CN217560637U

CN217560637U - Horizontal correction plate

Info

Publication number: CN217560637U
Application number: CN202221834061.4U
Authority: CN
Inventors: 张展光; 薛新兵
Original assignee: Yangzhou Jingxin Electronic Co ltd
Current assignee: Yangzhou Jingxin Electronic Co ltd
Priority date: 2022-07-14
Filing date: 2022-07-14
Publication date: 2022-10-11
Anticipated expiration: 2032-07-14

Abstract

The utility model discloses a horizontal correction plate in the high-power thyristor chip manufacturing technical field, include: the device comprises a carrying flat plate, a plurality of screw holes and a plurality of screw holes, wherein the carrying flat plate is provided with a plurality of through holes which are distributed in an array manner at equal intervals; and a plurality of adjusting bolts are arranged at intervals and are in one-to-one corresponding threaded connection with the threaded holes. The horizontal correction plate is placed in a sintering furnace, the bottom of the adjusting bolt is in contact with a bottom plate of the sintering furnace, a level gauge is placed on the carrying flat plate, the carrying flat plate is kept horizontal by adjusting the adjusting bolt, the inclination of the original bottom plate of the sintering furnace is compensated, and the levelness of the bottom plate of the sintering furnace is corrected; and a plurality of through holes arranged on the carrying flat plate enable the horizontal correction plate to meet the use requirements of a vacuum sintering furnace and an argon sintering furnace, and the applicability of the horizontal correction plate is improved.

Description

Horizontal correction plate

Technical Field

The utility model relates to a high-power thyristor chip makes technical field, in particular to horizontal correction board.

Background

The high-power thyristor and the rectifier tube are widely applied to the fields of high-speed trains, direct-current transmission and the like. The series of products are mostly made into active regions on a silicon wafer during chip manufacturing, and molybdenum sheets are used as substrates. Aluminum is used as a solder for sintering between the silicon chip and the molybdenum chip. The sintering equipment comprises vacuum sintering and argon protection sintering, the sintering temperature usually reaches 850 +/-5 ℃, aluminum is in a molten state at high temperature, if a bottom plate inclines a little, the aluminum in the molten state flows under the action of earth gravity, so that the aluminum thickness between a silicon wafer and a molybdenum sheet is uneven and even lost, the missing condition is difficult to detect afterwards, and products are scrapped seriously, so that the bottom plate must be kept horizontal no matter which sintering furnace is used.

However, the equipment used for a long time is pressed by high temperature and product gravity, the bottom plate is difficult to avoid deformation, and the horizontal state cannot be ensured, so that a tool is urgently needed for correcting the inclination of the bottom plate.

SUMMERY OF THE UTILITY MODEL

This application has solved the uneven problem of sintering furnace bottom plate deformation that uses for a long time among the prior art through providing a level correction board, has realized the effect of proofreading and correct sintering furnace bottom plate levelness.

The embodiment of the application provides a horizontal correction plate, includes:

the device comprises a carrying flat plate, a plurality of positioning holes and a plurality of screw holes, wherein the carrying flat plate is provided with a plurality of through holes which are distributed in an array manner at equal intervals, and the bottom of the carrying flat plate is provided with a plurality of screw holes;

and a plurality of adjusting bolts are arranged at intervals and are in one-to-one corresponding threaded connection with the threaded holes.

The beneficial effects of the embodiment are as follows: the horizontal correction plate is placed in a sintering furnace, the bottom of the adjusting bolt is in contact with a bottom plate of the sintering furnace, a level gauge is placed on the carrying flat plate, the carrying flat plate is kept horizontal by adjusting the adjusting bolt, the inclination of the original bottom plate of the sintering furnace is compensated, and the levelness of the bottom plate of the sintering furnace is corrected; and a plurality of through holes arranged on the carrying flat plate enable the horizontal correction plate to meet the use requirements of a vacuum sintering furnace and an argon sintering furnace, and the applicability of the horizontal correction plate is improved.

On the basis of the above embodiments, the present application can be further improved, specifically as follows:

in one embodiment of the present application, the threaded holes are arranged in a central symmetry manner.

In one embodiment of the present application, the adjusting bolts are disposed in an axisymmetrical distribution, and the adjusting bolts do not overlap each other on a vertical projection plane. The horizontal correction plate is placed in the sintering furnace, the operation space is small, the adjusting bolts are distributed on the vertical projection surface in a non-overlapping mode, and each adjusting bolt can be adjusted conveniently on the basis of keeping the stability of the carrying flat plate.

In one embodiment of the present application, the carrier plate further has a plurality of grooves formed on the periphery thereof. The spirit level is placed in the recess, prevents that the spirit level removal from dropping among the accommodation process.

In one embodiment of the present application, the level correction plate further comprises a level gauge, the level gauge being matched with the groove.

One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

1. the horizontal correction plate corrects the levelness of the bottom plate of the sintering furnace by adjusting the adjusting bolt;

2. the horizontal correction plate can meet the use requirements of a vacuum sintering furnace and an argon sintering furnace by virtue of a plurality of through holes formed in the objective plate of the horizontal correction plate;

3. the adjusting bolts of the horizontal correcting plate are distributed on the vertical projection surface in a non-overlapping mode, and each adjusting bolt can be adjusted conveniently on the basis of keeping the stability of the carrying flat plate.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.

Fig. 1 is a schematic front view of a horizontal correction plate in embodiment 1;

fig. 2 is a schematic top view of a horizontal correction plate in embodiment 1;

fig. 3 is a schematic front view of a horizontal correction plate according to embodiment 2;

fig. 4 is a schematic top view of a horizontal correction plate in embodiment 2.

Wherein, 1, carry the flat board, 2, adjusting bolt, 3, through-hole, 4 recess.

Detailed Description

The present invention will be further explained with reference to the following embodiments, which are to be understood as illustrative only and not as limiting the scope of the invention, and modifications of the various equivalent forms of the present invention by those skilled in the art after reading the present invention fall within the scope of the appended claims.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "vertical", "outer peripheral surface", etc. are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are usually placed when used, and are only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention.

Furthermore, the term "vertical" and like terms do not imply that the components are absolutely required to be horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the present invention, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples and features of the various embodiments or examples described herein can be combined and combined by those skilled in the art without conflicting aspects.

The embodiment of the application provides a level correction board, has solved the uneven problem of sintering furnace bottom plate deformation that the service life is of a specified duration among the prior art, has realized the effect of proofreading and correct sintering furnace bottom plate levelness.

In order to solve the above problems, the technical solution in the embodiment of the present application has the following general idea:

example 1:

as shown in fig. 1-2, a horizontal correction plate includes: a carrying flat plate 1 and an adjusting bolt 2,

a plurality of through holes 3 are formed in the carrying flat plate 1, the through holes 3 are distributed in an array at equal intervals, and a plurality of threaded holes (not shown in the figure) are formed in the bottom of the carrying flat plate 1;

a plurality of adjusting bolts 2 are arranged at intervals, and the adjusting bolts 2 are in one-to-one correspondence to the threaded holes.

Optionally, the threaded holes are arranged in a centrosymmetric manner.

The horizontal correction plate is used as follows:

when the sintering furnace is not heated, the horizontal correction plate is placed in the furnace chamber, the horizontal ruler is placed on the correction plate at different angles, and the adjusting bolt is adjusted to enable the correction plate to be in a horizontal state along any direction. Checking each adjusting bolt, contacting the bottom of the adjusting bolt with the bottom plate of the sintering furnace, placing the product to be processed and the graphite mold on the horizontal correcting plate, closing the furnace chamber, and finishing the processing according to the original sintering operation instruction.

Example 2:

as shown in fig. 3-4, in the horizontal correction plate, on the basis of embodiment 1, the adjusting bolts 2 are arranged in an axisymmetric distribution, and the adjusting bolts 2 do not overlap each other on a vertical projection plane.

Further, the horizontal correction plate further comprises a level meter (not shown in the figure), a plurality of grooves 4 are further formed in the periphery of the objective plate 1, and the level meter is matched with the grooves 4.

The technical scheme in the embodiment of the application at least has the following technical effects or advantages:

3. the adjusting bolts of the horizontal correcting plate are distributed on the vertical projection surface in a non-overlapping mode, and each adjusting bolt can be conveniently adjusted on the basis of keeping the stability of the carrying flat plate.

While embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the present invention.

Claims

1. A horizontal correction plate, comprising:

2. The level correction plate according to claim 1, wherein: the threaded holes are arranged in a central symmetry manner.

3. The horizontal correction plate according to claim 1, characterized in that: the adjusting bolts are arranged in an axisymmetrical manner and do not overlap with each other on a vertical projection plane.

4. The level correction plate according to claim 3, wherein: the periphery of the carrying flat plate is also provided with a plurality of grooves.

5. The level correction plate according to claim 4, wherein: the horizontal correction plate further comprises a level meter, and the level meter is matched with the groove.