CN112105136B - Ignition method of microwave plasma torch - Google Patents
Ignition method of microwave plasma torch Download PDFInfo
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- CN112105136B CN112105136B CN202011137794.8A CN202011137794A CN112105136B CN 112105136 B CN112105136 B CN 112105136B CN 202011137794 A CN202011137794 A CN 202011137794A CN 112105136 B CN112105136 B CN 112105136B
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Abstract
The invention discloses a microwave plasma torch ignition method, which belongs to the technical field of microwave application and adopts a microwave plasma torch; inputting working gas into the discharge tube; the microwave generator is started, the working mode is set to be a pulse wave working mode, and the microwave generator inputs pulse waves to working gas in the discharge tube through the microwave conveying device; confirming whether the working gas in the discharge tube generates plasma or not; the working gas in the discharge tube generates plasma, the microwave generator switches the pulse wave working mode into the continuous wave working mode, and the microwave generator inputs continuous waves to the working gas in the discharge tube through the microwave conveying device. According to the ignition method of the microwave plasma torch, a probe and other tip discharge structures are not needed, a complex probe action mechanism is omitted, automatic ignition can be achieved, and the ignition method has the characteristics of stability, reliability, long service life of parts and the like.
Description
Technical Field
The invention belongs to the technical field of microwave application, and particularly relates to a microwave plasma torch ignition method.
Background
Plasma is generated in a discharge tube of the microwave plasma torch, and the working gas can be ionized to generate active plasma components only when the electric field intensity of a generating device reaches the breakdown field intensity of the working gas. The electric field strength required for exciting the plasma under the atmospheric pressure is often much higher than the electric field strength for maintaining the plasma, and particularly in the microwave plasma discharge, a local electric field with high strength is required to be added to excite the working gas discharge. For microwave plasma discharge of continuous wave work, the discharge process of the plasma can be maintained through continuous microwave input coupling only by once ignition and then removing the excitation device. Therefore, in order to generate the breakdown field strength required for gas breakdown in the microwave plasma torch generating device, a metal tip or a device for collecting an electric field is generally arranged in the generating device, but because the device does not exist in the general microwave plasma torch generating device, when microwave plasma is ignited, a metal tip needs to be manually or automatically used for breaking down the working gas to discharge the working gas so as to generate plasma. At present, the commonly adopted excitation device is completed by applying alternating current high voltage electric ignition by a Tesla coil or a tungsten electrode at a coupling port of a waveguide tube or directly igniting a discharge area by pumping into low air pressure and then increasing the air pressure to the atmospheric pressure. The ignition mode has low automation degree, and the accessories required by point discharge have complex structure, inconvenient operation, insufficient stability and reliability, short service life of parts and easy loss.
Disclosure of Invention
The invention aims to provide an ignition method of a microwave plasma torch aiming at the defects, and aims to solve the problems of how to eliminate a point discharge structure and a complex auxiliary action ignition structure, realize automatic ignition, ensure the reliability and stability of the microwave plasma torch, and have long service life of parts and components. In order to achieve the purpose, the invention provides the following technical scheme:
a microwave plasma torch ignition method adopts a microwave plasma torch; the microwave plasma torch comprises a microwave generator 1, a microwave conveying device 2, a shielding outer shell 3 and a discharge tube 4; the discharge tube 4 penetrates through the shielding shell 3; a feed port is arranged on the shielding shell 3; the feed port is used for receiving microwaves input by the microwave generator 1 through the microwave conveying device 2; the discharge tube 4 is used for inputting working gas and receiving microwaves input by a feed port; the microwave generator 1 has at least a pulse wave working mode and a continuous wave working mode; the method comprises the following steps:
step S10, inputting a working gas into the discharge tube 4;
step S20, the microwave generator 1 is started, the working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through the microwave conveying device 2;
step S30 of confirming whether or not the working gas in the discharge tube 4 generates plasma;
step S40 is to generate plasma from the working gas in the discharge tube 4, the microwave generator 1 switches the pulse wave mode to the continuous wave mode, and the microwave generator 1 inputs continuous waves to the working gas in the discharge tube 4 through the microwave conveying device 2. According to the structure, the microwave generator 1 is provided with the control system, and the microwave generator 1 can select a pulse wave working mode and a continuous wave working mode; the power of the pulse wave generated by the same microwave generator 1 in the pulse wave working mode is much higher than that of the continuous wave generated in the continuous wave working mode, so that when working gas is input into the discharge tube 4, the pulse wave is firstly adopted to ignite microwave plasma, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is also increased under atmospheric pressure, the breakdown field intensity required for breakdown of the working gas is achieved, when the working gas is broken down and ionized to generate plasma, the pulse wave working mode can be switched into the continuous wave working mode, the microwave generator 1 inputs the continuous wave into the working gas in the discharge tube 4 through the microwave conveying device 2, and at the moment, the plasma can be maintained under lower microwave power. By the method, the microwave plasma torch can be automatically ignited, a point discharge structure and a complex auxiliary action ignition structure are omitted, the operation is convenient, and the microwave generator 1 with lower power can be selected to save the cost. The shielding shell 3 is generally a metal shell, so that microwave leakage is reduced; the discharge tube 4 is a hollow structure, and the working gas can be selected from nitrogen, argon, oxygen, air or the like, and is determined according to the property of the gas to be treated.
Further, step S40 is followed by step S50; step S50 is: the gas to be treated is fed into the discharge tube 4. As can be seen from the above configuration, when the pulse wave operation mode is switched to the continuous wave operation mode, the continuous wave of a lower power can maintain the generation of the plasma, and then the gas to be treated is supplied to the discharge tube 4, so that the gas to be treated can be reacted. For example, the gas to be treated is an exhaust gas generated in the semiconductor industry, and the plasma has high concentration of electrons and can decompose the exhaust gas.
Further, the microwave conveying device 2 comprises a compression waveguide 5; the discharge tube 4 comprises a tube inlet part 6 positioned above the shielding shell 3, a microwave-permeable tube part 7 positioned inside the shielding shell 3 and a tube outlet part 8 positioned below the shielding shell 3; the inlet pipe part 6 is provided with a working inlet pipe 9 and a treatment inlet pipe 10; the working air inlet pipe 9 is connected with a working air inlet coil pipe 11 coiled on the outer wall of the pipe inlet part 6; the treatment air inlet pipe 10 is connected with a treatment air inlet coil pipe 12 coiled on the outer wall of the compression waveguide 5; in step S10, the working gas to be input into the discharge tube 4 first enters the working gas inlet coil 11, and then enters the discharge tube 4 through the working gas inlet tube 9; in step S50, the gas to be processed to be input into the discharge tube 4 first enters the processing gas inlet coil 12, and then enters the discharge tube 4 through the processing gas inlet tube 10. As can be seen from the above structure, the microwave delivery device 2 generally includes a water-loaded circulator, coupler, and triple-pin adjuster in addition to the compression waveguide 5; the compression waveguide 5 increases the energy density of the microwave input from the microwave generator 1, and increases the efficiency of generating plasma. Working gas firstly enters the working gas inlet coil pipe 11, the working gas inlet coil pipe 11 is coiled on the outer wall of the pipe inlet part 6 and carries away heat of the pipe inlet part 6, so that the temperature of the pipe inlet part 6 is reduced, the reliability of the pipe inlet part 6 is improved, the service life is prolonged, meanwhile, the working gas with the increased temperature enters the pipe inlet part 6 of the discharge pipe 4 from the working gas inlet pipe 9, plasma is generated in the microwave-permeable pipe part 7, and finally, the working gas is output from the pipe outlet part 8 and is sprayed out to form flame, and the working gas with the increased temperature also promotes the decomposition of the gas to be treated; the gas to be treated firstly enters the treatment gas inlet coil 12, the treatment gas inlet coil 12 is coiled on the outer wall of the compression waveguide 5 and carries away heat of the compression waveguide 5, so that the temperature of the compression waveguide 5 is reduced, the reliability of the compression waveguide 5 is improved, the service life is prolonged, meanwhile, the gas to be treated with increased temperature enters the tube inlet part 6 of the discharge tube 4 from the treatment gas inlet tube 10, then is decomposed by high-concentration electrons of plasma in the microwave-permeable tube part 7 and finally is output from the tube outlet part 8, and the decomposition of the gas to be treated with increased temperature is accelerated.
Further, the pipe inlet part 6 comprises a metal inlet pipe 13, a heat insulation ceramic seat 14 and vacuum glass 15; the microwave-permeable tube portion 7 comprises a quartz tube; the outlet pipe part 8 comprises a metal outlet pipe; the metal inlet pipe 13, the quartz pipe and the metal outlet pipe are communicated and connected from top to bottom; the top of the metal inlet pipe 13 is provided with a heat insulation ceramic seat 14; vacuum glass 15 is arranged in the heat-insulating ceramic seat 14; a photoelectric sensor 16 is arranged on the top of the heat insulation ceramic seat 14; the metal outlet pipe comprises at least two bent pipes; in step S30, the photoelectric sensor 16 monitors whether or not the quartz tube is bright, and if so, a light signal is transmitted to the control system of the microwave generator 1 to confirm whether or not the working gas in the discharge tube 4 generates plasma. As can be seen from the above structure, the metal inlet pipe 13 and the metal outlet pipe function as a microwave suppressor, and reduce the escape of microwaves from the through-holes in the shield case 3. The heat insulation ceramic seat 14 prevents heat from being transferred from the metal inlet pipe 13 to the photoelectric sensor 16, the vacuum glass 15 also prevents heat of hot working gas and gas to be processed from being transferred to the photoelectric sensor 16, the reliability of the photoelectric sensor 16 is improved, and the photoelectric sensor 16 can observe whether the working gas in the quartz tube discharges or not through the vacuum glass 15; the metal outlet pipe comprises at least two bent pipes, so that the interior of the quartz pipe is ensured to be in a dark state, the photoelectric sensor 16 can more accurately capture a discharge state, and the interference of external light on a light signal is avoided. In the absence of discharge, the photoelectric sensor 16 may be able to transmit fault information to the control system of the microwave generator 1 in time.
Further, in step S40, the control system of the microwave generator 1 receives the light signal and automatically switches the pulse wave operating mode of the microwave generator 1 to the continuous wave operating mode. According to the structure, the control system of the microwave generator 1 receives the light signal sent by the photoelectric sensor 16, determines that the working gas is excited to be ionized, and automatically switches the pulse wave working mode of the microwave generator 1 into the continuous wave working mode at the moment, so that the continuous wave with lower power maintains the generation of plasma.
Further, the microwave plasma torch also comprises a working air inlet valve and a treatment air inlet valve; the working gas inlet valve is used for controlling the input of working gas to the discharge tube 4; the treatment gas inlet valve is used for controlling the input of gas to be treated into the discharge tube 4; in step S10, the control system of the microwave generator 1 controls the working gas inlet valve to open, and the discharge tube 4 inputs working gas; in step S50, the control system of the microwave generator 1 controls the process gas inlet valve to open, and the discharge tube 4 inputs the gas to be processed. According to the structure, the working gas and the gas to be treated are automatically controlled to enter gas, and the automation degree is high. A control system of a microwave generator 1 controls a working air inlet valve to be opened, working gas firstly enters a working air inlet coil 11 and then enters a discharge tube 4 through a working air inlet pipe 9, the microwave generator 1 is started, a working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through a microwave conveying device 2; when working gas is input into the discharge tube 4, firstly, pulse wave is adopted to ignite microwave plasma, under the atmospheric pressure, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is increased to reach the breakdown field intensity required by the breakdown working gas, when the working gas is broken down and ionized to generate plasma, the photoelectric sensor 16 monitors the light in the quartz tube, the light signal is transmitted to the control system of the microwave generator 1, the control system of the microwave generator 1 receives the light signal sent by the photoelectric sensor 16 to determine that the working gas is excited and ionized, at the moment, the pulse wave working mode of the microwave generator 1 is automatically switched to the continuous wave working mode, and the continuous wave with lower power maintains the generation of the plasma. The control system of the microwave generator 1 controls the treatment air inlet valve to be opened, the gas to be treated firstly enters the treatment air inlet coil 12, then enters the discharge tube 4 through the treatment air inlet tube 10, is decomposed by high-concentration electrons of plasma in the microwave permeable tube part 7, and finally is output from the output tube part 8.
The invention has the beneficial effects that:
the invention discloses a microwave plasma torch ignition method, which adopts a microwave plasma torch; inputting working gas into the discharge tube; the microwave generator is started, the working mode is set to be a pulse wave working mode, and the microwave generator inputs pulse waves to working gas in the discharge tube through the microwave conveying device; confirming whether the working gas in the discharge tube generates plasma or not; the working gas in the discharge tube generates plasma, the microwave generator switches the pulse wave working mode into the continuous wave working mode, and the microwave generator inputs continuous waves to the working gas in the discharge tube through the microwave conveying device. The power of the original microwave generator is not enough to enable the working gas to reach the breakdown field intensity and generate plasma, so that a probe and other point discharge structures are needed to be excited to generate a local high-intensity electric field to ionize the working gas, and then the microwave generator maintains the generation of the plasma. According to the ignition method of the microwave plasma torch, a probe and other tip discharge structures are not needed, a complex probe action mechanism is omitted, automatic ignition can be achieved, and the ignition method has the characteristics of stability, reliability, long service life of parts and the like.
Drawings
FIG. 1 is a schematic view of a microwave plasma torch according to the present invention;
FIG. 2 is a schematic view of a partial structure of a microwave plasma torch according to the present invention;
in the drawings: 1-microwave generator, 2-microwave conveying device, 3-shielding shell, 4-discharge tube, 5-compression waveguide, 6-tube inlet part, 7-microwave permeable tube part, 8-tube outlet part, 9-working air inlet tube, 10-treatment air inlet tube, 11-working air inlet coil, 12-treatment air inlet coil, 13-metal inlet tube, 14-heat insulation ceramic seat, 15-vacuum glass and 16-photoelectric sensor.
Detailed Description
The present invention will be described in further detail below with reference to the drawings and the embodiments, but the present invention is not limited to the following examples.
The first embodiment is as follows:
see figures 1-2. A microwave plasma torch ignition method adopts a microwave plasma torch; the microwave plasma torch comprises a microwave generator 1, a microwave conveying device 2, a shielding outer shell 3 and a discharge tube 4; the discharge tube 4 penetrates through the shielding shell 3; a feed port is arranged on the shielding shell 3; the feed port is used for receiving microwaves input by the microwave generator 1 through the microwave conveying device 2; the discharge tube 4 is used for inputting working gas and receiving microwaves input by a feed port; the microwave generator 1 has at least a pulse wave working mode and a continuous wave working mode; the method comprises the following steps:
step S10, inputting a working gas into the discharge tube 4;
step S20, the microwave generator 1 is started, the working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through the microwave conveying device 2;
step S30 of confirming whether or not the working gas in the discharge tube 4 generates plasma;
step S40 is to generate plasma from the working gas in the discharge tube 4, the microwave generator 1 switches the pulse wave mode to the continuous wave mode, and the microwave generator 1 inputs continuous waves to the working gas in the discharge tube 4 through the microwave conveying device 2. According to the structure, the microwave generator 1 is provided with the control system, and the microwave generator 1 can select a pulse wave working mode and a continuous wave working mode; the power of the pulse wave generated by the same microwave generator 1 in the pulse wave working mode is much higher than that of the continuous wave generated in the continuous wave working mode, so that when working gas is input into the discharge tube 4, the pulse wave is firstly adopted to ignite microwave plasma, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is also increased under atmospheric pressure, the breakdown field intensity required for breakdown of the working gas is achieved, when the working gas is broken down and ionized to generate plasma, the pulse wave working mode can be switched into the continuous wave working mode, the microwave generator 1 inputs the continuous wave into the working gas in the discharge tube 4 through the microwave conveying device 2, and at the moment, the plasma can be maintained under lower microwave power. By the method, the microwave plasma torch can be automatically ignited, a point discharge structure and a complex auxiliary action ignition structure are omitted, the operation is convenient, and the microwave generator 1 with lower power can be selected to save the cost. The shielding shell 3 is generally a metal shell, so that microwave leakage is reduced; the discharge tube 4 is a hollow structure, and the working gas can be selected from nitrogen, argon, oxygen, air or the like, and is determined according to the property of the gas to be treated.
Example two:
see figures 1-2. A microwave plasma torch ignition method adopts a microwave plasma torch; the microwave plasma torch comprises a microwave generator 1, a microwave conveying device 2, a shielding outer shell 3 and a discharge tube 4; the discharge tube 4 penetrates through the shielding shell 3; a feed port is arranged on the shielding shell 3; the feed port is used for receiving microwaves input by the microwave generator 1 through the microwave conveying device 2; the discharge tube 4 is used for inputting working gas and receiving microwaves input by a feed port; the microwave generator 1 has at least a pulse wave working mode and a continuous wave working mode; the method comprises the following steps:
step S10, inputting a working gas into the discharge tube 4;
step S20, the microwave generator 1 is started, the working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through the microwave conveying device 2;
step S30 of confirming whether or not the working gas in the discharge tube 4 generates plasma;
step S40 is to generate plasma from the working gas in the discharge tube 4, the microwave generator 1 switches the pulse wave mode to the continuous wave mode, and the microwave generator 1 inputs continuous waves to the working gas in the discharge tube 4 through the microwave conveying device 2. According to the structure, the microwave generator 1 is provided with the control system, and the microwave generator 1 can select a pulse wave working mode and a continuous wave working mode; the power of the pulse wave generated by the same microwave generator 1 in the pulse wave working mode is much higher than that of the continuous wave generated in the continuous wave working mode, so that when working gas is input into the discharge tube 4, the pulse wave is firstly adopted to ignite microwave plasma, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is also increased under atmospheric pressure, the breakdown field intensity required for breakdown of the working gas is achieved, when the working gas is broken down and ionized to generate plasma, the pulse wave working mode can be switched into the continuous wave working mode, the microwave generator 1 inputs the continuous wave into the working gas in the discharge tube 4 through the microwave conveying device 2, and at the moment, the plasma can be maintained under lower microwave power. By the method, the microwave plasma torch can be automatically ignited, a point discharge structure and a complex auxiliary action ignition structure are omitted, the operation is convenient, and the microwave generator 1 with lower power can be selected to save the cost. The shielding shell 3 is generally a metal shell, so that microwave leakage is reduced; the discharge tube 4 is a hollow structure, and the working gas can be selected from nitrogen, argon, oxygen, air or the like, and is determined according to the property of the gas to be treated.
Step S50 follows step S40; step S50 is: the gas to be treated is fed into the discharge tube 4. As can be seen from the above configuration, when the pulse wave operation mode is switched to the continuous wave operation mode, the continuous wave of a lower power can maintain the generation of the plasma, and then the gas to be treated is supplied to the discharge tube 4, so that the gas to be treated can be reacted. For example, the gas to be treated is an exhaust gas generated in the semiconductor industry, and the plasma has high concentration of electrons and can decompose the exhaust gas.
Example three:
see figures 1-2. A microwave plasma torch ignition method adopts a microwave plasma torch; the microwave plasma torch comprises a microwave generator 1, a microwave conveying device 2, a shielding outer shell 3 and a discharge tube 4; the discharge tube 4 penetrates through the shielding shell 3; a feed port is arranged on the shielding shell 3; the feed port is used for receiving microwaves input by the microwave generator 1 through the microwave conveying device 2; the discharge tube 4 is used for inputting working gas and receiving microwaves input by a feed port; the microwave generator 1 has at least a pulse wave working mode and a continuous wave working mode; the method comprises the following steps:
step S10, inputting a working gas into the discharge tube 4;
step S20, the microwave generator 1 is started, the working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through the microwave conveying device 2;
step S30 of confirming whether or not the working gas in the discharge tube 4 generates plasma;
step S40 is to generate plasma from the working gas in the discharge tube 4, the microwave generator 1 switches the pulse wave mode to the continuous wave mode, and the microwave generator 1 inputs continuous waves to the working gas in the discharge tube 4 through the microwave conveying device 2. According to the structure, the microwave generator 1 is provided with the control system, and the microwave generator 1 can select a pulse wave working mode and a continuous wave working mode; the power of the pulse wave generated by the same microwave generator 1 in the pulse wave working mode is much higher than that of the continuous wave generated in the continuous wave working mode, so that when working gas is input into the discharge tube 4, the pulse wave is firstly adopted to ignite microwave plasma, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is also increased under atmospheric pressure, the breakdown field intensity required for breakdown of the working gas is achieved, when the working gas is broken down and ionized to generate plasma, the pulse wave working mode can be switched into the continuous wave working mode, the microwave generator 1 inputs the continuous wave into the working gas in the discharge tube 4 through the microwave conveying device 2, and at the moment, the plasma can be maintained under lower microwave power. By the method, the microwave plasma torch can be automatically ignited, a point discharge structure and a complex auxiliary action ignition structure are omitted, the operation is convenient, and the microwave generator 1 with lower power can be selected to save the cost. The shielding shell 3 is generally a metal shell, so that microwave leakage is reduced; the discharge tube 4 is a hollow structure, and the working gas can be selected from nitrogen, argon, oxygen, air or the like, and is determined according to the property of the gas to be treated.
Step S50 follows step S40; step S50 is: the gas to be treated is fed into the discharge tube 4. As can be seen from the above configuration, when the pulse wave operation mode is switched to the continuous wave operation mode, the continuous wave of a lower power can maintain the generation of the plasma, and then the gas to be treated is supplied to the discharge tube 4, so that the gas to be treated can be reacted. For example, the gas to be treated is an exhaust gas generated in the semiconductor industry, and the plasma has high concentration of electrons and can decompose the exhaust gas.
The microwave conveying device 2 comprises a compression waveguide 5; the discharge tube 4 comprises a tube inlet part 6 positioned above the shielding shell 3, a microwave-permeable tube part 7 positioned inside the shielding shell 3 and a tube outlet part 8 positioned below the shielding shell 3; the inlet pipe part 6 is provided with a working inlet pipe 9 and a treatment inlet pipe 10; the working air inlet pipe 9 is connected with a working air inlet coil pipe 11 coiled on the outer wall of the pipe inlet part 6; the treatment air inlet pipe 10 is connected with a treatment air inlet coil pipe 12 coiled on the outer wall of the compression waveguide 5; in step S10, the working gas to be input into the discharge tube 4 first enters the working gas inlet coil 11, and then enters the discharge tube 4 through the working gas inlet tube 9; in step S50, the gas to be processed to be input into the discharge tube 4 first enters the processing gas inlet coil 12, and then enters the discharge tube 4 through the processing gas inlet tube 10. As can be seen from the above structure, the microwave delivery device 2 generally includes a water-loaded circulator, coupler, and triple-pin adjuster in addition to the compression waveguide 5; the compression waveguide 5 increases the energy density of the microwave input from the microwave generator 1, and increases the efficiency of generating plasma. Working gas firstly enters the working gas inlet coil pipe 11, the working gas inlet coil pipe 11 is coiled on the outer wall of the pipe inlet part 6 and carries away heat of the pipe inlet part 6, so that the temperature of the pipe inlet part 6 is reduced, the reliability of the pipe inlet part 6 is improved, the service life is prolonged, meanwhile, the working gas with the increased temperature enters the pipe inlet part 6 of the discharge pipe 4 from the working gas inlet pipe 9, plasma is generated in the microwave-permeable pipe part 7, and finally, the working gas is output from the pipe outlet part 8 and is sprayed out to form flame, and the working gas with the increased temperature also promotes the decomposition of the gas to be treated; the gas to be treated firstly enters the treatment gas inlet coil 12, the treatment gas inlet coil 12 is coiled on the outer wall of the compression waveguide 5 and carries away heat of the compression waveguide 5, so that the temperature of the compression waveguide 5 is reduced, the reliability of the compression waveguide 5 is improved, the service life is prolonged, meanwhile, the gas to be treated with increased temperature enters the tube inlet part 6 of the discharge tube 4 from the treatment gas inlet tube 10, then is decomposed by high-concentration electrons of plasma in the microwave-permeable tube part 7 and finally is output from the tube outlet part 8, and the decomposition of the gas to be treated with increased temperature is accelerated.
The pipe inlet part 6 comprises a metal inlet pipe 13, a heat-insulating ceramic seat 14 and vacuum glass 15; the microwave-permeable tube portion 7 comprises a quartz tube; the outlet pipe part 8 comprises a metal outlet pipe; the metal inlet pipe 13, the quartz pipe and the metal outlet pipe are communicated and connected from top to bottom; the top of the metal inlet pipe 13 is provided with a heat insulation ceramic seat 14; vacuum glass 15 is arranged in the heat-insulating ceramic seat 14; a photoelectric sensor 16 is arranged on the top of the heat insulation ceramic seat 14; the metal outlet pipe comprises at least two bent pipes; in step S30, the photoelectric sensor 16 monitors whether or not the quartz tube is bright, and if so, a light signal is transmitted to the control system of the microwave generator 1 to confirm whether or not the working gas in the discharge tube 4 generates plasma. As can be seen from the above structure, the metal inlet pipe 13 and the metal outlet pipe function as a microwave suppressor, and reduce the escape of microwaves from the through-holes in the shield case 3. The heat insulation ceramic seat 14 prevents heat from being transferred from the metal inlet pipe 13 to the photoelectric sensor 16, the vacuum glass 15 also prevents heat of hot working gas and gas to be processed from being transferred to the photoelectric sensor 16, the reliability of the photoelectric sensor 16 is improved, and the photoelectric sensor 16 can observe whether the working gas in the quartz tube discharges or not through the vacuum glass 15; the metal outlet pipe comprises at least two bent pipes, so that the interior of the quartz pipe is ensured to be in a dark state, the photoelectric sensor 16 can more accurately capture a discharge state, and the interference of external light on a light signal is avoided.
In step S40, the control system of the microwave generator 1 receives the light signal and automatically switches the pulse wave operating mode of the microwave generator 1 to the continuous wave operating mode. According to the structure, the control system of the microwave generator 1 receives the light signal sent by the photoelectric sensor 16, determines that the working gas is excited to be ionized, and automatically switches the pulse wave working mode of the microwave generator 1 into the continuous wave working mode at the moment, so that the continuous wave with lower power maintains the generation of plasma.
The microwave plasma torch also comprises a working air inlet valve and a treatment air inlet valve; the working gas inlet valve is used for controlling the input of working gas to the discharge tube 4; the treatment gas inlet valve is used for controlling the input of gas to be treated into the discharge tube 4; in step S10, the control system of the microwave generator 1 controls the working gas inlet valve to open, and the discharge tube 4 inputs working gas; in step S50, the control system of the microwave generator 1 controls the process gas inlet valve to open, and the discharge tube 4 inputs the gas to be processed. According to the structure, the working gas and the gas to be treated are automatically controlled to enter gas, and the automation degree is high. A control system of a microwave generator 1 controls a working air inlet valve to be opened, working gas firstly enters a working air inlet coil 11 and then enters a discharge tube 4 through a working air inlet pipe 9, the microwave generator 1 is started, a working mode is set to be a pulse wave working mode, and the microwave generator 1 inputs pulse waves to the working gas in the discharge tube 4 through a microwave conveying device 2; when working gas is input into the discharge tube 4, firstly, pulse wave is adopted to ignite microwave plasma, under the atmospheric pressure, the electric field intensity generated in the discharge tube 4 of the microwave plasma torch is increased to reach the breakdown field intensity required by the breakdown working gas, when the working gas is broken down and ionized to generate plasma, the photoelectric sensor 16 monitors the light in the quartz tube, the light signal is transmitted to the control system of the microwave generator 1, the control system of the microwave generator 1 receives the light signal sent by the photoelectric sensor 16 to determine that the working gas is excited and ionized, at the moment, the pulse wave working mode of the microwave generator 1 is automatically switched to the continuous wave working mode, and the continuous wave with lower power maintains the generation of the plasma. The control system of the microwave generator 1 controls the treatment air inlet valve to be opened, the gas to be treated firstly enters the treatment air inlet coil 12, then enters the discharge tube 4 through the treatment air inlet tube 10, is decomposed by high-concentration electrons of plasma in the microwave permeable tube part 7, and finally is output from the output tube part 8.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (2)
1. A method of igniting a microwave plasma torch, comprising: adopting a microwave plasma torch; the microwave plasma torch comprises a microwave generator (1), a microwave conveying device (2), a shielding shell (3) and a discharge tube (4); the discharge tube (4) penetrates through the shielding shell (3); a feed port is arranged on the shielding shell (3); the feed port is used for receiving microwaves input by the microwave generator (1) through the microwave conveying device (2); the discharge tube (4) is used for inputting working gas and receiving microwaves input by the feed port; the microwave generator (1) has at least a pulse wave working mode and a continuous wave working mode; the method comprises the following steps:
step S10, inputting working gas into the discharge tube (4);
step S20, the microwave generator (1) is started, the working mode is set to be a pulse wave working mode, and the microwave generator (1) inputs pulse waves to the working gas in the discharge tube (4) through the microwave conveying device (2);
step S30, confirming whether the working gas in the discharge tube (4) generates plasma;
step S40, generating plasma by working gas in the discharge tube (4), switching the pulse wave working mode into a continuous wave working mode by the microwave generator (1), and inputting continuous waves into the working gas in the discharge tube (4) by the microwave generator (1) through the microwave conveying device (2);
step S50 follows step S40; step S50 is: inputting gas to be treated into the discharge tube (4);
the microwave conveying device (2) comprises a compression waveguide (5); the discharge tube (4) comprises a tube inlet part (6) positioned above the shielding shell (3), a microwave-permeable tube part (7) positioned in the shielding shell (3) and a tube outlet part (8) positioned below the shielding shell (3); the inlet pipe part (6) is provided with a working inlet pipe (9) and a processing inlet pipe (10); the working air inlet pipe (9) is connected with a working air inlet coil pipe (11) coiled on the outer wall of the pipe inlet part (6); the treatment air inlet pipe (10) is connected with a treatment air inlet coil pipe (12) coiled on the outer wall of the compression waveguide (5); in the step S10, the working gas to be input into the discharge tube (4) first enters the working gas inlet coil (11), and then enters the discharge tube (4) through the working gas inlet pipe (9); in the step S50, the gas to be processed to be input into the discharge tube (4) first enters the processing gas inlet coil (12), and then enters the discharge tube (4) through the processing gas inlet pipe (10);
the pipe inlet part (6) comprises a metal inlet pipe (13), a heat-insulating ceramic seat (14) and vacuum glass (15); the microwave-permeable tube part (7) comprises a quartz tube; the pipe outlet part (8) comprises a metal outlet pipe; the metal inlet pipe (13), the quartz pipe and the metal outlet pipe are communicated and connected from top to bottom; the top of the metal inlet pipe (13) is provided with a heat insulation ceramic seat (14); vacuum glass (15) is arranged in the heat-insulating ceramic seat (14); a photoelectric sensor (16) is arranged at the top of the heat-insulating ceramic seat (14); the metal outlet pipe comprises at least two bent pipes; in the step S30, the mode of confirming whether the working gas in the discharge tube (4) generates plasma is that whether the quartz tube is bright is monitored by the photoelectric sensor (16), if so, a bright signal is transmitted to the control system of the microwave generator (1);
in step S40, when the control system of the microwave generator (1) receives the light signal, the pulse wave operating mode of the microwave generator (1) is automatically switched to the continuous wave operating mode.
2. A method of igniting a microwave plasma torch as in claim 1, wherein: the microwave plasma torch also comprises a working air inlet valve and a treatment air inlet valve; the working gas inlet valve is used for controlling the input of working gas into the discharge tube (4); the treatment gas inlet valve is used for controlling the input of gas to be treated into the discharge tube (4); in the step S10, the control system of the microwave generator (1) controls the working air inlet valve to be opened, and the discharge tube (4) inputs working gas; in the step S50, the control system of the microwave generator (1) controls the treatment gas inlet valve to be opened, and the discharge tube (4) inputs the gas to be treated.
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