CN103776818A - Glow discharge-based plasma generator and spectrum detection system formed by same - Google Patents
Glow discharge-based plasma generator and spectrum detection system formed by same Download PDFInfo
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- CN103776818A CN103776818A CN201310732980.XA CN201310732980A CN103776818A CN 103776818 A CN103776818 A CN 103776818A CN 201310732980 A CN201310732980 A CN 201310732980A CN 103776818 A CN103776818 A CN 103776818A
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Abstract
The invention discloses a glow discharge-based plasma generator and a spectrum detection system formed by the glow discharge-based plasma generator; the spectrum detection system mainly comprises a sampling system, a power supply, the plasma generator, an optical detection system and a data processing system, wherein the plasma generator mainly comprises two discharge electrodes, and a working gas inlet cavity, a discharge cavity and a cushion chamber which are arranged in an insulation material generation device body and are sequentially communicated; the working gas inlet cavity has a pipe cavity structure; the side of the discharge cavity vertical to the working gas inlet direction has an open structure; the two discharge electrodes are oppositely arranged at the two sides along the other direction of the discharge cavity; the side of the cushion chamber facing the working gas inlet direction is a closed surface; the working gas enters through the gas inlet cavity, is ionized by the discharge cavity arranged between the two discharge electrodes and then is discharged outside from an opening of the discharge cavity; the glow discharge-based plasma generator is simple in structure, small in volume, low in power and low in gas consumption, and has the tendency of being developed into portable equipment.
Description
Affiliated technical field
The invention belongs to analytical chemistry spectral analysis field, be specifically related to a kind of plasma producing apparatus based on glow discharge and the plasma exciatiaon spectral detection system being formed by it, can be applicable to the analyzing and testing of organism, inorganics.
Background technology
Emission spectrum detection method is characteristic spectral line and the intensity thereof of utilizing material to produce in excite transitions process, realizes the detection to material composition and content.The conventional excitation source of emission spectrum detection method mainly contains direct-current arc, low-voltage alternating-current electric arc, high-voltage capacitance spark and indutively coupled plasma source at present.But these excitation sources bulky, power is high, testing cost is high, is difficult to realize miniaturization and portable, cannot be used for field analyzing and testing.And the temperature of these excitation sources is high, during for detection of organism, easily cause organic structural failure, be therefore difficult to use in organic composition and assay.Along with the development of detection technique, people begin one's study simply, fast, the excitation source of portable emission spectrum cheaply.Wherein, the structure of the excitation source of Atomospheric pressure glow discharge plasma (plasma producing apparatus) is relatively simple, easy to operate, with low cost, and the plasma temperature of generation is low, and potentiality are in actual applications particularly outstanding.
The atmosphere glow-discharge plasma generator of report mainly can be divided into two types at present.The plasma that first kind atmosphere glow-discharge plasma generator produces, need to utilize plasma to maintain gas it is blown out from the port of giving vent to anger.The plasma producing apparatus of this class, plasma blow out process in increased the consumption of gas, be unfavorable for the portable of implement device, and plasma contacts with discharge cavity, easily cause by active substance and discharge cavity and collide and then cause spectral signal loss, also affect the stability of plasma simultaneously.And the increase that maintains gas flow rate shortened the retention time of active substance in plasma, make sensitivity.Then the detection light that Equations of The Second Kind atmosphere glow-discharge plasma generator sends collected by optical fiber through the chamber wall of plasma discharge cavity transparent materials such as () quartz or glass, such plasma producing apparatus is in the long-term process using, carbon is deposited on the chamber wall of discharge cavity, affect spreading out of of light, thereby weaken the signal of detection.The plasma of the atmosphere glow-discharge plasma generator of prior art transmitting is poor as the excitation source existence and stability that remains unchanged in a word, air consumption is large, serviceable life is short, the problems such as sensitivity is low, the application that these unfavorable factors are all limiting Atomospheric pressure glow discharge plasma excitation source in portable instrument and in reality detects.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, the plasma exciatiaon spectral detection system that a kind of novel plasma producing apparatus based on glow discharge is provided and is made up of it, to realize the hand-held analyzer device that production stability is good, highly sensitive, the life-span is long, energy consumption is low, air consumption is little.
Plasma producing apparatus based on glow discharge provided by the invention, its technical scheme forms, comprise two sparking electrodes and be positioned at the work gas inlet chamber that generating means body is communicated with successively, discharge cavity and cushion chamber, described inlet chamber is luminal structure, it is open design perpendicular to a side in a direction of work gas airintake direction for described discharge cavity, two sparking electrodes are oppositely arranged on the two sides of another direction of discharge cavity, its side who faces work gas airintake direction of described cushion chamber is sealing surface, working gas is entered after being ionized at the discharge cavity between two sparking electrodes and is discharged from discharge cavity open ports by inlet chamber.
In technique scheme of the present invention, the shape of described inlet chamber can be along the cavity of the rectangular cross sections such as airintake direction, or be the cavity reducing gradually to the port direction rectangular cross section area of giving vent to anger from air inlet port, or be the circular cylindrical cavity along circular cross sections such as airintake directions, or be the shapes such as the conical cavity that reduces gradually to the port bearing circle shape cross-sectional area of giving vent to anger from air inlet port.
In technique scheme of the present invention, in the time that inlet chamber is rectangular cross section, the give vent to anger width of port and the ratio of height of inlet chamber is preferably in (0.001～200): 1 scope; In the time that inlet chamber is circular cross section, as cylindrical inlet chamber, conical inlet chamber, the port radius that goes out of inlet chamber is preferably in 0.001～200mm scope.
In technique scheme of the present invention, at work gas airintake direction, the cavity axis of described cushion chamber is parallel with the cavity axis of discharge cavity, and both axis can unanimously also can be staggered; Cushion chamber is not less than the cross-sectional area of discharge cavity in the cross-sectional area of vertical operation gas airintake direction, the cross-sectional area of cushion chamber can equate with the cross-sectional area of discharge cavity, also can be greater than the cross-sectional area of discharge cavity.The position that cushion chamber is identical with discharge cavity open ports can be opened wide also and can seal.In the time that inlet chamber, discharge cavity, cushion chamber are retangular section structure, the width of cushion chamber and highly can be greater than, be equal to or less than width and the height of discharge cavity, but when cushion chamber with the width of inlet chamber and while highly equating effect better.The length of cushion chamber can be (0.001～200) with the ratio of width: 1.In the time that cushion chamber is open design, the length of the gas outlet of cushion chamber and the wide length that can be equal to or less than cushion chamber inwall and wide, but width preferably equals the width of discharge cavity.
In technique scheme of the present invention, be arranged on two sparking electrodes of discharge cavity both sides, pay the utmost attention to be positioned at and connect inlet chamber work gas outlet, and make the internal face of the electric discharge section of two electrodes and the port both sides of giving vent to anger of inlet chamber in same plane, so that work gas is obtained better ionization effect.
In technique scheme of the present invention, the material of generating means body is insulating material, preferentially selects the one in teflon, insulating ceramic film and quartz, also can select the compound in three.
In technique scheme of the present invention, the discharge end of described sparking electrode, both can be plane and also can be tip-like; The material of sparking electrode is conductive material, preferentially selects the one in tungsten, nickel, tantalum, iron, platinum and graphite, can be also the alloy in them.
The plasma exciatiaon spectral detection system being formed by the above-mentioned plasma producing apparatus based on glow discharge provided by the invention, its formation mainly comprises: sampling system, power supply, based on glow-discharge plasma generator, the detection light that generating means is sent is collected, transmission, light splitting, the detection system detecting, and the signal that described detection system is exported carries out the data handling system of analyzing and processing, the working gas entrance of sampling system is connected with the inlet chamber air intake opening based on glow-discharge plasma generator, the detection light collection end of detection system is corresponding with the discharge cavity open ports based on glow-discharge plasma generator, the signal input part of data handling system is connected with the signal output part of detection system, two sparking electrodes based on glow-discharge plasma generator are connected with power supply.
In the technical scheme of above-mentioned plasma exciatiaon spectral detection system, on the glow discharge loop of two sparking electrodes and power supply formation, be preferably in series with current-limiting resistance, to prevent that glow discharge from changing arc discharge into, thus the stability of increase spectral signal.Described power supply can be direct supply, can be also AC power, and in the time that power supply is AC power, preferably selected frequency is from power frequency to the adjustable power supply of 13.56MHz radio frequency; Electric source modes both can be continuous mode and also can be pulse mode.
In the technical scheme of above-mentioned plasma exciatiaon spectral detection system, described sampling system comprises: plasma maintains gas tube orifice, flow controlling unit and the sample introduction mouth of pipe, and flow controlling unit is arranged on plasma and maintains gas tube orifice place.
In the technical scheme of above-mentioned plasma exciatiaon spectral detection system, described detection system comprises: collector lens, optical fiber and spectrometer; The center of glow discharge zone and collector lens, the center of fibre-optical probe are preferably located on the same line, to obtain optimum detection effect.
In the technical scheme of above-mentioned plasma exciatiaon spectral detection system, the sample introduction mouth of pipe of described sampling system can be connected sample introduction with sampling devices such as the chromatographic column of gas chromatography, automatic sampler, peristaltic pumps, also can use microsyringe direct injected.
In the technical scheme of above-mentioned plasma exciatiaon spectral detection system, enter the working gas of plasma producing apparatus, can be that plasma maintains gas, can be also material gas to be detected, or plasma maintains the mixed gas of gas and material gas to be detected.Its applying plasma maintain gas can be inert gas, nitrogen, oxygen, airborne at least one; Material to be detected can be the potpourri of a kind of and any two or more formation in inorganics, organism, and its existence form can be gas or liquid; The flow of working gas generally can be controlled in 0.001～200L/min.
Adopt the plasma exciatiaon spectral detection system forming based on glow-discharge plasma generator and by it provided by the invention, realized under condition of normal pressure inorganics or organic trace detection.When work, working gas is being entered by the inlet chamber of plasma producing apparatus in the process of discharge cavity, working gas is excited by two sparking electrodes that are arranged on discharge cavity connection inlet chamber exit, make its discharge generation plasma, the material to be detected that working gas carries excite transitions under the effect of plasma is launched characteristic spectral line in the process of transition.Characteristic spectral line enters spectrometer detection through collector lens and optical fiber, and testing result shows in data handling system.Due to the level structure of test substance, the therefore wavelength difference of the spectral line of emission, can carry out qualitative analysis to sample accordingly.Due to the content difference of element to be measured, the intensity difference that it is launched, thereby can realize the quantitative measurement of element.Series limiting resistor on glow discharge loop (steady resistance), can effectively avoid glow discharge to change into arc discharge.Maintain at plasma under the effect of gas and gas cushion chamber, the discharge cavity of plasma producing apparatus and outside air is well isolated, thus reduce the interference of the unstable plasma of air draught; Meanwhile, gas buffer chamber can also reduce the interference of the unstable plasma of air-flow of plasma working gas; Plasma generation also maintains between two electrodes, can directly not contact with the chamber wall in discharge cavity, gas buffer chamber.Above four factors have strengthened the stability of plasma greatly.Thereby of the present invention is the emission spectrum excitation source that a kind of stability is high, highly sensitive, the life-span is long, energy consumption is low, air consumption is little based on glow-discharge plasma generator, can be used for carrying out the qualitative, quantitative mensuration of sample.
Compared with prior art, the present invention has following very useful technique effect:
1. the plasma producing based on glow-discharge plasma generator of the present invention does not directly contact with discharge cavity, thereby improve the stability of plasma, also reduced the loss of colliding the spectral signal bringing by active substance and discharge cavity simultaneously, strengthen spectral signal under equal conditions, improved the detection sensitivity of plasma exciatiaon spectral detection system.
2. maintain under the effect in gas and gas buffer chamber at plasma, make discharge cavity and the outside air of plasma producing apparatus obtain well isolated, thereby reduce the interference of surrounding air fluctuation plasma, thereby improved the stability that excites of this plasma producing apparatus.
3. the buffer action in the gas buffer chamber of plasma producing apparatus, can reduce the impact of the unstable plasma stability of gas of plasma working gas.
4. the plasma temperature that plasma producing apparatus produces is low, and in the time detecting organism, the destruction completely that can not cause organic constitution, is more conducive to test substance to carry out express-analysis.
5. plasma producing apparatus is directly collected the spectral line of emission with collector lens and fibre-optical probe from the top of discharge cavity, need not see through discharge chamber wall, thereby the intensity of plasma emission spectral line is not subject to the interference of carbon deposition, in obtaining strong spectral signal, extend the serviceable life of this device.
6. the distance at the plasma distance discharge cavity top between two sparking electrodes of plasma producing apparatus is shorter, and detect organism under the condition that maintains gas compared with rill speed plasma time, in air back diffusion to nitrogen a small amount of in plasma can with organism in carbon effect, form the CN spectral line of emission, while carrying out quantitative measurement with this spectral line, can improve organism detection sensitivity.
7. plasma producing apparatus detects at normal temperatures and pressures, just can produce plasma without vacuum pump, cost of manufacture is cheap, and when detection, to maintain the consumption of gas little for plasma, may diminish to tens milliliters of per minutes, power consumption is low, can be low to moderate several watts, and can directly in air, directly discharge, therefore can adopt automobile batteries, even can adopt dry cell to power, for use the plasma emission spectrometer of dry cell power supply can be hand-held use.
8. the feature simple in structure, that volume is little, power is low, air consumption is little of plasma producing apparatus can guarantee that plasma exciatiaon spectral detection system of the present invention develops into portable set.
Accompanying drawing explanation
Fig. 1 is the perspective view of the plasma producing apparatus based on glow discharge.
Fig. 2 is the plan structure schematic diagram of plasma producing apparatus.
Fig. 3 is the structural representation of the plasma exciatiaon spectral detection system based on glow discharge.
Fig. 4 adopts respectively plasma producing apparatus of the present invention and prior art plasma torch to detect the CN sequential chart that acetone saturated vapour obtains.
Fig. 5 is the transmitting spectrogram that detects normal hexane, methylene chloride, acetone, benzene with plasma exciatiaon spectral detection system of the present invention.
In above-mentioned accompanying drawing, the object of each shown by reference numeral mark is respectively: 10-plasma producing apparatus body; 11-work gas air intake opening; 12-inlet chamber; 13-discharge cavity; 14-cushion chamber; 15-open ports (gas outlet); 21,22-sparking electrode; 30-plasma maintains gas source of the gas; 31-plasma maintains letter shoot road; 32-gas meter; 33-sample introduction mouth of pipe; 34-work gas intake interface; 41-current-limiting resistance; 42-power supply; 51-collector lens; 52-fibre-optical probe; 53-optical fiber; 54-spectrometer; 55-counter.
Embodiment
Provide embodiment below in conjunction with accompanying drawing explanation, the structure by embodiment to plasma producing apparatus based on glow discharge of the present invention and the plasma exciatiaon spectral detection system that formed by it and detect principle and operating process is described further.
Embodiment 1-apparatus structure
The structure based on glow discharge plasma excitation spectrum detection system of the present embodiment as shown in Figure 1, Figure 2, Figure 3 shows.Spectral detection system is by sampling system; Under power supply 41, atmospheric pressure, produce the plasma producing apparatus 10 of glow discharge; The detection light that described plasma producing apparatus is inspired is collected, the detection system of transmission, light splitting, detection; And the signal that described detection system is detected carries out the data handling system composition of analyzing and processing.Wherein, sampling system comprises: plasma maintains gas source of the gas (gas supply steel cylinder or pneumatic pump) 30, and plasma maintains letter shoot road 31, gas meter 32, the sample introduction mouth of pipe 33; Work gas intake interface 34.Comprise based on glow-discharge plasma generator: inlet chamber 12, discharge cavity 13,14, two, gas buffer chamber platinum product matter sparking electrode 21,22.Detection system comprises: collector lens 51, fibre-optical probe 52, optical fiber 53, spectrometer 54.Data handling system is made up of counter 55.Two sparking electrodes 21,22 are connected with current-limiting resistance 41, and form glow discharge loop with direct supply.Current-limiting resistance can play the size of current between two electrodes of restriction and prevent the effect of aura to the transformation of arc light.The position of adjusting fibre-optical probe, perpendicular alignmnet glow discharge zone, to guarantee to obtain the strongest detection signal.
In this example, described plasma producing apparatus is bonded by insulating ceramic film, inlet chamber, discharge cavity and gas cushion chamber such as are at the rectangular cross section cavity, top, described discharge cavity top is open design, described cushion chamber top, top and work gas airintake direction are enclosed construction to direction, i.e. cushion chamber equal enclosed construction except airintake direction.Two sparking electrodes are the cylindrical platinum filament that diameter is 0.8mm, be positioned at discharge cavity and connect the inlet chamber left and right sides, port of giving vent to anger, and the electric discharge end face of two electrodes and inlet chamber give vent to anger port internal face in same plane.The spacing of two platinum electrodes is 0.5mm.On the plasma distance discharge cavity producing between two electrodes, the distance of end face is 0.6mm.Because the discharging distance size of embodiment applying plasma only has 0.5mm, therefore collector lens 51 is omitted, and fibre-optical probe is 1-3mm apart from the distance of the upper end face of discharge cavity.The plasma of selecting in embodiment maintains gas source of the gas 30 for argon gas, and power supply 42 is direct supply, and the resistance of current-limiting resistance is 50k Ω.
What deserves to be explained is, above-mentioned power supply and gas type, fibre-optical probe position, resistance and size are only samples of plasma emission spectroscopy pick-up unit of the present invention, this device is not limited to above-mentioned scope.
Principle and operation that embodiment 2-detects
The present embodiment is to utilize to carry out organic mensuration based on glow discharge plasma excitation spectrum detection system described in embodiment 1.Under the condition that passes into a small amount of plasma and maintain gas or directly, in air, utilize direct supply to apply voltage on two sparking electrodes, make work gas between two electrodes, form stable plasma.The voltage breakdown of plasma in the time passing into a small amount of argon plasma and maintain gas is 550V, and the voltage breakdown while directly lighting in air is 830V.When detection, plasma maintains gas argon gas and is entered by inlet chamber import 11 constantly with the flow of 130mL/min by gas meter 32, flows into discharge cavity 13 through inlet chamber 12, to maintain plasma continuous discharge and to guarantee the stability of baseline.The liquid of getting a certain amount of volatile organic matter is injected in the aluminium foil sampler bag that a certain amount of argon gas is housed in advance, at room temperature places a period of time, to guarantee that the liquid state organics injecting volatilizees completely.With the gas in microsyringe extraction sampler bag, directly, from the sample introduction mouth of pipe 33 injecting gas conveyance conduits, also can utilize the saturated vapour of the method microsyringe extraction volatile organic matter of headspace sampling to be injected in gas transmission pipeline.The gas injecting enters discharge cavity 13 with argon gas and excites, in the process of transition, launch characteristic spectral line, characteristic spectral line enters spectrometer detection through fibre-optical probe 52 and optical fiber 53, and testing result shows in counter 55, and the utilizing emitted light spectrogram of the detected material of output.Because the distance of end face on the plasma distance discharge cavity producing between two electrodes in embodiment is 0.6mm, the flow velocity that plasma maintains gas argon gas only has 130mL/min, extraneous air can enter in plasma by the mode of back diffusion, and the airborne nitrogen of back diffusion can increase the sensitivity of CN analysis spectral line in carbon compound.What deserves to be explained is, analysis spectral line when this system detection material is not limited to the spectral line of emission of CN.
The transmitting spectrogram obtaining with the saturated vapour of spectral detection system detection normal hexane of the present invention, methylene chloride, acetone and benzene as shown in Figure 5.
The present invention adopts said method to detect the samples such as acetone, n-pentane, normal hexane, normal heptane, methyl alcohol, ethanol, bromoethane, methylene chloride, ether, ethyl acetate, n-propylamine, benzene, by typical curve standard measure, then utilize three times of snr computation to obtain the detection limit of sample, the detectability obtaining is as shown in table 1.What deserves to be explained is, the present invention detects the detectability of above-mentioned substance, and the sample type that can detect is not restricted in above-mentioned scope.By improving mode and the testing conditions of sample, detectability of the present invention can also reduce, and the kind that detects sample also can increase.
The present invention is not restricted to above-described embodiment, can be according to practical application needs, the various structures that Design and manufacture claim limits based on grow discharge optical emission spectrometry detection system.
Embodiment 3-contrast test
Below confirm by experiment stability and the detection sensitivity that can improve significantly plasma based on glow-discharge plasma generator with respect to existing plasma torch of the present invention.At normal temperatures and pressures, adopt and detect operation described in example 2, carry out contrast experiment with the plasma producing apparatus described in example 1 and existing plasma torch.
Compared with original plasma torch, the difference of the plasma producing apparatus described in embodiment 1 is: changed the Way out of plasma discharge cavity, increased gas buffer chamber.
Plasma torch has identical discharging distance and voltage breakdown with the plasma producing apparatus based on glow discharge in embodiment 1, and plasma maintains gas and is argon gas.Detect identical acetone saturated vapour with the plasma producing apparatus in embodiment 1 with plasma torch.First the best total of points time that the plasma of two systems is maintained to gas velocity and spectrometer is optimized.It is 550mL/min that the optimal plasma body of plasma torch maintains gas velocity, is 130mL/min and plasma producing apparatus optimal plasma body in embodiment 1 maintains gas velocity.Two excitaton sources remain on identical integral time, voltage and current, and under their optimum flow rate and best total of points time conditions, utilize the detection operation in embodiment 2, inject respectively the acetone saturated vapour of 0.4 microlitre, the sequential chart of the analytical line CN obtaining as shown in Figure 4.Detecting the sequential chart of the acetone saturated vapour of same amount can find out by both, the baseline of embodiment 1 applying plasma generating means is more stable, and the response of acetone to isodose is higher, calculates thus its detectability and is reduced to 1/10th of original plasma torch.
From the present embodiment, of the present invention based on glow-discharge plasma generator compared with existing plasma torch, plasma can be reduced effectively maintain the consumption of gas, improve the stability of plasma, and can extend the residence time of detected material in plasma, can improve detection sensitivity simultaneously.Therefore the present invention has huge advantage aspect sample detection, making portable emission spectrometer, has huge potential using value as fields such as gas chromatography detectors simultaneously.
The invention is not restricted to above-described embodiment, can be according to practical application needs, the plasma producing apparatus based on glow discharge of the various structures that Design and manufacture claim limits and the plasma exciatiaon spectral detection system being formed by it.
Table one adopts plasma exciatiaon spectral detection system of the present invention to detect several organic detection limits
| Material | Detection line (pg) | Detection line (ppb v/v) |
| |
80 | 3.4 |
| N-pentane | 75 | 3.9 |
| Normal hexane | 104 | 3.2 |
| Normal heptane | 98 | 3.5 |
| Methyl alcohol | 115 | 3.6 |
| Ethanol | 411 | 8.7 |
| Bromoethane | 196 | 3.4 |
| Methylene chloride | 447 | 8.4 |
| |
55 | 2.6 |
| Ethyl acetate | 238 | 6.6 |
| N-propylamine | 131 | 4.6 |
| Benzene | 135 | 3.1 |
Claims (10)
1. the plasma producing apparatus based on glow discharge, it is characterized in that: comprise two sparking electrodes and be positioned at the work gas inlet chamber that generating means body is communicated with successively, discharge cavity and cushion chamber, described inlet chamber is luminal structure, it is open design perpendicular to a side in a direction of work gas airintake direction for described discharge cavity, two sparking electrodes are oppositely arranged on the two sides of another direction of discharge cavity, its side who faces work gas airintake direction of described cushion chamber is sealing surface, working gas is entered after being ionized at the discharge cavity between two sparking electrodes and is discharged from discharge cavity open ports by inlet chamber.
2. the plasma producing apparatus based on glow discharge according to claim 1, it is characterized in that: being shaped as along the cavity of the rectangular cross sections such as airintake direction of described inlet chamber, or be the cavity reducing gradually to the port direction rectangular cross section area of giving vent to anger from air inlet port, or be the circular cylindrical cavity along circular cross sections such as airintake directions, or be the conical cavity reducing gradually to the port bearing circle shape cross-sectional area of giving vent to anger from air inlet port.
3. the plasma producing apparatus based on glow discharge according to claim 2, it is characterized in that: rectangular cross section inlet chamber is given vent to anger the width of port and the ratio of height for (0.001～200): 1, it is 0.001～200mm that circular cross section inlet chamber goes out port radius.
4. according to the plasma producing apparatus based on glow discharge described in claim 1 or 2 or 3, it is characterized in that: at work gas airintake direction, the cavity axis of cushion chamber is parallel with the cavity axis of discharge cavity, and cushion chamber is in the cross-sectional area that is not less than discharge cavity perpendicular to the cross-sectional area of work gas airintake direction.
5. according to the plasma producing apparatus based on glow discharge described in claim 1 or 2 or 3, it is characterized in that: two sparking electrodes that are arranged on discharge cavity both sides are positioned at and connect inlet chamber work gas outlet.
6. according to the plasma producing apparatus based on glow discharge described in claim 1 or 2 or 3, it is characterized in that, the material of generating means cavity is insulating material.
7. according to the plasma producing apparatus based on glow discharge described in claim 1 or 2 or 3, it is characterized in that: the discharge end of described sparking electrode is plane or tip-like, the material of sparking electrode is conductive material.
8. the plasma exciatiaon spectral detection system that the described plasma producing apparatus based on glow discharge of one of claim 1 to 7 forms, it is characterized in that: mainly comprise sampling system, power supply, based on glow-discharge plasma generator, the detection light that generating means is sent is collected, transmission, light splitting, the detection system detecting, and the signal that described detection system is exported carries out the data handling system of analyzing and processing, the working gas of sampling system is connected with the inlet chamber import based on glow-discharge plasma generator, the detection light collection end of detection system is corresponding with the discharge cavity open ports based on glow-discharge plasma generator, the signal input part of data handling system is connected with the signal output part of detection system, two sparking electrodes based on glow-discharge plasma generator are connected with power supply.
9. the plasma exciatiaon spectral detection system based on glow discharge according to claim 8, is characterized in that: on the glow discharge loop of two sparking electrodes and power supply formation, be in series with current-limiting resistance, to prevent that glow discharge from changing arc discharge into.
10. the plasma exciatiaon spectral detection system based on glow discharge according to claim 9, it is characterized in that: power supply is direct supply or for frequency is from power frequency to the adjustable AC power of 13.56MHz radio frequency, electric source modes is continuous mode or for pulse mode.
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| CN105938103A (en) * | 2015-03-04 | 2016-09-14 | 馗鼎奈米科技股份有限公司 | Optical monitoring method for plasma discharge glow |
| CN104749139A (en) * | 2015-03-26 | 2015-07-01 | 四川大学 | Matrix-assisted excitation spectrum detection system adopting plasma surface sample injection |
| CN104749139B (en) * | 2015-03-26 | 2018-08-03 | 四川大学 | Plasma surface sample introduction excitation spectrum detecting system under matrix auxiliary |
| CN107991272A (en) * | 2017-11-24 | 2018-05-04 | 中国地质大学（武汉） | A kind of portable atmospheric pressure glow discharge microplasma spectrometer and its implementation |
| WO2020015286A1 (en) * | 2018-07-16 | 2020-01-23 | 成都艾立本科技有限公司 | Plasma jet solid ablation-based direct analysis apparatus |
| US20220208522A1 (en) * | 2018-07-16 | 2022-06-30 | Chengdu Aliebn Science And Technology Co., Ltd | Plasma jet solid ablation-based direct analysis apparatus |
| JP2022526533A (en) * | 2019-03-29 | 2022-05-25 | サーモ フィッシャー サイエンティフィック （エキュブラン） エスアーエールエル | Improved luminescence stand for luminescence spectroscopic analysis |
| JP7263545B2 (en) | 2019-03-29 | 2023-04-24 | サーモ フィッシャー サイエンティフィック （エキュブラン） エスアーエールエル | Improved Luminescence Stand for Emission Spectroscopy |
| CN111293028A (en) * | 2019-12-29 | 2020-06-16 | 仲恺农业工程学院 | Method for determining H-mode discharge air pressure interval based on random power and control device |
| CN111293028B (en) * | 2019-12-29 | 2024-04-16 | 仲恺农业工程学院 | Method and control device for determining H-mode discharge air pressure interval based on random power |
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