CN202979451U - Atmospheric-pressure microwave-plasma torch apparatus - Google Patents

Atmospheric-pressure microwave-plasma torch apparatus Download PDF

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Publication number
CN202979451U
CN202979451U CN 201220669183 CN201220669183U CN202979451U CN 202979451 U CN202979451 U CN 202979451U CN 201220669183 CN201220669183 CN 201220669183 CN 201220669183 U CN201220669183 U CN 201220669183U CN 202979451 U CN202979451 U CN 202979451U
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China
Prior art keywords
microwave
waveguide
plasma torch
atmospheric pressure
nozzle
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Expired - Fee Related
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CN 201220669183
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Chinese (zh)
Inventor
刘明海
周启燕
陈兆权
程莉莉
腾云
郑振
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model discloses an atmospheric-pressure microwave-plasma torch apparatus, comprising a microwave power unit, a waveguide and a nozzle, wherein the microwave power unit is used for converting DC energy achieved in a DC electric field to microwave energy and outputting to the waveguide, and the waveguide is a symmetric structure which is wide on two ends and narrow on a middle part. One end of the waveguide is connected with the microwave power unit and is used for guiding and transmitting incident microwave, and the other end is provided with a short circuit piston. The nozzle is inserted in a central position of the waveguide along a vertical direction. One end of the nozzle is connected with a gas cylinder filling with medium gas by a hose and the other end is used for plasma torch generation of the medium gas after discharging. According to the microwave-plasma torch apparatus provided by the utility model, plasma which is large in density, high in activity and low in temperature is generated under a condition of low power and common atmospheric pressure; the whole apparatus is compact in the structure and operation is stable; and the apparatus has the advantages that discharge efficiency is high and the apparatus is convenient to accurately control ignition.

Description

A kind of atmospheric pressure microwave plasma torch device
Technical field
The utility model belongs to the plasma generating equipment field, more specifically, relates to a kind of atmospheric pressure microwave plasma torch device.
Background technology
Plasma is the 4th attitude that material exists, by the aggregate that comprises the particles such as electronics, ion, atom, molecule or free radical that forms after gas ionization, because it has electric neutrality and high conductivity, can make and be difficult under usual conditions to carry out or reaction that speed is very slow becomes quick, therefore be applicable to the aspects such as material preparation processing, be particularly useful for the processing that difficulty is cleared up pollutant.
The production method of plasma generally includes discharge between electrode, inductance coupling high, microwave discharge, thermal excitation etc.For the microwave discharge mode, its operation principle is energy of electromagnetic field to be transmitted and be compressed to the nozzle place to excite generation, so the electric field strength at nozzle place plays vital effect to the activated plasma torch.At present conventional microwave plasma torch device mainly comprises the members such as microwave power unit, microwave transmission unit and nozzle.Wherein the microwave power unit is made of microwave continuous power source and the magnetron of certain dominant frequency, and magnetron converts the dc energy of obtaining in DC electric field to microwave energy and outputs to the microwave transmission unit; The microwave transmission unit adopts the form of waveguide usually, is used for the transmission microwave, and can regulates by short-circuit plunger the electric-field intensity distribution of microwave; Nozzle need to be inserted in electric field strength, thereby reduces the reflection power of microwave source as far as possible, and effective activated plasma torch.
Microwave plasma torch often easily excites under handkerchief more than thousand at low pressure such as hundreds of handkerchief to 1, and than hyperbar such as 1 atmospheric pressure the time, need very high microwave field density could produce discharge, in order under atmospheric pressure to produce microwave plasma, just need to use the microwave of larger power (more than 1000W, for example 4000W), and often will be at the appropriate location of excitation apparatus mounting points firearm or ignitor, could produce initial discharge, then be transitioned into the formation of whole torch.Be also the atmospheric pressure microwave plasma torch device for this device that can under atmospheric pressure produce microwave plasma, because it does not need the vacuum equipment of configure and maintenance costliness, and can be applied to serialization processing and make large-scale production become possibility, therefore be widely used in the fields such as welding, spraying and material be synthetic.Yet the weak point of atmospheric pressure microwave plasma torch device of the prior art mainly is: 1, present atmospheric pressure microwave plasma torch device is for the complex structure that excites and keep, and discharging efficiency is not high, the corresponding cost that increased; 2, the microwave source that adopts often power is larger, the corresponding energy consumption issues that causes; 3, for some specific plasma application occasion for example biological sample process, often need to be after processing loss of biological activity not, need therefore under atmospheric pressure to obtain that density is large comparatively speaking, temperature is low, active high plasma.Correspondingly, exist in association area the atmospheric pressure microwave plasma torch device is made further improved technical need.
The utility model content
Above defective and/or technical need for prior art, the purpose of this utility model is to provide a kind of atmospheric pressure microwave plasma torch device, it passes through the design to structure and the shape of its key member, can produce the plasma that density is large, activity is high, temperature is low under the condition that low-power, normal atmospheric are pressed, and single unit system compact conformation, stable, and possess discharging efficiency high, be convenient to the advantages such as accurate control points fire.
According to the utility model, a kind of atmospheric pressure microwave plasma torch device is provided, this device comprises microwave power unit, waveguide and nozzle, it is characterized in that:
The dc energy that described microwave power unit is used for DC electric field is obtained converts microwave energy to, and exports waveguide to;
Described waveguide is that two ends are wide, middle narrow symmetrical structure, and the one end is connected with the microwave power unit and is used for the microwave that incident is transmitted in guiding, and an other end is provided with short-circuit plunger, and controls the distribution of electric field strength by the slip of this short-circuit plunger;
Described nozzle is inserted in the middle position of waveguide along vertical direction, the one end is connected with the gas cylinder that dielectric gas is housed by flexible pipe, and an other end is used for dielectric gas and produces plasma torch after discharge.
As further preferably, described nozzle comprises the hollow quartz glass pipe that vertically runs through the waveguide middle position, be arranged on this hollow quartz glass pipe outside and be positioned at the metal sleeve of waveguide upside, and the coaxial inner wire that is arranged on this hollow quartz glass pipe inside.
As further preferably, described microwave power unit comprises microwave continuous source and magnetron, and wherein the frequency of microwave power source is 2.45GHz, and power is below 1000W.
As further preferably, the power of described microwave power source is 20W~900W.
As further preferably, described dielectric gas is argon gas, nitrogen or oxygen.
As further preferably, the described coaxial inner wire that is arranged on hollow quartz glass pipe inside is copper wire.
In general, according to atmospheric pressure microwave plasma torch device of the present utility model compared with prior art, mainly possess following technological merit:
1, pass through waveguide and the structure of nozzle and the design of shape as key member, formed microwave plasma torch device can under atmospheric pressure be realized exciting and keeping of plasma torch with the structure of simple compactness, particularly can adopt the microwave source of lower-wattage to move;
2, this device caloric value is low, be convenient to energy-conservation, do not need vacuum equipment, and can produce that density is large, activity is high, temperature is low, the plasma torch that can directly contact with human body, therefore be suitable for carrying out the fields such as gas-phase chemical reaction, waste gas recovery, elementary analysis, especially also can not make its loss of biological activity when processing biological sample;
3, the plasma that produces is thread discharge, and discharging efficiency is high, and can accurately control igniting; And conventional ignition plug igniting is based on arc discharge and produces thermal equilibrium plasma and give me a little the fuel vapor mixture, and arc discharge only has a discharge channel, can not be evenly fire fuel fast, easily produce harmful exhaust and thermal loss.Comparatively speaking, more energy-conserving and environment-protective of the thread discharge of microwave, more efficient can reach the purpose of evenly igniting of large volume, conflagration and minimizing waste gas hazardous material.
Description of drawings
Fig. 1 is the structural representation according to the atmospheric pressure microwave plasma torch of the utility model preferred embodiment;
Fig. 2 is the structural representation of the improvement waveguide of the torch of atmospheric pressure microwave plasma shown in Fig. 1;
Fig. 3 is the structural representation of the improvement nozzle of the torch of atmospheric pressure microwave plasma shown in Fig. 1.
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein:
1-microwave power unit 2-waveguide 3-nozzle 4-microwave input port 5-short-circuit plunger 6-hollow quartz glass pipe 7-metal sleeve 8-inner wire
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Fig. 1 is the structural representation according to the atmospheric pressure microwave plasma torch of the utility model preferred embodiment.As shown in fig. 1, mainly comprise microwave power unit 1, waveguide 2 according to the atmospheric pressure microwave plasma torch of the utility model preferred embodiment, and the nozzle 3 that is arranged on waveguide 2 ad-hoc locations.Microwave power unit 1 comprises microwave continuous source and magnetron, wherein the frequency of microwave power source is 2.45GHz, power is below 1000W, and magnetron is used for the dc energy that DC electric field is obtained and converts to greatest extent microwave energy to, and exports waveguide 2 to by microwave input port 4.One end of waveguide 2 (being left end shown in figure) is connected with microwave power unit 1 and is used for the microwave of guiding transmission incident, an other end (shown in figure for right-hand member) is provided with short-circuit plunger 5, and the distribution of controlling electric field strength by the slip of this short-circuit plunger 5 electric field strength at nozzle 3 places especially.The position of electric field strength maximum after the middle position of waveguide 2 also namely passes through to adjust, the up and down perforate also is equipped with nozzle 3.One end of this nozzle 3 is connected with the gas cylinder that dielectric gas is housed by flexible pipe, and an other end is used for gas medium and is producing plasma torch after discharge under atmospheric pressure state.
Fig. 2 is the structural representation of the waveguide of the torch of atmospheric pressure microwave plasma shown in Fig. 1.As shown in Figure 2, as one of improvement of the present utility model, the waveguide 2 in the utility model is the symmetrical structure that two ends are wide, the centre is narrow.For example, be in that in Fig. 2, the part of left end is the conical pipe structure of reducing, right end portion is just in time opposite, and mid portion is equal diameters.By to the above setting on waveguiding structure, be convenient to the microwave of incident is concentrated enter into the nozzle opening place, and then can set up more high-intensity Electric Field Distribution.
Fig. 3 is the schematic diagram of the nozzle of the torch of atmospheric pressure microwave plasma shown in Fig. 1.As shown in Fig. 1 and Fig. 3, the setting position of nozzle 3 is in the central position of waveguide 2, and this position is also the place, place of electric field strength maximum in the Electric Field Distribution of setting up.By nozzle 3 being set in this electric field strength maximum, can make under atmospheric pressure state more easily discharge excitation and keep plasma, can reduce to a certain extent thus the operating power of microwave source.In addition, other technological improvement is, specifically referring to Fig. 3, nozzle 3 comprises that the perforate up and down by waveguide 2 is vertically run through the hollow quartz glass pipe 6 of waveguide 2, is arranged on quartz glass tube 6 outsides and is positioned at the metal sleeve 7 of waveguide upside, and the coaxial inner wire 8 that is arranged on quartz glass tube 6 inside.Because microwave can come back reflective and form resonance between metal sleeve 7 and inner wire 8, can avoid so the unnecessary consumption that subtracts, and make microwave can farthest be coupled and set up more high-intensity electric field, and then be easy to excite discharge under atmospheric pressure state.
By above to waveguide and nozzle structure and design improvement in shape, can in the situation that need not any igniter or ignitor, can excite and keep the plasma torch under atmospheric pressure; In addition, the loss of microwave is low, can greatly reduce required microwave power like this, improves conversion efficiency.More experimental test proves, the plasma that produces is thread discharge, and discharging efficiency is high, and can accurately control igniting.In addition, this plasma generator can produce under atmospheric pressure that density is large, activity is high, temperature is low, the plasma torch that can directly contact with human body, and its capacity usage ratio is high, especially also can not make its loss of biological activity when the processing biological sample.
Those skilled in the art will readily understand; the above is only preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in protection range of the present utility model.

Claims (6)

1. atmospheric pressure microwave plasma torch device, this device comprises microwave power unit (1), waveguide (2) and nozzle (3), it is characterized in that:
The dc energy that described microwave power unit (1) is used for DC electric field is obtained converts microwave energy to, and exports waveguide (2) to;
Described waveguide (2) is the symmetrical structure that two ends are wide, the centre is narrow, the one end is connected with microwave power unit (1) and is used for the microwave of guiding transmission incident, an other end is provided with short-circuit plunger (5), and controls the distribution of electric field strength by the slip of this short-circuit plunger;
Described nozzle (3) is inserted in the middle position of waveguide (2) along vertical direction, the one end is connected with the gas cylinder that dielectric gas is housed by flexible pipe, and an other end is used for dielectric gas and produces plasma torch after discharge.
2. atmospheric pressure microwave plasma torch device as claimed in claim 1, it is characterized in that, described nozzle (3) comprises the hollow quartz glass pipe (6) that vertically runs through waveguide (2) middle position, be arranged on this hollow quartz glass pipe outside (6) and be positioned at the metal sleeve (7) of waveguide (2) upside, and the coaxial inner inner wire (8) of this hollow quartz glass pipe (6) that is arranged on.
3. atmospheric pressure microwave plasma torch device as claimed in claim 1 or 2, is characterized in that, described microwave power unit (1) comprises microwave continuous source and magnetron, and wherein the frequency of microwave power source is 2.45GHz, and power is below 1000W.
4. atmospheric pressure microwave plasma torch device as claimed in claim 3, is characterized in that, the power of described microwave power source is 20W~900W.
5. atmospheric pressure microwave plasma torch device as claimed in claim 3, is characterized in that, described dielectric gas is argon gas, nitrogen or oxygen.
6. atmospheric pressure microwave plasma torch device as claimed in claim 3, is characterized in that, described coaxial to be arranged on the inner inner wire (8) of hollow quartz glass pipe (6) be copper wire.
CN 201220669183 2012-12-06 2012-12-06 Atmospheric-pressure microwave-plasma torch apparatus Expired - Fee Related CN202979451U (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103945631A (en) * 2014-04-06 2014-07-23 浙江大学 Improved microwave plasma torch device and application
CN104314692A (en) * 2014-10-28 2015-01-28 大连理工大学 Microwave surface wave ignition combustion supporting device
CN105430860A (en) * 2015-11-19 2016-03-23 大连海事大学 Apparatus and method for generating microwave liquid plasma in direct coupling manner under atmospheric pressure
CN109640505A (en) * 2019-02-25 2019-04-16 成都新光微波工程有限责任公司 A kind of large power high efficiency multipurpose microwave plasma torch
CN109874221A (en) * 2019-04-08 2019-06-11 东北大学 A kind of method for generating plasma using microwave energized gas under normal temperature and pressure
CN111465161A (en) * 2020-03-18 2020-07-28 苏州迈微能等离子科技有限公司 Normal-pressure self-ignition type microwave plasma torch and microwave plasma generation system

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103945631A (en) * 2014-04-06 2014-07-23 浙江大学 Improved microwave plasma torch device and application
CN103945631B (en) * 2014-04-06 2016-04-13 浙江大学 A kind of microwave plasma torch device of improvement and application
CN104314692A (en) * 2014-10-28 2015-01-28 大连理工大学 Microwave surface wave ignition combustion supporting device
CN104314692B (en) * 2014-10-28 2016-03-09 大连理工大学 A kind of microwave surface ripple igniting combustion supporting device
CN105430860A (en) * 2015-11-19 2016-03-23 大连海事大学 Apparatus and method for generating microwave liquid plasma in direct coupling manner under atmospheric pressure
CN105430860B (en) * 2015-11-19 2018-03-20 大连海事大学 Direct-coupling microwave liquid phase plasma generator and method under atmospheric pressure
CN109640505A (en) * 2019-02-25 2019-04-16 成都新光微波工程有限责任公司 A kind of large power high efficiency multipurpose microwave plasma torch
CN109874221A (en) * 2019-04-08 2019-06-11 东北大学 A kind of method for generating plasma using microwave energized gas under normal temperature and pressure
CN111465161A (en) * 2020-03-18 2020-07-28 苏州迈微能等离子科技有限公司 Normal-pressure self-ignition type microwave plasma torch and microwave plasma generation system
CN111465161B (en) * 2020-03-18 2023-06-02 苏州迈微能等离子科技有限公司 Normal pressure self-ignition type microwave plasma torch and microwave plasma generation system

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Granted publication date: 20130605

Termination date: 20141206

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