CN210418397U - Vacuum adsorption platform and transfer mechanism - Google Patents
Vacuum adsorption platform and transfer mechanism Download PDFInfo
- Publication number
- CN210418397U CN210418397U CN201920853217.5U CN201920853217U CN210418397U CN 210418397 U CN210418397 U CN 210418397U CN 201920853217 U CN201920853217 U CN 201920853217U CN 210418397 U CN210418397 U CN 210418397U
- Authority
- CN
- China
- Prior art keywords
- vacuum adsorption
- platform
- vacuum
- plate
- adsorption plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a vacuum adsorption platform and transfer mechanism, this vacuum adsorption platform include the base and locate the vacuum adsorption plate of base, be provided with a plurality of support columns on the vacuum adsorption plate, be formed with the vacuum adsorption chamber in the vacuum adsorption plate, at least part the support column seted up with the absorption hole of vacuum adsorption chamber intercommunication. Above-mentioned vacuum adsorption platform, support column are used for bearing glass panels, and support column and vacuum adsorption plate's other regions form the height drop for remaining piece drops in vacuum adsorption plate's other regions on the glass panels after the cutting, effectively avoids glass piece accumulation to cause glass panels by fish tail, scratch etc. on vacuum adsorption plate's surface. And the design of the supporting columns enables the contact area of the glass panel and the vacuum adsorption platform to be reduced, and the contact chance of residual debris and the glass panel is reduced.
Description
Technical Field
The utility model relates to an automated production equipment field especially relates to a vacuum adsorption platform and transfer mechanism.
Background
In the Flat Panel Display industry (FPD), a whole large-sized glass substrate is first cut and then assembled into a Display screen of a consumer electronic product such as a mobile phone and a Flat Panel. The size of the glass substrate of the generation 1 line is 320 x 400mm, the size of the glass substrate of the generation 11 line can be achieved, and the size of the glass substrate reaches 3000 x 3320 mm.
A module factory needs to cut the glass substrate according to the size requirement, and then the cut small-sized glass substrate is made into a liquid crystal panel. The process of manufacturing the liquid crystal panel by the cut small-sized glass substrate relates to a plurality of devices with different processes, for example, in the process of attaching the polarizer, tiny glass particles remained on the glass substrate after cutting are continuously accumulated on the surface of a connecting platform of a device unit module in subsequent production and transportation, and the tiny glass particles can cause the problems of scratching, scratching and the like on the glass panel.
SUMMERY OF THE UTILITY MODEL
Based on this, it is necessary to provide a vacuum adsorption platform and a transfer mechanism for solving the problem that glass particles generated during the cutting process are easily accumulated on the surface of the docking platform.
The utility model provides a vacuum adsorption platform, includes the base and locates the vacuum adsorption plate of base, be provided with a plurality of support columns on the vacuum adsorption plate, be formed with the vacuum adsorption chamber in the vacuum adsorption plate, at least part the support column seted up with the absorption hole of vacuum adsorption chamber intercommunication.
Above-mentioned vacuum adsorption platform, support column are used for bearing glass panels, and support column and vacuum adsorption plate's other regions form the height drop for remaining piece drops in vacuum adsorption plate's other regions on the glass panels after the cutting, effectively avoids glass piece accumulation to cause glass panels by fish tail, scratch etc. on vacuum adsorption plate's surface. And the design of the supporting columns enables the contact area of the glass panel and the vacuum adsorption platform to be reduced, and the contact chance of residual debris and the glass panel is reduced.
In one embodiment, the support columns include a first support column, the adsorption holes are opened in the first support column, the first support column is arranged in a matrix of rows and columns, and the first support column in the same row or the same column is correspondingly provided with one vacuum adsorption cavity.
In one embodiment, the vacuum absorption plate comprises a central area and an edge area, the edge area is arranged around the central area, and the first support columns are located in the central area.
In one embodiment, the height of the supporting column is 2 mm-5 mm.
In one embodiment, an interface end communicated with the vacuum adsorption cavity is arranged on the side surface of the vacuum adsorption plate and is used for being communicated with a vacuumizing device.
In one embodiment, the support post is circular in cross-section.
In one embodiment, the support columns are distributed in an array.
In one embodiment, the vacuum absorption plate is provided with a plurality of notches.
In one embodiment, the vacuum adsorption plate is provided with a plurality of mounting holes, and the vacuum adsorption platform further comprises a plurality of connecting pieces, wherein the connecting pieces penetrate through the mounting holes and are connected to the base.
A transfer mechanism comprises the vacuum adsorption platform.
Drawings
FIG. 1 is a schematic diagram of a vacuum chuck stage according to an embodiment;
FIG. 2 is an enlarged view taken at A in FIG. 1;
FIG. 3 is a side view of the vacuum adsorption platform of FIG. 1;
FIG. 4 is an enlarged view at B in FIG. 3;
fig. 5 is a schematic view of the vacuum suction platform shown in fig. 1 with a glass panel placed thereon.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The transfer mechanism is used for transferring workpieces among different stations. The workpiece may be a glass panel or other sheet material such as sapphire.
To facilitate understanding of the specific structure of the transfer mechanism, a glass panel is taken as an example for description. In the production process of the liquid crystal panel, the large-size glass substrate is cut into the small-size glass panel, and the glass panel is transferred to the next procedure after the cutting is finished. The transfer mechanism is used for adsorbing, fixing and transferring the glass panel. Referring to fig. 1, the transfer mechanism specifically includes a vacuum adsorption platform 100 and a moving unit, wherein the moving unit is configured to drive the vacuum adsorption platform 100 to move, so as to transfer the glass panel 200 adsorbed on the vacuum adsorption platform 100 to a next station. It will be appreciated that the movement unit may be in particular a cylinder, a linear motor, a servo motor and a screw nut assembly or a combination of the aforementioned.
Referring to fig. 1 and 2, a vacuum chuck 100 includes a base 10 and a vacuum chuck plate 20 disposed on the base 10. The vacuum adsorption plate 20 is provided with a plurality of support columns 21, a vacuum adsorption cavity 22 is formed in the vacuum adsorption plate 20, and at least part of the support columns 21 are provided with adsorption holes 211 communicated with the vacuum adsorption cavity 22.
Referring to fig. 3 and 4, the supporting columns 21 and the other areas of the vacuum suction platform 100 are formed with recesses b, so that the chips remaining on the cut glass panel 200 fall into the recesses b, thereby effectively preventing the glass panel 200 from being scratched or scratched due to the accumulation of the glass chips on the surface of the vacuum suction plate 20. Moreover, the design of the supporting columns 21 reduces the contact area between the glass panel 200 and the vacuum adsorption platform 100, and reduces the chance of contact between residual debris and the glass panel 200.
In addition, in the connection platform adopting a planar structure design in the prior art, in order to ensure that the glass panel 200 and the connection platform can be completely attached to generate sufficient vacuum adsorption force, the requirement on the processing precision of the connection platform is high, and the flatness of the surface of the connection platform needs to be ensured within the range of-0.05 mm to 0.05 mm. If the flatness of the connection platform does not meet the requirement, the vacuum adsorption force is insufficient, and frequent alarm of the equipment is caused. And the utility model discloses vacuum adsorption platform 100's support column 21 is less with glass panels 200's area of contact, therefore vacuum adsorption platform 100's processing and debugging degree of difficulty greatly reduced can reduce manufacturing cost to improve production efficiency.
Specifically, the cross section of the supporting column 21 may be circular to increase the contact area with the glass panel 200. Meanwhile, a chamfer is processed on the end face of the supporting column 21, so that the glass panel 200 is prevented from being damaged due to the fact that the supporting column 21 forms a sharp structure. It should be noted that the cross section of the supporting column 21 may also be oval.
The support column 21 includes a first support column 21a, the adsorption hole 211 is opened in the first support column 21a, the first support column 21a is arranged in a matrix of rows and columns, and a vacuum adsorption cavity 22 is correspondingly arranged on the first support column 21a in the same row or the same column. The supporting columns 21 not provided with the adsorption holes 211 are only used for supporting, and the first supporting column 21a provided with the adsorption holes 211 is used for supporting and adsorbing the glass panel 200. Each row (column) of the first support columns 21a is correspondingly provided with one vacuum adsorption cavity 22, and the vacuum adsorption platform 100 can be suitable for adsorbing glass panels 200 with different sizes by arranging a plurality of mutually independent vacuum adsorption cavities 22.
Each vacuum adsorption cavity 22 is connected to a vacuum extractor through a pipeline, and a valve is arranged on the pipeline and used for controlling the vacuum adsorption cavity 22 to be connected with or disconnected from the vacuum extractor. In one embodiment, the vacuum chuck table 100 is capable of accommodating 5-15.6 "glass panels 200. When the 15.6 inch glass panel 200 is sucked, all the vacuum suction chambers 22 of the vacuum suction platform 100 are connected to the vacuum extractor to generate a large enough suction force to make the glass panel 200 firmly adhere to the vacuum suction platform 100. When the 5-inch glass panel 200 is sucked, the pipeline of the partial vacuum suction cavity 22 is connected, wherein the suction hole 211 which is not covered by the glass panel 200 is sealed by teflon tape, so as not to affect the suction of the glass panel 200.
The vacuum absorption plate 20 includes a central region 23 and an edge region 24, the edge region 24 is disposed around the central region 23, and the first support columns 21a are located in the central region 23. The vacuum-pumping means sucks air through the suction holes 211 opened on the first support posts 21a located in the central region 23 to form a negative pressure at the suction holes 211, thereby generating a sufficient suction force to suck the glass panel 200. In this embodiment, the support posts 21 located at the edge region 24 support the glass panel 200. With this arrangement, even if the central region 23 is not sufficiently large, the support posts 21 located in the edge region 24 can stably support the glass panel 200. In other words, with this structural arrangement, it is only necessary to consider that the first support post 21a located in the central region 23 can provide a sufficiently large adsorption force, without having to dispose the first support post 21a in a large area, which results in waste of the vacuum source.
The side of the vacuum adsorption plate 20 is provided with an interface end communicated with the vacuum adsorption cavity 22 for communicating with a vacuum extractor. It can be understood that the two opposite sides of the vacuum absorption plate 20 are provided with interface ends, which are respectively connected with the vacuum pumping device through pipelines.
Referring to fig. 4, the height h of the support column 21 is 2mm to 5 mm. The height of the supporting column 21 is not less than 2mm, so that a certain height difference is generated between the supporting column 21 and other areas of the vacuum absorption plate 20 to form a concave part b, and the glass panel 200 is prevented from being scratched by glass particles falling in the concave part b. Meanwhile, the height of the supporting column 21 should not exceed 5mm, so as to avoid increasing the processing difficulty and manufacturing cost of the vacuum absorption plate 20.
The supporting columns 21 are distributed in an array, that is, the supporting columns 21 are uniformly distributed, and the distance between two adjacent supporting columns distributed along the first direction or the second direction is equal, so that uniform supporting force is generated on different areas of the glass panel 200, and the glass panel 200 is prevented from deforming.
Referring to fig. 1 and 5, the vacuum absorption plate 20 is substantially square, and the four opposite corners of the square are respectively provided with notches to form two mutually crossed and perpendicular rectangular carrying surfaces. The dimension of the vacuum adsorption plate 20 extending in the X direction is equal to the dimension of the vacuum adsorption plate 20 extending in the Y direction, so that the rectangular glass panel 200 can be placed on the vacuum adsorption plate 20 in two ways, for example, the length direction of the glass panel 200 may be placed parallel to the X direction or the Y direction.
The vacuum adsorption plate 20 is provided with a plurality of mounting holes 25, and the vacuum adsorption platform 100 further includes a plurality of connecting members, which are inserted into the mounting holes 25 and connected to the base 10.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. The utility model provides a vacuum adsorption platform, its characterized in that includes the base and locates the vacuum adsorption plate of base, be provided with a plurality of support columns on the vacuum adsorption plate, be formed with the vacuum adsorption chamber in the vacuum adsorption plate, at least part the support column seted up with the absorption hole of vacuum adsorption chamber intercommunication.
2. The vacuum adsorption platform of claim 1, wherein the support columns comprise first support columns, the adsorption holes are formed in the first support columns, the first support columns are arranged in a matrix of rows and columns, and one vacuum adsorption cavity is correspondingly formed in the first support column in the same row or the same column.
3. The vacuum suction platform of claim 2, wherein the vacuum suction plate includes a central region and an edge region, the edge region being disposed around the central region, the first support column being located within the central region.
4. The vacuum adsorption platform of claim 1, wherein the height of the support columns is 2mm to 5 mm.
5. The vacuum adsorption platform of claim 1, wherein an interface end communicated with the vacuum adsorption cavity is arranged on a side surface of the vacuum adsorption plate, and the interface end is used for being communicated with a vacuumizing device.
6. The vacuum adsorption platform of claim 1, wherein the support columns are circular in cross-section.
7. The vacuum adsorption platform of claim 1, wherein the support columns are arranged in an array.
8. The vacuum adsorption platform of claim 1, wherein the vacuum adsorption plate is provided with a plurality of notches.
9. The vacuum adsorption platform of claim 1, wherein the vacuum adsorption plate is provided with a plurality of mounting holes, and the vacuum adsorption platform further comprises a plurality of connecting members, wherein the connecting members are inserted into the mounting holes and connected to the base.
10. A relay mechanism comprising a vacuum adsorption platform as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920853217.5U CN210418397U (en) | 2019-06-06 | 2019-06-06 | Vacuum adsorption platform and transfer mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920853217.5U CN210418397U (en) | 2019-06-06 | 2019-06-06 | Vacuum adsorption platform and transfer mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210418397U true CN210418397U (en) | 2020-04-28 |
Family
ID=70374297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920853217.5U Active CN210418397U (en) | 2019-06-06 | 2019-06-06 | Vacuum adsorption platform and transfer mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210418397U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112893372A (en) * | 2021-01-22 | 2021-06-04 | 深圳市诚亿自动化科技有限公司 | Flexible screen terminal wiper mechanism |
-
2019
- 2019-06-06 CN CN201920853217.5U patent/CN210418397U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112893372A (en) * | 2021-01-22 | 2021-06-04 | 深圳市诚亿自动化科技有限公司 | Flexible screen terminal wiper mechanism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4373980B2 (en) | Substrate cutting system and substrate cutting method | |
| US9039867B2 (en) | Method for detaching a semiconductor chip from a foil | |
| CN102050566A (en) | Absorption apparatus | |
| TW201726299A (en) | Conveying mechanism of processing device comprising a chuck table, a processing means, a processing conveyance means, and an indexing conveyance means | |
| JP2013055093A (en) | Adhesive chuck device and adhesion holding method of work-piece | |
| CN210418397U (en) | Vacuum adsorption platform and transfer mechanism | |
| KR101254872B1 (en) | Vacuum suction apparatus | |
| KR20190122281A (en) | Method of attaching substrate and apparatus for attaching substatr | |
| TWI693871B (en) | Vertical continuous etching machine | |
| JP6287547B2 (en) | Inverting device for brittle material substrate | |
| KR100530779B1 (en) | Conveying and dust cleaning apparatus for the substrate | |
| JP6152971B2 (en) | Work holding device | |
| CN104139996A (en) | A metal mask sheet supplying system | |
| KR20200135182A (en) | Suction plate, cutting apparatus and cutting method | |
| TW201801872A (en) | Position determining device for processing object, processing device, position determination method, and manufacturing method of glass plate capable of precisely determining position of processing object relative to supporting portion in short period of time | |
| CN111302062A (en) | Processing platform | |
| KR101812221B1 (en) | Apparatus for stocking work | |
| US20160330883A1 (en) | Assembling apparatus for backlight | |
| JP2008192746A (en) | Carrying tool of article, apparatus and method for reversing article, and apparatus and method for manufacturing flat panel display | |
| JP6256178B2 (en) | Breaking device for brittle material substrate | |
| JP2008122555A (en) | Optical film sticking method and device, and manufacturing method of display panel | |
| KR101571744B1 (en) | Crate for conveying glass panels | |
| KR102476227B1 (en) | panel adsorption transfer device | |
| JP4257784B2 (en) | Thin plate supply apparatus and thin plate supply method using the same | |
| CN218855882U (en) | Panel terminal laser marking alignment mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |