CN1932132A - Textile and non-woven cloth plasma surface treating device - Google Patents
Textile and non-woven cloth plasma surface treating device Download PDFInfo
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- CN1932132A CN1932132A CN 200610096470 CN200610096470A CN1932132A CN 1932132 A CN1932132 A CN 1932132A CN 200610096470 CN200610096470 CN 200610096470 CN 200610096470 A CN200610096470 A CN 200610096470A CN 1932132 A CN1932132 A CN 1932132A
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Abstract
The present invention belongs to the field of gas discharge technology, and relates to a plasma surface treatment equipment for textiles and non-woven fabric. Said plasma surface treatment equipment for textiles and non-woven fabric includes high-frequency power supply, high-voltage electrode and grounding electrode. The high-voltage electrode is at least one medium tube whose interior is filled with metal powder and sealed or one metal tube whose exterior is covered with silicone rubber, the high-voltage end of said high-frequency power supply is inserted into the medium tube interior by means of conducting wire, and the grounding electrode is a metal electrode covered with medium plate or a metal rod whose exterior is covered with silicone rubber tube, the grounding end of said high-frequency power supply is connected with metal electrode by means of conducting wire. Said invention can be used for making large-area plasma surface treatment of textiles, non-woven fabric and paper material, etc.
Description
Technical field
The invention belongs to the gas discharge technical field, specifically textiles and non-woven cloth plasma surface treating device.
Background technology
Contain a large amount of, miscellaneous active particle in the low temperature plasma that gas discharge produces, these active particles contact with material, can make its surface that reactions such as etching, oxidation, reduction, crosslinked, polymerization, grafting take place, cause the variation of material surface chemical composition and physicochemical properties, as changing hydrophily, cementability, stainability, shrink resistance, soil resistance and the electric conductivity etc. of material surface.This surface treatment method has characteristics such as technology is simple, easy and simple to handle, power consumption is low, environmentally safe.In the textiles industry, this method is used for etching activation, graft modification, polymerization or deposition overlay film etc., to the fabric top layer clean, activation, roughening, or by introduce the purpose that new chemical group, processes such as active particle and material surface reactive polymeric deposition formation film in the plasma reach surface modification at fabric face.
When materials such as textiles and nonwoven fabric are carried out surface treatment, utilize low pressure glow discharge mode to obtain the large tracts of land material surface usually and handle required low temperature plasma.Low pressure glow discharge good uniformity, power density is moderate, is applicable to materials such as textiles, nonwoven fabric are carried out surface treatment.But for large-scale industrial production, there are two significant drawbacks in this discharge mode: 1. discharge and reative cell are in the low pressure state, and vacuum system is essential, and required investment and the operating cost of industrialized vacuum system is higher; 2. need constantly to open reative cell in the industrial treatment process and take out finished product, add test product, vacuumize again then, charge into working gas and discharge, this batch processing mode is difficult to realize continuous production, and efficient is not high.Therefore, the plasma surface treatment desire realizes that large-scale industrial production must under atmospheric pressure carry out.
Under the common atmospheric pressure there be the gas discharge type: corona discharge, arc discharge, dielectric barrier discharge (Dielectric Barrier Discharge is hereinafter to be referred as DBD).For the plasma surface treatment of dry goods material, arc discharge and corona discharge are all inapplicable.The DBD plasma has been used to plasma surface treatment, under atmospheric pressure in the air or the DBD in other general gas form by filamentous ebb-flow discharge usually, this ebb-flow discharge is owing to skewness between its current hollow, concentration of energy is in the ebb-flow discharge place, two major issues can occur when materials such as processing fabric or nonwoven fabric: 1. ebb-flow discharge place local temperature is too high, causes material topical burn or perforation during processing easily; 2. because fabric or nonwoven fabric are heterogeneous material, plasma is in the surface distributed inequality of these materials, at the mesh position of material or the relatively thinner position discharge of thickness stronger, and more weak in the position discharge that needs Cement Composite Treated by Plasma.Mass industrialized production when these two problems have restricted with materials such as DBD processing fabric or nonwoven fabric.Generally, do not reduce air pressure and just be difficult to make DBD even, reach the treatment effect of low pressure glow discharge.Recent study is found, in some special gas such as helium, argon gas, utilize the DBD mode also can realize glow discharge under the atmospheric pressure, but no matter be the Atomospheric pressure glow discharge in low pressure glow discharge or the special gas, all need vacuum and sealing device, the cost that mass industrialized production is used is all than higher.
Carrying out multinomial theory and experimental study aspect the uniformity of improving the DBD under the atmospheric pressure, the realization glow discharge both at home and abroad at present, its purpose is exactly a kind ofly under atmospheric pressure to produce even low temperature plasma in order to seek, realize fiber-like material surface-treated high efficiency method, make the large batch of streamlined operation of large tracts of land become possibility.But the DBD of the parallel plate electrode structure that adopts just forms uneven thread discharge because its discharging gap Electric Field Distribution is even, and disruptive field intensity is higher in case puncture usually, can't be used to handle materials such as textiles and nonwoven fabric.Some ancillary methods such as gas flow, reduce gas humidity etc. and can partly improve the uniformity of this discharge, but can not solve the inhomogeneities of filament discharge and the destruction problem of material; And the uneven thread discharge of the easier formation of DBD of line face formula or line bucket formula electrode structure causes the topical burn or the perforation of fiber-like material.
Summary of the invention
The objective of the invention is to propose a kind ofly materials such as textiles and nonwoven fabric are carried out the textiles and the non-woven cloth plasma surface treating device of large area plasma surface treatment, needing no vacuum and sealing device in can air under atmospheric pressure.
Purpose of the present invention can be achieved through the following technical solutions:
Textiles and non-woven cloth plasma surface treating device, comprise high frequency electric source, high-field electrode, earth electrode, the high-pressure side of high frequency electric source links to each other with high-field electrode by lead, the earth terminal of high frequency electric source links to each other with earth electrode and ground connection by lead, high-field electrode can be the medium tube that sealing is filled with metal powder at least one pipe, also can be at least one metal tube, can also be metal tube or the rod that at least one outer surface covers silicon rubber, the high-pressure side of high frequency electric source is inserted in the medium tube by lead, or directly be connected with metal tube or metal bar, earth electrode is the metal electrode that is coated with the metal electrode of dielectric-slab or is coated with silicon rubber, and the earth terminal of high frequency electric source links to each other with metal electrode by lead.
The sleeve pipe that earth electrode of the present invention also can be made up of interior pipe and outer tube, sleeve pipe is provided with one at least, sleeve pipe is provided with one at least, outer tube is a medium tube, its radius of curvature is greater than the radius of curvature of high-field electrode medium tube, metal tube or metal bar, interior pipe is metal tube, seals in the clearance layer that outer tube wall and outer wall of inner tube constitute and is filled with metal powder, and the earth terminal of high frequency electric source is connected with interior pipe by lead.
Purpose of the present invention can also further realize by following technical measures:
Aforesaid textiles and non-woven cloth plasma surface treating device, wherein said metal electrode are metallic plate, wire netting, metal bar or metal tube, and dielectric-slab closely contacts with metal electrode.
Aforesaid textiles and non-woven cloth plasma surface treating device, wherein said metal electrode below is provided with cooling device.
Aforesaid textiles and non-woven cloth plasma surface treating device, the radius of curvature of wherein said earth electrode medium tube are at least high-field electrode medium tube, metal tube or metal bar radius of curvature one times.
Aforesaid textiles and non-woven cloth plasma surface treating device are provided with cooling device in the wherein said sleeve pipe.
Aforesaid textiles and non-woven cloth plasma surface treating device, wherein said cover tube side-by-side is provided with two, wherein a sleeve pipe top is provided with and seals the medium tube that is filled with metal powder in the many pipes, another root sleeve pipe below is provided with and seals the medium tube that is filled with metal powder in the many pipes, the high-pressure side of high frequency electric source is inserted into respectively in each medium tube by lead, and the metal tube of sleeve pipe is connected with the low-pressure end of high frequency electric source respectively by lead.
Aforesaid textiles and non-woven cloth plasma surface treating device, wherein said high-field electrode and earth electrode are arranged in the atmosphere chamber, and the atmosphere chamber is provided with charging aperture, discharging opening, air inlet.
Aforesaid textiles and non-woven cloth plasma surface treating device, wherein said medium tube are quartz glass, pottery, heat resistant glass or silicon rubber medium tube, and dielectric-slab is quartz glass, pottery, heat resistant glass or silicon rubber.
Advantage of the present invention is: sealing was filled with metal tube or the rod that the medium tube of metal powder or metal tube or outer surface are coated with silicon rubber in the present invention's high-field electrode was set to manage; Earth electrode is set to be coated with on it the metallic plate or wire netting of dielectric-slab, or outer tube is that medium tube, interior pipe are to seal the sleeve pipe that is filled with metal powder or the metal tube of overcoat silicon rubber or rod in metal tube, the clearance layer.Pending test product passes through from the dielectric layer surface of earth electrode.The present invention can change air gap electric field even distribution situation in one direction, adopt device of the present invention after, the discharge filament distribution become evenly, the current density and the energy density of every filament all weaken greatly.Observe from the discharge profile, distribute the filament discharge originally sparse to become intensive, the diameter of every filament discharge diminishes, brightness deterioration, temperature reduce, and the uniformity of discharge improves greatly, and the part form is similar to glow discharge.Adopt the DBD of this form that materials such as textiles and nonwoven fabric are handled, in characteristics such as the wettable of effectively improving these materials, water imbibition, printability, stainability, adherence and electric conductivity, can not make breakoff phenomenons such as material production is burnt, perforation, can reach the effect that glow discharge is handled fully, and regulated at will processing power size as required.Because this method can realize needing no vacuum and sealing device in the air under atmospheric pressure.If actual treatment need add some other gases, also can simply region of discharge be isolated, charge into gas and keep certain concentration and get final product.The DBD of this form is simple in structure, easy to operate, can be widely used in materials such as textiles and nonwoven fabric are carried out the large area plasma surface treatment and can realize the streamlined operation.The present invention can be used for fiber-like materials such as fabric are carried out surface treatment, improves wettable, water imbibition, printability, stainability, adherence and the electric conductivity etc. of these materials.As be used for wool fabric is carried out shrinkproof processing (oxygen is reacting gas), make its washing after the felting rate reduce greatly; COTTON FABRIC is handled (oxygen is reacting gas), improve the dye uptake of dyestuff and the ultimate strength of fabric; Sizing fabric is carried out atmospheric plasma handle destarch (oxygen/air/helium or air/helium are reacting gas), reach the effect of saving water and energy, reduce pollution; Handle materials such as polyester fiber, improve its adhesive strength or the like.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention one.
Fig. 2 is the side structure schematic diagram of Fig. 1.
Fig. 3 is the structural representation of the embodiment of the invention two.
Fig. 4 is the structural representation of the embodiment of the invention three.
Fig. 5 is the structural representation of the embodiment of the invention four.
Fig. 6 is the structural representation of the embodiment of the invention five.
Fig. 7 is the structural representation of the embodiment of the invention six.
Among the figure: 1 high frequency electric source, 2 metallic plates, 3 dielectric-slabs, 4 test products, 5, air gap, 6 metal powders, 7 high-field electrode medium tube, 8 cooling devices, 9 earth electrode medium tube, 10 metal tubes, 11 charging apertures, 12 discharging openings, 13 air inlets, 14 atmosphere chambeies.
The specific embodiment
The present invention adopts the mode of double-dielectric barrier discharge.High-field electrode is the medium tube that sealing is filled with metal powder at least one pipe, or at least one metal tube, or the metal tube or the rod of at least one outer surface covering silicon rubber.Fill metal powder in the high-field electrode medium tube as high-field electrode, the high-field electrode medium tube can be quartz ampoule, earthenware, heat-resistant glass tube etc.The metallic plate parallel with the high-field electrode medium tube (also can be wire netting or metal coating), last covering and its dielectric-slab that closely contacts are as earth electrode, and dielectric-slab can be quartz plate, ceramic wafer, heat resistant glass plate or silicane rubber plate etc.; Or employing parallel with the high-field electrode medium tube fill larger radius of curvature earth electrode medium tube with metal powder equally as earth electrode, the earth electrode medium tube can be quartz ampoule, earthenware, heat resistant glass or silicone rubber tube etc., its radius of curvature is much larger than the radius of curvature (usually greater than 10 times, being at least 1 times) of high-field electrode medium tube.Discharge power supply of the present invention is a high frequency electric source, and its output waveform can be high frequency (1 ~ 100kHz) sine wave, square wave, impulse wave etc.Be connected with the high-pressure side of high frequency electric source with the metal part of lead with high-field electrode, the metal part of earth electrode is connected with the earth terminal of high frequency electric source 1.Pending test product be tiled in the ground connection side the dielectric-slab upper surface and with its tight contact.After high frequency electric source was opened, the output voltage of power supply was applied on high-field electrode and the earth electrode, suitably adjusts power output, makes the gap discharge between the dielectric barrier, and test product is carried out surface treatment.When electrode metal partly is the metal powder of filling and being enclosed in the medium tube, after applied voltage reaches certain value,, stoped the further oxidation of metal powder because the intergranular discharge of metal powder has consumed the oxygen in the medium tube rapidly.In addition, produce shelf depreciation between the particle of metal powder, the heat of discharge generation makes the metal powder partial gasification, forms the coating of one deck even compact at the medium tube inwall.Because coating closely contacts with the medium tube inwall, can eliminate the discharge that small air gap forms between metal and the dielectric barrier.This method can guarantee that electrode metal part contact closely with the medium tube inwall, avoids producing corona discharge and the uniformity that influences DBD, and the while can prolong the service life of medium tube.Also can adopt the electrode form of metal tube overcoat silicone rubber tube, because silicon rubber has elasticity, as long as select suitable size just can guarantee to contact between metal tube and the silicone rubber tube tight.
For obtaining DBD more uniformly, can blow to discharge space along the direction vertical with discharge, clearance air is flowed, then discharge is more even.
Can adopt the electrode of different size and the power supply of different capacity according to the difference of handling material, also can adopt to be set up in parallel many high-field electrodes and to obtain large tracts of land plasma relatively uniformly, adopt simple mechanical device to realize the streamlined operation.
Because material contacts with the ground connection dielectric barrier, the dielectric barrier temperature is too high when avoiding discharging damages material, can adopt cooling device at earth electrode in case of necessity, oil cooling, water-cooled or air-cooledly all can.Concerning the system of bottom electrode employing larger radius of curvature medium tube, the connection of earth electrode is for inserting metal tube in medium tube, fill with metal powder and be connected with earth connection between metal tube and medium tube, the cooling medium of cooling device feeds in the metal tube electrode is cooled off.
The present invention is used for fiber-like materials such as fabric are carried out surface treatment, improves the surface nature of paper, film, textiles and fiber, with wettable, water imbibition, printability, stainability, adherence and the electric conductivity etc. of improving these materials.As be used for wool fabric is carried out shrinkproof processing (oxygen is reacting gas), make its washing after the felting rate reduce greatly; COTTON FABRIC is handled (oxygen is reacting gas), improve the dye uptake of dyestuff and the ultimate strength of fabric; Sizing fabric is carried out atmospheric plasma handle destarch (oxygen/air/helium or air/helium are reacting gas), reach the effect of saving water and energy, reduce pollution; Handle materials such as polyester fiber, improve its adhesive strength or the like.
Embodiment one
The structure of the embodiment of the invention one as shown in Figure 1, Fig. 2 is its side structure schematic diagram, the direction of arrow is test product 4 transmission directions among Fig. 1.The high-field electrode of present embodiment is the high-field electrode medium tube 7 that sealing is filled with metal powder 6 in the pipe, and the high-pressure side of high frequency electric source 1 is inserted in the high-field electrode medium tube 7 by lead.Earth electrode is a metallic plate 2, is coated with dielectric-slab 3 on the metallic plate 2, and dielectric-slab 3 closely contacts with metallic plate 2, and the earth terminal of high frequency electric source 1 links to each other with metallic plate 2 by lead.During concrete the installation, metal powder 6 is poured in the high-field electrode medium tube 7 of end sealing, high frequency electric source 1 high-pressure side lead is inserted in the metal powder 6 sealing place up to the nearly high-field electrode medium tube 7 of a termination of lead, with the other end good seal of high-field electrode medium tube 7.High-field electrode, earth electrode and high frequency electric source 1 are joined.Test product 4 places dielectric-slab 3 upper surfaces of earth electrode and keeps and its tight contact, is air gap 5 between high-field electrode and the earth electrode.Below metallic plate 2, set cooling device 8 in case of necessity.Keep cooling device 8 operate as normal, power-on is regulated output voltage to air gap and is discharged, and can handle test product 4.
The earth electrode of present embodiment also can be coated with the metal tube or the rod of silicon rubber for metal tube or outer surface, and the high-pressure side of high frequency electric source 1 links to each other with metal tube or rod by lead.
Embodiment two
The structure of the embodiment of the invention two as shown in Figure 3, the high-field electrode of present embodiment is the high-field electrode medium tube 7 that sealing is filled with metal powder 6 in the pipe, the high-pressure side of high frequency electric source 1 is inserted in the high-field electrode medium tube 7 by lead.Earth electrode is a sleeve pipe of being made up of interior pipe and outer tube, and outer tube is an earth electrode medium tube 9, and its radius of curvature is greater than high-field electrode medium tube 7 radius of curvature, and the radius of curvature of earth electrode medium tube 9 is at least 1 times of high-field electrode medium tube 7 radius of curvature.Interior pipe is metal tube 10, seals in the clearance layer that outer tube wall and outer wall of inner tube constitute and is filled with metal powder 6.The earth terminal of high frequency electric source 1 is connected with interior pipe by lead.High-field electrode, earth electrode and high frequency electric source 1 are joined.Test product 4 places earth electrode medium tube 9 outer surfaces of earth electrode and keeps and its tight contact.Be provided with cooling device 8 in the metal tube 10, or cooling medium is fed in the metal tube 10, keep cooling device 8 operate as normal.Open high frequency electric source 1, regulate output voltage to air gap and discharge, can handle test product 4.Earth electrode in the present embodiment also can be coated with the metal tube of silicon rubber medium for outer surface.
The earth electrode of present embodiment also can be coated with the metal tube or the rod of silicon rubber for metal tube or outer surface, and the high-pressure side of high frequency electric source 1 links to each other with metal tube or rod by lead.
Embodiment three
The embodiment of the invention three structures seal the high-field electrode medium tube 7 that is filled with metal powder 6 in many pipes of present embodiment employing as shown in Figure 4, and high-field electrode medium tube 7 is provided with four, places as high-field electrode side by side.The high-pressure side of high frequency electric source 1 is inserted in the high-field electrode medium tube 7 by lead.Earth electrode is a metallic plate 2, is coated with dielectric-slab 3 on the metallic plate 2, and dielectric-slab 3 closely contacts with metallic plate 2, and the earth terminal of high frequency electric source 1 links to each other with metallic plate 2 by lead.During concrete the installation, metal powder 6 is poured in the high-field electrode medium tube 7 of end sealing, high frequency electric source 1 high-pressure side lead is inserted in the metal powder 6 sealing place up to the nearly high-field electrode medium tube 7 of a termination of lead, with the other end good seal of high-field electrode medium tube 7.High-field electrode, earth electrode and high frequency electric source 1 are joined.Test product 4 places dielectric-slab 3 upper surfaces of earth electrode and keeps and its tight contact, is air gap 5 between high-field electrode and the earth electrode.Below sheet metal 2, set cooling device 8.Keep cooling device 8 operate as normal, power-on is regulated output voltage to air gap and is discharged, and can handle test product 4.
The earth electrode of present embodiment also can be coated with the metal tube or the rod of silicon rubber for many metal tubes or outer surface, and the high-pressure side of high frequency electric source 1 links to each other with metal tube or rod by lead.
Embodiment four
The embodiment of the invention four structures seal the high-field electrode medium tube 7 that is filled with metal powder 6 in many pipes of present embodiment employing as shown in Figure 5, and high-field electrode medium tube 7 is provided with 5, places as high-field electrode side by side.Earth electrode is a sleeve pipe of being made up of interior pipe and outer tube, outer tube is an earth electrode medium tube 9, its radius of curvature is greater than high-field electrode medium tube 7 radius of curvature, the radius of curvature of earth electrode medium tube 9 is at least a times of high-field electrode medium tube 7 radius of curvature, interior pipe is metal tube 10, seals in the clearance layer that outer tube wall and outer wall of inner tube constitute and is filled with metal powder 6.The earth terminal of high frequency electric source 1 is connected by the metal of lead and interior pipe.High-field electrode, earth electrode and high frequency electric source 1 are joined.Test product 4 places earth electrode medium tube 9 outer surfaces of earth electrode and keeps and its tight contact.Be provided with cooling device 8 in the metal tube 10, or cooling medium is fed in the metal tube 10, keep cooling device 8 operate as normal.Open high frequency electric source 1, regulate output voltage to air gap and discharge, can handle test product 4.
The earth electrode of present embodiment also can be coated with the metal tube or the rod of silicon rubber for many metal tubes or outer surface, and the high-pressure side of high frequency electric source 1 links to each other with metal tube or rod by lead.
Embodiment five
The embodiment of the invention five structures as shown in Figure 6, present embodiment is divided into two groups with high-field electrode and low-field electrode, high-field electrode is filled with the high-field electrode medium tube 7 of metal powder 6 for sealing in the pipe, earth electrode is a sleeve pipe of being made up of interior pipe and outer tube, outer tube is an earth electrode medium tube 9, its radius of curvature is greater than high-field electrode medium tube 7 radius of curvature, and the radius of curvature of earth electrode medium tube 9 is at least a times of high-field electrode medium tube 7 radius of curvature.Interior pipe is metal tube 10, seals in the clearance layer that outer tube wall and outer wall of inner tube constitute and is filled with metal powder 6.The cover tube side-by-side is provided with two, wherein a sleeve pipe top is provided with and seals the high-field electrode medium tube 7 that is filled with metal powder 6 in the many pipes, another root sleeve pipe below also is provided with and seals the high-field electrode medium tube 7 that is filled with metal powder 6 in the many pipes, the high-pressure side of high frequency electric source 1 is inserted into respectively in each medium tube by lead, and the interior pipe of sleeve pipe is connected with the low-pressure end of high frequency electric source 1 respectively by lead.Test product 4 places two earth electrode medium tube 9 outer surfaces and keeps and its tight contact.Be provided with cooling device 8 in the metal tube 10, or cooling medium is fed in the metal tube 10, keep cooling device 8 operate as normal.Open high frequency electric source 1, regulate output voltage to air gap and discharge, can carry out double treatment test product 4.
The earth electrode of present embodiment also can be coated with the metal tube or the rod of silicon rubber for many metal tubes or outer surface, and the high-pressure side of high frequency electric source 1 links to each other with metal tube or rod by lead.
Embodiment six
The structure of the embodiment of the invention six as shown in Figure 7, present embodiment is arranged on high-field electrode and earth electrode in the atmosphere chamber 14 on the basis of embodiment one～five, atmosphere chamber 14 is provided with charging aperture 11, discharging opening 12, air inlet 13.Adopt atmosphere chamber 14 that the part of this treatment system except that power supply is isolated from the outside out.Constantly inject from the air inlet 13 in atmosphere chamber 14 and to handle desired gas and to keep the gas pressure intensities in the atmosphere chamber 14 to be a bit larger tham atmospheric pressure, the gas outlet in atmosphere chamber 14 (discharging opening 12) design makes gas also avoid in the atmosphere chamber 14 gas pressure intensity excessive when keeping certain purity.Power-on after the maintenance cooling device operate as normal is regulated output voltage to air gap and is discharged, and can handle test product 4.
The present invention can also have other embodiment, and the technical scheme that equal replacement of all employings or equivalent transformation form all drops within the scope of protection of present invention.
Claims (9)
1. textiles and non-woven cloth plasma surface treating device, comprise high frequency electric source, high-field electrode, earth electrode, the high-pressure side of high frequency electric source links to each other with high-field electrode by lead, the earth terminal of high frequency electric source links to each other with earth electrode and ground connection by lead, it is characterized in that: described high-field electrode can be the medium tube that sealing is filled with metal powder at least one pipe, also can be at least one metal tube, can also be metal tube or the rod that at least one outer surface covers silicon rubber, the high-pressure side of described high frequency electric source is inserted in the medium tube by lead, or directly be connected with metal tube or rod, described earth electrode is the metal electrode that is coated with the metal electrode of dielectric-slab or is coated with silicon rubber, and the earth terminal of described high frequency electric source links to each other with metal electrode by lead.
2. textiles as claimed in claim 1 and non-woven cloth plasma surface treating device is characterized in that: described metal electrode is metallic plate, wire netting, metal bar or metal tube, and described dielectric-slab closely contacts with metal electrode.
3. textiles as claimed in claim 1 and non-woven cloth plasma surface treating device is characterized in that: described metal electrode below is provided with cooling device.
4. textiles and non-woven cloth plasma surface treating device, comprise high frequency electric source, high-field electrode, earth electrode, the high-pressure side of high frequency electric source links to each other with high-field electrode by lead, the earth terminal of high frequency electric source links to each other with earth electrode and ground connection by lead, it is characterized in that: described high-field electrode can be the medium tube that sealing is filled with metal powder at least one pipe, also can be at least one metal tube, can also be metal tube or the rod that at least one pipe covers silicon rubber outward, the high-pressure side of described high frequency electric source is inserted in the medium tube by lead, or directly be connected with metal tube or rod, the sleeve pipe that described earth electrode is made up of interior pipe and outer tube, sleeve pipe is provided with one at least, described outer tube is a medium tube, its radius of curvature is greater than the high-field electrode medium tube, the radius of curvature of metal tube or metal bar, pipe is metal tube in described, and sealing is filled with metal powder in the clearance layer that outer tube wall and outer wall of inner tube constitute, and the earth terminal of described high frequency electric source is connected with interior pipe by lead.
5. textiles as claimed in claim 4 and non-woven cloth plasma surface treating device is characterized in that: the radius of curvature of described earth electrode medium tube is at least high-field electrode medium tube, metal tube or metal bar radius of curvature one times.
6. textiles as claimed in claim 4 and non-woven cloth plasma surface treating device is characterized in that: be provided with cooling device in the described sleeve pipe.
7. textiles as claimed in claim 4 and non-woven cloth plasma surface treating device, it is characterized in that: described cover tube side-by-side is provided with two, wherein a sleeve pipe top is provided with and seals the medium tube that is filled with metal powder in the many pipes, another root sleeve pipe below is provided with and seals the medium tube that is filled with metal powder in the many pipes, the high-pressure side of described high frequency electric source is inserted into respectively in each medium tube by lead, and the metal tube of described sleeve pipe connects the low-pressure end of described high frequency electric source respectively by lead.
8. as claim 1 or 4 described textiles and non-woven cloth plasma surface treating devices, it is characterized in that: described high-field electrode and earth electrode are arranged in the atmosphere chamber, and described atmosphere chamber is provided with charging aperture, discharging opening, air inlet.
9. as claim 1 or 4 described textiles and non-woven cloth plasma surface treating devices, it is characterized in that: described medium tube is quartzy, pottery, heat resistant glass or silicon rubber medium tube, and described dielectric-slab is quartz, pottery, heat resistant glass or silicon rubber dielectric-slab.
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