CN209118053U - A kind of mask plate striped inspection auxiliary clamp - Google Patents
A kind of mask plate striped inspection auxiliary clamp Download PDFInfo
- Publication number
- CN209118053U CN209118053U CN201822195058.2U CN201822195058U CN209118053U CN 209118053 U CN209118053 U CN 209118053U CN 201822195058 U CN201822195058 U CN 201822195058U CN 209118053 U CN209118053 U CN 209118053U
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- mask plate
- fixture
- support body
- cross bar
- sliding block
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Abstract
The utility model discloses a kind of mask plate stripeds to check auxiliary clamp, solves the problems, such as that existing craft holds flashlight and examines scratching products risk during striped very big and uncontrollable.The utility model includes the pedestal of " U-shaped ", pedestal two sides pass through first bearing and are connected with support body, for fixing mask plate between two support bodies, the fixture for connecting two support bodies is provided on two support bodies, fixture is a cross bar, and cross bar two sides are provided with fixture block, fixture size, which is coincide, to be buckled on two support bodies and moves along support body axial direction；Cross bar bottom is provided with sliding slot, and sliding block is provided on sliding slot, and sliding slot is protruded in sliding block one end, and slider bottom two sides are connected with link block by elastic device, second bearing is provided between two link blocks, is provided with light source in second bearing；Through the down-set axis hole in protrusion part of sliding block, for placing jackscrew in axis hole, and jackscrew adjusts light source at a distance from mask plate by screwing in or screwing out axis hole.
Description
Technical field
The utility model relates to mask plate manufacturing technology fields, and in particular to a kind of mask plate striped inspection auxiliary clamp.
Background technique
With more and more domestic display panel manufacturers volume production TFT LCD five generations line, the demand of photomask is close several
Year rises while great-jump-forward will be presented.Photomask board is the ideal photonasty blank plate for making fine light mask pattern, passes through photoetching
Mask-making technology can obtain required photomask board.Currently, mask plate strip flaw is always the difficulty of TFT mask defects control
Point, the current method of inspection of industry are to use specific wavelength flashlight, product irradiation film surface and non-membrane surface, rely on people from multiple angles
Naked eyes examine striped.
However, flashlight can be very close apart from mask plate, about in 10mm, as mask plate size is got over when examining striped
Come bigger, especially G10 has reached 1620x1780 oversize for mask plate, holds flashlight by employee and examines striped
Method is less applicable in, because the risk of scratching products is very big and uncontrollable in employee's operating process, due to exposure mask
Version price is very expensive, once scratch situation occurs can bring huge property loss to company, so very urgent need
A kind of new striped method of inspection replaces hand-held to examine.
Utility model content
It is scratched the technical problem to be solved by the utility model is to existing craft is held during flashlight examines striped
The risk of product is very big and uncontrollable problem, the utility model provide a kind of mask plate striped to solve the above problems
Check auxiliary clamp, reduce naked eyes when seeing striped personnel collide with caused by product risk, utilize this auxiliary partial-automatic checker
Equipment carrys out indirect labor's visual inspection striped, reduces risk of colliding with caused by personnel's misoperation.
The utility model is achieved through the following technical solutions:
A kind of mask plate striped inspection auxiliary clamp, the pedestal including " U-shaped ", the pedestal two sides pass through first bearing
It is connected with support body, is used to fix mask plate between two support bodies, be provided on two support bodies for connecting
The fixture of two support bodies, the fixture are a cross bar, and the cross bar two sides are provided with fixture block, the fixture it is big
Small coincide is buckled on two support bodies and moves along the support body axial direction；The cross bar bottom is provided with cunning
Slot is provided with sliding block on the sliding slot, and the sliding slot is protruded in described sliding block one end, and the slider bottom two sides pass through elastic device
It is connected with link block, second bearing is provided between two link blocks, is provided with light source in the second bearing；Through institute
The down-set axis hole in protrusion part of sliding block is stated, is used to place jackscrew in the axis hole, and the jackscrew is by screwing in or revolving
The axis hole adjusts the light source at a distance from mask plate out.
The principle of the utility model above scheme is: when due to examining striped, flashlight can be very close apart from mask plate, greatly
About in 10mm, as mask plate size is increasing, especially G10 has reached 1620x1780 oversize for mask plate, leans on
Employee holds the method that flashlight examines striped and is less applicable in, because the risk of scratching products is very in employee's operating process
It is big and uncontrollable, since mask plate price is very expensive, once scratch situation occurs can bring huge property to company
Loss, the utility model passes through using the above scheme to be passed through first bearing in the pedestal two sides of " U-shaped " first and is connected with bracket
Body, for fixing mask plate to be checked between two support bodies, which can carry as equipment body structure is checked
1620*1780 mask plate product；Then, the fixture for connecting two support bodies is provided on two support bodies, fixture is
One cross bar, and cross bar two sides are provided with fixture block guarantees that fixture size is coincide and is buckled on two support bodies and can be along described
Support body axial direction is mobile, convenient for fixture along the adjusting in support body direction；In addition, cross bar bottom is provided with sliding slot, on sliding slot
It is provided with sliding block, the sliding slot is protruded in sliding block one end, and the slider bottom two sides are connected with link block by elastic device, and two
It is provided with second bearing between the link block, is provided with light source in the second bearing, through the protrusion part of the sliding block
Down-set axis hole, the axis hole is interior for placing jackscrew, and jackscrew adjusts the light by screwing in or screwing out the axis hole
Source is at a distance from mask plate, and tune close to sources is with a distance from mask plate when screwing in jackscrew, and tune distance light source is from exposure mask when screwing out jackscrew
The distance of version, while the sliding slot by sliding block along cross bar bottom moves convenient for along the adjusting in cross bar direction；In conjunction with fixture along bracket
The adjusting in body direction and sliding block along the chute direction adjusting come realize light source in the integrally-regulated of entire mask plate top position, into
And it is adjusted using the accurate distance that jackscrew adjusts the light source and mask plate by screwing in or screwing out the axis hole；This is practical
New structure is simple, easy for operation, realizes partial-automatic checker and carrys out indirect labor's visual inspection striped, reduces personnel's operation
It collides with caused by improper risk.
Further, the support body is the body of rod of strip, and the side of two support body faces is provided with card
Slot is provided with deck on the card slot, and described deck one end, which has, sticks into portion with what the card slot size was used cooperatively, and deck exists
It can steadily be moved along card slot direction in card slot, meet the adjusting of different scale mask plate；The other end is provided with for fixing
The plummer of mask plate facilitates the placement and fixation of mask plate to be checked.
Further, the card slot shape be swallow-tail form, and the card slot extended to along the support body from one end it is another
End, swallow-tail form card slot ensure that the stable cooperation for sticking into portion and card slot of deck；The quantity of the card slot upper blocking seat is arranged two,
There are two deck on card slot in this way on the support body of two sides, in total there are four deck, corresponding four plummers on four decks,
Steadily carry four angles of mask plate, mask plate is only with being placed on plummer, by four decks to intermediate mobile tune
Section carrys out clamping, avoids the damage that mask plate is directly caused using clamping class equipment.
Further, the distance between on the inside of no more than two support bodies of the length of the sliding slot, guarantee light source
Irradiation can cover the mask plate in sliding slot direction, it is preferable that small between two support bodies insides using the length of sliding slot
Distance.
Further, the elastic device avoids being swung left and right using spring conducive to the stabilization of light source, while cooperating top
Spring smoothly restores the effect extended after silk smoothly compresses after screwing in axis hole, and jackscrew screws out axis hole.
The utility model has the following advantages and benefits:
1, the utility model passes through first bearing in the pedestal two sides of " U-shaped " and is connected with support body, two support bodies it
Between for fixing mask plate to be checked, which can carry 1620*1780 mask plate as equipment body structure is checked
Product；
2, the utility model is provided with the fixture for connecting two support bodies on two support bodies, and fixture is a cross
Bar, and cross bar two sides are provided with fixture block guarantees that fixture size is coincide and is buckled on two support bodies and can be along the support body
Axial direction is mobile, convenient for fixture along the adjusting in support body direction；
3, the utility model jackscrew adjusts the light source at a distance from mask plate by screwing in or screwing out the axis hole,
Tune close to sources is with a distance from mask plate when screwing in jackscrew, and tune distance light source passes through simultaneously with a distance from mask plate when screwing out jackscrew
Sliding slot of the sliding block along cross bar bottom moves convenient for along the adjusting in cross bar direction；
4, the utility model structure is simple, easy for operation, adjusting and sliding block edge in conjunction with fixture along support body direction
The adjusting in sliding slot direction come realize light source in the integrally-regulated of entire mask plate top position, and then using jackscrew by screwing in or
Person screws out the axis hole to adjust the accurate distance of the light source and mask plate and adjust, and realizes partial-automatic checker and carrys out indirect labor
Visual inspection striped reduces risk of colliding with caused by personnel's misoperation.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the utility model embodiment, constitutes the one of the application
Part does not constitute the restriction to the utility model embodiment.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the portion the A enlarged drawing of the utility model.
Fig. 3 is that the elastic device of the utility model is vertically connected with figure.
Label and corresponding parts title in attached drawing:
1- pedestal, 2- first bearing, 3- support body, 4- cross bar, 5- fixture block, 6- sliding slot, 7- sliding block, 8- elastic device, 9-
Link block, 10- second bearing, 11- light source, 12- jackscrew, 13- card slot, 14- deck, 15- mask plate.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, below with reference to embodiment and attached drawing,
The utility model is described in further detail, and the exemplary embodiment and its explanation of the utility model are only used for explaining this
Utility model is not intended to limit the scope of the present invention.
Embodiment
As shown in Figure 1 to Figure 3, a kind of mask plate striped checks auxiliary clamp, the pedestal 1 including " U-shaped ", the pedestal 1
Two sides pass through first bearing 2 and are connected with support body 3, are used to fix mask plate 15, the bracket between two support bodies 3
Body 3 is the body of rod of strip, and the side of two 3 faces of support body offers card slot 13, is provided on the card slot 13
Deck 14, described 14 one end of deck have with 13 size of card slot be used cooperatively stick into portion, the other end is provided with for solid
Determine the plummer of mask plate 15, the deck 14 is caught in from the both ends card slot 13 of support body 3 by sticking into portion, and deck 14 exists
It can steadily be moved along 13 direction of card slot in card slot 13, meet the adjusting of different scale mask plate 15, and 14 other end of deck
It is provided with the plummer for fixing mask plate 15, facilitates the placement and fixation of mask plate 15 to be checked；Two support bodies 3
On be provided with fixture for connecting two support bodies 3, the fixture is a cross bar 4, and 4 two sides of the cross bar are arranged
There is fixture block 5, the size of the fixture, which is coincide, to be buckled on two support bodies 3 and move along 3 axial direction of support body；
4 bottom of cross bar is provided with sliding slot 6, and sliding block 7 is provided on the sliding slot 6, and the sliding slot 6, institute are protruded in described 7 one end of sliding block
It states 7 two sides of the bottom of sliding block and link block 9 is connected with by elastic device 8,8 one end of elastic device is welded on 7 bottom of sliding block, the other end
It is welded on link block 9, second bearing 10 is provided between two link blocks 9, is provided with light in the second bearing 10
Source 11；Through the down-set axis hole in protrusion part of the sliding block 7, for placing jackscrew 12, and the jackscrew in the axis hole
12 adjust the light source 11 by screwing in or screwing out the axis hole at a distance from mask plate 15；
13 shape of card slot is swallow-tail form, and the card slot 13 extends to the other end, swallow from one end along the support body 3
Tail shape card slot 13 ensure that the stable cooperation for sticking into portion and card slot 13 of deck 14；The quantity of 13 upper blocking seat 14 of card slot is arranged
Two, there are two decks 14 on the card slot 13 on such two sides support body 3, in total there are four deck 14, on four decks 14
Corresponding four plummers, steadily carry four angles of mask plate 15, mask plate 15, with being placed on plummer, pass through four
Deck 14 carrys out clamping to intermediate mobile adjusting, avoids the damage that mask plate 15 is directly caused using clamping class equipment；
The length of the sliding slot 6 guarantees the irradiation energy of light source 11 no more than the distance between two described 3 insides of support body
Cover the mask plate 15 in 6 direction of sliding slot, it is preferable that small between two 3 insides of support body using the length of sliding slot 6
Distance；
The elastic device 8 uses spring, and spring one end is welded on 7 bottom of sliding block, the other end is welded on link block 9,
It conducive to the stabilization of light source 11, avoids being swung left and right, while smoothly being compressed after cooperating jackscrew 12 to screw in axis hole, and jackscrew 12 screws out axis
Spring smoothly restores the effect of elongation behind hole.
Working principle is: the utility model passes through using the above scheme passes through first in 1 two sides of pedestal of " U-shaped " first
Bearing 2 is connected with support body 3, is used to fix mask plate 15 to be checked between two support bodies 3, the support body 3 is as inspection
Equipment body structure can carry 1620*1780 mask plate product；Then, it is provided on two support bodies 3 for connecting two
The fixture of a support body 3, fixture is a cross bar 4, and 4 two sides of cross bar are provided with fixture block 5, guarantees that fixture size is coincide and is buckled in
It can move on two support bodies 3 and along 3 axial direction of support body, convenient for fixture along the adjusting in 3 direction of support body；Separately
Outside, 4 bottom of cross bar is provided with sliding slot 6, and sliding block 7 is provided on sliding slot 6, and the sliding slot 6,7 bottom of sliding block are protruded in 7 one end of sliding block
Portion two sides are connected with link block 9 by elastic device 8, are provided with second bearing 10 between two link blocks 9, and described second
Light source 11 is provided on bearing 10, for placing top in the down-set axis hole in protrusion part of the sliding block 7, the axis hole
Silk 12, jackscrew 12 adjusts the light source 11 by screwing in or screwing out the axis hole at a distance from mask plate 15, screws in jackscrew
Tune close to sources 11 is with a distance from mask plate 15 when 12, and tune distance light source 11 is with a distance from mask plate 15 when screwing out jackscrew 12, simultaneously
Sliding slot 6 by sliding block 7 along 4 bottom of cross bar moves convenient for along the adjusting in 4 direction of cross bar；In conjunction with fixture along 3 direction of support body
Adjust and sliding block 7 along the chute 6 directions adjusting come realize light source 11 in the integrally-regulated of entire 15 top position of mask plate, in turn
It is adjusted using the accurate distance that jackscrew 12 adjusts the light source 11 and mask plate 15 by screwing in or screwing out the axis hole.
Use process is: firstly, the good support body 3 of installation settings, branch is adjusted by movement of the deck 14 in card slot 13
The positional relationship of card slot 13 and deck 14 on frame body 3, enables mask plate 15 to be put between support body 3；Secondly, in four corresponding cards
Mask plate 15 to be detected is put on the plummer of seat 14, and keeps mask plate 15 appropriate by the position of slidable adjustment deck 14
Firmly place；Then, fixture cross bar 4 is put, and is moved by fixture block 5 on two support bodies 3 to adjust along support body 3
The position in direction；Finally, screwing in or screwing out axis hole by jackscrew 12 to adjust light source 11 at a distance from mask plate 15, top is screwed in
Tune close to sources 11 is with a distance from mask plate 15 when silk 12, and tune distance light source 11 is with a distance from mask plate 15 when screwing out jackscrew 12, together
When sliding slot 6 by sliding block 7 along 4 bottom of cross bar move convenient for along the adjusting in 4 direction of cross bar；The utility model structure is simple, grasps
Make easy to use, realizes partial-automatic checker and carry out indirect labor's visual inspection striped, reduce and collide with caused by personnel's misoperation
Risk.
Above-described specific embodiment, to the purpose of this utility model, technical scheme and beneficial effects carried out into
One step is described in detail, it should be understood that being not used to limit the foregoing is merely specific embodiment of the present utility model
Determine the protection scope of the utility model, within the spirit and principle of the utility model, any modification for being made equally is replaced
It changes, improve, should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of mask plate striped checks auxiliary clamp, the pedestal (1) including " U-shaped ", pedestal (1) two sides pass through first
Bearing (2) is connected with support body (3), it is characterised in that: for fixing mask plate (15) between two support bodies (3), two
The fixture for connecting two support bodies (3) is provided on a support body (3), the fixture is a cross bar (4),
And cross bar (4) two sides are provided with fixture block (5), the size of the fixture coincide be buckled on two support bodies (3) and
It is mobile along the support body (3) axial direction；Cross bar (4) bottom is provided with sliding slot (6), is provided on the sliding slot (6)
The sliding slot (6) is protruded in sliding block (7), described sliding block (7) one end, and sliding block (7) two sides of the bottom are connected by elastic device (8)
Have link block (9), is provided with second bearing (10) between two link blocks (9), is provided on the second bearing (10)
Light source (11)；Through the down-set axis hole in protrusion part of the sliding block (7), for placing jackscrew (12) in the axis hole, and
The jackscrew (12) adjusts the light source (11) by screwing in or screwing out the axis hole at a distance from mask plate (15).
2. a kind of mask plate striped according to claim 1 checks auxiliary clamp, it is characterised in that: the support body (3)
Side for the body of rod of strip, two support body (3) faces is provided with card slot (13), is arranged on the card slot (13)
Have deck (14), described deck (14) one end, which has, sticks into portion, other end setting with what the card slot (13) size was used cooperatively
There is the plummer for fixing mask plate (15).
3. a kind of mask plate striped according to claim 2 checks auxiliary clamp, it is characterised in that: card slot (13) shape
Shape is swallow-tail form, and the card slot (13) extends to the other end from one end along the support body (3)；Card on the card slot (13)
The quantity of seat (14) is arranged two.
4. a kind of mask plate striped according to claim 1 checks auxiliary clamp, it is characterised in that: the sliding slot (6)
The distance between on the inside of no more than two support bodies (3) of length.
5. a kind of mask plate striped according to claim 1 checks auxiliary clamp, it is characterised in that: the elastic device
(8) spring is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822195058.2U CN209118053U (en) | 2018-12-26 | 2018-12-26 | A kind of mask plate striped inspection auxiliary clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822195058.2U CN209118053U (en) | 2018-12-26 | 2018-12-26 | A kind of mask plate striped inspection auxiliary clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209118053U true CN209118053U (en) | 2019-07-16 |
Family
ID=67208607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822195058.2U Active CN209118053U (en) | 2018-12-26 | 2018-12-26 | A kind of mask plate striped inspection auxiliary clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209118053U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345525A (en) * | 2020-11-23 | 2021-02-09 | 深圳清溢光电股份有限公司 | MASK visual inspection machine |
| CN112731760A (en) * | 2020-12-23 | 2021-04-30 | 江苏高光半导体材料有限公司 | Metal mask frame fixing support |
| CN112873082A (en) * | 2020-12-23 | 2021-06-01 | 江苏高光半导体材料有限公司 | Metal mask frame safety clamp |
| CN114248424A (en) * | 2020-09-25 | 2022-03-29 | 佛山市盟思拉伸机械有限公司 | Film longitudinal thermal orthopedic device and method |
-
2018
- 2018-12-26 CN CN201822195058.2U patent/CN209118053U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114248424A (en) * | 2020-09-25 | 2022-03-29 | 佛山市盟思拉伸机械有限公司 | Film longitudinal thermal orthopedic device and method |
| CN112345525A (en) * | 2020-11-23 | 2021-02-09 | 深圳清溢光电股份有限公司 | MASK visual inspection machine |
| CN112731760A (en) * | 2020-12-23 | 2021-04-30 | 江苏高光半导体材料有限公司 | Metal mask frame fixing support |
| CN112873082A (en) * | 2020-12-23 | 2021-06-01 | 江苏高光半导体材料有限公司 | Metal mask frame safety clamp |
| CN112873082B (en) * | 2020-12-23 | 2022-05-17 | 江苏高光半导体材料有限公司 | Metal mask frame safety clamp |
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