CN110402008B - Cooling gas distribution device suitable for high-frequency plasma torch - Google Patents

Cooling gas distribution device suitable for high-frequency plasma torch Download PDF

Info

Publication number
CN110402008B
CN110402008B CN201910788099.9A CN201910788099A CN110402008B CN 110402008 B CN110402008 B CN 110402008B CN 201910788099 A CN201910788099 A CN 201910788099A CN 110402008 B CN110402008 B CN 110402008B
Authority
CN
China
Prior art keywords
air pipe
copper head
quartz tube
wall
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910788099.9A
Other languages
Chinese (zh)
Other versions
CN110402008A (en
Inventor
高跃生
王翔
杨军
沈志平
袁江文
代礼彬
欧阳昌伟
聂矗
夏锐
倪凯凯
梁烛
秦欣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guizhou Zhengye Longteng New Material Development Co ltd
Original Assignee
Guizhou Zhengye Longteng New Material Development Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guizhou Zhengye Longteng New Material Development Co ltd filed Critical Guizhou Zhengye Longteng New Material Development Co ltd
Priority to CN201910788099.9A priority Critical patent/CN110402008B/en
Publication of CN110402008A publication Critical patent/CN110402008A/en
Application granted granted Critical
Publication of CN110402008B publication Critical patent/CN110402008B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/28Cooling arrangements

Abstract

The invention discloses a cooling gas distribution device suitable for a high-frequency plasma torch, wherein a gas outlet of a gas feeding pipe extends to the lower end of an inner quartz tube, an upper gas pipe a and an upper gas pipe b penetrate through the side wall of an upper copper head to be in contact with the inner quartz tube, an edge axial gas pipe a and an edge axial gas pipe b penetrate through the side wall of a lower copper head to be in contact with the inner quartz tube, a lower gas pipe a and a lower gas pipe b penetrate through the side wall of the lower copper head to be in contact with an outer quartz tube, an edge tangential gas pipe a and an edge tangential gas pipe b penetrate through the side wall of the lower copper head to be in contact with the inner quartz tube, and an edge tangential gas pipe a and an edge tangential gas pipe b are respectively tangential with the tube wall of the inner quartz tube. The air inflow of the cooling gas is regulated and controlled through the gas flowmeter, so that the cooling of the inner wall of the quartz tube can be realized, the transverse temperature of the plasma flame can be rapidly reduced, the quartz tube is not subjected to high-temperature explosion by the plasma flame, and the plasma flame is not disturbed by the impact of the gas flow.

Description

Cooling gas distribution device suitable for high-frequency plasma torch
Technical Field
The invention belongs to the technical field of high-temperature reaction equipment, and particularly relates to a cooling gas distribution device suitable for a high-frequency plasma torch.
Background
In the design of a high-frequency plasma torch, as the quartz tube has excellent thermal shock performance, the quartz tube is often used as plasma torch constraint equipment, but the high temperature generated by plasma reaches 7000-10000 ℃, the quenching and quenching heat of the quartz tube is still easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments. The design of the cooling system of the torch needs to consider the disturbance of cooling gas to the plasma torch, and needs to fully ensure that the quartz tube wall is not cracked by thermal shock, and the trend of the air flow and the arrangement of the air inlet are properly designed.
Disclosure of Invention
The invention aims to solve the technical problems that: the cooling gas distribution device suitable for the high-frequency plasma torch is provided to solve the technical problems that in the prior art, the quartz tube quenching and quenching of the high-frequency plasma torch is still easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments.
The technical scheme of the invention is as follows:
the cooling gas distribution device suitable for the high-frequency plasma torch comprises an upper copper head, wherein the upper copper head is in threaded connection with a lower copper head, the upper copper head and the lower copper head are of hollow structures, internal threads are formed on the inner wall of each hollow structure, the outer wall of an inner quartz tube is wrapped with heat preservation asbestos and then is clamped on the internal threads of the inner walls of the hollow structures of the upper copper head and the lower copper head, and the outer quartz tube is wrapped with heat preservation asbestos and then is clamped on the internal threads of the lower end of the hollow structure of the lower copper head; the gas pipe is clamped at the center of the upper copper head, and the gas outlet of the gas pipe extends to the lower end of the inner quartz pipe; the upper air pipe a and the upper air pipe b penetrate through the side wall of the upper copper head to be in contact with the outer wall of the inner quartz tube; the side axial air pipe a and the side axial air pipe b penetrate through the side wall of the lower copper head to contact with the outer wall of the inner quartz tube; the lower air pipe a and the lower air pipe b pass through the side wall of the lower copper head to be contacted with the outer wall of the outer quartz tube; the tangential air pipe a and the tangential air pipe b penetrate through the side wall of the lower copper head to contact with the outer wall of the inner quartz tube.
The connecting line of the upper air pipe a and the upper air pipe b passes through the center of the upper copper head; the connecting line of the side axial air pipe a and the side axial air pipe b passes through the center of the lower copper head; the connecting line of the lower air pipe a and the lower air pipe b passes through the center of the lower copper head; the tangential air pipe a and the tangential air pipe b are respectively tangential with the pipe wall of the inner quartz pipe.
The upper copper head and the lower copper head are made of high-purity copper.
The wall thickness of the inner quartz tube and the wall thickness of the outer quartz tube are 4 mm-6 mm.
The side tangential air pipe a and the side tangential air pipe b are respectively parallel to the side axial air pipe b.
The air inflow of the air pipe is 2-4 m 3 /h; the air inflow of the upper air pipe a and the upper air pipe b is respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a and the side axial air pipe b are respectively 0-8 m 3 And (h) the air inflow of the tangential air pipe a and the tangential air pipe b is respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a and the lower air pipe b is greater than 10 m 3 /h。
The invention has the beneficial effects that:
the working principle of the invention is as follows: by designing the gas distribution system, each gas pipe can ensure that cooling gas enters the inner wall and the outer wall of the two layers of quartz pipes, the transverse temperature of plasma flame can be rapidly reduced in operation, the quartz pipes are not burst by the plasma flame at high temperature, cooling air is continuously supplied for a period of time when the machine is stopped, the inner and outer temperature of the quartz pipes are not excessively different and burst, the quartz pipes can continuously work, two pairs of gas pipes, namely the side axial gas pipe a and the side axial gas pipe b and the side tangential gas pipe a and the side tangential gas pipe b, can be simultaneously used or only one pair of gas pipes is used, the inapplicable gas pipe is clamped by a gas pipe clamp at the front section of the gas pipe, and the gas pipe distribution scheme can realize the full cooling of the inner quartz pipes and the adjustment of cooling modes.
According to the invention, the upper air pipe a, the upper air pipe b, the side axial air pipe a, the side axial air pipe b, the side tangential air pipe a, the side tangential air pipe b, the lower air pipe a and the lower air pipe b are designed to form a complete cooling air circulation flow, so that the temperature of the quartz tube can be quickly reduced when the quartz tube is at a high temperature, and the working temperature of the quartz tube is effectively reduced.
Compared with the prior art, the invention can quantitatively, quantitatively and uniformly feed air, supply ionized air to the plasma, ensure that the quartz tube is not affected by thermal shock and is burst quickly, prolong the service life of the quartz tube and reduce the work of frequently replacing the quartz tube; the technical problems that in the prior art, the quartz tube quenching and quenching of the high-frequency plasma torch still is easy to burst, so that the quartz tube wall needs to be replaced frequently, and huge trouble and inconvenience are brought to production experiments are solved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a cross-sectional view of the A-A side of the present invention;
in the figure, 1, an upper copper head, 2, a lower copper head, 3, an inner quartz tube, 4, an outer quartz tube, 5, a material gas tube, 6-1, an upper gas tube a,6-2, an upper gas tube b,7-1, a side axial gas tube a,7-2, a side axial gas tube b,8-1, a side tangential gas tube a,8-2, a side tangential gas tube b,9-1, a lower gas tube a,9-2 and a lower gas tube b.
The specific embodiment is as follows:
the invention will be further described with reference to the accompanying drawings and specific examples:
referring to fig. 1 and 2, a cooling gas distribution device suitable for a high-frequency plasma torch comprises an upper copper head 1, wherein the upper copper head 1 and a lower copper head 2 are in threaded connection, the upper copper head 1 and the lower copper head 2 are of hollow structures, internal threads are arranged on the inner wall of the hollow structures, an outer wall of an inner quartz tube 3 is wrapped with heat insulation asbestos and then is clamped on the internal threads of the inner wall of the hollow structures of the upper copper head 1 and the lower copper head 2, an outer quartz tube 4 is wrapped with heat insulation asbestos and then is clamped on the internal threads of the lower end of the hollow structures of the lower copper head 2, a gas outlet of the gas inlet tube 5 is clamped in the center of the upper copper head 1, a gas outlet of the gas inlet tube 5 extends to the lower end of the inner quartz tube 3, an upper gas tube a6-1 and an upper gas tube b6-2 penetrate through the side wall of the upper copper head 1 and then contact with the inner quartz tube 3, the connecting line of the upper air pipe a6-1 and the upper air pipe b6-2 passes through the center of the upper copper head 1, the side axial air pipe a7-1 and the side axial air pipe b7-2 pass through the side wall of the lower copper head 2 to be contacted with the inner quartz tube 3, the connecting line of the side axial air pipe a7-1 and the side axial air pipe b7-2 passes through the center of the lower copper head 2, the side wall of the lower copper head 2 passes through the side wall of the lower copper head 2 to be contacted with the outer quartz tube 4, the connecting line of the lower air pipe a9-1 and the lower air pipe b9-2 passes through the center of the lower copper head 2, the side wall of the side tangential air pipe a8-1 and the side tangential air pipe b8-2 pass through the side wall of the lower copper head 2 to be contacted with the inner quartz tube 3, the edge tangential air pipe a8-1 and the edge tangential air pipe b8-2 are respectively tangential to the pipe wall of the inner quartz pipe 3.
The upper copper head 1 and the lower copper head 2 are made of high-purity copper.
The wall thicknesses of the inner quartz tube 3 and the outer quartz tube 4 are 4 mm-6 mm.
The side tangential air pipe a8-1 and the side tangential air pipe b8-2 are respectively parallel to the side axial air pipe b 7-2.
The air flow of each air pipe is controlled by an air compressor, and the air inflow of the air pipe 5 is 2-4 m 3 /h; the air inflow of the upper air pipe a6-1 and the upper air pipe b6-2 are respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a7-1 and the side axial air pipe b7-2 are respectively 0-8 m 3 And/h, the air inflow of the tangential air pipe a8-1 and the tangential air pipe b8-2 is respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a9-1 and the lower air pipe b9-2 is more than 10 m 3 /h; the selection of the gas flow can effectively avoid disturbance to the plasma torch.

Claims (3)

1. The utility model provides a cooling gas distribution device suitable for high frequency plasma torch, it includes copper head (1) including going up, go up copper head (1) and lower copper head (2) threaded connection, go up copper head (1) with lower copper head (2) are hollow structure, are provided with the internal thread on the hollow structure inner wall, its characterized in that: the outer wall of the inner quartz tube (3) is wrapped with heat preservation asbestos and then is clamped with the hollow junction of the upper copper head (1) and the lower copper head (2)An inner thread of the inner wall is covered by an outer quartz tube (4) and then is clamped on an inner thread at the lower end of the hollow structure of the lower copper head (2); the gas feeding pipe (5) is clamped at the center of the upper copper head (1), and a gas outlet of the gas feeding pipe (5) extends to the lower end of the inner quartz tube (3); the upper air pipe a (6-1) and the upper air pipe b (6-2) penetrate through the side wall of the upper copper head (1) to be in contact with the outer wall of the inner quartz tube (3); the side axial air pipe a (7-1) and the side axial air pipe b (7-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the inner quartz tube (3); the lower air pipe a (9-1) and the lower air pipe b (9-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the outer quartz tube (4); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) penetrate through the side wall of the lower copper head (2) to be in contact with the outer wall of the inner quartz tube (3); the connecting line of the upper air pipe a (6-1) and the upper air pipe b (6-2) passes through the center of the upper copper head (1); the connecting line of the side axial air pipe a (7-1) and the side axial air pipe b (7-2) passes through the center of the lower copper head (2); the connecting line of the lower air pipe a (9-1) and the lower air pipe b (9-2) passes through the center of the lower copper head (2); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) are respectively tangential with the pipe wall of the inner quartz pipe (3); the side tangential air pipe a (8-1) and the side tangential air pipe b (8-2) are respectively parallel to the side axial air pipe b (7-2); the air inflow of the air pipe (5) is 2-4 m 3 /h; the air inflow of the upper air pipe a (6-1) and the upper air pipe b (6-2) are respectively 3-6 m 3 /h; the air inflow of the side axial air pipe a (7-1) and the side axial air pipe b (7-2) are respectively 0-8 m 3 And/h, the air inflow of the tangential air pipe a (8-1) and the tangential air pipe b (8-2) are respectively 0-8 m 3 And/h, the air inflow of the lower air pipe a (9-1) and the lower air pipe b (9-2) is more than 10 m 3 /h。
2. A cooling gas distribution apparatus for a high frequency plasma torch according to claim 1, wherein: the upper copper head (1) and the lower copper head (2) are made of high-purity copper.
3. A cooling gas distribution apparatus for a high frequency plasma torch according to claim 1, wherein: the wall thicknesses of the inner quartz tube (3) and the outer quartz tube (4) are 4 mm-6 mm.
CN201910788099.9A 2019-08-26 2019-08-26 Cooling gas distribution device suitable for high-frequency plasma torch Active CN110402008B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910788099.9A CN110402008B (en) 2019-08-26 2019-08-26 Cooling gas distribution device suitable for high-frequency plasma torch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910788099.9A CN110402008B (en) 2019-08-26 2019-08-26 Cooling gas distribution device suitable for high-frequency plasma torch

Publications (2)

Publication Number Publication Date
CN110402008A CN110402008A (en) 2019-11-01
CN110402008B true CN110402008B (en) 2024-02-06

Family

ID=68329021

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910788099.9A Active CN110402008B (en) 2019-08-26 2019-08-26 Cooling gas distribution device suitable for high-frequency plasma torch

Country Status (1)

Country Link
CN (1) CN110402008B (en)

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1083538A (en) * 1992-08-29 1994-03-09 中国科学院化工冶金研究所 The preparing zinc-oxide by use of plasma method Processes and apparatus
KR20110123375A (en) * 2010-05-07 2011-11-15 한국과학기술연구원 High efficient plasma reactor for thermal destruction processes of high concentrated perfluorocompounds gases
KR20120017166A (en) * 2010-08-18 2012-02-28 재단법인 철원플라즈마 산업기술연구원 Structure for plasma torch electrode of manufacturing nano powder
CN103079329A (en) * 2012-12-26 2013-05-01 中国航天空气动力技术研究院 High-pressure plasma ignition device
CN104219863A (en) * 2014-09-23 2014-12-17 江苏大学 Double-medium low-temperature plasma generator
CN106817833A (en) * 2017-02-24 2017-06-09 中国航天空气动力技术研究院 Bispinor high-frequency induction plasma generator
CN106925790A (en) * 2015-12-30 2017-07-07 四平市高斯达纳米材料设备有限公司 Catalytic behavior of materials water cooling quartz light fixture
CN107020386A (en) * 2017-05-15 2017-08-08 中国航天空气动力技术研究院 A kind of air intake assembly of nodularization powder high-frequency induction plasma heater
CN107087339A (en) * 2017-07-03 2017-08-22 李容毅 A kind of enhanced microwave plasma torch generating means of two-chamber excitation
CN206618689U (en) * 2016-12-15 2017-11-07 伊创仪器科技(广州)有限公司 A kind of removable Microwave Induced Plasma torch pipe
CN206839176U (en) * 2017-05-15 2018-01-05 中国航天空气动力技术研究院 A kind of air intake assembly of nodularization powder high-frequency induction plasma heater
CN107617320A (en) * 2017-10-23 2018-01-23 大连理工大学 A kind of device using Microwave plasma treatment waste gas
CN108901115A (en) * 2018-09-19 2018-11-27 中国空气动力研究与发展中心超高速空气动力研究所 A kind of plasma generator
CN109041395A (en) * 2018-09-19 2018-12-18 中国空气动力研究与发展中心超高速空气动力研究所 A kind of air-cooling apparatus and plasma generator for plasma generator
CN210381424U (en) * 2019-08-26 2020-04-21 贵州正业龙腾新材料开发有限公司 Cooling gas distribution structure suitable for high-frequency plasma torch

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1083538A (en) * 1992-08-29 1994-03-09 中国科学院化工冶金研究所 The preparing zinc-oxide by use of plasma method Processes and apparatus
KR20110123375A (en) * 2010-05-07 2011-11-15 한국과학기술연구원 High efficient plasma reactor for thermal destruction processes of high concentrated perfluorocompounds gases
KR20120017166A (en) * 2010-08-18 2012-02-28 재단법인 철원플라즈마 산업기술연구원 Structure for plasma torch electrode of manufacturing nano powder
CN103079329A (en) * 2012-12-26 2013-05-01 中国航天空气动力技术研究院 High-pressure plasma ignition device
CN104219863A (en) * 2014-09-23 2014-12-17 江苏大学 Double-medium low-temperature plasma generator
CN106925790A (en) * 2015-12-30 2017-07-07 四平市高斯达纳米材料设备有限公司 Catalytic behavior of materials water cooling quartz light fixture
CN206618689U (en) * 2016-12-15 2017-11-07 伊创仪器科技(广州)有限公司 A kind of removable Microwave Induced Plasma torch pipe
CN106817833A (en) * 2017-02-24 2017-06-09 中国航天空气动力技术研究院 Bispinor high-frequency induction plasma generator
CN107020386A (en) * 2017-05-15 2017-08-08 中国航天空气动力技术研究院 A kind of air intake assembly of nodularization powder high-frequency induction plasma heater
CN206839176U (en) * 2017-05-15 2018-01-05 中国航天空气动力技术研究院 A kind of air intake assembly of nodularization powder high-frequency induction plasma heater
CN107087339A (en) * 2017-07-03 2017-08-22 李容毅 A kind of enhanced microwave plasma torch generating means of two-chamber excitation
CN107617320A (en) * 2017-10-23 2018-01-23 大连理工大学 A kind of device using Microwave plasma treatment waste gas
CN108901115A (en) * 2018-09-19 2018-11-27 中国空气动力研究与发展中心超高速空气动力研究所 A kind of plasma generator
CN109041395A (en) * 2018-09-19 2018-12-18 中国空气动力研究与发展中心超高速空气动力研究所 A kind of air-cooling apparatus and plasma generator for plasma generator
CN210381424U (en) * 2019-08-26 2020-04-21 贵州正业龙腾新材料开发有限公司 Cooling gas distribution structure suitable for high-frequency plasma torch

Also Published As

Publication number Publication date
CN110402008A (en) 2019-11-01

Similar Documents

Publication Publication Date Title
CN201316616Y (en) Water cooling radio frequency plasma reactor with ignition tunnel
JP6089377B2 (en) New type of composite pipe of copper pipe and steel pipe, its manufacturing method, application and welded structure
CN103252570B (en) A kind of projection welding bottom electrode with cooling device
CN110402008B (en) Cooling gas distribution device suitable for high-frequency plasma torch
CN210381424U (en) Cooling gas distribution structure suitable for high-frequency plasma torch
CN203537595U (en) Interface device for cooling heating electrode of carbon-fiber graphitization furnace
CN204795821U (en) Laminar flow plasma generator
CN106903466B (en) Apparatus for shaping and technique in a kind of welded still pipe weld seam
CN102953865B (en) Plug cooling structure of plug type axisymmetric nozzle
CN202786503U (en) Gas path distribution device of poly-crystal ingot furnace
CN210193423U (en) Floating furnace structure
CN206614167U (en) Apparatus for shaping in a kind of welded still pipe weld seam
CN203176621U (en) Melt caprolactam thermal insulation pipeline
CN102382972A (en) Single-tubular gas protection fiber thermal treatment device
CN202284794U (en) Porous quincunx type flame nozzle
CN201947588U (en) Loop heat pipe radiating device
CN202131106U (en) Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace
CN214937668U (en) Heating device for heat treatment
CN201755743U (en) Device for rapid and easy disassembly of bearing inner race
CN219571947U (en) Air inlet cavity heat insulation device of semiconductor tail gas treatment equipment
CN202629464U (en) Flow limiting device of double-layer structure
CN106643182A (en) High-temperature vacuum furnace water-cooling electrode
CN113941761B (en) Tungsten electrode quick replacement device in full-position automatic TIG welding machine
CN207857861U (en) It is a kind of to be used simultaneously along inverse for hydrogen multi-tube furnace
CN205472639U (en) Two tower hydrogen purification devices

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant