CN110402008B - Cooling gas distribution device suitable for high-frequency plasma torch - Google Patents
Cooling gas distribution device suitable for high-frequency plasma torch Download PDFInfo
- Publication number
- CN110402008B CN110402008B CN201910788099.9A CN201910788099A CN110402008B CN 110402008 B CN110402008 B CN 110402008B CN 201910788099 A CN201910788099 A CN 201910788099A CN 110402008 B CN110402008 B CN 110402008B
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- Prior art keywords
- air pipe
- copper head
- quartz tube
- wall
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000112 cooling gas Substances 0.000 title claims abstract description 13
- 241000271510 Agkistrodon contortrix Species 0.000 claims abstract description 61
- 239000010453 quartz Substances 0.000 claims abstract description 60
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 60
- 239000007789 gas Substances 0.000 claims abstract description 48
- 239000010425 asbestos Substances 0.000 claims description 5
- 229910052895 riebeckite Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000004321 preservation Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 abstract description 6
- 238000004880 explosion Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010791 quenching Methods 0.000 description 6
- 230000000171 quenching effect Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
Abstract
The invention discloses a cooling gas distribution device suitable for a high-frequency plasma torch, wherein a gas outlet of a gas feeding pipe extends to the lower end of an inner quartz tube, an upper gas pipe a and an upper gas pipe b penetrate through the side wall of an upper copper head to be in contact with the inner quartz tube, an edge axial gas pipe a and an edge axial gas pipe b penetrate through the side wall of a lower copper head to be in contact with the inner quartz tube, a lower gas pipe a and a lower gas pipe b penetrate through the side wall of the lower copper head to be in contact with an outer quartz tube, an edge tangential gas pipe a and an edge tangential gas pipe b penetrate through the side wall of the lower copper head to be in contact with the inner quartz tube, and an edge tangential gas pipe a and an edge tangential gas pipe b are respectively tangential with the tube wall of the inner quartz tube. The air inflow of the cooling gas is regulated and controlled through the gas flowmeter, so that the cooling of the inner wall of the quartz tube can be realized, the transverse temperature of the plasma flame can be rapidly reduced, the quartz tube is not subjected to high-temperature explosion by the plasma flame, and the plasma flame is not disturbed by the impact of the gas flow.
Description
Technical Field
The invention belongs to the technical field of high-temperature reaction equipment, and particularly relates to a cooling gas distribution device suitable for a high-frequency plasma torch.
Background
In the design of a high-frequency plasma torch, as the quartz tube has excellent thermal shock performance, the quartz tube is often used as plasma torch constraint equipment, but the high temperature generated by plasma reaches 7000-10000 ℃, the quenching and quenching heat of the quartz tube is still easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments. The design of the cooling system of the torch needs to consider the disturbance of cooling gas to the plasma torch, and needs to fully ensure that the quartz tube wall is not cracked by thermal shock, and the trend of the air flow and the arrangement of the air inlet are properly designed.
Disclosure of Invention
The invention aims to solve the technical problems that: the cooling gas distribution device suitable for the high-frequency plasma torch is provided to solve the technical problems that in the prior art, the quartz tube quenching and quenching of the high-frequency plasma torch is still easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments.
The technical scheme of the invention is as follows:
the cooling gas distribution device suitable for the high-frequency plasma torch comprises an upper copper head, wherein the upper copper head is in threaded connection with a lower copper head, the upper copper head and the lower copper head are of hollow structures, internal threads are formed on the inner wall of each hollow structure, the outer wall of an inner quartz tube is wrapped with heat preservation asbestos and then is clamped on the internal threads of the inner walls of the hollow structures of the upper copper head and the lower copper head, and the outer quartz tube is wrapped with heat preservation asbestos and then is clamped on the internal threads of the lower end of the hollow structure of the lower copper head; the gas pipe is clamped at the center of the upper copper head, and the gas outlet of the gas pipe extends to the lower end of the inner quartz pipe; the upper air pipe a and the upper air pipe b penetrate through the side wall of the upper copper head to be in contact with the outer wall of the inner quartz tube; the side axial air pipe a and the side axial air pipe b penetrate through the side wall of the lower copper head to contact with the outer wall of the inner quartz tube; the lower air pipe a and the lower air pipe b pass through the side wall of the lower copper head to be contacted with the outer wall of the outer quartz tube; the tangential air pipe a and the tangential air pipe b penetrate through the side wall of the lower copper head to contact with the outer wall of the inner quartz tube.
The connecting line of the upper air pipe a and the upper air pipe b passes through the center of the upper copper head; the connecting line of the side axial air pipe a and the side axial air pipe b passes through the center of the lower copper head; the connecting line of the lower air pipe a and the lower air pipe b passes through the center of the lower copper head; the tangential air pipe a and the tangential air pipe b are respectively tangential with the pipe wall of the inner quartz pipe.
The upper copper head and the lower copper head are made of high-purity copper.
The wall thickness of the inner quartz tube and the wall thickness of the outer quartz tube are 4 mm-6 mm.
The side tangential air pipe a and the side tangential air pipe b are respectively parallel to the side axial air pipe b.
The air inflow of the air pipe is 2-4 m 3 /h; the air inflow of the upper air pipe a and the upper air pipe b is respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a and the side axial air pipe b are respectively 0-8 m 3 And (h) the air inflow of the tangential air pipe a and the tangential air pipe b is respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a and the lower air pipe b is greater than 10 m 3 /h。
The invention has the beneficial effects that:
the working principle of the invention is as follows: by designing the gas distribution system, each gas pipe can ensure that cooling gas enters the inner wall and the outer wall of the two layers of quartz pipes, the transverse temperature of plasma flame can be rapidly reduced in operation, the quartz pipes are not burst by the plasma flame at high temperature, cooling air is continuously supplied for a period of time when the machine is stopped, the inner and outer temperature of the quartz pipes are not excessively different and burst, the quartz pipes can continuously work, two pairs of gas pipes, namely the side axial gas pipe a and the side axial gas pipe b and the side tangential gas pipe a and the side tangential gas pipe b, can be simultaneously used or only one pair of gas pipes is used, the inapplicable gas pipe is clamped by a gas pipe clamp at the front section of the gas pipe, and the gas pipe distribution scheme can realize the full cooling of the inner quartz pipes and the adjustment of cooling modes.
According to the invention, the upper air pipe a, the upper air pipe b, the side axial air pipe a, the side axial air pipe b, the side tangential air pipe a, the side tangential air pipe b, the lower air pipe a and the lower air pipe b are designed to form a complete cooling air circulation flow, so that the temperature of the quartz tube can be quickly reduced when the quartz tube is at a high temperature, and the working temperature of the quartz tube is effectively reduced.
Compared with the prior art, the invention can quantitatively, quantitatively and uniformly feed air, supply ionized air to the plasma, ensure that the quartz tube is not affected by thermal shock and is burst quickly, prolong the service life of the quartz tube and reduce the work of frequently replacing the quartz tube; the technical problems that in the prior art, the quartz tube quenching and quenching of the high-frequency plasma torch still is easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments are solved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a cross-sectional view of the A-A side of the present invention;
in the figure, 1, an upper copper head, 2, a lower copper head, 3, an inner quartz tube, 4, an outer quartz tube, 5, a material gas tube, 6-1, an upper gas tube a,6-2, an upper gas tube b,7-1, a side axial gas tube a,7-2, a side axial gas tube b,8-1, a side tangential gas tube a,8-2, a side tangential gas tube b,9-1, a lower gas tube a,9-2 and a lower gas tube b.
The specific embodiment is as follows:
the invention will be further described with reference to the accompanying drawings and specific examples:
referring to fig. 1 and 2, a cooling gas distribution device suitable for a high-frequency plasma torch comprises an upper copper head 1, wherein the upper copper head 1 and a lower copper head 2 are in threaded connection, the upper copper head 1 and the lower copper head 2 are of hollow structures, internal threads are arranged on the inner wall of the hollow structures, an outer wall of an inner quartz tube 3 is wrapped with heat insulation asbestos and then is clamped on the internal threads of the inner wall of the hollow structures of the upper copper head 1 and the lower copper head 2, an outer quartz tube 4 is wrapped with heat insulation asbestos and then is clamped on the internal threads of the lower end of the hollow structures of the lower copper head 2, a gas outlet of the gas inlet tube 5 is clamped in the center of the upper copper head 1, a gas outlet of the gas inlet tube 5 extends to the lower end of the inner quartz tube 3, an upper gas tube a6-1 and an upper gas tube b6-2 penetrate through the side wall of the upper copper head 1 and then contact with the inner quartz tube 3, the connecting line of the upper air pipe a6-1 and the upper air pipe b6-2 passes through the center of the upper copper head 1, the side axial air pipe a7-1 and the side axial air pipe b7-2 pass through the side wall of the lower copper head 2 to be contacted with the inner quartz tube 3, the connecting line of the side axial air pipe a7-1 and the side axial air pipe b7-2 passes through the center of the lower copper head 2, the side wall of the lower copper head 2 passes through the side wall of the lower copper head 2 to be contacted with the outer quartz tube 4, the connecting line of the lower air pipe a9-1 and the lower air pipe b9-2 passes through the center of the lower copper head 2, the side wall of the side tangential air pipe a8-1 and the side tangential air pipe b8-2 pass through the side wall of the lower copper head 2 to be contacted with the inner quartz tube 3, the edge tangential air pipe a8-1 and the edge tangential air pipe b8-2 are respectively tangential to the pipe wall of the inner quartz pipe 3.
The upper copper head 1 and the lower copper head 2 are made of high-purity copper.
The wall thicknesses of the inner quartz tube 3 and the outer quartz tube 4 are 4 mm-6 mm.
The side tangential air pipe a8-1 and the side tangential air pipe b8-2 are respectively parallel to the side axial air pipe b 7-2.
The air flow of each air pipe is controlled by an air compressor, and the air inflow of the air pipe 5 is 2-4 m 3 /h; the air inflow of the upper air pipe a6-1 and the upper air pipe b6-2 are respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a7-1 and the side axial air pipe b7-2 are respectively 0-8 m 3 And/h, the air inflow of the tangential air pipe a8-1 and the tangential air pipe b8-2 is respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a9-1 and the lower air pipe b9-2 is more than 10 m 3 /h; the selection of the gas flow can effectively avoid disturbance to the plasma torch.
Claims (3)
1. The utility model provides a cooling gas distribution device suitable for high frequency plasma torch, it includes copper head (1) including going up, go up copper head (1) and lower copper head (2) threaded connection, go up copper head (1) with lower copper head (2) are hollow structure, are provided with the internal thread on the hollow structure inner wall, its characterized in that: the outer wall of the inner quartz tube (3) is wrapped with heat preservation asbestos and then is clamped with the hollow junction of the upper copper head (1) and the lower copper head (2)An inner thread of the inner wall is covered by an outer quartz tube (4) and then is clamped on an inner thread at the lower end of the hollow structure of the lower copper head (2); the gas feeding pipe (5) is clamped at the center of the upper copper head (1), and a gas outlet of the gas feeding pipe (5) extends to the lower end of the inner quartz tube (3); the upper air pipe a (6-1) and the upper air pipe b (6-2) penetrate through the side wall of the upper copper head (1) to be in contact with the outer wall of the inner quartz tube (3); the side axial air pipe a (7-1) and the side axial air pipe b (7-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the inner quartz tube (3); the lower air pipe a (9-1) and the lower air pipe b (9-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the outer quartz tube (4); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the inner quartz tube (3); the connecting line of the upper air pipe a (6-1) and the upper air pipe b (6-2) passes through the center of the upper copper head (1); the connecting line of the side axial air pipe a (7-1) and the side axial air pipe b (7-2) passes through the center of the lower copper head (2); the connecting line of the lower air pipe a (9-1) and the lower air pipe b (9-2) passes through the center of the lower copper head (2); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) are respectively tangential with the pipe wall of the inner quartz pipe (3); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) are respectively parallel to the side axial air pipe b (7-2); the air inflow of the air pipe (5) is 2-4 m 3 /h; the air inflow of the upper air pipe a (6-1) and the upper air pipe b (6-2) are respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a (7-1) and the side axial air pipe b (7-2) are respectively 0-8 m 3 And/h, the air inflow of the tangential air pipe a (8-1) and the tangential air pipe b (8-2) are respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a (9-1) and the lower air pipe b (9-2) is more than 10 m 3 /h。
2. A cooling gas distribution apparatus for a high frequency plasma torch according to claim 1, wherein: the upper copper head (1) and the lower copper head (2) are made of high-purity copper.
3. A cooling gas distribution apparatus for a high frequency plasma torch according to claim 1, wherein: the wall thicknesses of the inner quartz tube (3) and the outer quartz tube (4) are 4 mm-6 mm.
Priority Applications (1)
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CN201910788099.9A CN110402008B (en) | 2019-08-26 | 2019-08-26 | Cooling gas distribution device suitable for high-frequency plasma torch |
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CN201910788099.9A CN110402008B (en) | 2019-08-26 | 2019-08-26 | Cooling gas distribution device suitable for high-frequency plasma torch |
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CN110402008B true CN110402008B (en) | 2024-02-06 |
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2019
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