CN112731760A - Metal mask frame fixing support - Google Patents
Metal mask frame fixing support Download PDFInfo
- Publication number
- CN112731760A CN112731760A CN202011541232.XA CN202011541232A CN112731760A CN 112731760 A CN112731760 A CN 112731760A CN 202011541232 A CN202011541232 A CN 202011541232A CN 112731760 A CN112731760 A CN 112731760A
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- China
- Prior art keywords
- metal mask
- mask frame
- groove
- air
- base
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 45
- 239000002184 metal Substances 0.000 title claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 239000000725 suspension Substances 0.000 claims abstract description 11
- 238000007664 blowing Methods 0.000 claims abstract description 7
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention belongs to the technical field of metal masks, and particularly relates to a metal mask frame fixing support which comprises a base, wherein the edge of the base is provided with an outwardly extending skirt edge, the center of the base is provided with a square clamping groove, the inner walls of two sides of the clamping groove are respectively provided with a square cavity in the same shape as the clamping groove, a clamping mechanism is arranged in the square cavity, the clamping mechanism penetrates through the inner walls of two sides of the clamping groove and extends into the clamping groove, the bottom of the clamping groove is provided with a suspension mechanism, an air blowing mechanism is further arranged in the base and is arranged at the center of the clamping groove, and the air blowing mechanism, the clamping mechanism and the suspension mechanism are communicated. Has the advantages that: the invention can conveniently and quickly fix the metal mask frame, improve the stability of the metal mask frame in subsequent processing, simultaneously prevent the interference of foreign objects, control the processed sundries to a certain degree and have higher processing efficiency and quality.
Description
Technical Field
The invention belongs to the technical field of metal masks, and particularly relates to a metal mask frame fixing support.
Background
The photomask is also called a mask plate, a mask pattern structure is formed on a transparent substrate by an opaque shading film, the pattern structure can be obtained by plate making process, and common processing equipment is direct-writing photoetching equipment, such as a laser direct-writing photoetching machine, an electron beam photoetching machine and the like.
In the finish machining process of the mask frame, if the mask frame is directly contacted with a working surface, the precise and fragile device of the mask is difficult to ensure not to be scratched, and at present, the common technical scheme of the problem is that a plate is simply found to be under the pad and is simply fixed or not fixed, and the simple support is adopted to easily shift, so that the subsequent machining is not facilitated.
Therefore, we propose a metal mask frame fixing bracket to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and provides a metal mask frame fixing support which can have higher processing efficiency and quality.
In order to achieve the purpose, the invention adopts the following technical scheme: the utility model provides a metal mask version frame fixed bolster, includes the base, the edge of base is equipped with the shirt rim of outside extension, the center department of base is equipped with square draw-in groove, all be equipped with the type chamber of returning with it with the shape in the both sides inner wall of draw-in groove, it is equipped with chucking mechanism to return the type intracavity, chucking mechanism runs through the both sides inner wall of draw-in groove and extends to wherein, the bottom of draw-in groove is equipped with suspension mechanism, still be equipped with blower mechanism in the base, blower mechanism sets up in the center department of draw-in groove, blower mechanism and chucking mechanism and suspension mechanism all communicate the setting.
In foretell metal mask version frame fixed bolster, chucking mechanism is including the gasbag of fixed packing in returning the die cavity, fixedly connected with outer tube on the outer wall of gasbag, the intraductal swing joint of outer tube has interior sleeve pipe, it has compressed air to fill between interior sleeve pipe and the outer tube, the soft section of fixedly connected with rubber on the interior sleeve pipe, interior sleeve pipe runs through the inner wall of draw-in groove and extends to wherein.
In the metal mask frame fixing support, the rubber soft section is also fixedly connected with a contact, and the tip of the contact is rotatably connected with a ball.
In foretell metal mask version frame fixed bolster, suspension mechanism is including setting up in the heavy groove of draw-in groove bottom, the sealed fixedly connected with rubber tie plate in top in heavy groove, rubber tie plate is located interior sheathed tube below, a plurality of fumaroles have been seted up to rubber tie plate's bottom.
In the metal mask frame fixing support, the section of the gas orifice is funnel-shaped, and the wide opening of the gas orifice is positioned below the narrow opening.
In the metal mask frame fixing support, the blowing mechanism comprises a cavity arranged in the base, a pumping assembly is arranged in the cavity, a vent hole is arranged in the base, and the vent hole is communicated with the hollow cavity, the air bag, the sink and the cavity.
In foretell metal mask version frame fixed bolster, the pump gas subassembly is including inlaying the cover shell on the cavity top surface, the cover shell up end is the bowl form, is equipped with the screw thread on the wall of bowl form terminal surface, the bottom of cover shell bowl form terminal surface is equipped with the first filter screen of opening and fixedly connected with, threaded connection has the second filter screen on the up end of cover shell, the bottom of cover shell is run through and is equipped with the air pump.
In the metal mask frame fixing support, the aperture of the first filter screen is 1-1.5mm, and the aperture of the second filter screen is 4-5 mm.
Compared with the prior art, the metal mask frame fixing support has the advantages that:
1. according to the invention, through the matching of the clamping groove and the clamping groove, the air jet hole, the air pump and the air bag, the effect that the metal mask plate frame is lifted to a certain extent through the air jet hole under the action of the pump air of the air pump is achieved, so that the metal mask plate frame is not directly contacted with the bottom of the clamping groove, and meanwhile, the contact is driven to clamp the side surface of the metal mask plate frame by utilizing the volume change of the air bag, so that the lifting force of the bottom is counteracted, the surface of the metal mask plate frame is not pressurized, the damage to the plate surface of the metal mask plate frame is effectively reduced during operation, and the phenomena of deviation and the.
2. The air pump is matched with the first filter screen and the second filter screen, so that when the air pump works, impurities generated during the work are sucked and brought into the surface of the first filter screen by the sucked air and tightly adsorb the column, and meanwhile, the tiny impurities are prevented from permeating through the finer holes of the second filter screen, so that the smoothness of the operating table top can be better kept, and the quality of the work during the operation can be further improved.
Drawings
FIG. 1 is a cross-sectional view of a metal mask frame fixing bracket according to the present invention;
FIG. 2 is an external structural view of FIG. 1;
FIG. 3 is an exploded schematic view of the pumping assembly of FIG. 1;
FIG. 4 is a schematic view of the bladder of FIG. 1;
fig. 5 is a schematic structural view of the chucking mechanism in fig. 1.
In the figure, 1 base, 2 clamping grooves, 3 returning cavities, 4 clamping mechanisms, 5 suspending mechanisms, 6 air blowing mechanisms, 7 air bags, 8 outer sleeves, 9 inner sleeves, 10 rubber soft sections, 11 contacts, 12 balls, 13 sinking grooves, 14 rubber base plates, 15 air injection holes, 16 chambers, 17 air pumping assemblies, 18 casings, 19 first filter screens, 20 second filter screens and 21 air pumps.
Detailed Description
The following examples are for illustrative purposes only and are not intended to limit the scope of the present invention.
Examples
As shown in fig. 1-5, a metal mask frame fixing support comprises a base 1, wherein an outwardly extending skirt edge is arranged at the edge of the base 1, the skirt edge is used for being better fixed with external equipment, a square clamping groove 2 is arranged at the center of the base 1, and a clip cavity 3 having the same shape as the clamping groove 2 is arranged in the inner walls of the two sides of the clamping groove 2, so that an island terrace is generated at the center of the base 1.
The clamping mechanism 4 is arranged in the die cavity 3, the clamping mechanism 4 penetrates through the inner walls of two sides of the clamping groove 2 and extends into the die cavity, the clamping mechanism 4 comprises an air bag 7 fixedly filled in the die cavity 3, the air bag 7 is fixed on the inner wall of the die cavity 3, an outer sleeve 8 is fixedly connected on the outer wall of the air bag 7, an inner sleeve 9 is movably connected in the outer sleeve 8, the outer sleeve 8 is clamped with the inner sleeve 9, compressed air is filled between the inner sleeve 9 and the outer sleeve 8, the outer sleeve 8 and the compressed air provide certain redundancy after the inner sleeve 9 is extruded, a rubber soft section 10 is fixedly connected on the inner sleeve 9, the rubber soft section 10 can provide redundancy for the inner sleeve 9 together by matching with the compressed air, a contact 11 is also fixedly connected on the rubber soft section 10, the contact 11 is made of aluminum alloy, the tip of the contact 11 is rotatably connected with a ball 12, and the ball, the inner sleeve 9 extends through the inner wall of the clamping groove 2 and extends into it.
The bottom of draw-in groove 2 is equipped with suspension mechanism 5, still be equipped with blower mechanism 6 in the base 1, blower mechanism 6 sets up in the center department of draw-in groove 2, blower mechanism 6 all communicates the setting with chucking mechanism 4 and suspension mechanism 5, suspension mechanism 5 is including setting up in the heavy groove 13 of draw-in groove 2 bottom, the sealed fixedly connected with rubber backing plate 14 in top of heavy groove 13, rubber backing plate 14 is embedded to have the wire muscle to make its surface keep soft end but not easy bending deformation, rubber backing plate 14 is located interior sleeve pipe 9's below, a plurality of fumaroles 15 have been seted up to rubber backing plate 14's bottom, fumaroles 15's section is hopper-shaped and is used for spouting more highly compressed gas, fumaroles 15's wide-mouthed below is located.
The air blowing mechanism 6 comprises a chamber 16 arranged in the base 1, a pump air assembly 17 is arranged in the chamber 16, the pump air assembly 17 comprises a casing 18 embedded on the top surface of the chamber 16, the upper end surface of the casing 18 is bowl-shaped, threads are arranged on the wall of the bowl-shaped end surface, the bottom of the bowl-shaped end surface of the casing 18 is provided with an opening and is fixedly connected with a first filter screen 19, the first filter screen 19 is used for blocking large-diameter particles, the upper end surface of the casing 18 is in threaded connection with a second filter screen 20 for blocking small-diameter particles, the aperture of the first filter screen 18 is 1-1.5mm, the aperture of the second filter screen 19 is 4-5mm, the bottom of the casing 18 is provided with an air pump 21 in a penetrating way, an air vent is arranged in the base 1 and communicated with the square cavity 3, the air bag 7, the sink 13 and the chamber 16, and the chamber 21, when the air pump 21 works, the sucked air sucks, while preventing penetration of more minute impurities through the finer pores of the second screen 20.
When the metal mask frame is used, an operator firstly places the metal mask frame in the clamping groove 2, the metal mask frame is arranged on the rubber base plate 14, then the air pump 21 is started, the air pump 21 is pumped into the chamber 16 through the first filter screen 19 and the second filter screen 20 and then enters the plurality of die returning cavities 3, the air bag 7 is gradually inflated to gradually clamp and fix the contact 11 on the side wall of the metal mask frame, along with the increase of clamping and fixing force, the gas sprayed out of the air injection holes 15 gradually suspends the metal mask frame, and when the stress mutually reaches balance, the metal mask frame is stable, at the moment, the metal mask frame can be processed, the metal mask frame slightly sinks under the stress during processing, other parts of the metal mask frame and the metal mask frame cannot be directly extruded during the motion process, when the air pump 21 works, the sucked gas sucks impurities generated during the work and brings the impurities into the surface of the first filter screen 19 to tightly adsorb columns, simultaneously, more tiny impurities can be prevented from permeating through more delicate holes of the second filter screen 20, and after the operation is finished, the air pump 21 slowly sucks in the reverse direction slowly, so that the contact 11 is taken into the base 1, and the processed metal mask frame can be taken out conveniently.
Although the terms of the base 1, the clamping groove 2, the back molding cavity 3, the clamping mechanism 4, the suspending mechanism 5, the blowing mechanism 6, the airbag 7, the outer sleeve 8, the inner sleeve 9, the soft rubber section 10, the contact 11, the ball 12, the sink 13, the rubber pad 14, the air injection hole 15, the chamber 16, the air pumping assembly 17, the casing 18, the first filter screen 19, the second filter screen 20, the air pump 21, etc. are used more frequently, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.
Claims (8)
1. The utility model provides a metal mask version frame fixed bolster, includes base (1), its characterized in that, the edge of base (1) is equipped with outside extended shirt rim, the center department of base (1) is equipped with square draw-in groove (2), all be equipped with return die cavity (3) with it with the shape in the both sides inner wall of draw-in groove (2), be equipped with chucking mechanism (4) in returning die cavity (3), chucking mechanism (4) run through the both sides inner wall of draw-in groove (2) and extend to wherein, the bottom of draw-in groove (2) is equipped with suspension mechanism (5), still be equipped with air-blast mechanism (6) in base (1), air-blast mechanism (6) set up in the center department of draw-in groove (2), air-blast mechanism (6) and chucking mechanism (4) and suspension mechanism (5) all communicate the setting.
2. The metal mask frame fixing support according to claim 1, wherein the clamping mechanism (4) comprises an air bag (7) fixedly filled in the die cavity (3), an outer sleeve (8) is fixedly connected to the outer wall of the air bag (7), an inner sleeve (9) is movably connected to the inner sleeve (8), compressed air is filled between the inner sleeve (9) and the outer sleeve (8), a rubber soft section (10) is fixedly connected to the inner sleeve (9), and the inner sleeve (9) penetrates through the inner wall of the clamping groove (2) and extends into the clamping groove.
3. The metal mask frame fixing support according to claim 2, wherein a contact (11) is further fixedly connected to the rubber soft section (10), and a ball (12) is rotatably connected to a tip of the contact (11).
4. The metal mask frame fixing support according to claim 2, wherein the suspension mechanism (5) comprises a sinking groove (13) formed in the bottom of the clamping groove (2), the top of the sinking groove (13) is fixedly connected with a rubber base plate (14) in a sealing mode, the rubber base plate (14) is located below the inner sleeve (9), and a plurality of air injection holes (15) are formed in the bottom of the rubber base plate (14).
5. The metal mask frame fixing support according to claim 4, wherein the gas injection hole (15) has a funnel-shaped cross section, and the wide mouth of the gas injection hole (15) is located below the narrow mouth.
6. The metal mask frame fixing support according to claim 4, wherein the blowing mechanism (6) comprises a cavity (16) arranged in the base (1), an air pumping assembly (17) is arranged in the cavity (16), a vent hole is arranged in the base (1), and the vent hole is communicated with the die returning cavity (3), the air bag (7), the sinking groove (13) and the cavity (16).
7. The metal mask frame fixing support according to claim 6, wherein the air pump assembly (17) comprises a casing (18) embedded on the top surface of the chamber (16), the upper end surface of the casing (18) is bowl-shaped, threads are arranged on the wall of the bowl-shaped end surface, the bottom of the bowl-shaped end surface of the casing (18) is provided with an opening and fixedly connected with a first filter screen (19), the upper end surface of the casing (18) is in threaded connection with a second filter screen (20), and an air pump (21) is arranged at the bottom of the casing (18) in a penetrating manner.
8. The metal mask frame fixing support according to claim 7, wherein the first filter (18) has a pore size of 1-1.5mm, and the second filter (19) has a pore size of 4-5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011541232.XA CN112731760A (en) | 2020-12-23 | 2020-12-23 | Metal mask frame fixing support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011541232.XA CN112731760A (en) | 2020-12-23 | 2020-12-23 | Metal mask frame fixing support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112731760A true CN112731760A (en) | 2021-04-30 |
Family
ID=75604678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011541232.XA Pending CN112731760A (en) | 2020-12-23 | 2020-12-23 | Metal mask frame fixing support |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112731760A (en) |
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| CN111390603A (en) * | 2020-03-25 | 2020-07-10 | 成都飞机工业（集团）有限责任公司 | Vacuum adsorption tool for sheet parts and numerical control machining clamping method for sheet parts |
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