CN106601584B - Atmospheric pressure magnetic enhancement and magnetic confinement direct current glow discharge ion source - Google Patents
Atmospheric pressure magnetic enhancement and magnetic confinement direct current glow discharge ion source Download PDFInfo
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- CN106601584B CN106601584B CN201611198585.8A CN201611198585A CN106601584B CN 106601584 B CN106601584 B CN 106601584B CN 201611198585 A CN201611198585 A CN 201611198585A CN 106601584 B CN106601584 B CN 106601584B
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- 230000002708 enhancing effect Effects 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- -1 polytetrafluoroethylene Polymers 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 9
- 150000002500 ions Chemical class 0.000 description 56
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- 238000001514 detection method Methods 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 6
- 229960001138 acetylsalicylic acid Drugs 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/20—Magnetic deflection
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention provides an atmospheric pressure magnetic enhancement and magnetic confinement direct current glow discharge ion source, which improves the ionization efficiency, the ion transmission efficiency and the working stability of the ion source to a greater extent.A pair of cuboid permanent magnets which are parallel and opposite to each other across a cavity is arranged on the axial periphery of the cavity and is closer to an air outlet port and avoids a direct current discharge electrode, a magnetic field B1 covers a direct current discharge area, the direction of the magnetic field B1 is vertical to the current J of the direct current discharge area, and J × B1 is arranged along the gas flow direction, and two annular permanent magnets with the same specification are coaxially and sequentially arranged along the axial direction of the cavity, so that the two annular permanent magnets form a uniform magnetic field B2 which covers the direct current discharge area and a plasma jet area at the downstream of the air outlet port, and the direction of the uniform magnetic field B2 is consistent with the permanent axial directions of the cavity and the annular magnets.
Description
Technical field
The present invention relates to a kind of atmospheric pressure gas discharge ion source generating means.
Background technology
Ion gun is that one kind utilizes extraneous electric discharge, light radiation, and the mode such as sputtering, makes neutral atom or molecular ionization,
And therefrom draw the device of ion beam current.It is the critical component of the equipment such as chemical analysis detector, environment monitor.Air is calmed the anger
Body discharge ion source, because it is not limited by vacuum environment, chemical solvent is not used, environmental pollution is small, simple to operate, is applicable
The features such as property is strong and by the extensive concern of domestic and international researcher.Atmospheric pressure gas discharge ion source, its common discharge mode
Including corona discharge, direct current glow discharge, dielectric barrier discharge, hollow cathode discharge, and microwave discharge.With N2, He, Ar etc.
For gas as plasma-maintaining gas, plasma caused by electric discharge contains substantial amounts of high energy particle.This high energy particle with it is big
H in gas2O、O2、N2, occur it is a series of reaction generation reactive intermediate, these intermediates then transfer energy to be measured
Thing, ionize sample molecule.The species of ionization are transported to detection device, and qualitative or quantitative analysis is carried out to sample component.
In above-mentioned electric discharge type, direct current glow discharge has higher ionizing efficiency relative to corona discharge；Relative to
Dielectric barrier discharge, hollow cathode discharge and microwave discharge, there is simple electrode structure or the requirement of relatively low power configuration.
Existing DC Atmospheric Pressure Glow Discharge ion gun, when being analyzed applied to trace amounts of substances, ppb amounts can be accurate to
Level, the more accurately composition or state of reactive material.But it is at work, in order to obtain higher ionizing efficiency, electric discharge is empty
Between so discharge loop in the current-limiting resistance connected can all produce substantial amounts of Joule heat, the rise of discharge space temperature causes to put
The unstability of electricity, directly affect the degree of accuracy and the precision of Matter Composition analysis；On the other hand, in gaseous exchange and diffusion
Under the influence of, only the tracer ion of sub-fraction is analyzed instrument and is collected into, and most tracer ion escapes into the ring of surrounding
Border air and it is compound fall, cause the efficiency of transmission of ion low, reduce the sensitivity of analytical instrument.Above-mentioned reason is present, more
So that in the Matter Composition detection of ppt magnitudes, reproducibility and reliability is also limited by very large.
Applicant once research dielectric barrier discharge technical elements proposed magnetic-field-enhanced low temperature of a kind of atmospheric pressure etc. from
Daughter brush generator (Chinese patent ZL201310488730.6).Electromagnetic induction principle is utilized in the program, in narrow slit chamber
The both sides of the wider outer surface of body set the permanent magnet of another pair face parallel to each other, and magnetic field covering main discharge and dielectric impedance are put
Electric region so that plasma sprays under the collective effect of air draft force and magnetic field Lorentz force from air outlet, is formed
Higher volume of brush plasma jet.
But the application scenario of the magnetic-field-enhanced low temperature plasma brush generator of the atmospheric pressure and cardinal principle with
The application has very big difference.The magnetic-field-enhanced low temperature plasma brush generator of atmospheric pressure, make every effort to produce more volume
Plasma jet, mainly apply to material surface processing and cleaning, plasma sterilization, and plasma for purification etc. neck
Domain.Its operation principle is that electronics is acted in the B of magnetic field by Lorentz force, and its path is not by adding straight line during magnetic field to become bent
Line, add stroke and ionizing efficiency of the electronics in discharge space so that electronics can collide again with more gas molecules
Ionize or excite and produce more electronics and active specy；Because the general direction of electric current is to point to negative electrode by anode, so long-range navigation
Hereby the direction of power is consistent with airflow direction, can speed up electric charge and is moved along airflow direction, and formation active specy is more, volume is bigger
Plasma jet.
And the application belongs to the minisize plasma body source of direct current glow discharge, discharge space characteristic size is not more than 1mm, main
To be applied to the fields such as chemical analysis detection and environmental monitoring.The common research direction of those skilled in the art is that increase electric discharge is empty
Between ionizing efficiency and improve fluidic spaces ion transmission efficiency.
The problem of existing for foregoing prior art, the magnetic-field-enhanced low temperature plasma brush generator of the atmospheric pressure
The research direction of (Chinese patent ZL201310488730.6) is different, also fails to solve the problems, such as.Although because additional a pair mutually it is equal
After the permanent magnet of row face, the magnetic-field-enhanced low temperature plasma brush generator of the atmospheric pressure ionizes in its discharge space
Efficiency increases, if but directly applied to chemical analysis detection and environmental monitoring, because of its excessive plasma jet
Volume, the ion in plasma jet only have small part in the presence of air-flow, can be collected into analytical instrument entrance,
Composition qualitative or quantitative analysis is carried out, causes analytical instrument no signal to export.This results from large volume of plasma jet
The ion in jet is enabled fully to contact generation recombination reaction with ambient air；Secondly, the entrance of analytical instrument
Characteristic size is usually 1-3 millimeter, and the solid angle very little of ioncollection, substantial amounts of ion is because of gaseous exchange and the work of diffusion
With will be fallen by the charge recombination in ambient air.
The content of the invention
The present invention proposes a kind of atmospheric pressure magnetic enhancing and magnetic confinement direct current glow discharge ion gun, to air in background technology
The technical scheme of straightening stream glow discharge ion source is improved, and improves the ionization effect of the type ion gun to a greater degree
Rate, ion transmission efficiency, and the stability of work.
To realize above goal of the invention, the present invention provides following technical scheme：
Atmospheric pressure magnetic strengthens and magnetic confinement direct current glow discharge ion gun, including the chamber with air inlet port, air outlet
Body and a pair of direct-current discharge electrodes, the cavity wall of cavity is insulating materials；The discharge end of direct-current discharge electrode is closer to air outlet；
The cross-sectional area in direct-current discharge region is not more than 1mm in cavity2；Peripheral in cavity axial direction and closer air outlet, avoid directly
Stream sparking electrode is provided with a pair and covers direct-current discharge region across the parallel relative cuboid permanent magnet of cavity, magnetic field B1,
Magnetic field B1 directions are vertical with the electric current J (direct-current discharge electric field E) in direct-current discharge region, and J × B1 (Lorentz force) is along gas stream
Dynamic direction；The ring shape permanent magnet of two same specifications, one of ring shape permanent magnet are axially coaxially disposed with along cavity
It is enclosed on cavity periphery and is located at air outlet downstream positioned at the air inlet side in direct-current discharge region, another ring shape permanent magnet, two
The radius of spacing and ring shape permanent magnet itself is equal between individual ring shape permanent magnet so that two ring shape permanent magnets form even
High-intensity magnetic field B2 covers the Plasma Jet region in direct-current discharge region and air outlet downstream, uniform magnetic field B2 directions and chamber
The axial direction of body and ring shape permanent magnet is consistent.
On the basis of above scheme, the present invention has also further made following optimization：
Above-mentioned inside cavity is rectangular parallelepiped structure, and length and width are no more than 1mm.Certainly, can also in addition to rectangular parallelepiped structure
It is wedge structure, column construction etc..
The mixing material of above-mentioned insulating materials preferably polytetrafluoroethylene, insulating ceramics or both.
The distance of above-mentioned cuboid permanent magnet and chamber outer wall is not more than 10mm, and magnetic field B1 is 1000~20000 Gausses.
Above-mentioned ring shape permanent magnet internal diameter is 20~30mm, and external diameter is 40~50mm, a height of 5~10mm；Uniform magnetic field B2
No more than 200 Gausses.
Generally current-limiting resistance is also in series with the loop of above-mentioned direct-current discharge electrode.
Above-mentioned direct-current discharge electrode can use copper, aluminium, tungsten, nickel, tantalum, platinum or electrode made of its alloy, and two direct currents are put
Electrode electric discharge end face facing each other can be plane or tip-like.
Axially the inclined of loop configuration is also coaxially arranged with along above-mentioned cavity in the rear class of another ring shape permanent magnet
Piezoelectricity pole, to be formed as far as possible parallel to the electric field of the plasma jet direction of propagation.
Plasma-maintaining gas flow velocity is 1~20L/min；With 1~5L/min more preferably.
The technique effect of the present invention is as follows：
A pair of ring shape permanent magnets of specific setting cause plasma jet caused by direct-current discharge be in parallel to
The uniform magnetic field B2 of airflow direction, meanwhile, a pair of permanent magnets are separately set in direct-current discharge region to strengthen direct-current discharge space
Ionizing efficiency；With the ion perpendicular to magnetic field B2 velocity components, acted on by Lorentz force, constrain in the magnetic line of force B2 weeks
Enclose, motion of spinning vertically.Ion collides during screw with neutral species, causes energy loss so that
The about beam radius of screw tapers into, and avoids ion from being escaped into away from central shaft in surrounding air, and is finally collected
To analytical instrument entrance.Magnetic field causes the biography of ion between air outlet and analytical instrument entrance to the effect of contraction of charged particle
Defeated efficiency is improved.During work, plasma caused by electric discharge contains substantial amounts of active specy.In this active specy and air
H2O、O2、N2, a series of reaction generation reactive intermediate occurs, these intermediates then transfer energy to determinand, make
Sample molecule ionizes.
In the case of identical operating current, direct-current discharge ionizing efficiency is higher, plasma active species (charged particle,
Free radical, and metastable atom and molecule) concentration is bigger.
In the case of identical operating current, for operation material (plasma-maintaining gas and the detection sample of homogeneity same amount
Product), ion transmission efficiency is higher.
Brief description of the drawings
Fig. 1 is discharging chamber structural representation when not configuring permanent magnet.
Structural representation when Fig. 2 is configuration cuboid permanent magnet.
Fig. 3 is configuration cuboid permanent magnet and structural representation during ring shape permanent magnet.
Fig. 4 is apparatus of the present invention operation principle schematic diagram.
Fig. 5 is that only the scheme of configuration cuboid permanent magnet and the plasma of traditional scheme (not configuring permanent magnet) are penetrated
Flow launching light spectrogram.
Fig. 6 is only to configure the scheme of ring shape permanent magnet and the aspirin solution of traditional scheme (not configuring permanent magnet)
Ion massspectrum figure.
Fig. 7 is the present invention program shown in Fig. 4 and the aspirin solution ion matter of traditional scheme (not configuring permanent magnet)
Spectrogram.
Drawing reference numeral explanation：
12- cavitys；14- air inlet ports；16- air outlets；20th, 22- electrodes；24- plasma jets；28- current limlitings electricity
Resistance；The power-supply devices of 30- first；40- second source equipment；42nd, 44- cuboids permanent magnet；50th, 52- ring shape permanent magnets；
60- bias electrodes；62- analytical instrument entrances.
Embodiment
Those skilled in the art are that the analytical instrument for making to connect with ionization source obtains stronger detection signal, typically by
Regulation impressed DC voltage increase discharge current or regulation flow controller increase plasma-maintaining gas flow to realize.So
And the increase of discharge current can cause the increase of direct-current discharge space Joule heat, and the rise of plasma gas temperature, from
And cause the unstability of electric discharge, reduce the degree of accuracy and the precision of Matter Composition analysis.And plasma-maintaining gas flow
Increase directly result in the increase of ion gun operating cost.
Action principle of the present invention using magnetic field to moving charged particle, electronics are made in the B1 of magnetic field by Lorentz force
With its path is not by adding straight line during magnetic field to become curve, stroke and ionizing efficiency of the increase electronics in discharge space；It is simultaneously outer
Add toroidal magnet, there is the ion perpendicular to magnetic field B2 velocity components, acted on by Lorentz force, constrain in the magnetic line of force B2 weeks
Enclose, motion of spinning vertically.Ion collides during screw with neutral species, causes energy loss so that
The about beam radius of screw tapers into, and avoids ion from being escaped into away from central shaft in surrounding air, and is finally collected
To analytical instrument entrance.Magnetic field causes the biography of ion between air outlet and analytical instrument entrance to the effect of contraction of charged particle
Defeated efficiency is improved.
Cause increasing for plasma jet active specy because of the increase of ionizing efficiency, and ion transmission efficiency carries
It is high so that under less operating current and plasma-maintaining gas flow condition, analytical instrument can obtain more ion gun
Strong detection signal, both ensure that the stability of electric discharge, reduce the operating cost of ion gun again.
As shown in Figure 1, Figure 2, Fig. 3, and shown in Fig. 4, the improvement major embodiment on apparatus of the present invention structure ＆ working mechanism is as follows.
In direct-current discharge cavity both sides, a pair of parallel to each other and face permanent magnets are set.Permanent magnet is usually rectangular
Body, magnetic field covering direct-current discharge region, its direction is vertical with electric field E or electric current J, and J × B1 is along gas flow direction；Permanent magnet
It is not more than 10mm with the distance of narrow slit chamber outer wall, magnetic field is 1000~20000 Gausses.
Plane normal direction sets a pair of ring shape permanent magnets where along air outlet.Magnetic field covering direct-current discharge region,
And the Plasma Jet region in air outlet downstream.Axial directions of the magnetic field B2 along toroidal magnet, and with being put down where air outlet
The normal direction in face is consistent, no more than 200 Gausses.
During work, allow operation material (plasma-maintaining gas and detection sample) to flow into chamber from air inlet port, by
Additional certain voltage is allowed to breakdown ionization near outgassing end mouth direct-current discharge electrode, and formation contains a large amount of electronics and negative ions
Plasma flow.After additional square magnet, increase ionization effect because of the effect by Lorentz force in discharge space electronics
Rate；In air outlet downstream, plasma sprays under the collective effect of air draft force and Lorentz force from air outlet, etc.
Active specy concentration is bigger in gas ions jet.After additional toroidal magnet, more charged particles are in magnetic in plasma jet
Under the constraint of field, flowed into the screw that about beam radius is gradually decayed in analytical instrument, realize that sample component is qualitative or fixed
Amount analysis.
The structure and the course of work of the present invention is detailed further below.
Atmospheric pressure magnetic strengthens includes cavity 12 with magnetic confinement direct current glow discharge ion gun, and cavity 12 has two ports, and one
Individual air inlet port 14 and another air outlet 16.Operation material (plasma-maintaining gas and detection sample) is from air inlet port
14 flow into inside cavity 12.
Direct current glow discharge ion gun also includes two electrodes, an electrode 20 and another electrode 22.Electrode 20 and electricity
Pole 22 is facing each other in the inside of cavity 12, and close to air outlet 16.
The both sides on the outside of the cavity of electrodeless setting, direct current glow discharge ion gun is also parallel to each other including a pair, and just
To cuboid permanent magnet 42,44.
Direct current glow discharge ion gun also includes a pair of coaxial same size ring shape permanent magnets 50,52.It is annular permanent
Spacing between magnet 50,52 is the radius size of magnet itself, the axis of ring shape permanent magnet 50,52 and the axis of cavity 12
(normal of the place plane of air outlet 16) overlaps.
Fig. 4 is atmospheric pressure magnetic of the present invention enhancing and the operating diagram of magnetic confinement direct current glow discharge ion gun.Direct current brightness
Light discharge ion source includes the power-supply device 30 of current-limiting resistance 28 and first, and the first power-supply device 30 is at air outlet 16
Electrode 20 and electrode 22 provide discharge voltage, form discharge loop.Direct current glow discharge ion gun also includes the He of bias electrode 60
Second source equipment 40, second source equipment 40 are that bias electrode 60 provides bias voltage.
During work, operation material constantly flows into cavity 12 from air inlet port 14, when flow through electrode 20 and electrode 22 pair
Region of discharge, add enough high voltages at electrode 20,22 both ends, gas will be breakdown, is formed in chamber interior containing a large amount of
The plasma flow of electronics and negative ions.The magnetic line of force of cuboid permanent magnet 42,44 passes through electrode 20 and the institute of electrode 22
Corresponding region of discharge, plasma spray under the collective effect of air draft force and magnetic field Lorentz force from air outlet 16
Go out, form plasma jet 24.The additional certain bias voltage of bias electrode 60, approximation is formed in Plasma Jet region
Parallel to the electric field of the jet direction of propagation, for extracting the tracer ion in plasma jet 24, the tracer ion of extraction exists
Air-flow, electric field, magnetic field collective effect under, flow into analytical instrument entrance 62.Analytical instrument by the monitoring to tracer ion come
Qualitative or quantitative analysis is carried out to sample component.
In order to more clearly verify the technique effect of the present invention, applicant is only additional in only additional cuboid permanent magnet
Tested respectively in the case of ring shape permanent magnet, and three kinds of simultaneously additional square and ring shape permanent magnet etc..
When additional cuboid permanent magnet, in inside cavities, against air outlet 16, the electric discharge of two electrode faces is empty
Between, perpendicular to direction of an electric field generation magnetic field B1=3200Gs uniform magnetic field.Working gas is He, flow velocity 1.0L/min, is led to
The discharge current for crossing two electrodes is 11mA.Electronics is acted in discharge space by Lorentz force, and ionizing efficiency is improved；
Air outlet downstream, plasma spray under the collective effect of air draft force and Lorentz force from air outlet, form body
The bigger and higher active specy concentration plasma jet of product.Using the method for emission spectrographic analysis, respectively pair plus magnetic field and
The radiation spectrum intensity of plasma jet is detected when being not added with magnetic field.As shown in figure 5, He direct-current discharges, generate OH
Free radical, excitation state N2, excitation stateMany active species such as metastable state He.Before and after contrasting additional square magnet, find to live
Property species intensity of emission spectra increase 3-4 times.The raising of the increase explanation direct-current discharge space ionizing efficiency of spectral intensity and
The increase of plasma jet active specy concentration.The increase of plasma jet active specy concentration will be helpful to subsequent species
In trace analysis, the increase of detection signal intensity.
When additional toroidal magnet, in Plasma Jet region, the magnetic field B2=45Gs parallel to airflow direction is produced.
Working gas is He gas, and flow velocity 1.0L/min, the discharge current by two electrodes is 11mA.By the way of syringe pump injection,
Before cavity 12 is entered, 14.6ppb aspirin solution is injected into He air-flows.In discharge space and plasma jet
Place, existing active specy are corresponding to aspirin solution and a series of complex reaction generation of vapor in the atmosphere generation
Ion.Under the constraint in magnetic field, the screw gradually to be decayed with about beam radius flows into analytical instrument such ion, realizes
Sample component is analyzed.Fig. 6 shows the ion massspectrum figure when adding magnetic field and being not added with magnetic field, it was found that adding toroidal magnet
Afterwards, the mass spectral intensities of all polyions are significantly increased, and are changed into original 4-5 times.The increase of mass spectral intensities shows ion in magnetic field
The lower motion of constraint can improve the efficiency of transmission of ion.
When additional square magnet and toroidal magnet simultaneously, in direct-current discharge space, produce perpendicular to direction of an electric field, magnetic field
Intensity is 3200Gs uniform magnetic field, and produced in Plasma Jet region parallel to airflow direction, magnetic field intensity 45Gs
Uniform magnetic field.Working gas is He gas, and flow velocity 1.0L/min, the discharge current by two electrodes is 11mA.Using syringe pump
The mode of injection, before cavity 12 is entered, 14.6ppb aspirin solution is injected into He air-flows.Direct-current discharge space
Ionizing efficiency and the ion transmission efficiency of Plasma Jet region are improved simultaneously.In discharge space and air outlet 16
Go out, because electronics is acted on by Lorentz force, form the bigger and higher active specy concentration plasma jet of volume.
At discharge space and plasma jet, existing active specy occurs one with aspirin solution and vapor in the atmosphere
The complex reaction of series generates corresponding ion.Such ion is under the constraint in magnetic field, the spiral gradually decayed with about beam radius
Motion is flowed into analytical instrument, realizes that sample component is analyzed.Fig. 7 show add two kinds of magnetic fields and when being not added with two kinds of magnetic field from
Sub- mass spectrogram, it was found that after magnetic field is added, situation of the increase compared with Fig. 6 of many ion massspectrum intensity becomes apparent, and is changed into former
10-15 times come.Mass spectral intensities dramatically increase, and illustrate additional square magnet and additional toroidal magnet, improve direct current respectively
The ionizing efficiency of discharge space and the ion transmission efficiency of Plasma Jet region.
Claims (8)
1. atmospheric pressure magnetic strengthens and magnetic confinement direct current glow discharge ion gun, including the cavity with air inlet port, air outlet
With a pair of direct-current discharge electrodes, the cavity wall of cavity is insulating materials；The discharge end of direct-current discharge electrode is closer to air outlet；Chamber
The cross-sectional area in internal direct-current discharge region is not more than 1mm2；It is characterized in that：
Cavity axially periphery and closer to air outlet, avoid direct-current discharge electrode be provided with a pair it is parallel relative across cavity
Cuboid permanent magnet, magnetic field B1 coverings direct-current discharge region, magnetic field B1 directions are vertical with the electric current J in direct-current discharge region,
And J × B1 is along gas flow direction；
The ring shape permanent magnet of two same specifications is axially coaxially disposed with along cavity, one of ring shape permanent magnet is enclosed on
Cavity periphery is simultaneously located at air outlet downstream, two rings positioned at the air inlet side in direct-current discharge region, another ring shape permanent magnet
The radius of spacing and ring shape permanent magnet itself is equal between shape permanent magnet so that two ring shape permanent magnets form even strong magnetic
B2 covering direct-current discharge region and the Plasma Jet region in air outlet downstream, uniform magnetic field B2 directions and cavity with
And ring shape permanent magnet is axially consistent.
2. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Institute
It is rectangular parallelepiped structure to state inside cavity, and length and width are no more than 1mm.
3. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Institute
State mixing material of the insulating materials using polytetrafluoroethylene (PTFE), insulating ceramics or both.
4. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Institute
The distance for stating cuboid permanent magnet and chamber outer wall is not more than 10mm, and magnetic field B1 is 1000~20000 Gausses.
5. the atmospheric pressure magnetic enhancing according to claim 1 or 4 exists with magnetic confinement direct current glow discharge ion gun, its feature
In：The ring shape permanent magnet internal diameter is 20~30mm, and external diameter is 40~50mm, a height of 5~10mm；Uniform magnetic field B2 is not more than
200 Gausses.
6. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Directly
Flow and be also in series with current-limiting resistance on the loop of sparking electrode.
7. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Institute
It is copper, aluminium, tungsten, nickel, tantalum or electrode made of platinum to state direct-current discharge electrode, two direct-current discharge electrodes discharge end facing each other
Face is plane or tip-like.
8. atmospheric pressure magnetic enhancing according to claim 1 and magnetic confinement direct current glow discharge ion gun, it is characterised in that：Edge
Cavity is axially also coaxially arranged with the bias electrode of loop configuration in the rear class of another ring shape permanent magnet, to be formed
As far as possible parallel to the electric field of the plasma jet direction of propagation.
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| JP6396618B1 (en) * | 2018-04-03 | 2018-09-26 | グローテクノロジー株式会社 | Glow discharge system and glow discharge mass spectrometer using the same |
| US20210005442A1 (en) * | 2018-04-04 | 2021-01-07 | Shanghai Institute Of Ceramics, Chinese Academy Of Sciences | Apparatus and method for enhancing signal intensity of radio frequency glow discharge mass spectrometry |
| CN108896648A (en) * | 2018-04-04 | 2018-11-27 | 中国科学院上海硅酸盐研究所 | With the device and method of array magnet enhancing radio frequency glow discharge mass signal intensity |
| CN108648981A (en) * | 2018-04-04 | 2018-10-12 | 中国科学院上海硅酸盐研究所 | Enhance the device and method of radio frequency glow discharge mass signal intensity with adjustable magnetic fields |
| CN108615668A (en) * | 2018-04-04 | 2018-10-02 | 中国科学院上海硅酸盐研究所 | Enhance the device and method of radio frequency glow discharge mass ions signal strength with toroidal magnetic field |
| CN108776129B (en) * | 2018-07-06 | 2023-12-08 | 中国科学院西安光学精密机械研究所 | Multifunctional annular magnet array laser plasma restraint device and application system thereof |
| CN110682014B (en) * | 2019-10-29 | 2023-08-01 | 江苏华源节水股份有限公司 | Laser drilling device for drip irrigation belt |
| CN112804806A (en) * | 2020-11-23 | 2021-05-14 | 北京劳动保障职业学院 | Magnetic confinement three-dimensional plasma jet array method and system |
| CN113504188A (en) * | 2021-06-02 | 2021-10-15 | 中国科学院上海硅酸盐研究所 | Semi-closed system magnetic confinement liquid cathode glow discharge device |
| CN114189972A (en) * | 2021-12-02 | 2022-03-15 | 华中科技大学 | Stable plasma discharge device, control method and system |
| CN114554670B (en) * | 2022-02-14 | 2022-11-29 | 西安电子科技大学 | Plasma jet system and control method |
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| CN102946685B (en) * | 2012-10-15 | 2016-01-20 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure induced air dielectric barrier discharge low-temperature plasma generating device |
| CN103533733B (en) * | 2013-10-17 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure magnetic field enhanced low-temperature plasma electric brush generating device |
| CN104241077B (en) * | 2014-08-06 | 2016-09-07 | 四川大学 | Normal pressure micro-glow discharge maldi mass spectrometer ion gun of magnetically confined and mass spectrometer |
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