CN215451360U

CN215451360U - Novel wafer basket

Info

Publication number: CN215451360U
Application number: CN202121866562.6U
Authority: CN
Inventors: 王子彤; 解庆权
Original assignee: Jilin Sino Microelectronics Co Ltd
Current assignee: Jilin Magic Semiconductor Co ltd; Jilin Sino Microelectronics Co Ltd
Priority date: 2021-08-11
Filing date: 2021-08-11
Publication date: 2022-01-07
Anticipated expiration: 2031-08-11

Abstract

The utility model discloses a novel wafer basket, which structurally comprises a left wall, a right wall, a top plate and a connecting rod, wherein the top plate and the connecting rod are fixedly connected between the left wall and the right wall, the left wall and the right wall are mutually corresponding and structurally symmetrical, a certain number of flat first bulges are arranged at intervals from top to bottom on the inner side of the left wall by taking the left wall as an example, a first wafer basket groove is formed between the adjacent first bulges, the front end of the first bulge is also provided with an inclined plane, the top of the first bulge positioned at the uppermost end on the left wall is also provided with a strip-shaped second bulge, the two ends of the top plate are respectively and fixedly connected to the second bulges of the left wall and the right wall, the two ends of the connecting rod are respectively and fixedly connected to the lower parts of the left wall and the right wall and are positioned below the first bulge at the lowermost end, and the outer side surfaces of the right wall and the left wall are respectively provided with a square recess, and each wafer can more easily return to a target position after returning, the resistance is reduced, the success rate of conveying is improved, and the utilization rate of equipment is ensured.

Description

Novel wafer basket

Technical Field

The utility model relates to the field of semiconductor device chip manufacturing equipment, in particular to a novel wafer basket.

Background

In each procedure in the semiconductor component production industry, silicon wafers need to be carried by a wafer basket, the material of the wafer basket is metal or nonmetal, each silicon wafer needs to be conveyed from the wafer basket to equipment, and the silicon wafers are conveyed back to the wafer basket after the process is executed. Because the requirement for conveying precision is high, the size of a sheet basket groove on each sheet basket is small, the conveying position deviation is caused by the collision between the silicon wafers and the inner wall of the sheet basket groove with probability, a series of serious consequences such as fragments and the like are caused, the equipment utilization rate is seriously influenced, and the cost loss is increased.

Therefore, a novel wafer basket is urgently needed, and the problems that the wafer is not in place transferred and the wafer is blocked are solved by increasing the fault tolerance rate of the wafer transfer, so that the stability of equipment is improved, and the success rate of the wafer transfer is improved.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a novel wafer basket, so that each wafer can return to a target position more easily after returning, the resistance is reduced, the success rate of transmission is improved, and the utilization rate of equipment is ensured.

In order to achieve the purpose, the utility model adopts the technical scheme that:

a novel wafer basket structurally comprises a left wall, a right wall, a top plate and a connecting rod, wherein the top plate and the connecting rod are fixedly connected between the left wall and the right wall, the left wall and the right wall correspond to each other and are structurally symmetrical, a certain number of flat first bulges are arranged on the inner side of the left wall at intervals from top to bottom, a first basket groove is formed between every two adjacent first bulges, an inclined plane is further arranged at the front end of each first bulge, a strip-shaped second bulge is further arranged at the top of the first bulge positioned at the uppermost end of the left wall, two ends of the top plate are respectively and fixedly connected to the second bulges of the left wall and the right wall, so that the top plate is fixedly connected to the lower portions of the left wall and the right wall, two ends of the connecting rod are respectively and fixedly connected to the lower portions of the first bulge at the lowermost end, and further the connecting rod is fixedly connected to the left wall and the right wall, the outer side surfaces of the right wall and the left wall are both provided with a square recess.

Preferably, a second sheet basket groove is formed between the first protrusion and the second protrusion, and the second sheet basket groove and the first sheet basket groove have the same external dimension.

Preferably, the tail ends of the first bulge and the second bulge are also fixedly connected with a reinforcing rib which vertically penetrates downwards.

The utility model has the beneficial effects that:

the single-side slope is arranged on one side of the front end of each protrusion I extending into the wafer direction, so that the fault tolerance of the wafer inserting position during transverse wafer inserting can be effectively increased, the problems of wafer transferring not in place and wafer transferring and clamping are avoided, the stability of equipment is improved, the success rate of wafer transferring is improved, the problem of wafer fragmentation during the wafer transferring process is solved, the wafer basket has a more obvious effect on wafers with higher weight or wafers with support, the structure is simple, except for the arrangement of necessary supports, other places are hollowed-out, the quality is greatly reduced, and the labor intensity during wafer transferring is saved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an exploded view of the present invention;

the reference symbols shown in the figures are: 1-left wall, 2-right wall, 3-top plate, 4-connecting rod, 5-first bulge, 6-first basket groove, 7-inclined plane, 8-second bulge, 9-recess, 10-second basket groove and 11-reinforcing rib.

Detailed Description

The following describes the present design in detail with reference to the accompanying drawings.

As shown in fig. 1-2, a novel wafer basket structurally comprises a left wall 1, a right wall 2, a top plate 3 and a connecting rod 4, wherein the top plate 3 and the connecting rod 4 are fixedly connected between the left wall 1 and the right wall 2, the left wall 1 and the right wall 2 are mutually corresponding and structurally symmetrical, taking the left wall 1 as an example, a certain number of flat protrusions one 5 are arranged at intervals from top to bottom on the inner side of the left wall 1, a sheet basket groove one 6 is formed between adjacent protrusions one 5, an inclined plane 7 is further arranged at the front end of each protrusion one 5, a strip-shaped protrusion two 8 is further arranged at the top of the protrusion one 5 at the uppermost end of the left wall 1, two ends of the top plate 3 are respectively and fixedly connected to the protrusions two of the left wall 1 and the right wall 2, so as to realize the fixed connection of the top plate 3 with the left wall 1 and the right wall 2, two ends of the connecting rod 4 are respectively and fixedly connected to the lower parts of the left wall 1 and the right wall 2, and is located the below of the arch one 5 of bottommost, and then realizes the fixed connection of connecting rod 4 and left wall 1 and right wall 2, and the lateral surface of right wall 2 and left wall 1 all is equipped with a square sunken 9.

Wherein, a second sheet basket groove 10 is formed between the first bulge 5 and the second bulge 8, and the second sheet basket groove 10 and the first sheet basket groove 6 have the same external dimension.

And the tail ends of the first bulge 5 and the second bulge 8 are also fixedly connected with a reinforcing rib 11 which vertically penetrates downwards and is used for reinforcing the wafer basket.

Examples

The wafer basket is used in the process of conveying the silicon wafers back to the wafer basket, when the wafer basket is used, each silicon wafer is aligned to the corresponding first wafer basket groove 6 and the corresponding second wafer basket groove 10 and pushed into the wafer basket, and due to the inclined plane 7 structure arranged on the first bulge 5, the width of the inlet of the first wafer basket groove 6 and the second wafer basket groove 10 is increased, the wafer basket has a guiding function, and the fault tolerance rate of a wafer entering position during transverse wafer entering can be effectively increased.

Claims

1. A novel wafer basket is characterized in that the structure comprises a left wall, a right wall, a top plate and a connecting rod, wherein the top plate and the connecting rod are fixedly connected between the left wall and the right wall, the left wall and the right wall correspond to each other and are symmetrical in structure, a certain number of flat first bulges are arranged on the inner side of the left wall at intervals from top to bottom, a first basket groove is formed between every two adjacent first bulges, an inclined plane is further arranged at the front end of each first bulge, a strip-shaped second bulge is further arranged at the top of the first bulge positioned at the uppermost end of the left wall, two ends of the top plate are respectively and fixedly connected to the second bulges of the left wall and the right wall, and then the top plate is fixedly connected to the lower portions of the left wall and the right wall, and is positioned below the first bulge at the lowermost end, so that the connecting rod is fixedly connected to the left wall and the right wall, the outer side surfaces of the right wall and the left wall are both provided with a square recess.

2. The novel wafer basket as recited in claim 1, wherein a second wafer basket groove is formed between the first protrusion and the second protrusion, and the second wafer basket groove and the first wafer basket groove have the same outer dimension.

3. The novel wafer basket as recited in claim 1, wherein a vertically downward through reinforcing rib is fixedly connected to the tail ends of the first projection and the second projection.