CN207531150U - A kind of microwave plasma excitated system based on dielectric barrier discharge preionization - Google Patents
A kind of microwave plasma excitated system based on dielectric barrier discharge preionization Download PDFInfo
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- CN207531150U CN207531150U CN201721564504.1U CN201721564504U CN207531150U CN 207531150 U CN207531150 U CN 207531150U CN 201721564504 U CN201721564504 U CN 201721564504U CN 207531150 U CN207531150 U CN 207531150U
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- microwave
- preionization
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- 230000004888 barrier function Effects 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000001816 cooling Methods 0.000 claims abstract description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000011889 copper foil Substances 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 230000009977 dual effect Effects 0.000 claims description 5
- 239000002826 coolant Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 6
- 238000012545 processing Methods 0.000 abstract description 4
- 210000002381 plasma Anatomy 0.000 description 42
- 239000007789 gas Substances 0.000 description 27
- 230000005284 excitation Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000002679 ablation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003708 ampul Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The utility model proposes a kind of microwave plasma excitated system based on dielectric barrier discharge preionization, belong to microwave plasma source, microwave material processing technology field, including the DBD preionization systems for being equipped with the microwave resonance plasma torch generating means of nonmetallic microwave discharge pipe and being made of dielectric barrier discharge (DBD) jet stream power supply, nonmetallic preionization jet pipe, preionization gas storing bottle, air-flow and water cooling equipment and working gas storing bottle；Air-flow interface one end of air-flow and water cooling equipment is connected with microwave discharge pipe upper end, the other end and working gas storing bottle are connect；Preionization jet pipe lower part is located in nonmetallic preionization jet pipe, and middle part is wound with the copper foil layer being connect with DBD jet stream power supplys；Preionization jet pipe upper end is connect with preionization gas storing bottle.This system can guarantee that microwave smoothly excites microwave plasma in cavity, solve the problems, such as that plasma is difficult to excite under atmospheric pressure in general microwave waveguide resonator.
Description
Technical field
The utility model is related to a kind of microwave plasma excitated systems based on dielectric barrier discharge preionization, belong to micro-
Wave plasma source, microwave material processing technology field.
Background technology
Microwave plasma is a kind of plasma that can generate electrodless discharge, has high electron density, higher ion
The characteristics of temperature.Since microwave plasma can generate under conditions of no electrode, electrode erosion, electricity are avoided
The problem of pole pollution etc., there is lot of advantages and particularity, obtain very extensive application.Particularly in new material
It prepares, processing, plasma chemistry chemical industry, waste solid and exhaust-gas treatment, metallurgical, metal welding is smelted, ignition of the boiler burning,
Thin film depositions etc. etc. have very big application potential.
For microwave discharge, generally at low pressure in the range of (several pas to hundreds of pas), easily excitation generates microwave
Plasma, and in atmospheric pressure environment in the case where the extraneous igniter of no introducing is placed in microwave waveguide resonator, it is past
It is past to excite.And general wire or the igniter of Metallic Nozzle At The Ingot form, such as Chinese patent CN104507249A, microwave etc.
Gas ions generate in rectangular-wave resonant cavity, and a metallic copper manufacturing probe is set by the reaction zone in rectangular-wave resonant cavity
Microwave plasma is excited, since the reaction zone temperature of rectangular-wave resonant cavity is up to 3000K -5000K, causes metallic pollution,
Therefore the problem of bringing ablation of metals and metallic pollution aspect.
For another example has document《The simulation and design of normal pressure microwave plasma torcl apparatus》(such as Liu Fan light lasers and ion
Beam, 2011,23 (6):1054~1058) a kind of normal pressure microwave plasma torcl apparatus is disclosed, which is included by dominant frequency
The microwave power and general control system that the microwave power source and magnetron of 2.45GHz is formed are marked by circulator water load, WR340
Quasi-retangular wave leads the energy transmission system formed with rectangle tapered waveguide, by microwave rectangular coupled cavity, nozzle and short-circuit plunger structure
Into microwave reactor and subsystem.The device also using metallic nozzle, equally exists metal calcination and metallic pollution aspect
The problem of.
Utility model content
The purpose of this utility model is to overcome the shortcomings of prior art, provide a kind of based on dielectric barrier discharge
The microwave plasma excitated system of preionization.Dielectric barrier discharge (DBD) jet stream is utilized the utility model proposes a kind of,
Seed electrons are introduced in microwave waveguide resonator, so as to fulfill the smooth excitation of microwave plasma under atmospheric pressure, gold can be avoided
Belong to ablation and pollution problem that electrode contact heating region generates.
The utility model uses following technical scheme：
A kind of microwave plasma excitated system based on dielectric barrier discharge preionization, including mainly being occurred by microwave
Device, circulator and water load, dual directional coupler, three pin adjusters and microwave waveguide resonator are sequentially connected the micro- of composition
Wave resonance plasma torch generating means；The system is further included mainly by dielectric barrier discharge jet stream power supply, nonmetallic preionization
The pre- electricity of dielectric barrier discharge that jet pipe, preionization gas storing bottle, air-flow and water cooling equipment and working gas storing bottle are formed
From device and the nonmetallic microwave discharge pipe being arranged in the microwave waveguide resonator at microwave electric field amplitude maximum, and
The microwave discharge pipe both ends protrude from the upper and lower surface of the microwave waveguide resonator respectively；The air-flow and water cooling equipment include
Upper flange equipped with air-flow interface and the lower metal babinet equipped with water cooling interface；Wherein,
The lower metal babinet is wrapped on the outside of the nonmetallic microwave discharge pipe for protruding from microwave waveguide resonator upper end,
The water cooling interface includes a water inlet and a water outlet, by the entery and delivery port and pipeline into lower part metal cabinet
It is passed through the coolant of cycle；Air-flow interface one end of upper flange is arranged on the upper end of the nonmetallic microwave discharge pipe to connect
Logical, which is connect by the pipeline with valve with the working gas storing bottle；The preionization jet pipe
Top be located at outside air-flow and water cooling equipment, the lower part of the preionization jet pipe is located inside the nonmetallic microwave discharge pipe；
Copper foil layer is wound at 2~10cm of air-flow and water cooling equipment upper surface in the middle part of the nonmetallic preionization jet pipe, the copper
Layers of foil is electrically connected with the output terminal of dielectric barrier discharge jet stream power supply；The nonmetallic preionization jet pipe upper end passes through band valve
Pipeline connect with the preionization gas storing bottle.
The characteristics of the utility model and advantageous effect：
The utility model increases DBD preionization devices, specifically on the basis of general microwave plasma resonance device
, it is connected on the copper foil layer of preionization quartz ampoule in DBD jet stream power supplys, DBD jet streams power supply can apply 40kHz, number
The radio frequency high tension of kilovolt to tens of kilovolts, preionization jet pipe are passed through preionization gas, can directly generate DBD plasmas and penetrate
It flows, there are a large amount of preionization electrons in jet stream, can enter in the microwave discharge pipe of microwave waveguide resonant cavity, microwave plasma
Body can generate in directly excitation under microwave energy effect.
Pass through the introduction to DBD preionization devices so that any metal igniter is not needed in microwave waveguide resonator, just
It can realize the generation and excitation of microwave plasma, avoid loss and the metallic pollution of metal material；This system can produce
The plasma of raw high-purity, will not introduce metal impurities；Further, since plasma is not direct and metal parts contacts, this
System temperature will not increase the cooling cost that excessively can effectively reduce device.This system to the material of microwave plasma at
Reason, microwave plasma chemical industry etc. are of great significance.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model.
Specific embodiment
The utility model proposes it is a kind of based on dielectric barrier discharge preionization microwave plasma excitated system combination
Detailed description are as follows for accompanying drawings and embodiments：
The overall structure of the utility model as shown in Figure 1, the system include microwave resonance plasma torch generating means and
Dielectric barrier discharge (DBD) preionization device two parts；
Microwave resonance plasma torch generating means is mainly by sequentially connected microwave generator 1, circulator and water load
2nd, dual directional coupler 3, three pin adjusters 4 and microwave waveguide resonator 5 are formed, the microwave in microwave waveguide resonator 5
Electric field magnitude maximum sets nonmetallic microwave discharge pipe 6, and 6 both ends of microwave discharge pipe protrude from microwave waveguide resonance respectively
The upper and lower surface of chamber 5；
DBD preionization device include DBD jet streams power supply 7, nonmetallic preionization jet pipe 8, preionization gas storing bottle 9,
Air-flow and water cooling equipment 10 and working gas storing bottle 12；Air-flow and water cooling equipment 10 include upper equipped with air-flow interface 101
Portion's flange 102 and the lower metal babinet 104 equipped with water cooling interface 103；Wherein, lower metal babinet 104, which is wrapped in, protrudes from
6 outside of nonmetallic microwave discharge pipe of 5 upper end of microwave waveguide resonator, water cooling interface 103 includes a water inlet and one goes out
The mouth of a river, by the entery and delivery port and pipeline be passed through into lower part metal cabinet 104 cycle coolant (the present embodiment use from
Water), cooling effect is played to nonmetallic microwave discharge pipe 6；Be arranged on 101 one end of air-flow interface of upper flange 102 with it is non-
The upper end connection of metallic microwave discharge tube 6,101 other end of air-flow interface pass through the pipeline with valve and working gas storing bottle 12
Connection；The top of nonmetallic preionization jet pipe 8 is located at outside air-flow and water cooling equipment 10, and the lower part of the preionization jet pipe is located at
Inside nonmetallic microwave discharge pipe 6,8 middle part of nonmetallic preionization jet pipe apart from 10 upper surface 2 of air-flow and water cooling equipment~
Copper foil layer 11 is wound at 10cm, which is connect by conducting wire with the output terminal of DBD jet streams power supply 7, nonmetallic pre- electricity
It is connect from 8 upper end of jet pipe by the pipeline with valve with preionization gas storing bottle 9.
The specific implementation and function declaration of each synthesizer part of this system are as follows：
Each synthesizer part of microwave resonance plasma torch generating means is conventional products；Wherein, the present embodiment is micro-
Wave producer 1 is led to successively using the microwave power source of frequency 2450MHz, the optional range 300W-3000W of power, the microwave of generation
It crosses the microwave propagation component being made of circulator and water load 2,3 and three pin adjuster 4 of dual directional coupler and is connected to microwave
5 input terminal of waveguide resonant cavity；Circulator and water load 2,3 and three pin adjuster 4 of dual directional coupler are each served as to microwave
The effect that power source is protected, detected and finely tuned.Nonmetallic microwave discharge pipe 6 is in microwave electricity in microwave waveguide resonator 5
At amplitude maximum, i.e., (microwave waveguide wave in the present embodiment at the microwave waveguide wavelength of distance microwave waveguide resonant cavity end 1/4
A length of 14.7cm, using gradual change rectangular-wave resonant cavity), convenient for exciting microwave plasma.Nonmetallic microwave discharge pipe uses
All kinds of microwave transmissions such as quartz, ceramics, glass and heat-resisting material is made, the present embodiment use microwave discharge quartz ampoule.
In DBD preionization devices, DBD jet streams power supply 7 is conventional products, general optional but to be not limited to frequency be 40kHz's
High frequency electric source, exportable high pressure range are generally several to tens kV.DBD jet streams power supply 7 is connected to by conducting wire positioned at non-gold
At the copper foil layer 11 for belonging to preionization jet pipe 8, the distance of 10 upper surface of the present embodiment copper foil layer lower end to air-flow and water cooling plant
For 2cm, (the preionization jet pipe can be used quartz, ceramics etc. and is made nonmetallic preionization jet pipe 8, and the present embodiment is using pre-
The quartzy jet pipe of ionization) for lower vertical through air-flow and water cooling plant 10,8 lower end of preionization jet pipe extends to microwave waveguide resonance
At the upper surface of chamber 5, (the easily ionizables gas such as argon gas, helium can be used to be used as by the preionization gas in preionization gas bottle 9
DBD preionization gases, the present embodiment is using argon gas as preionization gas) jet stream in preionization jet pipe 8 is blown out, enter
In microwave discharge pipe 6 so that the seed electrons that preionization generates can smoothly enter inside microwave waveguide resonator 5；It is meanwhile micro-
Wave plasma need working gas (such as nitrogen, oxygen, helium, air, but not limited to this) entered by air-flow interface 101
Microwave discharge pipe 6, so as to smoothly excite microwave plasma that can simultaneously maintain under atmospheric conditions in 6 lower end of microwave discharge pipe.
The microwave plasma excitated system of the utility model can generate microwave plasma under atmospheric pressure and maintain, full
The demand of sufficient general industry.
The step of carrying out the excitation and maintenance of microwave plasma using Tthe utility model system is as follows：
Step 1) opens preionization gas storing bottle 9, and preionization gas is delivered to microwave by preionization jet pipe 8 and is put
In fulgurite 6；
Step 2) opens DBD jet streams power supply 7, and adjusting voltage is 3kV-4kV, until generating DBD plasma jets；
Step 3) opens microwave source 1, adjusts microwave power higher than 800W, increases power to microwave by unit stepping of 10W
Plasma exciatiaon；
Step 4) closes DBD jet streams power supply 7, and microwave plasma can maintain the microwave discharge of microwave waveguide resonator 5
The interior zone of pipe 6；
Step 5) opens working gas storing bottle 12 so that working gas enters air-flow and water cooling by air-flow interface 101
Device 10, the preionization gas being passed through take microwave plasma out of microwave waveguide resonator, and pass through the working gas microwave
The length of plasma maintains certain length (generally higher than 5cm)；
Step 6) closes preionization gas storing bottle 9, and microwave plasma has been able to the work in working gas 12 at this time
With lower long-term maintenance.
The excitation and maintenance of large volume microwave plasma under atmospheric pressure can be reliably realized by this system, and is avoided
The ablation of microwave igniter and metallic pollution in general microwave-excited plasma device.This is for microwave plasma material
Processing, chemical processing industry all have great importance.
Claims (1)
1. a kind of microwave plasma excitated system based on dielectric barrier discharge preionization, including mainly by microwave generator,
Circulator and water load, dual directional coupler, three pin adjusters and microwave waveguide resonator are sequentially connected the microwave of composition
Resonance plasma torch generating means；It is characterized in that, the system is further included mainly by dielectric barrier discharge jet stream power supply, non-gold
Belong to the dielectric impedance that preionization jet pipe, preionization gas storing bottle, air-flow and water cooling equipment and working gas storing bottle are formed
Electric discharge preionization device and the nonmetallic microwave being arranged in the microwave waveguide resonator at microwave electric field amplitude maximum are put
Fulgurite, and the microwave discharge pipe both ends protrude from the upper and lower surface of the microwave waveguide resonator respectively；The air-flow and water cooling
Equipment includes the upper flange equipped with air-flow interface and the lower metal babinet equipped with water cooling interface；Wherein,
The lower metal babinet is wrapped on the outside of the nonmetallic microwave discharge pipe for protruding from microwave waveguide resonator upper end, described
Water cooling interface includes a water inlet and a water outlet, is passed through by the entery and delivery port and pipeline into lower part metal cabinet
The coolant of cycle；The air-flow interface one end for being arranged on upper flange is connected with the upper end of the nonmetallic microwave discharge pipe, should
The air-flow interface other end is connect by the pipeline with valve with the working gas storing bottle；The top of the preionization jet pipe
Outside air-flow and water cooling equipment, the lower part of the preionization jet pipe is located inside the nonmetallic microwave discharge pipe；It is described non-
Be wound with copper foil layer at 2~10cm of air-flow and water cooling equipment upper surface in the middle part of metal preionization jet pipe, the copper foil layer with
The output terminal electrical connection of dielectric barrier discharge jet stream power supply；The nonmetallic preionization jet pipe upper end passes through the pipeline with valve
It is connect with the preionization gas storing bottle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721564504.1U CN207531150U (en) | 2017-11-21 | 2017-11-21 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721564504.1U CN207531150U (en) | 2017-11-21 | 2017-11-21 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207531150U true CN207531150U (en) | 2018-06-22 |
Family
ID=62579881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721564504.1U Withdrawn - After Issue CN207531150U (en) | 2017-11-21 | 2017-11-21 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
Country Status (1)
| Country | Link |
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| CN (1) | CN207531150U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107801286A (en) * | 2017-11-21 | 2018-03-13 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
| CN111278206A (en) * | 2020-03-19 | 2020-06-12 | 四川大学 | Plasma generating device with dielectric barrier discharge and microwave discharge connected in series |
-
2017
- 2017-11-21 CN CN201721564504.1U patent/CN207531150U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107801286A (en) * | 2017-11-21 | 2018-03-13 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
| CN107801286B (en) * | 2017-11-21 | 2024-03-22 | 清华大学 | Microwave plasma excitation system based on dielectric barrier discharge pre-ionization |
| CN111278206A (en) * | 2020-03-19 | 2020-06-12 | 四川大学 | Plasma generating device with dielectric barrier discharge and microwave discharge connected in series |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180622 Effective date of abandoning: 20240322 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20180622 Effective date of abandoning: 20240322 |