CN207070436U - A kind of enhanced microwave plasma torch generating means of two-chamber excitation - Google Patents
A kind of enhanced microwave plasma torch generating means of two-chamber excitation Download PDFInfo
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- CN207070436U CN207070436U CN201720794251.0U CN201720794251U CN207070436U CN 207070436 U CN207070436 U CN 207070436U CN 201720794251 U CN201720794251 U CN 201720794251U CN 207070436 U CN207070436 U CN 207070436U
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Abstract
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, belongs to microwave plasma technical field, including microwave magnetron, circulator, directional coupler, microwave plasma coupled waveguide, cylindrical waveguide, igniter and discharge tube.After microwave magnetron, circulator, directional coupler are sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide.A cylindrical waveguide chamber is added on the discharge tube axial direction perpendicular to compressed rectangular waveguide；Thermal resistance waveguide in microwave plasma coupled waveguide has effectively completely cut off influence of the heat release of plasma discharge to whole system；Igniter causes whole system to be conveniently accomplished igniting, a series of processes for exciting, maintaining by one man operation, and ignition success rate is close to 100% under conditions of the zero load output of microwave source is relatively low.Effect and benefit of the present utility model are that the peak power that can increase plasma torch obtains the plasma torch twilight sunset with larger volume active region, long-time stable is made it possible to reliably to operate, in auxiliary combustion, the many association areas of application of nano material synthesis, exhaust-gas treatment and the modification of exotic material surface etc. are applied.
Description
Technical field
The utility model belongs to microwave plasma technical field, there is provided a kind of enhanced microwave plasma of two-chamber excitation
Body torch generating means.
Background technology
Heat plasma technology in low temperature plasma field passes through the development of decades, has been widely applied to
The fields such as material, chemical industry, burning, military project.With the development of microwave technology, the reliability of microwave device and the energy of magnetron
Conversion efficiency greatly improves, while the price of microwave component is also greatly reduced.Encourage and produce using the electromagnetic energy of microwave frequency band
Raw plasma, can obtain the plasma with high energy excitation state and active particle.For electric arc direct current torch,
Because microwave plasma torch not only extends the life-span continuously to work, while it also avoid electrode corrosion pair without using electrode
The pollution of plasma, moreover, electron temperature in microwave plasma is also above the electron temperature in electric arc direct current torch, these
Feature seems extremely important in plasma material synthesis.Compared with the inductive hot plasma of RF excited, microwave
Electron density caused by ionizing and exciting in plasma and the density of active particle are all higher than inductive hot plasma, and
And from the point of view of the transformation efficiency of electric energy, the energy efficiency for producing microwave plasma is also significantly better than inductively coupled plasma.
In the last few years, microwave plasma torch device was on exhaust-gas treatment, auxiliary combustion, nano material synthesis, and exotic material surface
Substantial progress is achieved in modified etc. application.In order to produce high power microwave plasma torch, generally use
Be waveguide energy transmission and coupled modes, the TE basic modes and the short-circuit end in its direction of propagation typically transmitted in rectangular waveguide
The back wave in face is superimposed to form standing wave, and the strong electric field region at its antinode produces plasma discharge, and air flow is by swashing
Send out area and twilight sunset is obtained outside it and form plasma torch.In industry and military project application, there is an urgent need to be a kind of high-power
The service area that can increase twilight sunset microwave plasma torch.However, at present only unstrpped gas injection mode, etc. from
Daughter torch is lighted a fire and carried out in prior art basis, and to propose some technical applications new for application etc., not as
The technology of energy coupling efficiency and power capacity that what further improves plasma proposes substantial technical scheme and practicality
It is new.
The microwave plasma of high-power lower operating, can not only produce more heats and plasma occurrence of equipment
Cool and propose higher requirement, led also as various unstability factors can be induced under the physical condition of high-energy-density
Cause plasma discharge be quenched and discharge form be difficult to control phenomena such as generation, this greatly hampers plasma coupling
Close the further raising of power.In addition, the spatial extent distance and finite volume of microwave plasma twilight sunset so that its application by
To very big constraint.Our utility model is proposed on the basis of traditional single rectangular chamber standing wave excitation, increase by one
The individual cylindrical excitation cavity being assemblied on discharge tube axial direction and an igniter to match therewith, are so improving microwave etc.
The coupled power of ion also make it that the operation of system is more convenient while obtaining the twilight sunset active region of large volume, ensure that
Gas ions torch is capable of for a long time and stable electric discharge, and for carry out the application of microwave plasma torch provide it is relatively reliable with
The more preferable utilitarian design of performance is new.
Utility model content
The problem of existing for prior art, the utility model provide a kind of enhanced microwave plasma of two-chamber excitation
Body torch generating means, a series of coherent processes such as igniting at high pressure, excitation and maintenance can be realized by control panel
One man operation, the high power microwave plasma torch of Parameter adjustable, while effectively control are obtained by accurately regulating and controlling input power
Microwave plasma torch electric discharge form and its stability processed, so as to meet the requirement of a variety of practical applications.
In order to achieve the above object, the technical solution of the utility model is：
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation
Coupler, microwave plasma coupled waveguide 1, cylindrical waveguide 2, igniter 3 and discharge tube 4.Microwave magnetron, circulator,
After directional coupler is sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide 1.
Described microwave plasma coupled waveguide 1 includes thermal resistance waveguide 11, the tapered impedance transformer of waveguide cross-section
12, compressed rectangular waveguide 13, short circuit metal piston 14, water collar 15；Thermal resistance waveguide 11 is provided with wave transparent heatproof heat insulating lamella
111st, 112, perforate 113,114, airway tube 115, air pump 116, compressed rectangular waveguide 13 be provided with a pair of round holes 131,
132.The side wall of microwave plasma coupled waveguide 1 installs water collar 15 additional, and water collar 15 is provided with intake-outlet.
As caused by magnetron microwave through circle round isolator, directional coupler, three pin impedance matching boxs, microwave etc. from
The TE of electric-field intensity enhancing is established in the compressed rectangular waveguide 13 of daughter coupled waveguide 110Mould.Short circuit in compressed rectangular waveguide 13
Port is movable short circuit metal piston 14 driven by stepper motors, in two wide waveguides up and down of compressed rectangular waveguide 13
The relative position of the symmetrical centre of wall is provided with a pair of round holes 131 and 132, and the line of centres of round hole 131 and 132 hangs down
Directly in the wide wave guide wall of compressed rectangular waveguide 13, the center of round hole 131 and 132 and foundation in compressed rectangular waveguide 13
TE10The position of the standing wave antinode of mould is corresponding.
The side wall of microwave plasma coupled waveguide 1 installs water collar 15 additional, the thermal resistance in microwave plasma coupled waveguide 1
Waveguide 11 is used to prevent in discharge tube 4 heat radiation of high-temperature plasma and caused thermal convection current along microwave energy transfer
Reverse direction is propagated causes irreversible fire damage to the heating of the active device and sensor of microwave, ensure whole system it is stable, can
Lean on, continuous work for a long time.
Thermal resistance waveguide 11 is rectangle, and wave transparent heatproof heat insulating lamella 111 and 112 is provided with two ends of rectangular waveguide,
For obstructing the generation of the thermal convection current between microwave plasma coupled waveguide 1 and microwave generation system, to microwave generation system
Active parts and sensor play heat protective effect.Opened in addition, being respectively provided with one on two narrow walls of thermal resistance waveguide 11
Hole 113 and 114 or the strip slot parallel to narrow side, because power line is parallel to the narrow of waveguide cross-section on narrow wall
Side, perforate can be with the leakage for preventing electromagnetic wave of minimum degree on this face, and reduces perforate 113 and 114 pairs of microwaves exist
The influence of transmission in waveguide.In addition, in order to preferably flow the heat gathered in the waveguide of thermal resistance waveguide 11 by gas
The exclusion of gas, the position relative misalignment of perforate on two narrow walls, respectively close to two end faces of thermal resistance waveguide 11, in thermal resistance
Air pump 116 is installed on the outer wall of waveguide 11, airway tube is connected between the perforate 113 on 11 narrow wall of air pump 116 and thermal resistance waveguide
115, air pump 115 suppresses gas into thermal resistance waveguide 11, and the gas in thermal resistance waveguide 11 passes through another perforate under pressure differential
114 outwardly discharge, and the gas flowing of formation reaches the effect of convection current cooling.Thin described wave transparent heatproof insulation is quartz plate.
Described cylindrical waveguide 2 is by water cooling cylindrical waveguide 21 and enters the tandem docking of gas cylindrical waveguide 22 and forms, and has
Body includes water cooling cylindrical waveguide 21, enters gas cylindrical waveguide 22, is capable of the metal baffle 23 of folding, water inlet 211, delivery port
212, four gas feeding pipes 221,222,223,224.
Cylindrical waveguide 2 is arranged at the round hole 132 of compressed rectangular waveguide 13, with microwave plasma coupled waveguide
1 is engaged the composite construction to form a two-chamber excitation.
The side wall installation water collar of water cooling cylindrical waveguide 21, water collar are connected with the Water-cooling circulating machine of outside, cooling water
Discharged after the entrance of water inlet 211 of water collar from delivery port 212, water collar is connected by pipeline with the Water-cooling circulating machine of outside
Form circulating cooling system.One end face of water cooling cylindrical waveguide 21 and the compression rectangle of microwave plasma coupled waveguide 1
Round hole 132 on 13 wide wall of waveguide docks.
The side wall for entering gas cylindrical waveguide 22 is provided with four gas feeding pipes 221,222,223,224, and they are relative to entering gas
The tangential equidistant symmetry arrangement of the circumference of the inwall of cylindrical waveguide 22；The end face installation one for entering gas cylindrical waveguide 22 can
With the metal baffle 23 of folding, enter the other end of gas cylindrical waveguide 22 and the end face of water cooling cylindrical waveguide 21 is connected pair
Connect, cylindrical waveguide 2 forms an independent closed chamber.Pass through the electricity in the closed chamber of 132 cylindrical waveguide of round hole 2
Electromagnetic wave in magnetic wave and the chamber of compressed rectangular waveguide 13 is coupled, and the electric-field intensity in enhanced discharge pipe 4, coordinates by four
The distribution for the eddy airstream field that the tangential gas incorporation way of individual gas feeding pipe 221,222,223,224 is formed, makes in discharge tube 4
Reduced field strength while be distributed to obtain optimization part Reduced field strength strengthened, and Reduced field strength distribution is to determine plasma
An important factor for flash-over characteristic.
Described one end of discharge tube 4 is sequentially passed through on the 13 wide wall of compressed rectangular waveguide of microwave plasma coupled waveguide 1
Relative a pair of round holes 131,132 and water cooling cylindrical waveguide 21, enter tracheae through to enter gas cylindrical waveguide 22
Near road 221,222,223,224, the discharge space of plasma torch is constrained in discharge tube 4, i.e., cylindrical waveguide 2 is formed
Cavity wall and discharge space be by serve as a contrast side wall discharge tube 4 and enter the gas feeding pipe of bottom four of gas cylindrical waveguide 22
221st, high speed eddy airstream layer effectively completely cuts off caused by 222,223,224；The other end of discharge tube 4 sprays for plasma torch
Open end, plasma caused by electric discharge is under the promotion of incident gas in discharge tube 4, in the outer of compressed rectangular waveguide 13
Portion forms plasma torch；Plasma torch is produced under the drive of air-flow thus to spray.The cavity that cylindrical waveguide 2 is formed is not
Only there is humidification to the electric field in compressed rectangular waveguide 13, so as to exciting and maintaining plasma torch and improve coupling work(
Rate contributes, and also passes through compressed rectangular waveguide by the introducing of four tangential gas flows of gas feeding pipe 221,222,223,224
Vortex gas flowing is produced in 13 discharge tube 4, so as to the electric discharge to stable plasma torch and completely cuts off hot plasma to putting
The fire damage of the tube wall of fulgurite 4 plays the role of very big.In order to ensure that the tangential gas flow into injection in gas cylindrical waveguide 22 can be by unperturbed
Dynamic is transferred in the discharge cavity of compressed rectangular waveguide 13, it is described enter the inner surface of gas cylindrical waveguide 22 have ladder by its
Be divided into two different parts of internal diameter, side wall be provided with four parts of gas feeding pipe 221,222,223,224 internal diameter is smaller and chi
It is very little as the internal diameter of discharge tube 4, the height of ladder is identical with the pipe thickness of discharge tube 4, so that in gas feeding pipe
221st, 222,223,224 distance of transmission as far as possible in discharge tube 4 that nearby caused eddy airstream can be interference-free.
Microwave plasma realizes that electric discharge needs the excitation process of an igniting, common sparking mode handle at high pressure
Single electrode is deep into discharging chamber by the output of the lower increase microwave power supply of zero load, in the local generation highfield in the tip of electrode
Ionized gas, so as to provide the electric discharge that seed electrons excite plasma, need to increase microwave electricity to improve ignition success rate
Power output of the source under zero load, the active device of such microwave generation system easily occur to overload phenomenon, while microwave system
Random sparking can also occur for interior part, can so have a strong impact on and put plasma discharge ignition success rate.
In the utility model, described igniter 3 includes cylinder 31, the moveable piston 32 that insulate, two high temperature resistants
Wire electrode 33, and ac high voltage source 34.Wear at suitable intervals one end of two refractory metal silk electrodes 33
Cross insulation piston 32 and be fixed in the above, the distance between firing tip of two one metal wire electrodes 33 is less than two one metal wire electrodes
33 are fixed on the spacing on insulation piston 32；The other end of two one metal wire electrodes 33 is distinguished by the wire 35 of high-voltage isulation
It is connected on two electrode terminals of ac high voltage source 34；Insulation piston 32 is located inside cylinder 31, and can be in cylinder 31
Interior movement.
Igniter 3 with the metal baffle 23 of folding with cylindrical waveguide 2 by can be docking together, two one metal wire electrodes
33, when insulating length requirement insulation piston 32 push-in in cylinder 31 stretched out on piston 32, open in metal baffle 23
Under the conditions of, the tip of wire electrode 33 can extend into the compression rectangle of microwave plasma coupled waveguide 1 along discharge tube 4
The central area of waveguide 13, the tip of wire electrode 33 can be made to fall back on igniter completely when the piston 32 that insulate retracts playback
1 cylinder 31 is interior and closes metal baffle 23.Under the driving of ac high voltage source 34, the firing tip of wire electrode 33
Between form the sufficiently large discharge channel of electron density, can excite microwave plasma under the low-power output of microwave power supply
Electric discharge, complete igniting after wire electrode 33 insulation piston 32 drive under be withdrawn completely into cylinder 31, and with discharge tube 4
Interior discharge space isolation, ensure to overheat and ablation wire electrode 33 because of the power increase plasma in later stage；Separately
Outside, exiting for wire electrode 33 also will not be to the composite construction discharge cavity of compressed rectangular waveguide 13 and the composition of cylindrical waveguide 2
The condition of resonance of room has an impact.The design of igniter 3 greatly reduces the requirement to the unloaded input power of microwave, while
Significantly improve igniting and excite the reliability of plasma discharge and the service life of wire electrode.
Described microwave power supply working frequency is 2.45GH or 915MHz Industrial standard frequency；Ac high voltage source 34
The KHz of operating frequency range 1~50；Working gas is various gases.
The material of described discharge tube 4 is resistant to elevated temperatures quartz ampoule, earthenware, and discharge tube 4 can also be the structure of reducing,
Discharge tube 4 is less than or equal to round hole 131,132 in compressed rectangular waveguide 13 in the external diameter of the inside points of compressed rectangular waveguide 13
Diameter, the external diameter for the discharge tube 4 being in cylindrical waveguide 2 are consistent with the maximum outside diameter entered in gas cylindrical waveguide 22；Metal
The material of silk electrode 33 uses resistant to elevated temperatures tungsten filament.
Effect and benefit of the present utility model are to add one on the direction of discharge tube 4 perpendicular to compressed rectangular waveguide 13
Individual cylindrical waveguide chamber 2, superposition is formed in discharge tube 4 after being reflected along the electromagnetic wave of the chamber indoor propagation in its end face 23
Field strength so that obtained in the standing wave of the TE moulds of the underexcitation of discharge tube 4 of traditional chamber of single compressed rectangular waveguide 13 into one
The enhancing of step, so as to obtain more preferable energy coupling effect, while the discharge tube 4 and the gas feeding pipe of its lower end to insulate
221st, the vapour lock layer that 222,223, the 224 tangential gases of high flow rate are formed in its end face is plasma and the metal of cylindrical waveguide 2
Wall and short circuit metallic baffle plate 23 effectively completely cut off, and eliminate that plasma discharge is incidental in high-power lower operating to be quenched
Go out phenomenon.In addition, the thermal resistance waveguide 11 installed additional in microwave plasma coupled waveguide 1 has effectively completely cut off in plasma discharge
Influence of the heat release to whole system.The benefit of these measures is can to increase the peak power of plasma torch and can obtain
Obtaining has the plasma torch twilight sunset of larger volume active region, and make it possible to long lasting for, stably, reliable operating.Together
When, the utilitarian design of the unit of igniter 3 is new to allow whole system to be conveniently accomplished igniting by one man operation, excite, tie up
A series of processes held, ignition success rate is close to 100% under conditions of the zero load output of microwave source is relatively low.
Brief description of the drawings
Fig. 1 is to produce a kind of cross section view of the enhanced microwave plasma torch generating means of two-chamber excitation.
Fig. 2 is to produce a kind of diagrammatic top view of the enhanced microwave plasma torch generating means of two-chamber excitation.
Fig. 3 is the profile of the tangential gas flow incorporation way into gas cylindrical waveguide, A-A arrows in section view direction corresponding diagram 2
Head direction.
In figure：1 microwave plasma coupled waveguide, 2 cylindrical waveguides, 3 igniters, 4 discharge tubes；
11 thermal resistance waveguides, the tapered impedance transformer of 12 waveguide cross-sections, 13 compressed rectangular waveguides, 14 short circuit metals are lived
Plug, 15 and 16 water collars；111st, 112 wave transparent heatproof heat insulating lamella, 113,114 perforates, 115 airway tubes, 116 air pumps, 131,
132 round holes, 152 delivery ports, 151 water inlets, 161 water inlets, 162 delivery ports；
21 water cooling cylindrical waveguides, 22 enter gas cylindrical waveguide, 23 metal baffles, 211 water inlets, 212 delivery ports, 221,
222nd, 223,224 gas feeding pipe；
31 cylinders, 32 moveable insulation pistons, 33 two refractory metal silk electrodes, 34 ac high voltage sources, 35 is high
Press insulated conductor.
Embodiment
Specific embodiment of the present utility model is described in detail below in conjunction with technical scheme and accompanying drawing.
A kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation
Coupler, microwave plasma coupled waveguide 1, cylindrical waveguide 2, igniter 3 and discharge tube 4, microwave magnetron, circulator,
After directional coupler is sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide 1, it is characterised in that：
Microwave plasma coupled waveguide 1 includes thermal resistance waveguide 11, the tapered impedance transformer 12 of waveguide cross-section, compression
Rectangular waveguide 13, short circuit metal piston 14, water collar 15 and 16；Short circuit metal piston 14 is located at the short circuit of compressed rectangular waveguide 13
Port；Thermal resistance waveguide 11 is provided with wave transparent heatproof heat insulating lamella 111,112, two wide waveguides up and down of compressed rectangular waveguide 13
The relative position of the symmetrical centre of wall is provided with a pair of round holes 131,132, and the line of centres of round hole 131,132 is vertical
In the wide wave guide wall of compressed rectangular waveguide 13；The side wall of microwave plasma coupled waveguide 1 installs water collar 15 additional, on water collar 15
Provided with intake-outlet 151 and 152, intake-outlet 161 and 162 is provided with the water collar 16 installed in compressed rectangular waveguide 13.
Cylindrical waveguide 2 is located at the round hole 132 of compressed rectangular waveguide 13, by water cooling cylindrical waveguide 21 and enters gas cylindrical wave
Lead 22 tandem dockings to form, the side wall installation water collar of water cooling cylindrical waveguide 21, water collar and the Water-cooling circulating machine phase of outside
Even, cooling water is discharged after the entrance of water inlet 211 from delivery port 212；One end face of water cooling cylindrical waveguide (21) and microwave
Round hole 132 on the 13 wide wall of compressed rectangular waveguide of plasmon coupling waveguide 1 docks；Enter the side of gas cylindrical waveguide 22
Wall is provided with four gas feeding pipes 221,222,223,224, and they are tangential etc. relative to the circumference for entering the inwall of gas cylindrical waveguide 22
Spacing symmetry arrangement；An end face for entering gas cylindrical waveguide 22 is provided with a metal baffle for being capable of folding 23, enters gas circle
The other end of pole form guide 22 and the end face tandem docking of water cooling cylindrical waveguide 21.One end of discharge tube 4 sequentially passes through micro-
Relative round hole 131,132 and water cooling cylinder on the 13 wide wall of compressed rectangular waveguide of ripple plasmon coupling waveguide 1
Waveguide 21, through to the gas feeding pipe 221,222,223,224 for entering gas cylindrical waveguide 22 near, the electric discharge of plasma torch is empty
Between constrain in discharge tube 4；The other end of discharge tube 4 is open end, and plasma caused by electric discharge is in incidence in discharge tube 4
Under the promotion of gas, plasma torch is formed in the outer jet of compressed rectangular waveguide 13.Igniter 3 includes cylinder 31, removable
Dynamic 32, two, insulation piston resistant to elevated temperatures wire electrode 33 and ac high voltage source 34；Igniter 3 is by being capable of folding
Metal baffle 23 be docking together with cylindrical waveguide 2；The one end of two one metal wire electrode 33 is through insulation piston 32 and fixes
Above, the distance between firing tip of two one metal wire electrodes 33 be less than it be fixed on insulation piston 32 on spacing, two
The other end of wire electrode 33 is connected on two electrodes of ac high voltage source 34 respectively by the wire 35 of high-voltage isulation；
Insulation piston 32 can move in cylinder 31, the length requirement insulation that two one metal wire electrodes 33 stretch out on insulation piston 32
When piston 32 is pushed into cylinder 31, the firing tip of wire electrode 33 can be under conditions of the opening of metal baffle 23, edge
The central area that discharge tube 4 stretches into the compressed rectangular waveguide 13 of microwave plasma coupled waveguide 1, when insulation piston 32 is retracted
When playback the tip of wire electrode 33 can fallen back in the cylinder 31 of igniter 1 completely and closes metal baffle 23.
Specific workflow of the present utility model is：
First, working gas is passed through, gas flowing is formed in discharge tube 4, opens the short-circuit baffle plate of cylindrical waveguide 2
23, move the insulation piston 32 in igniter 3 and can extend into compression in tip so that wire electrode 33 fixed thereon is struck sparks
Rectangular waveguide 13 intermediate region, connect wire electrode 33 high-voltage ac power 34 be allowed in its point discharge；Open
Microwave power supply, adjustment microwave power make the level that its power output is arranged on 500-600 watts, adjust the gold of compressed rectangular waveguide 13
Belong to the position of short-circuit plunger 14, until the gas in discharge tube 4 is excited to form stable plasma discharge；Then, close
High-voltage ac power 34 is closed, opposite direction movement insulation piston 32, wire electrode 33 is withdrawn completely into the cylinder 31 of igniter 3
It is interior, close the short circuit metallic baffle plate 23 of cylindrical waveguide 2；Increase microwave input power, and adjust the mixed of gas flow and gas
Composition and division in a proportion example, the power switch of the air pump 116 of thermal resistance waveguide 11 is opened, is allowed to start working.During microwave power is increased,
Change by observing reflection power adjusts the position of the short circuit metal piston 14 of compressed rectangular waveguide 13 again so that reflection work(
Rate minimum determines suitable position, realizes that optimum impedance matches.
Claims (10)
1. a kind of enhanced microwave plasma torch generating means of two-chamber excitation, including microwave magnetron, circulator, orientation coupling
Clutch, microwave plasma coupled waveguide (1), cylindrical waveguide (2), igniter (3) and discharge tube (4), microwave magnetron, ring
After row device, directional coupler are sequentially connected in series, directional coupler is connected with microwave plasma coupled waveguide (1), it is characterised in that：
Described microwave plasma coupled waveguide (1) includes thermal resistance waveguide (11), the tapered impedance transformer of waveguide cross-section
(12), compressed rectangular waveguide (13), short circuit metal piston (14), water collar (15)；Short circuit metal piston (14) is positioned at compression square
The short-circuit port of shape waveguide (13)；Thermal resistance waveguide (11) is provided with wave transparent heatproof heat insulating lamella (111,112), compressed rectangular waveguide
(13) relative position of the symmetrical centre of two wide waveguide walls up and down is provided with a pair of round holes (131,132), circular
Wide wave guide wall of the line of centres of perforate (131,132) perpendicular to compressed rectangular waveguide (13)；Microwave plasma coupled waveguide
(1) side wall installs water collar (15) additional, and water collar (15) is provided with intake-outlet；
Described cylindrical waveguide (2) is located at round hole (132) place of compressed rectangular waveguide (13), by water cooling cylindrical waveguide
(21) and enter gas cylindrical waveguide (22) tandem docking and form, the side wall installation water collar of water cooling cylindrical waveguide (21), water cooling
Cover and be connected with the Water-cooling circulating machine of outside, cooling water is discharged after water inlet (211) entrance from delivery port (212)；Water cooling cylinder
Round hole (132) docking on the end face and compressed rectangular waveguide (13) wide wall of shape waveguide (21)；Enter gas cylindrical wave
The side wall for leading (22) is provided with four gas feeding pipes (221,222,223,224), four gas feeding pipe (221,222,223,224) phases
For entering the circumference of gas cylindrical waveguide (22) inwall tangentially equidistant symmetry arrangement；Enter an end of gas cylindrical waveguide (22)
Face is installed by one metal baffle (23) for being capable of folding, other end and the end face tandem docking of water cooling cylindrical waveguide (21)；
The compressed rectangular waveguide (13) that one end of described discharge tube (4) sequentially passes through microwave plasma coupled waveguide (1) is wide
Relative round hole (131,132) and water cooling cylindrical waveguide (21) on wall, through to entering gas cylindrical waveguide (22)
Near gas feeding pipe (221,222,223,224), the discharge space of plasma torch is constrained in discharge tube (4)；Discharge tube (4)
The other end be open end, plasma caused by electric discharge is under the promotion of incident gas in the discharge tube (4), in compression rectangle
The outside of waveguide (13) forms plasma torch；
Described igniter (3) includes cylinder (31), movably insulate piston (32), two resistant to elevated temperatures wire electrodes
And ac high voltage source (34) (33)；Igniter (3) is right by the metal baffle (23) and cylindrical waveguide (2) for being capable of folding
Connect；Two one metal wire electrode (33) one end are through insulation piston (32) and are fixed in the above, the point of two one metal wire electrodes (33)
The distance between fire end is less than the spacing that it is fixed on insulation piston (32), and the other end of two one metal wire electrodes (33) passes through
The wire (35) of high-voltage isulation is connected on two electrodes of ac high voltage source (34) respectively；Insulating piston (32) can be in cylinder
(31) moved in, the length requirement insulation piston (32) that two one metal wire electrodes (33) stretch out on insulation piston (32) is in cylinder
(31) when being pushed into, the firing tip of wire electrode (33) can be under conditions of metal baffle (23) opening, along electric discharge
Pipe (4) stretches into the central area of the compressed rectangular waveguide (13) of microwave plasma coupled waveguide (1), when insulation piston (32) moves back
When returning position the tip of wire electrode (33) can fallen back in the cylinder (31) of igniter (1) completely and closes baffle plate
(23)。
2. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1, its feature exist
In, a perforate (113,114) or the strip slot parallel to narrow side are respectively provided with two narrow walls of the thermal resistance waveguide (11),
Power line is parallel to the narrow side of waveguide cross-section on narrow wall；Perforate (113,114) or strip slot are on two narrow walls
Relative position staggers, and respectively close to two end faces of thermal resistance waveguide (11)；Air pump is installed on thermal resistance waveguide (11) outer wall
(116) airway tube (115), is connected between air pump (116) and perforate (113), air pump (116) suppresses gas into thermal resistance waveguide (11)
Body, the pressurization gas in thermal resistance waveguide (11) are outwardly discharged by another perforate (114).
3. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2, its feature
It is, described gas cylindrical waveguide (22) inner surface that enters is provided with a ladder, the different two parts of internal diameter is classified as, in side
The internal diameter that wall is provided with four gas feeding pipes (221,222,223,224) part is small, the internal diameter one of its internal diameter size and discharge tube (4)
Sample, the height of ladder are identical with the pipe thickness of discharge tube (4).
4. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2, its feature
It is, the material of described discharge tube (4) is resistant to elevated temperatures quartz ampoule, earthenware, and discharge tube (4) can also be variable-diameter structure,
Discharge tube (4) is less than or equal to round hole in compressed rectangular waveguide (13) in the external diameter of compressed rectangular waveguide (13) inside points
The diameter of (131,132), the external diameter for the discharge tube (4) being in cylindrical waveguide (2) and enters in gas cylindrical waveguide (22)
Maximum outside diameter is consistent.
5. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exist
In the external diameter of described discharge tube (4) is less than or equal to the diameter of round hole (131,132) in compressed rectangular waveguide (13).
6. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2 or 5, its
It is characterised by, the working frequency of microwave power supply is 2.45GH or 915MHz work in enhanced microwave plasma torch generating means
Industry standard frequency；1~50KHz of operating frequency range of high-voltage ac power (34).
7. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exist
In the working frequency of microwave power supply is 2.45GH or 915MHz industrial standard in enhanced microwave plasma torch generating means
Frequency；1~50KHz of operating frequency range of high-voltage ac power (34).
8. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 1 or 2 or 5 or 7,
Characterized in that, the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Heat
It is quartz plate that wave arrestment, which leads 11 wave transparent heatproof heat insulating lamella (111,112) materials being provided with,.
9. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 3, its feature exist
In the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Thermal resistance waveguide 11
Wave transparent heatproof heat insulating lamella (the 111,112) material being provided with is quartz plate.
10. a kind of enhanced microwave plasma torch generating means of two-chamber excitation according to claim 6, its feature exist
In the material of described discharge tube (4) is quartz ampoule, earthenware；The material of wire electrode (33) is tungsten filament；Thermal resistance waveguide 11
Wave transparent heatproof heat insulating lamella (the 111,112) material being provided with is quartz plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720794251.0U CN207070436U (en) | 2017-07-03 | 2017-07-03 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720794251.0U CN207070436U (en) | 2017-07-03 | 2017-07-03 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207070436U true CN207070436U (en) | 2018-03-02 |
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| CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN111278206A (en) * | 2020-03-19 | 2020-06-12 | 四川大学 | Plasma generating device with dielectric barrier discharge and microwave discharge connected in series |
| CN111441037A (en) * | 2019-03-08 | 2020-07-24 | 上海征世科技有限公司 | Cutter tray for microwave plasma diamond film deposition device |
| CN111763926A (en) * | 2020-07-02 | 2020-10-13 | 成都蓝玛尚科技有限公司 | Material synthesis system based on high-temperature normal-pressure microwave plasma |
| CN113587084A (en) * | 2021-08-04 | 2021-11-02 | 大连理工大学 | Device for enhancing combustion by utilizing microwave plasma torch |
| CN116936329B (en) * | 2023-09-15 | 2023-12-15 | 武汉市飞瓴光电科技有限公司 | Normal pressure microwave plasma double waveguide coupling device |
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2017
- 2017-07-03 CN CN201720794251.0U patent/CN207070436U/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN111441037A (en) * | 2019-03-08 | 2020-07-24 | 上海征世科技有限公司 | Cutter tray for microwave plasma diamond film deposition device |
| CN111441037B (en) * | 2019-03-08 | 2024-05-14 | 上海征世科技股份有限公司 | Cutter tray used in microwave plasma deposition diamond film device |
| CN111278206A (en) * | 2020-03-19 | 2020-06-12 | 四川大学 | Plasma generating device with dielectric barrier discharge and microwave discharge connected in series |
| CN111763926A (en) * | 2020-07-02 | 2020-10-13 | 成都蓝玛尚科技有限公司 | Material synthesis system based on high-temperature normal-pressure microwave plasma |
| CN113587084A (en) * | 2021-08-04 | 2021-11-02 | 大连理工大学 | Device for enhancing combustion by utilizing microwave plasma torch |
| CN116936329B (en) * | 2023-09-15 | 2023-12-15 | 武汉市飞瓴光电科技有限公司 | Normal pressure microwave plasma double waveguide coupling device |
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