CN101973550B - Polycrystalline silicon hydrogenation furnace - Google Patents
Polycrystalline silicon hydrogenation furnace Download PDFInfo
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- CN101973550B CN101973550B CN2010105149762A CN201010514976A CN101973550B CN 101973550 B CN101973550 B CN 101973550B CN 2010105149762 A CN2010105149762 A CN 2010105149762A CN 201010514976 A CN201010514976 A CN 201010514976A CN 101973550 B CN101973550 B CN 101973550B
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Abstract
The invention provides a polycrystalline silicon hydrogenation furnace. The hydrogenation furnace comprises a supporting seat, a chassis, a bell jar, a heat shield, a gas-guide tube, a gas distribution device, a heat exchange device, a reaction gas inlet and a reaction gas outlet, wherein the chassis is arranged on the supporting seat; the bell jar is arranged on the chassis and a cavity is formed by the bell jar and the chassis; the heat shield is arranged in the space of the cavity and connected with the chassis; a reaction region is formed in the heat shield by the heat shield and the chassis; the gas-guide tube passes through the bell jar; one end of the gas-guide tube is communicated with the heat shield; the gas distribution device is arranged in the space; the heat exchange device is arranged outside the bell jar and communicated with the other end opposite to one end of the gas-guide tube communicated with the heat shield, and the gas distribution device respectively; the reaction gas inlet is communicated with the heat exchange device; and the reaction gas outlet is communicated with the heat exchange device. A low-temperature reaction gas and a high-temperature exhaust exchange heat in the heat exchange device, so that the energy is greatly recovered, the temperature of the gas entering the reaction region is raised, the temperature of the reaction exhaust is also reduced, meanwhile the production effectiveness of the hydrogenation furnace is improved and the difficulty of exhaust treatment is reduced.
Description
Technical field
The present invention relates to a kind of hydrogenation furnace, particularly a kind of polysilicon hydrogenation furnace that belongs to the photovoltaic energy technology.
Background technology
Along with the develop rapidly of domestic and international electronics and information industry and photovoltaic energy industry, polysilicon product market is in the ascendant always.Polysilicon hydrogenation furnace is as the process tail gas treatment unit, and its processing condition are very harsh, more than the reaction back exhaust temperature height to 1000 ℃, the security and the material chosen of exhaust pipe proposed very high requirement.Industry is general to adopt following method to handle: length is set apart from cooling water jecket outside exhaust pipe, uses water coolant that the high-temperature tail gas in the exhaust pipe is cooled to about 300 degree, cooled tail gas is handled by ordinary method again.The shortcoming of this kind treatment process is that energy wastage is serious, becomes one of polysilicon industry " three height " evidence.Its reason is to begin to be heated after low-temp reaction gas gets into hydrogenation furnace, reaches before 1000 ℃ at gas temperature, reacts very slow, and gas begins rapid reaction more than 1000 ℃ when being heated to, and it is less to keep the required heat of reaction.The cooling that in exhaust pipe, is cooled of reacted high-temperature tail gas, energy is transferred in the water coolant.The most of heat of water coolant after the intensification can't be recycled; Directly cause the hydrogenation furnace energy consumption high, limited the development of polysilicon industry, in production of polysilicon technology; The problem that the silicon tetrachloride hydrogenation furnace energy consumption is high highlights day by day, has a strong impact on the health science development of polysilicon industry.And along with the aggravation of market competition, industry is also urgently hoped the raising the output consumption reduction, reduces running cost.
Summary of the invention
The object of the present invention is to provide a kind of efficient utilization that realizes the energy, energy-saving and cost-reducing, and the polysilicon hydrogenation furnace that reduces production costs.
For solving the problems of the technologies described above polysilicon hydrogenation furnace of the present invention, comprising: bearing; The chassis is arranged on the said bearing; Bell jar is arranged on the said chassis, forms a cavity with said chassis, and the chuck of band cooling structure is adopted on said chassis; Insulation plate is arranged in the said cavity, is connected with said chassis, and the inner and said chassis of said insulation plate forms reaction zone, and said insulation plate is provided with induction trunk; Gas tube runs through said bell jar, and said gas tube one end is communicated with said insulation plate; Distribution device in gas-fluid is arranged in the said cavity, is located on the said gas tube outer wall said distribution device in gas-fluid and the coaxial setting of said gas tube; Heat exchanger is a spiral-plate heat exchanger, is arranged on outside the said bell jar, and an other end and the said distribution device in gas-fluid of the end that said spiral-plate heat exchanger is communicated with said insulation plate with respect to said gas tube with said gas tube respectively are communicated with; The reactant gases inlet mouth is communicated with said heat exchanger; The reactant gases air outlet is communicated with said heat exchanger, and said spiral-plate heat exchanger is connected with said bell jar is coaxial.
Said heat exchanger passes through pipe connecting or directly is communicated with said distribution device in gas-fluid; Said spiral-plate heat exchanger adopts perforated plate structure or the dull and stereotyped spacing column structure that cooperates; The rotation direction of the spiral plate of said spiral-plate heat exchanger is clockwise or counterclockwise; Said distribution device in gas-fluid is connected with said bell jar; The outer wall of said insulation plate and the inwall of said bell jar form a gas channel; Said bearing is circle or rectangle; The top of said bell jar is spherical or dull and stereotyped; Said heat exchanger is arranged in the open environment or is arranged in the protective guard of sealing.
Polysilicon hydrogenation furnace of the present invention is through the reaction zone in hydrogenation furnace bell jar set inside heat exchanger and the inner formation of insulation plate; Form unique runner and conversion zone; Cryogenic gas gets into bell jar from the reactant gases inlet mouth and gets into heat exchanger again; High-temperature tail gas gets into heat exchanger through gas tube from reaction zone, and cold and hot gas carries out thermal exchange in heat exchanger, and the first has realized a large amount of recovery of energy; It two is to have improved the temperature that gets into reaction zone gas, has improved the processing power of hydrogenation furnace; It three is the temperature that reduced reaction end gas, has reduced the difficulty of vent gas treatment, make equipment more safety with stable.
Description of drawings
Fig. 1 is the front section view of polysilicon hydrogenation furnace embodiment one of the present invention.
Fig. 2 is the front section view of polysilicon hydrogenation furnace embodiment two of the present invention.
Fig. 3 is the front section view of polysilicon hydrogenation furnace embodiment three of the present invention.
Description of reference numerals in the polysilicon hydrogenation furnace accompanying drawing of the present invention:
1-bell jar 2-chassis 3-bearing
4-spiral-plate heat exchanger 5-reaction zone 6-gas distributor
7-insulation plate 8-gas tube 9-reactant gases inlet mouth
10-reactant gases air outlet 11-induction trunk 12-gas channel
14-pipe connecting 15-protective guard
Embodiment
Below in conjunction with accompanying drawing polysilicon hydrogenation furnace of the present invention is explained further details.
Embodiment one: as shown in Figure 1, polysilicon hydrogenation furnace of the present invention comprises: round bearing 3; Be arranged on the chassis 2 on the bearing 3; Be arranged on the chassis 2 of band cooling structure chuck and top is domed bell jar 1, itself and chassis 2 formation one cavity; Be arranged in the cavity and the insulation plate 7 that is connected with chassis 2, insulation plate 7 inner and chassis 2 formation reaction zones 5, insulation plate 7 is provided with induction trunk 11, and the inwall of the outer wall of insulation plate 7 and bell jar 1 forms a gas channel 12; Through the gas tube 8 that bell jar 1 and an end are communicated with insulation plate 7, the end that gas tube 8 is communicated with insulation plate 1 is arranged on the top of reaction zone 5; Be arranged on the distribution device in gas-fluid 6 in the cavity, its be located on gas tube 8 outer walls and with gas tube 8 coaxial settings, distribution device in gas-fluid 6 also is connected with bell jar 1; Spiral-plate heat exchanger 4 be arranged on bell jar 1 outer and with 1 coaxial connection of bell jar; An other end and the distribution device in gas-fluid 6 of the end that spiral-plate heat exchanger 4 is communicated with insulation plate 1 with respect to gas tube 8 with gas tube 8 respectively are communicated with; Spiral-plate heat exchanger 4 adopts the perforated plate structure; The spiral plate rotation direction is that spiral-plate heat exchanger 4 outsides are provided with protective guard 15 counterclockwise; The reactant gases inlet mouth 9 that is connected with bell jar 1, it is communicated with protective guard 15; The reactant gases air outlet 10 that is connected with spiral-plate heat exchanger 4.
Embodiment two: as shown in Figure 2, polysilicon hydrogenation furnace of the present invention comprises: round bearing 3; Be arranged on the chassis 2 on the bearing 3; Be arranged on the chassis 2 of band cooling structure chuck and top is domed bell jar 1, itself and chassis 2 formation one cavity; Be arranged in the cavity and the insulation plate 7 that is connected with chassis 2, insulation plate 7 inner and chassis 2 formation reaction zones 5, insulation plate 7 is provided with induction trunk 11, and the inwall of the outer wall of insulation plate 7 and bell jar 1 forms a gas channel 12; Through the gas tube 8 that bell jar 1 and an end are communicated with insulation plate 7, the end that gas tube 8 is communicated with insulation plate 1 is arranged on the top of reaction zone 5; Be arranged on the distribution device in gas-fluid 6 in the cavity, its be located on gas tube 8 outer walls and with gas tube 8 coaxial settings, distribution device in gas-fluid 6 also is connected with bell jar 1; It is outer and coaxial with bell jar 1 that spiral-plate heat exchanger 4 is arranged on bell jar 1 through support stick; Spiral-plate heat exchanger 4 is connected with the other end of gas tube 8 with respect to an end of gas tube 8 and insulation plate 1 connection; Spiral-plate heat exchanger 4 also is communicated with through pipe connecting 14 with distribution device in gas-fluid 6; Spiral-plate heat exchanger 4 adopts the perforated plate structure, and the spiral plate rotation direction is counterclockwise; Reactant gases inlet mouth 9 that is connected with spiral-plate heat exchanger 4 and reactant gases air outlet 10.
Embodiment three: as shown in Figure 3, polysilicon hydrogenation furnace of the present invention comprises: round bearing 3; Be arranged on the chassis 2 on the bearing 3; Be arranged on the chassis 2 of band cooling structure chuck and top is domed bell jar 1, itself and chassis 2 formation one cavity; Be arranged in the cavity and the insulation plate 7 that is connected with chassis 2, insulation plate 7 inner and chassis 2 formation reaction zones 5, insulation plate 7 is provided with induction trunk 11, and the inwall of the outer wall of insulation plate 7 and bell jar 1 forms a gas channel 12; Through the gas tube 8 that bell jar 1 and an end are communicated with insulation plate 7, the end that gas tube 8 is communicated with insulation plate 1 is arranged on the top of reaction zone 5; Be arranged on the distribution device in gas-fluid 6 in the cavity, its be located on gas tube 8 outer walls and with gas tube 8 coaxial settings, distribution device in gas-fluid 6 also is connected with bell jar 1; It is outer and coaxial with bell jar 1 that spiral-plate heat exchanger 4 is arranged on bell jar 1 through support stick; An other end and the distribution device in gas-fluid 6 of the end that spiral-plate heat exchanger 4 is communicated with insulation plate 1 with respect to gas tube 8 with gas tube 8 respectively are communicated with; Spiral-plate heat exchanger 4 adopts the perforated plate structure, and the spiral plate rotation direction is counterclockwise; Reactant gases inlet mouth 9 that is connected with spiral-plate heat exchanger 4 and reactant gases air outlet 10.
During work; Polysilicon hydrogenation furnace reactant gases of the present invention gets into spiral-plate heat exchanger 4 by reactant gases inlet mouth 9; Flow through and obtain a large amount of heats of tail gas after helical channel and the high-temperature tail gas heat exchange of spiral-plate heat exchanger 4; Again through gas tube 8 outsides, and by evenly entering into after gas distributor 6 rectifications in the gas channel 12 that forms by bell jar 1 and insulation plate 7, through the induction trunk 11 entering insulation plates 7 inner reaction zones 5 that form of insulation plate 7 bottoms; The reactant gases temperature that gets into reaction zone 5 has had and has increased substantially, and reaction efficiency is able to promote.After the gas reaction, via the gas tube that passes insulation plate 78, get into spiral-plate heat exchanger 4 up to the tail gas more than 1000 ℃; In helical channel, carry out heat exchange with air inlet, realize the recycling of energy, the exhaust temperature after the heat exchange declines to a great extent; Reduced difficulty of post-processing; Tail gas gets into subsequent treatment process by reactant gases air outlet 10 again, and the setting of protective guard 15 is if reactant gases in the stove and/or tail gas leak; Be unlikely to leak in the environment, environment has on every side been played the certain protection effect.
Claims (9)
1. polysilicon hydrogenation furnace comprises:
Bearing;
The chassis is arranged on the said bearing, and the chuck of band cooling structure is adopted on said chassis;
Bell jar is arranged on the said chassis, forms a cavity with said chassis;
Insulation plate is arranged in the said cavity, is connected with said chassis, and the inner and said chassis of said insulation plate forms reaction zone, and said insulation plate is provided with induction trunk;
It is characterized in that,
Gas tube runs through said bell jar, and said gas tube one end is communicated with said insulation plate;
Distribution device in gas-fluid is arranged in the said cavity, is located on the said gas tube outer wall said distribution device in gas-fluid and the coaxial setting of said gas tube;
Heat exchanger is a spiral-plate heat exchanger, is arranged on outside the said bell jar, and an other end and the said distribution device in gas-fluid of the end that said spiral-plate heat exchanger is communicated with said insulation plate with respect to said gas tube with said gas tube respectively are communicated with; Said spiral-plate heat exchanger is connected with said bell jar is coaxial;
The reactant gases inlet mouth is communicated with said heat exchanger;
The reactant gases air outlet is communicated with said heat exchanger.
2. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said heat exchanger passes through pipe connecting or directly is communicated with said distribution device in gas-fluid.
3. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said spiral-plate heat exchanger adopts perforated plate structure or the dull and stereotyped spacing column structure that cooperates.
4. polysilicon hydrogenation furnace according to claim 3 is characterized in that, the rotation direction of the spiral plate of said spiral-plate heat exchanger is clockwise or counterclockwise.
5. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said distribution device in gas-fluid is connected with said bell jar.
6. polysilicon hydrogenation furnace according to claim 1 is characterized in that, the outer wall of said insulation plate and the inwall of said bell jar form a gas channel.
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7. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said bearing is circle or rectangle.
8. polysilicon hydrogenation furnace according to claim 1 is characterized in that, the top of said bell jar is spherical or dull and stereotyped.
9. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said heat exchanger is arranged in the open environment or is arranged in the protective guard of sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105149762A CN101973550B (en) | 2010-09-30 | 2010-09-30 | Polycrystalline silicon hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105149762A CN101973550B (en) | 2010-09-30 | 2010-09-30 | Polycrystalline silicon hydrogenation furnace |
Publications (2)
| Publication Number | Publication Date |
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| CN101973550A CN101973550A (en) | 2011-02-16 |
| CN101973550B true CN101973550B (en) | 2012-08-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010105149762A Expired - Fee Related CN101973550B (en) | 2010-09-30 | 2010-09-30 | Polycrystalline silicon hydrogenation furnace |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102205967A (en) * | 2011-04-29 | 2011-10-05 | 宁夏阳光硅业有限公司 | Energy-saving polysilicon reduction furnace and manufacturing method for polysilicon |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201485289U (en) * | 2009-09-09 | 2010-05-26 | 重庆大全新能源有限公司 | Device utilizing silicon tetrachloride for producing trichlorosilane |
| CN101798084A (en) * | 2010-04-02 | 2010-08-11 | 江苏双良锅炉有限公司 | Hydrogenation furnace |
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2010
- 2010-09-30 CN CN2010105149762A patent/CN101973550B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201485289U (en) * | 2009-09-09 | 2010-05-26 | 重庆大全新能源有限公司 | Device utilizing silicon tetrachloride for producing trichlorosilane |
| CN101798084A (en) * | 2010-04-02 | 2010-08-11 | 江苏双良锅炉有限公司 | Hydrogenation furnace |
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| CN101973550A (en) | 2011-02-16 |
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