CN109104808B - Novel microwave plasma excitation device with long service life - Google Patents
Novel microwave plasma excitation device with long service life Download PDFInfo
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- CN109104808B CN109104808B CN201810936502.3A CN201810936502A CN109104808B CN 109104808 B CN109104808 B CN 109104808B CN 201810936502 A CN201810936502 A CN 201810936502A CN 109104808 B CN109104808 B CN 109104808B
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- microwave
- microwave plasma
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- fixing plate
- discharge tube
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- 230000005284 excitation Effects 0.000 title claims abstract description 85
- 239000004020 conductor Substances 0.000 claims abstract description 64
- 229910052755 nonmetal Inorganic materials 0.000 claims abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims description 38
- 239000002184 metal Substances 0.000 claims description 38
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 43
- 230000005684 electric field Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
Abstract
The invention discloses a novel microwave plasma excitation device with long service life, which relates to the technical field of microwave plasma sources and microwave plasma excitation, and the technical scheme is characterized by comprising a microwave waveguide tube, a nonmetal discharge tube inserted in the microwave waveguide tube, an auxiliary excitation conductor fixed at the inner wall of the nonmetal discharge tube and a vortex gas generation device fixed on the microwave waveguide tube and introducing gas into the nonmetal discharge tube; the upper and lower ends of the auxiliary excitation conductor are both positioned inside the microwave waveguide tube. The microwave plasma generator can realize the excitation and maintenance of large-volume microwave plasma under the atmospheric pressure, has simple design, low cost and long service life, can realize the reburning of the microwave plasma after the microwave plasma is accidentally extinguished, and ensures that the excitation of the microwave plasma is simpler.
Description
Technical Field
The invention relates to the technical field of microwave plasma source and microwave plasma excitation, in particular to a novel microwave plasma excitation device with long service life.
Background
The microwave plasma is generated as follows: microwaves propagate in a waveguide, whose electromagnetic power is absorbed by the initial plasma at a specific location, resulting in intense gas ionization to produce a plasma. The microwave plasma is generated without electrodes, so that steam can be working gas, and corrosion of the electrodes is prevented without replacing the electrodes. The microwave plasma also avoids extra energy cooling consumption and gas pollution, has great application potential in the aspect of miniaturization of high-temperature plasma torches, and can be used in the aspects of waste solid and waste gas treatment, metallurgy, metal welding smelting and the like.
The prior microwave plasma torch has two excitation modes, namely an igniter in the form of a metal wire or a metal spray nozzle, and the prior Chinese patent application document with publication number of CN104507249A, which can be referred to, discloses a rectangular waveguide microwave plasma source generating device, wherein a metal copper probe is arranged in a rectangular waveguide resonant cavity reflecting area to excite microwave plasma.
Another method, such as the current chinese patent application publication No. CN107801286a, discloses a microwave plasma excitation system based on dielectric barrier discharge pre-ionization, which uses dielectric barrier discharge pre-ionization to provide initial electrons for microwave plasma, thereby exciting the microwave plasma. The method needs argon as pre-ionization gas, has higher cost, and the lower end of the nonmetallic pre-ionization jet tube is close to a plasma region, so that the nonmetallic pre-ionization jet tube is easy to melt and cannot guide excitation again.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a novel microwave plasma excitation device with long service life, which can realize excitation and maintenance of large-volume microwave plasma under atmospheric pressure, has simple design, low cost and long service life, can realize reburning after accidental extinction of the microwave plasma, and ensures that the excitation of the microwave plasma is simpler.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the novel microwave plasma excitation device with long service life comprises a microwave waveguide tube, a nonmetal discharge tube inserted in the microwave waveguide tube, an auxiliary excitation conductor fixed on the inner wall of the nonmetal discharge tube, and a vortex gas generating device fixed on the microwave waveguide tube and introducing gas into the nonmetal discharge tube; the upper and lower ends of the auxiliary excitation conductor are both positioned inside the microwave waveguide tube.
Through adopting above-mentioned technical scheme, through producing the microwave electric field in the microwave waveguide, in nonmetal discharge tube position department, excite the microwave ion body through the supplementary excitation conductor that sets up, simultaneously through the vortex gas generating device that sets up for inside excited microwave ion body plume is kept away from nonmetal microwave discharge tube inner wall, carries out cooling protection to nonmetal discharge tube and supplementary excitation conductor through vortex gas, makes supplementary excitation conductor not have the metal burning problem, supplementary excitation conductor long service life just can extinguish the back with its reignition in microwave plasma accident.
Preferably, the central axis of the nonmetallic discharge tube is located at a position (1/4λ+kλ) away from the end face of the microwave waveguide tube, λ is the wavelength of microwaves in the system, and k is an integer greater than or equal to 0.
By adopting the technical scheme, the non-metal discharge tube is arranged at the position with the largest amplitude of the microwave electric field, so that microwave plasma can be excited more easily.
Preferably, the auxiliary excitation conductor is attached to the inner wall of the nonmetallic discharge tube.
Through adopting above-mentioned technical scheme, through setting up auxiliary excitation conductor to be annular, the gomphosis is on non-metallic discharge tube inner wall, and vortex gas is when getting into non-metallic discharge tube inside for microwave ion body forms the plume, can make microwave ion body and auxiliary excitation conductor contact less, thereby protects auxiliary excitation conductor, makes its life longer.
Preferably, the circumferential side wall of the auxiliary excitation conductor is in a grid shape.
Preferably, the circumferential side wall of the auxiliary excitation conductor is in a spiral shape.
Preferably, the auxiliary excitation conductor is formed with a tip extending therefrom.
By adopting the technical scheme, the microwave ion body is excited better and easier through the arranged tip.
Preferably, the vortex gas generating device comprises an annular metal fixing plate fixed on the microwave waveguide tube and a gas guide tube, wherein an inner cavity of the annular metal fixing plate is communicated with the nonmetal discharge tube, and one end of the gas guide tube penetrates through the side wall of the annular metal fixing plate and is communicated with the inner cavity of the annular metal fixing plate.
By adopting the technical scheme, the conductor is utilized to absorb microwave energy and the annular metal fixing plate is instantaneously flashover, so that seed electrons are provided, and microwave plasma is easy to excite; after microwave plasma excitation, microwave energy is transferred into the plasma, an auxiliary excitation conductor does not absorb energy, and the flashover time is very short; because the working gas vortex enters the microwave plasma core area, a certain distance is reserved between the microwave plasma and the inner wall of the nonmetallic conductor, and meanwhile, the working gas also plays a role in cooling.
Preferably, the air duct is flush with the inner wall of the annular metal fixing plate, and an included angle a between the axial line of the pipe section at the joint of the air duct and the annular metal fixing plate and the axial line of the annular metal fixing plate is 10-80 degrees; one end of the nonmetal discharge tube is flush with the outer wall of the microwave waveguide tube, and the other end extends out of the microwave waveguide tube.
Through adopting above-mentioned technical scheme, through annular metal fixed plate and the air duct that sets up, when using, through the intraductal working gas that blows in of air duct, through tangent with annular metal fixed plate inner wall owing to the air duct, and be 10-80 degrees with annular metal fixed plate direction of height contained angle to make the gaseous vortex gas that forms more easily in the intraductal gas of non-metal conductor of blowing in.
Preferably, the air guide pipe is provided with a plurality of air guide pipes in the circumferential direction of the annular metal fixing plate.
Through adopting above-mentioned technical scheme, through a plurality of air ducts that set up, can produce vortex gas more easily when using.
Preferably, the auxiliary excitation conductor is a high-temperature resistant conductive material.
By adopting the technical scheme, when microwave ion bodies are excited, a large amount of heat is generated for the microwave ion bodies, and the service life of the auxiliary excitation conductor can be prolonged by setting the auxiliary excitation conductor as a high-temperature conductor material.
In summary, the invention has the following beneficial effects:
1. compared with the prior art, the microwave plasma excitation device has the advantages that the auxiliary excitation conductor is used for exciting the microwave plasma, the mode is simple in design, low in cost and long in service life;
2. the conductor is utilized to absorb microwave energy and the annular metal fixing plate is instantaneously flashover, so that seed electrons are provided, and microwave plasma is easy to excite; after microwave plasma excitation, microwave energy is transferred into the plasma, an auxiliary excitation conductor does not absorb energy, and the flashover time is very short; because the working gas vortex enters the microwave plasma core area, a certain distance is reserved between the microwave plasma and the inner wall of the nonmetallic conductor, and meanwhile, the working gas also plays a role in cooling. The service life of the auxiliary excitation conductor is greatly prolonged by combining the two effects. After the microwave plasma is extinguished accidentally, the conductor absorbs microwave energy and ignites again, so that the plasma can be reburned;
3. through setting up auxiliary excitation conductor to be annular, the gomphosis is on non-metallic discharge tube inner wall, and vortex gas is when getting into non-metallic discharge tube inside for microwave ion body forms the plume, can make microwave ion body and auxiliary excitation conductor contact less, thereby protects auxiliary excitation conductor, makes its life longer.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a novel microwave plasma excitation device with a long service life;
FIG. 2 is an overall schematic diagram of a protruding auxiliary excitation conductor in a novel long-life microwave plasma excitation device;
FIG. 3 is a schematic illustration of a long life microwave plasma excitation device with a gas generator for generating a selected gas with a working gas.
Reference numerals: 1. a microwave waveguide; 2. a non-metal discharge tube; 3. an auxiliary excitation conductor; 31. a tip; 4. a vortex gas generating device; 41. an annular metal fixing plate; 42. and an air duct.
Detailed Description
The present invention will be described in further detail below with reference to the drawings, wherein like parts are designated by like reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower", "bottom" and "top" used in the following description refer to directions in the drawings, and the words "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.
The utility model provides a novel microwave plasma excitation device of long life, combine the fig. 1 and the fig. 2 to show, including microwave waveguide 1, peg graft in the nonmetal discharge tube 2 in microwave waveguide 1, fix the supplementary excitation conductor 3 in nonmetal discharge tube 2, and fix on microwave waveguide 1 and blow into gaseous vortex gas generating device 4 to nonmetal discharge tube 2, when using, connect microwave waveguide 1 with microwave generator, form the microwave electric field in microwave waveguide 1, in nonmetal discharge tube 2, excite microwave plasma through supplementary excitation conductor 3.
In order to make it easier for the auxiliary excitation conductor 3 to excite the microwave plasma, the nonmetallic discharge tube 2 is arranged at a position with its axis line at a distance of (1/4λ+kλ) from the end face of the rear part of the microwave waveguide 1, where λ is the microwave wavelength in the system and k is an integer of 0 or more, and the end face of the rear part of the microwave waveguide 1 mentioned above refers to the end of the microwave waveguide 1 horizontally far from the microwave generator. The microwave electric field amplitude of the position is maximum, so that microwave plasma is easy to excite.
When the nonmetal discharge tube 2 is installed, one end of the nonmetal discharge tube 2 is flush with the microwave waveguide 1, the other end extends to the microwave waveguide 1, and in order to excite microwave plasma easily, both ends of the auxiliary excitation conductor 3 are positioned in a microwave electric field in the microwave waveguide 1.
The auxiliary excitation conductor 3 is made of a high temperature resistant material, and may be tungsten, iron, copper, or the like, and is formed in a ring shape, and the auxiliary excitation conductor 3 is fitted in the non-metal discharge tube 2 when the auxiliary excitation conductor is mounted.
Wherein the auxiliary excitation conductor 3 may be provided in a ring shape, or a semi-circular ring shape or other shape. The shape of the side wall of the auxiliary excitation conductor 3 can be thread-shaped or grid-shaped, and the auxiliary excitation conductor 3 is not in direct contact with plasma when in use by being arranged in a tubular shape, so that the auxiliary excitation conductor 3 is prevented from being ablated, and the service life of the auxiliary excitation conductor 3 is prolonged. For better exciting the plasma, a tip 31 is formed on the auxiliary excitation conductor 3 to extend to the middle side, wherein the direction of the tip 31 is not limited to the embodiment, and the tip 31 is only required to be provided, and the tip 31 is made of a high-temperature resistant conductive material.
As shown in fig. 2 and 3, the swirling gas generating device 4 includes an annular metal fixing plate 41 fixed to the microwave waveguide 1, and an air duct 42 fixed to the annular metal fixing plate 41, wherein an inner cavity of the annular metal fixing plate 41 communicates with the non-metal discharge tube 2, and one end of the air duct 42 passes through the annular metal fixing plate 41 to communicate with the inner cavity of the annular metal fixing plate 41. In order to better form vortex gas, the air duct 42 is flush with the inner wall of the annular metal fixing plate 41, and an included angle a between the axial line of the pipe section at the joint of the air duct and the annular metal fixing plate and the axial line of the annular metal fixing plate is 10-80 degrees. The number of air ducts 42 is provided in the circumferential direction of the annular metal fixing plate 41.
When the plasma generator is used, the air is blown into the air guide pipe 42 by using equipment such as an air pump, so that working gas can be blown to the nonmetal discharge tube 2 at a certain angle to form vortex gas, plasma is restrained in the nonmetal discharge tube 2 by the vortex gas, and the plasma cannot directly contact the nonmetal discharge tube 2 and the auxiliary excitation conductor 3, wherein the working gas introduced through the air guide pipe 42 can be air, oxygen, nitrogen, argon and the like.
When the non-metal discharge tube 2 is mounted, the non-metal discharge tube 2 is inserted into one end of the microwave waveguide 1, and the end surface thereof does not cover one end of the gas tube 42 in the annular metal fixing plate 41. Thus, the working gas can be introduced into the nonmetallic discharge tube 2 through the gas-guide tube 42.
Through the annular metal fixing plate 41, when in use, the conductor absorbs microwave energy and the annular metal fixing plate 41 generates instant flashover, seed electrons are provided, so that microwave plasma is easy to excite; after microwave plasma excitation, microwave energy is transferred into the plasma, the auxiliary excitation conductor 3 does not absorb energy, and the flashover time is very short; because the working gas vortex enters the microwave plasma core area, a certain distance is reserved between the microwave plasma and the inner wall of the nonmetallic conductor, and meanwhile, the working gas also plays a role in cooling. The service life of the auxiliary excitation conductor 3 is greatly prolonged by combining the two effects. After the microwave plasma is accidentally extinguished, the conductor absorbs the microwave energy and ignites again, which can re-ignite the plasma.
The steps of the microwave plasma excitation and maintenance by adopting the system of the invention are as follows:
step 1, a working gas switch is turned on, and working gas is conveyed into a nonmetal discharge tube 2 through a vortex gas generating device 4;
step 2, gradually increasing the microwave power in the microwave waveguide 1, and exciting microwave plasma due to the enhancement of the auxiliary excitation conductor 3 to the local electric field after reaching a threshold value;
and 3, at the moment, adjusting the gas flow of the working gas in the vortex gas generating device 4 to ensure that the plasma flame is stable in shape, and at the moment, the microwave plasma can be maintained for a long time under the action of the working gas.
The excitation device can realize the excitation and maintenance of large-volume microwave plasma under the atmospheric pressure, has simple design, low cost and long service life, can realize the reburning of the microwave plasma after accidental extinction, and ensures that the excitation of the microwave plasma is simpler. This is of great importance for the broad application of microwave plasma.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.
Claims (7)
1. A novel microwave plasma excitation device with long service life is characterized in that: the device comprises a microwave waveguide tube (1), a non-metal discharge tube (2) inserted in the microwave waveguide tube (1), an auxiliary excitation conductor (3) fixed at the inner wall of the non-metal discharge tube (2), and a vortex gas generating device (4) fixed on the microwave waveguide tube (1) and introducing gas into the non-metal discharge tube (2); the upper end and the lower end of the auxiliary excitation conductor (3) are both positioned in the microwave waveguide tube (1); the central axis position of the nonmetal discharge tube (2) is positioned at a position which is away from the end face (1/4lambda+klambda) of the microwave waveguide tube (1), lambda is the wavelength of microwaves in the system, and k is an integer which is more than or equal to 0; the auxiliary excitation conductor (3) is attached to the inner wall of the nonmetal discharge tube (2); the auxiliary excitation conductor (3) is formed with a tip (31) extending thereon.
2. The long-life novel microwave plasma excitation device of claim 1, wherein: the circumferential side wall of the auxiliary excitation conductor (3) is in a grid shape.
3. The long-life novel microwave plasma excitation device of claim 1, wherein: the circumferential side wall of the auxiliary excitation conductor (3) is in a spiral shape.
4. The long-life novel microwave plasma excitation device of claim 1, wherein: the vortex gas generating device (4) comprises an annular metal fixing plate (41) fixed on the microwave waveguide tube (1) and a gas guide tube (42), wherein the inner cavity of the annular metal fixing plate (41) is communicated with the nonmetal discharge tube (2), and one end of the gas guide tube (42) penetrates through the side wall of the annular metal fixing plate (41) and is communicated with the inner cavity of the annular metal fixing plate (41).
5. The long-life microwave plasma excitation device according to claim 4, wherein: the air duct (42) is flush with the inner wall of the annular metal fixing plate (41), and an included angle a between the axial line of the pipe section at the joint of the air duct (42) and the annular metal fixing plate (41) and the axial line of the annular metal fixing plate (41) is 10-80 degrees; one end of the nonmetal discharge tube (2) is flush with the outer wall of the microwave waveguide tube (1), and the other end extends out of the microwave waveguide tube (1).
6. The long-life microwave plasma excitation device according to claim 4 or 5, wherein: the number of the air ducts (42) is arranged in the circumferential direction of the annular metal fixing plate (41).
7. The long-life novel microwave plasma excitation device of claim 1, wherein: the auxiliary excitation conductor (3) is made of high-temperature resistant conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936502.3A CN109104808B (en) | 2018-08-16 | 2018-08-16 | Novel microwave plasma excitation device with long service life |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936502.3A CN109104808B (en) | 2018-08-16 | 2018-08-16 | Novel microwave plasma excitation device with long service life |
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| CN109104808A CN109104808A (en) | 2018-12-28 |
| CN109104808B true CN109104808B (en) | 2024-02-06 |
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| CN201810936502.3A Active CN109104808B (en) | 2018-08-16 | 2018-08-16 | Novel microwave plasma excitation device with long service life |
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| US20200312629A1 (en) * | 2019-03-25 | 2020-10-01 | Recarbon, Inc. | Controlling exhaust gas pressure of a plasma reactor for plasma stability |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000012283A (en) * | 1998-06-22 | 2000-01-14 | Mitsubishi Heavy Ind Ltd | Plasma generating device |
| JP2000296326A (en) * | 1999-04-12 | 2000-10-24 | Mitsubishi Heavy Ind Ltd | Method for controlling operation of organohalogen compound decomposing device |
| CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN107617320A (en) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | A kind of device using Microwave plasma treatment waste gas |
| CN107754572A (en) * | 2017-11-21 | 2018-03-06 | 清华大学 | A kind of microwave plasma industrial organic exhaust gas processing system |
| CN107801286A (en) * | 2017-11-21 | 2018-03-13 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
| CN208836438U (en) * | 2018-08-16 | 2019-05-07 | 清华大学 | A kind of novel microwave excitation device of long life |
-
2018
- 2018-08-16 CN CN201810936502.3A patent/CN109104808B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000012283A (en) * | 1998-06-22 | 2000-01-14 | Mitsubishi Heavy Ind Ltd | Plasma generating device |
| JP2000296326A (en) * | 1999-04-12 | 2000-10-24 | Mitsubishi Heavy Ind Ltd | Method for controlling operation of organohalogen compound decomposing device |
| CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN107617320A (en) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | A kind of device using Microwave plasma treatment waste gas |
| CN107754572A (en) * | 2017-11-21 | 2018-03-06 | 清华大学 | A kind of microwave plasma industrial organic exhaust gas processing system |
| CN107801286A (en) * | 2017-11-21 | 2018-03-13 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
| CN208836438U (en) * | 2018-08-16 | 2019-05-07 | 清华大学 | A kind of novel microwave excitation device of long life |
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