CN216205870U - Bearing device for workpiece measurement - Google Patents
Bearing device for workpiece measurement Download PDFInfo
- Publication number
- CN216205870U CN216205870U CN202122149298.0U CN202122149298U CN216205870U CN 216205870 U CN216205870 U CN 216205870U CN 202122149298 U CN202122149298 U CN 202122149298U CN 216205870 U CN216205870 U CN 216205870U
- Authority
- CN
- China
- Prior art keywords
- carrier
- plate
- measuring
- measurement
- carrier plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a bearing device for workpiece measurement, which comprises a bottom plate and a measurement carrier plate, wherein the measurement carrier plate is detachably arranged on the bottom plate, the bottom plate is of a hollow structure, and the measurement carrier plate is detachably arranged on the measurement carrier plate; the workpiece is placed on the measurement carrier plate, and the bottom plate is placed on the glass substrate. During measurement, the bottom plate is firstly placed on the glass substrate, the measuring support plate is then placed on the bottom plate, and finally the workpiece is placed on the measuring support plate.
Description
Technical Field
The utility model relates to the technical field of workpiece detection equipment, in particular to a bearing device for workpiece measurement.
Background
When measuring silicon material, the measurement items required to be performed include thickness measurement, outer diameter measurement, and hole measurement. These measurement items are performed on dedicated measurement equipment, wherein some measurement items require glass as a detection carrier, for example, when measuring the diameter of a hole, the measurement platform must be irradiated by light through the glass.
In order to ensure the concentration of detection items, the existing measuring equipment takes glass as a substrate, and a workpiece is directly placed on the glass substrate during detection. However, silicon materials have similar hardness to glass (silica), and when placed directly on a glass substrate, the silicon materials are easily brittle and worn, which not only damages the workpiece, but also wears the glass substrate.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a bearing device for workpiece measurement, which protects products and measuring equipment under the condition of maintaining certain measuring precision; meanwhile, the measurement mode can be freely switched to a hole measurement mode and a size measurement mode, so as to solve the technical problems in the background technology.
The bearing device for workpiece measurement comprises a bottom plate and a measurement carrier plate, wherein the measurement carrier plate is detachably arranged on the bottom plate, the bottom plate is of a hollow structure, and the measurement carrier plate is detachably arranged on the measurement carrier plate; the workpiece is placed on the measurement carrier plate, and the bottom plate is placed on the glass substrate.
In a preferred embodiment, a first through groove is formed on the bottom plate, a protrusion is formed at the bottom of the metrology carrier, and when the metrology carrier is fixed to the bottom plate, the protrusion is clamped in the first through groove.
In a preferred embodiment, the metrology carrier has a positioning column disposed thereon, the positioning column is perpendicular to the surface of the metrology carrier, and the positioning column is fixed to the metrology carrier by plugging.
In a preferred embodiment, the bottom plate has a plurality of first fixing holes, and the metrology carrier has a plurality of second fixing holes corresponding to the first fixing holes.
In a preferred embodiment, the metrology carrier includes a first metrology carrier and a second metrology carrier, which are not used simultaneously.
In a preferred embodiment, a second through groove is disposed on the first metrology carrier plate, a notch of the second through groove is an inclined surface, the second through groove is opposite to the first through groove, and a notch is disposed on one side of the second through groove.
In a preferred embodiment, a rectangular mark frame is disposed on the second metrology carrier, and the rectangular mark frame is disposed at a middle position of the metrology carrier.
The technical scheme of the utility model has the beneficial effects that:
1. during measurement, the bottom plate is firstly placed on the glass substrate, the measurement carrier plate is then placed on the bottom plate, and finally the workpiece is placed on the measurement carrier plate.
2. The first measuring carrier plate and the second measuring carrier plate are arranged according to measuring requirements, the two measuring carrier plates can simultaneously meet hole measuring and size measuring, the two measuring carrier plates are convenient to replace, and measuring efficiency and the adaptive rate of the measuring carrier plates are guaranteed.
Drawings
FIG. 1 is a schematic view of the structure of the bottom plate of the present invention,
FIG. 2 is a bottom view of the first metrology carrier of the present invention,
FIG. 3 is a bottom view of a second metrology carrier of the present invention,
FIG. 4 is a diagram illustrating a relationship between a first metrology carrier and a base plate according to the present invention,
FIG. 5 is a diagram illustrating a relationship between a second metrology carrier and a base plate according to the present invention.
Description of reference numerals: the measuring device comprises a base plate 1, a first through groove 11, a first fixing hole 12, a first measuring carrier plate 2, a second through groove 21, a notch 22, a second measuring carrier plate 3, a rectangular mark frame 31, a protruding part 4, a positioning column 5 and a second fixing hole 6.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.
Referring to fig. 1 to 5, a carrying device for workpiece measurement according to the present invention includes a bottom plate 1 and a measurement carrier, wherein the measurement carrier is detachably disposed on the bottom plate 1, and the measurement carrier is detachably disposed on the measurement carrier. The workpiece is placed on the measurement carrier plate, the bottom plate 1 is placed on the glass substrate, and the bottom plate 1 is set to be a hollow structure, and the hollow part is opposite to the glass substrate.
During measurement, the bottom plate 1 is firstly placed on the glass substrate, the measurement carrier plate is then placed on the bottom plate 1, and finally the workpiece is placed on the measurement carrier plate, and the workpiece is prevented from directly contacting the glass substrate by arranging the assembly of the measurement carrier plate and the bottom plate 1, so that the safety of the workpiece and the measurement equipment is protected.
The bottom plate 1 is provided with a plurality of first fixing holes 12, and the measurement carrier plate is provided with a plurality of second fixing holes 6 corresponding to the first fixing holes 12. The first carrier and the second carrier can be fixed to each other through the first fixing holes 12 and the second fixing holes 6, so as to ensure the correspondence between the bottom plate 1 and the metrology carrier and prevent the metrology carrier from shifting during use.
The bottom plate 1 is provided with a first through groove 11, the bottom of the measurement carrier plate is provided with a protrusion 4, and when the measurement carrier plate is fixed with the bottom plate 1, the protrusion 4 is clamped in the first through groove 11. The first through groove 11 is provided to leak the glass substrate and ensure light transmittance of the glass substrate. When the first fixing holes 12 are not used and the second fixing holes 6 are fixed, the protrusion 4 disposed at the bottom of the metrology carrier is used to limit the metrology carrier and prevent the metrology carrier from shifting on the bottom plate 1.
The measuring support plate is provided with a positioning column 5, the positioning column 5 is arranged perpendicular to the surface of the measuring support plate, and the positioning column 5 is fixedly connected with the measuring support plate in an inserting manner. Two positioning columns 5 are arranged and used for positioning the workpiece. When the positioning device is used, the edge of a workpiece is abutted to the positioning column 5, and then the workpiece placing position point can be determined.
The metrology carrier includes a first metrology carrier 2 and a second metrology carrier 3, and the first metrology carrier 2 and the second metrology carrier 3 are not used simultaneously. The first metrology carrier 2 is used to realize hole metrology, and the second metrology carrier 3 is used to realize measurement of outer diameter, thickness, etc.
The first measurement carrier plate 2 is provided with a second through groove 21, the second through groove 21 is opposite to the first through groove 11, one side of the second through groove 21 is provided with a notch 22, and the notch 22 is used for increasing light transmittance and facilitating workpiece picking and placing. Because the glass substrate is required to be used for transmitting light when the hole measurement is carried out, the second through groove 21 is arranged on the first measurement carrier plate 2, and after the workpiece is placed, the glass substrate is directly opposite to the workpiece without shielding due to the existence of the first through groove 11 and the second through groove 21, so that the smooth hole detection is ensured. The notch of the second through groove 21 is an inclined surface, so that the workpiece can be loaded on the notch.
The second metrology carrier 3 is provided with a rectangular mark frame 31, and the rectangular mark frame 31 is disposed at a middle position of the metrology carrier. During size detection, a glass substrate is not needed, so that the second carrier plate is set to be a solid plane plate structure, and the rectangular identification frame 31 arranged on the second carrier plate can be used for calibrating the area range of the detection.
The first measuring carrier plate 2 and the second measuring carrier plate 3 are arranged according to the measuring requirement, the two measuring carrier plates can simultaneously meet the requirements of hole measurement and size measurement, the two measuring carrier plates are convenient to replace, and the measuring efficiency and the utilization rate of the measuring carrier plates are ensured.
It is to be understood that the described embodiments are merely a few embodiments of the utility model, and not all embodiments. All other embodiments, which can be derived by one of ordinary skill in the art and related arts based on the embodiments of the present invention without any creative effort, shall fall within the protection scope of the present invention. Structures, devices, and methods of operation not specifically described or illustrated herein are generally practiced in the art without specific recitation or limitation.
Claims (7)
1. A bearing device for workpiece measurement is characterized in that: the device comprises a bottom plate and a measuring carrier plate, wherein the measuring carrier plate is detachably arranged on the bottom plate, the bottom plate is of a hollow structure, and the measuring carrier plate is detachably arranged on the measuring carrier plate; the workpiece is placed on the measurement carrier plate, and the bottom plate is placed on the glass substrate.
2. A carrier apparatus for workpiece metrology as claimed in claim 1 wherein: the bottom plate is provided with a first through groove, the bottom of the measuring carrier plate is provided with a protruding part, and when the measuring carrier plate is fixed with the bottom plate, the protruding part is clamped in the first through groove.
3. A carrier apparatus for workpiece metrology as claimed in claim 1 wherein: the measuring support plate is provided with a positioning column, the positioning column is perpendicular to the surface of the measuring support plate, and the positioning column is fixedly connected with the measuring support plate in an inserting mode.
4. A carrier apparatus for workpiece metrology as claimed in claim 1 wherein: the bottom plate is provided with a plurality of first fixing holes, and the measuring carrier plate is provided with a plurality of second fixing holes corresponding to the first fixing holes.
5. The carrier apparatus of claim 2, wherein: the measuring carrier plate comprises a first measuring carrier plate and a second measuring carrier plate, and the first measuring carrier plate and the second measuring carrier plate are not used at the same time.
6. The carrier apparatus of claim 5, wherein: the first measuring support plate is provided with a second through groove, a notch of the second through groove is an inclined plane, the second through groove is opposite to the first through groove, and a notch is formed in one side of the second through groove.
7. The carrier apparatus of claim 5, wherein: the second measurement carrier plate is provided with a rectangular identification frame, and the rectangular identification frame is arranged in the middle of the measurement carrier plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122149298.0U CN216205870U (en) | 2021-09-07 | 2021-09-07 | Bearing device for workpiece measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122149298.0U CN216205870U (en) | 2021-09-07 | 2021-09-07 | Bearing device for workpiece measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216205870U true CN216205870U (en) | 2022-04-05 |
Family
ID=80917887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122149298.0U Active CN216205870U (en) | 2021-09-07 | 2021-09-07 | Bearing device for workpiece measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216205870U (en) |
-
2021
- 2021-09-07 CN CN202122149298.0U patent/CN216205870U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103847216A (en) | Applying jig and using method thereof | |
| CN104737282A (en) | Workpiece holder and method using same for detecting lateral displacement of workpiece | |
| CN103075970B (en) | Method of compensating orthogonal degree of length measuring device and length measuring device using the same | |
| CN216205870U (en) | Bearing device for workpiece measurement | |
| CN105973899B (en) | Substrate detection equipment and method of testing substrate | |
| TW200506315A (en) | Substrate holder, substrate processing apparatus, substrate inspection device and method of using the same | |
| CN203785956U (en) | Positioning fixture | |
| CN104129002A (en) | Fixture for breaking | |
| CN206259332U (en) | A kind of chip fixing tool | |
| CN103928381A (en) | Auxiliary tool for measuring silicon wafer contact angle | |
| CN204991096U (en) | Display device detects supplementary tool | |
| KR101500950B1 (en) | Bonding tool for bonding back-tape and protection film in touch screen module | |
| JP4251546B2 (en) | Thin plate horizontal holding device | |
| CN215933535U (en) | Etching equipment | |
| CN105807459A (en) | Substrate alignment device and alignment method | |
| JP2005156924A (en) | Holder for inspection apparatus | |
| CN201273985Y (en) | Clip for mask plate transferring and checking | |
| CN201322761Y (en) | Supporting plate for probe cards | |
| CN215525581U (en) | Auxiliary detection jig | |
| US20160042987A1 (en) | Flexible handling system for semiconductor substrates | |
| CN203839357U (en) | Fixing pallet for chip carrying boxes for silicon chips | |
| CN211293507U (en) | Bonding platform device | |
| JP2003065703A (en) | Method for measuring warp of board | |
| CN104816559B (en) | Laser marking method of semiconductor material | |
| CN220561301U (en) | Bearing assembly and flatness detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |