CN104075932A - Multi-target laser ablation sample chamber - Google Patents
Multi-target laser ablation sample chamber Download PDFInfo
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- CN104075932A CN104075932A CN201410273873.XA CN201410273873A CN104075932A CN 104075932 A CN104075932 A CN 104075932A CN 201410273873 A CN201410273873 A CN 201410273873A CN 104075932 A CN104075932 A CN 104075932A
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Abstract
The invention can be applied to the existing main laser ablation technology, and in particular relates to a multi-target laser ablation sample chamber. The multi-target laser ablation sample chamber comprises a hollow shell, an observation window and a transmission light incidence opening, wherein a rectangular arrangement opening is formed in the front side surface of the hollow shell; a sample target rack is horizontally fixed in the hollow shell through the arrangement opening, and a sealed inner cavity is formed above the sample target rack; a sealing side plate is fixed on the front side surface of the hollow shell through a screw; the front side surface of the hollow shell and the sealing side plate are sealed through an O-shaped sealing ring; at least three air inlets which are arrayed in sequence along the horizontal direction are formed in the left side surface of the inner cavity; an air outlet is formed in the right side surface of the inner cavity; the air outlet is coaxial with the air inlet in the middle of the left side surface of the hollow shell. The problem that the conventional sample chamber can only hold a small number of samples and the sample analysis accuracy is affected by frequent replacement of samples is solved; furthermore, vortex airflow is not generated in an aerosol transmission process; the accuracy and the precision of an analysis result are improved.
Description
Technical field
The present invention can be applied in existing main flow laser ablationtechnique, is specifically related to a kind of laser ablation sample chamber of many target position.
Background technology
Laser ablationtechnique, because realizing the in-situ micro area Sampling techniques of tens microns, with inductivity coupled plasma mass spectrometry coupling, can carry out the main trace element of sample and the in-situ micro area of isotopics and analyze.Be widely used in research fields such as geology, material, biology, chemistry, archaeologies in recent years.
The laser that laser ablationtechnique produces laser instrument focuses to sample surfaces to be studied through the light path of particular design, the bond energy that destroys sample produces trickle sample particle, is then transported to by degrading the sample particle (gasoloid) the analysis of carrying out trace element or isotopics in plasma mass by carrier gas.
A key factor that affects laser ablation analytical technology accuracy of analysis is that sample is degrading the fractionation effect producing with transmitting procedure, and this fractionation effect mainly results from sample and degrades in pond.Because existence is degraded, position difference causes degrading generation gasoloid and gasoloid transmitting procedure is not quite similar in traditional sample chamber, and there is eddy current in some position, causing degrading gasoloid can not transfer in subsequent analysis system completely, thus the correctness of impact analysis result.
And traditional sample chamber volume is little, make with a load sample amount few, in analytic process, need frequently to open sample chamber cap and change sample target, and can introduce owing to uncapping and changing sample process the instability that air (particularly oxygen) causes follow-up plasma ion source, and change space charge effect, thereby affect precision of analysis.
Summary of the invention
The object of this invention is to provide a kind of laser ablation sample chamber of many target position; overcome existing sample chamber placement sample few; often varying product easily affects the problem of the accuracy of sample analysis, and easily produces eddy airstream and the problem that affects sample analysis accuracy is improved for traditional sample chamber.
For this reason, the invention provides a kind of laser ablation sample chamber of many target position, comprise the hollow shell of horizontal cube shaped, the upper surface of hollow shell and lower surface have view window and transmitted light entrance port, on observation panel and transmitted light entrance port, transparency window is housed, the leading flank of described hollow shell has the placement mouth of rectangle, sample target holder level is fixed on the inner inner chamber that also forms above it sealing of hollow shell by placing mouth, sealing side plate is fixed by screws on the leading flank of hollow shell, between the leading flank of hollow shell and sealing side plate, seal by O RunddichtringO,
On the left surface of described inner chamber, have the air intake opening that at least three horizontal directions are arranged in order, have a gas outlet on the right flank of inner chamber, the air intake opening in the middle of on described gas outlet and hollow shell left surface is coaxial.
The position that described hollow shell inside surface contacts with sample target holder all offers groove, is provided with seal in groove.
The inner of described gas outlet and the upper and lower surface of inner chamber and front and rear surfaces are curved without dead angle transition.
Described air intake opening is the ellipse of long axis horizontal direction, the long 0.3~0.5mm of major axis of middle oval air intake opening, the long 0.5~1mm of minor axis; The area of the oval air intake opening on both sides is greater than 2mm
2, described gas outlet is the circle that internal diameter is greater than 2mm.
The spatial volume of described inner chamber is less than 1L, and the vertical range of the upper surface of the lower surface of observation panel and sample target holder is 3~10mm.
Described sample target holder is made up of substrate and the target stand being arranged on substrate, and described target stand comprises the hole shape target stand of thin slice sample target stand and different pore size.
Described hole shape target stand runs through substrate, be made up of the target stand hole on top and the pilot hole coaxial communication of bottom, the internal diameter of described pilot hole is greater than the internal diameter in target stand hole, and the top in target stand hole is provided with positioning retainer ring, pilot hole inwall is provided with screw thread, and locating ring is screwed in pilot hole by screw thread.
The leading flank center of described sample target offers screw.
The position that described hollow shell inwall forms inner chamber all scribbles poly tetrafluoroethylene.
The material of described hollow shell all adopts organic glass or engineering plastics or density little and have alloy aluminum, a titanium magnesium alloy of better intensity; On transparency window on described observation panel, be coated with anti-reflection film; The surface of described sample target holder is coated with Teflon film.
Beneficial effect of the present invention:
1, adopt three air intake opening air inlets, and in conjunction with streamlined outlet design, make to degrade gasoloid and in sample chamber, produce smooth air, can not produce eddy airstream because of the dead angle of sample chamber.
2, specimen holder adopts straight shape design, sample is changed number of times and is reduced, and operate simple and easy, the application of the design of location structure and bottom set collar makes sample more easily be fixed on restfully identical height, and can directly utilize, reflected light is from the observation passage of specimen holder below and sample interior structure is carried out on surface and surface topography is observed.
3, Multi-example amount Installing design, reduces sample chamber open frequency, and the loading of sample is easier, has avoided switching because of gas circuit the instrument parameter causing simultaneously and has changed, and in improving analysis efficiency, has ensured analysis result accuracy and precision.
Below with reference to accompanying drawing, the present invention is described in further details.
Brief description of the drawings
Fig. 1 is the structural representation of hollow shell.
Fig. 2 is general structure vertical view of the present invention.
Fig. 3 is the right pseudosection of general structure of the present invention.
Fig. 4 is the main pseudosection of general structure of the present invention.
Fig. 5 is the schematic diagram of the sample target holder of full hole shape target stand.
Fig. 6 is the cut-open view of the sample target holder of full hole shape target stand.
Fig. 7 is the schematic diagram of the sample target holder with hole shape target stand and thin slice sample target stand.
Fig. 8 is the schematic diagram of the sample target holder of the hole shape target stand with different pore size.
Description of reference numerals: 1, hollow shell; 2, view window; 3, transmitted light entrance port; 4, place mouth; 5, sample target holder; 6, inner chamber; 7, sealing side plate; 8, air intake opening; 9, gas outlet; 10, groove; 11, seal; 12, substrate; 13, thin slice sample target stand; 14, hole shape target stand; 15, target stand hole; 16, pilot hole; 17, positioning retainer ring; 18, locating ring; 19, screw.
embodiment
Embodiment 1:
A kind of laser ablation sample chamber of many target position, as shown in Fig. 1~4, comprise the hollow shell 1 of horizontal cube shaped, the upper surface of hollow shell 1 and lower surface have view window 2 and transmitted light entrance port 3, on observation panel 2 and transmitted light entrance port 3, transparency window is housed, the leading flank of described hollow shell 1 has the placement mouth 4 of rectangle, sample target holder 5 levels are fixed on the inner inner chamber 6 that also forms above it sealing of hollow shell 1 by placing mouth 4, sealing side plate 7 is fixed by screws on the leading flank of hollow shell 1, between the leading flank of hollow shell 1 and sealing side plate 7, seal by O RunddichtringO, the position that described hollow shell 1 inside surface contacts with sample target holder 5 all offers groove 10, is provided with seal 11 in groove 10.
On the left surface of above-mentioned inner chamber 6, have the air intake opening 8 that at least three horizontal directions are arranged in order, have a gas outlet 9 on the right flank of inner chamber 6, the air intake opening 8 in the middle of on described gas outlet 9 and hollow shell 1 left surface is coaxial.
Sample target holder 5 is inserted in the groove 10 of hollow shell 1 inside surfaces by placing mouth 4, and seal by seal 11, seal 11 is sealing strip, again sealing side plate 7 is installed in placement mouthful 4 sides, place, so just can form in the inner and upper of hollow shell 1 the rectangular parallelepiped inner chamber 6 of a sealing, like this in carrying out laser ablation, the sample of placing on sample target holder 5 number just determined disposable laboratory sample amount, square space in the present invention makes can load a large amount of samples on sample target holder 5 simultaneously, so just can avoid needing less frequently to change because of sample the analytical error that sample causes.
Embodiment 2:
In the present embodiment, as shown in Figure 4, the upper and lower surface of the inner of gas outlet 9 and inner chamber 6 and front and rear surfaces are curved without dead angle transition.Described air intake opening 8 is the ellipse of long axis horizontal direction, the long 0.3~0.5mm of major axis of middle oval air intake opening 8, the long 0.5~1mm of minor axis; The area of the oval air intake opening 8 on both sides is greater than 2mm
2, described gas outlet 9 is greater than the circle of 2mm for internal diameter.The spatial volume of described inner chamber 6 is less than 1L, and the vertical range of the upper surface of the lower surface of observation panel 2 and sample target holder 5 is 3~10mm.
A traditional air intake opening is changed into three air intake openings 8 and cooperatively interact, such three strands of air-flows superpose mutually, do not fling air-flow, be without dead angle transition by gas outlet 9 Front-end Design, air-flow there will not be eddy airstream in the process of giving vent to anger like this, can give vent to anger reposefully, takes away and degrades gasoloid.
The design without dead angle here, can be one piece casting type make arc-shaped transition section, can be also that half cucurbit of making two arcuations is spliced mutually.
Embodiment 3:
As shown in Figure 5 and Figure 6, sample target holder 5 is made up of substrate 12 and the target stand being arranged on substrate, described target stand comprises the hole shape target stand 14 of thin slice sample target stand 13 and different pore size, in the present embodiment, sample cell on sample target holder 5 is diversified, can be single full hole shape target stand 14(as shown in Figure 5), also can be the hole shape target stand 14 (as shown in Figure 8) of different pore size, also can be that hole shape target stand 14 and thin slice sample target stand 13 all have (as shown in Figure 7) simultaneously, specifically select different sample target holders 5 according to the sample that will test.
Thin slice sample target stand 13 belongs to traditional loading pattern; The hole shape target stand 14 hole shape target stands 14 here run through substrate 12, formed by the target stand hole 15 on top and pilot hole 16 coaxial communication of bottom, the internal diameter of described pilot hole 16 is greater than the internal diameter in target stand hole 15, the top in target stand hole 15 is provided with positioning retainer ring 17, pilot hole 16 inwalls are provided with screw thread, and locating ring 18 is screwed in pilot hole 16 by screw thread.When load sample, sample is put into from pilot hole 16, then continued to screw in locating ring 18 in pilot hole 16, screw in the process of locating ring 18, sample can be brought in target stand hole 15, finally props up positioning retainer ring 17 fixing, has so just completed the loading of sample.
Embodiment 4:
Because sample target holder 5 is inserted in hollow shell 1, add the effect of seal 11, make in taking out sample target holder 5 more difficult, with reference to Fig. 2, leading flank center at sample target holder 5 offers screw 19, when needs take out and change sample target holder 5, only need to be with externally threaded handle precession screw 19 with one, then pull handle just sample target holder 5 easily can be taken out.
Embodiment 5:
The material of described hollow shell 1 all adopts organic glass or engineering plastics or density little and have alloy aluminum, a titanium magnesium alloy of better intensity; On transparency window on described observation panel 2, be coated with anti-reflection film, improve like this laser transmittance, ensure to degrade the laser energy density of sample; The surface of described sample target holder 5 is coated with Teflon film, the position that hollow shell 1 inwall forms inner chamber 6 all scribbles poly tetrafluoroethylene, avoided gasoloid in experimentation directly to contact with inner chamber 6, the chemical stability of poly tetrafluoroethylene and high lubricated not viscosity flow out rapidly gasoloid in the process of transmission from gas outlet.
In sum, the present invention not only can realize and introduce multiple multiple sample target simultaneously, and the design of flat central puff prot makes sample degrade aerocolloidal migration ability and its present position is irrelevant, all samples has identical gasoloid transfer efficiency, avoided classic method back and forth stripping erosion Chi Gai change sample and the change of the instrument condition that causes and the analysis result accuracy that causes reduces.
The present embodiment does not have specifically described part all to belong to common practise and the known technology of the art, and we can provide reference if needed.
More than exemplifying is only to illustrate of the present invention, does not form the restriction to protection scope of the present invention, within the every and same or analogous design of the present invention all belongs to protection scope of the present invention.
Claims (10)
1. the laser ablation sample chamber of target position more than a kind, comprise the hollow shell (1) of horizontal cube shaped, the upper surface of hollow shell (1) and lower surface have view window (2) and transmitted light entrance port (3), on observation panel (2) and transmitted light entrance port (3), transparency window is housed, it is characterized in that: the leading flank of described hollow shell (1) has the placement mouth (4) of rectangle, sample target holder (5) level is fixed on the inner inner chamber (6) that also forms above it sealing of hollow shell (1) by placing mouthful (4), sealing side plate (7) is fixed by screws on the leading flank of hollow shell (1), between the leading flank of hollow shell (1) and sealing side plate (7), seal by O RunddichtringO,
On the left surface of described inner chamber (6), have the air intake opening (8) that at least three horizontal directions are arranged in order, on the right flank of inner chamber (6), have a gas outlet (9), the air intake opening (8) in the middle of on described gas outlet (9) and hollow shell (1) left surface is coaxial.
2. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: the position that described hollow shell (1) inside surface contacts with sample target holder (5) all offers groove (10), is provided with seal (11) in groove (10).
3. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: upper and lower surface and the front and rear surfaces of the inner of described gas outlet (9) and inner chamber (6) are curved without dead angle transition.
4. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: the ellipse that described air intake opening (8) is long axis horizontal direction, the long 0.3~0.5mm of major axis of middle oval air intake opening (8), the long 0.5~1mm of minor axis; The area of the oval air intake opening (8) on both sides is greater than 2mm
2, described gas outlet (9) are greater than the circle of 2mm for internal diameter.
5. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: the spatial volume of described inner chamber (6) is less than 1L, and the vertical range of the upper surface of the lower surface of observation panel (2) and sample target holder (5) is 3~10mm.
6. the laser ablation sample chamber of many target position as claimed in claim 1, it is characterized in that: described sample target holder (5) is by substrate (12) and be arranged on the target stand formation on substrate, and described target stand comprises the hole shape target stand (14) of thin slice sample target stand (13) and different pore size.
7. the laser ablation sample chamber of many target position as claimed in claim 6, it is characterized in that: described hole shape target stand (14) runs through substrate (12), formed by the target stand hole (15) on top and pilot hole (16) coaxial communication of bottom, the internal diameter of described pilot hole (16) is greater than the internal diameter of target stand hole (15), the top in target stand hole (15) is provided with positioning retainer ring (17), pilot hole (16) inwall is provided with screw thread, and locating ring (18) is screwed in pilot hole (16) by screw thread.
8. the laser ablation sample chamber of the many target position as described in claim 1 or 5, is characterized in that: the leading flank center of described sample target holder (5) offers screw (19).
9. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: the position that described hollow shell (1) inwall forms inner chamber (6) all scribbles poly tetrafluoroethylene.
10. the laser ablation sample chamber of many target position as claimed in claim 1, is characterized in that: the material of described hollow shell (1) is organic glass or engineering plastics; On transparency window on described observation panel (2), be coated with anti-reflection film; The surface of described sample target holder (5) is coated with Teflon film.
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CN201410273873.XA CN104075932B (en) | 2014-06-19 | 2014-06-19 | A kind of laser ablation sample room of many target position |
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CN201410273873.XA CN104075932B (en) | 2014-06-19 | 2014-06-19 | A kind of laser ablation sample room of many target position |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105954088A (en) * | 2016-07-15 | 2016-09-21 | 中国工程物理研究院材料研究所 | Laser ablation sample chamber |
CN105954089A (en) * | 2016-07-15 | 2016-09-21 | 中国工程物理研究院材料研究所 | Laser ablation sample feeding system |
CN106198709A (en) * | 2016-08-30 | 2016-12-07 | 中山大学 | Sample tray in universal laser ablation plasma mass spectrograph sample cell |
CN107202731A (en) * | 2017-05-15 | 2017-09-26 | 中国地质大学(武汉) | A kind of supper-fast multiple exit laser ablation pond |
CN107228788A (en) * | 2017-05-15 | 2017-10-03 | 中国地质大学(武汉) | A kind of large scale multichannel laminar flow laser ablation pond |
CN107941893A (en) * | 2017-10-31 | 2018-04-20 | 中国地质大学(武汉) | A kind of elasticity laser ablation sample target stand |
CN108469465A (en) * | 2018-03-19 | 2018-08-31 | 西北大学 | A kind of load sample device for laser ablation |
CN110361336A (en) * | 2019-07-19 | 2019-10-22 | 浙江大学 | Efficiently go out sample sample room for microwave plasma torch laser ablation system |
CN111141811A (en) * | 2019-12-26 | 2020-05-12 | 中国科学院地质与地球物理研究所 | Target holder assembly of ion probe and method for preparing sample target of ion probe |
CN111896527A (en) * | 2020-08-03 | 2020-11-06 | 武汉上谱分析科技有限责任公司 | Multi-target ablation device for overcoming spatial position effect in laser micro-area in-situ test |
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CN103063575A (en) * | 2011-10-19 | 2013-04-24 | 中国石油化工股份有限公司 | Fluid inclusion laser ablation sample pool |
CN203965224U (en) * | 2014-06-19 | 2014-11-26 | 袁洪林 | A kind of laser ablation sample chamber of many target position |
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2014
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Patent Citations (4)
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JPH0835932A (en) * | 1994-07-26 | 1996-02-06 | Jeol Ltd | Laser ablation apparatus |
CN103063575A (en) * | 2011-10-19 | 2013-04-24 | 中国石油化工股份有限公司 | Fluid inclusion laser ablation sample pool |
CN102879331A (en) * | 2012-09-27 | 2013-01-16 | 中国科学技术大学 | Micro-volume aerosol sample cell for in-situ laser ablation analysis |
CN203965224U (en) * | 2014-06-19 | 2014-11-26 | 袁洪林 | A kind of laser ablation sample chamber of many target position |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105954089A (en) * | 2016-07-15 | 2016-09-21 | 中国工程物理研究院材料研究所 | Laser ablation sample feeding system |
CN105954088A (en) * | 2016-07-15 | 2016-09-21 | 中国工程物理研究院材料研究所 | Laser ablation sample chamber |
CN105954089B (en) * | 2016-07-15 | 2018-12-21 | 中国工程物理研究院材料研究所 | Laser ablation sampling system |
CN105954088B (en) * | 2016-07-15 | 2019-02-05 | 中国工程物理研究院材料研究所 | Laser ablation sample room |
CN106198709A (en) * | 2016-08-30 | 2016-12-07 | 中山大学 | Sample tray in universal laser ablation plasma mass spectrograph sample cell |
CN107228788B (en) * | 2017-05-15 | 2019-12-06 | 中国地质大学(武汉) | large-size multi-channel laminar flow laser ablation pool |
CN107202731A (en) * | 2017-05-15 | 2017-09-26 | 中国地质大学(武汉) | A kind of supper-fast multiple exit laser ablation pond |
CN107228788A (en) * | 2017-05-15 | 2017-10-03 | 中国地质大学(武汉) | A kind of large scale multichannel laminar flow laser ablation pond |
CN107202731B (en) * | 2017-05-15 | 2019-12-10 | 中国地质大学(武汉) | Ultrafast multi-outlet laser ablation pool |
CN107941893A (en) * | 2017-10-31 | 2018-04-20 | 中国地质大学(武汉) | A kind of elasticity laser ablation sample target stand |
CN108469465A (en) * | 2018-03-19 | 2018-08-31 | 西北大学 | A kind of load sample device for laser ablation |
CN108469465B (en) * | 2018-03-19 | 2020-11-03 | 西北大学 | Sample carrying device for laser ablation |
CN110361336A (en) * | 2019-07-19 | 2019-10-22 | 浙江大学 | Efficiently go out sample sample room for microwave plasma torch laser ablation system |
CN111141811A (en) * | 2019-12-26 | 2020-05-12 | 中国科学院地质与地球物理研究所 | Target holder assembly of ion probe and method for preparing sample target of ion probe |
CN111896527A (en) * | 2020-08-03 | 2020-11-06 | 武汉上谱分析科技有限责任公司 | Multi-target ablation device for overcoming spatial position effect in laser micro-area in-situ test |
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