CN208836438U - A kind of novel microwave excitation device of long life - Google Patents
A kind of novel microwave excitation device of long life Download PDFInfo
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- CN208836438U CN208836438U CN201821328557.8U CN201821328557U CN208836438U CN 208836438 U CN208836438 U CN 208836438U CN 201821328557 U CN201821328557 U CN 201821328557U CN 208836438 U CN208836438 U CN 208836438U
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Abstract
The utility model discloses the novel microwave excitation devices of long life a kind of, it is related to microwave plasma source, microwave plasma excitated technical field, drip irrigation device includes microwave plumbing, the nonmetallic discharge tube being plugged in the microwave plumbing, the auxiliary spark excitation conductor being fixed at the nonmetallic electric discharge inside pipe wall and the vortex gas generating device for being fixed on the microwave plumbing and being passed through into nonmetallic discharge tube gas；The auxiliary spark excitation conductor upper and lower ends are all located inside the microwave plumbing.It can be realized the excitation and maintenance of large volume microwave plasma under atmospheric pressure, and design simply, low in cost, long service life is able to achieve restriking after microwave plasma surprisingly extinguishes, makes the excitation of microwave plasma more simple.
Description
Technical field
The utility model relates to belong to microwave plasma source, microwave plasma excitated technical field more specifically to relate to
And a kind of novel microwave excitation device of long life.
Background technique
The producing method of microwave plasma is as follows: microwave is propagated in waveguide, and electromagnetic power is in specific position by first
The plasma absorption of beginning leads to strong gas ionization to generate plasma.The generation of microwave plasma is without electricity
Pole also prevents the corrosion of electrode, without replacing electrode so steam can be working gas.Microwave plasma also avoids
The cooling consumption of additional energy and gaseous contamination, have in terms of minimize high-temperature plasma torch very big application dive
Power can be used for waste solid and exhaust-gas treatment, metallurgy, metal welding smelting etc..
There are two types of mode of excitation, a kind of igniting using wire or Metallic Nozzle At The Ingot form for existing microwave plasma torch
Device, the Chinese invention application documents of the existing Publication No. CN104507249A that can refer to, it discloses a kind of rectangular waveguides
Microwave plasma source generating device, copper probe excitation microwave of one metal of setting etc. in rectangular-wave resonant cavity reflection area
Gas ions, since reaction zone temperature is high, copper probe is melted using primary, can not when microwave plasma surprisingly extinguishes
It is restriked, also brings rnetal contamination problem.
Another method, such as the Chinese invention application documents of the existing Publication No. CN107801286A that can refer to,
A kind of microwave plasma excitated system based on dielectric barrier discharge preionization is disclosed, this application utilizes dielectric barrier discharge
Preionization provides initiating electron for microwave plasma, to excite microwave plasma.Such method needs argon gas as pre-
Ionized gas, higher cost, and nonmetallic preionization jet pipe lower end is closer apart from heating region, easily melting is to nothing
Method guides excitation again.
Utility model content
In view of the deficienciess of the prior art, novel micro- the purpose of this utility model is to provide a kind of long life
Wave excitation device, can be realized the excitation and maintenance of large volume microwave plasma under atmospheric pressure, and design letter
Single, low in cost, long service life is able to achieve restriking after microwave plasma surprisingly extinguishes, allows the sharp of microwave plasma
It sends out more simple.
To achieve the above object, the utility model provides following technical solution:
A kind of novel microwave excitation device of long life, which includes microwave waveguide
The nonmetallic discharge tube manage, being plugged in the microwave plumbing, the auxiliary being fixed at the nonmetallic electric discharge inside pipe wall swash
It hair conductor and is fixed on the microwave plumbing and is passed through the vortex gas of gas into nonmetallic discharge tube and fill
It sets；The auxiliary spark excitation conductor upper and lower ends are all located inside the microwave plumbing.
By using above-mentioned technical proposal, by generating microwave electric field in microwave plumbing, in nonmetallic discharge tube position
Place excites microwave plasma body by the auxiliary spark excitation conductor of setting, while by the vortex gas generating device of setting, so that interior
The microwave plasma body feathers stream that portion is excited far from nonmetallic microwave discharge inside pipe wall, by vortex gas to nonmetallic discharge tube and
Auxiliary spark excitation conductor carries out cooling protection, so that auxiliary spark excitation conductor does not have metal calcination problem, auxiliary spark excitation conductor uses the longevity
Life is long and can be restriked after microwave plasma surprisingly extinguishes.
Preferably, the axial centerline of the nonmetallic discharge tube is located at distance microwave waveguide end face (1/4 λ+k λ)
Place, λ are microwave wavelength in system, and k is the integer more than or equal to 0.
It, can be with by being arranged nonmetallic discharge tube at microwave electric field amplitude maximum by using above-mentioned technical proposal
More preferably it is easy excitation microwave plasma.
Preferably, the auxiliary spark excitation conductor is fitted on the nonmetallic electric discharge inside pipe wall.
It is annular in shape by the way that auxiliary spark excitation conductor to be arranged by using above-mentioned technical proposal, it is entrenched in nonmetallic discharge tube
On inner wall, vortex gas enter nonmetallic discharge tube inside when so that microwave plasma body formed plume, can make microwave from
Daughter contacts less with auxiliary spark excitation conductor, to protect to auxiliary spark excitation conductor, making it, the service life is longer.
Preferably, the auxiliary spark excitation conductor circumferential side wall is grid-shaped.
Preferably, the auxiliary spark excitation conductor circumferential side wall is helically linear.
Preferably, having extended to form tip on the auxiliary spark excitation conductor.
By using above-mentioned technical proposal, that microwave plasma body is excited more preferably to be easy by the tip of setting.
Preferably, the vortex gas generating device includes that the endless metal being fixed on the microwave plumbing is fixed
The inner cavity of plate and gas-guide tube, the endless metal fixed plate is connected to nonmetallic discharge tube, and described gas-guide tube one end passes through ring
Shape metal fixing plate side wall, and it is connected to the inner cavity of annular metal fixing plate.
By using above-mentioned technical proposal, microwave energy is absorbed using conductor and moment sudden strain of a muscle occurs for endless metal fixed plate
Network provides seed electrons, so that microwave plasma is easy to excite；After microwave plasma excitated, microwave energy turns
Plasma is moved up into, auxiliary spark excitation conductor does not absorb energy, and arcing time is very of short duration；Since working gas is vortexed into micro-
Wave plasma core area works at the same time gas so that having certain distance between microwave plasma and non-metal conductor inner wall
Also function to cooling effect.
Preferably, the gas-guide tube is concordant with the endless metal fixed plate inner wall, the gas-guide tube and endless metal are solid
The angle a of the axial line of the axial line and endless metal fixed plate of the pipeline section of fixed board junction is in 10-80 degree；It is described nonmetallic to put
Fulgurite one end is concordant with microwave waveguide pipe outer wall, and the other end extends the microwave plumbing.
By using above-mentioned technical proposal, by the endless metal fixed plate and gas-guide tube of setting, when in use, pass through to
Working gas is blasted in gas-guide tube, by due to gas-guide tube and endless metal fixed plate inner wall it is tangent, and fixed with endless metal
Plate short transverse angle is in 10-80 degree, so that vortex gas is more readily formed in the gas blasted in radio frequency pipe.
Preferably, the gas-guide tube is provided with several in the circumferencial direction of the endless metal fixed plate.
It can more preferably be easy to produce whirlpool when in use by multiple gas-guide tubes of setting by using above-mentioned technical proposal
Revolve gas.
Preferably, the auxiliary spark excitation conductor is high temperature resistant conductive material.
By using above-mentioned technical proposal, when exciting microwave plasma body, generate big calorimetric for microwave plasma body, pass through by
Auxiliary spark excitation conductor is set as high temperature conductor material, can increase its service life.
In conclusion the utility model has the following beneficial effects:
1, the utility model carries out the excitation of microwave plasma using auxiliary spark excitation conductor, compared with the prior art, this
Mode designs simply, low in cost, long service life；
2, microwave energy is absorbed using conductor and moment flashover occurs for endless metal fixed plate, provide seed electrons, make
Microwave plasma is obtained to be easy to excite；After microwave plasma excitated, microwave energy is transferred into plasma, and auxiliary swashs
Hair conductor does not absorb energy, and arcing time is very of short duration；Enter microwave plasma core space since working gas is vortexed, so that
There is certain distance between microwave plasma and non-metal conductor inner wall, works at the same time gas and also function to cooling effect.It is comprehensive
Two above effect, auxiliary spark excitation conductor service life greatly prolong.After microwave plasma surprisingly extinguishes, conductor absorbs microwave energy
Amount, lights a fire again, plasma can be made to restrike；
3, annular in shape by the way that auxiliary spark excitation conductor to be arranged, be entrenched on nonmetallic electric discharge inside pipe wall, vortex gas into
When entering inside nonmetallic discharge tube, so that microwave plasma body forms plume, microwave plasma body and auxiliary spark excitation conductor can be made
Contact is less, to protect to auxiliary spark excitation conductor, making it, the service life is longer.
Detailed description of the invention
Fig. 1 is a kind of overall structure diagram of the novel microwave excitation device of long life；
Fig. 2 is the entirety of prominent auxiliary spark excitation conductor in the novel microwave excitation device of long life a kind of
Schematic diagram；
Fig. 3 is to protrude me in the novel microwave excitation device of long life a kind of to select gas generating unit logical
Enter schematic diagram when working gas.
Appended drawing reference: 1, microwave plumbing；2, nonmetallic discharge tube；3, auxiliary spark excitation conductor；31, tip；4, vortex gas
Body generating device；41, endless metal fixed plate；42, gas-guide tube.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing, wherein the identical attached drawing of identical components
Label indicates.It should be noted that word "front", "rear" used in the following description, "left", "right", "up" and "down", " bottom
Face " and " top surface " refer to that the direction in attached drawing, word "inner" and "outside" are referred respectively to towards or away from particular elements geometry
The direction at center.
A kind of novel microwave excitation device of long life, referring to figs. 1 and 2, including microwave wave
Conduit 1, the nonmetallic discharge tube 2 being plugged in microwave plumbing 1, the auxiliary spark excitation conductor being fixed in nonmetallic discharge tube 2
3 and it is fixed on microwave plumbing 1 and is blasted to nonmetallic discharge tube 2 the vortex gas generating device 4 of gas, is using
When, microwave plumbing 1 is connect with microwave generator, forms microwave electric field in microwave plumbing 1, in nonmetallic discharge tube 2
It is interior, microwave plasma is excited by auxiliary spark excitation conductor 3.
In order to enable auxiliary spark excitation conductor 3 can more preferably be easy excitation microwave plasma, the setting of nonmetallic discharge tube 2 is existed
At its position 1 tail end face of axial line distance microwave waveguide (1/4 λ+k λ), wherein λ be system in microwave wavelength, k be greater than
Integer equal to 0,1 tail end face of microwave plumbing being mentioned above refer to that microwave plumbing 1 is horizontally away from microwave
One end of device.The microwave electric field amplitude maximum of the position is relatively easy to excitation microwave plasma.
When installing nonmetallic discharge tube 2, one end of nonmetallic discharge tube 2 is concordant with microwave plumbing 1, and the other end extends
Locate microwave plumbing 1, in order to be relatively easy to excitation microwave plasma, the both ends of auxiliary spark excitation conductor 3 are respectively positioned on microwave plumbing 1
In interior microwave electric field.
3 material of auxiliary spark excitation conductor is heat-resisting material, can be tungsten, iron, copper etc., is arranged annularly, installed
When, auxiliary spark excitation conductor 3 is entrenched in nonmetallic discharge tube 2.
Wherein, auxiliary spark excitation conductor 3 can be set in a ring or semi-circular shape or other shapes.Auxiliary spark excitation is led
The shape of 3 side wall of body can be threaded line shape, or latticed, by being arranged in a tubular form, when in use, auxiliary spark excitation is led
Body 3 is not directly contacted with plasma, to prevent auxiliary spark excitation conductor 3 ablated, is improved auxiliary spark excitation conductor 3 and is used the longevity
Life.In order to preferably excite plasma, tip 31 has been extended to form to intermediate side on auxiliary spark excitation conductor 3, wherein point
The direction of 31 setting of end is not limited to the present embodiment, as long as setting tip 31,31 material of tip is high temperature resistant conductive material.
In conjunction with shown in Fig. 2 and Fig. 3, vortex gas generating device 4 includes that the endless metal being fixed on microwave plumbing 1 is consolidated
Fixed board 41 and the gas-guide tube 42 being fixed in endless metal fixed plate 41, wherein the inner cavity of endless metal fixed plate 41 with it is non-
Metal discharge pipe 2 is connected to, and one end of gas-guide tube 42 passes through endless metal fixed plate 41 and the inner cavity of endless metal fixed plate 41 connects
It is logical.In order to preferably form vortex gas, wherein gas-guide tube 42 is concordant with 41 inner wall of endless metal fixed plate, gas-guide tube
Angle a with the axial line of the axial line and endless metal fixed plate of the pipeline section of endless metal fixed plate junction is in 10-80 degree.
Gas-guide tube 42 is provided with several in the circumferencial direction of endless metal fixed plate 41.
When in use, by using air blast in the device wizards such as air pump tracheae 42, allow working gas in certain angle
Degree blows to nonmetallic discharge tube 2, forms vortex gas, by vortex gas by plasma confinement in nonmetallic discharge tube 2,
Allow plasma that can not directly contact nonmetallic discharge tube 2 and auxiliary spark excitation conductor 3, wherein to introduce by gas-guide tube 42
The composition of working gas can be the gases such as air, oxygen, nitrogen, argon gas.
It should be noted that nonmetallic discharge tube 2 is inserted into one in microwave plumbing 1 when installing nonmetallic discharge tube 2
End, end face does not cover one end that gas-guide tube 42 is in endless metal fixed plate 41.To can be to non-by gas-guide tube 42
Working gas is passed through in metal discharge pipe 2.
By the endless metal fixed plate 41 of setting, when in use, microwave energy is absorbed using conductor and endless metal is solid
Moment flashover occurs for fixed board 41, seed electrons is provided, so that microwave plasma is easy to excite；Microwave plasma excitated
Afterwards, microwave energy is transferred into plasma, and auxiliary spark excitation conductor 3 does not absorb energy, and arcing time is very of short duration；Due to work
Enter microwave plasma core space as gas swirl, so that there is a spacing between microwave plasma and non-metal conductor inner wall
From working at the same time gas and also function to cooling effect.In summary two effects, 3 service life of auxiliary spark excitation conductor greatly prolong.?
After microwave plasma surprisingly extinguishes, conductor absorbs microwave energy, lights a fire again, plasma can be made to restrike.
The step of carrying out the excitation and maintenance of microwave plasma using Tthe utility model system is as follows:
Step 1 opens working gas switch, and working gas is allowed to be conveyed into nonmetallic put by vortex gas generating device 4
In fulgurite 2；
Step 2 allows the microwave power in microwave plumbing 1 to become larger, and reaches after threshold value since auxiliary spark excitation conductor 3 is right
The enhancing of internal field, microwave plasma are excited；
Step 3, at this point, adjust vortex gas generating device 4 in working gas throughput so that plasma flame shape
State is stablized, and microwave plasma has been able to maintain for a long time under the action of working gas at this time.
It is able to achieve the excitation and maintenance of large volume microwave plasma under atmospheric pressure by this excitation apparatus, and designs letter
Single, low in cost, long service life is able to achieve restriking after microwave plasma surprisingly extinguishes, allows the sharp of microwave plasma
It sends out more simple.This, which steps into extensive use to microwave plasma, important meaning.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Claims (10)
1. the novel microwave excitation device of long life a kind of, it is characterised in that: including microwave plumbing (1),
The nonmetallic discharge tube (2) that is plugged in the microwave plumbing (1) is fixed at nonmetallic discharge tube (2) inner wall
It auxiliary spark excitation conductor (3) and is fixed on the microwave plumbing (1) and to being passed through gas in nonmetallic discharge tube (2)
Vortex gas generating device (4)；It is internal that auxiliary spark excitation conductor (3) upper and lower ends are all located at the microwave plumbing (1).
2. the novel microwave excitation device of long life according to claim 1, it is characterized in that: described non-
The axial centerline of metal discharge pipe (2) is located at distance microwave waveguide (1) end face (1/4 λ+k λ), and λ is microwave in system
Wavelength, k are the integer more than or equal to 0.
3. the novel microwave excitation device of long life according to claim 1, it is characterized in that: described auxiliary
Excitation conductor (3) is helped to be fitted on nonmetallic discharge tube (2) inner wall.
4. the novel microwave excitation device of long life according to claim 3, it is characterized in that: described auxiliary
Help excitation conductor (3) circumferential side wall grid-shaped.
5. the novel microwave excitation device of long life according to claim 3, it is characterized in that: described auxiliary
Help excitation conductor (3) circumferential side wall helically linear.
6. according to the novel microwave excitation device of claim 3-5 described in any item long lives, feature
It is: has extended to form tip (31) on the auxiliary spark excitation conductor (3).
7. the novel microwave excitation device of long life according to claim 1, it is characterized in that: the whirlpool
Rotation gas generating unit (4) includes endless metal fixed plate (41) and the gas-guide tube being fixed on the microwave plumbing (1)
(42), the inner cavity of the endless metal fixed plate (41) is connected to nonmetallic discharge tube (2), and described gas-guide tube (42) one end passes through
Endless metal fixed plate (41) side wall, and it is connected to the inner cavity of annular metal fixing plate (41).
8. the novel microwave excitation device of long life according to claim 7, it is characterized in that: described lead
Tracheae (42) is concordant with endless metal fixed plate (41) inner wall, and the gas-guide tube (42) and endless metal fixed plate (41) are even
The angle a of the axial line of the pipeline section at place and the axial line of endless metal fixed plate (41) is met in 10-80 degree；
Described nonmetallic discharge tube (2) one end is concordant with microwave plumbing (1) outer wall, and the other end extends the microwave plumbing
(1).
9. the novel microwave excitation device of long life according to claim 7 or 8, it is characterized in that: institute
The circumferencial direction that gas-guide tube (42) is stated in the endless metal fixed plate (41) is provided with several.
10. the novel microwave excitation device of long life according to claim 1, it is characterized in that: described
Auxiliary spark excitation conductor (3) is high temperature resistant conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821328557.8U CN208836438U (en) | 2018-08-16 | 2018-08-16 | A kind of novel microwave excitation device of long life |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821328557.8U CN208836438U (en) | 2018-08-16 | 2018-08-16 | A kind of novel microwave excitation device of long life |
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| Publication Number | Publication Date |
|---|---|
| CN208836438U true CN208836438U (en) | 2019-05-07 |
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| CN201821328557.8U Active CN208836438U (en) | 2018-08-16 | 2018-08-16 | A kind of novel microwave excitation device of long life |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109104808A (en) * | 2018-08-16 | 2018-12-28 | 清华大学 | A kind of novel microwave excitation device of long life |
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2018
- 2018-08-16 CN CN201821328557.8U patent/CN208836438U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109104808A (en) * | 2018-08-16 | 2018-12-28 | 清华大学 | A kind of novel microwave excitation device of long life |
| CN109104808B (en) * | 2018-08-16 | 2024-02-06 | 清华大学 | Novel microwave plasma excitation device with long service life |
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| TR01 | Transfer of patent right |
Effective date of registration: 20210106 Address after: 215010 Room 301, building 16, No.158, Jinfeng Road, science and Technology City, Suzhou, Jiangsu Province Patentee after: Qingprice (Suzhou) Environmental Protection Technology Co.,Ltd. Address before: 100084 Tsinghua Yuan, Beijing, Haidian District Patentee before: TSINGHUA University |
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| TR01 | Transfer of patent right |