CN105484011A - Apparatus and method for improving hydrophilicity of aramid fiber by using homogeneous atmospheric-pressure discharge - Google Patents

Apparatus and method for improving hydrophilicity of aramid fiber by using homogeneous atmospheric-pressure discharge Download PDF

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CN105484011A
CN105484011A CN201510800919.3A CN201510800919A CN105484011A CN 105484011 A CN105484011 A CN 105484011A CN 201510800919 A CN201510800919 A CN 201510800919A CN 105484011 A CN105484011 A CN 105484011A
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electrode
line
aramid fabric
probe
discharge
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CN105484011B (en
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王文春
袁皓
杨德正
刘志杰
赵紫璐
张丽
王森
张帅
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Dalian University of Technology
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    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06MTREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
    • D06M10/025Corona discharge or low temperature plasma
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06MTREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2101/00Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
    • D06M2101/16Synthetic fibres, other than mineral fibres
    • D06M2101/30Synthetic polymers consisting of macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M2101/34Polyamides
    • D06M2101/36Aromatic polyamides
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06MTREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2200/00Functionality of the treatment composition and/or properties imparted to the textile material
    • D06M2200/10Repellency against liquids
    • D06M2200/11Oleophobic properties

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Textile Engineering (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention provides an apparatus and method for improving the hydrophilicity of an aramid fiber by using homogeneous atmospheric-pressure discharge, belonging to the technical field of atmospheric low temperature plasma. The apparatus comprises a bipolar nanosecond pulse power supply (1), a wire-to-plate electrode, an electrical measuring system, a spectral measurement system and an aramid fiber fabric treating device. The bipolar nanosecond pulse power supply (1) drives the wire-to-plate electrode to undergo dielectric barrier discharge; the characteristics of discharge plasma are analyzed by using the electrical measuring system and the spectral measurement system; discharge parameters are changed to obtain uniform discharge plasma; and the apparatus and method are used for treating an aramid fiber fabric (7) and reducing the water contact angle of the aramid fiber fabric (7).

Description

Homogenous atmospheric-pressure discharge is utilized to improve the hydrophilic device and method of aramid fiber
Technical field
Homogenous atmospheric-pressure discharge is utilized to improve the hydrophilic device and method of aramid fabric, belong to technical field of plasma, particularly relate to one utilizes bipolarity high voltage nanosecond pulse power supply to drive under large scale line-plate type electrode structure, the low Uniform Discharge device of large area is obtained in atmospheric pressure environment, and use discharge plasma to process aramid fabric, thus improve its hydrophilic technology.
Background technology
Aramid fabric full name is " PPTA ", it is a kind of novel chain polymer composite, there is high crystallization, high strength, high-modulus and the feature such as high temperature resistant, be widely used in recent years in the industries such as Aeronautics and Astronautics, automobile and shipbuilding.But the surface of aramid fabric, because high crystallization and unusual light, which results in its hydrophily poor, have impact on its application industrially.Improve the hydrophilic conventional method of aramid fabric mainly by chemical technology, but chemical reagent cost is high, efficiency is low, and can to environment.Comparatively speaking surface modification is more reliable, conveniently, cost is lower, and does not pollute environment to use plasma to carry out aramid fabric.
The means obtaining plasma have a lot, and wherein dielectric barrier discharge is in atmospheric pressure, obtain the most general a kind of mode of low temperature plasma.Dielectric barrier discharge plasma has three kinds of discharge modes, is uniform discharge mode, filament-like discharges pattern and contribution-demanding model pattern respectively.Wherein filament-like discharges is in streamer breakdown process, and the current density in discharge channel and energy density are all very high, is easy to attacking material surface, is therefore unsuitable for process fibrous material.Comparatively speaking, Uniform Discharge, because of moderate power density, uniformly Energy distribution and without advantages such as obvious thread passages, is more suitable for carrying out aramid fabric surface modification.But traditional dielectric barrier discharge uses sine ac power supply to drive, under atmospheric air environment, electric discharge is very easy to change from uniform pattern to nematic mode, this transformation have impact on dielectric barrier discharge application industrially, in atmospheric air, therefore obtains uniform discharge plasma extremely important.
In recent years, the dielectric barrier discharge that nanosecond pulse power supply drives is considered to be in atmospheric air can effectively suppress to discharge and is changed to filament-like discharges, spark discharge and arc discharge mode by uniform discharge mode and obtain a kind of effective means of Uniform Discharge plasma.In nanosecond pulse discharge, because nanosecond pulse has precipitous pulse voltage rising edge and the comparatively feature such as shortest pulse duration, energy is inputted to obtain in the electric field for electronics farthest to accelerate instead of heated air.Therefore nanosecond pulse dielectric barrier discharge is compared to interchange dielectric barrier discharge, have plasma temperature lower, produce the advantages such as the higher and energy ezpenditure of active particle efficiency is lower, have good application prospect improving aramid fabric surface hydrophilicity field.
Patent CN104853513A provides a kind of Large-Area-Uniform dielectric barrier discharge device of tubular pole structure, this device can under atmospheric pressure produce Large-Area-Uniform plasma, but this electric discharge needs could produce Uniform Discharge under the environment of pure nitrogen gas, use cost is higher, have impact on its application industrially.Patent CN104831519A solves under atmospheric pressure by dielectric barrier discharge process thread material, but its tubular pole structure used can only process single fiber, efficiency is lower, and discharge mode is filament-like discharges, can cause ablation, Durchgangshohle equivalent damage to material surface, therefore practical ranges is limited by very large.Patent CN104694733A uses plasma discharge process metal surfaces, this patent applies nanosecond pulse dielectric barrier discharge, obtain uniform plasma, patent mesohigh electrode and ground electrode are alternately arranged, be more conducive to form volume discharge instead of creeping discharge, be unsuitable for the process of the textiless such as aramid fabric.The dielectric barrier discharge that the present invention utilizes nanosecond pulse power supply to drive, can obtain uniform discharge plasma under atmospheric conditions; Use line-plate type electrode structure ensure that etc. in vitro area is enough large simultaneously, is conducive to large-area treatment aramid fabric; Devise micromatic setting in online-plate type electrode, convenient adjustment, solves traditional line-plate type electrode and is not easy leveling, affects the problem of Uniform discharge.
Summary of the invention
In order to obtain Large-Area-Uniform discharge plasma under atmospheric air environment, and for effectively improving aramid fabric surface hydrophilicity, the invention provides one utilizes homogenous atmospheric-pressure discharge to improve the hydrophilic device of aramid fabric, forms primarily of line-plate type electrode, electrical measurement system and spectral measurement system.
Line electrode is fixed on by attaching parts directly over the central axis of the plate electrode of level, and is parallel to plate electrode; The High voltage output of line electrode and bipolarity nanosecond pulse power supply is interconnected by attaching parts; Dielectric-slab covers on plate electrode, and is fixed on the upper surface of plate electrode with conducting resinl, and the electrode gap distance between line electrode and plate electrode is adjustable within the scope of 0-5mm; The most advanced and sophisticated angle of line electrode end is 30 °-45 °, and tip curvature radius is 0.6-0.8mm; By outer power-actuated sample introduction spool and go out the both sides that sample spool is individually fixed in plate electrode, position is in and makes the aramid fabric on connection two spools can between line-plate type electrode be made up of line electrode, plate electrode, and edge moves horizontally perpendicular to the direction of line electrode.
Electrical measurement system forms primarily of digital oscilloscope, high-voltage probe and current probe; Be connected on line electrode by high-voltage probe circuit one end, the other end is connected on digital oscilloscope; Be connected on the wire between plate electrode and ground connection by current probe circuit one end, the other end is connected on digital oscilloscope; The discharge voltage of the real-time measuring media barrier discharge of electrical measurement system and electric current, and shown by digital oscilloscope.
Spectral measurement system forms primarily of convex lens, fibre-optical probe, optical fiber, High Resolution Grating Monochromator, charge-coupled image sensor and computer; Convex lens are fixed between plate electrode and fibre-optical probe, make the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe three on same level straight line; Fibre-optical probe collects the optical signal after being assembled by convex lens, and carries out light splitting through Optical Fiber Transmission to High Resolution Grating Monochromator, and the monochromatic light signal after light splitting changes data signal into through charge-coupled image sensor, finally by computer acquisition process.
Attaching parts are electric conductors that there is a stud upper end, respectively there is a through hole both sides, and wherein the stud of upper end is for connecting and the High voltage output of fixing bipolarity nanosecond pulse power supply, and can regulate the distance between line electrode and plate electrode; The through hole of attaching parts both sides is corresponding with the screw of line electrode, is bolted line electrode, and the gradient of adjustable line electrode.
Improve the hydrophilic method of aramid fabric to comprise the steps:
Step 1: before aramid fabric is processed, in order to remove the greasy dirt on aramid fabric surface, first aramid fabric is immersed in 3-6 hour in acetone soln, in acetone soln, cleans aramid fabric 10-30 minute with supersonic wave cleaning machine afterwards, finally naturally dry under the environment of drying; The two ends of the aramid fabric dried be wrapped in respectively sample introduction spool and go out on sample spool;
Step 2: regulate the distance between the stud adjustment line electrode of attaching parts and dielectric-slab; Regulate the bolt of attaching parts both sides) make line electrode and dielectric-slab keeping parallelism; Convex lens and fibre-optical probe are placed the side of online-plate type electrode, the position of adjustment convex lens and fibre-optical probe, makes the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe three on same level straight line;
Step 3: connect bipolarity nanosecond pulse power supply and high-voltage probe, current probe and digital oscilloscope, open digital oscilloscope, High Resolution Grating Monochromator, charge-coupled image sensor and computer; Regulate the voltage of digital oscilloscope, electric current to suitable range, regulated the parameter such as raster count, resolution ratio, time for exposure, spectra collection scope of High Resolution Grating Monochromator and charge-coupled image sensor by the control software design on computer;
Step 4: open bipolarity nanosecond pulse power supply starting switch, first regulating impulse repetition rate, then regulating impulse peak value; Rotate sample introduction roller bearing simultaneously and go out sample roller bearing, making aramid fabric uniform speed slow by plasma discharging body region;
Step 5: after process terminates, is first adjusted to 0 by peak impulse voltage and again pulse recurrence frequency is adjusted to 0, finally closes bipolarity nanosecond pulse power supply, takes out aramid fabric.
The invention has the beneficial effects as follows: the dielectric barrier discharge under (1) adopts bipolarity nanosecond pulse power supply to drive, obtains uniform discharge plasma in atmospheric air environment; (2) by using large scale line-plate type electrode, ensure that the space discharge volume of plasma and creeping discharge area all enough large, be conducive to large-area treatment aramid fabric, to reach the demand in commercial Application; (3) real-time diagnosis can be carried out by the spectrum of emission spectrometer and digital oscilloscope plasma and electrology characteristic, be convenient to analyze the active particle that discharge mechanism and electric discharge produce, understand the mechanism of Cement Composite Treated by Plasma aramid fabric in depth; (4) by measure sample water contact angle find, the aramid fabric water contact angle after process drops to about 60 ° from about 96 °, hydrophily be improved significantly.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is that line-plate type electrode structure master looks installation diagram.
Fig. 3 is line-plate type electrode structure side-looking installation diagram.
In figure: 1. bipolarity nanosecond pulse power supply; 2. ground connection; 3. High voltage output; 4. high-voltage probe; 5. digital oscilloscope; 6. sample introduction spool; 7. aramid fabric; 8. line electrode; 9. plate electrode; 10. dielectric-slab; 11. go out sample spool; 12. convex lens; 13. fibre-optical probes; 14. optical fiber; 15. current probes; 16. High Resolution Grating Monochromators; 17. charge-coupled image sensors; 18. computers; 19. attaching parts; 20. studs; 21. through holes; 22. screws; 23. bolts.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in detail.
Utilize homogenous atmospheric-pressure discharge to improve the hydrophilic device of aramid fabric, form primarily of line-plate type electrode, electrical measurement system and spectral measurement system.
Line electrode 8 is fixed on directly over the central axis of plate electrode 9 of level by attaching parts 19, and is parallel to plate electrode 9; The High voltage output 3 of line electrode 8 and bipolarity nanosecond pulse power supply is interconnected by attaching parts 19; Dielectric-slab 10 covers on plate electrode 9, and is fixed on the upper surface of plate electrode 9 with conducting resinl, and the electrode gap distance between line electrode 8 and plate electrode 9 is adjustable within the scope of 0-5mm; The most advanced and sophisticated angle of line electrode 8 lower end is 30 °-45 °, and tip curvature radius is 0.6-0.8mm; By outer power-actuated sample introduction spool 6 with go out the both sides that sample spool 11 is individually fixed in plate electrode 9, position is in and the aramid fabric on connection two spools between the line-plate type electrode be made up of line electrode 8, plate electrode 9, can be moved horizontally along the direction perpendicular to line electrode 8;
Electrical measurement system forms primarily of digital oscilloscope 5, high-voltage probe 4 and current probe 15; Be connected on line electrode 8 by high-voltage probe circuit one end, the other end is connected on digital oscilloscope 5; Be connected on the wire between plate electrode 9 and ground connection 2 by current probe circuit one end, the other end is connected on digital oscilloscope 5; The discharge voltage of the real-time measuring media barrier discharge of electrical measurement system and electric current, and shown by digital oscilloscope 5;
Spectral measurement system forms primarily of convex lens 12, fibre-optical probe 13, optical fiber 14, High Resolution Grating Monochromator 16, charge-coupled image sensor 17 and computer 18; Convex lens 12 are fixed between plate electrode 9 and fibre-optical probe 13, make the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe 13 three on same level straight line; Fibre-optical probe 13 collects the optical signal after being assembled by convex lens 12, and transfers to High Resolution Grating Monochromator 16 through optical fiber 14 and carry out light splitting, and the monochromatic light signal after light splitting changes data signal into through charge-coupled image sensor 17, finally by computer 18 acquisition process.
Attaching parts 19 are that upper end has a stud 20, and respectively there is the electric conductor of a through hole 21 both sides, and wherein the stud 20 of upper end is for connecting and the High voltage output 3 of fixing bipolarity nanosecond pulse power supply, and can regulate the distance between line electrode 8 and plate electrode 9; The through hole 21 of attaching parts both sides is corresponding with the screw 22 of line electrode, by bolt 23 connecting line electrode, and the gradient of adjustable line electrode 8.
Improve the hydrophilic method of aramid fabric to comprise the steps:
Step 1: before aramid fabric is processed, in order to remove the greasy dirt on aramid fabric surface, first aramid fabric is immersed in 3-6 hour in acetone soln, in acetone soln, cleans aramid fabric 10-30 minute with supersonic wave cleaning machine afterwards, finally naturally dry under the environment of drying; The two ends of the aramid fabric dried be wrapped in respectively sample introduction spool and go out on sample spool;
Step 2: the stud 20 of adjustment attaching parts adjusts the distance between line electrode 8 and dielectric-slab 10; The bolt 21 of attaching parts both sides is regulated to make line electrode 8 and dielectric-slab 10 keeping parallelism; Convex lens 12 and fibre-optical probe 13 are placed the side of online-plate type electrode, the position of adjustment convex lens 12 and fibre-optical probe 13, makes the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe 13 three on same level straight line;
Step 3: connect bipolarity nanosecond pulse power supply 1 and high-voltage probe 4, current probe 15 and digital oscilloscope 5, open digital oscilloscope 5, High Resolution Grating Monochromator 16, charge-coupled image sensor 17 and computer 18; Regulate the voltage of digital oscilloscope 5, electric current to suitable range, regulated the parameter such as raster count, resolution ratio, time for exposure, spectra collection scope of High Resolution Grating Monochromator 16 and charge-coupled image sensor 17 by the control software design on computer 18;
Step 4: open bipolarity nanosecond pulse power supply 1 starting switch, first regulating impulse repetition rate, then regulating impulse peak value; Rotate sample introduction roller bearing 6 simultaneously and go out sample roller bearing 11, making aramid fabric 7 uniform speed slow by plasma discharging body region;
Step 5: after process terminates, is first adjusted to 0 by peak impulse voltage and again pulse recurrence frequency is adjusted to 0, finally closes bipolarity nanosecond pulse power supply 1, takes out aramid fabric 7.
The MDO3034 type digital oscilloscope that used digital oscilloscope 5 used in the present invention provides for Tektronix company of the U.S., bandwidth is 350MHz, high-voltage probe 4 is the P6015A of Tektronix company, 1000 ×, 3.0pF, 100M Ω high-voltage probe, current probe 15 is Pearson probe, and model is 4100.Spectrometer is the SR-750i type high-resolution grating spectrograph of Andor company, and High Resolution Grating Monochromator 16 and charge-coupled image sensor 17 are integrated in spectrometer inside.
In the present embodiment, the long 120mm of plate electrode 9, wide 30mm, thickness is 3mm.The long 150mm of dielectric-slab 10, wide 60mm, thickness is 2mm, and dielectric-slab 10 to cover on plate electrode 9 and uses conducting resinl to stick together.The long 120mm of line electrode 8, high 10mm, thickness 5mm, the most advanced and sophisticated angle of lower end is 40 °, and tip curvature radius is 0.8mm.

Claims (3)

1. utilize homogenous atmospheric-pressure discharge to improve the hydrophilic device of aramid fabric, it is characterized in that, primarily of line-plate type electrode, electrical measurement system and spectral measurement system composition, it is characterized in that:
Line electrode (8) is fixed on directly over the central axis of plate electrode (9) of level by attaching parts (19), and is parallel to plate electrode (9); The High voltage output (3) of line electrode (8) and bipolarity nanosecond pulse power supply is interconnected by attaching parts (19); Dielectric-slab (10) covers on plate electrode (9), and the upper surface of plate electrode (9) is fixed on conducting resinl, the electrode gap distance between line electrode (8) and plate electrode (9) is adjustable within the scope of 0-5mm; The most advanced and sophisticated angle of line electrode (8) lower end is 30 °-45 °, and tip curvature radius is 0.6-0.8mm; By outer power-actuated sample introduction spool (6) with go out the both sides that sample spool (11) is individually fixed in plate electrode (9), position is in and the aramid fabric on connection two spools between the line-plate type electrode be made up of line electrode (8), plate electrode (9), can be moved horizontally along the direction perpendicular to line electrode (8);
Electrical measurement system forms primarily of digital oscilloscope (5), high-voltage probe (4) and current probe (15); Be connected to high-voltage probe circuit one end on line electrode (8), the other end is connected on digital oscilloscope (5); Be connected on by current probe circuit one end on the wire between plate electrode (9) and ground connection (2), the other end is connected on digital oscilloscope (5); The discharge voltage of the real-time measuring media barrier discharge of electrical measurement system and electric current, and shown by digital oscilloscope (5);
Spectral measurement system forms primarily of convex lens (12), fibre-optical probe (13), optical fiber (14), High Resolution Grating Monochromator (16), charge-coupled image sensor (17) and computer (18); Convex lens (12) are fixed between plate electrode (9) and fibre-optical probe (13), make the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe (13) three on same level straight line; Fibre-optical probe (13) collects the optical signal after being assembled by convex lens (12), and transfer to High Resolution Grating Monochromator (16) through optical fiber (14) and carry out light splitting, monochromatic light signal after light splitting changes data signal into through charge-coupled image sensor (17), finally by computer (18) acquisition process.
2. the homogenous atmospheric-pressure discharge that utilizes according to claim 1 improves the hydrophilic device of aramid fabric, it is characterized in that attaching parts (19) are that upper end has a stud (20), respectively there is the electric conductor of a through hole (21) both sides, wherein the stud (20) of upper end is for connecting and the High voltage output (3) of fixing bipolarity nanosecond pulse power supply, and can regulate the distance between line electrode (8) and plate electrode (9); The through hole (21) of attaching parts both sides is corresponding with the screw (22) of line electrode, by bolt (23) connecting line electrode, and the gradient of adjustable line electrode (8).
3. the homogenous atmospheric-pressure discharge that utilizes according to claim 1 improves the hydrophilic device of aramid fabric, it is characterized in that, improves the hydrophilic method of aramid fabric and comprises the steps:
Step 1: before aramid fabric is processed, in order to remove the greasy dirt on aramid fabric surface, first aramid fabric is immersed in 3-6 hour in acetone soln, in acetone soln, cleans aramid fabric 10-30 minute with supersonic wave cleaning machine afterwards, finally naturally dry under the environment of drying; The two ends of the aramid fabric dried be wrapped in respectively sample introduction spool and go out on sample spool;
Step 2: regulate the distance between the stud (20) adjustment line electrode (8) of attaching parts and dielectric-slab (10); The bolt (21) of attaching parts both sides is regulated to make line electrode (8) and dielectric-slab (10) keeping parallelism; Convex lens (12) and fibre-optical probe (13) are placed the side of online-plate type electrode, the position of adjustment convex lens (12) and fibre-optical probe (13), makes the discharging gap of line-plate type electrode, convex lens central point and fibre-optical probe (13) three on same level straight line;
Step 3: connect bipolarity nanosecond pulse power supply (1) and high-voltage probe (4), current probe (15) and digital oscilloscope (5), open digital oscilloscope (5), High Resolution Grating Monochromator (16), charge-coupled image sensor (17) and computer (18); Regulate the voltage of digital oscilloscope (5), electric current to suitable range, regulated the parameter such as raster count, resolution ratio, time for exposure, spectra collection scope of High Resolution Grating Monochromator (16) and charge-coupled image sensor (17) by the control software design on computer (18);
Step 4: open bipolarity nanosecond pulse power supply (1) starting switch, first regulating impulse repetition rate, then regulating impulse peak value; Rotate sample introduction roller bearing (6) simultaneously and go out sample roller bearing (11), making aramid fabric (7) uniform speed slow by plasma discharging body region;
Step 5: after process terminates, is first adjusted to 0 by peak impulse voltage and again pulse recurrence frequency is adjusted to 0, finally closes bipolarity nanosecond pulse power supply (1), takes out aramid fabric (7).
CN201510800919.3A 2015-11-19 2015-11-19 Improve the hydrophilic device and method of aramid fiber using homogenous atmospheric-pressure discharge Active CN105484011B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107008122A (en) * 2017-04-24 2017-08-04 上海电力学院 The experimental provision of dusty gas is catalytically decomposed in plasma body cooperative
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CN111669885A (en) * 2019-03-05 2020-09-15 日本电产株式会社 Plasma processing apparatus
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