WO2023083082A1 - Photoionization ion source having compact structure, and photoionization time-of-flight mass spectrometer - Google Patents

Photoionization ion source having compact structure, and photoionization time-of-flight mass spectrometer Download PDF

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WO2023083082A1
WO2023083082A1 PCT/CN2022/129337 CN2022129337W WO2023083082A1 WO 2023083082 A1 WO2023083082 A1 WO 2023083082A1 CN 2022129337 W CN2022129337 W CN 2022129337W WO 2023083082 A1 WO2023083082 A1 WO 2023083082A1
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electrode
drift
photoionization
ion source
electrodes
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PCT/CN2022/129337
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French (fr)
Chinese (zh)
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杨燕婷
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成都艾立本科技有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/16Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/065Ion guides having stacked electrodes, e.g. ring stack, plate stack
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/24Vacuum systems, e.g. maintaining desired pressures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

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  • the invention belongs to the technical field of analytical instruments, and in particular relates to a compact photoionization ion source and a photoionization time-of-flight mass spectrometer.
  • Time of Flight Mass Spectrometer is a commonly used mass spectrometer.
  • the mass analyzer of this mass spectrometer is an ion drift tube.
  • the sample is processed into an ion beam by the ion source, and the ion beam enters the field-free drift tube after acceleration, and flies to the ion receiver at a constant speed.
  • the ion source is a very important component.
  • the ionization effect of the ion source on the sample is related to the sensitivity of the detection results and other properties.
  • the Chinese invention patent "CN200610011793.2 Vacuum UV lamp ionization device in time-of-flight mass spectrometer" provides a photoionization ion source, which is an ion source device that uses ultraviolet lamps to irradiate sample ions to ionize them.
  • the photoionization ion source in the prior art is equipped with an independent mechanical pump or molecular pump to maintain the vacuum degree of the chamber where the ionization region of the ion source is located to meet the requirements of sample ionization.
  • an independent mechanical pump or molecular pump to maintain the vacuum degree of the chamber where the ionization region of the ion source is located to meet the requirements of sample ionization.
  • the existing photoionization time-of-flight mass spectrometers usually have multiple mechanical pumps or molecular vacuum pumps for vacuuming. Pump, which makes the structure of the instrument complex, bulky, and high energy consumption during use, which is not conducive to its popularization and application.
  • the present invention provides a photoionization ion source and a photoionization time-of-flight mass spectrometer with a compact structure. After the time-of-flight mass spectrometer, the structure of the time-of-flight mass spectrometer can be further simplified, the volume of the instrument can be reduced, and it is convenient to use.
  • a photoionization ion source with a compact structure including ultraviolet lamps and electrode groups arranged in sequence, insulating sealing rings are arranged between adjacent electrodes in the electrode group, and through holes are arranged in the middle of the electrodes in the electrode group.
  • a hole structure, the insulating sealing ring and the electrodes in the electrode group together form a columnar cavity;
  • the electrodes in the electrode group include a drift head electrode, at least one drift electrode and a drift tail electrode arranged in sequence, the side of the drift head electrode is provided with a capillary for sample injection, and the ultraviolet lamp is arranged in a columnar cavity close to Drift one end of the first electrode.
  • a flow controller and a pressure controller are also included, and the flow controller and the pressure controller are connected to the capillary through a bypass.
  • the diameter of the through-hole structure of the first drift electrode and the drift electrode is 1mm-15mm
  • the size of the central hole of the insulating sealing ring is 1-20mm
  • the diameter of the through-hole structure of the drift tail electrode is 0.3-3mm
  • the length of the columnar cavity is 30-300mm.
  • the drift first electrode is in contact with the base electrode of the ultraviolet lamp.
  • the through-hole structure of the drift tail electrode is a tapered hole.
  • the electrodes in the electrode group further include a sample converging drift electrode, the converging drift electrode is located between the drift first electrode and the drift electrode, and the aperture structure of the sample converging drift electrode is 1mm-3mm , the through-hole structure of the sample converging drift electrode is arranged coaxially with the beam of the ultraviolet lamp.
  • the electrodes in the electrode group further include a vacuum measurement drift electrode, and a vacuum gauge for detecting the vacuum degree of the columnar cavity is arranged on the side of the vacuum measurement drift electrode.
  • a voltage dividing resistor is arranged between the electrodes in the electrode group.
  • the present invention also provides a photoionization time-of-flight mass spectrometer.
  • the ion source of the photoionization time-of-flight mass spectrometer adopts the above-mentioned photoionization ion source.
  • the rear end of the photoionization ion source is provided with a vacuum chamber in the ion transmission area, the vacuum chamber in the ion transmission area is connected with a device for vacuuming, an ion transporter is arranged in the vacuum chamber of the ion transmission area, and the vacuum chamber in the ion transmission area is provided with an ion transporter.
  • the rear end of the vacuum chamber in the ion transmission area is provided with a small hole electrode for extracting the ion beam, and the small hole electrode is provided with a small hole with a diameter of 0.5-2mm.
  • the sealed cavity for ionization is jointly enclosed.
  • the structure is compact and there are no redundant parts, which can effectively maintain the volume of the sealed cavity of the photoionization ion source within a reasonable range. Inside, so that it can share the vacuuming equipment with the vacuum chamber of the ion transmission area at the back end.
  • the photoionization ion source of the present invention successfully omits an independent vacuuming device.
  • the preferred solution of the present invention controls the sampling pressure and flow rate of the capillary through the flow controller and the pressure controller, which further reduces the difficulty of maintaining vacuum in the ionization area, makes it easier to omit the independent vacuuming equipment, and at the same time makes the inside of the power supply
  • the air pressure is adjustable, which also avoids the possibility of contamination of the sample on the pressure and flow adjustment device and interference with the detection.
  • the preferred solution of the present invention further reduces the difficulty of maintaining vacuum in the ionization area by rationally setting the size of each component and controlling the diameter and length of the ionization area and the size of the outlet, making it easier to omit the independent vacuuming equipment.
  • the drift first electrode is in contact with the lamp head electrode of the ultraviolet lamp so that the two are at the same potential, which is beneficial to ensure that the generated ions are not disturbed by the voltage of the ultraviolet lamp, improve ion transmission efficiency, and reduce the setting of the power supply. cost.
  • the sample convergence drift electrode can make all the measured gases sent into the ionization chamber converge and pass through the effective ionization radius of the ultraviolet lamp. This design can increase the ionization efficiency by 3-10 times.
  • Fig. 1 is the structural representation of the compact photoionization ion source and the vacuum cavity in the ion transmission area connected to the rear end thereof in Example 1;
  • Fig. 2 is the high sensitivity, full spectrum, on-line detection of the photoionization time-of-flight mass spectrometer of embodiment 2 to benzene standard sample;
  • Fig. 3 is the result of detecting benzene with a concentration of 16.8 ppbv by the photoionization time-of-flight mass spectrometer in Example 2.
  • Embodiment 1 A kind of compact photoionization ion source
  • the present embodiment provides a kind of compact photoionization ion source, as shown in Figure 1, it comprises ultraviolet lamp 2 and electrode group, is provided with insulating sealing ring 4 between the adjacent electrodes in described electrode group, in the electrode group
  • the electrode is made of stainless steel or other metals
  • the insulating sealing ring is made of tetrafluoroethylene or other non-metallic materials.
  • the middle parts of the electrodes in the electrode group are all provided with a through-hole structure, and the insulating sealing ring 4 and the electrodes in the electrode group together form a columnar cavity, which is the ionization region of the sample.
  • the ultraviolet lamp 2 is arranged at one end of the cylindrical cavity close to the drifting first electrode 3 .
  • the contact parts of the components constituting the columnar cavity are airtight to maintain the vacuum.
  • the lamp head electrode of the ultraviolet lamp 2 is installed in contact with the drift first electrode 3, so that the two are at the same potential, which is beneficial to ensure that the generated ions will not be disturbed by the voltage of the ultraviolet lamp 2, improve ion transmission efficiency, reduce power supply settings, and reduce costs.
  • the electrodes in the electrode group include a drift head electrode 3 , a convergence drift electrode 5 , a vacuum measurement drift electrode 6 , a drift electrode 7 and a drift tail electrode 8 arranged in sequence.
  • the number of drift electrodes 7 is three.
  • a voltage dividing resistor 17 is arranged between the electrodes in the electrode group.
  • two or more DC power supplies 16 apply uniform or non-uniform drop voltage from the drifting head electrode to the drifting tail electrode to provide ion migration power for the ionization region.
  • the applied voltage difference ranges from 5-500V.
  • a capillary 1 for sample injection is provided on the side of the drift first electrode 3, and a sample introduction hole is arranged on the drift first electrode 3, and the sample in the capillary 1 is introduced into the ionization region through the hole.
  • the side of the capillary 1 is provided with a flow controller and a pressure controller. Through the flow controller and the pressure controller, the flow rate of the sample entering the capillary 1 from the outside and the flow rate of the sample entering the ionization region (ie, the injection pressure of the ion source) can be controlled simultaneously, making it easier to maintain the vacuum in the ionization region.
  • the flow controller of this embodiment is connected to the side of the capillary through a bypass, which can not only adjust the air pressure in the ion source at any time, but also avoid sample contamination caused by connecting a flowmeter in series on the capillary sampling pipeline. question.
  • the aperture of the through-hole structure of the drift first electrode 3, the vacuum measurement drift electrode 6 and the drift electrode 7 is 10mm, the central hole size of the insulating sealing ring 4 is 10mm, and the thickness of the insulating sealing ring 4 is 1mm.
  • the diameter of the through-hole structure of the drift tail electrode 8 is 1.5 mm, and the length of the columnar cavity is 100 mm.
  • the hole diameter of the through-hole structure of the sample converging drift electrode 5 is 2 mm, and the through-hole structure of the sample converging drift electrode 5 is arranged coaxially with the beam of the ultraviolet lamp 2 .
  • the setting of the sample converging drift electrode 5 can make all the measured gases sent into the ionization chamber converge and pass through the effective ionization radius of the ultraviolet lamp. This design can increase the ionization efficiency by 3-10 times.
  • a vacuum gauge 13 for detecting the vacuum degree of the columnar cavity is provided on the side of the vacuum measurement drift electrode 6 .
  • the through-hole structure of the drift tail electrode 8 is a tapered hole, with the thickness of the hole wall near the through-hole structure.
  • Embodiment 2 A kind of photoionization time-of-flight mass spectrometer
  • the present embodiment provides a kind of photoionization time-of-flight mass spectrometer, and its ion source adopts the photoionization ion source of embodiment 1.
  • the photoionization ion source is connected with devices such as an ion lens and a time-of-flight mass analyzer at the rear end through a vacuum chamber 10 in the ion transmission region.
  • devices whose structures are not specified such as ion lenses and time-of-flight mass analyzers, belong to the prior art.
  • An ion transporter 9 is arranged in the vacuum chamber 10 of the ion transport area, and the ion transporter 9 is preferably a quadrupole ion transporter.
  • the rear end of the vacuum chamber 10 in the ion transmission area is provided with a small hole electrode 11 for extracting ion beams, and a small hole with a diameter of 1.5 mm is set on the small hole electrode 11 .
  • the vacuum chamber 10 in the ion transmission area of the present embodiment is connected with a turbomolecular pump 12 with a pumping speed of 10L/s-300L/s, and the molecular pump 12 can maintain the vacuum of the columnar cavity of the ionization area and the ion transmission area of the ion transmission area at the same time
  • the vacuum degree of the columnar chamber in the ionization region can be maintained at 100-800 Pa, and the vacuum degree of the vacuum chamber in the ion transmission region can be maintained at 0.05-10 Pa, which can meet the testing requirements of various samples.
  • FIG. 2 The results of testing the standard sample of benzene using the photoionization time-of-flight mass spectrometer of this embodiment are shown in FIG. 2 . It can be seen that this embodiment can be used for high-sensitivity, full-spectrum, on-line detection of volatile organic compounds. Detect for the benzene standard sample that contains 16.8ppbv benzene, as shown in Figure 3, the molecular ion peak signal strength that it produces is 171099, noise 31.66, signal-to-noise ratio 5404, detection limit 0.009, shows that the instrument of the present embodiment can reach Very high precision.
  • the present invention provides a photoionization ion source that has a compact structure and can share a vacuuming device with the vacuum chamber in the rear-end ion transmission area.
  • the photoionization ion source is applied to a time-of-flight mass spectrometer,
  • the structure of the instrument can be effectively simplified, the volume of the instrument can be reduced and the energy consumption of the instrument can be reduced, which is beneficial to popularization and use of the time-of-flight mass spectrometer, and has good application prospects.

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Abstract

The present invention belongs to the technical field of analytical instruments, and specifically relates to a photoionization ion source having a compact structure, and a photoionization time-of-flight mass spectrometer. The photoionization ion source of the present invention comprises an ultraviolet lamp and an electrode group which are sequentially arranged, an insulating sealing ring being disposed between adjacent electrodes in the electrode group, through hole structures are arranged in the middle of electrodes in the electrode group, and the insulating sealing ring and the electrodes in the electrode group jointly form a columnar cavity; the electrodes in the electrode group comprise a drift head electrode, at least one drift electrode, and a drift tail electrode, which are arranged in sequence, a capillary tube for sample injection being disposed at a side surface of the drift head electrode, and the ultraviolet lamp being disposed at one end of a columnar cavity near the drift head electrode. The photoionization ion source is used in a time-of-flight mass spectrometer, and can effectively simplify the structure of the instrument, reduce the size of the instrument, reduce energy consumption of the instrument, and facilitate popularization and use of the time-of-flight mass spectrometer, having good application prospects.

Description

一种结构紧凑的光电离离子源及光电离飞行时间质谱仪A compact photoionization ion source and photoionization time-of-flight mass spectrometer 技术领域technical field
本发明属于分析仪器技术领域,具体涉及一种结构紧凑的光电离离子源及光电离飞行时间质谱仪。The invention belongs to the technical field of analytical instruments, and in particular relates to a compact photoionization ion source and a photoionization time-of-flight mass spectrometer.
背景技术Background technique
飞行时间质谱仪(Time of Flight Mass Spectrometer,TOF)是一种常用的质谱仪。这种质谱仪的质量分析器是一个离子漂移管。由离子源将样品处理为离子束,离子束加速后进入无场漂移管,并以恒定速度飞向离子接收器。离子质量越大,到达接收器所用时间越长,离子质量越小,到达接收器所用时间越短,根据这一原理,可以把不同质量的离子按m/z值大小进行分离,进而分析样品产生的离子。Time of Flight Mass Spectrometer (TOF) is a commonly used mass spectrometer. The mass analyzer of this mass spectrometer is an ion drift tube. The sample is processed into an ion beam by the ion source, and the ion beam enters the field-free drift tube after acceleration, and flies to the ion receiver at a constant speed. The larger the ion mass, the longer the time it takes to reach the receiver, the smaller the ion mass, the shorter the time it takes to reach the receiver, according to this principle, the ions of different masses can be separated according to the m/z value, and then the samples are analyzed. of ions.
在TOF中,离子源是非常重要的组成部分。离子源对样品的电离效果关系到检测结果的灵敏度等性能。中国发明专利“CN200610011793.2飞行时间质谱仪中真空紫外灯电离装置”提供了一种光电离离子源,这是一种利用紫外灯照射样品离子使其电离的离子源设备。为了避免空气对样品电离的影响,该现有技术中的光电离离子源配制了独立的机械泵或者分子泵,以维持离子源的电离区所在的腔室的真空度达到样品电离的需求。除了离子源的电离区外,TOF中通常还有离子传输区等其他需要维持真空度的区域,因此,现有的光电离飞行时间质谱仪通常都有多个用于抽真空的机械泵或者分子泵,这使得仪器结构复杂、体积庞大,且使用时能源消耗较高,不利于其推广应用。In TOF, the ion source is a very important component. The ionization effect of the ion source on the sample is related to the sensitivity of the detection results and other properties. The Chinese invention patent "CN200610011793.2 Vacuum UV lamp ionization device in time-of-flight mass spectrometer" provides a photoionization ion source, which is an ion source device that uses ultraviolet lamps to irradiate sample ions to ionize them. In order to avoid the influence of air on sample ionization, the photoionization ion source in the prior art is equipped with an independent mechanical pump or molecular pump to maintain the vacuum degree of the chamber where the ionization region of the ion source is located to meet the requirements of sample ionization. In addition to the ionization region of the ion source, there are usually other regions in the TOF that need to maintain vacuum, such as the ion transmission region. Therefore, the existing photoionization time-of-flight mass spectrometers usually have multiple mechanical pumps or molecular vacuum pumps for vacuuming. Pump, which makes the structure of the instrument complex, bulky, and high energy consumption during use, which is not conducive to its popularization and application.
发明内容Contents of the invention
针对现有技术的缺陷,本发明提供一种结构紧凑的光电离离子源及光电离飞行时间质谱仪,目的在于:通过合理设计光电离离子源,省略其抽真空装置,使其结构紧凑;应用于飞行时间质谱仪后,能够进一步简化飞行时间质谱仪的结构,减小仪器的体积,方便使用。Aiming at the defects of the prior art, the present invention provides a photoionization ion source and a photoionization time-of-flight mass spectrometer with a compact structure. After the time-of-flight mass spectrometer, the structure of the time-of-flight mass spectrometer can be further simplified, the volume of the instrument can be reduced, and it is convenient to use.
一种结构紧凑的光电离离子源,包括依次设置的紫外灯和电极组,所述电极组中相邻的电极之间设置有绝缘密封环,所述电极组中的电极的中部均设置有通孔结构,所述绝缘密封环和所述电极组中的电极共同构成柱状腔体;A photoionization ion source with a compact structure, including ultraviolet lamps and electrode groups arranged in sequence, insulating sealing rings are arranged between adjacent electrodes in the electrode group, and through holes are arranged in the middle of the electrodes in the electrode group. A hole structure, the insulating sealing ring and the electrodes in the electrode group together form a columnar cavity;
所述电极组中的电极包括依次设置的漂移首电极、至少一个漂移电极和漂移尾电极,所述漂移首电极的侧面设置有用于进样的毛细管,所述紫外灯 设置在柱状腔体中靠近漂移首电极的一端。The electrodes in the electrode group include a drift head electrode, at least one drift electrode and a drift tail electrode arranged in sequence, the side of the drift head electrode is provided with a capillary for sample injection, and the ultraviolet lamp is arranged in a columnar cavity close to Drift one end of the first electrode.
优选的,还包括流量控制器和压力控制器,所述流量控制器和压力控制器通过旁路引出连接在毛细管上。Preferably, a flow controller and a pressure controller are also included, and the flow controller and the pressure controller are connected to the capillary through a bypass.
优选的,所述漂移首电极和所述漂移电极的通孔结构的孔径为1mm-15mm,所述绝缘密封环的中心孔大小为1-20mm,所述漂移尾电极的通孔结构的孔径为0.3-3mm,所述柱状腔体的长度为30-300mm。Preferably, the diameter of the through-hole structure of the first drift electrode and the drift electrode is 1mm-15mm, the size of the central hole of the insulating sealing ring is 1-20mm, and the diameter of the through-hole structure of the drift tail electrode is 0.3-3mm, the length of the columnar cavity is 30-300mm.
优选的,所述漂移首电极与所述紫外灯的灯头电极接触。Preferably, the drift first electrode is in contact with the base electrode of the ultraviolet lamp.
优选的,所述漂移尾电极的通孔结构为锥形孔。Preferably, the through-hole structure of the drift tail electrode is a tapered hole.
优选的,所述电极组中的电极还包括样品汇聚漂移电极,所述汇聚漂移电极位于所述漂移首电极和漂移电极之间,所述样品汇聚漂移电极的通孔结构的孔径为1mm-3mm,所述样品汇聚漂移电极的通孔结构与所述紫外灯的光束同轴设置。Preferably, the electrodes in the electrode group further include a sample converging drift electrode, the converging drift electrode is located between the drift first electrode and the drift electrode, and the aperture structure of the sample converging drift electrode is 1mm-3mm , the through-hole structure of the sample converging drift electrode is arranged coaxially with the beam of the ultraviolet lamp.
优选的,所述电极组中的电极还包括真空测量漂移电极,所述真空测量漂移电极的侧面设置有用于检测所述柱状腔体的真空度的真空规。Preferably, the electrodes in the electrode group further include a vacuum measurement drift electrode, and a vacuum gauge for detecting the vacuum degree of the columnar cavity is arranged on the side of the vacuum measurement drift electrode.
优选的,所述电极组中的电极之间设置有分压电阻。Preferably, a voltage dividing resistor is arranged between the electrodes in the electrode group.
本发明还提供一种光电离飞行时间质谱仪,所述光电离飞行时间质谱仪的离子源采用上述光电离离子源。The present invention also provides a photoionization time-of-flight mass spectrometer. The ion source of the photoionization time-of-flight mass spectrometer adopts the above-mentioned photoionization ion source.
优选的,所述光电离离子源后端设置有离子传输区真空腔,所述离子传输区真空腔连接有用于抽真空的装置,所述离子传输区真空腔中设置有离子传输器,所述离子传输区真空腔后端设置有用于引出离子束的小孔电极,所述小孔电极上设置有孔径0.5-2mm的小孔。Preferably, the rear end of the photoionization ion source is provided with a vacuum chamber in the ion transmission area, the vacuum chamber in the ion transmission area is connected with a device for vacuuming, an ion transporter is arranged in the vacuum chamber of the ion transmission area, and the vacuum chamber in the ion transmission area is provided with an ion transporter. The rear end of the vacuum chamber in the ion transmission area is provided with a small hole electrode for extracting the ion beam, and the small hole electrode is provided with a small hole with a diameter of 0.5-2mm.
本发明的技术方案具有如下有益效果:The technical solution of the present invention has the following beneficial effects:
1、通过紫外灯、电极和绝缘密封环的组合,共同围成了用于电离的密封腔体,结构紧凑,没有多余的部件,能够有效维持光电离离子源密封腔体的体积在合理的范围内,使其能够与后端的离子传输区真空腔共用抽真空设备。由此,本发明的光电离离子源成功省略了独立的抽真空设备。1. Through the combination of ultraviolet lamps, electrodes and insulating sealing rings, the sealed cavity for ionization is jointly enclosed. The structure is compact and there are no redundant parts, which can effectively maintain the volume of the sealed cavity of the photoionization ion source within a reasonable range. Inside, so that it can share the vacuuming equipment with the vacuum chamber of the ion transmission area at the back end. Thus, the photoionization ion source of the present invention successfully omits an independent vacuuming device.
2、本发明的优选方案通过流量控制器和压力控制器控制毛细管的进样压力和进样流量,进一步降低了电离区域维持真空的难度,使得独立抽真空设备的省略更加容易,同时使得电源内部的气压可调,也避免了样品在调压、调流装置上的污染并干扰检测的可能性。2. The preferred solution of the present invention controls the sampling pressure and flow rate of the capillary through the flow controller and the pressure controller, which further reduces the difficulty of maintaining vacuum in the ionization area, makes it easier to omit the independent vacuuming equipment, and at the same time makes the inside of the power supply The air pressure is adjustable, which also avoids the possibility of contamination of the sample on the pressure and flow adjustment device and interference with the detection.
3、本发明的优选方案通过合理设置各部件的尺寸,控制电离区域的直径长度和出口大小等参数,进一步降低了电离区域维持真空的难度,使得独 立抽真空设备的省略更加容易。3. The preferred solution of the present invention further reduces the difficulty of maintaining vacuum in the ionization area by rationally setting the size of each component and controlling the diameter and length of the ionization area and the size of the outlet, making it easier to omit the independent vacuuming equipment.
4、本发明的优选方案中,漂移首电极与所述紫外灯的灯头电极接触使得两者等电势,有利保证生成的离子不被紫外灯电压干扰,提高离子传输效率,并减少电源的设置降低成本。4. In the preferred solution of the present invention, the drift first electrode is in contact with the lamp head electrode of the ultraviolet lamp so that the two are at the same potential, which is beneficial to ensure that the generated ions are not disturbed by the voltage of the ultraviolet lamp, improve ion transmission efficiency, and reduce the setting of the power supply. cost.
5、本发明的优选方案中,样品汇聚漂移电极可以使送入电离室内的所有被测气体汇聚并通过被紫外灯的有效电离半径内,该设计可以将电离效率提高3-10倍。5. In the preferred solution of the present invention, the sample convergence drift electrode can make all the measured gases sent into the ionization chamber converge and pass through the effective ionization radius of the ultraviolet lamp. This design can increase the ionization efficiency by 3-10 times.
显然,根据本发明的上述内容,按照本领域的普通技术知识和惯用手段,在不脱离本发明上述基本技术思想前提下,还可以做出其它多种形式的修改、替换或变更。Apparently, according to the above content of the present invention, according to common technical knowledge and conventional means in this field, without departing from the above basic technical idea of the present invention, other various forms of modification, replacement or change can also be made.
以下通过实施例形式的具体实施方式,对本发明的上述内容再作进一步的详细说明。但不应将此理解为本发明上述主题的范围仅限于以下的实例。凡基于本发明上述内容所实现的技术均属于本发明的范围。The above-mentioned content of the present invention will be further described in detail below through specific implementation in the form of examples. However, this should not be construed as limiting the scope of the above-mentioned subject matter of the present invention to the following examples. All technologies realized based on the above contents of the present invention belong to the scope of the present invention.
附图说明Description of drawings
图1为实施例1中的结构紧凑的光电离离子源及其后端连接的离子传输区真空腔的结构示意图;Fig. 1 is the structural representation of the compact photoionization ion source and the vacuum cavity in the ion transmission area connected to the rear end thereof in Example 1;
图2为实施例2的光电离飞行时间质谱仪对苯标准样品的高灵敏度、全谱、在线检测;Fig. 2 is the high sensitivity, full spectrum, on-line detection of the photoionization time-of-flight mass spectrometer of embodiment 2 to benzene standard sample;
图3为实施例2的光电离飞行时间质谱仪对浓度为16.8ppbv的苯进行检测的结果。Fig. 3 is the result of detecting benzene with a concentration of 16.8 ppbv by the photoionization time-of-flight mass spectrometer in Example 2.
其中,1-毛细管,2-紫外灯,3-漂移首电极,4-绝缘密封环,5-样品汇聚漂移电极,6-真空测量漂移电极,7-漂移电极,8-漂移尾电极,9-离子传输器,10-离子传输区真空腔,11-小孔电极,12-分子泵,13-真空规,14-流量控制器,15-压力控制器,16-直流电源,17-分压电阻,18-射频电源。Among them, 1-capillary, 2-UV lamp, 3-drift head electrode, 4-insulation sealing ring, 5-sample convergence drift electrode, 6-vacuum measurement drift electrode, 7-drift electrode, 8-drift tail electrode, 9- Ion transporter, 10-vacuum cavity in ion transport area, 11-small hole electrode, 12-molecular pump, 13-vacuum gauge, 14-flow controller, 15-pressure controller, 16-DC power supply, 17-voltage divider resistor , 18-RF power supply.
具体实施方式Detailed ways
实施例1一种结构紧凑的光电离离子源Embodiment 1 A kind of compact photoionization ion source
本实施例提供一种结构紧凑的光电离离子源,如图1所示,其包括紫外灯2和电极组,所述电极组中相邻的电极之间设置有绝缘密封环4,电极组中的电极由不锈钢或者其它金属制成,绝缘密封环由四氟乙烯或其他非金属材料制成。所述电极组中的电极的中部均设置有通孔结构,所述绝缘密封环4和所述电极组中的电极共同构成柱状腔体,即为样品的电离区。所述紫外灯2设置在柱状腔体中靠近漂移首电极3的一端。构成柱状腔体的各部件的 接触部位具有气密性,以便于维持真空度。紫外灯2的灯头电极与漂移首电极3接触安装,使得两者等电势,有利保证生成的离子不被紫外灯2的电压干扰,提高离子传输效率,并减少电源的设置,降低成本。The present embodiment provides a kind of compact photoionization ion source, as shown in Figure 1, it comprises ultraviolet lamp 2 and electrode group, is provided with insulating sealing ring 4 between the adjacent electrodes in described electrode group, in the electrode group The electrode is made of stainless steel or other metals, and the insulating sealing ring is made of tetrafluoroethylene or other non-metallic materials. The middle parts of the electrodes in the electrode group are all provided with a through-hole structure, and the insulating sealing ring 4 and the electrodes in the electrode group together form a columnar cavity, which is the ionization region of the sample. The ultraviolet lamp 2 is arranged at one end of the cylindrical cavity close to the drifting first electrode 3 . The contact parts of the components constituting the columnar cavity are airtight to maintain the vacuum. The lamp head electrode of the ultraviolet lamp 2 is installed in contact with the drift first electrode 3, so that the two are at the same potential, which is beneficial to ensure that the generated ions will not be disturbed by the voltage of the ultraviolet lamp 2, improve ion transmission efficiency, reduce power supply settings, and reduce costs.
所述电极组中的电极包括依次设置的漂移首电极3、汇聚漂移电极5、真空测量漂移电极6和漂移电极7和漂移尾电极8。漂移电极7的数量为3个。所述电极组中的电极之间设置有分压电阻17。在光电离离子源工作时,通过两个或多个直流电源16从漂移首电极到漂移尾电极施加均匀或者不均匀的下降电压,为电离区提供离子迁移动力。施加的电压差范围为5-500V。The electrodes in the electrode group include a drift head electrode 3 , a convergence drift electrode 5 , a vacuum measurement drift electrode 6 , a drift electrode 7 and a drift tail electrode 8 arranged in sequence. The number of drift electrodes 7 is three. A voltage dividing resistor 17 is arranged between the electrodes in the electrode group. When the photoionization ion source is working, two or more DC power supplies 16 apply uniform or non-uniform drop voltage from the drifting head electrode to the drifting tail electrode to provide ion migration power for the ionization region. The applied voltage difference ranges from 5-500V.
所述漂移首电极3的侧面设置有用于进样的毛细管1,漂移首电极3上设置样品引入孔,毛细管1中的样品通过该孔引入电离区。所述毛细管1的侧面设置有流量控制器和压力控制器。通过流量控制器和压力控制器能够同时控制外界进入毛细管1的样品流量以及样品进入电离区内部的流量(即离子源进样压力),使得电离区的真空度维持更加容易。特别的,本实施例的流量控制器通过旁路引出连接在毛细管的侧面,既能完成任意时刻对离子源内气压的调整,又可以避免在毛细管进样管路上串接流量计带来的样品污染问题。A capillary 1 for sample injection is provided on the side of the drift first electrode 3, and a sample introduction hole is arranged on the drift first electrode 3, and the sample in the capillary 1 is introduced into the ionization region through the hole. The side of the capillary 1 is provided with a flow controller and a pressure controller. Through the flow controller and the pressure controller, the flow rate of the sample entering the capillary 1 from the outside and the flow rate of the sample entering the ionization region (ie, the injection pressure of the ion source) can be controlled simultaneously, making it easier to maintain the vacuum in the ionization region. In particular, the flow controller of this embodiment is connected to the side of the capillary through a bypass, which can not only adjust the air pressure in the ion source at any time, but also avoid sample contamination caused by connecting a flowmeter in series on the capillary sampling pipeline. question.
所述漂移首电极3、真空测量漂移电极6和所述漂移电极7的通孔结构的孔径为10mm,所述绝缘密封环4的中心孔大小为10mm,绝缘密封环4的厚度为1mm,所述漂移尾电极8的通孔结构的孔径为1.5mm,所述柱状腔体的长度为100mm。The aperture of the through-hole structure of the drift first electrode 3, the vacuum measurement drift electrode 6 and the drift electrode 7 is 10mm, the central hole size of the insulating sealing ring 4 is 10mm, and the thickness of the insulating sealing ring 4 is 1mm. The diameter of the through-hole structure of the drift tail electrode 8 is 1.5 mm, and the length of the columnar cavity is 100 mm.
所述样品汇聚漂移电极5的通孔结构的孔径为2mm,所述样品汇聚漂移电极5的通孔结构与所述紫外灯2的光束同轴设置。样品汇聚漂移电极5的设置可以使送入电离室内的所有被测气体汇聚并通过被紫外灯的有效电离半径内,该设计可以将电离效率提高3-10倍。The hole diameter of the through-hole structure of the sample converging drift electrode 5 is 2 mm, and the through-hole structure of the sample converging drift electrode 5 is arranged coaxially with the beam of the ultraviolet lamp 2 . The setting of the sample converging drift electrode 5 can make all the measured gases sent into the ionization chamber converge and pass through the effective ionization radius of the ultraviolet lamp. This design can increase the ionization efficiency by 3-10 times.
所述真空测量漂移电极6的侧面设置有用于检测所述柱状腔体的真空度的真空规13。A vacuum gauge 13 for detecting the vacuum degree of the columnar cavity is provided on the side of the vacuum measurement drift electrode 6 .
所述漂移尾电极8的通孔结构为锥形孔,以通孔结构附近的孔壁厚度。样品在电离区电离后,生成的离子束经由漂移尾电极8的通孔结构离开电离区,进入光电离离子源后端连接的设备。The through-hole structure of the drift tail electrode 8 is a tapered hole, with the thickness of the hole wall near the through-hole structure. After the sample is ionized in the ionization region, the generated ion beam leaves the ionization region through the through-hole structure of the drift tail electrode 8 and enters the device connected to the rear end of the photoionization ion source.
实施例2一种光电离飞行时间质谱仪Embodiment 2 A kind of photoionization time-of-flight mass spectrometer
本实施例提供一种光电离飞行时间质谱仪,其离子源采用实施例1的光 电离离子源。光电离离子源通过一个离子传输区真空腔10与后端的离子透镜和飞行时间质量分析器等装置连接。本实施例中离子透镜和飞行时间质量分析器等未具体说明其结构的装置均属于现有技术。The present embodiment provides a kind of photoionization time-of-flight mass spectrometer, and its ion source adopts the photoionization ion source of embodiment 1. The photoionization ion source is connected with devices such as an ion lens and a time-of-flight mass analyzer at the rear end through a vacuum chamber 10 in the ion transmission region. In this embodiment, devices whose structures are not specified, such as ion lenses and time-of-flight mass analyzers, belong to the prior art.
所述离子传输区真空腔10中设置有离子传输器9,离子传输器9优选为四极杆离子传输器。所述离子传输区真空腔10后端设置有用于引出离子束的小孔电极11,所述小孔电极11上设置有孔径1.5mm的小孔。An ion transporter 9 is arranged in the vacuum chamber 10 of the ion transport area, and the ion transporter 9 is preferably a quadrupole ion transporter. The rear end of the vacuum chamber 10 in the ion transmission area is provided with a small hole electrode 11 for extracting ion beams, and a small hole with a diameter of 1.5 mm is set on the small hole electrode 11 .
本实施例的离子传输区真空腔10连接有一个抽速10L/s-300L/s的涡轮分子泵12,该分子泵12能够同时维持电离区的柱状腔体和离子传输区的离子传输区真空腔10的真空度。在本实施例中,电离区的柱状腔体的真空度可维持在100-800Pa,离子传输区真空腔的10真空度可以在0.05-10Pa之间,能够满足各种样品的测试需求。The vacuum chamber 10 in the ion transmission area of the present embodiment is connected with a turbomolecular pump 12 with a pumping speed of 10L/s-300L/s, and the molecular pump 12 can maintain the vacuum of the columnar cavity of the ionization area and the ion transmission area of the ion transmission area at the same time The vacuum degree of chamber 10. In this embodiment, the vacuum degree of the columnar chamber in the ionization region can be maintained at 100-800 Pa, and the vacuum degree of the vacuum chamber in the ion transmission region can be maintained at 0.05-10 Pa, which can meet the testing requirements of various samples.
采用本实施例的光电离飞行时间质谱仪对苯标准样品进行测试的结果如图2所示。可见,本实施例能够用于对挥发性有机物的高灵敏度、全谱、在线检测。对于含有16.8ppbv苯的苯标准样品进行检测,如图3所示,其产生的分子离子峰信号强度为171099,噪声31.66,信噪比5404,检出限0.009,表明本实施例的仪器能够达到很高的精密度。The results of testing the standard sample of benzene using the photoionization time-of-flight mass spectrometer of this embodiment are shown in FIG. 2 . It can be seen that this embodiment can be used for high-sensitivity, full-spectrum, on-line detection of volatile organic compounds. Detect for the benzene standard sample that contains 16.8ppbv benzene, as shown in Figure 3, the molecular ion peak signal strength that it produces is 171099, noise 31.66, signal-to-noise ratio 5404, detection limit 0.009, shows that the instrument of the present embodiment can reach Very high precision.
通过上述实施例可以看到,本发明提供了一种结构紧凑、能够与后端的的离子传输区真空腔共用抽真空装置的光电离离子源,将该光电离离子源应用于飞行时间质谱仪,能够有效简化仪器的结构,减小仪器的体积并降低仪器的能耗,有利于飞行时间质谱仪的推广使用,具有很好的应用前景。It can be seen from the above embodiments that the present invention provides a photoionization ion source that has a compact structure and can share a vacuuming device with the vacuum chamber in the rear-end ion transmission area. The photoionization ion source is applied to a time-of-flight mass spectrometer, The structure of the instrument can be effectively simplified, the volume of the instrument can be reduced and the energy consumption of the instrument can be reduced, which is beneficial to popularization and use of the time-of-flight mass spectrometer, and has good application prospects.

Claims (10)

  1. 一种结构紧凑的光电离离子源,其特征在于:包括依次设置的紫外灯(2)和电极组,所述电极组中相邻的电极之间设置有绝缘密封环(4),所述电极组中的电极的中部均设置有通孔结构,所述绝缘密封环(4)和所述电极组中的电极共同构成柱状腔体;A kind of compact photoionization ion source, it is characterized in that: comprise the ultraviolet lamp (2) that arranges in sequence and electrode group, be provided with insulating sealing ring (4) between the adjacent electrodes in described electrode group, described electrode The middle parts of the electrodes in the group are all provided with a through-hole structure, and the insulating sealing ring (4) and the electrodes in the electrode group together form a columnar cavity;
    所述电极组中的电极包括依次设置的漂移首电极(3)、至少一个漂移电极(7)和漂移尾电极(8),所述漂移首电极(3)的侧面设置有用于进样的毛细管(1),所述紫外灯(2)设置在柱状腔体中靠近漂移首电极(3)的一端。The electrodes in the electrode group include a drift first electrode (3), at least one drift electrode (7) and a drift tail electrode (8) arranged in sequence, and a capillary for sampling is provided on the side of the drift first electrode (3) (1), the ultraviolet lamp (2) is arranged at one end close to the drifting first electrode (3) in the columnar cavity.
  2. 按照权利要求1所述的光电离离子源,其特征在于:还包括流量控制器(14)和压力控制器(15),所述流量控制器(14)和压力控制器(15)通过旁路引出连接在毛细管(1)上。According to the described photoionization ion source of claim 1, it is characterized in that: also comprise flow controller (14) and pressure controller (15), described flow controller (14) and pressure controller (15) pass through bypass The outlet is connected to the capillary (1).
  3. 按照权利要求1所述的光电离离子源,其特征在于:所述漂移首电极(3)和所述漂移电极(7)的通孔结构的孔径为1mm-15mm,所述绝缘密封环(4)的中心孔大小为1-20mm,所述漂移尾电极(8)的通孔结构的孔径为0.3-3mm,所述柱状腔体的长度为30-300mm。According to the described photoionization ion source of claim 1, it is characterized in that: the aperture of the through-hole structure of the first drift electrode (3) and the drift electrode (7) is 1mm-15mm, and the insulating sealing ring (4 ) has a center hole size of 1-20mm, the through-hole structure of the drift tail electrode (8) has a diameter of 0.3-3mm, and the length of the columnar cavity is 30-300mm.
  4. 按照权利要求1所述的光电离离子源,其特征在于:所述漂移首电极(3)与所述紫外灯(2)的灯头电极接触。The photoionization ion source according to claim 1, characterized in that: the drift head electrode (3) is in contact with the lamp head electrode of the ultraviolet lamp (2).
  5. 按照权利要求1所述的光电离离子源,其特征在于:所述漂移尾电极(8)的通孔结构为锥形孔。The photoionization ion source according to claim 1, characterized in that: the through-hole structure of the drift tail electrode (8) is a tapered hole.
  6. 按照权利要求1所述的光电离离子源,其特征在于:所述电极组中的电极还包括样品汇聚漂移电极(5),所述汇聚漂移电极(5)位于所述漂移首电极(3)和漂移电极(7)之间,所述样品汇聚漂移电极(5)的通孔结构的孔径为1mm-3mm,所述样品汇聚漂移电极(5)的通孔结构与所述紫外灯(2)的光束同轴设置。According to the photoionization ion source according to claim 1, it is characterized in that: the electrodes in the electrode group also include a sample convergence drift electrode (5), and the convergence drift electrode (5) is located at the first drift electrode (3) and the drift electrode (7), the aperture of the through-hole structure of the sample converging drift electrode (5) is 1mm-3mm, and the through-hole structure of the sample converging drift electrode (5) is connected with the ultraviolet lamp (2) The beam coaxial setting.
  7. 按照权利要求1所述的光电离离子源,其特征在于:所述电极组中的电极还包括真空测量漂移电极(6),所述真空测量漂移电极(6)的侧面设置有用于检测所述柱状腔体的真空度的真空规(13)。According to the described photoionization ion source of claim 1, it is characterized in that: the electrode in the described electrode group also comprises vacuum measurement drift electrode (6), and the side of described vacuum measurement drift electrode (6) is provided with for detecting the A vacuum gauge (13) for the vacuum degree of the column cavity.
  8. 按照权利要求1-7任一项所述的光电离离子源,其特征在于:所述电极组中的电极之间设置有分压电阻(17)。The photoionization ion source according to any one of claims 1-7, characterized in that: a voltage dividing resistor (17) is arranged between the electrodes in the electrode group.
  9. 一种光电离飞行时间质谱仪,其特征在于:所述光电离飞行时间质谱仪的离子源采用权利要求1-8任一项所述的光电离离子源。A photoionization time-of-flight mass spectrometer, characterized in that: the ion source of the photoionization time-of-flight mass spectrometer adopts the photoionization ion source described in any one of claims 1-8.
  10. 按照权利要求9所述的光电离飞行时间质谱仪,其特征在于:所述光电离离子源后端设置有离子传输区真空腔(10),所述离子传输区真空腔(10)连接有用于抽真空的装置,所述离子传输区真空腔(10)中设置有离子传输器(9),所述离子传输区真空腔(10)后端设置有用于引出离子束的小孔电极(11),所述小孔电极(11)上设置有孔径0.5-2mm的小孔。According to the photoionization time-of-flight mass spectrometer according to claim 9, it is characterized in that: the rear end of the photoionization ion source is provided with an ion transmission area vacuum chamber (10), and the ion transmission area vacuum chamber (10) is connected with a A device for vacuuming, an ion transporter (9) is arranged in the vacuum chamber (10) of the ion transmission area, and a small hole electrode (11) for extracting ion beams is provided at the rear end of the vacuum chamber (10) of the ion transmission area , the small hole electrode (11) is provided with a small hole with a diameter of 0.5-2mm.
PCT/CN2022/129337 2021-11-12 2022-11-02 Photoionization ion source having compact structure, and photoionization time-of-flight mass spectrometer WO2023083082A1 (en)

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