight line; Fibre-optical probe 15 collects the light signal after being assembled by lens 14, and transfers to High Resolution Grating Monochromator 20 through optical fiber 18 and carry out light splitting, and the monochromatic light signal after light splitting changes digital signal into through charge-coupled image sensor 21, finally by computing machine 19 acquisition process.The diameter of lens 14 is 50mm, and focal length is 100mm.High Resolution Grating Monochromator model is: AndorSR-750i.Grating 2400/mm, its blaze wavelength is 300nm.There is a large amount of excited state particles in the plasma, photon can be launched in the process that excited state particle is sent out at de excitation, the energy of photon is relevant with the kind of this particle and involved energy level, by detecting the spectrum of these photons, the substance classes that exists in plasma and residing state thereof can be judged.
In spininess-plate type electrode, the pin electrode number of multistylus electrode 10 can increase according to the demand of reality or reduce and form the pattern of the electrode of arbitrary shape, the distance simultaneously also between adjustable markingoff pin and pin.
Dieelctric sheet 13 can be quartz, pottery or any one of teflon.
Multistylus electrode 10 not only can regulate all pin electrodes and bottom electrode to keep identical distance differing needles electrode and bottom electrode can also keep different distances simultaneously.
Install and can have 1 to 4 with the watch window of reactor 9 sidewall.
Bipolarity nanosecond pulse power supply 1, spectral measurement system and discharge measuring system all need to shield with electro-magnetic shielding cover 22, all electro-magnetic shielding cover 22 shell dead earthings.
A kind of using method obtaining the experimental provision of Large-Area-Uniform discharge plasma provided by the present invention is as follows:
Step 1: before passing into experimental gas, first checks the impermeability of gas circuit, is then first utilized by reactor 9 mechanical pump to carry out vacuumizing process.The flow from the gas with various in different gas cylinder 8 measured by recycling mass rate control meter 5, the mixed gas of the variable concentrations required for proportioning test, passes into discharging gap by mixed gas through puff prot by air inlet pipeline 6 more uniformly by mixed gas input reactor 9.In whole experiment, to remain on 200ml/min constant for mixed gas flow, if working gas is air, directly can test in atmosphere, not need distribution operation steps above.
Step 2: after check circuit is errorless, opens digital oscilloscope 4, High Resolution Grating Monochromator 20 and computing machine 19, the voltage and current of digital oscilloscope 4 is transferred to maximum range; High Resolution Grating Monochromator 20 is transferred to the 3rd grating, i.e. grating 2400/mm by the Solis software installed on a computer 19, blaze wavelength is 300nm, also can select the grating of 500/mm and 1200/mm as required.Time shutter is 1s, and measurement range is that after 200-900nm. debugging, whether inspection apparatus is working properly, and the window of other reactor 9 need not observed with light screening material covers.
Step 3: after inspect by instrument is normal, open bipolarity nanosecond pulse power supply 1, first setting pulse repetition rate is 150Hz, then peak impulse voltage is adjusted to 30kV, specifically can regulate power parameter according to actual needs, plasma discharge starts, and can produce large-area homogeneous plasma between multistylus electrode 10 and dieelctric sheet 13.Then the current-voltage waveform figure of discharge plasma and the emission spectrum of plasma is recorded respectively by digital oscilloscope 4 and computing machine 19.After record, respectively peak impulse voltage and pulse repetition rate are adjusted to 0, close bipolarity nanosecond pulse power supply 1, electric discharge terminates.
Step 4: current-voltage waveform figure and the emission spectrum of being analyzed discharge plasma by computing machine 19, can obtain plasma power, the important parameter such as active particle composition that power density, energy consumption, electron density, rotational temperature, vibration temperature, electron temperature and this electric discharge produce and concentration.Some key properties of produced plasma can be reflected intuitively by these parameters.By Canon 550D digital camera shooting electric discharge photo, can also can judge the area of discharge plasma and the homogeneity of electric discharge intuitively from photo.
Claims (5)
1. obtain an experimental provision for Large-Area-Uniform discharge plasma, be made up of bipolarity nanosecond pulse power supply (1), reactor (9), electrode, gas distributing system, spectral measurement system and discharge measuring system; Bipolarity nanosecond pulse power supply (1) can be submitted for producing identical burst pulse voltage waveform in positive negative direction; Pulse rise time is 20ns, and pulsewidth is 60ns, peak impulse voltage 0-60kV, continuously adjustabe within the scope of pulse repetition rate 0-400Hz; It is characterized in that: electrode adopts spininess-plate type electrode, is made up of top electrode (2), multistylus electrode (10), plate electrode (12), bottom electrode (16) and dieelctric sheet (13); Top electrode (2), multistylus electrode (10), plate electrode (12) and bottom electrode (16) are all made up of stainless steel material; Plate electrode (12) is horizontal stationary state, and is connected with bottom electrode (16); Bottom electrode (16) is by wire dead earthing; Dieelctric sheet (13) covers the upper surface of plate electrode (12); Multistylus electrode (10) is fixed on the below of top electrode, and needle point down; Multistylus electrode (10) is relative with dieelctric sheet (13), forms discharging gap; The gap of needle point distance dieelctric sheet (13) of multistylus electrode (10) is adjustable within the scope of 0-30mm; The other end of top electrode (2) is connected with the output terminal of bipolarity nanosecond pulse power supply (1).
2. a kind of experimental provision obtaining Large-Area-Uniform discharge plasma according to claim 1, it is characterized in that, in spininess-plate type electrode, the pin electrode number of multistylus electrode (10) can increase according to the demand of reality or reduce and form the pattern of the electrode of arbitrary shape, the distance simultaneously also between adjustable markingoff pin and pin.
3. a kind of experimental provision obtaining Large-Area-Uniform discharge plasma according to claim 1, it is characterized in that the needle tip of multistylus electrode (10) is by rounding, tip diameter is 0.8mm, and the distance between pin and pin is 10mm; The stainless steel disk of plate electrode (12) to be diameter be 80mm, stainless steel disc surfaces overwrite media sheet (13) its thickness is 1mm, and diameter is 100mm.
4. a kind of experimental provision obtaining Large-Area-Uniform discharge plasma according to claim 1, is characterized in that, dieelctric sheet (13) can be quartz, pottery or any one of teflon.
5. a kind of experimental provision obtaining Large-Area-Uniform discharge plasma according to claim 1, it is characterized in that, multistylus electrode (10) not only can regulate all pin electrodes and bottom electrode to keep identical distance differing needles electrode and bottom electrode can also keep different distances simultaneously.
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