A kind of mask transmission and gauging fixture
Technical field
The utility model belongs to transmission and gauging fixture technical field, relates in particular to a kind of mask transmission and gauging fixture.
Background technology
Mask is a kind of light shield in the mask industry, and it can be with figure transfer to wafer, because this technology is very high to the surface cleanliness and the defective requirement of mask, this has caused very big difficulty just for the cleaning and the inspection of mask.In the production run of general mask, staff must touch mask and just can transmit, and hand will pollute mask during transmission; Simultaneously, layer protecting film can be pasted in the mask surface, easily this diaphragm is staved when mask is checked on instrument.
The utility model content
The purpose of this utility model is to provide a kind of mask transmission and gauging fixture, is intended to solve that mask of the prior art is subject to pollution in one's hands when transmitting and the problem of fragile its surperficial diaphragm when checking.
The utility model is to realize like this, a kind of mask transmission and gauging fixture, it comprises a framework, somely is positioned at being used on the described framework and supports the support member of mask and the keeper of location mask, and the height of described support member is less than the height of described keeper; The one opposite side middle part of described framework outwards is provided with the leader respectively, connects by web member between described handle and the framework.
When transmitting, hold handle, can not touch mask, avoided the pollution of hand mask; When mask is checked, under the effect of big or small plastic pin, can guarantee that the diaphragm on the mask is not damaged on instrument.
Description of drawings
Fig. 1 is the synoptic diagram of the quadra of a kind of mask transmission that provides of the utility model embodiment and gauging fixture;
Fig. 2 is the synoptic diagram of the support member of a kind of mask transmission that provides of the utility model embodiment and gauging fixture;
Fig. 3 is the synoptic diagram of the keeper of a kind of mask transmission that provides of the utility model embodiment and gauging fixture.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Consult shown in Figure 1ly, a kind of mask transmission and gauging fixture that the utility model embodiment provides comprise a quadra 1, several support members 6 and keeper 7, and described support member 6 can be selected little plastic pin for use, and keeper 7 can be selected big plastic pin for use.Described quadra 1 is made by duralumin, and each outwards is provided with leader 5 one opposite side middle part, is connected by web member between described handle 5 and the quadra 1, such as screw; Middle part, four limits of described quadra 1 and four jiaos offer an aperture 3 macropore 2 identical with two respectively, described two macropores 2 are symmetrically set in the both sides of aperture 3, described aperture 3 and support member 6 cooperate, described macropore 2 and keeper 7 cooperate, support member 6 and keeper 7 are fixed on the quadra 1, and the height of wherein said support member 6 is less than the height of keeper 7; Described support member 6 be used for supporting mask, described keeper 7 is used for limiting the position and the physical dimension of mask.
When transmitting, hold handle 5, can not touch mask, avoided the pollution of hand to mask; When mask was checked on instrument, owing to mask is placed on the support member 6, and keeper 7 was higher than support member 6, can guarantee that like this diaphragm on the mask is not damaged when checking.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.