CN204303750U - A kind of laser assisted glow discharge ionization device - Google Patents
A kind of laser assisted glow discharge ionization device Download PDFInfo
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- CN204303750U CN204303750U CN201420833217.6U CN201420833217U CN204303750U CN 204303750 U CN204303750 U CN 204303750U CN 201420833217 U CN201420833217 U CN 201420833217U CN 204303750 U CN204303750 U CN 204303750U
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Abstract
The utility model discloses a kind of laser assisted glow discharge ionization device, comprise LASER Light Source, mass spectrometer, the ionization chamber closed and ionization main body, ionization main body comprises the copper post holder that hollow copper post is housed and the sample holder that sample is housed, hollow copper post is connected earth potential by wire with ionization chamber base plate, sample and the conducting of glow discharge power supply, copper post holder and sample holder are just to setting, hollow copper post is provided with laser hole at the offside of sample and forms ionized region in laser hole, after the laser that LASER Light Source sends passes hollow copper post, vertical irradiation is on sample, the repeller plate ion in ionized region being sent into mass spectrometer is provided with in the side of ionized region, repeller plate and DC high-voltage power supply conducting.The utility model introduces glow discharge voltage signal, earth potential by said structure, and introduces mass spectrometer by the ion that electric discharge can produce by repeller plate introducing DC high voltage, and improve ion transmission efficiency, detection sensitivity is high.
Description
Technical field
The utility model is used for mass-spectrometry analyzing and testing field, particularly relates to a kind of laser assisted glow discharge ionization device.
Background technology
High-purity material, as important photoelectron material, is widely used in the industrial circles such as Aero-Space, microelectronics, information, infrared, solar energy.Such as: high purity copper directly can be applied to exploitation aviation, the superalloy of universe atomic industry and analytical standard test portion as Addition ofelements, is the main material preparing high quality audio line, liquid crystal display sputtering target material and ion film plating.High purity titanium is the important materials manufacturing aircraft, rocket, spaceship, naval vessels, telecommunication apparatus and artificial skelecton etc.6N(99.9999%) level silicon is the main material manufacturing solar cell, and the grade multi-crystalline silicon purity of producing chip then requires higher, need reach 99.999999%-99.9999999%.Development along with new and high technology and the needs as strategic materials, high-purity material is more and more higher for the requirement of purity, also seems further important to the accurate detection of its impurities.The new ionization source that development effectively can ionize conductor, semiconductor and non-conductor high-purity material simultaneously not only can be applied to the analysis of high-purity material, promotes the development and production of high-purity material, the development of the instrument that can also advance science.
Laser assisted glow discharge ionization is the solid sample ionization that laser assisted is strengthened causing direct voltage or radio-frequency voltage, no matter the introducing of laser can glow discharge be that direct voltage causes or radio-frequency voltage causes and all can ionize conductor, semiconductor and idioelectric solid, and the introducing of laser can by changing the wavelength of lasing light emitter, optionally make the atom of element to be measured close to 100% ionization, increase main signal intensity, improve signal to noise ratio, intense laser radiation can cause effective, consistent ionization, thus helps to suppress matrix effect.This ionization source and mass spectrometer coupling are very suitable for the detection analysis of the various trace impurity compositions of the high-purity material such as conductor and non-conductor.
At present, the detection method of high-purity material mainly contains at present: mass spectrometry (spark source electric discharge ionization mass spectrometry, Thermal Ionization Mass Spectrometry, inductively coupled plasma ionization mass spectrometry, secondary ion volume ionization mass spectrography and glow discharge ionization mass spectrometry), spectra methods (spark emission spectroscopic method, X-ray fluorescence method, GFAAS and inductively coupled plasma emission spectrography).Mass spectrum rule comparatively spectroscopic methodology sensitivity is good, and detectability is low, disturbs little, and can carry out multielement and detect simultaneously.Therefore, mass spectrometry progressively dominate in the analysis of high-purity material.Glow discharge spectrometry is the elemental analysis method simultaneously with analytical element scope and enough sensitivity the most widely, compared with commonly using the conventional detection method inductively coupled plasma ionization mass spectrometry of high-purity material at present, glow discharge spectrometry is directly analyzed solid, avoid when solid conversion being become solution because of staining and sensitivity decrease of causing in the processes such as dissolving, dilution, and the method is large to the analysis area of sample, the data obtained result has good representativeness.Glow discharge spectrometry at present more adopts direct current glow discharge ionization form, and can only obtain the energy realized needed for ionization from cathode fall, be modal discharge mode in glow discharge, but it is mainly used in the detection of conductor material.For the detection of semiconductor and non-conductive material, direct current glow discharge ionization needs to introduce conductive matrices, detects accuracy not high.The degree of consistency of conventional glow discharge form different element ionization is not high at present, and cannot reach consistent ionization, matrix effect is more obvious.Therefore, exploitation effectively can ionize the ionization source of conductor, semiconductor and non-conductor high-purity material, to the accuracy, the sensitivity that improve high-purity material detection analysis, promotes that the development of the development and production of China's high-purity material and mass spectrometer is all significant.
Utility model content
For solving the problem, the utility model provides one not by specimen material conductor, semiconductor and idioelectric restriction, and Ionization Efficiency is high, transverse spatial distribution rate is high, alternative ionizes and ion introducing efficiency is high, there is detection applied range, the laser assisted glow discharge ionization device that highly sensitive, detectability is low.
The utility model solves the technical scheme that its technical problem adopts: a kind of laser assisted glow discharge ionization device, comprise LASER Light Source, mass spectrometer, the ionization chamber closed and the ionization main body being positioned at described ionization chamber, described ionization main body comprises the copper post holder that hollow copper post is housed and the sample holder that sample is housed, described hollow copper post is connected earth potential by wire with ionization chamber base plate, described sample introduces interface and the conducting of glow discharge power supply by the glow discharge voltage on ionization chamber, described copper post holder and sample holder are just to setting, described hollow copper post is provided with laser hole at the offside of sample and forms ionized region in laser hole, the laser that described LASER Light Source sends through vertical irradiation after hollow copper post on to the sample, the repeller plate ion in ionized region being sent into described mass spectrometer is provided with in the side of described ionized region, described repeller plate introduces interface and DC high-voltage power supply conducting by the repulsion voltage on ionization chamber.
Be further used as the improvement of technical solutions of the utility model, described ionization chamber base plate is provided with puts voltage connector with the DC self-bias of external circuit conducting.
Be further used as the improvement of technical solutions of the utility model, described ionization main body also comprises upper bed-plate, described upper bed-plate is provided with the left holder of repeller plate and the right holder of repeller plate, described repeller plate is contained on the left holder of described repeller plate and the right holder of repeller plate by repeller plate fixed block, and repeller plate fixed block can slide the distance adjusting repeller plate and ionized region on the left holder of repeller plate and the right holder of repeller plate.
Be further used as the improvement of technical solutions of the utility model, described copper post holder and sample holder are fixedly mounted on the U-shaped groove holder between the left holder of repeller plate and the right holder of repeller plate, the right position adjusting screw(rod) being horizontally through described U-shaped groove holder is housed between the left holder of described repeller plate and the right holder of repeller plate, and described right position adjusting screw(rod) is provided with the screw thread driving U-shaped groove holder transverse shifting between the left holder of repeller plate and the right holder of repeller plate.
Be further used as the improvement of technical solutions of the utility model, described upper bed-plate is equipped with positioning knob, described positioning knob is equipped with the locating piece can fixing U-shaped groove holder after positioning knob screws.
Be further used as the improvement of technical solutions of the utility model, described sample holder is provided with sample conducting block, and described sample is embedded in sample conducting block, and described hollow copper post is separated by ceramic washer and sample and is fixed on copper post holder.
Be further used as the improvement of technical solutions of the utility model, described upper bed-plate is fixed on middle base, described middle base is contained in bottom ionization chamber by lower bottom base, described middle base be provided with regulate described middle base on lower bottom base with the front and back position adjusting knob of mass spectrometer spacing.
Be further used as the improvement of technical solutions of the utility model, be provided with vacuum gauge and aspiration pump with the inner chamber conducting of described ionization chamber, described ionization chamber is provided with intake valve, is provided with described intake valve conducting the air inlet pipe extending described ionized region.
Be further used as the improvement of technical solutions of the utility model, described LASER Light Source is located at outside ionization chamber, and the laser that described LASER Light Source sends is injected in ionization chamber by the plane optical window on ionization chamber, between described LASER Light Source and plane optical window, condenser lens is housed.
Be further used as the improvement of technical solutions of the utility model, described ionization chamber sidewall is provided with some glass windows.
The beneficial effects of the utility model: the utility model adopts hollow cathode structure (hollow copper post) and laterally places relative to mass spectrometer interface so that introduce laser-assisted ionization, repeller plate structure can help again an ion longitudinally electric field push mass spectrometer interface.Ionization entire body is fixed in U-shaped groove holder, direct current glow discharge voltage or radio frequency glow discharge voltage introduce interface access sample by glow discharge voltage, wire connects hollow copper post and ionization chamber lower panel, thus earth potential is introduced hollow copper post, make to produce glow discharge in hollow copper post.Laser is got on sample by hollow copper post with 90 ° of angle incidences, assistant reinforcement glow discharge, to cause or radio-frequency voltage causes and all can ionize conductor, semiconductor and non-conductor high-purity material sample no matter glow discharge is direct voltage.It is high that LASER Light Source has Ionization Efficiency, horizontal space is differentiated high, the feature of alternative ionization, LASER Light Source and glow discharge combine can strengthen ionization effect, and this ionization main body is combined with mass spectrometer and can obtains good sensitivity for analysis and can suppress matrix effect to a certain extent.Repeller plate is arranged on the side of ionization main body, enters mass spectrometer by changing repeller plate voltage and maximizing the repulsion ion produced that discharges with ionized region relative position.Select the ceramic cage ring of adjustment different-thickness can change the relative distance of sample and hollow copper post, thus controlled discharge effect.Adjustment right position adjusting screw(rod) adjustable ionization main body relative to the horizontal relative distance of mass spectrometer interface, the fore-and-aft distance of the adjustment adjustable ionization main body of front and back position adjusting knob and mass spectrometer interface thus control the transmission situation of ion.
The utility model introduces glow discharge voltage signal, earth potential by said structure, and effectively the ion that electric discharge produces can be introduced mass spectrometer by repeller plate introducing DC high voltage, and improve ion transmission efficiency, detection sensitivity is high.The present invention introduces laser-assisted ionization by LASER Light Source, the wavelength of LASER Light Source can be changed simultaneously, optionally make the atom of element to be measured close to 100% ionization, increase main signal intensity, improve signal to noise ratio, intense laser radiation can cause effective, consistent ionization, thus helps to suppress matrix effect.The utility model protects vacuum degree in positive ionization chamber simultaneously and background gas is sent into electric discharge ionized space by accurate and effective, ensures that discharging condition is optimum.The utility model can be applicable to the analyzing and testing of trace impurity composition in solid high-purity material.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Fig. 1 is the main view principle structural map of the utility model embodiment overall structure;
Fig. 2 is the utility model embodiment overall structure side-looking principles of construction figure.
Embodiment
With reference to Fig. 1, Fig. 2, the utility model provides a kind of laser assisted glow discharge ionization device, comprise LASER Light Source 20, mass spectrometer 37, the ionization chamber 19 closed and the ionization main body being positioned at described ionization chamber 19, described ionization main body comprises the copper post holder 2 that hollow copper post 1 is housed and the sample holder 7 that sample 5 is housed, described hollow copper post 1 is connected earth potential by wire with ionization chamber base plate 24, described sample 5 introduces interface 27 and glow discharge power supply 26 conducting by the glow discharge voltage on ionization chamber 19, the voltage that glow discharge power supply 26 provides is introduced interface 27 by glow discharge voltage and is accessed sample 5, described copper post holder 2 and sample holder 7 are just to setting, described hollow copper post 1 is provided with laser hole at the offside of sample 5 and forms ionized region in laser hole, after the laser that described LASER Light Source 20 sends passes hollow copper post 1, vertical irradiation is on described sample 5, the repeller plate 34 ion in ionized region being sent into described mass spectrometer 37 is provided with in the side of described ionized region, repeller plate 34 is right against ionization chamber rear board 36, mass spectrometer interface is located at ionization chamber rear board 36, described repeller plate 34 introduces interface 33 and DC high-voltage power supply conducting 32 by the repulsion voltage on ionization chamber 19.Repulsion voltage introducing interface 33 introduces the high direct voltage access repeller plate 34 that DC high-voltage power supply 36 provides, and helps repulsion to guide ion to enter mass spectrometer 37.Described ionization chamber base plate 24 is provided with puts voltage connector 29 with the DC self-bias of external circuit 28 conducting.If then DC offset voltage connector 29 is vacant in the DC offset voltage access external circuit 28(direct current glow discharge that radio frequency discharge produces by DC offset voltage connector 29), change DC offset voltage by adjustment external circuit 28 thus adjustment radio frequency discharge situation.Described LASER Light Source 20 is located at outside ionization chamber 19, and the laser that described LASER Light Source 20 sends is injected in ionization chamber 19 by the plane optical window 22 on ionization chamber, between described LASER Light Source 20 and plane optical window 22, condenser lens 21 is housed.LASER Light Source 20 and condenser lens 21 are fixed on laser fixed mount, after the laser that LASER Light Source 20 is launched is modulated by condenser lens 21, enter ionization chamber 19 by plane optical window 22, after hollow copper post 1,90 ° of angle incidences are got on sample 5, and assistant reinforcement glow discharge ionizes.This example utilizes glow discharge voltage signal to access sample 5, earth potential access hollow copper post 1, in hollow copper post 1, carry out glow discharge produce plasma, the laser that recycling LASER Light Source 20 sends is got on sample 5 with 90 ° of angle incidences and is added dense ionization to glow discharge, can to conductor, semiconductor and non-conductor high-purity material ionize, the introducing of laser can by changing the wavelength of lasing light emitter, optionally make the atom of element to be measured close to 100% ionization, increase main signal intensity, improve signal to noise ratio, intense laser radiation can cause effectively, consistent ionization, thus help to suppress matrix effect to be of value to and to carry out mass spectral analysis.If glow discharge is caused by radio-frequency power supply, also the DC self-bias that radio frequency discharge produces can be put voltage access external circuit 28, change self-bias voltage by regulating external circuit 28 and optimize radio frequency discharge effect.Relative distance simultaneously between adjustment ionization main body and mass spectrometer 37 can optimize radio frequency discharge effect.
Described ionization main body also comprises upper bed-plate 15, described upper bed-plate 15 is provided with the left holder of repeller plate 9 and the right holder 10 of repeller plate, described repeller plate 34 is contained on the left holder of described repeller plate 9 and the right holder 10 of repeller plate by repeller plate fixed block 35, and repeller plate fixed block 35 can slide the distance adjusting repeller plate 34 and ionized region on the left holder of repeller plate 9 and the right holder 10 of repeller plate.Described copper post holder 2 and sample holder 7 are fixedly mounted on the U-shaped groove holder 8 between the left holder of repeller plate 9 and the right holder of repeller plate 10, the right position adjusting screw(rod) 11 being horizontally through described U-shaped groove holder 8 is housed between the left holder of described repeller plate 9 and the right holder of repeller plate 10, and described right position adjusting screw(rod) 11 is provided with the screw thread driving U-shaped groove holder 8 transverse shifting between the left holder of repeller plate 9 and the right holder 10 of repeller plate.Described upper bed-plate 15 is equipped with positioning knob 14, described positioning knob 14 is equipped with the locating piece 12 can fixing U-shaped groove holder 8 after positioning knob 14 screws.Rotate right position adjusting screw(rod) 11 adjustable electric from the lateral separation of main body relative to mass spectrometer interface.Regulate locating piece 12 to fix right position adjusting screw(rod) 11 by positioning knob 14 after ionization main body lateral separation has adjusted, thus ensure ionization main body and relative lateral separation between mass spectrometer interface.Wherein, described sample holder 7 is provided with sample conducting block 6, and described sample 5 is embedded in sample conducting block 6, and described hollow copper post 1 is separated by ceramic washer 3 and sample 5 and is fixed on copper post holder 2.
Described upper bed-plate 15 is fixed on middle base 17, and described middle base 17 is contained in bottom ionization chamber 19 by lower bottom base 18, described middle base 17 be provided with regulate described middle base 17 on lower bottom base 18 with the front and back position adjusting knob 16 of mass spectrometer 37 spacing.Front and back position adjusting knob 16, can the front and back position of integrated regulation said apparatus by base 17 position in adjustment through middle base 17.
Be provided with vacuum gauge 31 and aspiration pump 30 with the inner chamber conducting of described ionization chamber 19, described ionization chamber 19 is provided with intake valve 25, is provided with the conducting of described intake valve 25 air inlet pipe 13 extending described ionized region.Vacuum gauge 31, aspiration pump 30, intake valve 25 and air inlet pipe 13 form air-channel system, and air-channel system vacuumizes for ionization chamber and provides background gas.
Described ionization chamber 19 sidewall is provided with some glass windows 23.Be convenient to observe radio frequency glow discharge situation, ionization chamber 19 can be opened to change sample and adjustment solid mechanical structure.
The operation principle of the present embodiment is: the voltage signal that glow discharge power supply 26 provides is introduced interface 27 by glow discharge voltage and accessed sample conducting block 6 through wire by sample holder 7, and sample 5 evenly obtains voltage signal by sample conducting block.Ionization chamber base plate 24 and glow discharge power supply 26 output line shield end and connect for earth potential, and the wire that hollow copper post 1 accesses to be connected with ionization chamber base plate 24 by copper post holder 2 thus to introduce earth potential.Sample 5 can be ionized in the earth potential of its high voltage and hollow copper post 1 discharges.The laser that LASER Light Source 20 is launched is got on sample 5 through the plane optical window 22 that ionization chamber 19 is installed with 90 ° of angle incidences after condenser lens 21 is modulated, and launches the glow discharge ionization in different wave length laser selective assistant reinforcement hollow copper post 1 by adjustment LASER Light Source 20.The ion that ionization produces then can be pushed in fully mass spectrometer 37 under repeller plate 34 High Pressure.If glow discharge power supply 26 selects radio-frequency power supply, the DC self-bias that region of discharge produces is put voltage and is also put voltage connector 29 by DC self-bias and be connected with external circuit 28, regulates 28, external circuit can change DC self-bias and puts voltage thus optimize radio frequency discharge and ionize effect.Glow discharge device can by regulating right position adjusting screw(rod) 11 transverse shifting on the right side of mass spectrometer interface, the ion finding different sample ionization to produce is helped to be introduced into the optimal location of mass spectrometer 37, to realize improving the object that ion introduces efficiency.Repeller plate 34 connects DC high voltage and can effectively repulsion guide the ion be ionized to enter mass spectrometer 37, and repeller plate 34 is by changing DC high voltage value and optimizing with the relative spacing of region of discharge ion to enter mass spectrometer 37 efficiency from ionization chamber 19.Front and back position adjusting knob 16 can the fore-and-aft distance of integrally-regulated repeller plate 34 mass spectrometer 37 relative to region of discharge, optimizes ion transmission efficiency.Laser ionization and aura ionization all need just can occur under certain vacuum degree and inertia background gas, aspiration pump 30 can be bled to ionization chamber 19, vacuum gauge 31 can monitor ionization chamber vacuum degree, intake valve 25(needle-valve) adjustable inertia background gas enters the flow of ionization source cavity, and air inlet steel pipe 13 can ensure that inertia background gas accurately enters into region of discharge.
The method of this ionization source and detection is not owing to being subject to specimen material conductor, semiconductor and idioelectric restriction, and Ionization Efficiency is high, transverse spatial distribution rate is high, alternative ionizes and ion introducing efficiency is high, there is detection applied range, the feature that highly sensitive, detectability is low.
Certainly, the invention is not limited to above-mentioned execution mode, those of ordinary skill in the art also can make equivalent variations or replacement under the prerequisite without prejudice to the utility model spirit, and these equivalent modification or replacement are all included in the application's claim limited range.
Claims (10)
1. a laser assisted glow discharge ionization device, it is characterized in that: comprise LASER Light Source, mass spectrometer, the ionization chamber closed and the ionization main body being positioned at described ionization chamber, described ionization main body comprises the copper post holder that hollow copper post is housed and the sample holder that sample is housed, described hollow copper post is connected earth potential by wire with ionization chamber base plate, described sample introduces interface and the conducting of glow discharge power supply by the glow discharge voltage on ionization chamber, described copper post holder and sample holder are just to setting, described hollow copper post is provided with laser hole at the offside of sample and forms ionized region in laser hole, the laser that described LASER Light Source sends through vertical irradiation after hollow copper post on to the sample, the repeller plate ion in ionized region being sent into described mass spectrometer is provided with in the side of described ionized region, described repeller plate introduces interface and DC high-voltage power supply conducting by the repulsion voltage on ionization chamber.
2. laser assisted glow discharge ionization device according to claim 1, is characterized in that: described ionization chamber base plate is provided with puts voltage connector with the DC self-bias of external circuit conducting.
3. laser assisted glow discharge ionization device according to claim 1, it is characterized in that: described ionization main body also comprises upper bed-plate, described upper bed-plate is provided with the left holder of repeller plate and the right holder of repeller plate, described repeller plate is contained on the left holder of described repeller plate and the right holder of repeller plate by repeller plate fixed block, and repeller plate fixed block can slide the distance adjusting repeller plate and ionized region on the left holder of repeller plate and the right holder of repeller plate.
4. laser assisted glow discharge ionization device according to claim 3, it is characterized in that: described copper post holder and sample holder are fixedly mounted on the U-shaped groove holder between the left holder of repeller plate and the right holder of repeller plate, the right position adjusting screw(rod) being horizontally through described U-shaped groove holder is housed between the left holder of described repeller plate and the right holder of repeller plate, and described right position adjusting screw(rod) is provided with the screw thread driving U-shaped groove holder transverse shifting between the left holder of repeller plate and the right holder of repeller plate.
5. laser assisted glow discharge ionization device according to claim 4, is characterized in that: described upper bed-plate is equipped with positioning knob, described positioning knob is equipped with the locating piece can fixing U-shaped groove holder after positioning knob screws.
6. laser assisted glow discharge ionization device according to claim 1, it is characterized in that: described sample holder is provided with sample conducting block, described sample is embedded in sample conducting block, and described hollow copper post is separated by ceramic washer and sample and is fixed on copper post holder.
7. laser assisted glow discharge ionization device according to claim 3, it is characterized in that: described upper bed-plate is fixed on middle base, described middle base is contained in bottom ionization chamber by lower bottom base, described middle base be provided with regulate described middle base on lower bottom base with the front and back position adjusting knob of mass spectrometer spacing.
8. laser assisted glow discharge ionization device according to claim 1, it is characterized in that: be provided with vacuum gauge and aspiration pump with the inner chamber conducting of described ionization chamber, described ionization chamber is provided with intake valve, is provided with described intake valve conducting the air inlet pipe extending described ionized region.
9. laser assisted glow discharge ionization device according to claim 1, it is characterized in that: described LASER Light Source is located at outside ionization chamber, the laser that described LASER Light Source sends is injected in ionization chamber by the plane optical window on ionization chamber, between described LASER Light Source and plane optical window, condenser lens is housed.
10. laser assisted glow discharge ionization device according to claim 1, is characterized in that: described ionization chamber sidewall is provided with some glass windows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420833217.6U CN204303750U (en) | 2014-12-25 | 2014-12-25 | A kind of laser assisted glow discharge ionization device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420833217.6U CN204303750U (en) | 2014-12-25 | 2014-12-25 | A kind of laser assisted glow discharge ionization device |
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| CN204303750U true CN204303750U (en) | 2015-04-29 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104538275A (en) * | 2014-12-25 | 2015-04-22 | 华南师范大学 | Laser-assisted glow discharge ionization device |
| CN106898861A (en) * | 2017-03-01 | 2017-06-27 | 合肥工业大学 | A kind of plasma antenna for working in Terahertz frequency range |
| CN110648898A (en) * | 2019-08-16 | 2020-01-03 | 上海裕达实业有限公司 | Mass spectrum device and method for detecting multi-component gas in freeze-drying process |
-
2014
- 2014-12-25 CN CN201420833217.6U patent/CN204303750U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104538275A (en) * | 2014-12-25 | 2015-04-22 | 华南师范大学 | Laser-assisted glow discharge ionization device |
| CN106898861A (en) * | 2017-03-01 | 2017-06-27 | 合肥工业大学 | A kind of plasma antenna for working in Terahertz frequency range |
| CN110648898A (en) * | 2019-08-16 | 2020-01-03 | 上海裕达实业有限公司 | Mass spectrum device and method for detecting multi-component gas in freeze-drying process |
| CN110648898B (en) * | 2019-08-16 | 2022-02-11 | 上海裕达实业有限公司 | Mass spectrum device and method for detecting multi-component gas in freeze-drying process |
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Effective date of registration: 20160307 Address after: 510006 No. 378 West Ring Road, Guangzhou University, Guangzhou, Guangdong, Panyu District Patentee after: South China Normal University Address before: 510006 No. 378 West Ring Road, Guangzhou University, Guangzhou, Guangdong, Panyu District Patentee before: South China Normal University Patentee before: Guangzhou Hexin Analytical Instrument Co., Ltd. |
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Granted publication date: 20150429 Termination date: 20161225 |