CN202131106U - Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace - Google Patents
Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace Download PDFInfo
- Publication number
- CN202131106U CN202131106U CN201120236304U CN201120236304U CN202131106U CN 202131106 U CN202131106 U CN 202131106U CN 201120236304 U CN201120236304 U CN 201120236304U CN 201120236304 U CN201120236304 U CN 201120236304U CN 202131106 U CN202131106 U CN 202131106U
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- water coolant
- polycrystalline silicon
- cooling water
- annular space
- vessel flange
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Abstract
A cooling water structure for an equipment spacer of a polycrystalline silicon reduction furnace comprises an equipment flange and a cylinder body, wherein arc-shaped annular plates are arranged on the equipment flange and the inner wall at the lower end of the cylinder body; the arc-shaped annular plates adopting annular structures, the equipment flange and the cylinder body form a closed annular space; a baffle plate is arranged in the annular space; a cooling water inlet hole and a cooling water outlet hole are formed on two sides of the baffle plate; and a gas-guide pipe or an exhaust hole is also arranged in the annular space, so as to avoid the generation of a gas-phase space. The utility model has the advantages that the cooling water structure is not limited by the structural characteristics of the equipment flange, the area of the cross section of the cooling water structure can be set according to the requirement, so as to effectively lower the temperature at the lower part of the equipment flange, further lower the temperature of the spacer at the periphery of the equipment flange, and prevent failure caused by over-temperature of the spacer.
Description
Technical field:
The utility model relates to a kind of New Polycrystalline Si reduction furnace apparatus pad water coolant structure, belongs to the polycrystalline silicon material preparing technical field.
Background technology:
Polysilicon is a main raw material of making silicon polished, solar cell and HIGH-PURITY SILICON goods, is the basic material of information industry and new forms of energy industry.Utilization is the Siemens Method reduction furnace the most widely at present, and mostly its equipment master pad is the modified ptfe pad, and easy deformation lost efficacy yet the modified ptfe pad is at high temperature worked.For this reason, general all through water coolant runner introducing water coolant being set to reduce the temperature of pad peripheral flange, to guarantee the works better of pad.Tradition polycrystalline silicon reducing furnace pad water coolant runner is arranged on vessel flange inside; Owing to reasons such as vessel flange intensity; Make flow area receive limitation, heat is restricted and causes cooling performance on the low side; Just need to change pad after generally driving 2 ~ 3 stoves, increased the production cost of polysilicon greatly.
Summary of the invention:
The purpose of the utility model is to provide a kind of New Polycrystalline Si reduction furnace apparatus pad water coolant structure; Do not receive the restriction of vessel flange structural performance; The cross-sectional area of water coolant structure can be set as required; Effectively reduce the temperature of vessel flange bottom, and then reduce the vessel flange temperature of pad on every side, prevent the pad overheating failure.
For realizing above-mentioned polycrystalline silicon reducing furnace equipment pad water coolant structure, the technical scheme that the utility model adopts is following:
Polycrystalline silicon reducing furnace equipment pad water coolant structure comprises vessel flange, cylindrical shell, and the inwall of said vessel flange and cylindrical shell is provided with the arc ring flat-plate, and said arc ring flat-plate is an annular, forms an airtight annular space with said vessel flange, cylindrical shell.
As a kind of preferred version of the utility model, said arc ring flat-plate is located on the inwall of said vessel flange and cylindrical shell lower end.
As a kind of preferred version of the utility model, be provided with dividing plate in the said airtight annular space, said dividing plate is disconnected with airtight annular spaces.
As a kind of preferred version of the utility model, said dividing plate both sides are respectively equipped with that water coolant enters the hole and water coolant portals.
As a kind of preferred version of the utility model, said water coolant advances hole and water coolant and portals and be several, reaching quick reduction vessel flange temperature, thereby reduces the purpose of the temperature of pad around the vessel flange.
As a kind of preferred version of the utility model, said water coolant portals and is provided with gas tube, to prevent the formation of gas-phase space.
As a kind of preferred version of the utility model, said cylindrical shell is provided with venting hole, to prevent the formation of gas-phase space.
The principle of work of the utility model is: during works better, water coolant enters the hole from water coolant and gets into annular space, circles the back from water coolant outflows of portalling around annular space stream, and gas is through gas tube or venting hole discharge in the annular space.Annular space is positioned at the device interior lower end; Cooling-water flowing when annular space and vessel flange conduct heat; Reduced the temperature of vessel flange bottom; Vessel flange carries out heat exchange with the pad surrounding space again, greatly reduces the temperature of pad surrounding space, thereby prevents that pad from crossing thermogenetic deformation failure.Because the water coolant structure of the utility model is positioned at device interior, the cross-sectional area of water coolant runner is not restricted by vessel flange intensity, its cross-sectional area can be set as required to reach the cooling performance that needs.
The utility model is positioned at the device interior lower end; Through water coolant vessel flange and pad surrounding space are cooled off; Cut off contacting of furnace high-temperature gas and equipment pad; Prevent that pad from crossing thermogenetic deformation failure, effectively protected the life-time service of modified ptfe pad, thereby greatly reduced the production cost of polysilicon.
Description of drawings:
Fig. 1 is the reduction furnace pad water coolant structural representation of the utility model.
Fig. 2 is the reduction furnace pad water coolant structural representation of the utility model.
Reference numeral:
1 vessel flange, 2 cylindrical shells, 3 arc ring flat-plates, 4 dividing plates
5 gas tubes, 6 water coolants advance hole 7 water coolants 8 venting holes that portal.
Embodiment:
Below in conjunction with accompanying drawing the utility model is further described.
As shown in Figure 1; The utility model comprises that vessel flange 1, cylindrical shell 2, arc ring flat-plate 3, dividing plate 4, gas tube 5, water coolant advance that hole 6, water coolant portal 7, arc ring flat-plate 3, be welded on the inwall of vessel flange 1 and cylindrical shell 2 lower ends; Arc ring flat-plate 3 is a ring-type; Surround an airtight annular space with vessel flange 1 and cylindrical shell 2 lower ends, dividing plate 4 is welded in the airtight annular space airtight annular spaces disconnected, and dividing plate 4 both sides are provided with that a water coolant enters hole 6 and a water coolant portals 7; Water coolant portals and is provided with gas tube 5 on 7, prevents the formation of gas-phase space.
As shown in Figure 2, the difference of present embodiment and embodiment 1 is, has venting hole 8 on the cylindrical shell 2, and the gas in the gas tube 5 of alternate embodiment 1, airtight annular space is discharged through venting hole 8.
The working process of present embodiment is: during works better, water coolant enters hole 6 from water coolant and gets into annular spaces, portals from water coolant and 7 flows out around the annular space stream back of circling, and gas is discharged through gas tube 5 or venting hole 8 in the annular space.Annular space is positioned at the device interior lower end; Cooling-water flowing when annular space and vessel flange 1 conduct heat, reduced the temperature of vessel flange 1 bottom, vessel flange 1 carries out heat exchange with the pad surrounding space again; Greatly reduce the temperature of pad surrounding space, prevent that the pad overheating deforming lost efficacy.
Claims (7)
1. polycrystalline silicon reducing furnace equipment pad water coolant structure; Comprise vessel flange, cylindrical shell; It is characterized in that: the inwall of said vessel flange and cylindrical shell is provided with the arc ring flat-plate, and said arc ring flat-plate is an annular, forms an airtight annular space with said vessel flange, cylindrical shell.
2. polycrystalline silicon reducing furnace equipment pad water coolant structure according to claim 1, it is characterized in that: said arc ring flat-plate is located on the inwall of said vessel flange and cylindrical shell lower end.
3. polycrystalline silicon reducing furnace equipment pad water coolant structure according to claim 1 is characterized in that: be provided with dividing plate in the said airtight annular space, said dividing plate is disconnected with airtight annular spaces.
4. polycrystalline silicon reducing furnace pad water coolant structure according to claim 3 is characterized in that: said dividing plate both sides are respectively equipped with that water coolant enters the hole and water coolant portals.
5. polycrystalline silicon reducing furnace equipment pad water coolant structure according to claim 4 is characterized in that: said water coolant advances hole and water coolant and portals and be several.
6. polycrystalline silicon reducing furnace equipment pad water coolant structure according to claim 4, it is characterized in that: said water coolant portals and is provided with gas tube.
7. polycrystalline silicon reducing furnace equipment pad water coolant structure according to claim 1, it is characterized in that: said cylindrical shell is provided with venting hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120236304U CN202131106U (en) | 2011-07-06 | 2011-07-06 | Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120236304U CN202131106U (en) | 2011-07-06 | 2011-07-06 | Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202131106U true CN202131106U (en) | 2012-02-01 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120236304U Expired - Fee Related CN202131106U (en) | 2011-07-06 | 2011-07-06 | Cooling water structure for equipment spacer of polycrystalline silicon reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202131106U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103359716A (en) * | 2012-03-31 | 2013-10-23 | 成都润封电碳有限公司 | Pressurizing heat treatment device for artificial carbon graphite material |
| CN105437053A (en) * | 2014-06-18 | 2016-03-30 | 上海和辉光电有限公司 | Panel grinder |
-
2011
- 2011-07-06 CN CN201120236304U patent/CN202131106U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103359716A (en) * | 2012-03-31 | 2013-10-23 | 成都润封电碳有限公司 | Pressurizing heat treatment device for artificial carbon graphite material |
| CN105437053A (en) * | 2014-06-18 | 2016-03-30 | 上海和辉光电有限公司 | Panel grinder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHANGHAI SENSONG FLUID TECHNOLOGY CO., LTD. Free format text: FORMER NAME: SHANGHAI SENSONG ENVIRONMENT TECHNOLOGY ENGINEERING CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 200137 No. 562 Gao Xiang Ring Road, Shanghai, Pudong New Area Patentee after: Shanghai Morimatsu Environment Technology Engineering Co., Ltd. Address before: 200137 No. 562 Gao Xiang Ring Road, Shanghai, Pudong New Area Patentee before: Shanghai Sensong Environment Technology Engineering Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120201 Termination date: 20170706 |