CN107087339A - A kind of enhanced microwave plasma torch generating means of two-chamber excitation - Google Patents
A kind of enhanced microwave plasma torch generating means of two-chamber excitation Download PDFInfo
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- CN107087339A CN107087339A CN201710533952.3A CN201710533952A CN107087339A CN 107087339 A CN107087339 A CN 107087339A CN 201710533952 A CN201710533952 A CN 201710533952A CN 107087339 A CN107087339 A CN 107087339A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
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Abstract
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, belongs to microwave plasma technical field, including microwave magnetron, circulator, directional coupler, microwave plasma coupled waveguide, cylindrical waveguide, igniter and discharge tube.After microwave magnetron, circulator, directional coupler are sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide.A cylindrical waveguide chamber is added on the discharge tube axial direction perpendicular to compressed rectangular waveguide；Thermal resistance waveguide in microwave plasma coupled waveguide has effectively completely cut off influence of the heat release of plasma discharge to whole system；Igniter causes whole system to be conveniently accomplished igniting, a series of processes for exciting, maintaining by one man operation, and ignition success rate is close to 100% under conditions of the zero load output of microwave source is relatively low.The invention has the advantages that the peak power that can increase plasma torch obtains the plasma torch twilight sunset with larger volume active region, long-time stable is made it possible to reliably to operate, in auxiliary combustion, nano material is synthesized, and many association areas of application in terms of exhaust-gas treatment and the modification of exotic material surface are applied.
Description
Technical field
The invention belongs to microwave plasma technical field, there is provided the enhanced microwave plasma torch that a kind of two-chamber is encouraged
Generating means.
Background technology
Heat plasma technology in low temperature plasma field passes through the development of decades, has been widely applied to
The fields such as material, chemical industry, burning, military project.With the development of microwave technology, the reliability of microwave device and the energy of magnetron
Conversion efficiency is greatly improved, while the price of microwave component is also greatly reduced.Encouraged and produced using the electromagnetic energy of microwave frequency band
Raw plasma, can obtain the plasma with high energy excitation state and active particle.For electric arc direct current torch,
Because microwave plasma torch not only extends the life-span continuously worked without using electrode, while it also avoid electrode corrosion pair
The pollution of plasma, moreover, electron temperature in microwave plasma is also above the electron temperature in electric arc direct current torch, these
Feature seems extremely important in plasma material synthesis.Compared with the inductive hot plasma of RF excited, microwave
Ionize and excite the electron density of generation and the density of active particle to be all higher than inductive hot plasma in plasma, and
And from the point of view of the transformation efficiency of electric energy, the energy efficiency for producing microwave plasma is also significantly better than inductively coupled plasma.
In the last few years, microwave plasma torch device was on exhaust-gas treatment, auxiliary combustion, nano material synthesis, and exotic material surface
Substantial progress is achieved in application in terms of modification.In order to produce high power microwave plasma torch, generally use
It is the transmission of waveguide energy and coupled modes, is typically the TE basic modes and the short-circuit end in its direction of propagation transmitted in rectangular waveguide
The back wave in face is superimposed to form standing wave, and the strong electric field region at its antinode produces plasma discharge, and air flow is by swashing
Send out area and twilight sunset formation plasma torch is obtained outside it.In industry and military project application, in the urgent need to being a kind of high-power
The service area that can increase twilight sunset microwave plasma torch.However, at present only unstrpped gas injection mode, etc. from
Daughter torch is lighted a fire and proposes some technological inventions in terms of development application in prior art basis, not with regard to how to enter
The technology of energy coupling efficiency and power capacity that one step improves plasma proposes substantial technical scheme and invention.
The microwave plasma of high-power lower operating, can not only produce more heats and equipment occurs for plasma
Cool and propose higher requirement, led also as various unstability factors can be induced under the physical condition of high-energy-density
Cause plasma discharge be quenched and the phenomenon such as form of discharging is difficult to control to generation, this greatly hampers plasma coupling
Close the further raising of power.In addition, the spatial extent distance and finite volume of microwave plasma twilight sunset so that its application by
To very big constraint.Our invention is proposed on the basis of traditional single rectangular chamber standing wave excitation, increases a dress
The cylindrical excitation cavity and an igniter matched therewith on discharge tube axial direction are fitted over, so microwave plasma is being improved
Coupled power also cause while obtain the twilight sunset active region of large volume the operation of system more to facilitate, it is ensured that plasma
Body torch is capable of the electric discharge of long-time and stabilization, and provides relatively reliable and performance for the application for carrying out microwave plasma torch
Preferably design invention.
The content of the invention
The problem of existing for prior art, the invention provides a kind of enhanced microwave plasma torch of two-chamber excitation
Generating means, can by control panel realize at high pressure light a fire, encourage and maintain etc. a series of coherent processes one
Operation, the high power microwave plasma torch of Parameter adjustable is obtained by accurately regulating and controlling input power, while effectively controlling micro-
Ripple plasma torch electric discharge form and its stability, so as to meet the requirement of a variety of practical applications.
In order to achieve the above object, the technical scheme is that：
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation
Coupler, microwave plasma coupled waveguide 1, cylindrical waveguide 2, igniter 3 and discharge tube 4.Microwave magnetron, circulator,
After directional coupler is sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide 1.
Described microwave plasma coupled waveguide 1 includes thermal resistance waveguide 11, the tapered impedance transformer of waveguide cross-section
12, compressed rectangular waveguide 13, short circuit metal piston 14, water collar 15；Thermal resistance waveguide 11 is provided with wave transparent heatproof heat insulating lamella
111st, 112, perforate 113,114, airway tube 115, air pump 116, compressed rectangular waveguide 13 provided with a pair of circular opens 131,
132.The side wall of microwave plasma coupled waveguide 1 installs water collar 15 additional, and water collar 15 is provided with intake-outlet.
The microwave produced by magnetron through isolator, directional coupler, the three pin impedance matching boxs of circling round, microwave etc. from
The enhanced TE of electric-field intensity is set up in the compressed rectangular waveguide 13 of daughter coupled waveguide 110Mould.Short circuit in compressed rectangular waveguide 13
Port is movable short circuit metal piston 14 driven by stepper motors, in two wide waveguides up and down of compressed rectangular waveguide 13
The relative position of the symmetrical centre of wall is provided with a pair of circular opens 131 and 132, and the line of centres of circular open 131 and 132 hangs down
Directly in the wide wave guide wall of compressed rectangular waveguide 13, the center of circular open 131 and 132 and foundation in compressed rectangular waveguide 13
TE10The position of the standing wave antinode of mould is corresponding.
The side wall of microwave plasma coupled waveguide 1 installs the thermal resistance in water collar 15, microwave plasma coupled waveguide 1 additional
Waveguide 11 is used to prevent the thermal convection current of heat radiation and the generation of high-temperature plasma in discharge tube 4 along the inverse of microwave energy transfer
Direction is propagated causes irreversible fire damage to the heating of the active device and sensor of microwave, it is ensured that whole system is stable, reliable,
Continuous work for a long time.
Thermal resistance waveguide 11 is rectangle, and wave transparent heatproof heat insulating lamella 111 and 112 is provided with two ends of rectangular waveguide,
Generation for obstructing the thermal convection current between microwave plasma coupled waveguide 1 and microwave generation system, to microwave generation system
Active parts and sensor play heat protective effect.Opened in addition, being respectively provided with one on two narrow walls of thermal resistance waveguide 11
Hole 113 and 114 or the strip slot parallel to narrow side, because power line is parallel to the narrow of waveguide cross-section on narrow wall
Side, perforate can prevent the leakage of electromagnetic wave, and reduction perforate 113 and 114 pairs of microwaves from existing with minimum degree on this face
The influence of transmission in waveguide.In addition, in order to preferably flow the heat gathered in the waveguide for causing thermal resistance waveguide 11 by gas
The exclusion of gas, the position relative misalignment of perforate on two narrow walls, respectively close to two end faces of thermal resistance waveguide 11, in thermal resistance
Air pump 116 is installed on the outer wall of waveguide 11, airway tube is connected between the perforate 113 on air pump 116 and the narrow wall of thermal resistance waveguide 11
115, the gas that air pump 115 is suppressed into thermal resistance waveguide 11 in gas, thermal resistance waveguide 11 passes through another perforate under pressure differential
114 outwardly discharge, and the gas flowing of formation reaches the effect of convection current cooling.Thin described wave transparent heatproof insulation is quartz plate.
Described cylindrical waveguide 2 is by water cooling cylindrical waveguide 21 and enters the tandem docking of gas cylindrical waveguide 22 and forms, and has
Body includes water cooling cylindrical waveguide 21, enters gas cylindrical waveguide 22, is capable of the metal baffle 23 of folding, water inlet 211, delivery port
212, four gas feeding pipes 221,222,223,224.
Cylindrical waveguide 2 is arranged at the round hole 132 of compressed rectangular waveguide 13, with microwave plasma coupled waveguide
1 is engaged the composite construction to form a two-chamber excitation.
The side wall of water cooling cylindrical waveguide 21 installs water collar, and water collar is connected with outside Water-cooling circulating machine, cooling water
Discharged after entering from the water inlet 211 of water collar from delivery port 212, water collar is connected by pipeline with outside Water-cooling circulating machine
Form circulating cooling system.An end face and the compression rectangle of microwave plasma coupled waveguide 1 for water cooling cylindrical waveguide 21
Round hole 132 on the wide wall of waveguide 13 is docked.
The side wall for entering gas cylindrical waveguide 22 is provided with four gas feeding pipes 221,222,223,224, and they are relative to entering gas
The tangential equidistantly symmetry arrangement of the circumference of the inwall of cylindrical waveguide 22；The end face installation one for entering gas cylindrical waveguide 22 can
With the metal baffle 23 of folding, the other end and the end face of water cooling cylindrical waveguide 21 for entering gas cylindrical waveguide 22 are connected pair
Connect, the one independent closed chamber of formation of cylindrical waveguide 2.Pass through the electricity in the closed chamber of 132 cylindrical waveguide of round hole 2
Electromagnetic wave in magnetic wave and the chamber of compressed rectangular waveguide 13 is coupled, the electric-field intensity in enhanced discharge pipe 4, coordinates by four
The distribution of the eddy airstream of the tangential gas incorporation way formation of individual gas feeding pipe 221,222,223,224, makes in discharge tube 4
Reduced field strength distribution while obtain optimization local Reduced field strength strengthened, and Reduced field strength distribution is to determine plasma
The key factor of flash-over characteristic.
Described one end of discharge tube 4 is sequentially passed through on the wide wall of compressed rectangular waveguide 13 of microwave plasma coupled waveguide 1
Relative a pair of circular opens 131,132 and water cooling cylindrical waveguide 21, tracheae is entered through to enter gas cylindrical waveguide 22
Near road 221,222,223,224, the discharge space of plasma torch is constrained in discharge tube 4, i.e., cylindrical waveguide 2 is constituted
Cavity wall and discharge space are by serving as a contrast discharge tube 4 and the gas feeding pipe of bottom four for entering gas cylindrical waveguide 22 in side wall
221st, 222,223, the 224 high speed eddy airstream layer effectively isolation produced；The other end of discharge tube 4 is what plasma torch sprayed
Open end, the plasma for generation of being discharged in discharge tube 4 is under the promotion of incident gas, in the outside of compressed rectangular waveguide 13
Form plasma torch；Plasma torch is produced under the drive of air-flow thus to spray.The cavity that cylindrical waveguide 2 is constituted is not only
There is humidification to the electric field in compressed rectangular waveguide 13, so as to exciting and maintaining plasma torch and improve coupled power
Contribute, also caused by the introducing of four tangential gas flows of gas feeding pipe 221,222,223,224 by compressed rectangular waveguide 13
Discharge tube 4 in produce vortex gas flowing so that electric discharge to stable plasma torch and isolation hot plasma are to electric discharge
The fire damage of the tube wall of pipe 4 plays the role of very big.In order to ensure that the tangential gas flow into injection in gas cylindrical waveguide 22 can be by undisturbed
Be transferred in the discharge cavity of compressed rectangular waveguide 13, it is described enter the inner surface of gas cylindrical waveguide 22 there is ladder by its point
For two different parts of internal diameter, side wall be provided with four parts of gas feeding pipe 221,222,223,224 internal diameter is smaller and size
As the internal diameter of discharge tube 4, the height of ladder is identical with the pipe thickness of discharge tube 4, so that gas feeding pipe 221,
222nd, the distance of transmission as far as possible in discharge tube 4 that 223,224 eddy airstreams nearby produced can be interference-free.
Microwave plasma realizes that electric discharge needs the excitation process of an igniting, common sparking mode handle at high pressure
Single electrode is deep into the output by the lower increase microwave power supply of zero load in discharging chamber, in the local generation highfield in the tip of electrode
Ionized gas, so as to provide the electric discharge that seed electrons excite plasma, increase microwave electricity is needed in order to improve ignition success rate
Overload phenomenon easily occurs for power output of the source under zero load, the active device of such microwave generation system, while microwave system
Random sparking can also occur for interior part, can so have a strong impact on and put plasma discharge ignition success rate.
In the present invention, described igniter 3 includes cylinder 31, moveable insulation piston 32, two resistant to elevated temperatures gold
Belong to silk electrode 33, and ac high voltage source 34.One end of two refractory metal silk electrodes 33 is at suitable intervals through exhausted
Edge piston 32 is simultaneously fixed in the above, and the distance between firing tip of two one metal wire electrodes 33 is solid less than two one metal wire electrodes 33
It is scheduled on the spacing on insulation piston 32；The other end of two one metal wire electrodes 33 is connected on friendship respectively by the wire 35 of high-voltage isulation
On two electrode terminals for flowing high voltage power supply 34；The piston 32 that insulate is located inside cylinder 31, and can be moved in cylinder 31.
Igniter 3 with the metal baffle 23 of folding and cylindrical waveguide 2 by that can be docking together, two one metal wire electrodes
33 when insulating length requirement insulation piston 32 push-in in cylinder 31 stretched out on piston 32, the bar opened in metal baffle 23
Under part, the tip of wire electrode 33 can extend into the compression square wave of microwave plasma coupled waveguide 1 along discharge tube 4
Lead 13 central area, when insulate piston 32 retract playback when can make wire electrode 33 tip fall back on igniter 1 completely
Cylinder 31 in and close metal baffle 23.Under the driving of ac high voltage source 34, the firing tip of wire electrode 33 it
Between form the sufficiently large discharge channel of electron density, microwave plasma can be excited to put under the low-power output of microwave power supply
Electricity, complete igniting after wire electrode 33 insulation piston 32 drive under be withdrawn completely into cylinder 31, and with discharge tube 4
Discharge space isolation, it is ensured that will not because of the later stage power increase plasma overheat and ablation wire electrode 33；In addition,
Exiting for wire electrode 33 also will not be to the composite construction electric discharge chamber of compressed rectangular waveguide 13 and the composition of cylindrical waveguide 2
Condition of resonance produces influence.The design of igniter 3 greatly reduces the requirement to the unloaded input power of microwave, while also notable
Improve igniting and excite the reliability of plasma discharge and the service life of wire electrode.
Described microwave power supply working frequency is 2.45GH or 915MHz Industrial standard frequency；Ac high voltage source 34
The KHz of operating frequency range 1~50；Working gas is various gases.
The material of described discharge tube 4 is resistant to elevated temperatures quartz ampoule, earthenware, and discharge tube 4 can also be the structure of reducing,
The external diameter of the part in compressed rectangular waveguide 13 of discharge tube 4 is less than or equal to round hole 131,132 in compressed rectangular waveguide 13
Diameter, the external diameter for the discharge tube 4 being in cylindrical waveguide 2 is consistent with the maximum outside diameter entered in gas cylindrical waveguide 22；Metal
The material of silk electrode 33 uses resistant to elevated temperatures tungsten filament.
The invention has the advantages that adding a circle on the direction of discharge tube 4 perpendicular to compressed rectangular waveguide 13
Pole form guide chamber 2, forms the field of superposition along the electromagnetic wave of the chamber indoor propagation after the reflection of its end face 23 in discharge tube 4
By force so that obtained further in the standing wave of the TE moulds of the underexcitation of discharge tube 4 of traditional chamber of single compressed rectangular waveguide 13
Enhancing, so that more preferable energy coupling effect is obtained, while the discharge tube 4 and the gas feeding pipe 221 of its lower end that insulate,
222nd, the vapour lock layer that 223, the 224 tangential gases of high flow rate are formed in its end face is plasma and the metal wall of cylindrical waveguide 2
And short circuit metallic baffle plate 23 effectively completely cuts off, eliminate plasma discharge incidental be quenched in high-power lower operating and show
As.In addition, the heat that the thermal resistance waveguide 11 installed additional in microwave plasma coupled waveguide 1 has effectively completely cut off in plasma discharge
Discharge the influence to whole system.The benefit of these measures is can to increase the peak power of plasma torch and can be had
Have the plasma torch twilight sunset of larger volume active region, and make it possible to long lasting for, stably, reliable operating.Meanwhile, point
The unit of firearm 3 design invention allow whole system by one man operation be conveniently accomplished igniting, excite, maintain it is a series of
Process, ignition success rate is close to 100% under conditions of the zero load output of microwave source is relatively low.
Brief description of the drawings
Fig. 1 is to produce a kind of cross section view of the enhanced microwave plasma torch generating means of two-chamber excitation.
Fig. 2 is to produce a kind of diagrammatic top view of the enhanced microwave plasma torch generating means of two-chamber excitation.
Fig. 3 is A-A arrows in the profile of the tangential gas flow incorporation way into gas cylindrical waveguide, section view direction corresponding diagram 2
Head direction.
In figure：1 microwave plasma coupled waveguide, 2 cylindrical waveguides, 3 igniters, 4 discharge tubes；
11 thermal resistance waveguides, the tapered impedance transformer of 12 waveguide cross-sections, 13 compressed rectangular waveguides, 14 short circuit metals are lived
Plug, 15 and 16 water collars；111st, 112 wave transparent heatproof heat insulating lamella, 113,114 perforates, 115 airway tubes, 116 air pumps, 131,132
Circular open, 152 delivery ports, 151 water inlets, 161 water inlets, 162 delivery ports；
21 water cooling cylindrical waveguides, 22 enter gas cylindrical waveguide, 23 metal baffles, 211 water inlets, 212 delivery ports, 221,
222nd, 223,224 gas feeding pipe；
31 cylinders, 32 moveable insulation pistons, 33 two refractory metal silk electrodes, 34 ac high voltage sources, 35 is high
Press insulated conductor.
Embodiment
Describe the embodiment of the present invention in detail below in conjunction with technical scheme and accompanying drawing.
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation
Coupler, microwave plasma coupled waveguide 1, cylindrical waveguide 2, igniter 3 and discharge tube 4, microwave magnetron, circulator,
After directional coupler is sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide 1, it is characterised in that：
Microwave plasma coupled waveguide 1 includes thermal resistance waveguide 11, the tapered impedance transformer 12 of waveguide cross-section, compression
Rectangular waveguide 13, short circuit metal piston 14, water collar 15 and 16；Short circuit metal piston 14 is located at the short circuit of compressed rectangular waveguide 13
Port；Thermal resistance waveguide 11 is provided with wave transparent heatproof heat insulating lamella 111,112, two wide waveguides up and down of compressed rectangular waveguide 13
The relative position of the symmetrical centre of wall is provided with a pair of circular opens 131,132, and the line of centres of circular open 131,132 is vertical
In the wide wave guide wall of compressed rectangular waveguide 13；The side wall of microwave plasma coupled waveguide 1 is installed additional on water collar 15, water collar 15
Provided with intake-outlet 151 and 152, intake-outlet 161 and 162 is provided with the water collar 16 installed in compressed rectangular waveguide 13.
Cylindrical waveguide 2 is located at the round hole 132 of compressed rectangular waveguide 13, by water cooling cylindrical waveguide 21 and entering gas cylindrical wave
Lead 22 tandem dockings to form, the side wall of water cooling cylindrical waveguide 21 installs water collar, water collar and outside Water-cooling circulating machine phase
Even, cooling water is discharged after the entrance of water inlet 211 from delivery port 212；An end face and microwave for water cooling cylindrical waveguide (21)
Round hole 132 on the wide wall of compressed rectangular waveguide 13 of plasmon coupling waveguide 1 is docked；Enter the side of gas cylindrical waveguide 22
Wall is provided with four gas feeding pipes 221,222,223,224, and they are tangential relative to the circumference for entering the inwall of gas cylindrical waveguide 22 etc.
Spacing symmetry arrangement；An end face for entering gas cylindrical waveguide 22 is provided with a metal baffle 23 for being capable of folding, enters gas circle
The other end of pole form guide 22 and the end face tandem docking of water cooling cylindrical waveguide 21.One end of discharge tube 4 sequentially passes through micro-
Relative circular open 131,132 and water cooling cylinder on the wide wall of compressed rectangular waveguide 13 of ripple plasmon coupling waveguide 1
Waveguide 21, through to the gas feeding pipe 221,222,223,224 for entering gas cylindrical waveguide 22 near, the electric discharge of plasma torch is empty
Between constrain in discharge tube 4；The other end of discharge tube 4 is open end, and the plasma for generation of being discharged in discharge tube 4 is in incidence
Under the promotion of gas, in the outer jet formation plasma torch of compressed rectangular waveguide 13.Igniter 3 includes cylinder 31, removable
Dynamic insulation piston 32, two resistant to elevated temperatures wire electrodes 33 and ac high voltage source 34；Igniter 3 is by being capable of folding
Metal baffle 23 be docking together with cylindrical waveguide 2；The one end of two one metal wire electrode 33 is through insulation piston 32 and fixes
Above, the distance between firing tip of two one metal wire electrodes 33 is less than the spacing that it is fixed on insulation piston 32, two
The other end of wire electrode 33 is connected on two electrodes of ac high voltage source 34 respectively by the wire 35 of high-voltage isulation；Absolutely
Edge piston 32 can be moved in cylinder 31, and the length requirement that two one metal wire electrodes 33 stretch out on insulation piston 32, which insulate, lives
When plug 32 is pushed into the cylinder 31, the firing tip of wire electrode 33 can under conditions of the opening of metal baffle 23, along
Discharge tube 4 stretches into the central area of the compressed rectangular waveguide 13 of microwave plasma coupled waveguide 1, retracts and returns when insulation piston 32
The tip of wire electrode 33 can be made to fall back on completely in the cylinder 31 of igniter 1 and close metal baffle 23 during position.
The present invention specific workflow be：
First, working gas is passed through, gas flowing is formed in discharge tube 4, the short-circuit baffle plate of cylindrical waveguide 2 is opened
23, move the insulation piston 32 in igniter 3 and can extend into compression in tip so that wire electrode 33 fixed thereon is struck sparks
Rectangular waveguide 13 intermediate region, connect wire electrode 33 high-voltage ac power 34 be allowed in its point discharge；Open
Microwave power supply, adjustment microwave power makes the level that its power output is arranged on 500-600 watts, adjusts the gold of compressed rectangular waveguide 13
Belong to the position of short-circuit plunger 14, until the gas in discharge tube 4 is excited to form stable plasma discharge；Then, close
High-voltage ac power 34 is closed, opposite direction movement insulation piston 32 makes wire electrode 33 be withdrawn completely into the cylinder 31 of igniter 3
It is interior, close the short circuit metallic baffle plate 23 of cylindrical waveguide 2；Increase microwave input power, and adjust the mixed of gas flow and gas
Composition and division in a proportion example, opens the power switch of the air pump 116 of thermal resistance waveguide 11, is allowed to start working.During microwave power is increased,
Change by observing reflection power adjusts the position of the short circuit metal piston 14 of compressed rectangular waveguide 13 again so that reflection work(
Rate minimum determines suitable position, realizes that optimum impedance is matched.
Claims (10)
1. a kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation coupling
Clutch, microwave plasma coupled waveguide (1), cylindrical waveguide (2), igniter (3) and discharge tube (4), microwave magnetron, ring
After row device, directional coupler are sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide (1), it is characterised in that：
Described microwave plasma coupled waveguide (1) includes thermal resistance waveguide (11), the tapered impedance transformer of waveguide cross-section
(12), compressed rectangular waveguide (13), short circuit metal piston (14), water collar (15)；Short circuit metal piston (14) is located at compression square
The short-circuit port of shape waveguide (13)；Thermal resistance waveguide (11) is provided with wave transparent heatproof heat insulating lamella (111,112), compressed rectangular waveguide
(13) relative position of the symmetrical centre of waveguide wall two wide up and down is provided with a pair of circular opens (131,132), circular
Wide wave guide wall of the line of centres of opening (131,132) perpendicular to compressed rectangular waveguide (13)；Microwave plasma coupled waveguide
(1) side wall installs water collar (15) additional, and water collar (15) is provided with intake-outlet；
Described cylindrical waveguide (2) is located at round hole (132) place of compressed rectangular waveguide (13), by water cooling cylindrical waveguide
(21) and enter gas cylindrical waveguide (22) tandem docking and form, the side wall of water cooling cylindrical waveguide (21) installs water collar, water cooling
Cover and be connected with outside Water-cooling circulating machine, cooling water is after water inlet (211) entrance from delivery port (212) discharge；Water cooling cylinder
Round hole (132) docking on the wide wall of an end face and compressed rectangular waveguide (13) for shape waveguide (21)；Enter gas cylindrical wave
The side wall for leading (22) is provided with four gas feeding pipes (221,222,223,224), four gas feeding pipe (221,222,223,224) phases
For the tangential equidistantly symmetry arrangement of circumference for entering gas cylindrical waveguide (22) inwall；Enter an end of gas cylindrical waveguide (22)
Face is installed by one metal baffle (23) for being capable of folding, other end and the end face tandem docking of water cooling cylindrical waveguide (21)；
The compressed rectangular waveguide (13) that one end of described discharge tube (4) sequentially passes through microwave plasma coupled waveguide (1) is wide
Relative circular open (131,132) and water cooling cylindrical waveguide (21) on wall, through to entering gas cylindrical waveguide (22)
Near gas feeding pipe (221,222,223,224), the discharge space of plasma torch is constrained in discharge tube (4)；Discharge tube (4)
The other end be open end, the plasma that electric discharge is produced in the discharge tube (4) is under the promotion of incident gas, in compression rectangle
The outside of waveguide (13) forms plasma torch；
Described igniter (3) includes cylinder (31), movably insulation piston (32), two resistant to elevated temperatures wire electrodes
And ac high voltage source (34) (33)；Igniter (3) is right by the metal baffle (23) and cylindrical waveguide (2) for being capable of folding
Connect；Two one metal wire electrode (33) one end are through insulation piston (32) and are fixed in the above, the point of two one metal wire electrodes (33)
The distance between fire end is less than the spacing that it is fixed on insulation piston (32), and the other end of two one metal wire electrodes (33) passes through
The wire (35) of high-voltage isulation is connected on two electrodes of ac high voltage source (34) respectively；Insulating piston (32) can be in cylinder
(31) moved in, the length requirement insulation piston (32) that two one metal wire electrodes (33) stretch out on insulation piston (32) is in cylinder
(31) when being pushed into, the firing tip of wire electrode (33) can be under conditions of metal baffle (23) opening, along electric discharge
Pipe (4) stretches into the central area of the compressed rectangular waveguide (13) of microwave plasma coupled waveguide (1), when insulation piston (32) is moved back
The tip of wire electrode (33) can be made to fall back on completely in the cylinder (31) of igniter (1) and close baffle plate when returning position
(23)。
2. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1, its feature exists
In, a perforate (113,114) is respectively provided with two narrow walls of the thermal resistance waveguide (11) or parallel to the strip slot on narrow side,
Power line is parallel to the narrow side of waveguide cross-section on narrow wall；Perforate (113,114) or strip slot are on two narrow walls
Relative position staggers, and respectively close to two end faces of thermal resistance waveguide (11)；Air pump is installed on thermal resistance waveguide (11) outer wall
(116) airway tube (115), is connected between air pump (116) and perforate (113), air pump (115) suppresses gas into thermal resistance waveguide (11)
Pressurization gas in body, thermal resistance waveguide (11) is outwardly discharged by another perforate (114).
3. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2, its feature
It is, described enters gas cylindrical waveguide (22) inner surface provided with a ladder, the different two parts of internal diameter is classified as, in side
The internal diameter that wall is provided with four gas feeding pipes (221,222,223,224) part is small, the internal diameter one of its internal diameter size and discharge tube (4)
Sample, the height of ladder is identical with the pipe thickness of discharge tube (4).
4. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2, its feature
It is, the material of described discharge tube (4) is resistant to elevated temperatures quartz ampoule, earthenware, and discharge tube (4) can also be variable-diameter structure,
External diameter of the discharge tube (4) in compressed rectangular waveguide (13) interior part is less than or equal to round hole in compressed rectangular waveguide (13)
The diameter of (131,132), the external diameter for the discharge tube (4) being in cylindrical waveguide (2) and enters in gas cylindrical waveguide (22)
Maximum outside diameter is consistent.
5. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exists
In the external diameter of described discharge tube (4) is less than or equal to the diameter of round hole (131,132) in compressed rectangular waveguide (13).
6. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2 or 5, its
It is characterised by, the working frequency of microwave power supply is 2.45GH or 915MHz work in enhanced microwave plasma torch generating means
Industry standard frequency；1~50KHz of operating frequency range of high-voltage ac power (34).
7. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exists
In the working frequency of microwave power supply is 2.45GH or 915MHz industrial standard in enhanced microwave plasma torch generating means
Frequency；1~50KHz of operating frequency range of high-voltage ac power (34).
8. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2 or 5 or 7,
Characterized in that, the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Heat
Wave arrestment leads 11 wave transparent heatproof heat insulating lamella (111,112) materials being provided with for quartz plate.
9. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exists
In the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Thermal resistance waveguide 11
Wave transparent heatproof heat insulating lamella (the 111,112) material being provided with is quartz plate.
10. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 6, its feature exists
In the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Thermal resistance waveguide 11
Wave transparent heatproof heat insulating lamella (the 111,112) material being provided with is quartz plate.
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