CN211529923U - Carrier structure for coating film - Google Patents
Carrier structure for coating film Download PDFInfo
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- CN211529923U CN211529923U CN202020505379.2U CN202020505379U CN211529923U CN 211529923 U CN211529923 U CN 211529923U CN 202020505379 U CN202020505379 U CN 202020505379U CN 211529923 U CN211529923 U CN 211529923U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a carrier structure for coating film, including base and a plurality of carrier boat piece, be equipped with two at least insulating support rods on the base, a plurality of carrier boat piece range upon range of equidistant fixes on each insulating support rod, the upper surface of base be with the inclined plane of the certain angle of horizontal plane, each carrier boat piece all is parallel with the upper surface of base, be equipped with the recess that holds the slide glass on the carrier boat piece. The utility model does not need to fix the substrate by a clamping point, when the substrate is placed, the substrate is not contacted with the carrier boat, thereby avoiding the appearance defect of the coating film of the substrate caused by the scratch of the surface of the substrate; appearance problems caused by fixing the substrate by the clamping points, such as clamping point dirt, clamping point scorching and edge winding plating, are reduced, so that the finished product yield is improved, and the finished product yield is improved; meanwhile, the carrier boat sheet inclined at a certain angle relative to the horizontal plane is convenient for the substrate to slide into the groove, the precise butt joint of the mechanical arm is not needed, or the secondary sheet pushing and groove entering condition caused by unstable mechanical arm placing is avoided, so that the operation times of the mechanical arm are reduced.
Description
Technical Field
The utility model relates to a preparation field of semiconductor trade or photovoltaic solar energy trade carrier especially relates to a carrier structure for coating film.
Background
In general, process gases required for a film forming reaction are introduced into a chamber in industry, and a thin film is formed on a substrate surface by a film forming method such as evaporation, sputtering, thermal oxidation, electroplating, chemical vapor deposition and the like under a certain condition. The size and shape of the substrates vary depending on the end product application, and several substrates are required to be formed into a film in the chamber during each batch of the process, and thus several substrates are required to be carried in a carrier in the chamber. The carrier structure is usually made of high-purity graphite material, and has the characteristics that: the high-temperature-resistant conductive coating has the advantages of low impurity content, high purity, high corrosion resistance, stable physical and chemical properties, high strength, moderate conductivity, high thermal conductivity and no deformation after long-term use at high temperature. The prior graphite boat carrier structure is generally in a vertical form, and a substrate in the vertical graphite boat structure is vertically placed in the graphite boat carrier.
The graphite boat pieces in the vertical graphite boat structure are parallel to each other and are spaced at a fixed distance, and the graphite boat pieces are vertical to the horizontal plane. The substrate is tightly attached to the graphite boat piece and vertically inserted into the graphite boat through the manipulator device, and then is fixed in a clamping point on the graphite boat piece in a rotating mode by a certain angle so as to prevent the substrate from falling off in the technological process. The disadvantages of this construction are: (1) the substrate is easy to scratch in the process of vertically inserting the graphite boat piece close to the graphite boat; (2) the substrate is clamped into the clamping point, so that dirt or sparking is easily caused; (3) when the clamping point is loosened or the clamping position of the substrate is abnormal, gaps exist on the surfaces of the substrate and the graphite boat piece, the size of the substrate is larger and larger along with the requirement of capacity expansion, the probability that the substrate and the graphite boat piece are not tightly attached is greatly increased, and the phenomenon that the process gas bypasses the gaps and forms edge plating on the surface of the substrate easily to generate black edges. The three points can affect the appearance of the coated substrate, reduce the yield of finished products or affect electrical performance parameters.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome the not enough of prior art, provide one kind and need not the fixed substrate of stuck point, avoid causing substrate surface fish tail to arouse substrate coating film appearance defect, reduce the carrier structure for coating film of the outward appearance problem that brings because of the fixed substrate of stuck point.
In order to solve the technical problem, the utility model discloses a following technical scheme:
a carrier structure for coating comprises a base and a plurality of carrier boat pieces, wherein at least two insulating supporting rods are arranged on the base, the carrier boat pieces are stacked and fixed on the insulating supporting rods at equal intervals, the upper surface of the base is an inclined plane with a certain angle to the horizontal plane, the carrier boat pieces are parallel to the upper surface of the base, and grooves for containing slides are formed in the carrier boat pieces.
As a further improvement of the above technical solution:
at least three salient points are arranged in the groove, and the height of each salient point is smaller than the depth of the groove.
An insulating isolation sleeve is arranged between every two adjacent carrier boat sheets and at the position of the insulating support rod, the insulating isolation sleeve is sleeved on the insulating support rod, an insulating isolation sleeve is arranged between the base and the carrier boat sheets and at the position of the insulating support rod, and the insulating isolation sleeve is sleeved on the insulating support rod.
The angle between the upper surface of the base and the inclined plane is beta, and the beta is more than or equal to 1 degree and less than or equal to 5 degrees.
The plurality of carrier boat pieces are divided into odd layers and even layers from top to bottom, a first boat piece hole is formed in one side of each carrier boat piece on the odd layers, a second boat piece hole is formed in one side of each carrier boat piece on the even layers, a first electrode block is arranged at the position, corresponding to the first boat piece hole, of each carrier boat piece on the first odd layers, a second electrode block is arranged at the position, corresponding to the second boat piece hole, of each carrier boat piece on the first even layers, a first conductive support rod penetrates through each first boat piece hole and is connected with the first electrode block, a second conductive support rod is arranged in each second boat piece hole and is connected with the second electrode block.
Compared with the prior art, the utility model has the advantages of:
the carrier structure for coating film of the utility model inserts the substrate above the carrier boat piece after attracting the substrate, then loosens the substrate, the substrate falls into the groove of the inclined carrier boat piece, the movement of the substrate is limited by the arrangement of the groove, thereby realizing the fixation of the substrate without clamping points, and the substrate is not contacted with the carrier boat piece in the process of placing the carrier boat piece on the substrate, thereby avoiding causing the scratch of the surface of the substrate to cause the appearance defect of the coating film of the substrate; appearance problems caused by fixing the substrate by the clamping points, such as clamping point dirt, clamping point scorching and edge winding plating, are reduced, so that the finished product yield is improved, and the finished product yield is improved; meanwhile, the carrier boat sheet inclined at a certain angle relative to the horizontal plane is convenient for the substrate to slide into the groove, the precise butt joint of the mechanical arm is not needed, or the secondary sheet pushing and groove entering condition caused by unstable mechanical arm placing is avoided, so that the operation times of the mechanical arm are reduced.
Drawings
Fig. 1 is a front view of embodiment 1 of the present invention.
Fig. 2 is a right side view of fig. 1.
Fig. 3 is a front view of a single carrier boat in embodiment 1 of the present invention.
Fig. 4 is a plan view of a single carrier boat in embodiment 1 of the present invention.
Fig. 5 is a front view of embodiment 2 of the present invention.
Fig. 6 is a right side view of fig. 5.
Fig. 7 is a top view of the odd-numbered carrier boat according to embodiment 2 of the present invention.
Fig. 8 is a plan view of the carrier boat sheets of even number layers in embodiment 2 of the present invention.
Fig. 9 is a front view of a single carrier boat in embodiment 3 of the present invention.
The reference numerals in the figures denote:
1. a base; 2. a carrier boat sheet; 21. a groove; 22. salient points; 23. a first boat sheet hole; 24. a second boat sheet hole; 25. a through hole; 3. an insulating support rod; 4. an insulating spacer sleeve; 5. a first electrode block; 6. a second electrode block; 7. a first conductive support bar; 8. a second conductive support rod.
Detailed Description
The invention is described in further detail below with reference to the drawings and specific examples.
Example 1
As shown in fig. 1 to 4, the carrier structure for coating of the present embodiment includes a base 1 and a plurality of carrier boat pieces 2, at least two insulating support rods 3 are disposed on the base 1, the plurality of carrier boat pieces 2 are stacked and fixed on each insulating support rod 3 at equal intervals, the upper surface of the base 1 is an inclined surface at a certain angle with respect to the horizontal plane, each carrier boat piece 2 is parallel to the upper surface of the base 1, that is, each carrier boat piece 2 is also an inclined surface at a certain angle with respect to the horizontal plane. The carrier boat 2 is provided with a groove 21 for accommodating the slide.
The manipulator device sucks the substrate, inserts the substrate above the carrier boat piece 2, loosens the substrate, the substrate falls into the groove 21 of the inclined carrier boat piece 2, the movement of the substrate is limited by the groove 21, so that the substrate is fixed without a clamping point, and the substrate is not contacted with the carrier boat piece in the process of placing the carrier boat piece on the substrate, thereby avoiding the appearance defect of the coating film of the substrate caused by scratching the surface of the substrate; the appearance problems caused by the clamping point fixed substrate, such as clamping point dirt, clamping point scorching and edge winding plating, are reduced, thereby improving the yield of finished products and the yield of finished products. Meanwhile, the carrier boat 2 is inclined at a certain angle relative to the horizontal plane, so that the substrate can conveniently slide into the groove 21, the precise butt joint of the mechanical arm is not needed, or the secondary push piece is pushed into the groove due to the unstable placement of the mechanical arm, and the operation times of the mechanical arm are reduced.
In this embodiment, the carrier boat 2 has 5 grooves 21 as an example, and the number of layers is 30, that is, the size of the substrates placed thereon is 30 layers and 5 rows. The grooves 21 are preferably square grooves suitable for square substrates, the number of the insulating support rods 3 is 12, the insulating support rods are arranged in two rows, and through holes 25 for the insulating support rods 3 to pass through are formed in the carrier boat 2. It should be noted that other multi-layer and multi-column structure forms can be designed according to the size of the equipment chamber and the process requirements. It should be noted that the carrier boat 2 and its slot shape are arranged according to the shape of the substrate, for example, a circular substrate carrier boat and the slot shape corresponds to a circular slot.
In this embodiment, the inclined plane angle between the upper surface of the base 1 and the horizontal plane is β, and in order to ensure that the center of gravity of the substrate placed in the groove 21 does not fall, the inclination angle satisfies: beta is 1 DEG to 5 DEG, and preferably in this embodiment, beta is 3 deg.
In this embodiment, three protrusions 22 are disposed in the groove 21, and the height of the protrusions 22 is smaller than the depth of the groove 21. The salient points 22 have the function that after the substrate is placed in the groove, a certain air pressure is formed by a gap between the salient points and the groove bottom, so that the substrate is prevented from being cracked due to overlarge air pressure when a manipulator takes the substrate for suction.
In this embodiment, an insulating spacer sleeve 4 is disposed between two adjacent carrier boat pieces 2 and at the position of the insulating support rod 3, the insulating spacer sleeve 4 is sleeved on the insulating support rod 3, the insulating spacer sleeve 4 is disposed between the base 1 and the carrier boat pieces 2 and at the position of the insulating support rod 3, and the insulating spacer sleeve 4 is sleeved on the insulating support rod 3. The carrier structure is only used as a carrying device of the substrate. The carrier boat sheets 2 are insulated and isolated through the insulating isolation sleeves 4, the heights of the insulating isolation sleeves 4 are consistent, and the same distance between every two adjacent carrier boat sheets 2 is ensured, so that the substrates of all layers are consistent and uniform in process.
Example 2
As shown in fig. 5 to 8, the difference between the carrier structure for plating of the present embodiment and embodiment 1 is:
in this embodiment, the plurality of carrier boat pieces 2 are divided into odd-numbered layers and even-numbered layers from top to bottom, a first boat piece hole 23 is formed in one side of the carrier boat piece 2 in the odd-numbered layers, a second boat piece hole 24 is formed in one side of the carrier boat piece 2 in the even-numbered layers, a first electrode block 5 is arranged in a position, corresponding to the first boat piece hole 23, of the carrier boat piece 2 in the first odd-numbered layer (top layer), a second electrode block 6 is arranged in a position, corresponding to the second boat piece hole 24, of the carrier boat piece 2 in the first even-numbered layer (bottom layer), a first conductive support rod 7 penetrates through each first boat piece hole 23, the first conductive support rod 7 is connected with the first electrode block 5, a second conductive support rod 8 is arranged in each second boat piece hole 24, and the second conductive support rod 8 is connected with the second electrode block 6.
When in use, the electrode rods with different polarities (positive and negative electrodes) are respectively inserted into the first electrode block 5 on the top layer and the second electrode block 6 on the second layer, and an electric field is formed between the carrier boat sheets 2 on the odd-even layers. The carrier structure also serves as an electrode lead-in device, so that an electric field is formed between each layer of the carrier.
The rest of the parts which are not described are basically the same as the embodiment 1, and the description is omitted.
Example 3
As shown in fig. 9, the present embodiment is different from embodiment 1 only in that:
in this embodiment, the carrier boat 2 has a V-shaped structure, one end of which forms a certain angle with the horizontal plane, and the other end of which forms a certain angle with the horizontal plane. Accordingly, the upper surface of the base 1 is also structured in a V-shape parallel to the carrier boat 2.
The rest of the parts which are not described are basically the same as the embodiment 1, and the description is omitted.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention. The technical solution of the present invention can be used by anyone skilled in the art to make many possible variations and modifications, or to modify equivalent embodiments, without departing from the scope of the technical solution of the present invention, using the technical content disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments by the technical entity of the present invention should fall within the protection scope of the technical solution of the present invention.
Claims (5)
1. The utility model provides a carrier structure for coating film which characterized in that: the portable carrier boat comprises a base (1) and a plurality of carrier boat pieces (2), at least two insulating supporting rods (3) are arranged on the base (1), the carrier boat pieces (2) are stacked and fixed on the insulating supporting rods (3) at equal intervals, the upper surface of the base (1) is an inclined plane which has a certain angle with the horizontal plane, each carrier boat piece (2) is parallel to the upper surface of the base (1), and a groove (21) for containing a slide glass is formed in each carrier boat piece (2).
2. The carrier structure for coating according to claim 1, wherein: at least three salient points (22) are arranged in the groove (21), and the height of each salient point (22) is smaller than the depth of the groove (21).
3. The carrier structure for coating according to claim 1, wherein: between two adjacent carrier boat pieces (2) and be equipped with insulating spacer sleeve (4) in insulating support rod (3) department, insulating spacer sleeve (4) cover is on insulating support rod (3), just be equipped with insulating spacer sleeve (4) in insulating support rod (3) department between base (1) and carrier boat piece (2), insulating spacer sleeve (4) cover is on insulating support rod (3).
4. The carrier structure for coating according to any one of claims 1 to 3, wherein: the angle between the upper surface of the base (1) and the horizontal plane is beta, and the beta is more than or equal to 1 degree and less than or equal to 5 degrees.
5. The carrier structure for coating according to any one of claims 1 to 3, wherein: the carrier boat pieces (2) are divided into odd layers and even layers from top to bottom, first boat piece holes (23) are formed in one sides of the carrier boat pieces (2) on the odd layers, second boat piece holes (24) are formed in one sides of the carrier boat pieces (2) on the even layers, first electrode blocks (5) are arranged at positions, corresponding to the first boat piece holes (23), of the carrier boat pieces (2) on the first odd layers, second electrode blocks (6) are arranged at positions, corresponding to the second boat piece holes (24), of the carrier boat pieces (2) on the first even layers, first conductive support rods (7) penetrate through the first boat piece holes (23), the first conductive support rods (7) are connected with the first electrode blocks (5), second conductive support rods (8) are arranged in the second boat piece holes (24), and the second conductive support rods (8) are connected with the second electrode blocks (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020505379.2U CN211529923U (en) | 2020-04-08 | 2020-04-08 | Carrier structure for coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020505379.2U CN211529923U (en) | 2020-04-08 | 2020-04-08 | Carrier structure for coating film |
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| Publication Number | Publication Date |
|---|---|
| CN211529923U true CN211529923U (en) | 2020-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020505379.2U Active CN211529923U (en) | 2020-04-08 | 2020-04-08 | Carrier structure for coating film |
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| Country | Link |
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| CN (1) | CN211529923U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114130608A (en) * | 2021-11-24 | 2022-03-04 | 昆山华誉自动化科技有限公司 | Pressurizer is glued to point |
-
2020
- 2020-04-08 CN CN202020505379.2U patent/CN211529923U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114130608A (en) * | 2021-11-24 | 2022-03-04 | 昆山华誉自动化科技有限公司 | Pressurizer is glued to point |
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