CN111970807A - Device for exciting microwave plasma based on sliding arc discharge - Google Patents
Device for exciting microwave plasma based on sliding arc discharge Download PDFInfo
- Publication number
- CN111970807A CN111970807A CN202010979616.3A CN202010979616A CN111970807A CN 111970807 A CN111970807 A CN 111970807A CN 202010979616 A CN202010979616 A CN 202010979616A CN 111970807 A CN111970807 A CN 111970807A
- Authority
- CN
- China
- Prior art keywords
- microwave
- microwave plasma
- cyclone
- metal
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
Abstract
The invention discloses a device for exciting microwave plasma based on sliding arc discharge, which comprises a microwave generator, a microwave waveguide tube, a non-metal discharge tube, a high-voltage power supply, a metal electrode and a cyclone device, wherein the microwave generator emits microwaves and generates a microwave electric field in the microwave waveguide tube; the non-metal discharge tube is fixed in the microwave waveguide tube; the high-voltage power supply is connected with the two metal electrodes; two metal electrodes are symmetrically bent and distributed in the cyclone device; the air outlet of the cyclone device is opposite to one end of the non-metal discharge tube. The ends of the two metal electrodes do not extend into the microwave waveguide. One end of the non-metal discharge tube is fixed on the surface of the cyclone device, and the other end of the non-metal discharge tube extends out of the microwave waveguide tube. The device for exciting the microwave plasma based on the sliding arc discharge has the advantages of high excitation success rate, stable excitation, simple device and convenient use, can realize the excitation and maintenance of the microwave plasma under atmospheric pressure, and can be applied to industrial production in a large scale.
Description
Technical Field
The invention belongs to the technical field of microwave plasma excitation, and particularly relates to a device for exciting microwave plasma based on sliding arc discharge.
Background
Microwaves propagate in the waveguide, which, given sufficient electromagnetic power, results in intense gas ionization to produce a microwave plasma. The microwave plasma has the advantages of no need of electrodes, instantaneous high temperature, high energy density and the like, thereby having application prospects in the aspects of solid waste treatment, gas waste treatment, metallurgy, metal welding and the like. The excitation field intensity of the microwave plasma is 777kV/m, and the excitation field intensity is far higher than the maintenance field intensity. In conventional application, the whole cavity consists of a waveguide, a transition waveguide and a compression waveguide, and although the compression waveguide can improve the electric field strength to a certain extent, the requirement of excitation field strength cannot be met. So during the microwave plasma excitation, auxiliary excitation is also needed.
Currently, there are three methods of assisted excitation. One is the metal probe method, i.e. using an ignition means in the form of a wire or metal nozzle. The prior document for reference is an invention application document with publication number CN104507249A, which discloses a rectangular waveguide microwave plasma source generating device, wherein a copper probe is arranged in a reaction region of a rectangular waveguide resonant cavity to excite microwave plasma. However, due to the extremely high temperature of the reaction zone, the copper probe is melted or ablated once, the process is accompanied with the problem of metal pollution, and the microwave plasma cannot be rapidly re-ignited when being accidentally extinguished.
Another method is the DBD method, i.e. dielectric barrier discharge. The prior document for reference is chinese patent application with publication number CN107801286A, which introduces an excitation system for exciting microwave plasma based on dielectric barrier discharge, and this application generates charged particles through dielectric barrier discharge, and blows them into a cavity with air flow as seed electrons to excite the microwave plasma. When the method is used, argon is needed to be used as ionized gas, and the lower end of the non-metal preionization jet pipe is close to a plasma region and is easy to melt, so that microwave plasma cannot be excited smoothly again. Meanwhile, the method has high cost, complex system and inconvenient use, and is difficult to be applied in industry in large scale.
Yet another method is to fix a metallic conductor at the inner wall of a non-metallic discharge vessel. The prior art is referred to as chinese invention application with publication number CN109104808A, which is to arrange spiral or grid-shaped high-temperature-resistant conductive material with matched radius in a non-metal discharge tube, and to use a conductor to absorb microwave energy to generate flashover and generate seed electrons, and then to excite microwave plasma. Although this device is simple, excitation is unstable, and the metal conductor ablation phenomenon is likely to occur.
The invention mainly aims to solve the problems of difficult excitation, unstable excitation and complex excitation device of microwave plasma.
Disclosure of Invention
The invention aims to: the device for exciting the microwave plasma based on the sliding arc discharge has the advantages of high excitation success rate, stable excitation, simplicity, convenience in use, capability of realizing excitation and maintenance of the microwave plasma under atmospheric pressure, and large-scale application in industrial production.
The technical scheme of the invention is as follows:
the utility model provides a device based on slip arc discharges and arouses microwave plasma, includes microwave generator, microwave waveguide, non-metallic discharge tube, still includes high voltage power supply, metal electrode and cyclone, wherein:
a microwave generator for emitting microwaves and generating a microwave electric field in the microwave waveguide;
the non-metal discharge tube is fixed in the microwave waveguide tube;
the high-voltage power supply is connected with the two metal electrodes;
the two metal electrodes are symmetrically bent and distributed in the cyclone device;
and the air outlet of the cyclone device is opposite to one end of the non-metal discharge tube.
Preferably, the ends of the two metal electrodes do not extend into the microwave waveguide.
Preferably, one end of the non-metal discharge tube is fixed on the surface of the cyclone device, the other end of the non-metal discharge tube extends out of the microwave waveguide tube, and the middle part of the non-metal discharge tube traverses the inside of the microwave waveguide tube.
Preferably, the high-voltage power supply has parameters between 10kV and 30kV, and the working frequency is a high-frequency alternating-current sine wave from direct current to dozens of kHz.
Preferably, the cyclone device comprises a cylindrical cyclone shell and an air pump, one end of the cyclone shell is closed, the other end of the cyclone shell is provided with an air outlet, and the two metal electrodes penetrate into the cyclone shell from the closed end through a high-voltage insulating medium; a plurality of air guide holes are distributed on the cyclone shell along the circumference and are respectively communicated with the air pump.
Preferably, the air guide hole is flush with the inner wall of the cyclone shell, and forms an included angle of 10-80 degrees with the axis of the cyclone shell; the number of the air guide holes is 2 or more, and the central extension line of each air guide hole and the axis of the cyclone shell are in different planes.
Preferably, the central axis of the non-metal discharge tube is located at a distance of λ/4+ k λ from the end face of the microwave waveguide, λ is the wavelength of the microwaves in the system, and k is an integer not less than 0.
Preferably, the high-voltage power supply makes the two metal electrodes break down at the narrowest distance to form an electric arc, the electric arc slides towards the air outlet under the action of the airflow of the cyclone device, and the charged particles are sent into the non-metal discharge tube through the airflow to excite microwave plasma.
Preferably, the length of the arc increases during sliding towards the air outlet, when the length of the arc increases beyond the limit of discharge maintenance of the power supply, the arc is extinguished, but a new arc is formed at the shortest distance, and the process is repeated.
Preferably, the charged particles are fed into the non-metal discharge tube to excite the microwave plasma, the high-voltage power supply is turned off after a stable microwave plasma torch is formed, and if the microwave plasma torch is accidentally extinguished, the high-voltage power supply is turned on again.
The invention has the advantages that:
the device for exciting the microwave plasma based on the sliding arc discharge has the advantages of high excitation success rate, stable excitation, simple device and convenient use, can realize the excitation and maintenance of the microwave plasma under atmospheric pressure, and can be applied to industrial production in a large scale.
Drawings
The invention is further described with reference to the following figures and examples:
fig. 1 is a schematic structural diagram of an apparatus for exciting microwave plasma based on sliding arc discharge according to the present invention.
Wherein: 1. a microwave waveguide; 2. a non-metallic discharge tube; 3. a microwave generator; 4. a microwave power supply; 5. a heat radiation fan; 6. a cyclone housing; 7. air holes; 8. an air pump; 9. a high voltage power supply; 10. a high voltage insulating medium; 11. and a metal electrode.
Detailed Description
As shown in fig. 1, the device for exciting microwave plasma based on sliding arc discharge of the present invention comprises a microwave waveguide 1, a non-metal discharge tube 2, a microwave generator 3, a microwave power supply 4, a heat dissipation fan 5, a cyclone device, a high voltage power supply 9, a high voltage insulating medium 10, and a metal electrode 11; the cyclone device comprises a cyclone shell 6, an air hole 7 and an air pump 8.
When the microwave waveguide tube is used, the microwave waveguide tube 1 is connected with the microwave generator 3, a microwave electric field is generated in the microwave waveguide tube 1 by connecting a microwave power supply 4 of the microwave generator 3, the microwave electric field is increased by compressing the waveguide, and the maximum field intensity is formed at a position which is lambda/4 + k lambda away from the short-circuit end face, wherein k is an integer not less than 0. Then, the breakdown occurs at the narrowest distance between the two metal electrodes 11 through the high-voltage power supply 9 to form an arc, the arc slides outwards under the action of airflow, the length is increased, when the length of the arc is increased to exceed the limit of discharge maintenance of the power supply, the arc is extinguished, but a new arc is formed at the shortest distance, and the process is repeated. Although the two metal electrodes 11 do not extend deep into the microwave waveguide 1, a part of the arc may extend deep into the non-metal discharge tube 2 during the arc sliding outward, thereby exciting the microwave plasma as seed electrons.
Because the metal electrode does not extend into the microwave waveguide, the metal electrode can not be ablated by a high-temperature microwave plasma torch in the microwave plasma excitation process and the microwave plasma operation process, thereby avoiding the loss of the metal electrode and further prolonging the service life of the sliding arc metal electrode.
The gas is introduced into the cyclone housing 6 by the gas pump 8 to form a swirling gas, which is called carrier gas of the microwave plasma device. Because the generation of the microwave plasma has low requirements on gas, argon, helium, nitrogen or air can be introduced to be used as carrier gas, and other gases can be selected to be used as carrier gas for exciting the microwave plasma according to the requirements of different application occasions.
The parameters of a high-voltage power supply for generating the sliding arc are between 10kV and 30kV, the working frequency can be from direct current to high-frequency alternating current sine waves of dozens of kHz, and high-frequency sine alternating current signals are optimal.
The air guide hole is flush with the inner wall of the whole cyclone device, and the included angle between the air guide hole and the axis of the cyclone device is 10-80 degrees. Meanwhile, the air holes on the cyclone device are uniformly distributed along the circumference, the number of the air holes is preferably more than 2, and the central extension line of the air holes and the axis of the cyclone device are in different planes, so that the vortex air can be better formed.
One end of the non-metal discharge tube is fixed on the surface of the cyclone device, and the other end extends out of the microwave waveguide tube.
The non-metal discharge tube and the metal electrode for generating the sliding arc are preferably made of high-temperature resistant materials.
The steps of the invention for exciting microwave plasma are as follows:
step 1: opening the air pump to enable the carrier gas to form vortex gas and to be introduced into the non-metal discharge tube;
step 2: opening a heat radiation fan to prepare for cooling the microwave generator;
and step 3: switching on a microwave power supply to supply power to the microwave generator so as to generate a microwave electric field in the microwave waveguide;
and 4, step 4: turning on a high-voltage power supply to generate a sliding arc, and sending charged particles into the non-metal discharge tube 4 through airflow to excite microwave plasma;
and 5: after the microwave plasma torch is stabilized, the high-voltage power supply is closed;
step 6: and (5) repeating the step (4) and the step (5) if the microwave plasma torch is accidentally extinguished.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose of the embodiments is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All modifications made according to the spirit of the main technical scheme of the invention are covered in the protection scope of the invention.
Claims (10)
1. The utility model provides a device based on slip arc discharges and arouses microwave plasma which characterized in that, includes microwave generator, microwave waveguide, non-metallic discharge tube, still includes high voltage power supply, metal electrode and cyclone, wherein:
a microwave generator for emitting microwaves and generating a microwave electric field in the microwave waveguide;
the non-metal discharge tube is fixed in the microwave waveguide tube;
the high-voltage power supply is connected with the two metal electrodes;
the two metal electrodes are symmetrically bent and distributed in the cyclone device;
and the air outlet of the cyclone device is opposite to one end of the non-metal discharge tube.
2. The sliding arc discharge based microwave plasma excitation device according to claim 1, wherein the ends of the two metal electrodes do not extend into the interior of the microwave waveguide.
3. The device for exciting a microwave plasma based on sliding arc discharge of claim 2, wherein the non-metallic discharge tube is fixed at one end to the surface of the cyclone device, and extends out of the microwave waveguide tube at the other end, and the middle part of the non-metallic discharge tube traverses the inside of the microwave waveguide tube.
4. The device for exciting microwave plasma based on sliding arc discharge according to claim 3, wherein the high voltage power supply has parameters between 10kV and 30kV and has an operating frequency of high frequency AC sine wave from DC to tens of kHz.
5. The device for exciting microwave plasma based on sliding arc discharge as claimed in claim 3, wherein the cyclone device comprises a cylindrical cyclone casing and an air pump, the cyclone casing is closed at one end, an air outlet is arranged at the other end, and two metal electrodes penetrate into the cyclone casing from the closed end through a high-pressure insulating medium; a plurality of air guide holes are distributed on the cyclone shell along the circumference and are respectively communicated with the air pump.
6. The device for exciting microwave plasma based on sliding arc discharge according to claim 5, wherein the air guide hole is flush with the inner wall of the cyclone shell and forms an angle of 10-80 degrees with the axis of the cyclone shell; the number of the air guide holes is 2 or more, and the central extension line of each air guide hole and the axis of the cyclone shell are in different planes.
7. The sliding arc discharge based microwave plasma excitation device according to claim 3, wherein the non-metallic discharge tube has a central axis located at a distance of λ/4+ k λ from the end surface of the microwave waveguide, λ being a wavelength of the microwaves in the system, and k being an integer not less than 0.
8. The device for exciting microwave plasma based on sliding arc discharge according to claim 1, wherein the high voltage power supply causes the two metal electrodes to break down at the narrowest distance to form an arc, the arc slides towards the air outlet under the action of the air flow of the cyclone device, and charged particles are fed into the non-metal discharge tube through the air flow to excite the microwave plasma.
9. The device for exciting a microwave plasma based on sliding arc discharge according to claim 8, wherein the length of the arc increases during the sliding process towards the air outlet, when the length of the arc increases beyond the limit of the power supply capable of maintaining discharge, the arc is extinguished, but a new arc is formed at the shortest distance, and the process is repeated.
10. The sliding arc discharge based microwave plasma excitation device according to claim 9, wherein the charged particles are fed into the non-metallic discharge tube to excite the microwave plasma, and the high voltage power supply is turned off after the stable microwave plasma torch is formed, and is turned back on if the microwave plasma torch is accidentally extinguished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010979616.3A CN111970807A (en) | 2020-09-17 | 2020-09-17 | Device for exciting microwave plasma based on sliding arc discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010979616.3A CN111970807A (en) | 2020-09-17 | 2020-09-17 | Device for exciting microwave plasma based on sliding arc discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111970807A true CN111970807A (en) | 2020-11-20 |
Family
ID=73391735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010979616.3A Pending CN111970807A (en) | 2020-09-17 | 2020-09-17 | Device for exciting microwave plasma based on sliding arc discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111970807A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112689376A (en) * | 2021-03-15 | 2021-04-20 | 四川大学 | Microwave plasma jet excitation device adopting piezoelectric material |
| CN113543444A (en) * | 2021-07-09 | 2021-10-22 | 陕西青朗万城环保科技有限公司 | Microwave-induced metal discharge combustion-supporting method and control system thereof |
| US11273491B2 (en) | 2018-06-19 | 2022-03-15 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11311938B2 (en) | 2019-04-30 | 2022-04-26 | 6K Inc. | Mechanically alloyed powder feedstock |
| US11577314B2 (en) | 2015-12-16 | 2023-02-14 | 6K Inc. | Spheroidal titanium metallic powders with custom microstructures |
| US11590568B2 (en) | 2019-12-19 | 2023-02-28 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11611130B2 (en) | 2019-04-30 | 2023-03-21 | 6K Inc. | Lithium lanthanum zirconium oxide (LLZO) powder |
| US11717886B2 (en) | 2019-11-18 | 2023-08-08 | 6K Inc. | Unique feedstocks for spherical powders and methods of manufacturing |
| US11839919B2 (en) | 2015-12-16 | 2023-12-12 | 6K Inc. | Spheroidal dehydrogenated metals and metal alloy particles |
| US11855278B2 (en) | 2020-06-25 | 2023-12-26 | 6K, Inc. | Microcomposite alloy structure |
| US11919071B2 (en) | 2020-10-30 | 2024-03-05 | 6K Inc. | Systems and methods for synthesis of spheroidized metal powders |
| US11963287B2 (en) | 2020-09-24 | 2024-04-16 | 6K Inc. | Systems, devices, and methods for starting plasma |
-
2020
- 2020-09-17 CN CN202010979616.3A patent/CN111970807A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11839919B2 (en) | 2015-12-16 | 2023-12-12 | 6K Inc. | Spheroidal dehydrogenated metals and metal alloy particles |
| US11577314B2 (en) | 2015-12-16 | 2023-02-14 | 6K Inc. | Spheroidal titanium metallic powders with custom microstructures |
| US11465201B2 (en) | 2018-06-19 | 2022-10-11 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11273491B2 (en) | 2018-06-19 | 2022-03-15 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11471941B2 (en) | 2018-06-19 | 2022-10-18 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11311938B2 (en) | 2019-04-30 | 2022-04-26 | 6K Inc. | Mechanically alloyed powder feedstock |
| US11611130B2 (en) | 2019-04-30 | 2023-03-21 | 6K Inc. | Lithium lanthanum zirconium oxide (LLZO) powder |
| US11633785B2 (en) | 2019-04-30 | 2023-04-25 | 6K Inc. | Mechanically alloyed powder feedstock |
| US11717886B2 (en) | 2019-11-18 | 2023-08-08 | 6K Inc. | Unique feedstocks for spherical powders and methods of manufacturing |
| US11590568B2 (en) | 2019-12-19 | 2023-02-28 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
| US11855278B2 (en) | 2020-06-25 | 2023-12-26 | 6K, Inc. | Microcomposite alloy structure |
| US11963287B2 (en) | 2020-09-24 | 2024-04-16 | 6K Inc. | Systems, devices, and methods for starting plasma |
| US11919071B2 (en) | 2020-10-30 | 2024-03-05 | 6K Inc. | Systems and methods for synthesis of spheroidized metal powders |
| CN112689376A (en) * | 2021-03-15 | 2021-04-20 | 四川大学 | Microwave plasma jet excitation device adopting piezoelectric material |
| CN112689376B (en) * | 2021-03-15 | 2021-06-18 | 四川大学 | Microwave plasma jet excitation device adopting piezoelectric material |
| CN113543444A (en) * | 2021-07-09 | 2021-10-22 | 陕西青朗万城环保科技有限公司 | Microwave-induced metal discharge combustion-supporting method and control system thereof |
| CN113543444B (en) * | 2021-07-09 | 2024-04-19 | 陕西青朗万城环保科技有限公司 | Microwave-induced metal discharge combustion-supporting method and control system thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111970807A (en) | Device for exciting microwave plasma based on sliding arc discharge | |
| CN107801286B (en) | Microwave plasma excitation system based on dielectric barrier discharge pre-ionization | |
| US3324334A (en) | Induction plasma torch with means for recirculating the plasma | |
| KR101286348B1 (en) | Microwave plasma reactor | |
| CN101346032A (en) | Barometric pressure microwave plasma generation device | |
| WO2007105411A1 (en) | Plasma generator and method of generating plasma using the same | |
| Tikhonov et al. | The low-cost microwave plasma sources for science and industry applications | |
| TWI400010B (en) | Apparatus and method for forming a plasma | |
| CN201230400Y (en) | Atmosphere pressure microwave plasma producing device | |
| US3280364A (en) | High-frequency discharge plasma generator utilizing an auxiliary flame to start, maintain and stop the main flame | |
| CN105221319A (en) | A kind of for lighting a fire and the sliding discharge reactor of auxiliary combustion | |
| JP4953163B2 (en) | Microwave excitation plasma processing equipment | |
| Al-Shamma'a et al. | Atmospheric microwave plasma jet for material processing | |
| CN212324445U (en) | Device for exciting microwave plasma based on sliding arc discharge | |
| RU2171554C2 (en) | Method of plasma generation and device for its realization | |
| KR100394994B1 (en) | Plasma torch using of microwave | |
| CN209845424U (en) | High-power high-efficiency multipurpose microwave plasma torch | |
| CN207531150U (en) | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization | |
| CN109104808A (en) | A kind of novel microwave excitation device of long life | |
| Tikhonov et al. | The Low-Cost Microwave Source of Non-Thermal Plasma | |
| CN208836438U (en) | A kind of novel microwave excitation device of long life | |
| RU120309U1 (en) | MICROWAVE PLASMATRON | |
| WO2015147703A2 (en) | Method for producing thermal and electrical energy and device for implementing said method | |
| EP0559715A1 (en) | Gas plasma generating system | |
| KR20040010898A (en) | Igniting device of Microwave Plasma Discharge System |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |