CN215933535U

CN215933535U - Etching equipment

Info

Publication number: CN215933535U
Application number: CN202122155687.4U
Authority: CN
Inventors: 诸嘉豪
Original assignee: Wuxi Disi Microelectronics Co ltd
Current assignee: Wuxi Disi Microelectronics Co ltd
Priority date: 2021-09-07
Filing date: 2021-09-07
Publication date: 2022-03-01
Anticipated expiration: 2031-09-07

Abstract

The utility model provides an etching apparatus, comprising: the assembling box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembling box, and the bottom of the second box body part is used for supporting the mask plate; the detection part is arranged on one side of the first box body part to detect whether the mask plate exists at the first box body part; the bearing table is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table; the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembling box is the same as the thickness direction of the mask plate in the assembling box. The etching equipment has high universality, and the problem that the universality of the etching equipment in the prior art is poor is solved.

Description

Etching equipment

Technical Field

The utility model relates to the technical field of etching equipment, in particular to etching equipment.

Background

In the prior art, an etching machine workpiece table and an assembly box (smif) suitable for 6-inch mask plate products are common, but the etching machine workpiece table and the assembly box suitable for 5-inch mask plate products are almost not available, so that the special etching machine workpiece table and the special assembly box of the 5-inch mask plate products need to be customized, and on one hand, the special etching machine workpiece table and the special assembly box are high in cost; on the other hand, when the etching machine workpiece table is replaced, the process chamber needs to be opened for replacement, the process chamber is in a vacuum environment, the process chamber is opened to cause chamber pollution, and vacuumizing needs to be performed again after replacement is finished, so that time and labor are consumed; in the third aspect, the process of replacing the workpiece table is more complicated, and the ceramic workpiece table is easily worn when being disassembled and assembled.

If the 5-inch mask product is directly operated by using the etching machine workpiece table and the assembly box of the 6-inch mask product, the detection part of the etching machine cannot detect the 5-inch mask product, so that the 5-inch mask product cannot be operated, namely, the etching machine workpiece table and the assembly box of the 6-inch mask product cannot be directly compatible with the 5-inch mask product.

Therefore, the existing etching equipment has poor universality.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide etching equipment to solve the problem that the etching equipment in the prior art is poor in universality.

In order to achieve the above object, the present invention provides an etching apparatus, comprising: the assembling box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembling box, and the bottom of the second box body part is used for supporting the mask plate; the detection part is arranged on one side of the first box body part to detect whether the mask plate exists at the first box body part; the bearing table is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table; the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembling box is the same as the thickness direction of the mask plate in the assembling box.

Further, the bearing table is of a plate-shaped structure; and/or the outer wall of the carrier platform is in contact with or clearance fit with the side wall of the mounting box.

Further, the bearing table is provided with a preset position for placing a mask plate with a preset size, and the etching equipment further comprises: the limiting part is arranged along the circumferential direction of the preset position so as to limit the mask plate at the preset position.

Further, the spacing portion includes: when the number of the limiting columns is multiple, the limiting columns are distributed at intervals along the circumferential direction of the preset position; and/or at least one limiting block, when the limiting blocks are multiple, the limiting blocks are distributed at intervals along the circumferential direction of the preset position.

Furthermore, the plurality of limiting columns comprise limiting column units, each limiting column unit comprises two limiting column groups, and each limiting column group is provided with at least one limiting column; the shape of the preset position is a polygon, the limiting column unit is used for being arranged corresponding to one of a plurality of vertex angles of the preset position, and two limiting column groups of the limiting column unit are respectively arranged on two side edges of the corresponding vertex angle; wherein, spacing post unit is at least one.

Further, the plurality of stoppers include: the first limiting block is in a strip shape and extends along the outer periphery of a preset position; the number of the first limiting blocks is at least one, and when the number of the first limiting blocks is multiple, the multiple first limiting blocks are distributed at intervals along the circumferential direction of the preset position; and/or the second limiting block comprises a first bar-shaped block and a second bar-shaped block which are connected with each other; the shape of the preset position is a polygon, the second limiting block is used for being arranged corresponding to one vertex angle of a plurality of vertex angles of the preset position, and the first bar-shaped block and the second bar-shaped block of the second limiting block are respectively arranged on two side edges of the corresponding vertex angle; wherein, the second stopper is at least one.

Furthermore, two first grooves which are arranged oppositely are formed in the bearing surface of the bearing table, and each first groove is arranged on the outer periphery of the preset position.

Furthermore, a clamping groove for accommodating the mask plate with the preset size is formed in the bearing surface of the bearing table, and the side wall of the clamping groove is in contact with or in clearance fit with the outer wall of the mask plate with the preset size, so that the side wall of the clamping groove forms a limiting part.

Furthermore, two second grooves which are arranged oppositely are formed in the bearing surface of the bearing table, and each second groove is arranged on the outer periphery of the clamping groove and communicated with the clamping groove.

Further, the etching equipment comprises an etching machine, a workpiece table and an assembly box of the etching machine are matched with the 6-inch mask, and the mask with the preset size is a 5-inch mask.

By applying the technical scheme, the etching equipment comprises an assembly box, a detection part and a bearing table, wherein the assembly box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembly box, and the bottom of the second box body part is used for supporting a mask plate; the detection part is arranged on one side of the first box body part to detect whether a mask plate exists at the first box body part; the bearing table is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table; the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembling box is the same as the thickness direction of the mask plate in the assembling box.

In the specific implementation process, the etching equipment comprises an etching machine, and the assembly box is placed on a workpiece table of the etching machine, namely the first box body part and the second box body part are distributed along the vertical direction, and the first box body part is positioned above the second box body part; the detection part is used for detecting whether the mask plate is arranged at the first box body part, namely the detection part can detect that the mask plate is arranged in the assembly box only when the mask plate in the assembly box reaches the first box body part, otherwise the detection part cannot detect the mask plate in the assembly box; because the thickness of the mask with the preset size is smaller than the height of the second box body part, when the mask with the preset size is directly placed in the assembly box, the top end of the mask with the preset size cannot reach the first box body part, and the detection part cannot detect the mask with the preset size in the assembly box; therefore, the bearing table is placed in the assembly box, and the mask with the preset size is placed on the bearing table, so that the height of the mask with the preset size relative to the assembly box can be increased, the top end of the mask with the preset size is located in the first box body part, even if the mask with the preset size reaches the first box body part, the detection part can detect the mask with the preset size in the assembly box. Therefore, the etching equipment has high universality, and the problem that the etching equipment in the prior art is poor in universality is solved.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the utility model and, together with the description, serve to explain the utility model and not to limit the utility model. In the drawings:

FIG. 1 shows a schematic view of a pre-sized reticle set on a stage according to the present invention;

fig. 2 shows a side view of a carrier table according to the utility model.

Wherein the figures include the following reference numerals:

10. a bearing table; 21. a limiting column; 12. a first groove; 30. and (5) masking a mask.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

The utility model provides etching equipment, please refer to fig. 1 and 2, the etching equipment comprises an assembly box, a detection part and a bearing table 10, wherein the assembly box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembly box, and the bottom of the second box body part is used for supporting a mask plate; the detection part is arranged on one side of the first box body part to detect whether a mask plate exists at the first box body part; the bearing table 10 is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table 10; the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembling box is the same as the thickness direction of the mask plate in the assembling box.

In the specific implementation process, the etching equipment comprises an etching machine, and the assembly box is placed on a workpiece table of the etching machine, namely the first box body part and the second box body part are distributed along the vertical direction, and the first box body part is positioned above the second box body part; the detection part is used for detecting whether the mask plate is arranged at the first box body part, namely the detection part can detect that the mask plate is arranged in the assembly box only when the mask plate in the assembly box reaches the first box body part, otherwise the detection part cannot detect the mask plate in the assembly box; because the thickness of the mask with the preset size is smaller than the height of the second box body part, when the mask with the preset size is directly placed in the assembly box, the top end of the mask with the preset size cannot reach the first box body part, and the detection part cannot detect the mask with the preset size in the assembly box; therefore, the bearing table 10 is placed in the assembly box, and the mask with the preset size is placed on the bearing table 10, so that the height of the mask with the preset size relative to the assembly box can be increased, the top end of the mask with the preset size is located in the first box body part, and even if the mask with the preset size reaches the first box body part, the detection part can detect the mask with the preset size in the assembly box. Therefore, the etching equipment has high universality, and the problem that the etching equipment in the prior art is poor in universality is solved.

As shown in fig. 1, the reticle 30 of fig. 1 is the above-mentioned pre-sized reticle.

For example, a workpiece table and an assembly box of the etching machine are both adapted to a 6-inch mask, the assembly box is a 6-inch mask assembly box, that is, the assembly box bearing the 6-inch mask is placed on the workpiece table of the etching machine, and a detection part of the etching machine can detect that the mask is arranged in the assembly box; the mask with the preset size is a 5-inch mask, the thickness of the 5-inch mask is smaller than that of the 6-inch mask, and the 5-inch mask can be operated by using a workpiece table and an assembly box of a 6-inch mask product by using the etching equipment. On one hand, the special etching machine workpiece table and the special assembly box of the 5-inch mask product are not required to be customized, so that the cost is saved; on the other hand, the step of replacing the workpiece table by opening the cavity is avoided, the damage risk of the workpiece table is reduced, and the operation flow is optimized.

Specifically, the height of the mounting box is 250 mils, the height of the first box portion is 50 mils, and the thickness of the predetermined-sized reticle is 90 mils, so the height H of the susceptor 10 ranges from 110 mils to 160 mils, for example, the height H of the susceptor 10 is 140 mils or 120 mils.

In the specific implementation process, the etching machine comprises a mechanical arm and the detection part, the detection part is arranged on the mechanical arm, and after the detection part detects that the assembly box on the workpiece table is internally provided with a mask plate, the mechanical arm is used for clamping the assembly box and transmitting the assembly box.

Specifically, the etcher is a dry etcher, and the detection portion is a sensor.

Specifically, the susceptor 10 is a plate-shaped structure, and the susceptor 10 is made of ceramic material.

Specifically, the outer wall of the susceptor 10 contacts or is in clearance fit with the side wall of the mounting box to ensure the stability of the reticle on the susceptor 10 during the transportation of the mounting box.

In this embodiment, the carrying table 10 has a preset position for placing a mask with a preset size, and the etching apparatus further includes a limiting portion, where the limiting portion is arranged along the circumferential direction of the preset position to limit the mask at the preset position, so as to avoid shaking and shifting of the mask at the preset position during transmission.

It should be noted that the transmission process of the assembly box and the mask plate therein is planar transmission without turning process, so that the limiting part is arranged to ensure that the mask plate does not shake front and back and left and right in the transmission process.

In this embodiment, the first structure of the limiting portion is: the limiting part comprises at least one limiting column 21 and/or at least one limiting block; when the number of the limiting columns 21 is multiple, the multiple limiting columns 21 are distributed at intervals along the circumferential direction of the preset position; when the stopper is a plurality of, a plurality of stoppers are along the circumference interval distribution of predetermineeing the position.

Optionally, the extending direction of the limiting column 21 is perpendicular to the bearing surface of the bearing table 10.

Specifically, the plurality of limiting columns 21 include a limiting column unit, the limiting column unit includes two limiting column sets, and each limiting column set has at least one limiting column 21; the shape of the preset position is a polygon, the limiting column unit is used for being arranged corresponding to one of a plurality of vertex angles of the preset position, and two limiting column groups of the limiting column unit are respectively arranged on two side edges of the corresponding vertex angle; wherein, spacing post unit is at least one.

Specifically, the plurality of limiting blocks comprise second limiting blocks and/or strip-shaped first limiting blocks, and the first limiting blocks extend along the outer periphery of the preset position; the second limiting block comprises a first bar-shaped block and a second bar-shaped block which are connected with each other; the shape of the preset position is a polygon, the second limiting block is used for being arranged corresponding to one vertex angle of the plurality of vertex angles of the preset position, and the first strip-shaped block and the second strip-shaped block of the second limiting block are arranged on two side edges of the corresponding vertex angle respectively.

It should be noted that, when the preset position is a polygon, the mask at the preset position is a polygon; however, the reticle in the prior art is generally quadrilateral, so the predetermined position is quadrilateral, for example, the predetermined position is rectangular or square.

Optionally, the number of the first limiting blocks is at least one, and when the number of the first limiting blocks is multiple, the multiple first limiting blocks are distributed at intervals along the circumferential direction of the preset position; the second limiting block is at least one.

Optionally, the number of the limiting column units is multiple, and the multiple limiting column units are arranged in one-to-one correspondence with the multiple vertex angles of the preset positions, so that the two limiting column groups of each limiting column unit are respectively arranged on two side edges of the corresponding vertex angle, and a second limiting block is not required to be arranged at the moment. Or the second limiting blocks are arranged in a one-to-one correspondence manner with the plurality of vertex angles at the preset positions, so that the first bar-shaped blocks and the second bar-shaped blocks of the second limiting blocks are respectively arranged on two side edges of the corresponding vertex angles, and a limiting column unit is not required to be arranged at the moment.

For example, when the preset position is a quadrilateral, the number of the limiting column units is four, and the four limiting column units are arranged in one-to-one correspondence with the four vertex angles of the preset position, so that the two limiting column groups of each limiting column unit are respectively arranged on two side edges of the corresponding vertex angle. Or the number of the second limiting blocks is four, and the four second limiting blocks are arranged in one-to-one correspondence with the four vertex angles at the preset positions, so that the first bar-shaped block and the second bar-shaped block of each second limiting block are respectively arranged on two side edges of the corresponding vertex angle. Or two limiting column units and two second limiting blocks, or one limiting column unit and three second limiting blocks, or three limiting column units and one second limiting block can be arranged.

Specifically, two first grooves 12 arranged oppositely are formed in the bearing surface of the bearing table 10, each first groove 12 is arranged at the outer periphery of the preset position, so that the mask can be conveniently placed at the preset position or taken away from the bearing table 10 through the two first grooves 12, or the clamping component can be used for conveniently placing the clamped mask at the preset position or clamping the mask from the bearing table 10 through the two first grooves 12, and the first grooves 12 are used for yielding the clamping component.

In this embodiment, the second structure of the limiting portion is: a clamping groove for accommodating a mask plate with a preset size is formed in the bearing surface of the bearing table 10, and the side wall of the clamping groove is in contact with or in clearance fit with the outer wall of the mask plate with the preset size, so that a limiting part is formed on the side wall of the clamping groove.

Specifically, two second grooves which are arranged oppositely are formed in the bearing surface of the bearing table 10, each second groove is formed in the outer periphery of the corresponding clamping groove and communicated with the corresponding clamping groove, the mask is conveniently placed at a preset position or taken away from the bearing table 10 through the two second grooves, or the clamping component is made to conveniently place the clamped mask at the preset position or clamp the clamped mask from the bearing table 10 through the two second grooves, and the second grooves are used for yielding the clamping component.

From the above description, it can be seen that the above-described embodiments of the present invention achieve the following technical effects:

in the etching equipment, the etching equipment comprises an assembly box, a detection part and a bearing table 10, wherein the assembly box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembly box, and the bottom of the second box body part is used for supporting a mask plate; the detection part is arranged on one side of the first box body part to detect whether a mask plate exists at the first box body part; the bearing table 10 is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table 10; the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembling box is the same as the thickness direction of the mask plate in the assembling box.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An etching apparatus, comprising:

the assembling box comprises a first box body part and a second box body part which are mutually connected and distributed along the height direction of the assembling box, and the bottom of the second box body part is used for supporting a mask plate;

the detection part is arranged on one side of the first box body part to detect whether a mask plate exists at the first box body part;

the bearing table (10) is detachably arranged in the assembly box, and the top end of the mask plate with the preset size is positioned in the first box body part by arranging the mask plate with the preset size on the bearing table (10); the thickness of the mask plate with the preset size is smaller than the height of the second box body part, and the height direction of the assembly box is the same as the thickness direction of the mask plate in the assembly box.

2. Etching apparatus according to claim 1,

the bearing table (10) is of a plate-shaped structure; and/or

The outer wall of the bearing table (10) is in contact with or in clearance fit with the side wall of the assembling box.

3. Etching apparatus according to claim 1, wherein the carrier table (10) has a predetermined position for placing the predetermined-sized reticle thereon, the etching apparatus further comprising:

the limiting part is arranged along the circumferential direction of the preset position so as to limit the mask plate at the preset position.

4. The etching apparatus according to claim 3, wherein the stopper portion comprises:

when the number of the limiting columns (21) is multiple, the limiting columns (21) are distributed at intervals along the circumferential direction of the preset position; and/or

And when the limiting blocks are multiple, the limiting blocks are distributed along the circumferential direction of the preset position at intervals.

5. Etching apparatus according to claim 4, wherein the plurality of restraining columns (21) comprises a restraining column unit comprising two restraining column sets, each having at least one restraining column (21);

the shape of the preset position is a polygon, the limiting column unit is used for being arranged corresponding to one of the vertex angles of the preset position, and two limiting column groups of the limiting column unit are respectively arranged on two side edges of the corresponding vertex angle; wherein, spacing post unit is at least one.

6. Etching apparatus according to claim 4 or 5, wherein the plurality of stoppers comprises:

the first limiting block is in a strip shape and extends along the outer periphery of the preset position; the number of the first limiting blocks is at least one, and when the number of the first limiting blocks is multiple, the first limiting blocks are distributed at intervals along the circumferential direction of the preset position; and/or

The second limiting block comprises a first bar-shaped block and a second bar-shaped block which are connected with each other; the shape of the preset position is a polygon, the second limiting block is used for being arranged corresponding to one vertex angle in a plurality of vertex angles of the preset position, and the first bar-shaped block and the second bar-shaped block of the second limiting block are respectively arranged on two side edges of the corresponding vertex angle; wherein, the second stopper is at least one.

7. Etching apparatus according to claim 4, wherein the carrying surface of the carrying table (10) is provided with two first grooves (12) disposed oppositely, and each first groove (12) is disposed at the outer periphery of the preset position.

8. The etching equipment according to claim 3, wherein a clamping groove for accommodating the mask plate with the preset size is formed on the bearing surface of the bearing table (10), and the side wall of the clamping groove is in contact with or in clearance fit with the outer wall of the mask plate with the preset size, so that the side wall of the clamping groove forms the limiting part.

9. Etching apparatus according to claim 8, wherein the carrying surface of the carrying table (10) is provided with two oppositely disposed second grooves, and each of the second grooves is disposed at an outer periphery of the slot and is communicated with the slot.

10. The etching equipment according to claim 1, wherein the etching equipment comprises an etching machine, a workpiece table of the etching machine and the assembly box are both matched with a 6-inch mask, and the mask with the preset size is a 5-inch mask.