CN103163438A - Micro-discharger performance testing device and method - Google Patents
Micro-discharger performance testing device and method Download PDFInfo
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- CN103163438A CN103163438A CN2011104126772A CN201110412677A CN103163438A CN 103163438 A CN103163438 A CN 103163438A CN 2011104126772 A CN2011104126772 A CN 2011104126772A CN 201110412677 A CN201110412677 A CN 201110412677A CN 103163438 A CN103163438 A CN 103163438A
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Abstract
The invention discloses a micro-discharger performance testing device. The micro-discharger performance testing device comprises a vacuum cavity, a support table, an external circuit, a signal collecting device and a spectrograph, wherein an upper cover plate of the vacuum cavity is detachable and provided with an observation window and an over vacuum port; the support table is arranged inside the vacuum cavity, and a to-be-detected micro-discharger is placed above the support table; the external circuit is connected with the micro-discharger through an electrode lead and comprises an excitation power supply which supplies power for the micro-discharger; the signal collecting device is arranged above the micro-discharger in a suspending mode; and the spectrograph is connected with the signal collecting device through a fiber optic. The micro-discharger performance testing device is simple in structure, convenient to operate, and free of complex optical path system, by using the micro-discharger performance testing device, testing of spectral performances of the micro-discharger is simple, efficient and reliable.
Description
Technical field
The present invention relates to the MEMS (micro electro mechanical system) field, relate in particular to a kind of micro discharge device performance testing device and method.
Background technology
The concept of small plasma just proposed as far back as nineteen fifty-seven, refer in particular to characteristic dimension less than low temperature, the nonequilibrium plasma of 1mm, but until after the people such as Frame in 1997 successfully produce microdischarge devices, the research of small plasma just causes people's concern, and becomes rapidly the study hotspot of countries in the world.Compare with macroscopical large scale plasma, the small plasma advantage such as yardstick is little, low in energy consumption because having, the energy density high and low temperature is non-equilibrium and can work under than hyperbar and atmospheric pressure successfully is applied to the fields such as flat pannel display, little chemical analysis system, biomedicine and material processed.
In recent years, small plasma as a kind of new plasma source be used for material surface without mask etching and deposition process, not only need not mask in process, and etching and rate of sedimentation fast, can work under atmospheric pressure or nearly atmospheric pressure, easy to use and flexible has good application potential, thereby has obtained various countries scholars' extensive concern.For example patent " based on scan plasma processing device and the job operation (patent No. is CN1731559) of parallel probe driving " is combined Scanning probe technique with small plasma technique, proposed a kind of scanning plasma etching method that drives based on parallel probe, the method can realize the micro-nano processing of the scanning of high precision, high-level efficiency, arbitrary graphic.
In research, technical development and the following quality testing process based on the microplasma product of small plasma, the performance test of small plasma is most important with diagnosis.Take above-mentioned scanning microplasma process technology as example, during due to micro discharge, the concentration of plasma living radical and distribution thereof have important impact to etching performance, therefore, must test and diagnose the flash-over characteristic of microplasma.And being the plasma discharge process, emission spectrometry carries out the most frequently used method of monitoring and diagnosis.
At present, Chinese scholars mainly adopts following two kinds of methods that the emission spectrum of microplasma is measured: the one, build voluntarily complicated optical test path system, as shown in Figure 1, the light signal that microplasma discharge device (being the micro discharge device) sends enters in the slit of monochromator by a plus lens, monochromator is by the light of rotation diffraction grating scanning wavelength at 200-1100nm, then light is sent in optical multichannel analyzer (OMA), light signal is changed into electric signal, and send into computing machine, thereby obtain emission spectrum.The light path system of this method is comparatively complicated, and the adjustment of light path parameter is complicated and time consumption also, measures efficient lower.The 2nd, adopt fiber spectrometer to measure, as shown in Figure 2, the light signal that the microplasma discharge device sends enters optical fiber by a plus lens, and optical fiber is sent the light signal of collecting into fiber spectrometer and is carried out spectral measurement.although this method has adopted optical fiber to collect light signal, method one is simple relatively, but the light signal that sends due to microplasma a little less than, and the diameter of optical fiber (containing covering) is many in tens magnitudes to the hundreds of micron, in order to make more light enter optical fiber, need accurate adjustment micro discharge light source, relative position between lens and optical fiber and height, make the light that microplasma sends just in time to focus on optical fiber through lens, thereby the accurate aligning that needs comparatively complicated time-consuming light path and position adjustment could realize lens focus spot and optical fiber.Therefore, we are badly in need of developing a kind of simple, efficient, performance test methods of microplasma reliably.
Summary of the invention
For solving the problems of the technologies described above, the embodiment of the present invention provides a kind of micro discharge device performance testing device and method, and this apparatus structure is simple, and is easy to operate, utilize this device can be simply, efficient, reliably the spectrum property of micro discharge device is tested.
For addressing the above problem, the embodiment of the present invention provides following technical scheme:
A kind of micro discharge device performance testing device, this device comprises: the dismountable vacuum chamber of upper cover plate, and be provided with view window on the upper cover plate of described vacuum chamber and cross vacuum interface; Be positioned at the brace table of described vacuum chamber inside, can place micro discharge device to be measured on brace table; By the external circuit that contact conductor is connected with described micro discharge device, described external circuit is included as the excitation power supply of described micro discharge device power supply; Be suspended at the signal collection device of described micro discharge device top; The spectrometer that is connected with described signal collection device by optical fiber.
Preferably, when described signal collection device was positioned at described vacuum chamber inside, described signal collection device was the optical fiber detection head; Described optical fiber detection head has ceramic jacket, and described optical fiber detection head is fixed on described brace table by stationary installation; Wherein, described stationary installation comprises: horizontal arm and vertical arm; Described horizontal arm is provided with the cylindrical hole that described optical fiber detection head ceramic jacket is installed, and described horizontal arm and described vertical arm flexible connection.
Preferably, when described signal collection device was positioned at described vacuum chamber outside, described signal collection device was collimation lens; Described collimation lens is with optical fiber interface, and described collimation lens and described fixed support slab integral are placed on the upper cover plate of described vacuum chamber; Wherein, described fixed support plate is provided with the cylindrical thread through hole that described collimation lens is installed, and described collimation lens is threaded connection and is arranged on described fixed support plate.
Preferably, the material of described vacuum chamber is metallic aluminium or stainless steel; The material of described view window is transparent material; The described material of crossing vacuum interface is organic material or pottery.
Preferably, described micro discharge device comprises: Semiconductor substrate; Be positioned at the bottom electrode of the upper surface of described Semiconductor substrate; Be positioned at the insulation course of described bottom electrode upper surface; Be positioned at the top electrode on described surface of insulating layer; Wherein, described micro discharge utensil has and vertically runs through described top electrode and insulation course and extend to projection hole in described semiconductor substrate surface.
Preferably, the material of the upper and lower electrode of described micro discharge device is nickel, and thickness is in the 120nm-200nm scope; The material of described insulation course is the composite dielectric layer of polyimide or silicon dioxide, silicon nitride and polyimide, and thickness is in 8 μ m-10 μ m scopes; The part that described projection hole is positioned at described semiconductor substrate surface is reverse pyramid or hollow cylinder, and the characteristic dimension in aperture, described projection hole is in 20 μ m-200 μ m scopes.
Preferably, the connected mode of the upper/lower electrode of described micro discharge device and described contact conductor is a kind of in following connected mode: adopt conducting resinl that described contact conductor is sticked on described upper/lower electrode; Adopt the spun gold ball that described contact conductor is welded on described upper/lower electrode; Adopt elastic probe that described contact conductor is contacted with described upper/lower electrode.
The present invention also provides a kind of method of utilizing said apparatus test micro discharge device performance, and the method comprises: micro discharge device to be measured is placed on the brace table of vacuum chamber inside, the micro discharge device is aimed at signal collection device; For the micro discharge device provides high pressure, excite the small plasma of γ-ray emission of certain air pressure; Utilize signal collection device to collect the light signal that the micro discharge device sends, and offer spectrometer by optical fiber; Analyze by the light signal that spectrometer is launched the micro discharge device.
Preferably, when described signal collection device is the optical fiber detection head, the described process that the micro discharge device is aimed at signal collection device is specially: regulate the vertical arm of described stationary installation at microscopically, make the projection hole of Semiconductor substrate just be in the center of cylindrical hole on described stationary installation horizontal arm; The optical fiber detection head is fixed in cylindrical hole on described stationary installation horizontal arm, regulates the horizontal arm of described stationary installation at microscopically, make distance between the projection hole of optical detecting head and semiconductor substrate surface in the scope of 1mm～10mm.
Preferably, when described signal collection device was collimation lens, the described process that the micro discharge device is aimed at signal collection device was specially: collimation lens is arranged on described fixed support plate, and whole being placed on the upper cover plate of described vacuum chamber; Change spectrometer into Halogen lamp LED or integrating sphere light source, regulate position and the focal length of described collimation lens, make the hot spot of described collimation lens outgoing minimum, and be covered in the position in described Semiconductor substrate upper surface projection hole; Halogen lamp LED or integrating sphere light source are gained spectrometer.
Compared with prior art, technique scheme has the following advantages:
the micro discharge device performance testing device that the embodiment of the present invention provides, comprise that signal collection device and band throw the micro discharge device in hole, aim at the axis of signal collection device by the axis of the micro discharge device being throwed the hole before test, thereby when making test, described signal collection device can be collected the light signal that the micro discharge device sends to greatest extent, then by coupling fiber with collected optical signal transmission to spectrometer, the light signal that utilizes spectrometer that the micro discharge device is launched is analyzed, this apparatus structure is simple, easy to operate, need not complicated light path system, thereby realize simple, efficiently, reliably the spectrum property of micro discharge device is tested.
Description of drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of micro discharge device spectrum property proving installation in prior art;
Fig. 2 is the structural representation of another kind of micro discharge device spectrum property proving installation in prior art;
The structural representation of the micro discharge device performance testing device that Fig. 3 provides for the embodiment of the present invention one;
The structural representation of the micro discharge device performance testing device that Fig. 4 provides for the embodiment of the present invention two.
Illustrated in Fig. 3～Fig. 4: vacuum chamber 1, brace table 2, Semiconductor substrate 3, projection hole 4, bottom electrode 5, insulation course 6, top electrode 7, the vertical arm 8 of stationary installation, optical fiber detection head 9, stationary installation horizontal arm 10, optical fiber 11 (or 22), optical fiber are crossed vacuum interface 12, spectrometer 13, windowpane 14, external circuit 15, contact conductor and are crossed vacuum interface 16, contact conductor 17, collimation lens 18, fixed support plate 19, focusing component 20, SMA905 interface 21.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
A lot of details have been set forth in the following description so that fully understand the present invention, but the present invention can also adopt other to be different from alternate manner described here and implement, those skilled in the art can be in the situation that do similar popularization without prejudice to intension of the present invention, so the present invention is not subjected to the restriction of following public specific embodiment.
Just as described in the background section, in research, technical development and the following quality testing process based on the microplasma product of small plasma, the performance test of small plasma is most important with diagnosis, and emission spectrometry to be the plasma discharge process carry out one of the most frequently used method of monitoring and diagnosis.By measuring wavelength and the intensity of the spectrum line that the micro discharge device launches, just can identify the various ions and the neutral group that exist in microplasma, further analyze and research on this basis relation between spectral characteristic and technological parameter could realize technological parameter in the scanning plasma etching process and the accurate control of processing characteristics.
Scanning plasma etching carries out in specific reacting gas environment, so the micro discharge device need be placed in the vacuum chamber of specific gas atmosphere.Space scale very little (tens magnitudes to the hundreds of micron) due to micro discharge, and when discharge the light signal that sends of plasma a little less than, realize the high efficiency spectrum test of original position to micro discharge device in vacuum chamber, should make light signal as much as possible can enter spectroscopic analysis system.But in the method for testing to the micro discharge device in prior art, or need to build voluntarily complicated optical test path system, or micro discharge device and signal collection device aim at and the focusing process comparatively complicated loaded down with trivial details.
In view of this, the invention provides a kind of micro discharge device performance testing device, this device comprises the dismountable vacuum chamber of upper cover plate, and is provided with view window on the upper cover plate of described vacuum chamber and crosses vacuum interface; Be positioned at the brace table of described vacuum chamber inside, can place micro discharge device to be measured on brace table; By the external circuit that contact conductor is connected with described micro discharge device, described external circuit is included as the excitation power supply of described micro discharge device power supply; Be suspended at the signal collection device of described micro discharge device top; The spectrometer that is connected with described signal collection device by optical fiber, simple to realize, efficient, reliably the spectrum property of micro discharge device is tested.
Micro discharge device performance testing device provided by the present invention is mainly that the performance of microplasma that the micro discharge device is produced under various electric field excitations is tested.This proving installation comprises that described signal collection device is positioned at described vacuum chamber and described signal collection device is positioned at the outer two kinds of ways of realization of described vacuum chamber.Below in conjunction with accompanying drawing, the micro discharge device performance testing device that provides in the present invention is described in detail.
Embodiment one:
With reference to figure 3, the micro discharge device performance testing device that the embodiment of the present invention provides comprises: the dismountable vacuum chamber 1 of upper cover plate, and be provided with view window 14 on the upper cover plate of described vacuum chamber 1 and cross vacuum interface; Wherein, the described vacuum interface of crossing comprises that contact conductor is crossed vacuum interface 16 and optical fiber is crossed vacuum interface 12, and the material of described vacuum chamber 1 is metallic aluminium or stainless steel; The material of described view window 14 can be quartz or organic glass, and the present invention is to this and be not construed as limiting, so long as transparent material gets final product; The described vacuum interface of crossing can seal with dedicated ceramic or organic material.
Be positioned at the brace table 2 of described vacuum chamber 1 inside, can place micro discharge device to be measured on brace table 2.Micro discharge device described in the embodiment of the present invention (being microplasma reactor) processing is on Semiconductor substrate 3, and its characteristic dimension specifically comprises in the scope of 10 μ m to 1mm: Semiconductor substrate 3; Be positioned at the bottom electrode 5 of the upper surface of described Semiconductor substrate 3; Be positioned at the insulation course 6 of described bottom electrode 5 upper surfaces; Be positioned at the top electrode 7 of described insulation course 6 upper surfaces; Wherein, described micro discharge utensil has and vertically runs through described top electrode 7 and insulation course 6 and extend to projection hole 4 in described Semiconductor substrate 3 surfaces.And the working gas of the micro discharge device described in the embodiment of the present invention can be SF
6, CHF
3, CF
4Deng reacting gas, the inert gases such as He, Ar, Ne, and the mixed gas of reacting gas and inert gas, the microplasma that produces can be used for the purposes such as etching, deposition, demonstration, biomedicine, environmental treatment.
Need to prove, Semiconductor substrate 3 in the embodiment of the present invention can comprise semiconductor element, the for example silicon of monocrystalline, polycrystalline or non crystalline structure or SiGe (SiGe), also can comprise the semiconductor structure of mixing, for example silit, indium antimonide, lead telluride, indium arsenide, indium phosphide, gallium arsenide or gallium antimonide, alloy semiconductor or its combination.
Upper and lower electrode and insulation course described in the embodiment of the present invention material or size can select according to concrete condition, to this and be not construed as limiting, the below is described with a specific embodiment.When the material of described upper and lower electrode was nickel, thickness was preferably in the 120nm-200nm scope; When the material of described insulation course 6 was the composite dielectric layer of polyimide or silicon dioxide, silicon nitride and polyimide, thickness was preferably in 8 μ m-10 μ m scopes; And the shape to described projection hole in the embodiment of the present invention also is not construed as limiting, described projection hole 4 is positioned at described Semiconductor substrate 3 surperficial parts can be reverse pyramid, hollow cylinder or other shapes, and the characteristic dimension in aperture, described projection hole is in 20 μ m-200 μ m scopes.
By the external circuit 15 that contact conductor 17 is connected with described micro discharge device, described external circuit 15 is included as the excitation power supply of described micro discharge device power supply.In the embodiment of the present invention, excitation power supply is positioned at the outside of described vacuum chamber 1, therefore need to cross vacuum interface 16 by the contact conductor of described vacuum chamber 1, the upper/lower electrode lead-in wire 17 of described micro discharge device is drawn, thereby be connected with the external drive power supply.The upper and lower electrode of described micro discharge device sticks in described contact conductor 17 on described upper/lower electrode with adopting conducting resinl being connected of 17 of described contact conductors, also can adopt the spun gold ball that described contact conductor 17 is welded on described upper and lower electrode, can also adopt elastic probe that described contact conductor 17 is contacted with described upper/lower electrode.
Be suspended at the signal collection device of described micro discharge device top and the spectrometer 13 that is connected with described signal collection device by optical fiber 11.Signal collection device in the embodiment of the present invention is positioned at described vacuum chamber 1 inside, is optical fiber detection head 9; Described optical fiber detection head 9 has ceramic jacket, and described optical fiber detection head 9 is fixed on described brace table 2 by stationary installation; Wherein, described stationary installation comprises: horizontal arm 10 and vertical arm 8; Described horizontal arm 10 is provided with the cylindrical hole that described optical fiber detection head 9 ceramic jackets are installed, and described horizontal arm 10 is flexibly connected with described vertical arm 8.
The specific works process of utilizing the device described in the embodiment of the present invention that micro discharge device performance is tested is: after being fixed on the micro discharge device on brace table 2, adjust the horizontal level of the vertical arm 8 of described stationary installation at microscopically, make the reverse pyramid of described micro discharge device throw the center that hole 4 is in millimeter cylindrical hole on described stationary installation horizontal arm 10 just, aliging substantially with the axis of described light detection head 9 in the axis that is described projection hole 4, thereby realizes aiming at of described micro discharge device and described light detection head 9.Then optical fiber detection head 9 is inserted and is fixed in the millimeter cylindrical hole on described horizontal arm 10, adjust again the vertical position of described stationary installation horizontal arm 10 at microscopically, the distance in 4, the inverted pyramid projection hole of described optical fiber detection head 9 and described micro discharge device is remained in suitable scope, and this scope is selected in 1mm～10mm scope usually as the case may be.After adjusting aligning, their relative position locking integral body is put into described vacuum chamber 1.Then the contact conductor 17 of the upper and lower electrode of described micro discharge device is crossed vacuum interface 16 by described contact conductor and draw, be connected to and be positioned on the outer excitation power supply of described vacuum chamber 1.
During test, only need open described excitation power supply applies excitation electrical field to described micro discharge device, and described micro discharge device discharges under the excitation electrical field effect, produces light signal.Then utilize described optical fiber detection head 9 to collect the light signal that the micro discharge device sends, and utilize optical fiber 11 to cross vacuum interface 12 by optical fiber to be transferred to spectrometer 13, then utilize 13 pairs of received light signals of spectrometer to analyze, thereby reach purpose simple, efficient, that reliably the spectrum property of described micro discharge device is tested.
In the device that the embodiment of the present invention provides, described external circuit 15 also comprises test circuit; Described test circuit is used for the electric property of described micro discharge device is tested.Described test circuit comprises the dc voltage current characteristic test circuit, the time voltage, current testing circuit etc. that become, during concrete test, described external drive power supply can be selected high-voltage DC power supply, AC power, radio-frequency power supply, microwave power supply or the pulse power according to different test purpose, then utilizes the testing meter and instrument such as voltage/current table, oscillograph or signal generator or testing circuit that the electric property of described micro discharge device is tested.
As from the foregoing, the micro discharge device performance testing device that the embodiment of the present invention provides is simple in structure, easy to operate, need not complicated light path system, can complete the micro discharge device is carried out efficient In situ spectroscopic performance test.
Embodiment two:
With reference to figure 4, the structural representation of the micro discharge device performance testing device that provides in the embodiment of the present invention is provided Fig. 4.The embodiment of the present invention and a upper embodiment difference be, described signal collection device is positioned at described vacuum chamber 1 outside, is the collimation lens 18 with optical fiber interface; Described collimation lens 18 is threaded connection in the tapped through hole that is arranged on described fixed support plate 19, and whole being placed on the upper cover plate of described vacuum chamber 1; Then described micro discharge device is pressed close to the upper cover plate windowpane 14 of described vacuum chamber 1, carried out spectrum test in the suitable alignment methods of the outer employing of described vacuum chamber 1.
The specific works process of utilizing the device described in the embodiment of the present invention that micro discharge device performance is tested is: after being fixed on the micro discharge device on brace table 2, put into described vacuum chamber 1, make described micro discharge device press close to the upper cover plate windowpane 14 of described vacuum chamber 1.Then at the collimation lens 18 of vacuum chamber 1 external application supporting plate 19 clamping band optical fiber interfaces, and allow collimation lens 18 press close to the upper cover plate windowpane 14 of described vacuum chamber 1.In order to realize the accurate aligning of collimation lens 18 and micro discharge device, before test, need to change spectrometer 13 into Halogen lamp LED or integrating sphere light source, regulate the position of described collimation lens 18 by the position that moves horizontally described fixed support plate 19, and by regulating the focusing component 20 on described collimation lens 18, be generally the focusing screw, regulate described collimation lens 18 focal lengths, make the hot spot of described collimation lens 18 outgoing minimum, and be covered in the position in inverted pyramid projection hole 4 on described micro discharge device.Due to the outgoing hot spot yardstick of described collimation lens 18 magnitude at several millimeters, so this alignment procedures can easily by being positioned at view window 14 glass on described vacuum chamber 1 upper cover plate, utilize naked eyes to observe directly.
During test, only need Halogen lamp LED or integrating sphere light source are gained spectrometer 13, then open described excitation power supply described micro discharge device is applied excitation electrical field, described micro discharge device discharges under the excitation electrical field effect, produces light signal.Recycle described collimation lens 18 and collect through the view window 14 that is positioned on described vacuum chamber 1 upper cover plate the light signal that the micro discharge devices send, the light signal of focusing is coupled on optical fiber 22 through SMA905 interface 21, and utilize optical fiber 22 to be transferred to spectrometer 13, then utilize 13 pairs of received light signals of spectrometer to analyze, thereby reach purpose simple, efficient, that reliably the spectrum property of described micro discharge device is tested.
Need to prove, according to the light path principle of reversibility, after integrating sphere is gained spectrometer 13, the light signal that the micro discharge device sends just can be sent to by described collimation lens 18 and optical fiber 22 and carry out spectral measurement in spectrometer 13, and method can realize that described collimation lens 18 aims at the effective of described micro discharge device thus.And in the spectrum test process, can also pass through the focal length of the described collimation lens 18 of fine setting, thereby the light signal that makes spectrometer 13 collect is the strongest.
Embodiment three:
The present invention also provides a kind of method that the device to test micro discharge device performance that provides in above-described embodiment is provided, the method comprises: micro discharge device to be measured is placed on the brace table 2 of vacuum chamber 1 inside, the micro discharge device is throwed the axis in hole 4 and aim at the axis of signal collection device; For the micro discharge device provides high pressure, excite the small plasma of γ-ray emission of certain air pressure; Utilize signal collection device to collect the light signal that the micro discharge device sends, and offer spectrometer 13 by optical fiber 22; Analyze by the light signal that 13 pairs of micro discharge devices of spectrometer are launched.
The method of testing that the embodiment of the present invention provides is with in the axis in micro discharge device projection hole 4 and process that the axis of signal collection device is aimed at, according to the difference of described signal collection device and different.When described signal collection device is optical fiber detection head 9, the described process that the micro discharge device is aimed at signal collection device is specially: regulate the vertical arm 8 of described stationary installation at microscopically, make the projection hole 4 of Semiconductor substrate 3 just be in the center of cylindrical hole on described stationary installation horizontal arm 10; Optical fiber detection head 9 is fixed in cylindrical hole on described stationary installation horizontal arm 10, regulates the horizontal arm 10 of described stationary installation at microscopically, make the distance in 4, projection hole of optical detecting head and semiconductor substrate surface in the scope of 1mm～10mm.
When described signal collection device was collimation lens 18, the described process that the micro discharge device is aimed at signal collection device was specially: collimation lens 18 is fixed on described fixed support plate 19, and whole being placed on the upper cover plate of described vacuum chamber; Change spectrometer 13 into Halogen lamp LED or integrating sphere light source, regulate horizontal level and the focal length of described collimation lens 18, make the hot spot of described collimation lens 18 outgoing minimum, and be covered in the position that described Semiconductor substrate 3 upper surface inverted pyramids are throwed hole 4; Halogen lamp LED or integrating sphere light source are gained spectrometer 13.
The method of testing that the embodiment of the present invention provides also comprises: by test circuit, the electric property of micro discharge device is tested.During concrete test, the external drive power supply can be selected high-voltage DC power supply, AC power, radio-frequency power supply, microwave power supply or the pulse power according to different test purpose, then utilizes the testing meter and instrument such as voltage/current table, oscillograph or signal generator or testing circuit that the electric property of described micro discharge device is tested.
Utilize the method for testing that the embodiment of the present invention provides can realize simply, efficient, reliably the performance of micro discharge device is tested.
Relatively simple to the description of method part in this instructions, relevant similarity can be with reference to the description of micro discharge device performance testing device part.
In this instructions, various piece adopts the mode of going forward one by one to describe, and what each part stressed is and the difference of other parts that between various piece, identical similar part is mutually referring to getting final product.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from the spirit or scope of the present invention, realization in other embodiments.Therefore, the present invention will can not be restricted to embodiment illustrated herein, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a micro discharge device performance testing device, is characterized in that, this device comprises:
The dismountable vacuum chamber of upper cover plate, and be provided with view window on the upper cover plate of described vacuum chamber and cross vacuum interface;
Be positioned at the brace table of described vacuum chamber inside, can place micro discharge device to be measured on brace table;
By the external circuit that contact conductor is connected with described micro discharge device, described external circuit is included as the excitation power supply of described micro discharge device power supply;
Be suspended at the signal collection device of described micro discharge device top;
The spectrometer that is connected with described signal collection device by optical fiber.
2. device according to claim 1, is characterized in that, when described signal collection device was positioned at described vacuum chamber inside, described signal collection device was the optical fiber detection head; Described optical fiber detection head has ceramic jacket, and described optical fiber detection head is fixed on described brace table by stationary installation;
Wherein, described stationary installation comprises: horizontal arm and vertical arm; Described horizontal arm is provided with the cylindrical hole that described optical fiber detection head ceramic jacket is installed, and described horizontal arm and described vertical arm flexible connection.
3. device according to claim 1, is characterized in that, when described signal collection device was positioned at described vacuum chamber outside, described signal collection device was collimation lens; Described collimation lens is with optical fiber interface, and described collimation lens and described fixed support slab integral are placed on the upper cover plate of described vacuum chamber;
Wherein, described fixed support plate is provided with the cylindrical thread through hole that described collimation lens is installed, and described collimation lens is threaded connection and is arranged on described fixed support plate.
4. device according to claim 1, is characterized in that, the material of described vacuum chamber is metallic aluminium or stainless steel; The material of described view window is transparent material; The described material of crossing vacuum interface is organic material or pottery.
5. device according to claim 1, is characterized in that, described micro discharge device comprises:
Semiconductor substrate;
Be positioned at the bottom electrode of the upper surface of described Semiconductor substrate;
Be positioned at the insulation course of described bottom electrode upper surface;
Be positioned at the top electrode on described surface of insulating layer;
Wherein, described micro discharge utensil has and vertically runs through described top electrode and insulation course and extend to projection hole in described semiconductor substrate surface.
6. device according to claim 5, is characterized in that, the material of the upper and lower electrode of described micro discharge device is nickel, and thickness is in the 120nm-200nm scope; The material of described insulation course is the composite dielectric layer of polyimide or silicon dioxide, silicon nitride and polyimide, and thickness is in 8 μ m-10 μ m scopes; The part that described projection hole is positioned at described semiconductor substrate surface is reverse pyramid or hollow cylinder, and the characteristic dimension in aperture, described projection hole is in 20 μ m-200 μ m scopes.
7. device according to claim 5, is characterized in that, the upper/lower electrode of described micro discharge device and the connected mode of described contact conductor are a kind of in following connected mode:
Adopt conducting resinl that described contact conductor is sticked on described upper/lower electrode;
Adopt the spun gold ball that described contact conductor is welded on described upper/lower electrode;
Adopt elastic probe that described contact conductor is contacted with described upper/lower electrode.
8. a method of utilizing 1～7 described device to test micro discharge of any one device performance, is characterized in that, the method comprises:
Micro discharge device to be measured is placed on the brace table of vacuum chamber inside, the micro discharge device is aimed at signal collection device;
For the micro discharge device provides high pressure, excite the small plasma of γ-ray emission of certain air pressure;
Utilize signal collection device to collect the light signal that the micro discharge device sends, and offer spectrometer by optical fiber;
Analyze by the light signal that spectrometer is launched the micro discharge device.
9. method according to claim 8, is characterized in that, when described signal collection device was the optical fiber detection head, the described process that the micro discharge device is aimed at signal collection device was specially:
Regulate the vertical arm of described stationary installation at microscopically, make the projection hole of Semiconductor substrate just be in the center of cylindrical hole on described stationary installation horizontal arm;
The optical fiber detection head is fixed in cylindrical hole on described stationary installation horizontal arm, regulates the horizontal arm of described stationary installation at microscopically, make distance between the projection hole of optical detecting head and semiconductor substrate surface in the scope of 1mm～10mm.
10. method according to claim 8, is characterized in that, when described signal collection device was collimation lens, the described process that the micro discharge device is aimed at signal collection device was specially:
Collimation lens is arranged on described fixed support plate, and whole being placed on the upper cover plate of described vacuum chamber;
Change spectrometer into Halogen lamp LED or integrating sphere light source, regulate position and the focal length of described collimation lens, make the hot spot of described collimation lens outgoing minimum, and be covered in the position in described Semiconductor substrate upper surface projection hole;
Halogen lamp LED or integrating sphere light source are gained spectrometer.
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| CN105234602A (en) * | 2015-11-07 | 2016-01-13 | 朱永彪 | Vacuum welding chamber |
| CN105744712A (en) * | 2016-04-15 | 2016-07-06 | 中国人民解放军装甲兵工程学院 | Closed bomb vessel for plasma diagnosis and density control method thereof |
| CN105744711A (en) * | 2016-04-15 | 2016-07-06 | 中国人民解放军装甲兵工程学院 | Thermal ionization plasma generation test device and density test and control methods |
| CN104062565B (en) * | 2014-06-24 | 2016-08-24 | 西安空间无线电技术研究所 | A kind of method utilizing intermodulation component detection microwave component micro discharge |
| CN107607505A (en) * | 2017-09-05 | 2018-01-19 | 重庆民泰香料化工有限责任公司 | A kind of method of testing of AFS detection circuit |
| CN108375703A (en) * | 2017-01-31 | 2018-08-07 | 罗德施瓦兹两合股份有限公司 | Test system for executing micro discharge test to equipment under test and the method for testing equipment under test |
| CN109781505A (en) * | 2019-01-18 | 2019-05-21 | 北京航空航天大学 | A kind of stress-electric coupling attribute testing loading equipemtn and method suitable for chip type piezoelectric driver |
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| CN104062565B (en) * | 2014-06-24 | 2016-08-24 | 西安空间无线电技术研究所 | A kind of method utilizing intermodulation component detection microwave component micro discharge |
| CN104601224A (en) * | 2015-01-16 | 2015-05-06 | 中国人民解放军国防科学技术大学 | Device for quickly detecting and inhibiting optical discharge transmission in optical fiber |
| CN104601224B (en) * | 2015-01-16 | 2017-06-27 | 中国人民解放军国防科学技术大学 | The device of the device of optics electric discharge transmission and a kind of raising optics electric discharge detection accuracy in a kind of quick detection and suppression optical fiber |
| CN105234602A (en) * | 2015-11-07 | 2016-01-13 | 朱永彪 | Vacuum welding chamber |
| CN105744712B (en) * | 2016-04-15 | 2019-04-09 | 中国人民解放军装甲兵工程学院 | A kind of closed bomb vessel and its density control method for plasma diagnostics |
| CN105744711A (en) * | 2016-04-15 | 2016-07-06 | 中国人民解放军装甲兵工程学院 | Thermal ionization plasma generation test device and density test and control methods |
| CN105744711B (en) * | 2016-04-15 | 2018-01-23 | 中国人民解放军装甲兵工程学院 | A kind of thermal ionization plasma generation test device and its density measurement and control method |
| CN105744712A (en) * | 2016-04-15 | 2016-07-06 | 中国人民解放军装甲兵工程学院 | Closed bomb vessel for plasma diagnosis and density control method thereof |
| CN108375703A (en) * | 2017-01-31 | 2018-08-07 | 罗德施瓦兹两合股份有限公司 | Test system for executing micro discharge test to equipment under test and the method for testing equipment under test |
| CN108375703B (en) * | 2017-01-31 | 2022-04-19 | 罗德施瓦兹两合股份有限公司 | Test system for performing microdischarge tests on a device under test and method for testing a device under test |
| CN107607505A (en) * | 2017-09-05 | 2018-01-19 | 重庆民泰香料化工有限责任公司 | A kind of method of testing of AFS detection circuit |
| CN107607505B (en) * | 2017-09-05 | 2020-06-02 | 重庆民泰香料化工有限责任公司 | Test method of atomic fluorescence spectrometer detection circuit |
| CN109781505A (en) * | 2019-01-18 | 2019-05-21 | 北京航空航天大学 | A kind of stress-electric coupling attribute testing loading equipemtn and method suitable for chip type piezoelectric driver |
| CN112363039A (en) * | 2020-10-29 | 2021-02-12 | 华南理工大学 | Weak light detection system of organic photoelectric device and control method |
| CN112363039B (en) * | 2020-10-29 | 2022-04-22 | 华南理工大学 | Weak light detection system of organic photoelectric device and control method |
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