CN101876065A - Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure - Google Patents
Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure Download PDFInfo
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- CN101876065A CN101876065A CN 201010186416 CN201010186416A CN101876065A CN 101876065 A CN101876065 A CN 101876065A CN 201010186416 CN201010186416 CN 201010186416 CN 201010186416 A CN201010186416 A CN 201010186416A CN 101876065 A CN101876065 A CN 101876065A
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- normal pressure
- insulating tube
- insulation tube
- plasma
- gas
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000007789 gas Substances 0.000 claims abstract description 28
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052786 argon Inorganic materials 0.000 claims abstract description 13
- 238000012986 modification Methods 0.000 claims abstract description 7
- 230000004048 modification Effects 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims abstract 2
- 238000009413 insulation Methods 0.000 claims description 18
- 239000002245 particle Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 9
- 239000012159 carrier gas Substances 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 2
- 238000013461 design Methods 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 abstract 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- 150000003254 radicals Chemical class 0.000 abstract 1
- 238000002156 mixing Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 241001282153 Scopelogadus mizolepis Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
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- Plasma Technology (AREA)
Abstract
The invention discloses a method for modifying the inner surface of a slender insulating tube by utilizing plasma discharge under the normal pressure, belonging to a material surface modification technology in the technical field of low temperature plasmas. The method is characterized in that hollow metal electrodes with sharp edges are respectively inserted into both ends of a slender insulating tube to be treated, amplitude modulation alternating current voltage or pulse with the working frequency of 40-50kHz is added on the two hollow metal electrodes, fluorine gas led into the slender insulating tube discharges to generate plasmas with high electron density, and active gas needed to be used is led on the basis of the actual needs and is mixed into argon carrier gas to generate a needed chemical free radical to finish modification and film deposition of the inner surface of a medium tube. The invention has the advantages that the purpose for modifying the inner surface of the slender insulating tube is achieved, the design idea is concise, and the method has outstanding advantages on lowering the equipment cost and increasing the maneuverability.
Description
Technical field
The invention belongs to material surface modifying technology in the lower temperature plasma technology field, relate to the argon plasma that in elongated flexible insulated dielectric tube, produces high electron density, realize the method for modifying inner surface by mixing reactive gas.
Background technology
Answer the various needs of science and technology and production practice, often require the insulation tube internal surface to want possess hydrophilic property, hydrophobicity, protection against corrosion, various characteristicses such as disinfection.The plasma body that utilizes atmosphere pressure discharging to produce carries out surface modification and thereby plated film realizes that these characteristics are technological approaches of exploring at present.Because for the rough vacuum plasma technique, on the one hand because of not needing vacuum apparatus to greatly reduce investment cost and reduced the complicacy that operation of equipment is safeguarded, thereby under atmospheric pressure can produce on the other hand the active particle shortening treatment time of greater concn.Yet under atmospheric pressure the voltage breakdown by discharge acquisition plasma body is very high, therefore to the requirement harshness of power supply, especially will produce the plasma body of big scale, and too high voltage breakdown has seriously restricted further applying of this technology.In addition, gas flow required in the normal atmosphere open system is very big, considers from the economy angle, and the carrier gas of use must adopt cheap gas could give prominence to the advantage of this technology.
At present, the fluidics that is adopted is many to be carrier gas with the helium, moreover the jet length that the fluidics that is adopted produces is not enough to satisfied requirement to the internal surface of elongated tube even processing; In addition, has the feature of the thread discharge of typical dielectric impedance by twine electrode at the medium tube outside surface at the plasma body that method produced of pipe underexcitation helium or argon gas discharging, and be limited by the thickness and the specific inductivity of medium tube wall, discharge scenario is very complicated, application conditions harshness not only, and its range of application also is very restricted.We propose a kind of method is to utilize at the inner plasma body that directly produces of medium tube, rather than see through generation plasma body electric field action under of inducing of tube wall, in the plasma discharge that with the argon gas is carrier gas, sneak into reactive gas, finish plasma chemical reaction, form the modification that various useful free radicals are realized internal surface.
Summary of the invention
The purpose of this invention is to provide a kind of argon plasma that in elongated flexible insulated dielectric tube, produces high electron density, realize the method for the modification of internal surface by mixing reactive gas.
To achieve these goals, technical scheme of the present invention is: the metal electrode that inserts the hollow of sharp edges at the two ends of elongated insulation tube, and sealing fixes and allows gas flow into from the endoporus of one of them electrode, from the endoporus of another electrode, flow out, add that on the metal electrode of these two hollows operating frequency is the voltage of alternating current in 40～50kHz scope.Increase voltage gradually, plasma jet is produced by the drive electrode end and spreads to ground-electrode, forms complete discharge channel at last.Further regulate voltage of supply, make the final arc discharging plasma that forms high electron density in the discharge channel.Then, feed the reactive gas that will use according to actual needs and make it to be mixed in the argon carrier gas, thereby produce modification or the plated film that required chemically-active particle is finished the medium tube internal surface.
The plasma discharge that utilizes under the normal pressure of the present invention feeds the reactive gas that will use in argon plasma discharge back and after forming complete discharge channel, the generation chemically-active particle to the method for elongated insulation tube modifying inner surface.
Of the present inventionly utilize that plasma discharge is to the method for elongated insulation tube modifying inner surface under the normal pressure, handled elongated tubular material is an insulating material, and is crooked arbitrarily under the situation of not stopping up gas channel.
The plasma discharge that utilizes under the normal pressure of the present invention is to the method for elongated insulation tube modifying inner surface, and described power supply is sinusoidal high-voltage power supply of pulsed modulation or pulsed high voltage generator.
Effect of the present invention and benefit are: the plasma body that has produced high electron density in elongated insulation tube, produce the processing of various active particles realization internal surfaces and the physical environment that the film deposition provides wide operation window for mixing reactive gas, since among the present invention by having selected best alternate current operation frequency that required operating voltage is reduced greatly, with respect to existing technology, design technology project of the present invention is succinct, has outstanding advantage on the reduction equipment cost and on the increase operability.
Description of drawings
Accompanying drawing is to utilize under the normal pressure plasma discharge to the method principle schematic of elongated insulation tube modifying inner surface.
Among the figure: 1 elongated insulation tube; The voltage drive electrode of 2 hollows; The ground-electrode of 3 hollows; 4 high-voltage ac powers; 5 drive electrode heat resistant joint rings; 6 ground-electrode heat resistant joint rings; 7 gas blending bins; 8 carrier gas flux meters; 9 reactive gas under meters; 10 argon bottles; 11 reactive gas bottles.
Embodiment
Be described in detail the specific embodiment of the present invention below in conjunction with technical scheme and accompanying drawing.
At first, with the pending elongated insulation tube of the ground-electrode 3 relative insertions of the voltage drive electrode 2 of hollow and hollow 1 inner about 2 centimetres, and be fixed on the end of pipe with drive electrode heat resistant joint ring 5 and ground-electrode heat resistant joint ring 6, allow working gas feed in the elongated insulation tube 1, discharge in the hole by the ground-electrode 3 of hollow by the blowhole of the voltage drive electrode 2 of hollow.High-voltage ac power 4 is applied on the voltage drive electrode 2 of hollow, optimum working frequency (OWF) is in the scope of 40～50kHz, can obtain minimum voltage breakdown, and by further increasing power stable plasma discharge of acquisition in pipe, up to the generation of arc discharge, make the electron density of internal plasma reach job requirement.The length of the elongated insulation tube 1 that institute's making alive is handled with the need and increasing.Then, in pure argon under the discharge stability, opening reactive gas under meter 9 feeds reactive gass argon gas and reactive gas is fed in the plasma body in the elongated insulation tube 1 by the blowhole of the voltage drive electrode 2 of hollow behind the thorough mixing in gas blending bin 7, produce required active free particle, thereby realize the purpose of modifying inner surface.
Claims (3)
1. one kind is utilized under the normal pressure plasma discharge to the method for elongated insulation tube modifying inner surface, it is characterized in that: insert the voltage drive electrode (2) of resistant to elevated temperatures hollow of sharp edges and the ground-electrode (3) of hollow at the two ends of elongated insulation tube (1), adding the high-voltage ac power (4) of operating frequency in 40～50kHz scope on the metal electrode of these two hollows, in insulation tube, produce plasma body, feed the reactive gas that to use according to actual needs, make it to be mixed in the modification that the required chemical chemically-active particle of generation in the argon plasma of stable discharging is finished the medium tube internal surface.
2. a kind of plasma discharge that utilizes under the normal pressure according to claim 1 is to the method for elongated insulation tube modifying inner surface, it is characterized in that: the reactive gas that selection according to actual needs will be used, discharge afterwards and the reactive gas that feeding will be used after forming complete discharge channel or the mixed gas of reactive gas and argon gas at argon plasma.
3. a kind of plasma discharge that utilizes under the normal pressure according to claim 1 is to the method for elongated insulation tube modifying inner surface, it is characterized in that: driving power is the pulsed modulation ac high voltage source, the operating frequency of voltage of alternating current is 40～50kHz scope, perhaps pulsed high voltage generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010186416 CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010186416 CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101876065A true CN101876065A (en) | 2010-11-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010186416 Pending CN101876065A (en) | 2010-05-25 | 2010-05-25 | Method for modifying inner surface of slender insulating tube by utilizing plasma discharge under normal pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101876065A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102510654A (en) * | 2011-10-18 | 2012-06-20 | 大连理工大学 | Atmospheric-pulse-modulated microwave plasma generation device |
| CN105755452A (en) * | 2016-04-18 | 2016-07-13 | 北京大学 | Device for spraying TiO2 nano coating on inner wall of pipe cavity |
| CN111954360A (en) * | 2020-09-18 | 2020-11-17 | 云南电网有限责任公司电力科学研究院 | Large-area cold plasma generating device and method based on mixed gas |
| CN113198804A (en) * | 2021-04-30 | 2021-08-03 | 辽宁科技大学 | Method and apparatus for cleaning inner wall of slender pipeline by inert gas ionization |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN2604846Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder external emission cold plasma generator |
| CN1851045A (en) * | 2006-05-31 | 2006-10-25 | 大连理工大学 | Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge |
-
2010
- 2010-05-25 CN CN 201010186416 patent/CN101876065A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1382829A (en) * | 2001-04-27 | 2002-12-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN2604846Y (en) * | 2003-02-26 | 2004-02-25 | 王守国 | Atmospheric radio-frequency cylinder external emission cold plasma generator |
| CN1851045A (en) * | 2006-05-31 | 2006-10-25 | 大连理工大学 | Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge |
Non-Patent Citations (2)
| Title |
|---|
| 《Applied physics letters》 20090316 Shou-Zhe Li et al. Optical diagnosis of an argon/oxygen needle plasma generated at atmospheric pressure 第111501-2页右栏第9行至111501-3页右栏第6行及图5 1-3 第94卷, 第11期 2 * |
| 《Physics of Plasmas》 20100222 Shou-Zhe Li et al. Spectroscopic study of a long high-electron-density argon plasma column generated at atmospheric pressure 第020702-1页左栏第30行至右栏第23行及图1 1-3 第17卷, 第2期 2 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102510654A (en) * | 2011-10-18 | 2012-06-20 | 大连理工大学 | Atmospheric-pulse-modulated microwave plasma generation device |
| CN105755452A (en) * | 2016-04-18 | 2016-07-13 | 北京大学 | Device for spraying TiO2 nano coating on inner wall of pipe cavity |
| CN111954360A (en) * | 2020-09-18 | 2020-11-17 | 云南电网有限责任公司电力科学研究院 | Large-area cold plasma generating device and method based on mixed gas |
| CN113198804A (en) * | 2021-04-30 | 2021-08-03 | 辽宁科技大学 | Method and apparatus for cleaning inner wall of slender pipeline by inert gas ionization |
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Open date: 20101103 |