CN112788827A - Gas discharge method for enhancing plasma intensity - Google Patents
Gas discharge method for enhancing plasma intensity Download PDFInfo
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- CN112788827A CN112788827A CN201911083591.2A CN201911083591A CN112788827A CN 112788827 A CN112788827 A CN 112788827A CN 201911083591 A CN201911083591 A CN 201911083591A CN 112788827 A CN112788827 A CN 112788827A
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Abstract
The embodiment of the invention provides a gas discharge method for enhancing plasma intensity, belonging to the technical field of plasma. The method is implemented based on a composite electrode discharge device, and comprises the following steps: providing, by a first high voltage drive power supply system of a dual power drive system, drive energy to a low voltage electrode and a second high voltage electrode of the device to produce a radial discharge between the low voltage electrode and the second high voltage electrode; and providing driving energy to a low-voltage electrode and a first high-voltage electrode of the device by a second high-voltage driving power supply system of the dual power supply driving system to generate axial discharge between the low-voltage electrode and the first high-voltage electrode; under the coupled excitation action of axial discharge and radial discharge, charged particles with different motion directions generated by two discharge modes are strengthened to collide, so that high-density plasma is excited and generated in an interactive discharge area which simultaneously generates axial discharge and radial discharge.
Description
Technical Field
The invention relates to the technical field of plasma, in particular to a gas discharge method for enhancing the plasma intensity.
Background
Atmospheric gas discharge is used as a method for generating low-temperature plasma, and the process is mainly that an external electric field drives the gas discharge to generate a series of low-temperature plasma with high energy. The low-temperature plasma has high reaction activity, so the method has good application prospect in the fields of fine chemical engineering, materials, environmental protection and the like. The existing method for enhancing the strength and energy of the gas discharge plasma is a technical approach based on electrode modification, the process complexity is improved, and the durable wear resistance of the modified electrode needs to be studied. Therefore, in order to further improve the application effect of low-temperature plasma in these fields, a strategy for improving the plasma generation efficiency and the reaction activity in the gas discharge process is urgently needed.
Disclosure of Invention
The invention aims to provide a gas discharge method for enhancing plasma intensity, which respectively generates axial discharge and radial discharge with discharge interaction areas by reasonably arranging the connection mode of an external driving power supply system and a low-voltage electrode and a high-voltage electrode, so as to excite and generate high-density plasma in the interaction discharge areas which simultaneously generate the axial discharge and the radial discharge.
In order to achieve the above object, an embodiment of the present invention provides a gas discharge method for enhancing plasma intensity, the method being implemented based on a composite electrode discharge device, wherein the composite electrode discharge device has an outer cylinder, the device includes: the low-voltage electrode is attached to the outer surface of the outer-layer cylinder in a surrounding manner; the first high-voltage electrode is attached to the outer surface of the outer-layer cylinder in a surrounding mode, is positioned on one side of the low-voltage electrode and is parallel to the low-voltage electrode; a second high voltage electrode located on an axis of the device, the method comprising: providing, by a first high voltage drive power supply system of a dual power supply drive system, drive energy to the low voltage electrode and the second high voltage electrode to generate a radial discharge between the low voltage electrode and the second high voltage electrode; and providing driving energy to the low-voltage electrode and the first high-voltage electrode by a second high-voltage driving power supply system of the dual power supply driving system to generate a first axial discharge between the low-voltage electrode and the first high-voltage electrode; and exciting in a first alternating discharge area which simultaneously generates the axial discharge and the radial discharge to generate high-density plasma.
Optionally, the first high-voltage driving power supply system and the second high-voltage driving power supply system form a dual-power driving system, the first high-voltage driving power supply system is electrically connected with the low-voltage electrode and the second high-voltage electrode respectively, and the second high-voltage driving power supply system is electrically connected with the low-voltage electrode and the first high-voltage electrode respectively.
Optionally, the composite electrode discharge device further includes a third high voltage electrode, which is attached to the outer surface of the outer cylinder in a surrounding manner, is located on the other side of the low voltage electrode, and is parallel to the low voltage electrode, wherein the second high voltage driving power supply system is electrically connected to the third high voltage electrode.
Optionally, the method further includes: and the second high-voltage driving power supply system provides driving energy for the low-voltage electrode and the third high-voltage electrode so as to generate second axial discharge between the low-voltage electrode and the third high-voltage electrode, wherein the second axial discharge and the radial discharge have a coupling excitation effect, and high-density plasma is excited and generated in a second interaction discharge area which simultaneously generates the axial discharge and the radial discharge.
Optionally, the first high voltage electrode and the third high voltage electrode are respectively spaced from the low voltage electrode by the same distance.
Optionally, the first high voltage electrode and the third high voltage electrode are flatly attached to the outer surface of the outer cylinder, and the edges of the electrodes are flat.
Optionally, the second high voltage electrode includes: an inner cylinder parallel and coaxial with the outer cylinder; and the conductor medium is filled in the inner-layer cylinder, and the first high-voltage driving power supply system is electrically connected with the conductor medium.
Optionally, the inner cylinder and the outer cylinder are made of an insulating dielectric material.
Optionally, the composite electrode discharge device further includes a fixing member for fixing the outer cylinder and the second high voltage electrode.
Optionally, the fixing member is made of an insulating dielectric material.
Through the technical scheme, the composite electrode with a special structure is driven by the dual-power drive system, and the combination of axial discharge and radial discharge is realized, so that high-density plasma is generated by excitation in an interactive discharge area which simultaneously generates the axial discharge and the radial discharge.
Additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the embodiments of the invention without limiting the embodiments of the invention. In the drawings:
fig. 1 is a schematic diagram of a composite electrode discharge device based on a gas discharge method for enhancing plasma intensity according to an embodiment of the present invention.
Description of the reference numerals
1 fixing part, 2 high-voltage electrode and 3 first high-voltage driving power supply system
4 low voltage electrode 5 high voltage electrode 6 discharge gap
7 axial electric field 8 radial electric field 9 second high voltage driving power supply system
10 high-voltage electrode 11 inner layer cylinder and outer layer cylinder
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration and explanation only, not limitation.
Example one
Fig. 1 is a schematic diagram of a composite electrode discharge device based on a gas discharge method for enhancing plasma intensity, the composite electrode discharge device having an outer cylinder, the device including: the low-voltage electrode 4 is attached to the outer surface of the outer-layer cylinder in a surrounding way; the high-voltage electrode 5 is attached to the outer surface of the outer-layer cylinder in a surrounding manner, is positioned on one side of the low-voltage electrode 4 and is parallel to the low-voltage electrode 4; and the high voltage electrode 10 is positioned on the axis of the device.
The gas discharge method for enhancing the plasma intensity provided by the embodiment of the invention comprises the following steps: a first high-voltage driving power supply system 3 of a dual-power driving system provides driving energy for the low-voltage electrode 4 and the second high-voltage electrode 10 to generate radial discharge between the low-voltage electrode 4 and the high-voltage electrode 10; and a second high-voltage driving power supply system 9 of the dual power supply driving system provides driving energy for the low-voltage electrode 4 and the high-voltage electrode 5 to generate axial discharge between the low-voltage electrode 4 and the high-voltage electrode 5; and exciting in an interactive discharge area which simultaneously generates the axial discharge and the radial discharge to generate high-density plasma.
Specifically, the low-voltage electrode 4 and the high-voltage electrode 5 are parallel and are respectively attached to the outer surface of the outer-layer cylinder at a certain interval, and after the low-voltage electrode 4 and the high-voltage electrode 5 obtain driving energy, an axial electric field 7 parallel to the axis of the outer-layer cylinder of the device is formed between the two electrodes in the cylinder and generates axial discharge excitation to generate plasma. It will be appreciated that the plasma generated between the two electrodes will also extend beyond the boundary of the axial electric field 7, forming an axial discharge region extending beyond the axial electric field.
The high-voltage electrode 10 is positioned on the axis of the device and is vertical to the low-voltage electrode 4 in space, after the high-voltage electrode 10 and the low-voltage electrode 4 obtain driving energy, an electric field in the radial direction is formed between the two electrodes in the cylinder, and radial discharge excitation is generated to generate plasma.
The axial discharge area and the radial discharge area are spatially provided with coincident areas, namely, interactive discharge areas, under the coupling excitation action of axial discharge and radial discharge, charged particles with different motion directions generated by the two discharge modes collide, so that more high-energy active particles are induced and generated, the active particle ratio in the interactive discharge areas is increased, the plasma energy and activity in the plasma interactive areas are improved, and high-density and high-activity plasma is obtained.
The gas discharge method is implemented based on a composite electrode discharge device, wherein the outer surface of an outer layer cylinder of the composite electrode discharge device is respectively coated with a low-voltage electrode and a high-voltage electrode which is positioned on one side of the low-voltage electrode and is parallel to the low-voltage electrode in a surrounding manner, so that axial discharge is generated between the low-voltage electrode and the high-voltage electrode after the low-voltage electrode and the high-voltage electrode obtain driving energy; the axis of the device comprises another high-voltage electrode, radial discharge is generated between the low-voltage electrode and the high-voltage electrode after the low-voltage electrode and the high-voltage electrode obtain driving energy, under the coupled excitation action of axial discharge and radial discharge, charged particles with different motion directions generated by the two discharge modes collide, therefore, high-density plasma is generated in the alternating discharge area which simultaneously generates axial discharge and radial discharge, compared with the method that the plasma intensity is increased by changing the electrode characteristic in a single-form excitation electric field, the method can increase the plasma intensity without changing the electrode characteristic, is structurally optimized so that axial and radial discharges can be generated simultaneously with a minimum number of electrodes, the gas excitation ionization efficiency in the discharge process is improved through the composite excitation effect of the two discharge modes, the generation efficiency of active particles is optimized, and the plasma intensity and the reaction activity in the gas discharge process are further improved.
Example two
Based on the gas discharge method for enhancing plasma intensity described in the above embodiment, another embodiment of the present invention further provides a gas discharge method for enhancing plasma intensity, which has all the features of the above embodiment, and the method described in the embodiment of the present invention is further implemented based on a dual power source driving system, where the dual power source driving system includes: the first high-voltage driving power supply system 3 is respectively electrically connected with the low-voltage electrode 4 and the high-voltage electrode 10 and is used for providing driving energy for the low-voltage electrode 4 and the high-voltage electrode 10; and a second high-voltage driving power supply system 9 which is respectively electrically connected with the low-voltage electrode 4 and the high-voltage electrode 5 and is used for providing driving energy for the low-voltage electrode 4 and the high-voltage electrode 5.
The first high-voltage driving power supply system 3 and the second high-voltage driving power supply system 9 both output alternating currents, and the two power supply systems are independent of each other and do not affect each other in working.
The high voltage electrode 10 may comprise an inner cylinder parallel and coaxial to the outer cylinder; and the conductor medium is filled in the inner-layer cylinder, and the first high-voltage driving power supply system 3 is electrically connected with the conductor medium so as to provide driving energy for the high-voltage electrode 10.
Wherein, the inner layer cylinder and the outer layer cylinder 11 are insulating medium materials.
The device further comprises: and the high-voltage electrode 2 is attached to the outer surface of the outer-layer cylinder in a surrounding manner, is positioned on the other side of the low-voltage electrode 4 and is parallel to the low-voltage electrode 4. After the low-voltage electrode 4, the high-voltage electrode 2 and the high-voltage electrode 10 respectively obtain driving energy, axial discharge generated between the low-voltage electrode 4 and the high-voltage electrode 2 and radial discharge generated between the low-voltage electrode 4 and the high-voltage electrode 10 generate a coupling excitation effect, and high-density plasma is excited and generated in an interactive discharge area which simultaneously generates axial discharge and radial discharge.
Similar to the principle of the axial discharge phenomenon of the low-voltage electrode 4 and the high-voltage electrode 5 in the previous embodiment, the low-voltage electrode 4 and the high-voltage electrode 2 are parallel and spaced at a certain distance, and after the low-voltage electrode 4 and the high-voltage electrode 2 obtain driving energy, an axial electric field 7 parallel to the axis of the outer layer cylinder of the device is formed between the two electrodes in the cylinder, and axial discharge is generated to generate plasma. It will be appreciated that the plasma generated between the outer cylinder and the high voltage electrode also extends outside the boundary of the axial electric field 7 in the discharge gap 6 between the two electrodes, forming an axial discharge region extending outside the axial electric field.
The second high-voltage driving power supply system 9 is also electrically connected with the high-voltage electrode 2 and is used for providing driving energy for the high-voltage electrode 2. It can be understood that the alternating current output by the second high voltage driving power supply system 9 provides driving energy for the high voltage electrode 2 and the high voltage electrode 5 at the same time, so that the axial electric fields formed by the high voltage electrode 2 and the low voltage electrode 4 and the high voltage electrode 5 and the low voltage electrode 4 are opposite in direction.
Compared with the prior art that the plasma strength is enhanced through electrode modification, the embodiment of the invention can effectively improve the ionization rate of gas molecules in a discharge region on the basis of not changing the electrode characteristics, thereby achieving the purpose of enhancing the plasma strength and the reaction activity.
To ensure that axial discharges occur simultaneously, the spacing between the high voltage electrode 2 and the low voltage electrode 4 is the same as the spacing between the high voltage electrode 5 and the low voltage electrode 4. In addition, the high-voltage electrode 5 and the high-voltage electrode 2 are flatly pasted on the outer surface of the outer layer cylinder, and the edges of the electrodes are flat.
The composite electrode discharge device also comprises a fixing piece 1 for fixing the outer layer cylinder and the high-voltage electrode, wherein the fixing piece 1 is made of an insulating medium material.
The embodiment utilizes a dual-power drive system to drive gas discharge to enhance the strength and the reaction activity of low-temperature plasma, and forms coupling interactive electric field distribution generated by compounding axial discharge and radial discharge in the discharge process by designing a combined electrode combination mode with a special structure and combining with the dual-power system to provide drive energy, wherein the low-voltage electrode and the high-voltage electrode generate axial discharge between the low-voltage electrode and the high-voltage electrode after obtaining the drive energy provided by one power supply in the dual-power drive system; and the low-voltage electrode and the other high-voltage electrode on the axial line of the device generate radial discharge between the low-voltage electrode and the other high-voltage electrode after obtaining the driving energy provided by the other power supply in the dual-power-supply driving system, and under the coupling excitation action of axial discharge and radial discharge, charged particles with different movement directions generated by two discharge modes are strengthened to collide, the ionization degree of gas molecules in a plasma excitation area is improved, the energy and the proportion of the active particles are increased, and the purpose of improving the reaction activity and the strength of the plasma is further achieved, so that a technical approach is provided for improving the application effect of the low-temperature plasma.
Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, the embodiments of the present invention are not limited to the details of the above embodiments, and various simple modifications can be made to the technical solutions of the embodiments of the present invention within the technical idea of the embodiments of the present invention, and the simple modifications all belong to the protection scope of the embodiments of the present invention.
It should be noted that the various features described in the above embodiments may be combined in any suitable manner without departing from the scope of the invention. In order to avoid unnecessary repetition, the embodiments of the present invention do not describe every possible combination.
Those skilled in the art will understand that all or part of the steps in the method according to the above embodiments may be implemented by a program, which is stored in a storage medium and includes several instructions to enable a single chip, a chip, or a processor (processor) to execute all or part of the steps in the method according to the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
In addition, any combination of various different implementation manners of the embodiments of the present invention is also possible, and the embodiments of the present invention should be considered as disclosed in the embodiments of the present invention as long as the combination does not depart from the spirit of the embodiments of the present invention.
Claims (10)
1. A gas discharge method for enhancing plasma intensity, the method being implemented on the basis of a composite electrode discharge device having an outer cylinder, the device comprising:
the low-voltage electrode (4) is attached to the outer surface of the outer-layer cylinder in a surrounding manner;
the first high-voltage electrode (5) is attached to the outer surface of the outer-layer cylinder in a surrounding mode, is positioned on one side of the low-voltage electrode (4) and is parallel to the low-voltage electrode (4);
a second high voltage electrode (10) located on the axis of the device,
the method comprises the following steps:
providing driving energy to the low voltage electrode (4) and the second high voltage electrode (10) by a first high voltage driving power supply system (3) of a dual power supply driving system to generate a radial discharge between the low voltage electrode (4) and the second high voltage electrode (10); and
providing driving energy to the low voltage electrode (4) and the first high voltage electrode (5) by a second high voltage driving power supply system (9) of a dual power supply driving system to generate a first axial discharge between the low voltage electrode (4) and the first high voltage electrode (5);
and exciting in a first alternating discharge area which simultaneously generates the axial discharge and the radial discharge to generate high-density plasma.
2. Method according to claim 1, characterized in that the first high voltage driving power supply system (3) is electrically connected with the low voltage electrode (4) and the second high voltage electrode (10), respectively, and the second high voltage driving power supply system (9) is electrically connected with the low voltage electrode (4) and the first high voltage electrode (5), respectively.
3. The method of claim 1, wherein the composite electrode discharge device further comprises a third high voltage electrode (2) circumferentially attached to the outer surface of the outer cylinder on the other side of the low voltage electrode (4) and parallel to the low voltage electrode (4),
the second high-voltage driving power supply system (9) is electrically connected with the third high-voltage electrode (2).
4. The method of claim 3, further comprising:
-providing a driving energy to the low voltage electrode (4) and the third high voltage electrode (2) by the second high voltage driving power supply system (9) to generate a second axial discharge between the low voltage electrode (4) and the third high voltage electrode (2),
and the second axial discharge and the radial discharge generate a coupling excitation effect, and high-density plasma is excited and generated in a second alternating discharge area which simultaneously generates the axial discharge and the radial discharge.
5. A method according to claim 3, characterized in that the first high voltage electrode (5) and the third high voltage electrode (2) are each at the same distance from the low voltage electrode (4).
6. A method according to claim 3, characterized in that the first high voltage electrode (5) and the third high voltage electrode (2) are applied flat on the outer surface of the outer cylinder, and the electrode edges are flat.
7. The method of claim 1,
the second high voltage electrode (10) comprises:
an inner cylinder parallel and coaxial with the outer cylinder;
and the conductor medium is filled in the inner-layer cylinder, and the first high-voltage driving power supply system (3) is electrically connected with the conductor medium.
8. The method of claim 7, wherein the inner cylinder and the outer cylinder are comprised of an insulating dielectric material.
9. The method according to claim 1, wherein the combined electrode discharge device further comprises a fixing member for fixing the outer cylinder and the second high voltage electrode (10).
10. The method of claim 9, wherein the fixture is constructed of an insulating dielectric material.
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| CN101330794A (en) * | 2008-05-09 | 2008-12-24 | 西安交通大学 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
| CN204168591U (en) * | 2014-09-22 | 2015-02-18 | 南京和乃安健康科技有限公司 | A kind of air forces down isothermal plasma generation device |
| CN105607275A (en) * | 2016-03-13 | 2016-05-25 | 南京理工大学 | Method and apparatus for generation of radial polarized cosine Gaussian Shell Model (GSM) light beam |
| CN107172797A (en) * | 2017-07-10 | 2017-09-15 | 哈尔滨理工大学 | Needle tubing ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
-
2019
- 2019-11-07 CN CN201911083591.2A patent/CN112788827B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4423355A (en) * | 1980-03-26 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Ion generating apparatus |
| CN1187686A (en) * | 1996-11-01 | 1998-07-15 | 松下电器产业株式会社 | High frequency discharge energy supply means and high frequency electrodeless discharge lamp device |
| CN101330794A (en) * | 2008-05-09 | 2008-12-24 | 西安交通大学 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
| CN204168591U (en) * | 2014-09-22 | 2015-02-18 | 南京和乃安健康科技有限公司 | A kind of air forces down isothermal plasma generation device |
| CN105607275A (en) * | 2016-03-13 | 2016-05-25 | 南京理工大学 | Method and apparatus for generation of radial polarized cosine Gaussian Shell Model (GSM) light beam |
| CN107172797A (en) * | 2017-07-10 | 2017-09-15 | 哈尔滨理工大学 | Needle tubing ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
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