CN106488639A - Large scale pulse cold-plasma jet generating device - Google Patents
Large scale pulse cold-plasma jet generating device Download PDFInfo
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- CN106488639A CN106488639A CN201611231960.4A CN201611231960A CN106488639A CN 106488639 A CN106488639 A CN 106488639A CN 201611231960 A CN201611231960 A CN 201611231960A CN 106488639 A CN106488639 A CN 106488639A
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- plasma
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- plasma jet
- tube
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
Abstract
The present invention provides a kind of large scale pulse cold-plasma jet generating device to include：Bipolarity high voltage nanosecond pulse power supply, resistance coupling spiral single electrode, two-stage plasma producing apparatus and air distribution system；Two-stage plasma producing apparatus include primary medium pipe and secondary long tube, and secondary long tube side wall or port are provided with one or more introduction hole, and primary medium pipe one end is connected with air distribution system, and the other end is matched with the plasma introduction hole of secondary long tube；Secondary long tube is straight insulation tube or the insulation tube of any bending；Resistance coupling spiral single electrode includes high-pressure spiral electrode and earth resistance, and high-pressure spiral electrode is wrapped in primary medium pipe outer wall, and high-pressure spiral electrode is in parallel with earth resistance to form coupled structure；Bipolarity high voltage nanosecond pulse power supply outfan and high-pressure spiral electrode and earth resistance Electricity Federation.The present invention can improve energy injection efficiency and the strength of discharge of nanosecond pulse discharge, thus increasing jet plasma yardstick.
Description
Technical field
The present invention relates to gas ions generating meanss technology, more particularly, to a kind of large scale pulse cold-plasma jet generation
Device.
Background technology
Atmosphere pressure discharging nonequilibrium plasma technology, relatively low to vacuum system requirements, equipment investment is few, runs power consumption
Low, produce plasma active species concentration height, there is higher electron temperature and relatively low ion temperature and close to room temperature
Neutral gas temperature, the fields such as material surface process, thin film deposition, sterilizing, Pollutant Treatment have wide should
Use prospect.Generally, the mode producing atmosphere cold plasma has corona discharge, dielectric barrier discharge, jet etc., wherein, penetrates
Stream is the modal mode producing atmospheric pressure chamber isothermal plasma.
Atmospheric non-equilibrium plasma jet may reside in outside open space, has largely expanded non-flat
The range of application of weighing apparatus plasma.Generally, produce the device of plasma jet mainly by high voltage power supply, jet nozzle, high pressure
Electrode, ground electrode and air distribution system several part composition；Electrode is arranged in the internal or external of jet nozzle, works as noble gases
After flow according to 1-15L/min is sprayed by jet nozzle, form electric discharge in high-tension excitation lower edge air-flow guide path, and
Form spurting plasma in jet pipe external communication.It is limited by the air oxygen molecule under atmospheric pressure, vibrate in nitrogen molecular
Energy level is quenched to electric discharge to the absorption of electron energy and molecule, and the yardstick of jet plasma is not very good, its diameter
It is generally less than 10mm, length is less than 100mm, and, compared with expensive noble gases consumption, its economy is very low in the application for this.
At present, carried out the research for the more jet plasma generator of number both at home and abroad.Lu X P et al.
Describe a kind of long jet generating device in Applied Physics Letters, high-field electrode is placed in one by this device
Under the flow of 15L/min, in the quartz ampoule of single-ended sealing, obtain the plasma jet of length about 11cm.Patent
Describe a kind of jet flow generating apparatus in CN101426327, the electrode of jet flow generating apparatus adopts hollow tubular, and with resistance and
It is connected with high voltage power supply after capacitances in series, air-flow becomes plasma being excited after electrode zone and in nozzle profile, should
Device has easy to carry a, low cost, the plasma gas temperature of generation close to room temperature the features such as.Patent CN102781157A
Describe a kind of plane jet plasma generating device, mainly solve current jet plasma generation device plasma steady
Qualitative difference, temperature are high, area is little, density and the uneven problem of velocity flow profile, extend plasma duration, reduce
Plasma temperature, and expand the area of homogeneous plasma.
Even so, by the summary to domestic and international patent and document, it is seen that nonequilibrium plasma jet all exists
In one less scale.In document, the nonequilibrium plasma jet length the longest of report is only 11cm at present, and coordinates
Employ the He of 15L/min.Generally, nonequilibrium plasma jet typically adopts the continuous wave such as intermediate frequency power supply, radio-frequency power supply electricity
Source or the pulse power excite.During using continuous wave power supply, in extraneous space charge and in the air molecule to electric discharge quenching effect
Under the influence of, plasma jet length is difficult to further prolongation after voltage rises to certain amplitude.Compare continuous wave voltage
Excitation, can reduce the impact of space charge using pulsed voltage excitation, make jet length increase the threshold value stopping with voltage and increase.
But, too high voltage leads to the internal arcing of jet pipe, and the electrode structure of capacitive and fast-pulse are difficult to mate, and lead to domestic
In outer research, peak impulse voltage is typically in below 10kV.On the other hand, easily form turbulent flow after flow velocity higher inertia air inlet
Lead to it quickly to spread, so that jet length also is difficult to more than 100mm.
Content of the invention
It is an object of the invention to, for the problems referred to above, propose a kind of large scale pulse cold-plasma jet and produce dress
Put, this generator can improve energy injection efficiency and the strength of discharge of nanosecond pulse discharge, is effectively increased plasma jet
Yardstick.
For achieving the above object, the technical solution used in the present invention is：A kind of large scale pulse cold-plasma jet produces
Generating apparatus include：Bipolarity high voltage nanosecond pulse power supply, resistance couple spiral single electrode, two-stage plasma producing apparatus and join
Gas system；
Described two-stage plasma producing apparatus include primary medium pipe and secondary long tube, and described primary medium Guan Weiyi is individual
Or multiple, described secondary long tube side wall or port are provided with one or more introduction hole matching with primary medium pipe, supply
Plasma enters and propagates, and described primary medium pipe one end is connected with air distribution system, the plasma of the other end and secondary long tube
Body introduction hole matches；Described secondary long tube is straight insulation tube or the insulation tube of any bending；
Described resistance coupling spiral single electrode includes high-pressure spiral electrode and earth resistance, and described high-pressure spiral electrode is wound around
In primary medium pipe outer wall, for encouraging working gas to produce primary jet, described high-pressure spiral electrode is with earth resistance simultaneously
After connection forms coupled structure, is connected with bipolarity nanosecond pulse power supply voltage output end, high-pressure spiral electrode and earth resistance pair
Pulse voltage is mated, and produces primary plasma jet with efficient；
The earth terminal of described bipolarity high voltage nanosecond pulse power supply and ground connection Electricity Federation.
Further, described high-pressure spiral electrode and primary medium pipe are wrapped in insulation shell, to ensure safety.
Further, the internal diameter of described primary medium pipe is 5-12mm, pipe thickness 0.5-1mm, length 50-200mm, by
The hard dielectric material such as quartzy or ceramic is made.Described high-pressure spiral electrode is wrapped in primary medium pipe outer wall, high-pressure spiral
Electrode is wound around the number of turns and can be adjusted according to power and load, and the minimum number of turns can be 1, and high-pressure spiral electrode metallic lines are cut
Face is circular or square.
Further, described earth resistance resistance is more than 1M Ω.
Further, described primary medium pipe uneasiness attaching ground electrode, to avoid the product of arc-plasma under high voltage
Raw.
Further, described secondary long tube is straight insulation tube or the insulation tube of any bending, length 500-2000mm, interior
Footpath 5-20mm, is made up of quartz, pottery, lucite or polytetrafluoroethylmaterial material.
Further, described secondary long tube side wall or port are provided with micro- receipts of at least one and export.Jet plasma is from drawing
Enter hole and enter formation large scale electric discharge in pipe.
Further, the introduction hole of described secondary long tube is designed as barrel-shaped or inverted cone, to ensure plasma and work
Make gas and smoothly enter in secondary long tube, described introduction hole is coaxial with primary medium pipe, spray away from primary medium pipe plasma
The distance at end is 0-20mm.
Further, described air distribution system includes feeder, effusion meter, air delivering pipeline and the gas flow smooth being sequentially connected with
Interface, described gas flow smooth interface is connected with primary medium pipe one end.Described defeated gas piping and primary medium pipe adopt air-flow
Smooth interfaces smooth-going connects, to avoid turbulization.Working gas be the noble gases such as He, Ar or they with nitrogen, oxygen,
The mixed gas of air.
The operation principle of large scale pulse cold-plasma jet generating device of the present invention：Screw electrode is wrapped in primary Jie
Matter pipe outer wall, couples pulse voltage with earth resistance and is mated, produce primary plasma jet, plasma jet and
Working gas air-flow enters secondary long tube through introduction hole together, and forms large scale cold-plasma jet.
Large scale pulse cold-plasma jet generating device of the present invention is simple and reasonable for structure, compact, with prior art phase
Relatively there is advantages below：
(1) large scale pulse cold-plasma jet generating device of the present invention adopts high-pressure spiral electrode and earth resistance coupling
Close, improve energy injection efficiency and the strength of discharge of nanosecond pulse discharge；
(2) primary medium pipe no ground electrode of the present invention, it is to avoid the generation of arc discharge when high voltage runs；
(3) bipolarity nanosecond pulse excitation is effectively reduced the impact of space charge, and then the longer secondary of generation is penetrated
Stream；
(4) present invention adopts primary medium pipe and secondary long tube two-layer configuration, can form length more than 1 in secondary long tube
Rice, the large scale cold-plasma jet more than 1.2 centimetres for the diameter, significantly improve the economy of plasma jet.
Brief description
Fig. 1 is the structural representation of large scale pulse cold-plasma jet generating device of the present invention；
Fig. 2 be secondary long tube for straight tube when the plasma jet image that produces；
Fig. 3 is wound around the structural representation of high-pressure spiral electrode for primary medium pipe outer wall；
Fig. 4 is secondary long tube plasma introduction hole one；
Fig. 5 is secondary long tube plasma introduction hole two；
Fig. 6 is the large scale pulse cold-plasma jet generating device of multiple sidewall openings time class B insulation long tube structure
Structural representation；
Fig. 7 is the knot that time class B insulation long tube is large scale pulse cold-plasma jet generating device during irregular special pipe
Structure schematic diagram.
In figure：1. bipolarity nanosecond pulse power supply；2. screw electrode；3. primary medium pipe；4. earth resistance；5. primary etc.
Gas ions jet；6. time level long tube；7. feeder；8. effusion meter；9. air delivering pipeline；10. gas flow smooth interface；11. insulation
Housing；12. introduction holes；13. large scale cold-plasma jets；14. micro- receipts export；15. earth resistances.
Specific embodiment
The present invention is further described with reference to embodiments：
Embodiment 1
Lead to the internal arcing of jet pipe for solving too high voltage, the electrode structure of capacitive and the coupling of fast-pulse etc. are asked
The problems such as quickly spread by Turbulent Flow Effects after topic and noble gases air inlet, present embodiment discloses a kind of large scale pulse is cold
Plasma jet generating device, its structure as shown in Fig. 1,2,3 and 4, including：Bipolarity high voltage nanosecond pulse power supply 1, resistance
Coupling spiral single electrode, two-stage plasma producing apparatus and air distribution system；
Described air distribution system includes feeder 7, effusion meter 8, air delivering pipeline 9 and the air-flow smooth interfaces being sequentially connected with
10.
Described two-stage plasma producing apparatus include a primary medium pipe 3 and secondary long tube 6, described primary medium pipe
3 internal diameter is 5-12mm, pipe thickness 0.5-1mm, and length 50-200mm can be by the hard dielectric material system such as quartzy, ceramic
Become, its outer wall is installed screw electrode and is used for encouraging working gas to produce primary plasma jet 5.Secondary described in the present embodiment
Long tube 6 is straight insulation tube, length 500-2000mm, internal diameter 5-20mm, by quartz, pottery, lucite or politef material
Material is made.
Described secondary long tube 6 side wall is provided with an introduction hole 12, and the introduction hole 12 of described secondary long tube 6 is designed as back taper
Shape, introduction hole 12 supplies plasma to enter and propagates.Described secondary long tube 6 port is provided with the outlet 14 of 1 micro- receipts.Jet plasma
Body enters from introduction hole 12 and forms large scale electric discharge in secondary long tube 6.Described primary medium pipe 3 one end and the air-flow of air distribution system
Smooth interfaces 10 connect, and to avoid turbulization, the other end is matched with the plasma introduction hole 12 of secondary long tube 6, described
Introduction hole 12 is coaxial with primary medium pipe 3, and the distance away from primary medium pipe 3 plasma ejection end is 0-20mm.Described primary
The uneasy attaching ground electrode of medium tube 3, to avoid the generation of arc-plasma under high voltage.The working gas of feeder 7 is
The noble gases such as He, Ar or they with nitrogen, oxygen, the mixed gas of air.
Described resistance coupling spiral single electrode includes high-pressure spiral electrode 2 and earth resistance 4, described screw electrode 2 is copper,
The metal wire of the well conductings such as ferrum, aluminum forms along medium tube wall tightly around system, and metal wire section can be circular or square, cuts
Area 0.01mm2-1mm2.Described high-pressure spiral electrode 2 is wrapped on primary medium pipe 3 outer wall, for encouraging working gas to produce
Primary jet, described high-pressure spiral electrode 2 and primary medium pipe 3 are wrapped in insulation shell 11, to ensure safety.Described high pressure
Screw electrode 2 is wound around the number of turns and can be adjusted according to power and load, and the minimum number of turns can be 1.High-pressure spiral electrode 2 with
After earth resistance 4 formation coupled structure in parallel, it is connected with bipolarity nanosecond pulse power supply 1 voltage output end, high-pressure spiral electrode
Mated with earth resistance pulse voltage, produced primary plasma jet with efficient；Described earth resistance resistance is big
In 1M Ω.
The earth terminal of described bipolarity high voltage nanosecond pulse power supply 1 and ground connection 15 Electricity Federations.Bipolarity nanosecond pulse power supply 1 can
To submit for generation identical burst pulse voltage waveform in positive negative direction；It is about 20ns pulse rise time, pulsewidth is about 60ns,
Peak impulse voltage 0-40kV, continuously adjustabe in the range of pulse recurrence frequency 0-1kHz.
The operation principle of the present embodiment large scale pulse cold-plasma jet generating device：By opening feeder 7,
Adjust effusion meter 8 and working gas is led in plasma producing apparatus, wherein, working gas is that He, Ar or He, Ar etc. are lazy
Property gas and other gases mixed gas, flow velocity is 0-5L/min.Repeat in the pulse of setting bipolarity nanosecond pulse power supply 1
After frequency, adjust output peak impulse voltage to more than 20kV, now working gas can excite in primary medium pipe 3 and be formed
Primary plasma jet 5, and sprayed by primary medium pipe 3 end.Subsequently, primary plasma jet 5 and work gas bromhidrosis
Stream enters secondary long tube 6 through introduction hole 12 together, and continues to propagate in secondary long tube, forms large scale cold plasma and penetrates
13.
Embodiment 2
As shown in figure 5, present embodiment discloses a kind of large scale pulse cold-plasma jet generating device, its structure with
Embodiment 1 is essentially identical, and except for the difference that in the present embodiment, the introduction hole of secondary long tube is barrel-shaped.
Embodiment 3
As shown in fig. 6, present embodiment discloses a kind of large scale pulse cold-plasma jet generating device, its structure with
Embodiment 1 is essentially identical, and except for the difference that in the present embodiment, primary medium pipe 3 is three, to form the cold plasma of more large scale
Body jet, supporting described secondary long tube 6 side wall is provided with three introduction holes 12, and described three primary medium pipes 3 are respectively cooperating with
It is arranged in three introduction holes 12.
Embodiment 4
As shown in fig. 7, present embodiment discloses a kind of large scale pulse cold-plasma jet generating device, its structure with
Embodiment 1 is essentially identical, and except for the difference that in the present embodiment, secondary long tube 6 is the insulation tube of bending.The insulation tube of bending is provided with
Plasma introduction hole 12 and the outlet 14 of micro- receipts, so that large scale cold-plasma jet 13 results from secondary long tube 6, with
It is easy to use under the specific demands such as the insulation inside pipe wall sterilization bending.
Finally it should be noted that：Various embodiments above only in order to technical scheme to be described, is not intended to limit；To the greatest extent
Pipe has been described in detail to the present invention with reference to foregoing embodiments, it will be understood by those within the art that：Its according to
So the technical scheme described in foregoing embodiments can be modified, or wherein some or all of technical characteristic is entered
Row equivalent；And these modifications or replacement, do not make the essence of appropriate technical solution depart from various embodiments of the present invention technology
The scope of scheme.
Claims (10)
1. a kind of large scale pulse cold-plasma jet generating device is it is characterised in that include：Bipolarity high-voltage nanosecond pulse
Power supply, resistance coupling spiral single electrode, two-stage plasma producing apparatus and air distribution system；
Described two-stage plasma producing apparatus include primary medium pipe and secondary long tube, and described primary medium Guan Weiyi is individual or many
Individual, described secondary long tube side wall or port are provided with one or more introduction hole matching with primary medium pipe, described just
Level medium tube one end is connected with air distribution system, and the other end is matched with the plasma introduction hole of secondary long tube；Described secondary long
Guan Weizhi insulation tube or the insulation tube of any bending；
Described resistance coupling spiral single electrode includes high-pressure spiral electrode and earth resistance, and described high-pressure spiral electrode is wrapped in just
In level medium pipe outer wall, after described high-pressure spiral electrode formation in parallel with earth resistance coupled structure, with bipolarity nanosecond pulse
Supply voltage outfan connects；
The earth terminal of described bipolarity high voltage nanosecond pulse power supply and ground connection Electricity Federation.
2. according to claim 1 large scale pulse cold-plasma jet generating device it is characterised in that described high pressure spiral shell
Rotation electrode and primary medium pipe are wrapped in insulation shell.
3. large scale pulse cold-plasma jet generating device according to claim 1 or claim 2 it is characterised in that described just
The internal diameter of level medium tube is 5-12mm, pipe thickness 0.5-1mm, and length 50-200mm is made up of quartz or ceramic material；Described
High-pressure spiral electrode metallic lines section is circular or square.
4. according to claim 1 large scale pulse cold-plasma jet generating device it is characterised in that described ground connection is electric
Resistance resistance is more than 1M Ω.
5. large scale pulse cold-plasma jet generating device according to claim 1 or claim 2 it is characterised in that described just
Level medium tube uneasiness attaching ground electrode.
6. according to claim 1 large scale pulse cold-plasma jet generating device it is characterised in that described secondary long
Guan Weizhi insulation tube or the insulation tube of any bending, length 500-2000mm, internal diameter 5-20mm, by quartzy, ceramic, organic glass
Glass or polytetrafluoroethylmaterial material are made.
7. according to claim 1 or 6 large scale pulse cold-plasma jet generating device it is characterised in that described time
The long tube side wall of level or port are provided with micro- receipts of at least one and export.
8. according to claim 1 or 6 large scale pulse cold-plasma jet generating device it is characterised in that described time
The introduction hole of level long tube is designed as barrel-shaped or inverted cone.
9. according to claim 1 or 8 large scale pulse cold-plasma jet generating device it is characterised in that described draw
Enter that hole is coaxial with primary medium pipe, the distance away from primary medium pipe plasma ejection end is 0-20mm.
10. according to claim 1 large scale pulse cold-plasma jet generating device it is characterised in that described distribution
System includes feeder, effusion meter, air delivering pipeline and the air-flow smooth interfaces being sequentially connected with, and described gas flow smooth interface is with just
Level medium tube one end connects.
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| CN201611231960.4A CN106488639B (en) | 2016-12-28 | 2016-12-28 | Large scale pulse cold-plasma jet generating device |
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| CN201611231960.4A CN106488639B (en) | 2016-12-28 | 2016-12-28 | Large scale pulse cold-plasma jet generating device |
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| CN106488639A true CN106488639A (en) | 2017-03-08 |
| CN106488639B CN106488639B (en) | 2019-07-30 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107301938A (en) * | 2017-07-29 | 2017-10-27 | 苏州志佳电子科技有限公司 | The method for generation of ion stream and the ion generator with helical discharge electrode |
| CN110178449A (en) * | 2016-12-23 | 2019-08-27 | 等离子体处理有限公司 | Nozzle assembly and device for manufacturing atmosphere plasma jet stream |
| CN110493946A (en) * | 2019-09-23 | 2019-11-22 | 大连理工大学 | A kind of device that large area jet stream discharge plasma resin sorbent surface is modified |
| CN114554670A (en) * | 2022-02-14 | 2022-05-27 | 西安电子科技大学 | Plasma jet system and control method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114554670A (en) * | 2022-02-14 | 2022-05-27 | 西安电子科技大学 | Plasma jet system and control method |
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